CN114990512B - Hanging loading tool for vacuum coating, loading and unloading equipment and continuous vacuum coating system - Google Patents

Hanging loading tool for vacuum coating, loading and unloading equipment and continuous vacuum coating system Download PDF

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Publication number
CN114990512B
CN114990512B CN202210547168.9A CN202210547168A CN114990512B CN 114990512 B CN114990512 B CN 114990512B CN 202210547168 A CN202210547168 A CN 202210547168A CN 114990512 B CN114990512 B CN 114990512B
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China
Prior art keywords
pressing
stopper
hanging
groove
workpiece
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CN202210547168.9A
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Chinese (zh)
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CN114990512A (en
Inventor
孙晨皓
贾逸轩
杨培勇
刘浩
陆维
卢华兴
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Spic Hydrogen Energy Technology Development Co Ltd
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Spic Hydrogen Energy Technology Development Co Ltd
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Priority to CN202210547168.9A priority Critical patent/CN114990512B/en
Publication of CN114990512A publication Critical patent/CN114990512A/en
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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568Transferring the substrates through a series of coating stations
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a hanging loader for vacuum coating, loading and unloading equipment and a continuous vacuum coating system. The hanging carrier includes: the body is provided with a coating window, and the coating window penetrates through the body along a first preset direction; and a pressing member rotatably provided on the body between a pressing position to press the workpiece and a disengaged position to disengage the workpiece, the pressing member in the pressing position cooperating with the body to press the workpiece on the body. By utilizing the hanging loader for vacuum coating, the automation degree of hanging and unloading the workpieces can be improved, the hanging and unloading efficiency of the workpieces can be improved, the labor cost can be reduced, and the product qualification rate can be improved.

Description

Hanging loading tool for vacuum coating, loading and unloading equipment and continuous vacuum coating system
Technical Field
The invention relates to the technical field of plating, in particular to a hanging loader for vacuum coating, and further relates to loading and unloading equipment comprising the hanging loader and a continuous vacuum coating system.
Background
In order to improve the corrosion resistance of a workpiece (e.g., a metal bipolar plate of a fuel cell), a thin film or coating may be applied to the surface of the workpiece by means of vacuum plating. For example, the corrosion resistance of the metal bipolar plate of the fuel cell is relatively poor, and in the use environment of the fuel cell, metal ions dissolved out after the corrosion of the metal bipolar plate can pollute the proton exchange membrane of the fuel cell, reduce the overall performance of the cell stack and further cause the cell stack to fail. In addition, the passivation film generated on the metal surface after corrosion can increase the contact resistance of the metal bipolar plate surface and also can reduce the performance of the galvanic pile. Therefore, in the process of processing and forming the metal bipolar plate, the surface coating treatment is used as a key procedure, so that the corrosion resistance and the durability of the metal bipolar plate can be effectively improved, and the contact resistance is reduced.
The hanging and unloading of workpieces including metal bipolar plates are an important ring in the production of workpiece coating films, and directly affect the efficiency, quality and cost of the coating films. At present, in the coating process of the workpiece in the related art, the hanging and the unloading are both performed manually, the workpiece is needed to be sequentially hung on a coating rotating frame by manpower and is hooked by a spring device, so that the workpiece is prevented from falling in a coating cavity, and good conductivity between the workpiece and the rotating frame is ensured.
Disclosure of Invention
The present invention aims to solve at least one of the technical problems in the related art to some extent. To this end, embodiments of the present invention provide a hanging loader for vacuum coating, loading and unloading equipment, and a continuous vacuum coating system.
The hanging carrier for vacuum coating according to the embodiment of the invention comprises: the body is provided with a coating window, and the coating window penetrates through the body along a first preset direction; and a pressing member rotatably provided on the body between a pressing position to press the workpiece and a disengaged position to disengage the workpiece, the pressing member in the pressing position cooperating with the body to press the workpiece on the body.
By utilizing the hanging loader for vacuum coating, the automation degree of hanging and unloading the workpiece can be improved, the hanging and unloading efficiency of the workpiece can be improved, and the labor cost can be reduced.
Optionally, the body further has a receiving groove for receiving a workpiece, the coating window is opposite to the receiving groove in the first preset direction, and the coating window is communicated with the receiving groove.
Optionally, the pressing part includes a rotating part and a pressing part, the rotating part is rotatably disposed on the body between the pressing position and the disengaging position, the pressing part is disposed on the rotating part, wherein the pressing part of the pressing part located at the pressing position and the bottom wall surface of the accommodating groove are disposed opposite to each other in the first preset direction so that the pressing part presses the workpiece on the bottom wall surface of the accommodating groove, and the coating window is disposed on the bottom wall surface of the accommodating groove.
Optionally, one of the rotating portion and the body has a limit groove, the hanging carrier further includes a limit piece movably disposed on the other of the rotating portion and the body between a limit position and a retracted position, wherein the limit piece is located at the limit position when the pressing piece is located at the pressing position, at least a portion of the limit piece is fitted in the limit groove, the limit piece is located at the retracted position when the pressing piece is located at the disengaging position, and the limit piece is disengaged from the limit groove.
Optionally, the body has a holding cavity, the first part of the rotating part is located in the holding cavity, and one of the first part and the wall surface of the holding cavity is provided with the limit groove.
