CN114965319A - Gas parameter multidimensional detection system and measurement method based on absorption spectrum - Google Patents

Abstract

The invention relates to the technical field of laser absorption spectroscopy, in particular to a gas parameter multi-dimensional detection system and measurement method based on absorption spectroscopy, which comprises a three-dimensional translation stage module, a physical field generation module to be measured and a laser module; On the base plate; two sets of X-axis translation stages are slidably arranged on the W-axis rotary stage, and installation columns are vertically arranged on the two sets of X-axis translation stages; on the column; the left support platform and the right support platform are respectively arranged on the Z axis translation platform b and the Z axis translation platform a; the laser emission module and the laser detector are respectively arranged on the left support platform and the right support platform; the thermal physical field generating device There is a lift table at the bottom. The invention can quickly obtain the two-dimensional and three-dimensional gas thermophysical parameter distribution of the area to be measured. By adjusting the vertical height of the physical field generating device to be measured, more gas thermophysical parameter distributions in the vertical direction can be obtained.

Description

A kind of gas parameter multi-dimensional detection system and measurement method based on absorption spectrum

technical field

The invention relates to the technical field of laser absorption spectroscopy, in particular to a gas parameter multidimensional detection system and measurement method based on absorption spectroscopy.

Background technique

As a non-invasive high-precision detection method, laser absorption spectroscopy has been widely used in various fields such as atmospheric environment monitoring, industrial process monitoring, combustion diagnosis and so on. In the past few decades, researchers have carried out the measurement of airflow temperature and component concentration on a single path based on laser absorption spectroscopy, and the thermophysical parameters such as airflow temperature, component concentration, flow rate and pressure combined with tomography technology. reconstruction.

At present, for non-uniform thermal physical fields or combustion fields, most of the research work is based on TDLAS technology to couple multiple laser beams into parallel or irregular multiple laser beams through a fiber beam splitter, and then pass through the area to be measured, using Multiple photodetectors acquire multiple spectral line absorption data in different directions, and the two-dimensional thermophysical parameters of the area to be measured are reconstructed and detected based on the tomography algorithm. However, this measurement method has problems such as complicated experimental system, high cost, limited number of optical paths and resolution due to the size of the laser collimator and photodetector, and weakening of the laser light intensity after beam splitting. In order to solve these problems, some researchers changed the laser from a point light source to a surface light source through the transformation of an optical lens, combined with a two-dimensional infrared sensor and multi-angle measurement of the area to be measured, and realized the three-dimensional reconstruction of the relevant thermophysical parameters of the combustion field. . However, this detection method fixes the laser and the sensor, and changes the angle of the burner to obtain the absorption spectrum information in different directions. The size of the measurable combustion field is only about 25mm × 25mm × 25mm, which is not conducive to the application of combustion fields of different scales. In addition, the current high price of two-dimensional infrared sensors and insufficient spectral and scanning resolutions affect the wide application of this technology. Therefore, there is still a lack of general, high-precision, low-cost 3D reconstruction technical solutions and equipment for thermophysical parameters such as airflow temperature and component concentration.

SUMMARY OF THE INVENTION

The purpose of the present invention is to solve the problems existing in the background technology, and propose a multi-dimensional detection system and measurement method of gas thermophysical parameters based on a three-dimensional translation stage and laser absorption spectrum tomography technology, which can realize two-dimensional or three-dimensional gas thermal physical fields. parameter refactoring.

On the one hand, the present invention proposes a multi-dimensional detection system for gas parameters based on absorption spectrum, including a three-dimensional translation stage module, a thermal physical field generation module to be measured and a laser module; the three-dimensional translation stage module includes a W-axis rotation stage, an X-axis translation stage, Right support stage, Z-axis translation stage a, Z-axis translation stage b and left support stage; the thermal physics field generation module to be measured includes the thermal physics field of the gas to be measured and the thermal physics field generating device; the laser module includes a laser detector and a laser emission module;

The W-axis rotary table is rotatably arranged on the bottom plate, and the bottom plate is provided with a W-axis drive motor that drives the W-axis rotary table to rotate; the X-axis translation table is set on the W-axis rotary table by sliding along the X direction, and the X-axis translation table is provided with two groups. The W-axis rotary table is provided with an X-axis power component that drives the X-axis translation table to move, and two sets of X-axis translation tables are vertically provided with mounting columns; Z-axis translation table a and Z-axis translation table b slide in the vertical direction respectively It is arranged on two sets of installation columns, and the installation columns are provided with Z-axis power components that drive the Z-axis translation stage a and Z-axis translation stage b to move; the left support table and the right support stage are respectively set on the Z-axis translation stage b and Z-axis On the translation platform a, the left support platform and the right support platform are arranged horizontally; the laser emission module and the laser detector are respectively arranged on the left support platform and the right support platform, and a laser light path is formed between the laser emission module and the laser detector; The W-axis rotary table is vertically provided with through holes through which the heating physical field generating device passes. The thermal physical field generating device upwardly generates the thermal physical field of the gas to be measured, and the laser light path passes through the thermal physical field of the gas to be measured. A lift table is arranged at the bottom of the generating device.

