CN114976556A - Micro-electromechanical system (MEMS) micro-coaxial power divider - Google Patents
Micro-electromechanical system (MEMS) micro-coaxial power divider Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/213—Frequency-selective devices, e.g. filters combining or separating two or more different frequencies
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Abstract
The invention discloses a micro-coaxial power divider of MEMS, which relates to the technical field of microwave integrated circuits, and comprises: an inner conductor including a first intermediate end and a second intermediate end for adjusting impedance; the common wall shell is internally provided with a cavity, two sides of the cavity are communicated with the outside, the middle part of the cavity is provided with a partition board, the cavity is divided into a first common wall channel and a second common wall channel by the partition board, a first middle end is arranged in the first common wall channel, a second middle end is arranged in the second common wall channel, one end of the first middle end and one end of the second middle end are respectively arranged at input ports of the first common wall channel and the second common wall channel and are connected with each other so as to be used for receiving input signals. The power divider solves the technical problems that a traditional power divider is large in loss and not easy to integrate.
Description
Technical Field
The invention relates to the field of microwave integrated circuits, in particular to an MEMS micro-coaxial power divider.
Background
With the continuous development and maturity of micro-electro-mechanical systems (MEMS) technology, 3D radio frequency devices and monolithic integrated systems realized by the MEMS technology, i.e., RF MEMS, are emerging. The method has the advantages of high precision, high consistency, miniaturization, integration, low cost, low power consumption and the like, and is widely applied to the fields of personal communication, vehicle-mounted, shipborne, airborne, satellite communication, phased array radar and the like. The microwave power divider is used as the most basic element of a microwave passive circuit, and the working performance of the microwave power divider directly influences the overall quality of a microwave communication system. With the growing MEMS scale and the development of large scale integrated circuits. The transmission lines of the high-frequency power divider have line interleaving in a crowded layout.
The power divider capable of working in the millimeter wave frequency band has to have a very delicate structure, so that the performance of the power divider in the millimeter wave frequency band is ensured, and meanwhile, the requirement of miniaturization of an MEMS device is met, which is a place difficult to overcome by the prior art. The power divider which can work in a millimeter wave frequency band in the current market mainly has two structures, namely a planar structure and a waveguide structure. For example, the waveguide or microstrip line is adopted, and the waveguide mode is adopted, so that the structure is complex, the size is large, and the practical application is not facilitated. By adopting the microstrip line technology, the signal coupling and radiation loss between transmission lines are difficult to avoid, resulting in large insertion loss, that is, during power distribution, much energy is lost by various reasons when passing through the power divider, and the energy distributed to each port is less.
The microwave power divider is used as the most basic element of a microwave passive circuit, and the working performance of the microwave power divider directly influences the overall quality of a microwave communication system. With the growing MEMS scale and the development of large scale integrated circuits. The transmission lines of the high-frequency power divider have line interleaving in a crowded layout. The conventional microstrip transmission line is only wired on a single plane, and vertical interconnection lines or TSVs are usually adopted in the longitudinal direction. Impedance matching and attenuation are difficult to achieve in view of the vertical interconnect lines, while TSVs with large depth-to-width ratios are difficult to achieve. The high-frequency MEMS power divider adopts the requirements of novel miniaturization, light weight and high integration level to gradually improve.
Micro-mechanical systems (MEMS) combine microelectronic technology and precision machining technology, and are an emerging discipline of multidisciplinary crossing and penetration developed on the basis of microelectronic technology. MEMS processes include not only conventional semiconductor processes but also processes for making high aspect ratio and complex three-dimensional movable structure devices. Compared with the traditional transmission structure (such as a microstrip, a coplanar waveguide and the like), the electrical property of the copper-based high-frequency transmission microstructure based on the MEMS has great advantages in the millimeter wave broadband field. The MEMS technology is easy to integrate with the traditional integrated circuit technology, and has the characteristics of batch, accurate technology and small error.
Disclosure of Invention
The invention aims to provide an MEMS micro-coaxial power divider to solve the technical problems of high loss and difficulty in integration of the traditional power divider.
