CN114988644A - Wastewater treatment system and method containing tetramethylammonium hydroxide - Google Patents
Wastewater treatment system and method containing tetramethylammonium hydroxide Download PDFInfo
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- CN114988644A CN114988644A CN202210685804.4A CN202210685804A CN114988644A CN 114988644 A CN114988644 A CN 114988644A CN 202210685804 A CN202210685804 A CN 202210685804A CN 114988644 A CN114988644 A CN 114988644A
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- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 title claims abstract description 208
- 238000000034 method Methods 0.000 title claims abstract description 32
- 238000004065 wastewater treatment Methods 0.000 title claims description 16
- 239000002351 wastewater Substances 0.000 claims abstract description 86
- KFSLWBXXFJQRDL-UHFFFAOYSA-N Peracetic acid Chemical compound CC(=O)OO KFSLWBXXFJQRDL-UHFFFAOYSA-N 0.000 claims abstract description 53
- 230000003647 oxidation Effects 0.000 claims abstract description 47
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 47
- 239000007800 oxidant agent Substances 0.000 claims abstract description 30
- 230000001590 oxidative effect Effects 0.000 claims abstract description 30
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000001301 oxygen Substances 0.000 claims abstract description 9
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 9
- JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 claims abstract 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 67
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 48
- 238000004062 sedimentation Methods 0.000 claims description 32
- 239000010802 sludge Substances 0.000 claims description 27
- 230000015556 catabolic process Effects 0.000 claims description 18
- 238000006731 degradation reaction Methods 0.000 claims description 18
- 230000001105 regulatory effect Effects 0.000 claims description 16
- 230000033228 biological regulation Effects 0.000 claims description 15
- 239000007788 liquid Substances 0.000 claims description 10
- SUKJFIGYRHOWBL-UHFFFAOYSA-N sodium hypochlorite Chemical compound [Na+].Cl[O-] SUKJFIGYRHOWBL-UHFFFAOYSA-N 0.000 claims description 6
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical group OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 4
- 230000003750 conditioning effect Effects 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 3
- 238000000295 emission spectrum Methods 0.000 claims description 3
- 238000010992 reflux Methods 0.000 claims description 3
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- QDHHCQZDFGDHMP-UHFFFAOYSA-N Chloramine Chemical compound ClN QDHHCQZDFGDHMP-UHFFFAOYSA-N 0.000 claims description 2
- 239000005708 Sodium hypochlorite Substances 0.000 claims description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims 1
- FHHJDRFHHWUPDG-UHFFFAOYSA-L peroxysulfate(2-) Chemical compound [O-]OS([O-])(=O)=O FHHJDRFHHWUPDG-UHFFFAOYSA-L 0.000 claims 1
- 230000002195 synergetic effect Effects 0.000 abstract description 9
- 239000000126 substance Substances 0.000 abstract description 8
- XKMRRTOUMJRJIA-UHFFFAOYSA-N ammonia nh3 Chemical compound N.N XKMRRTOUMJRJIA-UHFFFAOYSA-N 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 8
- 230000000593 degrading effect Effects 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- -1 iron ions Chemical class 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 5
- 150000003254 radicals Chemical class 0.000 description 5
- 238000006396 nitration reaction Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000006228 supernatant Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 125000003277 amino group Chemical group 0.000 description 3
- 239000013067 intermediate product Substances 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- QMQXDJATSGGYDR-UHFFFAOYSA-N methylidyneiron Chemical compound [C].[Fe] QMQXDJATSGGYDR-UHFFFAOYSA-N 0.000 description 3
- 244000005700 microbiome Species 0.000 description 3
- 238000004377 microelectronic Methods 0.000 description 3
- 230000035484 reaction time Effects 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- MMDJDBSEMBIJBB-UHFFFAOYSA-N [O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[NH6+3] Chemical compound [O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[NH6+3] MMDJDBSEMBIJBB-UHFFFAOYSA-N 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000000543 intermediate Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 231100000252 nontoxic Toxicity 0.000 description 2
- 230000003000 nontoxic effect Effects 0.000 description 2
- 230000029058 respiratory gaseous exchange Effects 0.000 description 2
- 150000003384 small molecules Chemical class 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- UXTFKIJKRJJXNV-UHFFFAOYSA-N 1-$l^{1}-oxidanylethanone Chemical compound CC([O])=O UXTFKIJKRJJXNV-UHFFFAOYSA-N 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- LSHFIWNMHGCYRS-UHFFFAOYSA-N [O-][N+]([O-])=O.[O-][N+]([O-])=O.[OH4+2] Chemical compound [O-][N+]([O-])=O.[O-][N+]([O-])=O.[OH4+2] LSHFIWNMHGCYRS-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000003242 anti bacterial agent Substances 0.000 description 1
- 238000013475 authorization Methods 0.000 description 1
- 238000002306 biochemical method Methods 0.000 description 1
- 230000002925 chemical effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000001112 coagulating effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000007350 electrophilic reaction Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000011790 ferrous sulphate Substances 0.000 description 1
- 235000003891 ferrous sulphate Nutrition 0.000 description 1
- TUJKJAMUKRIRHC-UHFFFAOYSA-N hydroxyl Chemical compound [OH] TUJKJAMUKRIRHC-UHFFFAOYSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- BAUYGSIQEAFULO-UHFFFAOYSA-L iron(2+) sulfate (anhydrous) Chemical compound [Fe+2].[O-]S([O-])(=O)=O BAUYGSIQEAFULO-UHFFFAOYSA-L 0.000 description 1
- 229910000359 iron(II) sulfate Inorganic materials 0.000 description 1
- ZDGGJQMSELMHLK-UHFFFAOYSA-N m-Trifluoromethylhippuric acid Chemical compound OC(=O)CNC(=O)C1=CC=CC(C(F)(F)F)=C1 ZDGGJQMSELMHLK-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- WCYWZMWISLQXQU-UHFFFAOYSA-N methyl Chemical compound [CH3] WCYWZMWISLQXQU-UHFFFAOYSA-N 0.000 description 1