Preferably, the X-axis power assembly includes an X-axis drive motor and a screw a; the X-axis drive motor is arranged on the W-axis rotary table, the X-axis drive motor is arranged in two groups, the output shaft of the X-axis drive motor is connected to the screw a, and the screw a Two groups are arranged along the X-direction, and the X-axis translation stage is provided with a threaded hole matched with the screw a.

Preferably, the Z-axis power assembly includes a Z-axis drive motor and a screw b; two sets of Z-axis drive motors are arranged, the two sets of Z-axis drive motors are respectively arranged on the tops of the two sets of mounting columns, and the output shaft of the Z-axis drive motor is connected to the screw b , the screw b is vertically arranged in two groups, and the Z-axis translation stage a and the Z-axis translation stage b are both provided with threaded holes matched with the screw b.

Preferably, a reinforcement rib is arranged between the left support platform and the Z-axis translation platform b; and a reinforcement rib is arranged between the right support platform and the Z-axis translation platform a.

On the other hand, the present invention proposes a gas parameter multi-dimensional measurement method of a gas parameter multi-dimensional detection system based on absorption spectrum. The laser emission module and the laser detector are respectively in the state of a point light source and a point detector, and it is characterized in that the following steps are included. : S11. The computer control terminal gives a translation signal to the X-axis drive motor, and the left support table and the right support table carry the laser emission module and the laser detector to scan the area to be measured in parallel with the X-axis translation stage to complete all scans at the same incident angle. Detection; S12, drive the W-axis rotary stage, repeat S11 after completing a given rotation angle command, and so on until the parallel scanning of all target rotation angles is completed; S13, drive the Z-axis translation stage a and Z-axis translation at a fixed step size Stage b, when the right support stage and the left support stage rise to the target height, repeat S11 and S12; S14, repeat S13, until the measurement of the target vertical height is completed.

Preferably, in the gas parameter multi-dimensional measurement method, the laser emission module and the laser detector are in the state of a line light source and a linear matrix detector, respectively, and it is characterized in that the following steps are included: S21, the line light source, from the initial incident angle, along a single path Passing through the area to be tested is received by the linear matrix detector on the right support stage;

S22. Drive the W-axis rotary stage, repeat S21 after completing a given rotation angle command, and so on until the parallel scanning of all target rotation angles is completed; S23. Drive the Z-axis translation stage a and Z-axis translation stage b at a fixed step size , when the right support platform and the left support platform rise to the target height, repeat S21 and S22; S24, repeat S24, until the measurement of the target vertical height is completed.

Preferably, in the gas parameter multi-dimensional measurement method, when the laser emission module and the laser detector are respectively a surface light source and a planar matrix detector, it is characterized in that the following steps are included: S31, the surface light source, from the initial incident angle, follows a single path Passing through the area to be tested is received by the plane matrix detector on the right support stage;

S32, drive the Z-axis translation stage a and the Z-axis translation stage b at a fixed step size, repeat S31 when the right support stage and the left support stage rise to the target height; S33, repeat S32 until the measurement of the target vertical height is completed.

Compared with the prior art, the present invention has the following beneficial technical effects: 1. Through the laser parallel scanning, vertical scanning and rotational scanning of the area to be measured, combined with the spectral tomography technology, the two-dimensional and three-dimensional gases in the area to be measured can be quickly acquired; The parameter distribution does not require the arrangement of a large number of laser beams and sensors, which simplifies the experimental setup, greatly reduces the equipment cost, and can improve the measurement efficiency through the automatic programming of the translation stage and the rotary stage. 2. The laser emission module has a point light source, a line light source and a surface light source, and the corresponding laser detector is a point detector, a linear matrix detector and a plane matrix detector. By replacing different light sources and detectors, different detection methods can be obtained. 3. By setting a lift table below the thermal physics field generating device to adjust the vertical height of the thermal physics field generating device, precise positioning in the vertical direction of the measurement plane can be performed and the measurement range in the vertical direction can be expanded.