In order to solve the technical problems, the invention adopts the following technical scheme:
a first aspect of an embodiment of the present invention provides an MEMS micro-coaxial power divider, including: an inner conductor including a first intermediate end and a second intermediate end for adjusting impedance; the common wall housing is internally provided with a cavity, two sides of the cavity are communicated with the outside, a partition plate is arranged in the middle of the cavity, the cavity is divided into a first common wall channel and a second common wall channel by the partition plate, the first middle end is arranged in the first common wall channel, the second middle end is arranged in the second common wall channel, and one end of the first middle end and one end of the second middle end are respectively arranged at input ports of the first common wall channel and the second common wall channel and are mutually connected so as to be used for receiving input signals.
In some embodiments, the MEMS micro-coaxial power divider further includes an input channel, and the input channel is respectively communicated with the input ports of the first and second common-wall channels; the inner conductor further comprises an input end, the input end is arranged in the input channel, and the input end is connected with one end of the first middle end and one end of the second middle end and used for inputting signals.
In some embodiments, the MEMS micro-coaxial power divider further includes a first output channel and a second output channel, the first output channel is in communication with the output port of the first common-wall channel, and the second output channel is in communication with the output port of the second common-wall channel; the inner conductor further comprises a first output end and a second output end, the first output end is arranged in the first output channel and is connected with the other end of the first middle end, and the second output end is arranged in the second output channel and is connected with the other end of the second middle end.
In some embodiments, the first output end, first output channel and the second output end, second output channel are arranged in bilateral symmetry about the input end.
In some embodiments, a junction of the first intermediate end and the second intermediate end, a junction of the first intermediate end and the first output end, and a junction of the second intermediate end and the second output end are all arc-shaped with uniform radian.
In some embodiments, the common wall housing, the input channel, the first output channel and the second output channel are all provided with a plurality of release ports.
In some embodiments, support bars are disposed in the input channel, the first output channel and the second output channel, the input end, the first output end and the second output end are disposed on the support bars, and the support bars are insulators.
In some embodiments, the inner conductor, the common wall housing, the input channel, the first output channel and the second output channel may be made of ti or cr or pt or cu or al.
In some embodiments, the MEMS micro-coaxial power divider further includes an isolation resistor, one end of the isolation resistor is connected to the other end of the first middle terminal, and the other end of the isolation resistor is connected to the other end of the second middle terminal, so as to isolate the output signals of the first middle terminal and the second middle terminal.
In some embodiments, the MEMS micro-coaxial power divider further includes a resistor channel, the isolation resistor is disposed in the resistor channel, and the resistor channel is respectively communicated with the output port of the first common-wall channel, the output port of the second common-wall channel, the first output channel, and the second output channel.
The MEMS micro-coaxial power divider provided by the embodiment of the invention at least has the following beneficial effects:
1. the inner conductors are arranged in the common-wall shell, the input channel, the first output channel and the second output channel, and the structure similar to a coaxial line has good signal interconnection and signal isolation effects. High performance, high reliability and broadband interconnection of microwave signals are realized. The system has good system function in 0-60G broadband microwave systems.
2. In the aspect of structure, the structure can be folded in any direction, and the millimeter wave antenna and other integrated circuits can be easily integrated. The miniaturization and integration of the RF MEMS system are facilitated.
3. And by adopting a common-wall structure, the size of the power divider is reduced, and the miniaturization of the RFMEMS system is realized.
4. The characteristic impedance of the transmission can be further varied by varying the size of the dimensions of the first intermediate end and the second intermediate end.
5. The joint of the first middle end and the second middle end, the joint of the first middle end and the first output end, and the joint of the second middle end and the second output end are all arc-shaped with uniform radian, so that overlarge reflection loss and transmission loss of a transmission line caused by sudden change of characteristic impedance are reduced.
6. In order to realize the minimum unit of the power divider, the input end, the first output end and the second output end can be bent and extended as required, so that other RF MEMS devices can be better connected.
7. And an isolation resistor is arranged to improve the isolation between the first output end and the second output end, and the circuit combiner can also be used as a combiner.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic cross-sectional structural view according to an embodiment;
fig. 2 is a front view according to an embodiment.
