CN114993234A - Gravity angle sensor and calibration method thereof - Google Patents
Gravity angle sensor and calibration method thereof Download PDFInfo
- Publication number
- CN114993234A CN114993234A CN202210538146.6A CN202210538146A CN114993234A CN 114993234 A CN114993234 A CN 114993234A CN 202210538146 A CN202210538146 A CN 202210538146A CN 114993234 A CN114993234 A CN 114993234A
- Authority
- CN
- China
- Prior art keywords
- strain
- gravity
- differential
- flexible spring
- angle sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/32—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring the deformation in a solid
Abstract
The invention discloses a gravity angle sensor and a calibration method thereof, belongs to the technical field of sensors manufactured by mechanical precision and is used for solving the technical problem that a low-cost, stable-performance and high-precision gravity sensor is lacked in the existing robot polishing operation. The gravity angle sensor includes: the sensor comprises a sensor body, a flexible spring piece assembly, a differential strain measurement unit and a mass block. Adopt low-cost flexible construction and difference strain sensor as basic component, the elastic deformation of flexible construction is used for reacting the gravity component change that sensor work attitude change leads to, utilizes difference strain sensor to measure the elastic deformation change of flexible construction simultaneously, and difference form strain sensor can be effectively taken off and external disturbance such as temperature drift is resisted, realizes the strain measurement of high accuracy, and then realizes the gravity angle measurement of high accuracy. The gravity angle sensor has the advantages of low cost, high measurement precision, adaptability to severe working conditions and the like.
Description
Technical Field
The invention belongs to the technical field of sensors manufactured by mechanical precision, and particularly relates to a gravity angle sensor and a calibration method thereof.
Background
The robot polishes and needs the compensation gravity, and the present scheme mainly adopts attitude sensor to acquire the output direction of robot and the contained angle of gravity direction, and then compensates the influence of gravity to the robot control output to improve the output precision of robot. The common attitude sensor is mainly a gyroscope. The high-precision gyroscope is expensive, and the working precision of the gyroscope based on the micro-electromechanical element is easily influenced by the environment in the industrial severe environment.
The main problems of the existing attitude sensor represented by a gyroscope are as follows: firstly, the cost is high; secondly, the working precision is easily influenced by the interference of external environment in a severe industrial field.
That is to say, the existing robot lacks a low-cost, stable performance and the gravity sensor design scheme of high accuracy when polishing the operation.
Disclosure of Invention
Aiming at the defects and improvement requirements of the prior art, the invention provides a gravity angle sensor and a calibration method thereof, aiming at obtaining high-precision included angle information of an object to be measured (such as a robot polishing actuating mechanism) relative to the gravity direction by utilizing a flexible mechanism and a differential strain sensor, being suitable for severe industrial field use and reducing the cost.
To achieve the above object, in one aspect, the present invention provides a gravity angle sensor, including: the sensor comprises a sensor body, a flexible spring piece assembly, a differential strain measurement unit and a mass block;
the sensor body is rigidly connected with an object to be measured, and the mass block is connected with the sensor body through the flexible spring piece assembly;
the flexible spring plate assembly is symmetrically arranged relative to the mass block, so that the mass block performs unidirectional motion under the constraint of the flexible spring plate assembly;
the differential strain measurement unit is arranged on the flexible spring piece assembly and used for measuring tensile and compressive strain values of the flexible spring piece assembly on two sides of deformation of the flexible spring piece assembly in the length direction when the flexible spring piece assembly is elastically deformed.
Preferably, the differential strain measurement unit includes: strain sensors arranged in pairs on the flexible leaf spring assembly in a differential fashion.
Preferably, the flexible spring piece assembly comprises a plurality of flexible spring pieces, and two sides of any flexible spring piece, which are deformed, are a tension side and a compression side.
Preferably, the strain sensors of the differential strain measurement unit are arranged in pairs in a differential manner on the tension side and the compression side of the same flexible spring piece of the flexible spring piece assembly.
Preferably, the strain sensors of the differential strain measurement unit are arranged in pairs in a differential manner on the tension side and the compression side of different flexible spring pieces of the flexible spring piece assembly.