Description of drawings

1 is a schematic structural diagram of an embodiment of the present invention;

2 is a schematic diagram of the optical path of the point light source detection of the present invention;

3 is a schematic diagram of the optical path of the line light source detection of the present invention;

4 is a schematic diagram of the optical path of the surface light source detection of the present invention;

Fig. 5 is the flow chart of embodiment three;

Fig. 6 is the flow chart of embodiment four;

FIG. 7 is a flowchart of the fifth embodiment.

Reference signs: 1. W-axis rotation stage; 2. X-axis translation stage; 3. X-axis drive motor; 4. Right support stage; 5. Laser detector; 6. Z-axis translation stage a; 7. Z-axis drive Motor; 8. Thermal physical field of gas to be measured; 9. Z-axis translation stage b; 10. Laser emission module; 11. Left support stage; 12. Laser light path; 13. W-axis drive motor; 14. Thermal physical field generating device ; 15, point light source; 16, point detector; 17, line light source; 18, linear matrix detector; 19, surface light source; 20, plane matrix detector.

Detailed ways

Example 1

As shown in Figures 1-4, a gas parameter multi-dimensional detection system based on absorption spectrum proposed by the present invention includes a three-dimensional translation stage module, a thermal physical field generation module to be measured and a laser module; the three-dimensional translation stage module includes a W-axis rotating stage 1. X-axis translation stage 2, right support stage 4, Z-axis translation stage a6, Z-axis translation stage b9 and left support stage 11; the thermal physical field generation module to be measured includes the thermal physical field 8 of the gas to be measured and the thermal physical field generation module device 14; the laser module includes a laser detector 5 and a laser emission module 10;

The W-axis rotary table 1 is rotatably arranged on the bottom plate, and the bottom plate is provided with a W-axis drive motor 13 that drives the W-axis rotary table 1 to rotate; the X-axis translation table 2 is slidably arranged on the W-axis rotary table 1 along the X direction, and the X axis translates Stage 2 is provided with two groups, the W-axis rotary stage 1 is provided with an X-axis power component that drives the X-axis translation stage 2 to move, and two sets of X-axis translation stages 2 are provided with vertical mounting columns; Z-axis translation stage a6 and Z-axis The translation stages b9 are respectively slid on two sets of installation columns along the vertical direction, and the installation columns are provided with Z-axis power components that drive the Z-axis translation stage a6 and the Z-axis translation stage b9 to move; the left support stage 11 and the right support stage 4 They are respectively arranged on the Z-axis translation stage b9 and the Z-axis translation stage a6, and the left support stage 11 and the right support stage 4 are arranged horizontally; the laser emission module 10 and the laser detector 5 are respectively arranged on the left support stage 11 and the right support stage 4 Above, a laser light path 12 is formed between the laser emission module 10 and the laser detector 5; the bottom plate and the W-axis rotary table 1 are vertically provided with through holes for the thermal physical field generating device 14 to pass through, and the thermal physical field generating device 14 The thermal physical field 8 of the gas to be measured is generated upward, the laser light path 12 passes through the thermal physical field 8 of the gas to be measured, and a lifting platform is provided at the bottom of the thermal physical field generating device 14 . A reinforcing rib is arranged between the left support table 11 and the Z-axis translation table b9; a reinforcement rib is arranged between the right support table 4 and the Z-axis translation table a6.

This embodiment has the following beneficial effects: 1. Through the laser parallel scanning, vertical scanning and rotational scanning of the area to be measured, the two-dimensional and three-dimensional gas parameter distributions of the area to be measured can be quickly obtained in combination with the spectral tomography technology, and it is not necessary to arrange a large number of lasers The beam and sensor simplify the experimental setup, greatly reduce the equipment cost, and improve the measurement efficiency through the automatic programming of the translation stage and the rotary stage. 2. The laser emission module 10 has a point light source 15, a line light source 17 and a surface light source 19, and the corresponding laser detector 5 has a point detector 16, a linear matrix detector 18 and a plane matrix detector 20. By replacing different light sources and detectors, the Get different detection methods. 3. The vertical height of the thermal physical field generating device 14 can be adjusted by setting a lift table below the thermal physical field generating device 14, so as to accurately locate the vertical direction of the measurement plane and expand the vertical measuring range.