The reference numerals are explained below: 1. an inner conductor; 2. a first intermediate end; 3. a second intermediate end; 4. a common wall housing; 5. a partition plate; 6. a first common wall channel; 7. a second common wall channel; 8. an input channel; 9. an input end; 10. a first output channel; 11. a second output channel; 12. a first output terminal; 13. a second output terminal; 14. a release port; 15. a supporting strip; 16. an isolation resistor; 17. a resistive path.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
The terms "first", "second" and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", "third" may explicitly or implicitly include one or more of the features. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "communicate," "mount," "connect," and "connect" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many different forms and should not be construed as limited to the examples set forth herein; rather, these example embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The drawings are merely schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and thus their repetitive description will be omitted.
Preferred embodiments of the present disclosure are further described in detail below with reference to fig. 1 to 2 of the present specification.
Please refer to fig. 1.
According to some embodiments, there is provided a MEMS micro-coaxial power divider, comprising: an inner conductor 1, said inner conductor 1 comprising a first intermediate end 2 and a second intermediate end 3 for adjusting the impedance; the wall-sharing structure comprises a wall-sharing shell 4, wherein a cavity is formed in the wall-sharing shell 4, two sides of the cavity are communicated with the outside, a partition plate 5 is arranged in the middle of the cavity, the partition plate 5 divides the cavity into a first wall-sharing channel 6 and a second wall-sharing channel 7, a first middle end 2 is arranged in the first wall-sharing channel 6, a second middle end 3 is arranged in the second wall-sharing channel 7, one end of the first middle end 2 and one end of the second middle end 3 are respectively arranged at input ports of the first wall-sharing channel 6 and the second wall-sharing channel 7 and are connected with each other so as to be used for receiving input signals.
Based on the above embodiments, in some embodiments, the size of the characteristic impedance can be controlled by adjusting the lengths of the first intermediate end 2 and the second intermediate end 3, and adjusting the cross-sectional sizes of the first intermediate end 2 and the second intermediate end 3. In some preferred embodiments, the lengths of the first middle end 2 and the second middle end 3 are controlled by quarter impedance matching, when quarter impedance matching is adopted, the lengths of the first middle end 2 and the second middle end 3 are not changed, and the size of the characteristic impedance can be controlled by adjusting the widths of the first middle end 2 and the second middle end 3. The sectional areas of the first middle end 2 and the second middle end 3 are increased and the characteristic impedance is lowered, while the sectional areas of the first middle end 2 and the second middle end 3 are decreased and the characteristic impedance is increased, while the size of the common wall housing 4 is kept unchanged. In some embodiments, the first intermediate end 2 and the second intermediate end 3 set the characteristic impedance to 70.7 Ω.
Further, set up the cavity in total wall shell 4, the cavity both sides communicate with the external world, set up baffle 5 in the middle part of the cavity, so that the cavity is cut apart into first total wall passageway 6 and second total wall passageway 7, set up first middle-end 2 and second middle-end 3 respectively in first total wall passageway 6 and second total wall passageway 7, compare in traditional mode, need the passageway of two separations to place first middle-end 2 and second middle-end 3, this application only need one total wall shell 4 can, so that whole volume is littleer, occupation space is littleer, it is integrated more easily.
The application has the advantages that:
1. the inner conductors 1 are arranged in the common wall shell 4, the input channel 8, the first output channel 10 and the second output channel 11, and the structure similar to a coaxial line has good signal interconnection and signal isolation effects. High performance, high reliability and broadband interconnection of microwave signals are realized. The system has good system function in 0-60G broadband microwave systems.
2. And by adopting a common-wall structure, the size of the power divider is reduced, and the miniaturization of the RFMEMS system is realized.
3. The characteristic impedance of the transmission can be further varied by varying the size of the dimensions of the first intermediate end 2 and the second intermediate end 3.
According to some embodiments, the MEMS micro-coaxial power divider further includes an input channel 8, where the input channel 8 is respectively communicated with the input ports of the first and second common-wall channels 6 and 7; the inner conductor 1 further comprises an input end 9, the input end 9 is arranged in the input channel 8, and the input end 9 is connected with one end of the first middle end 2 and one end of the second middle end 3 for inputting signals.