Preferably, the flexible spring plate assembly comprises: a first spring sheet unit and a second spring sheet unit arranged symmetrically with respect to the mass block; the first spring sheet unit and the second spring sheet unit respectively at least comprise two flexible spring sheets.
Preferably, when an included angle between the length direction of the flexible spring piece assembly and the gravity direction is 0 ° or 180 °, a gravity component of the mass block in the motion direction is 0, and the mass block makes the two sides of the deformation of the flexible spring piece generate the same tensile or compressive strain under the action of gravity, so that a strain differential value of the differential strain sensors arranged on the flexible spring piece assembly in pairs is 0.
Preferably, when an included angle between the length direction of the flexible spring piece assembly and the gravity direction is 90 degrees or 270 degrees, the mass block makes tensile strain and compressive strain respectively generated on two deformation sides of the flexible spring piece under the action of gravity, and the gravity component of the mass block in the motion direction reaches a maximum value or a minimum value, so that the strain differential value of the differential strain sensors arranged on the flexible spring piece assembly in pairs is a maximum value or a minimum value.
Preferably, the included angle between the length direction of the flexible spring piece assembly and the gravity direction at the current moment is set to be θ, then:
θ＝acos(F x /F max )
wherein, F x As a current strain differential value, F max Is the maximum strain differential value.
On the other hand, in order to guarantee the measurement accuracy of the gravity angle sensor, the invention also provides a calibration method of the gravity angle sensor, which comprises the following steps:
controlling the gravity angle sensor to rotate around the axis for a circle, and acquiring a strain differential value change curve of the gravity angle sensor at each angle by using a differential strain measurement unit; the maximum value, the minimum value and the zero crossing point of the strain difference value change curve correspond to a plurality of standard reference angles;
obtaining strain difference values corresponding to a plurality of standard reference angles respectively according to differential values of the strain difference value change curve at a zero crossing point;
calibrating the gravity angle sensor based on a plurality of standard reference angles and strain differential values corresponding thereto.
In general, the above technical solution of the present invention can achieve the following advantages:
the gravity angle sensor provided by the invention adopts a low-cost flexible structure and a differential strain sensor as basic components. The elastic deformation of the flexible mechanism is used for reflecting the change of the gravity component caused by the change of the working posture of the sensor, and meanwhile, the elastic deformation change of the flexible mechanism is measured by utilizing the differential strain sensor, so that the differential strain sensor can effectively resist external interference such as temperature drift and the like, high-precision strain measurement is realized, and further high-precision gravity angle measurement is realized. The scheme has the advantages of low cost, high measurement precision, adaptation to severe working conditions and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a schematic overall structural diagram of a gravity angle sensor according to an embodiment of the present disclosure;
fig. 2 is a schematic working diagram and a partially enlarged view of a gravity angle sensor provided in an embodiment of the present application in a horizontal condition;
fig. 3 is a schematic diagram illustrating a gravity angle sensor according to an embodiment of the present disclosure in a vertical state;
fig. 4 is a schematic working diagram of a gravity angle sensor provided in the embodiment of the present application when an inclination angle is α;
FIG. 5 is a schematic diagram illustrating a first differential configuration of a strain sensor in a gravity angle sensor according to an embodiment of the present disclosure;
FIG. 6 is a diagram illustrating a second differential configuration of a strain sensor in a gravity angle sensor according to an embodiment of the present disclosure;
FIG. 7 is a schematic diagram illustrating a third differential arrangement of strain sensors in the gravity angle sensor according to an embodiment of the present disclosure;
FIG. 8 is a schematic diagram illustrating a fourth differential arrangement of strain sensors in the gravity angle sensor according to an embodiment of the present disclosure;
fig. 9 is a flowchart illustrating a calibration method of a gravity angle sensor according to an embodiment of the present disclosure.
Detailed Description
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following description will be made with reference to the accompanying drawings. It is obvious that the drawings in the following description are only some examples of the invention, and that for a person skilled in the art, other drawings and embodiments can be derived from them without inventive effort.
For the sake of simplicity, the drawings only schematically show the parts relevant to the present invention, and they do not represent the actual structure as a product. In addition, in order to make the drawings concise and understandable, components having the same structure or function in some of the drawings are only schematically illustrated or only labeled. In this document, "one" means not only "only one" but also a case of "more than one".