Optionally, the limiting groove is formed in the peripheral surface of the first portion, a limiting piece groove is formed in the wall surface of the accommodating cavity, the limiting piece is movably arranged in the limiting piece groove between the limiting position and the retracting position, at least one part of the limiting piece located at the limiting position extends out of the limiting piece groove, and at least one part of the limiting piece located at the retracting position is located in the limiting piece groove.
Optionally, the hanging tool further includes a first elastic member located in the limiting member groove, one end of the first elastic member abuts against a wall surface of the limiting member groove, and the other end of the first elastic member abuts against the limiting member, wherein the first elastic member is in a deformed state so as to normally push the limiting member to the limiting position.
Optionally, the wall surface of the limiting groove is an arc surface, the first end part of the limiting piece located at the limiting position is matched in the limiting groove, and the surface of the first end part is an arc surface.
Optionally, the body has a plurality of along the second is predetermine the direction interval arrangement hold the groove, every hold the bottom wall face of groove and seted up the coating film window, the second is predetermine the direction perpendicular to first predetermine the direction, wherein the axis of rotation portion is parallel to the second is predetermine the direction, the suppression portion is a plurality of the suppression portion is followed the second is predetermine the direction interval and is established on the rotation portion, every hold the bottom wall face of groove with be located the suppression position the at least one suppression portion of suppression piece is in the first is predetermine the direction and is set up relatively.
Optionally, the pressing member further includes a connection portion, one end of the connection portion is connected to the rotation portion, and the other end of the connection portion is connected to the pressing portion.
Optionally, the pressing member further includes a second elastic member for pressing the workpiece, one end of the second elastic member is connected to the connecting portion, and the other end of the second elastic member is connected to the pressing portion, wherein the second elastic member of the pressing member located at the pressing position is in a deformed state so as to push the workpiece toward the body.
Optionally, the number of the pressing pieces is two, the two pressing pieces are arranged at intervals along a third preset direction, and the third preset direction is perpendicular to the first preset direction.
The feeding and discharging equipment provided by the embodiment of the invention comprises the following components: the hanging and loading device is used for vacuum coating according to the embodiment of the invention; and a loading manipulator and a unloading manipulator, each of the loading manipulator and the unloading manipulator comprising a suction cup, the loading manipulator cooperating with the hanging loader for placing a workpiece on the hanging loader, the unloading manipulator cooperating with the hanging loader for removing a workpiece from the hanging loader.
The loading and unloading equipment provided by the embodiment of the invention has the advantages of high automation degree of workpiece hanging and unloading, high workpiece hanging and unloading efficiency and low labor cost.
The continuous vacuum coating system according to the embodiment of the invention comprises a hanging loader, wherein the hanging loader is used for vacuum coating according to the embodiment of the invention.
The continuous vacuum coating system provided by the embodiment of the invention has the advantages of high automation degree of workpiece hanging and unloading, high workpiece hanging and unloading efficiency and low labor cost.
Drawings
Fig. 1 is a schematic structural view of a hanging tool for vacuum coating according to an embodiment of the present invention.
Fig. 2 is a partial cross-sectional view of a hanging carrier for vacuum coating according to an embodiment of the present invention.
Fig. 3 is an enlarged view of region a in fig. 1.
Fig. 4 is an enlarged view of region B in fig. 1.
Fig. 5 is a schematic view showing a partial structure of a vacuum plating system 1000 according to an embodiment of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the drawings are illustrative and intended to explain the present invention and should not be construed as limiting the invention.
As shown in fig. 1 to 4, a hanging fixture 100 for vacuum coating according to an embodiment of the present invention includes a body 1 and a pressing member 2a. The body 1 is provided with a coating window 11, and the coating window 11 penetrates through the body 1 along a first preset direction. The pressing member 2a is rotatably provided on the body 1 between a pressing position where the workpiece 200 is pressed and a disengaging position where the workpiece 200 is disengaged. The pressing member 2a located at the pressing position cooperates with the body 1 to press the workpiece 200 against the body 1. In other words, the workpiece 200 is clamped between the body 1 and the press 2a located at the pressing position.
The use of the hanging carrier 100 is briefly described below with reference to fig. 1-4. First, the body 1 is placed substantially horizontally, and then the workpiece 200 is placed on the body 1 by a loading robot so as to achieve automatic placement of the workpiece 200. At this time, the portion to be treated of the workpiece 200 is opposed to the plating window 11, i.e., the portion to be treated of the workpiece 200 is exposed from the plating window 11. After the workpiece 200 is placed on the body 1, the pressing member 2a is rotated from the disengaged position to the pressing position so that the workpiece 200 is pressed on the body 1 with the pressing member 2a.
Next, the hanging tool 100 holding the work piece 200 is placed substantially vertically, and the hanging tool 100 is brought into a functional chamber (e.g., a cleaning chamber, a plating chamber) to perform a corresponding process (cleaning, plating) on the work piece 200 on the hanging tool 100. After the work 200 is processed, the hanging tool 100 is moved out of the functional chamber.
Finally, the hanging carrier 100 holding the work 200 is placed substantially horizontally, and the pressing member 2a is rotated from the pressing position to the disengaging position, at which time the pressing member 2a is no longer in contact with the work 200, and the work 200 is removed from the body 1 by the discharging robot.
Therefore, the manipulator can be utilized to automatically finish the picking and placing of the workpiece 200, and only the pressing piece 2a is manually rotated between the disengaging position and the pressing position, so that the hanging and unloading efficiency of the workpiece 200 is improved, and the labor cost is reduced. In addition, the consistency of the hanging of the workpiece 200 can be improved, and the consistency of the coating of the workpiece 200 can be further improved, so that the product qualification rate can be improved.
