CN109129479B - Rigid-flexible coupling motion platform control method based on disturbance force compensation - Google Patents
Rigid-flexible coupling motion platform control method based on disturbance force compensation Download PDFInfo
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Abstract
The invention discloses a rigid-flexible coupling motion platform control method based on disturbance force compensation, which comprises the steps of firstly taking the speed and the displacement of a platform rigid body as feedback, taking a driving unit of the platform rigid body as an actuator, establishing a closed-loop control system of the platform rigid body, then detecting the speed and the displacement of a frame rigid body and respectively making a difference with the speed and the displacement of the platform rigid body, then respectively multiplying the obtained speed difference and the obtained displacement difference by the damping and the rigidity of a flexible hinge to obtain the measured disturbance force of the flexible hinge on the platform rigid body, reducing a control signal and the measured disturbance force to be input into an extended observer to obtain the estimation of other disturbances, and finally converting the sum of the measured disturbance and the estimated disturbance into an equivalent control quantity by a transfer function from the control quantity to the driving force, compensating the equivalent control quantity into the control quantity of the platform rigid body and converting the sum into a disturbance-. Compared with the prior art, the technical scheme of the invention does not need switching control, reduces the control complexity and finally realizes high-speed precise motion.
Description
Technical Field
The invention relates to the technical field of high-speed precision motion control, in particular to a rigid-flexible coupling motion platform control method based on disturbance force compensation.
Background
In the field of high-speed precise motion control, a motion platform based on a mechanical guide rail has a friction dead zone, so that the control precision can only reach a micron level. In the situation of higher precision control, air flotation, magnetic suspension or hydrostatic guide rails and the like are needed to reduce or even eliminate the friction influence, however, the scheme adopting the technology has higher cost and higher environmental requirements, and is not suitable for the technical field of electronic manufacturing with large quantity and wide range.
According to Moore's law existing in the electronic manufacturing industry, namely when the price is not changed, the number of components which can be accommodated on an integrated circuit is doubled every about 18-24 months, and the performance is doubled, so that more rigorous requirements on the precision and the speed of packaging equipment are provided. Conventional friction compensation schemes and control methods have difficulty meeting the ever-increasing demands for high-speed precision motion control. In order to solve the above problems, technicians in the field have been trying to find a control scheme capable of overcoming friction disturbance, in which a linear active disturbance rejection control algorithm (LADRC) is an effective method for overcoming disturbance, and the method can suppress disturbance to some extent by uniformly considering model errors and external disturbance, but some researchers have found that the LADRC is not suitable for a control object with high bandwidth requirements and strong nonlinearity (dead zone, etc.) caused by friction by applying the LADRC in tests and analysis of an electric servo system. Meanwhile, in the prior art, a friction-free flexible hinge is combined with a mechanical guide rail platform to realize compensation of a friction dead zone, but because the control rules of high-speed motion and a compensation process are inconsistent, model switching control is required, but the whole control process becomes complicated and fussy due to the model switching control.
Disclosure of Invention
The invention mainly aims to provide a rigid-flexible coupling motion platform control method based on disturbance force compensation, aiming at realizing the purposes of no need of switching control, reduction of control complexity and finally realization of high-speed precise motion.
In order to achieve the above object, the present invention provides a rigid-flexible coupling motion platform control method based on disturbance force compensation, which specifically includes the following steps:
s1: taking the speed and the displacement of a platform rigid body as feedback, taking a driving unit of the platform rigid body as an actuator, and establishing a closed-loop control system of the platform rigid body;
s2: detecting the speed and the displacement of the frame rigid body and respectively making difference with the speed and the displacement of the platform rigid body to obtain the speed difference and the displacement difference between the frame rigid body and the platform rigid body;
s3: respectively multiplying the speed difference and the displacement difference obtained in the step S2 by the damping and the rigidity of the flexible hinge to obtain the measurement disturbance force of the flexible hinge to the platform rigid body;
s4, inputting the measured disturbance force and the control quantity obtained in the step S3 into an extended state observer, estimating other disturbances caused by deviation such as rigidity damping and the like, and superposing the other disturbances with the measured disturbances to obtain total system disturbances;
s5: and dividing the total system disturbance obtained in the step S4 by a transfer function from a control quantity to a driving force to convert the total system disturbance into an equivalent control quantity, compensating the equivalent control quantity into the control quantity of the platform rigid body, and converting the control quantity into a disturbance-free rigid body platform control system.