The technical solution of the present invention is described in detail with specific examples below.
Example one
Referring to fig. 1, an embodiment of the present application provides a gravity angle sensor, including: the sensor comprises a sensor body 1, a flexible spring piece assembly 2, a mass block 3 and a differential strain measurement unit 4; the sensor body 1 is rigidly connected with an object to be measured (such as a robot polishing actuating mechanism), and the mass block 3 is connected with the sensor body 1 through the flexible spring piece assembly 2; the flexible spring piece assembly 2 is symmetrically arranged relative to the mass block 3, so that the mass block 3 can move in a single direction under the constraint of the flexible spring piece assembly 2; the differential strain measurement unit 4 is arranged on the flexible spring piece assembly 2 and used for measuring tensile and compressive strain values of the flexible spring piece assembly 2 on two sides of deformation in the length direction when the flexible spring piece assembly is elastically deformed.
In the implementation process, referring to fig. 1 and fig. 2, the differential strain measurement unit 4 includes: strain sensors 41 arranged in differential pairs on the flexible leaf spring assembly 2 are used. Arranging the strain sensors 41 in a differential manner can reduce strain measurement errors caused by temperature, null shift, and the like.
In a specific implementation, the flexible leaf spring assembly 2 comprises: a first spring sheet unit and a second spring sheet unit arranged symmetrically with respect to the mass block 3; the first spring sheet unit and the second spring sheet unit respectively at least comprise two flexible spring sheets 21, and two sides of any flexible spring sheet 21, which deform, are a stretching side and a compression side. The strain sensors 41 of the differential strain measurement unit 4 are arranged in pairs in a differential manner on the tension side and the compression side of the same flexible leaf spring of the flexible leaf spring assembly 2 (as shown in fig. 1-4); alternatively, the differential pair may be provided on the tension side and the compression side of different flexible spring strips of the flexible spring strip assembly 2 (as shown in fig. 5-8). The two paired strain sensors 41 of the differential strain measuring unit 4 are attached to the tension side and the compression side of the corresponding flexible spring piece 21 when the elastic deformation occurs.
In a specific implementation process, please refer to fig. 7 and 8, the strain sensor 41 in the gravity angle sensor according to the present invention may also be in the form of a plurality of sets of differential strain measurement units disposed on the flexible spring pieces 21 that are symmetrically arranged; wherein each set of differential strain measurement units comprises a pair of differential strain sensors 41. As shown in fig. 7 and 8, the strain sensors 41 of each set of differential strain measurement units are respectively installed and disposed on the tension side and the compression side when the corresponding flexible spring pieces 21 are elastically deformed.
The working principle of the gravity angle sensor provided by the invention is as follows:
firstly, when an included angle between the length direction of a flexible spring piece 21 in the gravity angle sensor and the gravity direction is 0 degree or 180 degrees, the gravity component of a mass block 3 in the motion direction is 0, and the mass block 3 enables two sides of the flexible spring piece 21 to generate the same tensile or compressive strain under the action of gravity, so that the strain differential value of a differential strain sensor 41 arranged on the flexible spring piece 21 in pair is 0;
secondly, when the included angle between the length direction of the flexible spring piece 21 in the gravity angle sensor and the gravity direction is 90 degrees or 270 degrees, the mass block 3 enables the two sides of the flexible spring piece 21 to respectively generate tensile strain and compressive strain under the action of gravity. In this case, the gravity component of the mass 3 in the moving direction reaches the maximum value or the minimum value, so that the strain differential value of the differential strain sensors 41 provided in pairs on the flexible spring pieces 21 becomes the maximum value or the minimum value.
When the included angle between the length direction of the flexible spring piece 21 in the gravity angle sensor and the gravity direction is at other values, the gravity component in the motion direction of the mass block 3 is between the maximum value and the minimum value in the above case. Accordingly, in this case, the strain differential value of the pair of differential strain sensors 41 provided on the flexible spring piece 21 is also between the maximum value and the minimum value in the case of (ii). According to the strain differential value under the condition and the differential strain extreme value under the condition II, the included angle theta between the length direction of the flexible spring piece 21 and the gravity direction under the condition can be conveniently obtained:
θ＝acos(F x /F max )
wherein, F x As a current strain differential value, F max Is the maximum strain differential value.