By using the hanging and loading tool 100 for vacuum coating according to the embodiment of the invention, the automation degree of hanging and unloading the workpiece can be improved, the hanging and unloading efficiency of the workpiece can be improved, the labor cost can be reduced, and the product qualification rate can be improved.
As shown in fig. 1 to 4, a hanging fixture 100 for vacuum coating according to an embodiment of the present invention includes a body 1 and two pressing members 2a, 2b. The shape of the body 1 may be polygonal. Alternatively, the body 1 may be a polygonal plate (e.g., a rectangular plate).
The first preset direction may coincide with the thickness direction of the body 1. The body 1 has a first surface 15 and a second surface 16 opposite in the thickness direction thereof. When the body 1 is placed substantially horizontally (as shown in fig. 2), the thickness direction of the body 1 may coincide with the up-down direction, i.e., the first preset direction may coincide with the up-down direction. The first surface 15 may be an upper surface of the body 1 and the second surface 16 may be a lower surface of the body 1. When the body 1 is placed substantially vertically, the thickness direction of the body 1 may coincide with the front-rear direction, the first surface 15 may be a front surface of the body 1, and the second surface 16 may be a rear surface of the body 1. The up-down direction is shown by arrow C in fig. 2.
As shown in fig. 1 and 2, the body 1 further has a receiving groove 12 for receiving the workpiece 200, the coating window 11 is opposite to the receiving groove 12 in the first preset direction, and the coating window 11 communicates with the receiving groove 12. Therefore, when the workpiece 200 is placed, the workpiece 200 can be placed in the accommodating groove 12 by using the feeding manipulator, so that the workpiece 200 can be limited by using the accommodating groove 12, and the workpiece 200 is prevented from moving when the workpiece 200 is pressed by using the pressing piece 2, so that the part to be processed of the workpiece 200 is accurately exposed. Wherein the workpiece 200 may be a metallic bipolar plate of a fuel cell.
The workpiece 200 has two opposite surfaces to be treated, which may be opposite in the thickness direction of the workpiece 200. After the work 200 is placed in the accommodating groove 12, one surface to be treated of the work 200 may be exposed through the plating window 11, and the other surface to be treated of the work 200 may be exposed through the opening of the accommodating groove 12.
As shown in fig. 1, the first surface 15 of the body 1 is provided with a plurality of accommodating grooves 12, and the plurality of accommodating grooves 12 are arranged at intervals along a second preset direction, and the second preset direction is perpendicular to the first preset direction. The depth direction of each receiving groove 12 may coincide with the first preset direction. By providing a plurality of receiving grooves 12, a plurality of workpieces 200 can be simultaneously placed (held) on the hanging carrier 100, so that a plurality of workpieces 200 can be simultaneously processed, so that the processing efficiency of the workpieces 200 can be improved.
As shown in fig. 2, a coating window 11 is provided on the bottom wall surface 121 of each accommodation groove 12. That is, the body 1 may have a plurality of coating windows 11, and the plurality of coating windows 11 are opened on the bottom wall surfaces 121 of the plurality of receiving grooves 12 in one-to-one correspondence. This makes it possible to make the structure of the body 1 and the hanging tool 100 more reasonable.
As shown in fig. 1, the pressing members 2a and 2b may be disposed at intervals along a third preset direction perpendicular to the first preset direction, i.e., the first preset direction, the second preset direction, and the third preset direction may be perpendicular to each other.
When the workpiece 200 is placed in the accommodating groove 12, the thickness direction of the workpiece 200 may coincide with the first preset direction, one of the length direction and the width direction of the workpiece 200 coincides with the second preset direction, and the other of the length direction and the width direction of the workpiece 200 coincides with the third preset direction. The second preset direction is shown by arrow D in fig. 1 and the third preset direction is shown by arrow E in fig. 1.
The pressing member 2a includes a rotating portion 21a and a plurality of pressing portions 22a, and the pressing member 2b includes a rotating portion 21b and a plurality of pressing portions 22b. The rotating portion 21a is rotatably provided on the body 1 between the pressing position and the disengaging position, and the rotating portion 21b is rotatably provided on the body 1 between the pressing position and the disengaging position.
Each of the rotating parts 21a and 21b may extend in the second preset direction, and a rotation axis of each of the rotating parts 21a and 21b is parallel to the second preset direction. Alternatively, each of the rotating portion 21a and the rotating portion 21b may be cylindrical.
As shown in fig. 1, a plurality of pressing portions 22a are provided on the rotating portion 21a at intervals along the second preset direction, and a plurality of pressing portions 22b are provided on the rotating portion 21b at intervals along the second preset direction. The bottom wall surface 121 of each accommodating groove 12 is disposed opposite to the at least one pressing portion 22a of the pressing piece 2a at the pressing position in the first preset direction, and the bottom wall surface 121 of each accommodating groove 12 is disposed opposite to the at least one pressing portion 22b of the pressing piece 2b at the pressing position in the first preset direction.
Alternatively, the workpiece 200 may be generally rectangular. The bottom wall surface 121 of each accommodating groove 12 is disposed opposite to the two pressed portions 22a of the pressed piece 2a at the pressing position in the first preset direction, and the bottom wall surface 121 of each accommodating groove 12 is disposed opposite to the two pressed portions 22b of the pressed piece 2b at the pressing position in the first preset direction. Thereby, the two pressing portions 22a and the two pressing portions 22b can be pressed at the four corners of the work 200, so that the work 200 can be pressed more stably on the body 1 (the bottom wall surface 121 of the accommodation groove 12).