Embodiment 2

As shown in FIG. 1 , in a gas parameter multi-dimensional detection system based on absorption spectrum proposed by the present invention, compared with the first embodiment, the X-axis power assembly includes an X-axis drive motor 3 and a screw a; the X-axis drive motor 3 is arranged on the On the W-axis rotary table 1, there are two sets of X-axis drive motors 3, the output shaft of the X-axis drive motor 3 is connected with the screw a, the screw a is set in two groups along the X direction, and the X-axis translation table 2 is provided with a screw a. threaded holes. The Z-axis power assembly includes a Z-axis drive motor 7 and a screw b; the Z-axis drive motor 7 is provided in two groups, and the two groups of Z-axis drive motors 7 are respectively arranged on the tops of the two sets of mounting columns. The output shaft of the Z-axis drive motor 7 is connected to the screw b For connection, the screw b is vertically arranged in two groups, and the Z-axis translation stage a6 and the Z-axis translation stage b9 are both provided with threaded holes matched with the screw b. The driving structure of the X-axis and Z-axis movement is in the form of a motor and a screw, which has a simple structure and is easy to manufacture.

Embodiment 3

As shown in FIG. 5 , based on the gas parameter multi-dimensional measurement method of the embodiment of the gas parameter multi-dimensional detection system based on the absorption spectrum, the laser emission module 10 and the laser detector 5 are respectively in the state of the point light source 15 and the point detector 16 , It is characterized in that, comprises the following steps:

S11. The computer control end gives a translation signal to the X-axis drive motor 3, and the left support table 11 and the right support table 4 scan the area to be measured in parallel with the X-axis translation stage 2 with the laser emission module and the laser detector to complete the same incident angle All scan detections of ;

S12, drive the W-axis rotary table 1, and repeat S11 after completing a given rotation angle command, and so on until the parallel scanning of all target rotation angles is completed;

S13, drive the Z-axis translation stage a6 and the Z-axis translation stage b9 according to the fixed step size, and repeat S11 and S12 when the right support stage 4 and the left support stage 11 rise to the target height;

S14. Repeat S13 until the measurement of the vertical height of the target is completed.

In this embodiment, S11 and S12 can be divided into grids for the area to be measured, and the absorption spectrum signals along the optical path in different directions of the thermal physical field of the gas to be measured at a certain vertical height can be obtained; all the fault planes at the target height can be obtained after all steps are completed. The three-dimensional distribution of the thermophysical parameters of the gas thermal physical field to be measured can be obtained by combining the absorption spectrum signals of the gas thermal physical field along the optical path in different directions, combined with the laser absorption spectrum tomography technology.

Embodiment 4

As shown in FIG. 6 , based on the gas parameter multi-dimensional measurement method according to the embodiment of the absorption spectrum-based gas parameter multi-dimensional detection system, the laser emission module 10 and the laser detector 5 are in the state of the line light source 17 and the linear matrix detector 18 respectively. , is characterized in that, comprises the following steps:

S21, the line light source 17 is received by the linear matrix detector 18 on the right support table 4 along a single path through the area to be measured from the initial incident angle;

S22, drive the W-axis rotary table 1, and repeat S21 after completing a given rotation angle command, and so on until the parallel scanning of all target rotation angles is completed;

S23, drive the Z-axis translation stage a6 and the Z-axis translation stage b9 according to the fixed step length, and repeat S21 and S22 when the right support stage 4 and the left support stage 11 rise to the target height;

S24. Repeat S23 until the measurement of the vertical height of the target is completed.

In this embodiment, S21 and S22 can obtain the absorption spectrum signals of the thermal physical field of the gas to be measured at a certain vertical height along the optical path in different directions; after all steps are completed, the gas thermal physical fields of all fault planes at the target height can be obtained. The three-dimensional distribution of the thermophysical parameters of the gas to be measured can be obtained by combining the absorption spectrum signals along the optical path with the laser absorption spectrum tomography technology.

Embodiment 5

As shown in FIG. 7 , based on the gas parameter multi-dimensional measurement method according to the embodiment of the absorption spectrum-based gas parameter multi-dimensional detection system, the laser emission module 10 and the laser detector 5 are in the state of the surface light source 19 and the flat matrix detector 20 respectively. , is characterized in that, comprises the following steps:

S31, the surface light source 19 is received by the plane matrix detector 20 on the right support table 4 along a single path through the area to be measured from the initial incident angle;

S32, drive the Z-axis translation stage a6 and the Z-axis translation stage b9 according to the fixed step length, and repeat S31 when the right support stage 4 and the left support stage 11 rise to the target height;

S33. Repeat S32 until the measurement of the vertical height of the target is completed.

In this embodiment, S31 can obtain the three-dimensional distribution of the thermophysical parameters of the gas to be measured at the same height as the surface light source 19 , and all steps can obtain the three-dimensional distribution of the thermophysical parameters of the gas to be measured at the target height.