Further, the working principle of the gravity angle sensor is explained in detail with reference to fig. 2 to 4:
as shown in fig. 2, when an included angle between the length direction of the flexible spring piece 21 and the gravity direction (-Y direction) in the gravity angle sensor is 90 ° or 270 °, the mass block 3 generates tensile strain and compressive strain on two deformed sides of the flexible spring piece 21 under the action of gravity. In this case, the gravity component of the mass block 3 in the moving direction (-Y direction) reaches a maximum value or a minimum value, so that the strain differential value of the differential strain sensor 41 provided on the flexible spring piece 21 becomes a maximum value or a minimum value.
As shown in fig. 3, when an angle between the length direction of the flexible spring piece 21 and the gravity direction (-Y direction) in the gravity angle sensor is 0 ° or 180 °, a gravity component of the mass 3 in the motion direction (X direction) is 0, and the mass 3 generates the same tensile or compressive strain on both sides of the deformation of the flexible spring piece 21 under the action of gravity, so that a strain differential value of the differential strain sensor 41 disposed on the flexible spring piece 21 is 0.
As shown in fig. 4, when the angle between the length direction of the flexible spring plate 21 and the gravity direction (-Y direction) in the gravity angle sensor is 90 ° - α, i.e. the angle between the motion direction of the mass block 3 and the gravity direction (-Y direction) is α, the gravity component of the mass block 3 in the motion direction thereof is between the maximum value and the minimum value in the case shown in fig. 2. Accordingly, in this case, the strain differential value of the differential strain sensor 41 provided on the flexible spring piece 21 is also between the maximum value and the minimum value in the case shown in fig. 2. According to the strain differential value in this case and the extreme differential strain value in the case shown in fig. 2, the angle between the length direction of the flexible spring piece 21 and the gravity direction (-Y direction) in this case can be conveniently obtained.
Further, the working process of the gravity angle sensor provided by the invention is as follows:
and (1) measuring a strain difference extreme value (maximum value or minimum value) when an included angle between the length direction of the flexible spring piece 21 and the gravity direction is 90 degrees or 270 degrees by using a differential strain sensor 41 arranged on the flexible spring piece 21. The absolute values of the strain difference values are equal, the absolute values are taken as strain difference reference values, and the maximum value and the minimum value can be normalized to be 1 or-1;
and (2) measuring a strain difference value obtained by the differential strain sensor 41 under the condition that the length direction and the gravity direction of the flexible spring piece 21 in the gravity angle sensor are not 90 degrees or 270 degrees, and normalizing the strain difference value by using the strain difference reference value obtained in the step (1) to obtain a normalized strain difference value between-1 and 1. Based on the mechanics theory, the included angle between the length direction and the gravity direction of the flexible spring piece 21 can be obtained based on the normalized strain difference value, and the calculation is convenient and fast.
In summary, the gravity angle sensor proposed by the present invention has the following advantages:
firstly, the change of the gravity component of a mass block in the gravity angle sensor in the motion direction is sensed by utilizing a flexible spring piece, and the measurement sensitivity is high;
secondly, strain change of a flexible spring piece in the gravity angle sensor is obtained by using a differential strain sensor, so that external interference such as temperature drift resistance can be effectively met, and high-precision strain measurement can be realized;
example two
Based on the same inventive concept, in order to realize calibration of the gravity angle sensor, facilitate periodic self-calibration of the gravity angle sensor, and improve the working accuracy of the gravity angle sensor in a long period, referring to fig. 9, an embodiment of the present invention further provides a calibration method of the gravity angle sensor, including the following steps:
s1, controlling the gravity angle sensor to rotate around the axis for a circle, and acquiring a strain differential value change curve of the gravity angle sensor at each angle by using a differential strain measurement unit; the maximum value, the minimum value and the zero crossing point of the strain difference value change curve correspond to a plurality of standard reference angles; wherein the plurality of standard reference angles comprises: 0 °, 90 °, 180 °, and 270 °.