Both the pressing portion 22a and the pressing portion 22b may be flat plate-like. The press portion 22a of the press 2a in the pressing position may be parallel to the work 200, and the press portion 22b of the press 2b in the pressing position may be parallel to the work 200. The pressing portions 22a and 22b can thereby press the work 200 more stably against the body 1 (the bottom wall surface 121 of the accommodating groove 12).
As shown in fig. 1, the pressing member 2a further includes a connecting portion 24a, one end of the connecting portion 24a is connected to the rotating portion 21a, and the other end of the connecting portion 24a is connected to the pressing portion 22 a. The pressing member 2b further includes a connecting portion 24b, one end of the connecting portion 24b is connected to the rotating portion 21b, and the other end of the connecting portion 24b is connected to the pressing portion 22 b. The structure of the press 2a and the press 2b can thereby be made more rational.
The connection portion 24a may include a first connection section 241a, an intermediate section 242a, and a second connection section 243a that are sequentially connected. When the pressing member 2a is located at the pressing position, each of the first and second connecting sections 241a and 243a extends in the first preset direction, and the intermediate section 242a extends in the third preset direction. The connection parts 24a may be plural, and one end of the first connection section 241a of each connection part 24a is connected to the rotation part 21a, and one end of the second connection section 243a of the plural connection parts 24a is connected to the plural pressing parts 22a in one-to-one correspondence.
The connection portion 24b may include a first connection section 241b, an intermediate section 242b, and a second connection section 243b that are sequentially connected. When the pressing member 2b is located at the pressing position, each of the first and second connecting sections 241b and 243b extends in the first preset direction, and the intermediate section 242b extends in the third preset direction. The connection parts 24b may be plural, and one end of the first connection section 241b of each connection part 24b is connected to the rotation part 21b, and one end of the second connection section 243b of the plural connection parts 24b is connected to the plural pressing parts 22b in one-to-one correspondence. Thereby making the structures of the connection portions 24a and 24b more reasonable.
As shown in fig. 1, the pressing member 2a further includes a second elastic member 42a for pressing the work 200, one end of the second elastic member 42a is connected to the connecting portion 24a, and the other end of the second elastic member 42a is connected to the pressing portion 22 a. Wherein the second elastic member 42a of the pressing member 2a located at the pressing position is in a deformed state (e.g., compressed state) so as to push the work 200 toward the body 1.
The pressing member 2b further includes a second elastic member 42b for pressing the work 200, one end of the second elastic member 42b is connected to the connecting portion 24b, and the other end of the second elastic member 42b is connected to the pressing portion 22 b. Wherein the second elastic member 42b of the pressing member 2b at the pressing position is in a deformed state (e.g., compressed state) so as to push the work 200 toward the body 1.
By providing the second elastic members 42a, 42b, the pressing force applied to the work 200 can be increased so as to press the work 200 more stably against the body 1. This makes it possible to make the workpiece 200 more contact-conductive with the body 1 even if the workpiece 200 and the hanging tool 100 are more contact-conductive, thereby being more advantageous for improving the compactness of the surface plating of the workpiece 200.
Alternatively, the second elastic members 42a, 42b may be springs. The one end of the second elastic member 42a is connected to the second connection section 243a, and the one end of the second elastic member 42b is connected to the second connection section 243 b.
As shown in fig. 1, 3 and 4, one of the rotating portion 21a and the body 1 has a stopper groove 23a, and one of the rotating portion 21b and the body 1 has a stopper groove 23b. The hanging carrier 100 further includes stopper pieces 3a, 3b, the stopper piece 3a being provided on the other of the rotating portion 21a and the body 1 movably between a stopper position and a retracted position, the stopper piece 3b being provided on the other of the rotating portion 21b and the body 1 movably between a stopper position and a retracted position.
In other words, the rotating portion 21a has the stopper groove 23a and the stopper 3a is movably provided on the body 1 between the stopper position and the retracted position, or the body 1 has the stopper groove 23a and the stopper 3a is movably provided on the rotating portion 21a between the stopper position and the retracted position. The rotating portion 21b has a stopper groove 23b and a stopper 3b is movably provided on the body 1 between the stopper position and the retracted position, or the body 1 has a stopper groove 23b and a stopper 3b is movably provided on the rotating portion 21b between the stopper position and the retracted position.
When the pressing member 2a is located at the pressing position, the limiting member 3a is located at the limiting position, at least a portion of the limiting member 3a is fitted in the limiting groove 23a, and when the pressing member 2a is located at the disengaging position, the limiting member 3a is located at the retracting position, and the limiting member 3a is disengaged from the limiting groove 23a. When the pressing member 2b is in the pressing position, the limiting member 3b is in the limiting position, at least a part of the limiting member 3b is fitted in the limiting groove 23b, and when the pressing member 2b is in the disengaging position, the limiting member 3b is in the retracted position, and the limiting member 3b is disengaged from the limiting groove 23b.
That is, when the pressing pieces 2a, 2b (the rotating portions 21a, 21 b) are moved from the escape position to the pressing position, the stoppers 3a, 3b are moved from the retracted position to the stopper position. When the pressing members 2a, 2b (the rotating portions 21a, 21 b) are moved from the pressing position to the disengaging position, the stoppers 3a, 3b are moved from the restricting position to the retracted position.