- 125000000896 monocarboxylic acid group Chemical group 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 238000007344 nucleophilic reaction Methods 0.000 description 1
- 150000004967 organic peroxy acids Chemical class 0.000 description 1
- 125000005385 peroxodisulfate group Chemical group 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000029219 regulation of pH Effects 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F9/00—Multistage treatment of water, waste water or sewage
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/30—Treatment of water, waste water, or sewage by irradiation
- C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/66—Treatment of water, waste water, or sewage by neutralisation; pH adjustment
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/72—Treatment of water, waste water, or sewage by oxidation
- C02F1/722—Oxidation by peroxides
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2101/00—Nature of the contaminant
- C02F2101/30—Organic compounds
- C02F2101/38—Organic compounds containing nitrogen
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W10/00—Technologies for wastewater treatment
- Y02W10/10—Biological treatment of water, waste water, or sewage
Abstract
The invention discloses a system and a method for treating wastewater containing tetramethylammonium hydroxide, which comprises an acid-base adjusting unit, an advanced oxidation treatment unit and a Bardenpho treatment system; the advanced oxidation treatment unit is a VUV reactor, a vacuum ultraviolet lamp tube is arranged in the VUV reactor, an oxidant is added into a pipeline in front of the reactor, and the oxidant is activated by ultraviolet rays to generate free radicals so as to degrade tetramethylammonium hydroxide in the wastewater; the Bardenpho treatment system performs biochemical oxygen demand removal and biological denitrification treatment on the effluent of the advanced oxidation treatment unit. In the advanced oxidation treatment unit of the system, vacuum ultraviolet rays irradiate the peroxydisulfate and the peroxyacetic acid simultaneously to generate a synergistic effect, so that the system has higher oxidation efficiency on the tetramethylammonium hydroxide and can completely degrade the tetramethylammonium hydroxide in the wastewater. The effluent chemical oxygen demand and ammonia nitrogen index of the treatment system are superior to national or local discharge standards.
Description
Technical Field
The invention relates to the technical field of wastewater treatment processes, in particular to a system and a method for treating wastewater containing tetramethylammonium hydroxide (TMAH), which are suitable for the field of manufacturing electronic equipment such as integrated circuits and liquid crystal panels.
Background
Tetramethylammonium hydroxide is widely used as a developer in the electronic industry of integrated circuits, liquid crystal panels, printed circuit boards, and the like. The TMAH wastewater has strong alkalinity and is toxic nitrogen-containing organic wastewater.
In the prior art, a Chinese patent invention with an authorization publication number of CN113501621A and a name of 'a developer solution wastewater treatment system' discloses a system which mainly comprises an anaerobic microorganism decomposition reaction tank and a membrane separation tank; the Chinese patent with the publication number of CN111285547A and the name of 'a method for treating waste liquid of developing solution' discloses a system which mainly comprises units of pH regulation, coagulating sedimentation, concentration adjustment, anaerobic biochemistry, ammonia stripping, acid absorption and the like. TMAH wastewater cannot be degraded by the scheme because TMAH is toxic and is difficult to degrade by microorganisms.
The Chinese utility model patent with the name of TMAH waste liquid treatment system with the publication number of CN20790417U discloses a system, which comprises an air floating device, an iron-carbon microelectronic device, a Fenton oxidation device, a pH adjusting device, and a 2 A treatment unit such as an O-MBR device performs waste liquid treatment. Through careful analysis, the system disclosed in the prior art has the following drawbacks:
1. too many processing units are needed in the process flow, the system is too complex, and the processing cost is high;
2. a large amount of ferric salt is added into the Fenton oxidation system, a large amount of sludge is generated, and the occupied area of the process flow is large;
3. a large amount of ferrous sulfate is added in the iron-carbon microelectronic process, and the content of iron ions in the treated water exceeds the standard;
4. the iron-carbon microelectronic device has long reaction time and low treatment efficiency.
The wastewater is treated by a biochemical method by mixing TMAH wastewater with other organic wastewater in the prior art, and the TMAH wastewater is difficult to degrade by microorganisms due to toxicity of the TMAH, so that the TMAH wastewater cannot be degraded by the prior technical scheme, and the treated tail water still contains the TMAH, so that the environmental pollution is increased, and the human health is harmed.
Therefore, in view of the above technical problems, a treatment method that has high efficiency of degrading TMAH wastewater, simple system structure, short reaction time, small floor space, no secondary pollution to the environment, and is convenient for industrial large-scale popularization and application is urgently needed to be developed by those skilled in the art.
The ultraviolet advanced oxidation technology is generally to activate an oxidant in water by ultraviolet UV to generate free radicals so as to mineralize organic matters with stable chemical properties in water into CO finally 2 、H 2 O and other inorganic small molecular substances, or organic matters which are difficult to degrade are oxidized into small molecular organic matters which are easy to biodegrade. The common oxidant is hydrogen peroxide H 2 O 2 Ozone O 3 PMS (HSO) peroxomonosulfate 5 - ) Sodium hypochlorite NaClO and chloramine NH 2 Cl, and the like. Ultraviolet radiation is generally considered to be an environmentally friendly water treatment technology, and with the continuous development and popularization of the ultraviolet technology, the technology is more and more emphasized in recent years.