S2, obtaining strain difference values corresponding to a plurality of standard reference angles respectively according to differential values of the strain difference value change curve at zero crossing points;
and S3, calibrating the gravity angle sensor based on a plurality of standard reference angles and strain difference values corresponding to the standard reference angles.
Specifically, in combination with the sensor design scheme in the first embodiment, the calibration method in this embodiment may be: and controlling the gravity angle sensor to rotate around the axis for a circle, and acquiring a strain differential value change curve of the gravity angle sensor at each angle by using the differential strain sensor 41. The maximum value and the minimum value of the strain difference value curve correspond to the condition when the included angle between the length direction of the flexible spring piece 21 in the gravity angle sensor and the gravity direction is 90 degrees or 270 degrees; the zero crossing point of the strain difference value curve corresponds to the situation when the included angle between the length direction of the flexible spring piece 21 in the gravity angle sensor and the gravity direction is 0 degree or 180 degrees; according to the positive and negative differential values of the zero crossing point of the strain differential value curve, the corresponding strain differential values of the angles of 0 degrees, 90 degrees, 180 degrees and 270 degrees can be conveniently obtained. The gravity angle sensor provided by the invention can be conveniently calibrated by utilizing the four groups of angles and the strain difference value.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. A gravity angle sensor, comprising: the sensor comprises a sensor body, a flexible spring piece assembly, a differential strain measurement unit and a mass block;
the sensor body is rigidly connected with an object to be measured, and the mass block is connected with the sensor body through the flexible spring piece assembly;
the flexible spring plate assembly is symmetrically arranged relative to the mass block, so that the mass block performs unidirectional motion under the constraint of the flexible spring plate assembly;
the differential strain measurement unit is arranged on the flexible spring piece assembly and used for measuring tensile and compressive strain values of the flexible spring piece assembly on the two sides of the deformation of the flexible spring piece assembly in the length direction when the flexible spring piece assembly is elastically deformed.
2. The gravity angle sensor according to claim 1, wherein the differential strain measurement unit comprises: strain sensors arranged in pairs on the flexible leaf spring assembly in a differential fashion.
3. The gravity angle sensor according to claim 1, wherein the flexible spring plate assembly comprises a plurality of flexible spring plates, and the two sides of any flexible spring plate that are deformed are a tension side and a compression side.
4. The gravity angle sensor according to claim 3, wherein the strain sensors of the differential strain measurement unit are arranged in differential form in pairs on a tension side and a compression side of the same flexible leaf of the flexible leaf spring assembly.
5. The gravity angle sensor according to claim 3, wherein the strain sensors of the differential strain measurement unit are arranged in pairs in differential form on the tension side and the compression side of different flexible spring strips of the flexible spring strip assembly.
6. The gravity angle sensor of claim 1, wherein the flexible spring leaf assembly comprises: a first spring sheet unit and a second spring sheet unit arranged symmetrically with respect to the mass;
the first spring sheet unit and the second spring sheet unit respectively comprise at least two flexible spring sheets.
7. The gravity angle sensor according to claim 2, wherein when an angle between a length direction of the flexible spring plate assembly and a gravity direction is 0 ° or 180 °, a gravity component of the mass in the motion direction is 0, and the mass generates the same tensile or compressive strain on both sides of a deformation of the flexible spring plate under the action of gravity, so that a strain differential value of the differential strain sensor disposed in pairs on the flexible spring plate assembly is 0.
8. The gravity angle sensor according to claim 2, wherein when an angle between a length direction of the flexible spring plate assembly and a gravity direction is 90 ° or 270 °, the mass block generates tensile strain and compressive strain on both sides of the deformation of the flexible spring plate under the action of gravity, respectively, and a gravity component of the mass block in a motion direction reaches a maximum value or a minimum value, so that a strain differential value of the differential strain sensor disposed on the flexible spring plate assembly in pair is a maximum value or a minimum value.
9. The gravity angle sensor according to claim 2, wherein if an angle θ is set between a length direction of the flexible leaf spring assembly and a gravity direction at the present moment, then:
θ＝acos(F x /F max )
wherein, F x As a current strain differential value, F max Is the maximum strain differential value.