Preferably, a control object of the control method is a rigid-flexible coupling platform, and the rigid-flexible coupling platform includes the frame rigid body mounted on a mechanical guide rail and a platform rigid body connected to the frame rigid body through a flexible hinge.
Preferably, the frame rigid body and the platform rigid body are respectively mounted with displacement speed detection units.
Preferably, the platform rigid body mounts a drive unit.
Preferably, the frame rigid body is provided with a driving unit, and the driving unit on the frame rigid body is an actuator and establishes a closed-loop control system of the frame rigid body, using the speed and displacement of the frame rigid body as feedback, in the same manner as in S1.
Preferably, a control system using the control method is composed of a control object, a displacement speed detection unit, a driving unit and a controller.
Preferably, the information required in the control method is obtained by measurement or model calculation.
Preferably, when the displacement and the speed are measured by adopting the capacitance sensor, the extended state observer is a second-order ESO and estimates the deformation speed and the disturbance force.
Preferably, when the displacement and the speed are measured by using the grating ruler, the state observer is expanded to reduce ESO, and only the disturbance force is estimated.
Preferably, when the total disturbance is small, the measured disturbance can be made 0, and the degradation is active disturbance rejection control based on standard ESO.
Compared with the prior art, the technical scheme of the invention has the following advantages:
the technical scheme of the invention is based on the design of a rigid-flexible coupling platform, the disturbance of the friction force of a mechanical guide rail is converted into the dynamic deformation of the flexible hinge, and the rigid body of the platform is equivalent to an ideal frictionless platform through the compensation control of the elastic force and the damping force of the flexible hinge, so that the high-speed precise motion can be realized, the switching control is not needed, and the control complexity is reduced. In addition, the invention mixes the disturbance measurement and estimation for use, avoids the noise caused by the measurement of high-frequency signals, and avoids the disturbance caused by parameter errors such as spring damping and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic diagram of the operation of single-drive motion control according to embodiment 1 of the present invention;
FIG. 2 is a position tracking error graph of the PID method and the disturbance power compensation method in embodiment 1 of the present invention;
FIG. 3 is a graph showing the effect of stiffness variation on tracking error in the PID method in embodiment 1 of the present invention;
FIG. 4 is a graph showing the effect of stiffness variation on tracking error in the disturbance force compensation method according to embodiment 1 of the present invention;
FIG. 5 is a diagram of a disturbance result caused by the diffusion state observer accurately estimating the model parameter deviation in embodiment 1 of the present invention;
FIG. 6 is a diagram of the total disturbance result obtained by adding the measured disturbance and the estimated disturbance in embodiment 1 of the present invention;
FIG. 7 is a diagram showing the results of the ESO estimated disturbance in example 1 of the present invention;
FIG. 8 is a schematic diagram of the dual drive motion control according to embodiment 2 of the present invention.
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that, if directional indications (such as up, down, left, right, front, and back … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative positional relationship between the components, the movement situation, and the like in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description of "first", "second", etc. in an embodiment of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
The invention provides a rigid-flexible coupling motion platform control method based on disturbance force compensation.
The control object of the rigid-flexible coupling motion platform control method based on disturbance force compensation is a rigid-flexible coupling platform which mainly comprises a frame rigid body and a platform rigid body, wherein the frame rigid body is arranged on a mechanical guide rail, and the platform rigid body is arranged on the frame rigid body through a flexible hinge.
The frame rigid body and the platform rigid body are respectively provided with a displacement speed detection unit, the platform rigid body is provided with a driving unit, and the frame rigid body can be provided with the driving unit selectively. The whole control system consists of a control object, a displacement speed detection unit, a driving unit and a controller.