Based on the above embodiment, the input terminal 9 is connected to receive the signal, the signal outputs the first division signal through the first intermediate terminal 2, and the second division signal through the second intermediate component. The input end 9 and the input channel 8 can be bent or extended at will according to actual needs, so that other RF MEMS devices can be connected better.
According to some embodiments, the MEMS micro-coaxial power divider further includes a first output channel 10 and a second output channel 11, where the first output channel 10 is communicated with the output port of the first common-wall channel 6, and the second output channel 11 is communicated with the output port of the second common-wall channel 7; the inner conductor 1 further comprises a first output end 12 and a second output end 13, the first output end 12 is arranged in the first output channel 10 and is connected with the other end of the first middle end 2, and the second output end 13 is arranged in the second output channel 11 and is connected with the other end of the second middle end 3.
Based on the above embodiment, after the input terminal 9 receives the signal, the signal is output to the first output terminal 12 through the first intermediate terminal 2, and is output to the second output terminal 13 through the second intermediate device. The first output end 12 and the second output end 13, and the first output channel 10 and the second output channel 11 can be bent or extended arbitrarily according to actual needs, so that other RF MEMS devices can be connected better. In some embodiments, the characteristic impedance of the input 9, the first output 12 and the second output 13 is 50 Ω.
According to some embodiments, the first output end 12, the first output channel 10 and the second output end 13, the second output channel 11 are arranged in bilateral symmetry with respect to the input end 9.
Based on the embodiment, a strict symmetrical structure is adopted, so that the amplitude and the phase of the power divider are kept consistent.
According to some embodiments, the junction of the first intermediate end 2 and the second intermediate end 3, the junction of the first intermediate end 2 and the first output end 12, and the junction of the second intermediate end 3 and the second output end 13 are all arc-shaped with uniform arcs.
Based on the embodiment, the connection is carried out in a mode of uniform radian, and the reflection caused by discontinuity can be reduced by the conductor with uniform radian, so that the transmission loss is reduced.
According to some embodiments, support bars 15 are disposed in the input channel 8, the first output channel 10, and the second output channel 11, the input end 9, the first output end 12, and the second output end 13 are disposed on the support bars 15, and the support bars 15 are insulators.
Based on the above embodiment, the input end 9, the first output end 12, and the second output end 13 are respectively disposed in the input channel 8, the first output channel 10, and the second output channel 11, but the input end 9, the first output end 12, and the second output end 13 are all not in contact with the input channel 8, the first output channel 10, and the second output channel 11, and an air medium is disposed between the input end 9, the first output end 12, and the second output end 13 and the input channel 8, the first output channel 10, and the second output channel 11. The support bars 15 are patterned using standard photolithographic techniques to form a bar-like or other structure to facilitate suspension. The supporting bar 15 is made of a material having a low dielectric constant and has a good supporting function.
According to some embodiments, the inner conductor 1, the common wall housing 4, the input channel 8, the first output channel 10 and the second output channel 11 may be made of ti, cr, pt, ti, pt, cu or al.
According to some embodiments, the MEMS micro-coaxial power divider further includes an isolation resistor 16, one end of the isolation resistor 16 is connected to the other end of the first middle terminal 2, and the other end of the isolation resistor 16 is connected to the other end of the second middle terminal 3, so as to isolate the output signals of the first middle terminal 2 and the second middle terminal 3. The outputs of the first intermediate terminal 2 and the second intermediate terminal 3 are prevented from affecting each other.
According to some embodiments, the MEMS micro-coaxial power divider further includes a resistor channel 17, the isolation resistor 16 is disposed in the resistor channel 17, and the resistor channel 17 is respectively communicated with the output port of the first common-wall channel 6, the output port of the second common-wall channel 7, the first output channel 10, and the second output channel 11.
Based on the above-described embodiment, the common wall housing 4, the input channel 8, the first output channel 10, and the second output channel 11 are all used to prevent electromagnetic interference from being generated to the outside.
Please refer to fig. 2.
According to some embodiments, the common wall housing 4, the input channel 8, the resistive channel 17, the first output channel 10, and the second output channel 11 are all opened with a plurality of release ports 14.