PS (S) peroxodisulfate 2 O 8 2- ) Containing O-O bonds and belonging to H 2 O 2 The derivative of (1) is activated by UV irradiation, the peroxide bond O-O is destroyed, and sulfate radical SO is generated immediately 4 - The oxidation efficiency of the organic matters is high.
PAA is composed of H 2 O 2 Acetic acid CH 3 Organic peroxy acids obtained by mixing COOH and water are generally used as antibacterial agents. UV-activated PAA generates hydroxyl radical OH and a series of organic radicals including acetoxy radical CH 3 CO 3 Methyl radical, CH 3 Methyl peroxy radical CH 3 O 2 And a strongly oxidizing radical OH. The combined UV and PAA technology can reduce the use amount of PAA, reduce the contact time and reduce the running cost.
The VUV wavelength is 100-200 nm, and 185nm is the most common. The 185nm UV has a better degradation of organics than the 254nm UV because the 185nm UV (6.7eV) has a higher energy than the 254nm UV (4.88 eV). Water can strongly absorb OH, H, eqa (water and electrons) and the like generated by vacuum ultraviolet rays, and the active intermediates and organic matters in the water undergo electrophilic reaction, nucleophilic reaction, electron transfer and other reactions to rapidly oxidize and degrade the organic matters in the water.
Disclosure of Invention
The invention aims to provide a treatment system and a method which have the advantages of high efficiency of degrading TMAH-containing wastewater, simple system structure, short reaction time, small occupied area, no secondary pollution to the environment and convenience for industrialized large-scale popularization and application.
In order to achieve the above purpose, the invention provides the following technical scheme:
the invention relates to a wastewater treatment system containing tetramethylammonium hydroxide, which sequentially comprises the following steps according to the process flow:
an acid-base regulation unit;
the advanced oxidation treatment unit is positioned at the downstream of the acid-base regulation unit and is connected with the acid-base regulation unit; and
a Bardenpho treatment system located downstream of the advanced oxidation treatment unit;
the pH value of the wastewater is adjusted by the acid-base adjusting unit;
the advanced oxidation treatment unit receives the effluent of the acid-base regulation unit and carries out tetramethylammonium hydroxide degradation treatment;
the Bardenpho treatment system receives the effluent of the advanced oxidation treatment unit to carry out Biochemical Oxygen Demand (BOD) removal and biological denitrification treatment;
the advanced oxidation treatment unit is a vacuum ultraviolet based VUV reactor.
Furthermore, the wastewater treatment system also comprises a raw water tank, wherein the raw water tank is positioned at the process upstream of the acid-base regulation unit and stores wastewater to be treated;
the acid-base adjusting unit and the advanced oxidation treatment unit sequentially comprise the following steps according to the process flow;
the adjusting tank receives the wastewater discharged by the raw water tank and adds HCl or NaOH into the adjusting tank; and
a VUV reactor located downstream of the conditioning tank.
Further, a vacuum ultraviolet lamp tube is arranged in the VUV reactor;
the emission spectrum of the vacuum ultraviolet lamp tube is 185 nm;
the irradiation dose of the vacuum ultraviolet lamp tube is 100mJ/cm 2 ～800mJ/cm 2 。
Further, adding an oxidant into a pipeline in front of the VUV reactor;
preferably, the oxidant is added into the pipeline as H 2 O 2 、O 3 、PAA、PMS、PS、NH 2 Cl, NaClO, etc.;
adding 1-40 mg/L of oxidant into a pipeline in front of the VUV reactor;
more preferably, PS and PAA are added into the pipeline simultaneously;
the adding amount of PS added into a pipeline in front of the VUV reactor is 1-15 mg/L, and the adding amount of PAA is 1-15 mg/L.
Furthermore, the water inlet temperature of the VUV reactor is room temperature, the water inlet pH is 5-9, and the preferable pH is 8-9.
A Bardenpho treatment system located downstream of the advanced oxidation treatment unit;
the Bardenpho treatment system comprises a first anoxic tank, a first aerobic tank, a second anoxic tank, a second aerobic tank, a sedimentation tank and other treatment units which are connected in sequence;
further, adding HCl or NaOH into the pipeline in front of the first anoxic tank;
further, a part of mixed liquor in the first aerobic tank flows back to the first anoxic tank;
furthermore, one part of sludge in the sedimentation tank flows back to the first anoxic tank, and the other part of sludge is used as residual sludge to be discharged out of the system.
The invention also discloses a wastewater treatment method containing tetramethylammonium hydroxide, which is based on the wastewater treatment system containing TMAH, and mainly comprises the following steps:
s101, enabling waste water containing TMAH to enter a raw water pool;
s102, enabling the effluent of the raw water tank to enter a regulating tank, and adding HCl or NaOH into the regulating tank;
s103, introducing the effluent of the regulating tank into the VUV reactor, and adding an oxidant into a pipeline before the effluent enters the VUV reactor;
s104, enabling the effluent of the VUV reactor to enter a first anoxic tank, and adding HCl or NaOH into a pipeline in front of the first anoxic tank;
s105, enabling the effluent of the first anoxic tank to enter a first aerobic tank;
s106, enabling the effluent of the first aerobic tank to enter a second anoxic tank;
s107, enabling the effluent of the second anoxic tank to enter a second aerobic tank;
and S108, the effluent of the second aerobic tank enters a sedimentation tank, and the effluent treated by the sedimentation tank is discharged. One part of sludge in the sedimentation tank flows back to the first anoxic tank, and the other part of sludge is discharged out of the system as residual sludge.