10. A calibration method of a gravity angle sensor is characterized by comprising the following steps:
controlling the gravity angle sensor to rotate around the axis for a circle, and acquiring a strain differential value change curve of the gravity angle sensor at each angle by using a differential strain measurement unit; the maximum value, the minimum value and the zero crossing point of the strain difference value change curve correspond to a plurality of standard reference angles;
obtaining strain difference values corresponding to a plurality of standard reference angles respectively according to differential values of the strain difference value change curve at a zero crossing point;
calibrating the gravity angle sensor based on a plurality of standard reference angles and strain difference values corresponding thereto.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210538146.6A CN114993234A (en) | 2022-05-18 | 2022-05-18 | Gravity angle sensor and calibration method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210538146.6A CN114993234A (en) | 2022-05-18 | 2022-05-18 | Gravity angle sensor and calibration method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114993234A true CN114993234A (en) | 2022-09-02 |
Family
ID=83026376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210538146.6A Pending CN114993234A (en) | 2022-05-18 | 2022-05-18 | Gravity angle sensor and calibration method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114993234A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115540734A (en) * | 2022-11-02 | 2022-12-30 | 北京工业大学 | Vertical micro-displacement measuring device with orthogonally arranged 8 reeds |
| CN115597474A (en) * | 2022-11-02 | 2023-01-13 | 北京工业大学（Cn） | Rotation angle error measuring device of one-dimensional guide mechanism |
-
2022
- 2022-05-18 CN CN202210538146.6A patent/CN114993234A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115540734A (en) * | 2022-11-02 | 2022-12-30 | 北京工业大学 | Vertical micro-displacement measuring device with orthogonally arranged 8 reeds |
| CN115597474A (en) * | 2022-11-02 | 2023-01-13 | 北京工业大学（Cn） | Rotation angle error measuring device of one-dimensional guide mechanism |
| CN115540734B (en) * | 2022-11-02 | 2024-03-15 | 北京工业大学 | Vertical micro-displacement measuring device with 8 reed orthogonally arranged |
| CN115597474B (en) * | 2022-11-02 | 2024-03-15 | 北京工业大学 | Rotary angle error measuring device of one-dimensional guiding mechanism |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN114993234A (en) | Gravity angle sensor and calibration method thereof | |
| CN201083760Y (en) | Three axis integrated piezoresistance type acceleration sensor | |
| KR101481784B1 (en) | 6-component Loadcell | |
| US9395386B2 (en) | Electronic tilt compensation for diaphragm based pressure sensors | |
| CN109129479B (en) | Rigid-flexible coupling motion platform control method based on disturbance force compensation | |
| US10101230B2 (en) | Reduction of non-linearity errors in automotive pressure sensors | |
| KR102525812B1 (en) | force measuring device | |
| CN113063538B (en) | Distributed multi-dimensional force sensor | |
| US20230127473A1 (en) | Strain sensing film, pressure sensor and hybrid strain sensing system | |
| CN106871933B (en) | A kind of method of multisensor additional mass in elimination frequency response function | |
| US3713333A (en) | Force measuring apparatus | |
| US10816419B2 (en) | Tripedal flexure member and load/torque measurement systems using same | |
| CN215573482U (en) | Robot torque sensor | |
| US6865960B2 (en) | Capacitive microsystem for recording mechanical deformations, use and operating method | |
| CN112692830B (en) | Three-dimensional angular displacement six-degree-of-freedom sensor system, measuring method and manipulator | |
| US7187107B2 (en) | Closed-loop feedback control positioning stage | |
| JP3727133B2 (en) | Load measuring method and load measuring apparatus | |
| CN113267280B (en) | Strain type torque sensor | |
| JP2003050171A (en) | Method and apparatus for measuring multi-component force | |
| US4206437A (en) | Transducer with compensation features | |
| CN112285384A (en) | Acceleration sensor based on mechanical metamaterial structure | |
| Sun et al. | Temperature compensation for six-dimension force/torque sensor based on Radial Basis Function Neural Network | |
| RU2252400C1 (en) | Displacement strains detector | |
| CN213631961U (en) | Strain gauge assembly of multi-freedom-degree resistance type displacement sensor | |
| CN108151958B (en) | Force transmission retainer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |