CN114993160A - High-precision induction distance measuring sensor - Google Patents

High-precision induction distance measuring sensor Download PDF

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Publication number
CN114993160A
CN114993160A CN202210772070.3A CN202210772070A CN114993160A CN 114993160 A CN114993160 A CN 114993160A CN 202210772070 A CN202210772070 A CN 202210772070A CN 114993160 A CN114993160 A CN 114993160A
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CN
China
Prior art keywords
inductive
aluminum alloy
circuit board
capacitor
induction
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Pending
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CN202210772070.3A
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Chinese (zh)
Inventor
张万刚
彭章军
王文平
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Shenzhen Weiqin Electronic Technology Co ltd
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Shenzhen Weiqin Electronic Technology Co ltd
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Priority to CN202210772070.3A priority Critical patent/CN114993160A/en
Publication of CN114993160A publication Critical patent/CN114993160A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/24Investigating the presence of flaws

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

The invention relates to the technical field of distance measuring sensors, in particular to a high-precision induction distance measuring sensor, which comprises: an aluminum alloy housing; the circuit board is fixedly arranged in the aluminum alloy shell through a plurality of first screws; the induction metal heads are distributed and installed on the circuit board; the sensing target body is matched with the induction metal head to form a capacitor; the high-precision induction ranging sensor is novel in structure, and can be copied and arranged in an array mode, so that the multi-lattice measurement capability is formed, and the practicability and flexibility of equipment and the accuracy of equipment inspection are improved.

Description

High-precision induction distance measuring sensor
Technical Field
The invention relates to the technical field of distance measuring sensors, in particular to a high-precision induction distance measuring sensor.
Background
The distance measuring sensor is a sensor for measuring the distance from the sensor to a measured target, and generally, most laser distance measuring sensors in optical distance measuring sensors are used for measuring the surface flatness and defects of short-distance high-precision distance measuring scenes such as high-precision workpieces.
At present, a laser ranging sensor calculates a distance by measuring a time difference between transmission and reception of laser light and according to a transmission speed. The sensor has the advantages of high precision and capability of working in a dark field environment, but the sensor is high in cost, can only carry out single-point ranging, is easily influenced by a measuring environment and is very inconvenient to use, so that the high-precision induction ranging sensor is urgently needed to be developed aiming at the current situation so as to overcome the defects in the current practical application.
Disclosure of Invention
The present invention is directed to a high-precision inductive ranging sensor, which solves the above problems.
In order to achieve the purpose, the invention provides the following technical scheme:
a high-precision inductive ranging sensor, comprising:
an aluminum alloy housing;
the circuit board is fixedly arranged in the aluminum alloy shell through a plurality of first screws;
the induction metal heads are distributed and installed on the circuit board;
the sensing target body is matched with the sensing metal head to form a capacitor, and the range measurement range of the capacitor is in the millimeter and ten millimeter level; and
and the distance measuring assembly is respectively connected with the aluminum alloy shell and the circuit board.
Compared with the prior art, the invention has the beneficial effects that:
(1) through the fixed polar substrate of the capacitor in the precision induction measurement system that sets up, electric capacity output pole in the capacitor promptly can duplicate and arrange through the array mode to form many dot matrix measuring's ability, improved the practicality and the flexibility of equipment, and the degree of accuracy of equipment inspection.
(2) Through the capacitor that constitutes between the response metal head that sets up and the sensing target body, the range of measuring distance of design electric capacity is millimeter and ten millimeter levels, and external circuit's central resonant frequency is MHz and ten MHz to realize capacitance sensor's super high accuracy measurement, can be applied to closely high accuracy range finding application scenario, for example high accuracy work piece surface smoothness and defect measurement etc..
Drawings
Fig. 1 is a schematic perspective view of a high-precision inductive ranging sensor according to the present invention.
Fig. 2 is a schematic top view of the high-precision inductive ranging sensor according to the present invention.
Fig. 3 is a schematic sectional view of the high-precision inductive ranging sensor according to the present invention.
Fig. 4 is a schematic diagram of the distance measurement operation of the high-precision induction distance measuring sensor of the present invention.
In the figure: the device comprises a sensing metal head, a 2-insulating sealing ring, a 3-aluminum alloy shell, a 4-first screw, a 5-circuit board, a 6-cable, a 7-second screw, an 8-aluminum alloy cover plate, a 9-anti-breaking joint and a 10-sensing target body.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Specific implementations of the present invention are described in detail below with reference to specific embodiments.
Referring to fig. 1-3, an embodiment of the present invention provides a high-precision sensing distance measuring sensor, including:
an aluminum alloy housing 3;
the circuit board 5 is fixedly arranged in the aluminum alloy shell 3 through a plurality of first screws 4;
the induction metal heads 1 are distributed and installed on the circuit board 5;
the sensing target body 10, the sensing target body 10 and the induction metal head 1 are matched to form a capacitor; and
and the distance measuring assembly is respectively connected with the aluminum alloy shell 3 and the circuit board 5.
In one embodiment of the present invention, referring to fig. 3 and 4, the ranging module includes:
the anti-break joint 9 is positioned on one side of the aluminum alloy shell 3; and
and one end of the cable 6 penetrates through the anti-breaking joint 9 and is connected with the circuit board 5.
Referring to fig. 1-4, the sensing metal head 1 is formed by a set of mutually independent sensing elements as a fixed pole substrate of a capacitor in a precision induction measuring system, i.e. a capacitor output pole in the capacitor, and the sensing target 10 is used as a variable pole of the capacitor in the precision induction measuring system.
The sensing element takes a material with high insulation coefficient and good strength and temperature coefficient as a base material, and an induction measuring metal substrate with high flatness is arranged on the base material fixing basis.
The sensing element is made of glass or ceramic material, and the induction measuring metal substrate is made of copper, copper alloy, silver plating or zirconium oxide material.
Referring to fig. 3, an insulating seal ring 2 is disposed between the sensing metal head 1 and the circuit board 5.
When the distance measurement is carried out, a precision induction measurement system is formed by the induction metal head 1 and the sensing object body 10, the induction metal head 1 consists of a group of mutually independent metal sensing elements and is used as a fixed pole substrate of a capacitor in the precision induction measurement system, the sensing object body 10 is used as a variable pole of the capacitor in the precision induction measurement system, a standard sensing object is used as a calibration piece to obtain a distance measurement reference, and when the distance measurement is carried out on the surface of the sensing object body 10, the capacitance decision formula is adopted: c ═ S/(4 pi kd) can be known, compared with a calibration piece, the surface defect can cause the change of distance, namely, the distance between the variable pole and the fixed pole substrate of the capacitor is changed, the capacitance of the capacitor is changed, the change of the capacitance is measured, and finally the change of the distance can be converted into the change of the distance, namely, the measurement of the change of the surface distance of the sensing target body 10 is completed, which is expressed as the surface flatness and the defect of the target body, and the fixed pole substrate of the capacitor in the set precision induction measuring system, namely, the capacitance output pole in the capacitor can be copied and arranged in an array mode, thereby forming the capability of multi-lattice measurement, improving the practicability and the flexibility of the equipment and the accuracy of equipment inspection, and being worthy of popularization.
In an embodiment of the present invention, please refer to fig. 1-3, which further includes: the aluminum alloy cover plate 8 is fixedly connected with the aluminum alloy shell 3 through a plurality of second screws 7, and the aluminum alloy cover plate 8 is further matched with the circuit board 5 for installation.
The top surface of the aluminum alloy cover plate 8 is matched with the induction metal head 1 to be provided with a corresponding mounting hole position, and the top end of the induction metal head 1 penetrates through the mounting hole position and is higher than the top surface of the aluminum alloy cover plate 8.
In the use, circuit board 5 is installed on the post of 3 the inside of aluminum alloy housing through first screw 4, there is corresponding installation hole site in aluminum alloy cover plate 8's one side simultaneously, let response metal head 1 can expose certain height on aluminum alloy cover plate 8, install on aluminum alloy housing 3 with second screw 7 aluminum alloy cover plate 8 at last, in order to realize the protection to each part, during the test distance, let response metal head 1 install on the parallel plane of being surveyed the face, response metal head 1 can produce one and surveyed the capacitance signal that the distance between the face corresponds like this, this capacitance signal passes through circuit board 5's processing and amplification, corresponding analog or digital signal of rethread electric cable 6 output.
In one embodiment of the present invention, referring to fig. 1-4, the range of the capacitor is on the order of millimeters and ten millimeters.
Connecting the range-finding capacitor in series to the resonant circuit, and determining the formula by the capacitor: c ═ S/(4 pi kd), it can be known that different distances, i.e. the distance d between two plates of the capacitor is changed, thereby leading to the change of the capacitance value, the change of the capacitance value can change the frequency of the resonance circuit, the frequency value is captured precisely by a digital processor, the quantitative relation of the distance between two plates of the distance measuring capacitor sensing capacitor, the capacitance value and the change of the measuring frequency can be deduced, thereby realizing the quantitative relation of the distance and the frequency, and the capacitor formed between the sensing metal head 1 and the sensing target body 10 is designed to have the capacitance distance measuring range of millimeter and ten millimeter level, the central resonance frequency of the external circuit is MHz and ten MHz, taking 10mm, the central frequency 3MHz as an example, the frequency change is from 10mm to just contact, the corresponding frequency change is 10pf, the corresponding frequency change is 2MHz, the quantitative relation is 10mm to >2MHz, namely every change is 1Hz, the resolution of the corresponding range distance change is: the precision of 10mm/2MHz ═ 5nm level, thus realize the ultra-high precision measurement of capacitive sensor, can apply to the high-accuracy range finding application scene of closely, such as high-accuracy workpiece surface flatness and defect measurement, etc.
It should be noted that, in the present invention, unless otherwise specifically stated or limited, the terms "sliding", "rotating", "fixing", "providing", and the like are to be understood in a broad sense, and may be, for example, a welded connection, a bolted connection, or an integral body; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (8)