In the technical scheme, the system and the method for treating the wastewater containing the tetramethylammonium hydroxide have the following beneficial effects:
the system respectively adjusts the pH value of the waste water by an acid-base adjusting unit, an advanced oxidation treatment unit and a Bardenpho treatment system in sequenceSaving the pH value of the wastewater, degrading TMAH in the wastewater, removing BOD and performing biological denitrification. The system discharges water with Chemical Oxygen Demand (COD) and ammonia Nitrogen (NH) 3 the-N index is superior to national or local emission standards.
In the advanced oxidation treatment unit of the system, the oxidized intermediate product of TMAH is amine organic matters such as dimethylamine, trimethylamine and the like, and SO 4 - Compared with OH, the compound has better oxidation effect on N-H chemical bonds in amino groups, and the VUV can generate synergistic effect when irradiating PS and PAA simultaneously, reduce the dosage of an oxidant and have higher oxidation efficiency on TMAH.
The oxidant adopted by the system of the invention, such as PS and PAA, has no secondary pollution to the environment, is cheap and easy to obtain, is nontoxic and harmless and is convenient to use.
The system of the invention has small occupied area, saves equipment investment and operation cost, is simple to operate and is environment-friendly.
The system can disinfect the wastewater while degrading the TMAH wastewater.
The ultraviolet technology adopted by the system has wide application trend at present and has wide engineering application prospect.
Drawings
In order to more clearly illustrate the embodiments of the present application or technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present invention, and other drawings can be obtained by those skilled in the art according to the drawings.
FIG. 1 is a flow chart of a system for treating waste water containing tetramethylammonium hydroxide according to an embodiment of the present invention;
FIG. 2 is a graph showing the degradation effect of tetramethylammonium hydroxide with the change of vacuum ultraviolet dose when different oxidants are added in a first comparative example of the method for treating wastewater containing tetramethylammonium hydroxide according to the embodiment of the present invention;
FIG. 3 is a graph showing the degradation effect of tetramethylammonium hydroxide with the dose of vacuum ultraviolet rays at different pH values in a second comparative example of the method for treating wastewater containing tetramethylammonium hydroxide according to the embodiment of the present invention.
Description of reference numerals:
1. a raw water pool; 2. a regulating tank; 3. a VUV reactor; 4. a first anoxic tank; 5. a first aerobic tank; 6. a second anoxic tank; 7. a second aerobic tank; 8. a sedimentation tank.
Detailed Description
In order to make the technical solutions of the present invention better understood, those skilled in the art will now describe the present invention in further detail with reference to the accompanying drawings.
As shown in FIG. 1;
the wastewater treatment system containing tetramethylammonium hydroxide of the embodiment sequentially comprises the following steps according to the process flow:
an acid-base regulation unit;
the advanced oxidation treatment unit is positioned at the downstream of the acid-base regulation unit and is connected with the acid-base regulation unit; and
a Bardenpho treatment system located downstream of the advanced oxidation treatment unit;
the pH value of the wastewater is adjusted by the acid-base adjusting unit;
the advanced oxidation treatment unit receives the effluent of the acid-base regulation unit and carries out tetramethylammonium hydroxide degradation treatment;
the Bardenpho treatment system receives the effluent of the advanced oxidation treatment unit and carries out Biochemical Oxygen Demand (BOD) removal and biological denitrification treatment;
the advanced oxidation treatment unit is a vacuum ultraviolet based VUV reactor 3.
Specifically, the embodiment discloses a TMAH wastewater treatment system, which sequentially comprises an acid-base regulation unit, an advanced oxidation treatment unit and a Bardenpho treatment system according to a process flow. The pH value of the wastewater is adjusted through the acid-base adjusting unit, the TMAH in the wastewater is degraded through the advanced oxidation treatment unit, and biochemical oxygen demand BOD removal and biological denitrification treatment are performed through the Bardenpho treatment system.
Preferably, the wastewater treatment system of the embodiment further comprises a raw water tank 1, wherein the raw water tank 1 is located at the process upstream of the acid-base regulation unit, and the raw water tank 1 stores wastewater to be treated;
the acid-base adjusting unit and the advanced oxidation treatment unit sequentially comprise the following steps according to the process flow;
the adjusting tank 2 receives the wastewater discharged from the raw water tank 1, and HCl or NaOH is added into the adjusting tank 1; and
a VUV reactor 3 located downstream of the conditioning tank 2.
Preferably, in order to remove TMAH in the wastewater, the advanced oxidation treatment unit of this embodiment is a VUV reactor 3, inside which a vacuum ultraviolet lamp is disposed;
the emission spectrum of the vacuum ultraviolet lamp tube is 185 nm;
the irradiation dose of the vacuum ultraviolet lamp tube is 100mJ/cm 2 ～800mJ/cm 2 。
Adding an oxidant into a pipeline in front of the VUV reactor 3;
preferably, the oxidant is added into the pipeline as H 2 O 2 、O 3 、PAA、PMS、PS、NH 2 Cl, NaClO, etc.;
adding 1-40 mg/L of oxidant into a pipeline in front of the VUV reactor 3;
more preferably, PS and PAA are added into the pipeline simultaneously;
the adding amount of PS added into a pipeline in front of the VUV reactor 3 is 1-15 mg/L, and the adding amount of PAA is 1-15 mg/L.
Furthermore, the water inlet temperature of the VUV reactor is room temperature, the water inlet pH is 5-9, and the preferable pH is 8-9.
Preferably, the Bardenpho treatment system of the embodiment sequentially comprises a first anoxic tank 4, a first aerobic tank 5, a second anoxic tank 6, a second aerobic tank 7 and a sedimentation tank 8 according to the process flow. And (3) adding HCl or NaOH into the pipeline in front of the first anoxic tank 4 to adjust the pH value in the first anoxic tank 4 to 7.5. The first anoxic tank 4 receives wastewater containing micromolecular organic matters after being degraded by the VUV reactor 3, denitrification reaction is carried out in an anoxic environment, organic matters in the wastewater are used as a carbon source by denitrifying bacteria, and oxygen of nitrate in reflux liquid from the first aerobic tank 5 is used as an electron acceptor to carry out respiration and life activities, so that nitrate nitrogen is reduced into gaseous nitrogen. The first aerobic tank 5 receives the wastewater denitrified by the first anoxic tank 4, and performs nitration reaction in an aerobic environment to degrade BOD in the wastewater. Part of the nitrified liquid in the first aerobic tank 5 flows back to the first anoxic tank 4. The second anoxic tank 6 receives the wastewater after the BOD is degraded by the first aerobic tank 5, and performs denitrification reaction again in an anoxic environment to further perform biological denitrification and reduce the content of nitrogen in the wastewater. The second aerobic tank 7 receives the wastewater denitrified by the second anoxic tank 6, and carries out nitration reaction again in an aerobic environment to further remove BOD in the wastewater. The sedimentation tank 8 receives the wastewater treated by the second aerobic tank 7, and supernatant is discharged after sedimentation. One part of sludge in the sedimentation tank 8 returns to the first anoxic tank 4, and the other part of sludge is discharged out of the system as residual sludge.
The processing principle of the processing system disclosed in this embodiment is as follows: SO is generated by VUV irradiation of PS 4 - Irradiation of PAA produces OH radicals whose redox potential 2.8V is higher than that of SO 4 - 2.01V of (A), PAA can oxidize TMAH more efficiently; the intermediate product obtained by oxidizing TMAH is amine organic compounds such as dimethylamine and trimethylamine, and the amine organic compounds all contain amino-NH 2 And SO 4 - Compared with OH, the compound has better oxidation effect on N-H bonds in amino groups, so that the synergistic effect can be generated by simultaneously irradiating PS and PAA by VUV, the dosage of an oxidant can be reduced, and the compound has higher oxidation efficiency on TMAH. TMAH in the wastewater is completely degraded, and part of TMAH is mineralized into CO 2 、H 2 And O, degrading a part of the organic matters into small molecules. The Bardenpho treatment system can degrade BOD and biologically denitrify small molecular organic matters.
In addition, the invention also discloses a wastewater treatment method containing tetramethylammonium hydroxide, which is based on the above wastewater treatment system containing tetramethylammonium hydroxide and mainly comprises the following steps:
s101, enabling waste water containing TMAH to enter a raw water pool 1;
s102, enabling the effluent of the raw water tank 1 to enter a regulating tank 2, and adding NaOH or HCl into the regulating tank 2;
s103, introducing effluent of the regulating tank 2 into the VUV reactor 3, and adding an oxidant into a pipeline before the effluent enters the VUV reactor 3;
s104, enabling the effluent of the VUV reactor 3 to enter a first anoxic tank 4, and adding HCl or NaOH into a pipeline in front of the first anoxic tank 4;
s105, enabling the effluent of the first anoxic tank 4 to enter a first aerobic tank 5;
s106, enabling the effluent of the first aerobic tank 5 to enter a second anoxic tank 6;
s107, the effluent of the second anoxic tank 6 enters a second aerobic tank 7;
s108, the effluent of the second aerobic tank 7 enters a sedimentation tank 8, and the effluent treated by the sedimentation tank 8 is discharged. One part of sludge in the sedimentation tank 8 returns to the first anoxic tank 4, and the other part of sludge is discharged out of the system as residual sludge.
The method for treating wastewater containing tetramethylammonium hydroxide in the embodiment comprises the following steps: the waste water containing TMAH enters a raw water pool 1, and the effluent of the raw water pool 1 enters an adjusting pool 2. And (3) adding HCl or NaOH into the regulating tank 2 to regulate the pH value of the wastewater to 5-9.
The effluent of the regulating reservoir 2 enters a VUV reactor 3, a vacuum ultraviolet lamp tube is arranged in the VUV reactor 3, and the irradiation dose of the lamp tube is 100mJ/cm 2 ～800mJ/cm 2 . Before the wastewater enters the VUV reactor 3, an oxidant is added into the pipeline; preferably, the oxidant is added into the pipeline as H 2 O 2 、O 3 、PAA、PMS、PS、NH 2 Cl, NaClO and the like, wherein the adding amount of the oxidant is 1-40 mg/L; more preferably, PS and PAA are simultaneously added into the pipeline, the adding amount of the PS is 1-15 mg/L, and the adding amount of the PAA is 1-15 mg/L. The water inlet temperature of the VUV reactor 3 is room temperature, and the water inlet pH is 5-9, preferably 8-9.
Vacuum ultraviolet irradiation of PAA and PS in the VUV reactor 3, the VUV irradiation of PS producing SO 4 - Irradiation of PAA produces free radicals such as OH whose redox potential 2.8V is higher than SO 4 - 2.01V of (A), PAA can oxidize TMAH more efficiently; the TMAH oxidized intermediate is amine organic compounds such as dimethylamine and trimethylamineContaining amino-NH groups 2 And SO 4 - Compared with OH, the compound has better oxidation effect on N-H bonds in amino groups, so that the synergistic effect can be generated by simultaneously irradiating PS and PAA by VUV, the dosage of an oxidant can be reduced, and the compound has higher oxidation efficiency on TMAH. TMAH in the wastewater is completely degraded, and part of TMAH is mineralized into CO 2 、H 2 O, a part of chemical bonds in TMAH molecules are broken to become small organic molecules. The VUV reactor 3 effluent enters the Bardenpho treatment system.
The Bardenpho treatment system sequentially comprises a first anoxic tank 4, a first aerobic tank 5, a second anoxic tank 6, a second aerobic tank 7 and a sedimentation tank 8 according to the process flow. And (3) adding HCl or NaOH into the pipeline in front of the first anoxic tank 4, and adjusting the pH value in the first anoxic tank 4 to 7.5. The first anoxic tank 4 receives wastewater containing micromolecular organic matters after being degraded by the VUV reactor 3, denitrification reaction is carried out in an anoxic environment, organic matters in the wastewater are used as a carbon source by denitrifying bacteria, and nitrate oxygen in the reflux liquid of the first aerobic tank 5 is used as an electron acceptor to carry out respiration and life activities, so that nitrate nitrogen is reduced into gaseous nitrogen. The first aerobic tank 5 receives the wastewater denitrified by the first anoxic tank 4, and performs nitration reaction in an aerobic environment to degrade BOD in the wastewater. Part of the nitrified liquid in the first aerobic tank 5 flows back to the first anoxic tank 4. The second anoxic tank 6 receives the wastewater after the BOD is degraded by the first aerobic tank 5, and performs denitrification reaction again in an anoxic environment to further perform biological denitrification and reduce the content of nitrogen in the wastewater. The second aerobic tank 7 receives the wastewater denitrified by the second anoxic tank 6, and carries out nitration reaction again in an aerobic environment to further remove BOD in the wastewater. The sedimentation tank 8 receives the wastewater treated by the second aerobic tank 7, and supernatant is discharged after sedimentation. One part of sludge in the sedimentation tank 8 returns to the first anoxic tank 4, and the other part of sludge is discharged out of the system as residual sludge. COD and NH in the wastewater treated by the Bardenpho treatment system 3 The content of the-N index is lower.
The first embodiment is as follows:
5.5m of waste water containing TMAH from a 12-inch IC manufacturer 3 The water quality indexes are as follows:
| item | Numerical value |
| pH value | 10-11 |
| COD(mg/l) | 900-1000 |
| Kjeldahl nitrogen (mg/l) | 100-110 |
The processing method of the embodiment comprises the following steps:
the waste water containing TMAH enters a raw water pool 1, and the effluent of the raw water pool 1 enters an adjusting pool 2. The wastewater containing TMAH is alkaline, the pH value is 10-11, HCl is added into the regulating tank 2, and the pH value of the wastewater is regulated to 8.5. The effluent of the regulating reservoir 2 enters a VUV reactor 3, a vacuum ultraviolet lamp tube is arranged in the VUV reactor 3, and the irradiation dose of the lamp tube is 520mJ/cm 2 . PS and PAA are added into a pipeline before the wastewater enters the VUV reactor 3, the adding amount of the PS is 12mg/L, and the adding amount of the PAA is 10 mg/L. The temperature of the feed water to the VUV reactor 3 is room temperature. Vacuum ultraviolet rays irradiate PAA and PS in the VUV reactor 3, and the PS and the PAA can generate a synergistic effect and have higher oxidation efficiency on TMAH. TMAH in the wastewater is completely degraded, and part of TMAH is mineralized into CO 2 、H 2 O, a part of chemical bonds in TMAH molecules are broken to become small organic molecules. The water discharged from the VUV reactor 3 enters a Bardenpho treatment system and sequentially passes through a first anoxic tank 4, a first aerobic tank 5, a second anoxic tank 6, a second aerobic tank 7 and a sedimentation tank 8. And (3) adding HCl into the pipeline in front of the first anoxic tank 4, and adjusting the pH value in the first anoxic tank 4 to 7-7.5. Part of the first aerobic tank 5 is nitrifiedThe liquid flows back to the first anoxic tank 4. Discharging supernatant after sedimentation in the sedimentation tank 8. One part of sludge in the sedimentation tank 8 returns to the first anoxic tank 4, and the other part of sludge is discharged out of the system as residual sludge. COD and NH of TMAH wastewater after treatment 3 the-N index is superior to local emission standards.
The indexes of the wastewater after the implementation of the scheme are as follows:
| item | Numerical value |
| pH value | 6-8 |
| COD(mg/l) | <100 |
| NH 3 -N(mg/l) | <10 |
Comparative example one:
this example compares the degradation rate of TMAH at different VUV doses in the presence of three oxidant systems of VUV/PS, VUV/PAA and VUV/PAA + PS at the same dose of PS, PAA and PAA + PS, to demonstrate that VUV/PAA + PS has synergistic effect.
The test device comprises: raw water tank, VUV reactor, charge device.
The test process comprises the following steps: at room temperature, TMAH-containing raw water is prepared in a raw water tank, the raw water enters a VUV reactor, an oxidant is added into a pipeline before entering the VUV reactor, and the raw water is discharged after coming out of the VUV reactor.
Test parameters are as follows: the VUV reactor has a cavity structure and a treatment capacity of 1m 3 H, 3 vacuum ultraviolet raysA lamp tube with a wavelength of 185nm and an ultraviolet dose of 100-600 mJ/cm 2 。
The test procedure for this comparative example is as follows:
preparing water to be treated with TMAH content of 100mg/L in an original water tank, adjusting the initial pH of the solution to 7 by adopting HCl or NaOH, and uniformly stirring;
the medicine adding device respectively adds 30mg/L of PS, 30mg/L of PAA and 30mg/L of PS and PAA in total amount to a water pipeline to be treated before entering the VUV reactor;
water was passed through the VUV reactor;
taking a water sample treated by a VUV reactor, and adding Na with the concentration of 500mg/L 2 SO 3 As a quenching agent to terminate the reaction.
And (4) measuring the concentration of TMAH in the treated water sample.
The degradation effect of three oxidizer systems of VUV/PS, VUV/PAA and VUV/PAA + PS on TMAH in water is shown in Table 1, and the degradation effect is shown in FIG. 2 along with the change of vacuum ultraviolet dose. Wherein, C 0 The initial concentration of TMAH solution and C the concentration after treatment.
TABLE 1
As can be seen from Table 1 and FIG. 2, addition of 30mg/L of the VUV/PS and VUV/PAA systems alone has a certain degradation effect on TMAH. The VUV/PAA + PS system with the total dosage of 30mg/L obviously improves the effect, and the irradiation dose is 600mJ/cm 2 In this case, the removal rate of TMAH may reach 100%. The comparative example proves that PS and PAA provided by the invention have a synergistic effect, and the degradation effect of the method for rapidly degrading TMAH in water by using VUV/PS + PAA is more excellent.
The second embodiment:
the amount of wastewater containing TMAH discharged by a certain LCD factory is 8m 3 The water quality indexes are as follows:
| item | Numerical value |
| pH value | 11-12 |
| COD(mg/l) | 1100-1200 |
| Kjeldahl nitrogen (mg/l) | 140-150 |
The implementation of the embodiment comprises the following steps:
the waste water containing TMAH enters a raw water pool 1, and the effluent of the raw water pool 1 enters an adjusting pool 2. The wastewater containing TMAH is alkaline, the pH value is 11-12, HCl is added into the adjusting tank 2, and the pH value of the wastewater is adjusted to 9. The effluent of the regulating reservoir 2 enters a VUV reactor 3, a vacuum ultraviolet lamp tube is arranged in the VUV reactor 3, and the irradiation dose of the lamp tube is 620mJ/cm 2 . PS and PAA are added into a pipeline before the wastewater enters the VUV reactor 3, the adding amount of the PS is 16mg/L, and the adding amount of the PAA is 12 mg/L. The temperature of the feed water to the VUV reactor 3 is room temperature. Vacuum ultraviolet rays irradiate PAA and PS in the VUV reactor 3, and the PS and the PAA can generate a synergistic effect and have higher oxidation efficiency on TMAH. TMAH in the wastewater is completely degraded, and part of TMAH is mineralized into CO 2 、H 2 O, a part of chemical bonds in TMAH molecules are broken, and the TMAH molecules become small-molecule organic matters. The water discharged from the VUV reactor 3 enters a Bardenpho treatment system and sequentially passes through a first anoxic tank 4, a first aerobic tank 5, a second anoxic tank 6, a second aerobic tank 7 and a sedimentation tank 8. And (3) adding HCl into the pipeline in front of the first anoxic tank 4, and adjusting the pH value in the first anoxic tank 4 to 7.5. Part of the nitrified liquid in the first aerobic tank 5 flows back to the first anoxic tank 4. Discharging supernatant after sedimentation in the sedimentation tank 8. A part of sludge in the sedimentation tank 8 flows back to the first anoxic tank 4,the other part is used as the residual sludge discharge system. COD and NH of TMAH wastewater after treatment 3 the-N index is superior to local emission standards.
The indexes of the wastewater after the implementation of the scheme are as follows:
| item | Numerical value |
| pH value | 7-8 |
| COD(mg/l) | <100 |
| NH 3 -N(mg/l) | <15 |
Comparative example two:
this example compares the effect of VUV/PS + PAA on the degradation of TMAH in water at different initial pH values and different vacuum UV doses.
The test was carried out according to the test procedure of comparative example one, by preparing water to be treated having a TMAH content of 120mg/L in a raw water tank and adjusting the pH of the solution to 7, 8 and 9 with HCl and NaOH. At different pH values, the vacuum ultraviolet irradiation dose is 600mJ/cm 2 The degradation of TMAH is shown in Table 2. The effect of different vacuum UV doses using VUV/PS + PAA on TMAH degradation at different pH's is shown in FIG. 3. Wherein, C 0 The initial concentration of TMAH solution and C the concentration after treatment.
TABLE 2
| pH of raw Water | TMAH |
| 7 | 88 |
| 8 | 95 |
| 9 | 100 |
Experimental results show that the PS and PAA activated by vacuum ultraviolet have better degradation effect on TMAH in water under acidic or alkaline conditions. When the pH value is changed within 7-9, the degradation rate of TMAH gradually increases along with the increase of the pH value, and when the pH value is 9 and the vacuum ultraviolet irradiation dose is 600mJ/cm 2 At this time, TMAH degradation rate was 100%.
This comparative example demonstrates that the method for rapidly degrading TMAH by using vacuum ultraviolet activated PS and PAA according to the present invention has a wide applicable pH range.
In the technical scheme, the system and the method for treating the wastewater containing the tetramethylammonium hydroxide have the following beneficial effects:
the system respectively adjusts the pH value of the wastewater, degrades TMAH in the wastewater, removes BOD and performs biological denitrification through an acid-base adjusting unit, an advanced oxidation treatment unit and a Bardenpho treatment system in sequence. The system discharges COD and NH 3 the-N index is superior to national or local emission standards.
In the advanced oxidation treatment unit of the system, the oxidized intermediate product of TMAH is amine organic matters such as dimethylamine, trimethylamine and the like, and SO 4 - Better oxygen than OH for the N-H bond in the amino groupThe chemical effect is that VUV irradiates PS and PAA simultaneously to generate synergistic effect, the dosage of the oxidant can be reduced, and the oxidation efficiency of TMAH is higher.
The oxidant adopted by the system of the invention, such as PS and PAA, has no secondary pollution to the environment, is cheap and easy to obtain, is nontoxic and harmless, and is convenient to use.
The system of the invention has small occupied area, saves equipment investment and operation cost, is simple to operate and is environment-friendly.
The system can disinfect the waste water while degrading the TMAH waste water.
The ultraviolet technology adopted by the system has wide application trend at present and has wide engineering application prospect.
While certain exemplary embodiments of the present invention have been described above by way of illustration only, it will be apparent to those of ordinary skill in the art that the described embodiments may be modified in various different ways without departing from the spirit and scope of the invention. Accordingly, the drawings and description are illustrative in nature and should not be construed as limiting the scope of the invention.
Claims (7)
1. A wastewater treatment system containing tetramethylammonium hydroxide is characterized by comprising the following steps in sequence according to the process flow:
an acid-base regulation unit;
the advanced oxidation treatment unit is positioned at the downstream of the acid-base regulation unit and is connected with the acid-base regulation unit; and
a Bardenpho treatment system located downstream of the advanced oxidation treatment unit;
the pH value of the wastewater is adjusted through the acid-base adjusting unit;
the advanced oxidation treatment unit receives the effluent of the acid-base regulation unit and carries out tetramethylammonium hydroxide degradation treatment;
the Bardenpho treatment system receives the effluent of the advanced oxidation treatment unit and carries out Biochemical Oxygen Demand (BOD) removal and biological denitrification treatment;
the advanced oxidation treatment unit is a VUV reactor (3) based on vacuum ultraviolet.
2. The wastewater treatment system containing tetramethylammonium hydroxide according to claim 1, characterized in that it further comprises a raw water tank (1), wherein the raw water tank (1) is located upstream of the acid-base adjustment unit, and the raw water tank (1) stores wastewater to be treated;
the acid-base adjusting unit and the advanced oxidation treatment unit sequentially comprise the following steps according to the process flow;
the adjusting tank (2) receives the wastewater discharged by the raw water tank (1), and HCl or NaOH is added into the adjusting tank (2); and
a VUV reactor (3) located downstream of the conditioning tank (2).
3. The system of claim 2, wherein the advanced oxidation treatment unit is provided with a vacuum ultraviolet lamp inside;
the emission spectrum of the vacuum ultraviolet lamp tube is 185 nm;
the irradiation dose of the vacuum ultraviolet lamp tube is 100mJ/cm 2 ～800mJ/cm 2 。
4. The system of claim 3, wherein an oxidant is added to a pipeline before the advanced oxidation treatment unit;
and adding an oxidant into the pipeline in front of the advanced oxidation treatment unit, wherein the oxidant is hydrogen peroxide, ozone, peroxyacetic acid, peroxymonosulfate, peroxydisulfate, chloramine or sodium hypochlorite, and the adding amount of the oxidant added into the pipeline in front of the VUV reactor (3) is 1-40 mg/L.
5. The system of claim 4, wherein the VUV reactor (3) has a water inlet temperature of room temperature and a water inlet pH of 5-9.
6. The wastewater treatment system containing tetramethylammonium hydroxide according to claim 2, characterized in that the Bardenpho treatment system comprises a first anoxic tank (4), a first aerobic tank (5), a second anoxic tank (6), a second aerobic tank (7) and a sedimentation tank (8) in sequence according to the process flow;
adding HCl or NaOH into a pipeline in front of the first anoxic tank (4);
part of the mixed liquid in the first aerobic tank (5) flows back to the first anoxic tank (4);
one part of sludge in the sedimentation tank (8) flows back to the first anoxic tank (4), and the other part of sludge in the sedimentation tank (8) is used as a residual sludge discharge system.
7. A method for treating wastewater containing tetramethylammonium hydroxide, which is based on the wastewater treatment system containing tetramethylammonium hydroxide as set forth in any one of claims 1 to 6, and which comprises the steps of:
s101, enabling waste water containing TMAH to enter a raw water pool (1);
s102, enabling the effluent of the raw water tank (1) to enter a regulating tank (2), and adding HCl or NaOH into the regulating tank (2);
s103, feeding the effluent of the regulating tank (2) into a VUV reactor (3), and adding an oxidant into a pipeline before the effluent enters the VUV reactor (3);
s104, enabling the effluent of the VUV reactor (3) to enter a first anoxic tank (4), and adding HCl or NaOH into a pipeline in front of the first anoxic tank (4);
s105, enabling the effluent of the first anoxic tank (4) to enter a first aerobic tank (5);
s106, enabling the effluent of the first aerobic tank (5) to enter a second anoxic tank (6);
s107, the effluent of the second anoxic tank (6) enters a second aerobic tank (7);
s108, enabling effluent of the second aerobic tank (7) to enter a sedimentation tank (8), discharging the effluent treated by the sedimentation tank (8), and refluxing a part of sludge in the sedimentation tank (8) to the first anoxic tank (4) while taking the other part of sludge as a residual sludge discharge system.
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