The invention relates to a rigid-flexible coupling motion platform control method based on disturbance force compensation, which specifically comprises the following control steps:
s1: taking the speed and the displacement of the platform rigid body as feedback, taking a driving unit of the platform rigid body as an actuator, and establishing a closed-loop control system of the platform rigid body;
s2: detecting the speed and the displacement of the frame rigid body and respectively making difference with the speed and the displacement of the platform rigid body to obtain the speed difference and the displacement difference between the frame rigid body and the platform rigid body;
s3: multiplying the speed difference and the displacement difference obtained in the step S2 by the damping and the rigidity of the flexible hinge respectively to obtain the disturbance force of the flexible hinge on the platform rigid body;
s4: inputting the measured disturbance force and the control quantity obtained in the step S3 into an extended state observer, estimating other disturbances caused by deviation such as rigidity damping and the like, and superposing the other disturbances with the measured disturbances to obtain total system disturbances;
s5: the total system disturbance obtained in S4 is divided by the transfer function from the control amount to the drive force to be converted into an equivalent control amount, which is compensated to the control amount of the platform rigid body, and converted into a disturbance-free rigid body platform control system.
In the technical scheme of the invention, the frame rigid body can be provided with the driving unit, the same method as the method of the S1 is adopted, the speed and the displacement of the frame rigid body are used as feedback, the driving unit on the frame rigid body is used as an actuator, and a closed-loop control system of the frame rigid body is established, so that the speed of the platform can be improved, and the disturbance of the flexible hinge can be reduced.
Wherein, the proportional gain of the step S4 in the technical solution of the present invention is used for adjusting the measurement error, and the proportional gain is 1 when there is no error. The information required in the above control method may be obtained by measurement or model calculation. In the technical scheme of the invention, when the capacitance sensor is adopted to measure the displacement and the speed, the state observer is expanded to be a second-order ESO, and the deformation speed and the disturbance force are estimated. In the technical scheme of the invention, when the grating ruler is used for measuring the displacement and the speed, the state observer is expanded to reduce the ESO, and only the disturbance force is estimated. When the total disturbance is small, the measured disturbance can be made 0, degrading to active disturbance rejection control based on standard ESO.
The technical scheme of the invention is that the rigid-flexible coupling motion platform control method based on disturbance force compensation converts the disturbance of the friction force of the mechanical guide rail into the dynamic deformation of the flexible hinge, and the rigid body of the platform is equivalent to a frictionless ideal platform through the compensation control of the elastic force and the damping force of the flexible hinge so as to realize high-speed precise motion without switching control.
Example 1
As shown in fig. 1, in the embodiment of the present invention, the rigid-flexible coupling platform mainly includes a mechanical guide rail, a frame rigid body, a flexible hinge, and a platform rigid body, and X is setM,XmRespectively the displacement of the frame rigid body and the platform rigid body,
the speed of the frame rigid body and the platform rigid body respectively, M and M are the mass of the frame rigid body and the platform rigid body respectively, k and c are the rigidity and the damping of the flexible hinge respectively, and FM,FmDriving forces acting on the frame rigid body and the platform rigid body, respectively, for the driving unit, fμIs the friction between the rigid frame body and the mechanical guide rail.
The rigid-flexible coupling motion platform control method based on disturbance force compensation in the embodiment is single-drive motion control, wherein a platform rigid motion mechanical response equation is as follows:
the frame rigid motion mechanics response equation is:
the stress of the flexible hinge is as follows:
after disturbance compensation is carried out, the dynamic response equation of the platform rigid body is as follows:
substituting the flexible hinge stress formula (3) into a platform rigid dynamic response equation, namely formula (4), to obtain an equivalent dynamic response equation of the platform rigid body as follows:
in this embodiment, the equivalent dynamic response equation of the platform rigid body obtained by the formula (5) is an ideal frictionless platform, in this embodiment, the frame rigid body overcomes the friction motion under the action of the acting force Δ f of the flexible hinge, and the disturbance of the friction causes the change of the acceleration of the frame platform and the deformation of the flexible hinge, so that the disturbance of the friction force, which cannot be measured, is converted into the action of the flexible hinge, which can be measured.