1. A high accuracy inductive ranging sensor, comprising:
an aluminum alloy housing;
the circuit board is fixedly arranged in the aluminum alloy shell through a plurality of first screws;
the induction metal heads are distributed and installed on the circuit board;
the sensing target body is matched with the sensing metal head to form a capacitor, and the range measurement range of the capacitor is in the millimeter and ten millimeter level; and
and the distance measuring assembly is respectively connected with the aluminum alloy shell and the circuit board.
2. A high accuracy inductive ranging sensor as claimed in claim 1 wherein said ranging assembly comprises:
an anti-break joint located on one side of the aluminum alloy housing; and
and one end of the cable penetrates through the anti-breaking joint and is connected with the circuit board.
3. A high accuracy inductive ranging sensor as claimed in claim 2 wherein the inductive metal head is composed of a set of independent sensing elements as the fixed pole substrate of the capacitor in the precision inductive measuring system, i.e. the capacitance output pole of the capacitor, and the sensing target body as the variable pole of the capacitor in the precision inductive measuring system.
4. A high accuracy inductive ranging sensor as claimed in claim 3, characterized in that the sensing element is made of material with high insulation coefficient, good strength and temperature coefficient as base material, and a piece of induction measuring metal substrate with high flatness is arranged on the base material fixing basis.
5. A high accuracy inductive ranging sensor as claimed in claim 4, characterized in that the sensing element is made of glass or ceramic material and the inductive measuring metal substrate is made of copper, copper alloy, silver plating or zirconia material.
6. A high accuracy inductive ranging sensor according to any of claims 1-5 wherein an insulating sealing ring is provided between the inductive metallic head and the circuit board.
7. A high accuracy inductive ranging sensor as claimed in claim 1 further comprising: the aluminum alloy cover plate is fixedly connected with the aluminum alloy shell through a plurality of second screws, and the aluminum alloy cover plate is further installed in a matched mode with the circuit board.
8. The high precision induction ranging sensor as claimed in claim 7, wherein the top surface of the aluminum alloy cover plate is provided with corresponding mounting holes in cooperation with the induction metal head, and the top end of the induction metal head penetrates through the mounting holes and is higher than the top surface of the aluminum alloy cover plate.
CN202210772070.3A 2022-06-30 2022-06-30 High-precision induction distance measuring sensor Pending CN114993160A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210772070.3A CN114993160A (en) 2022-06-30 2022-06-30 High-precision induction distance measuring sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210772070.3A CN114993160A (en) 2022-06-30 2022-06-30 High-precision induction distance measuring sensor

Publications (1)

Publication Number Publication Date
CN114993160A true CN114993160A (en) 2022-09-02

Family

ID=83020755

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210772070.3A Pending CN114993160A (en) 2022-06-30 2022-06-30 High-precision induction distance measuring sensor

Country Status (1)

Country Link
CN (1) CN114993160A (en)

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