The pressing member 2a can be limited by the limiting member 3a and the pressing member 2b can be limited by the limiting member 3b, so that the pressing members 2a and 2b can be limited to the pressing position, the pressing members 2a and 2b can press the workpiece 200 on the body 1 more stably, and the workpiece 200 is prevented from falling off the body 1 (the hanging carrier 100).
The body 1 has accommodation chambers 13a, 13b, a first portion 211a of the rotating portion 21a is located in the accommodation chamber 13a, one of the first portion 211a and a wall surface of the accommodation chamber 13a is provided with a stopper groove 23a, a first portion 211b of the rotating portion 21b is located in the accommodation chamber 13b, and one of the first portion 211b and a wall surface of the accommodation chamber 13b is provided with a stopper groove 23b. This makes the structure of the hanging carrier 100 more reasonable.
As shown in fig. 3 and 4, a stopper groove 23a is provided on the peripheral surface of the first portion 211a, a stopper groove 23b is provided on the peripheral surface of the first portion 211b, a stopper groove 14a is provided on the wall surface of the accommodating chamber 13a, and a stopper groove 14b is provided on the wall surface of the accommodating chamber 13 b. The stopper 3a is movably disposed in the stopper groove 14a between the stopper position and the retracted position, and the stopper 3b is movably disposed in the stopper groove 14b between the stopper position and the retracted position.
Wherein at least a portion of the stopper 3a in the stopper position extends out of the stopper groove 14a, and at least a portion of the stopper 3a in the retracted position is located in the stopper groove 14 a. At least a portion of the stopper 3b in the stopper position extends out of the stopper groove 14b, and at least a portion of the stopper 3b in the retracted position is located in the stopper groove 14b. By providing the stopper grooves 14a, 14b, the stoppers 3a, 3b can be moved between the stopper position and the retracted position more stably.
As shown in fig. 3 and 4, the hanging carrier 100 further includes first elastic members 41a, 41b, the first elastic member 41a is located in the stopper groove 14a, and the first elastic member 41b is located in the stopper groove 14 b. One end of the first elastic member 41a abuts on the wall surface of the stopper groove 14a, the other end of the first elastic member 41a abuts on the stopper 3a, one end of the first elastic member 41b abuts on the wall surface of the stopper groove 14b, and the other end of the first elastic member 41b abuts on the stopper 3 b.
Wherein the first elastic member 41a is in a deformed state (e.g., compressed state) so as to normally push the stopper 3a to the stopper position, and the first elastic member 41b is in a deformed state (e.g., compressed state) so as to normally push the stopper 3b to the stopper position. That is, when the stopper 3a is in the retracted position, the first elastic member 41a is in a deformed state, and when the stopper 3a is in the stopper position, the first elastic member 41a is also in a deformed state; when the stopper 3b is in the retracted position, the first elastic member 41b is in a deformed state, and when the stopper 3b is in the stopper position, the first elastic member 41b is also in a deformed state.
By providing the first elastic member 41a between the stopper 3a and the wall surface of the stopper groove 14a and the first elastic member 41b between the stopper 3b and the wall surface of the stopper groove 14b, not only the stoppers 3a, 3b can be automatically pushed from the retracted position to the stopper position by the first elastic members 41a, 41b, but also the elastic force toward the stopper position can be applied to the stoppers 3a, 3b by the first elastic members 41a, 41b so as to bring the stoppers 3a, 3b to the stopper position more stably, and the pressing members 2a, 2b (the rotating portions 21a, 21 b) to the pressing position more stably. Alternatively, the first elastic members 41a, 41b may be springs.
In order to make the solution of the present application easier to understand, the use of the hanging carrier 100 will be further described by taking the example that the pressing members 2a, 2b extend in the front-rear direction when the body 1 is placed substantially horizontally and the pressing member 2a is located on the left side of the pressing member 2 b. The front-rear direction is shown by arrow F in fig. 1, and the left-right direction is shown by arrow G in fig. 1.
The front end of the rotating portion 21a is located in the accommodating chamber 13a, the peripheral surface of the front end of the rotating portion 21a is provided with a limit groove 23a, the front end of the rotating portion 21b is located in the accommodating chamber 13b, the peripheral surface of the front end of the rotating portion 21b is provided with a limit groove 23b, and the rotating portion 21a is located on the left side of the rotating portion 21 b. The left side of the body 1 is provided with a limiting piece groove 14a, and the right side of the body 1 is provided with a limiting piece groove 14b. That is, a portion of the left side surface of the body 1 constitutes a portion of the wall surface of the accommodation chamber 13a, and a portion of the right side surface of the body 1 constitutes a portion of the wall surface of the accommodation chamber 13 b.
The stoppers 3a, 3b move in the left-right direction between the restricting position and the retracted position. The left end portion of the first elastic member 41a abuts on the stopper 3a, the right end portion of the first elastic member 41a abuts on the bottom wall surface of the stopper groove 14a, the right end portion of the first elastic member 41b abuts on the stopper 3b, and the left end portion of the first elastic member 41b abuts on the bottom wall surface of the stopper groove 14b.
When the pressing members 2a, 2b (the rotating portions 21a, 21 b) are located at the disengaged position, the first elastic members 41a, 41b are in a compressed state, the left end portion of the stopper 3a abuts on the peripheral surface of the front end portion of the rotating portion 21a, and the right end portion of the stopper 3b abuts on the peripheral surface of the front end portion of the rotating portion 21 b.