When the rigidity damping deviates, b is 1/m and is estimated and compensated through an extended state observer. If the velocity signal is noisy, a second order ESO (estimated velocity and disturbance) can be used:
because the grating ruler can output speed information, a reduced-order ESO (only disturbance z is estimated) and a first-order ESO (only disturbance z is estimated) are adopted2)；
The platform parameters of this embodiment are:
| core platform mass m | 2kg |
| Frame mass M | 2kg |
| Coefficient of friction | 0.2 |
| Flexible hinge stiffness k | 2000N/mm |
| Flexible hinge damping c | 100N/mm/s |
| Optimized Kp | 35702280.82 |
| Optimized Ki | 7172.72 |
| Optimized Kd | 349977.10 |
Referring to fig. 2 to 4, when the conventional PID method and the disturbance force compensation control method using the spring damping force compensation are used, the maximum error of the position tracking error curve is reduced by one order of magnitude from 9e-8 to 9e-9 as shown in fig. 2.
When the PID control is adopted, if the model parameter changes, the tracking error changes with the change, as shown in fig. 3, however, the disturbance force compensation control method adopting the technical scheme of the invention of the spring damping force compensation, the tracking error hardly changes with the change of the model, and shows good disturbance rejection performance, as shown in fig. 4.
In this embodiment, when the stiffness damping parameters have a deviation (-0.1k, -0.1c), the actual stiffness damping parameters are only 0.9 times of the design value, and the disturbance due to the model parameter deviation is accurately estimated by the extended state observer as shown in fig. 5. In the technical solution of the method according to the present invention, the measured perturbation (1k,1c calculated value) plus the estimated perturbation (-0.1k, -0.1c deviation) of this embodiment is equal to the total perturbation (0.9k,0.9c actual value) as shown in fig. 6. When the parameters are unchanged, the disturbance of the ESO estimation is close to 0, as shown in FIG. 7, as wo increases, the noise increases, so that the measurement adopted in the embodiment of the invention compensates the main disturbance first, and the noise caused by the observation of the high-frequency disturbance by the observer is avoided.
Example 2
As shown in fig. 8, in the embodiment of the present invention, the rigid-flexible coupling platform mainly includes a mechanical guide rail, a frame rigid body, a flexible hinge, and a platform rigid body, and X is setM,XmRespectively the displacement of the frame rigid body and the platform rigid body,
the speed of the frame rigid body and the platform rigid body respectively, M and M are the mass of the frame rigid body and the platform rigid body respectively, k and c are the rigidity and the damping of the flexible hinge respectively, and FM,FmDriving forces acting on the frame rigid body and the platform rigid body, respectively, for the driving unit, fμIs the friction between the rigid frame body and the mechanical guide rail.
The rigid-flexible coupling motion platform control method based on disturbance force compensation in the embodiment is dual-drive motion control, wherein a rigid motion mechanical response equation of the platform is as follows:
the frame rigid motion mechanics response equation is:
wherein FMThe speed displacement deviation of the moving target of the platform rigid body and the frame rigid body is obtained by calculation according to the control rule.
The stress of the flexible hinge is as follows:
after disturbance compensation is carried out, the dynamic response equation of the platform rigid body is as follows:
substituting the flexible hinge stress formula (8) into a platform rigid dynamic response equation, namely a formula (9), to obtain an equivalent dynamic response equation of the platform rigid body as follows:
in this embodiment, a dual-drive motion control scheme is adopted, as shown in fig. 8, the frame rigid body is moved by the driving force on the frame rigid body, and after the driving forces of the frame rigid body and the frame rigid body are superposed, a higher-speed motion can be realized. In addition, the speed displacement deviation between the frame rigid body and the platform rigid body is reduced due to the movement of the frame rigid body, so that the dynamic deformation disturbance of the flexible hinge can be effectively reduced, and the performance is better.
When the rigidity damping deviation is poor, the deviation is estimated and compensated through the extended state observer. If the velocity signal is noisy, a second order ESO (estimated velocity and disturbance) can be used:
because the grating ruler can output speed information, a reduced-order ESO (only disturbance z is estimated) and a first-order ESO (only disturbance z is estimated) are adopted2)：
It should be noted that the block diagram of the technical solution of the present invention corresponds to the formula expression of the embodiment of the present invention, and if the direction of the measurement signal changes, the formula expression in the observer is extended, and whether to normalize the estimation of the observer (by dividing the coefficient a of the highest order expression)nMultiplying by factor b by 1/anRepresentation), which causes a change in the sign in the block diagram, and the scaling factor relationship (b or 1/b), which depends on the expression in public, but may be expressed by a formula with full equivalence.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (9)
1. A rigid-flexible coupling motion platform control method based on disturbance force compensation is characterized by comprising the following steps:
the control object of the control method is a rigid-flexible coupling platform, and the rigid-flexible coupling platform comprises a frame rigid body arranged on a mechanical guide rail and a platform rigid body connected to the frame rigid body through a flexible hinge;
s1: taking the speed and the displacement of a platform rigid body as feedback, taking a driving unit of the platform rigid body as an actuator, and establishing a closed-loop control system of the platform rigid body;
s2: detecting the speed and the displacement of the frame rigid body and respectively making difference with the speed and the displacement of the platform rigid body to obtain the speed difference and the displacement difference between the frame rigid body and the platform rigid body;
s3: respectively multiplying the speed difference and the displacement difference obtained in the step S2 by the damping and the rigidity of the flexible hinge to obtain the measurement disturbance force of the flexible hinge to the platform rigid body;
s4, inputting the measured disturbance force and the control quantity obtained in the step S3 into an extended state observer, estimating the rest disturbance caused by the rigidity damping deviation, and superposing the rest disturbance with the measured disturbance to obtain the total disturbance of the system;
s5: and dividing the total system disturbance obtained in the step S4 by a transfer function from a control quantity to a driving force to convert the total system disturbance into an equivalent control quantity, compensating the equivalent control quantity into the control quantity of the platform rigid body, and converting the control quantity into a disturbance-free rigid body platform control system.
2. The control method according to claim 1, wherein the frame rigid body and the platform rigid body are respectively mounted with displacement speed detection units.
3. The control method of claim 1, wherein the platform rigid body mounts a drive unit.
4. The control method according to claim 1, wherein the frame rigid body is provided with a drive unit, in the same manner as in S1, using the speed and displacement of the frame rigid body as feedback, the drive unit on the frame rigid body being an actuator and establishing a closed-loop control system of the frame rigid body.
5. The control method according to claim 3 or 4, wherein a control system using the control method is composed of a control object, a displacement speed detection unit, a drive unit, and a controller.
6. The control method according to claim 1, wherein the information required in the control method is obtained by measurement or model calculation.
7. The control method of claim 1, wherein the extended state observer is a second order ESO estimating deformation speed and disturbance force when measuring displacement and speed using a capacitance sensor.
8. The control method of claim 1, wherein when the displacement and velocity are measured using a grating scale, the state observer is extended to a reduced-order ESO, and only the disturbance force is estimated.
9. The control method of claim 1, wherein when the total disturbance is small enough to make the measured disturbance 0, the degradation is active disturbance rejection control based on standard ESO.
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| CN110941181B (en) * | 2019-08-29 | 2023-01-20 | 广东工业大学 | Rigid-flexible coupling motion platform control method for piezoelectric ceramic connection |
| CN112558469B (en) * | 2020-11-18 | 2022-07-01 | 广东工业大学 | Extended state observer-model prediction control method of rigid-flexible coupling motion platform |
| CN114619451B (en) * | 2022-03-31 | 2023-12-05 | 西安交通大学 | Electromechanical control inductive coupling modeling method for serial industrial robots |
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Effective date of registration: 20210907 Address after: 528000 room 103a, building 1, No.28, East 1st block, Jiansha Road, Danzao Town, Nanhai District, Foshan City, Guangdong Province (residence declaration) Patentee after: Foshan Huadao Chaojing Technology Co.,Ltd. Address before: No. 100, Waihuan West Road, University Town, Guangzhou, Guangdong 510062 Patentee before: GUANGDONG University OF TECHNOLOGY |