Based on the above embodiment, before the fabrication is completed, the fillers left in the fabrication process are present in the common wall housing 4, the input channel 8, the resistance channel 17, the first output channel 10, and the second output channel 11, and the photoresist and other fillers need to be completely dissolved by the stripping solution, so that the fabrication is completed. And under the condition of not influencing the performance, Release ports 14 are formed in the common wall shell 4, the input channel 8, the resistance channel 17, the first output channel 10 and the second output channel 11 at equal intervals so that the stripping solution can fully react with the photoresist and Release conveniently, and the shapes of the Release ports 14 include but are not limited to rectangular, square, circular, rhombic and the like, and the size and the shape can be determined according to the Release time. And simultaneously, the whole weight is also reduced.
In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
While the present disclosure has been described with reference to several exemplary embodiments, it is understood that the terms used are words of description and illustration, rather than words of limitation. As the present disclosure may be embodied in several forms without departing from the spirit or essential characteristics thereof, it should also be understood that the above-described embodiments are not limited by any of the details of the foregoing description, but rather should be construed broadly within its spirit and scope as defined in the appended claims, and therefore all changes and modifications that fall within the meets and bounds of the claims, or equivalences of such meets and bounds are therefore intended to be embraced by the appended claims.
Claims (10)
1. An MEMS micro-coaxial power divider, comprising:
an inner conductor including a first intermediate end and a second intermediate end for adjusting impedance;
the common-wall shell is internally provided with a cavity, two sides of the cavity are communicated with the outside, a partition plate is arranged in the middle of the cavity, the cavity is divided into a first common-wall channel and a second common-wall channel by the partition plate, the first middle end is arranged in the first common-wall channel, the second middle end is arranged in the second common-wall channel, one end of the first middle end and one end of the second middle end are respectively arranged at input ports of the first common-wall channel and the second common-wall channel and are connected with each other so as to be used for receiving input signals.
2. The MEMS micro-coaxial power divider of claim 1, further comprising an input channel, wherein the input channel is respectively communicated with the input ports of the first and second common-wall channels;
the inner conductor further comprises an input end, the input end is arranged in the input channel, and the input end is connected with one end of the first middle end and one end of the second middle end and used for inputting signals.
3. The MEMS micro-coaxial power divider of claim 2, further comprising a first output channel and a second output channel, the first output channel being in communication with the output port of the first common-wall channel, the second output channel being in communication with the output port of the second common-wall channel;
the inner conductor further comprises a first output end and a second output end, the first output end is arranged in the first output channel and is connected with the other end of the first middle end, and the second output end is arranged in the second output channel and is connected with the other end of the second middle end.
4. The MEMS micro-coaxial power divider of claim 3, wherein the first output end and the first output channel and the second output end and the second output channel are arranged in bilateral symmetry with respect to the input end.
5. The MEMS micro-coaxial power divider of claim 3, wherein a junction of the first intermediate end and the second intermediate end, a junction of the first intermediate end and the first output end, and a junction of the second intermediate end and the second output end are all arc-shaped with uniform radian.
6. The MEMS micro-coaxial power divider according to claim 3, wherein support bars are disposed in the input channel, the first output channel and the second output channel, the input end, the first output end and the second output end are disposed on the support bars, and the support bars are insulators.
7. The MEMS micro-coaxial power divider according to claim 3, wherein the inner conductor, the common wall housing, the input channel, the first output channel and the second output channel are made of Ti-Au, Cr-Au, Pt-Au, Ti-Pt-Au, Cu or Al.
8. The MEMS micro-coaxial power divider of claim 3, further comprising an isolation resistor, wherein one end of the isolation resistor is connected to the other end of the first intermediate end, and the other end of the isolation resistor is connected to the other end of the second intermediate end, so as to isolate the output signals of the first intermediate end and the second intermediate end.
9. The MEMS micro-coaxial power divider of claim 8, further comprising a resistor channel, wherein the isolation resistor is disposed in the resistor channel, and the resistor channel is respectively connected to the output port of the first common-wall channel, the output port of the second common-wall channel, the first output channel, and the second output channel.
10. The MEMS micro-coaxial power divider of claim 9, wherein the common wall enclosure, the input channel, the resistive channel, the first output channel, and the second output channel are all opened with a plurality of release ports.
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| CN114976556B (en) | 2024-06-25 |
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