After the work 200 is placed in the accommodating groove 12, the rotating portion 21a is rotated clockwise (seen from the front to the rear) so that the rotating portion 21a is rotated from the disengaged position to the pressing position, the stopper 3a is opposed to the stopper groove 23a of the rotating portion 21a located at the pressing position in the left-right direction, whereby the first elastic member 41a pushes the stopper 3a to move from the retracted position to the stopper position so that the stopper 3a moves from the retracted position to the stopper position, and the left end portion of the stopper 3a located at the stopper position is fitted in the stopper groove 23a so as to restrict the rotating portion 21a (pressing member 2 a) to the pressing position while the first elastic member 41a is still in the compressed state.
The rotating portion 21b is rotated counterclockwise (seen from the front to the rear) so that the rotating portion 21b rotates from the disengaged position to the pressing position, the stopper 3b is opposed to the stopper groove 23b of the rotating portion 21b located at the pressing position in the left-right direction, whereby the first elastic member 41b pushes the stopper 3b to move from the left to the right so that the stopper 3b moves from the retracted position to the stopper position, and the right end portion of the stopper 3b located at the stopper position fits in the stopper groove 23b so as to restrict the rotating portion 21b (pressing member 2 b) to the pressing position, while the first elastic member 41b is still in the compressed state.
After the work 200 is processed, the rotating portion 21a is rotated counterclockwise (seen from the front to the rear) so that the rotating portion 21a is rotated from the pressing position to the disengaging position. The wall of the limit groove 23a moves toward the right pushing limit piece 3a so that the limit piece 3a moves from the limit position to the retracted position and is disengaged from the limit groove 23a. The rotating portion 21b is rotated clockwise (seen from the front to the rear) so that the rotating portion 21b rotates from the pressing position to the disengaging position. The wall of the limit groove 23b moves toward the left pushing limit piece 3b so that the limit piece 3b moves from the limit position to the retracted position and is disengaged from the limit groove 23b.
Alternatively, the wall surfaces of the limit grooves 23a, 23b are arc surfaces. The first end 31a (e.g., left end) of the stopper 3a located at the limit position is fitted in the limit groove 23a, and the surface of the first end 31a of the stopper 3a is an arc surface. The first end 31b (e.g., right end) of the stopper 3b located at the limit position is fitted in the limit groove 23b, and the surface of the first end 31b of the stopper 3b is an arc surface. Thereby, the first end 31a of the stopper 3a can be more smoothly separated from the stopper groove 23a and the first end 31b of the stopper 3b can be more smoothly separated from the stopper groove 23b, so that the pressing members 2a, 2b (the rotating portions 21a, 21 b) can be more smoothly moved from the pressing position to the separating position, so that the work 200 can be more easily removed from the body 1.
For example, the wall surfaces of the limiting grooves 23a and 23b are spherical crowns, the surface of the first end 31a of the limiting member 3a is spherical crowns, and the surface of the first end 31b of the limiting member 3b is spherical crowns. Thereby, the first end 31a of the stopper 3a can be more smoothly separated from the stopper groove 23a and the first end 31b of the stopper 3b can be more smoothly separated from the stopper groove 23b, so that the pressing members 2a, 2b (the rotating portions 21a, 21 b) can be more smoothly moved from the pressing position to the separating position, so that the work 200 can be more easily removed from the body 1.
As shown in fig. 3 and 4, the pressing member 2a further includes a handle 25a provided on the rotating portion 21a, and the pressing member 2b further includes a handle 25b provided on the rotating portion 21b, whereby the rotating portions 21a, 21 can be rotated by holding the handles 25a, 25 b. Alternatively, a handle 25a is provided on an end face of the rotating portion 21a, and a handle 25b is provided on an end face of the rotating portion 21 b.
The invention also provides loading and unloading equipment. The loading and unloading apparatus according to the embodiment of the present invention includes the loading manipulator, the unloading manipulator, and the hanging loader 100 according to the above embodiment of the present invention. Each of the loading robot and the unloading robot includes a suction cup, which can adsorb the workpiece 200. The loading robot cooperates with the hanging loader 100 to place the workpiece 200 on the hanging loader 100, and the unloading robot cooperates with the hanging loader 100 to remove the workpiece 200 from the hanging loader 100.
The loading and unloading equipment provided by the embodiment of the invention has the advantages of high automation degree of workpiece hanging and unloading, high workpiece hanging and unloading efficiency, low labor cost, high product qualification rate and the like.
The invention also provides a continuous vacuum coating system 1000. The continuous vacuum coating system 1000 according to the embodiment of the present invention includes the hanging fixture 100 according to the above-described embodiment of the present invention.
The continuous vacuum coating system 1000 according to the embodiment of the invention has the advantages of high automation degree of workpiece hanging and unloading, high workpiece hanging and unloading efficiency, low labor cost, high product qualification rate and the like.
As shown in fig. 5, the continuous vacuum coating system 1000 according to the embodiment of the present invention may further include a loading chamber 300, a unloading chamber 400, and a plurality of functional units 500. Each functional unit 500 comprises a first transition chamber 510, a functional chamber 520 and a second transition chamber 530, which are connected in sequence, i.e. the functional chamber 520 is located between the first transition chamber 510 and the second transition chamber 530. The loading chamber 300, the plurality of functional units 500, and the unloading chamber 400 are sequentially connected, i.e., the loading chamber 300, the functional units 500, the operation of the functional units 500, and the unloading chamber 400 are sequentially arranged.
The hanging tool 100 and the work 200 hung on the hanging tool 100 may pass through the loading chamber 300, the functional unit 500, the operation unit 500, and the unloading chamber 400 in this order.
The loading chamber 300 is connected to the first transition chamber 510 of the adjacent functional unit 500, and the unloading chamber 400 is connected to the second transition chamber 530 of the adjacent functional unit 500. In other words, the feeding chamber 300 is connected to the first transition chamber 510 of an adjacent one of the plurality of functional units 500, and the discharging chamber 400 is connected to the second transition chamber 530 of an adjacent one of the plurality of functional units 500. The second transition chamber 530 of one of the two adjacent functional units 500 is connected to the first transition chamber 510 of the other of the two adjacent functional units 500, i.e. there are at least two transition chambers between the functional chambers 520 of the two adjacent functional units 500.
The hanging tool 100 from the loading chamber 300 or the previous (upstream) functional unit 500 and the work piece 200 hanging on the hanging tool 100 enter the first transition chamber 510 of the present functional unit 500 and further into the functional chamber 520 for a corresponding treatment. If only one treatment of the workpiece 200 is required, the treated workpiece 200 may enter the second transition chamber 530 of the present functional unit 500 and further into the subsequent (downstream) functional unit 500 or the blanking chamber 400.
If multiple treatments of the workpiece 200 are required, the once treated workpiece 200 may be introduced into the second transition chamber 530 and returned to the functional chamber 520 for further treatment of the workpiece 200. This is repeated until all processing of the workpiece 200 in this functional unit 500 is completed. Since the multiple processing of the workpiece 200 only occupies the functional chamber 520 and the second transition chamber 530, the workpiece 200 of the loading chamber 300 or the previous functional unit 500 may enter the first transition chamber 510 of the present functional unit 500 while the workpiece 200 is processed multiple times. Thus, the work 200 is prevented from being left in the loading chamber 300 or the previous functional unit 500, so that the loading of the subsequent work is not affected, and the processing of the subsequent work by the previous functional unit 500 is not affected.
If no subsequent work pieces enter the first transition chamber 510 of the present functional unit 500, the work pieces 200 may also return from the functional chamber 520 into the first transition chamber 510 and then enter the functional chamber 520 again for reprocessing the work pieces 200.
The continuous vacuum coating system 1000 according to the embodiment of the present invention can implement multiple processes on the workpiece 200 without affecting the subsequent workpiece entering the functional unit 500 by including each functional unit 500 with the functional chamber 520 and the first transition chamber 510 and the second transition chamber 530 located at both sides of the functional chamber 520. Thus, not only the processing efficiency and throughput of the continuous vacuum coating system 1000 can be improved, but also the processing effect of the workpiece 200 can be improved.
In the related art, in order to process a workpiece a plurality of times, a plurality of processing apparatuses each of which processes the workpiece once need to be provided in a functional chamber. Since the workpiece 200 can be reciprocally moved (moved back and forth) between the functional compartment 520 and the second transition compartment 530 (the first transition compartment 510) of the present application, it is only necessary to provide a small number of processing devices, even one, in the functional compartment 520 to process the workpiece 200 a plurality of times. Thereby not only simplifying the structure of the functional unit 500 and the continuous vacuum coating system 1000, reducing the manufacturing cost and manufacturing difficulty of the functional unit 500 and the continuous vacuum coating system 1000, but also reducing the space occupied by the functional unit 500 and the continuous vacuum coating system 1000 and reducing the cost of maintaining the vacuum degree of the functional unit 500.
In addition, when the functional unit 500 and the blanking chamber 400 are temporarily disabled due to a failure or the like, the work 200 having undergone the corresponding process may be temporarily stored in the second transition chamber 530 of the previous functional unit 500. At this time, the previous functional unit 500 may process the subsequent workpiece by using the first transition chamber 510 and the functional chamber 520, so as to avoid the stop of the operation of the whole continuous vacuum coating system 1000 due to the temporary non-use of the functional unit 500 and the blanking chamber 400, thereby further improving the processing efficiency and throughput of the continuous vacuum coating system 1000.
Therefore, the continuous vacuum coating system 1000 according to the embodiment of the invention has the advantages of high treatment efficiency and treatment amount, good treatment effect, low manufacturing cost and difficulty, low running cost and the like.
As shown in fig. 5, the plurality of functional units 500 may include a cleaning unit 500a, a first plating unit 500b, and a second plating unit 500c. Optionally, the loading chamber 300, the plurality of functional units 500, and the unloading chamber 400 are sequentially connected in a certain direction. For example, the loading chamber 300, the cleaning unit 500a, the first coating unit 500b, the second coating unit 500c, and the unloading chamber 400 are sequentially connected in a certain direction.
As shown in fig. 5, the cleaning unit 500a includes a first transition chamber 510a, a cleaning chamber 520a, and a second transition chamber 530a connected in sequence, and the first transition chamber 510a of the cleaning unit 500a is connected to the loading chamber 300. The first coating unit 500b includes a first transition chamber 510b, a first coating chamber 520b, and a second transition chamber 530b connected in sequence, and the first transition chamber 510b of the first coating unit 500b is connected to the second transition chamber 530a of the cleaning unit 500 a. The second coating unit 500c includes a first transition chamber 510c, a second coating chamber 520c, and a second transition chamber 530c, which are sequentially connected, the first transition chamber 510c of the second coating unit 500c is connected to the second transition chamber 530b of the first coating unit 500b, and the second transition chamber 530c of the second coating unit 500c is connected to the blanking chamber 400.
Optionally, the feeding chamber 300, the first transition chamber 510a, the cleaning chamber 520a, the second transition chamber 530a, the first transition chamber 510b, the first plating chamber 520b, the second transition chamber 530b, the first transition chamber 510c, the second plating chamber 520c, the second transition chamber 530c, and the discharging chamber 400 are sequentially connected along a certain direction (e.g., a horizontal direction).
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
For purposes of this disclosure, the terms "one embodiment," "some embodiments," "example," "a particular example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
While embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the invention.

Claims (12)

1. A hanging fixture for vacuum coating, comprising:
The device comprises a body, a first connecting piece and a second connecting piece, wherein the body is provided with a coating window and a containing groove for containing a workpiece, the coating window penetrates through the body along a first preset direction, the coating window is opposite to the containing groove in the first preset direction, and the coating window is communicated with the containing groove; and
the pressing piece is rotatably arranged on the body between a pressing position for pressing the workpiece and a disengaging position for disengaging the workpiece, and the pressing piece at the pressing position is matched with the body so as to press the workpiece on the body;
the pressing part comprises a rotating part and a pressing part, the rotating part is rotatably arranged on the body between the pressing position and the disengaging position, the pressing part is arranged on the rotating part, the pressing part of the pressing part positioned at the pressing position and the bottom wall surface of the accommodating groove are oppositely arranged in the first preset direction so that the pressing part presses the workpiece on the bottom wall surface of the accommodating groove, and the coating window is arranged on the bottom wall surface of the accommodating groove.
2. The hanging tool for vacuum coating according to claim 1, wherein one of the rotating portion and the body has a stopper groove, the hanging tool further comprising a stopper member movably provided on the other of the rotating portion and the body between a stopper position and a retracted position, wherein the stopper member is located at the stopper position when the pressing member is located at the pressing position, at least a portion of the stopper member is fitted in the stopper groove, the stopper member is located at the retracted position when the pressing member is located at the disengaging position, and the stopper member is disengaged from the stopper groove.
3. The hanging carrier for vacuum coating according to claim 2, wherein the body has a receiving cavity, the first portion of the rotating portion is located in the receiving cavity, and one of the first portion and a wall surface of the receiving cavity is provided with the limit groove.
4. A hanging tool for vacuum coating according to claim 3, wherein the limit groove is provided on the peripheral surface of the first portion, a limit piece groove is provided on the wall surface of the accommodation chamber, the limit piece is movably provided in the limit piece groove between the limit position and the retracted position, at least a part of the limit piece in the limit position extends out of the limit piece groove, and at least a part of the limit piece in the retracted position is provided in the limit piece groove.
5. The hanging fixture for vacuum coating according to claim 4, further comprising a first elastic member located in the stopper groove, one end of the first elastic member being abutted against a wall surface of the stopper groove, the other end of the first elastic member being abutted against the stopper, wherein the first elastic member is in a deformed state so as to normally push the stopper toward the stopper position.
6. The hanging fixture for vacuum coating according to claim 2, wherein the wall surface of the limiting groove is an arc surface, the first end of the limiting piece located at the limiting position is fitted in the limiting groove, and the surface of the first end is an arc surface.
7. The hanging tool for vacuum coating according to claim 1, wherein the body has a plurality of the accommodation grooves arranged at intervals along a second preset direction, the coating window is provided on a bottom wall surface of each of the accommodation grooves, the second preset direction is perpendicular to the first preset direction, wherein a rotation axis of the rotating portion is parallel to the second preset direction, the pressing portion is a plurality of pressing portions provided on the rotating portion at intervals along the second preset direction, and the bottom wall surface of each of the accommodation grooves is provided opposite to at least one of the pressing portions of the pressing member located at the pressing position in the first preset direction.
8. The hanging tool for vacuum coating according to claim 1, wherein the pressing member further comprises a connection portion, one end of the connection portion is connected to the rotation portion, and the other end of the connection portion is connected to the pressing portion.
9. The hanging tool for vacuum coating according to claim 8, wherein the pressing member further comprises a second elastic member for pressing a workpiece, one end of the second elastic member is connected to the connection portion, and the other end of the second elastic member is connected to the pressing portion, wherein the second elastic member of the pressing member in the pressing position is in a deformed state so as to push the workpiece toward the body.
10. The hanging fixture for vacuum coating according to any one of claims 1 to 9, wherein the number of the pressing members is two, and the two pressing members are disposed at intervals along a third preset direction, the third preset direction being perpendicular to the first preset direction.
11. Feeding and discharging equipment is characterized by comprising:
a hanging fixture, which is the hanging fixture for vacuum coating according to any one of claims 1 to 10; and
the device comprises a loading manipulator and a discharging manipulator, wherein each of the loading manipulator and the discharging manipulator comprises a sucker, the loading manipulator is matched with the hanging loader so as to place a workpiece on the hanging loader, and the discharging manipulator is matched with the hanging loader so as to take the workpiece from the hanging loader.
12. A continuous vacuum coating system comprising a hanging fixture according to any one of claims 1-10.
CN202210547168.9A 2022-05-19 2022-05-19 Hanging loading tool for vacuum coating, loading and unloading equipment and continuous vacuum coating system Active CN114990512B (en)

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