The embodiments of the present invention have been described in detail above in conjunction with the accompanying drawings, but the present invention is not limited thereto. Within the scope of knowledge possessed by those skilled in the art, various Variety.

Claims (7)

1. a gas parameter multidimensional detection system based on absorption spectrum, is characterized in that, comprises three-dimensional translation stage module, thermal physics field generation module to be measured and laser module; Three-dimensional translation stage module comprises W-axis rotary table (1), X-axis a translation stage (2), a right support stage (4), a Z-axis translation stage a (6), a Z-axis translation stage b (9) and a left support stage (11); the thermal physical field generation module to be measured includes the gas heat to be measured a physical field (8) and a thermal physical field generating device (14); the laser module comprises a laser detector (5) and a laser emission module (10); The W-axis rotary table (1) is rotatably arranged on the bottom plate, and the bottom plate is provided with a W-axis drive motor (13) that drives the W-axis rotary table (1) to rotate; the X-axis translation table (2) is slidably arranged on the W-axis along the X direction. On the rotary table (1), two sets of X-axis translation stages (2) are provided, the W-axis rotary stage (1) is provided with an X-axis power component that drives the X-axis translation stage (2) to move, and two sets of X-axis translation stages ( 2) Mounting columns are vertically arranged on them; Z-axis translation stage a (6) and Z-axis translation stage b (9) are respectively installed on the two sets of mounting columns in a vertical direction, and the mounting columns are provided with Z-axis translation. A Z-axis power assembly that moves the stage a (6) and the Z-axis translation stage b (9); the left support stage (11) and the right support stage (4) are respectively arranged on the Z-axis translation stage b (9) and the Z-axis translation stage On a (6), the left support table (11) and the right support table (4) are arranged horizontally; the laser emission module (10) and the laser detector (5) are respectively arranged on the left support table (11) and the right support table ( 4) above, a laser light path (12) is formed between the laser emission module (10) and the laser detector (5); a heating physical field generating device (14) is vertically arranged on the bottom plate and the W-axis rotary table (1) Through the through hole, the thermal physical field generating device (14) upwardly generates the thermal physical field (8) of the gas to be measured, the laser light path (12) passes through the thermal physical field (8) of the gas to be measured, and the thermal physical field generating device (14) ) at the bottom with a lift table. 2. The gas parameter multi-dimensional detection system based on absorption spectrum according to claim 1, wherein the X-axis power assembly comprises an X-axis drive motor (3) and a screw a; the X-axis drive motor (3) is arranged on the W-axis On the rotary table (1), two sets of X-axis drive motors (3) are arranged, the output shaft of the X-axis drive motor (3) is connected with the screw a, and the screw a is arranged in two groups along the X direction, and the X-axis translation stage (2) is provided with two groups. A threaded hole matched with the screw a is provided. 3. gas parameter multi-dimensional detection system based on absorption spectrum according to claim 1, is characterized in that, Z-axis power assembly comprises Z-axis drive motor (7) and screw b; Z-axis drive motor (7) is provided with two groups, The two sets of Z-axis drive motors (7) are respectively arranged on the tops of the two sets of installation columns, the output shafts of the Z-axis drive motors (7) are connected to the screw b, and two sets of the screw b are vertically arranged, and the Z-axis translation stages a (6) and The Z-axis translation stages b(9) are all provided with threaded holes matched with the screw rods b. 4. The gas parameter multi-dimensional detection system based on absorption spectrum according to claim 1, characterized in that, a reinforcing rib is arranged between the left support platform (11) and the Z-axis translation platform b (9); the right support platform (4) ) and the Z-axis translation platform a(6) are provided with reinforcing ribs. 5. A gas parameter multidimensional measurement method based on an absorption spectrum gas parameter multidimensional detection system according to claim 1, wherein the laser emission module (10) and the laser detector (5) are respectively a point light source (15) and a point detection Under the state of the device (16), it is characterized in that it comprises the following steps: S11. The computer control end gives a translation signal to the X-axis drive motor (3), and the left support table (11) and the right support table (4) carry the laser emission module and the laser detector to scan in parallel with the X-axis translation stage (2). In the area to be tested, all scanning tests at the same incident angle are completed; S12, drive the W-axis rotary table (1), repeat S11 after completing a given rotation angle command, and so on until the parallel scanning of all target rotation angles is completed; S13, drive the Z-axis translation stage a (6) and the Z-axis translation stage b (9) according to the fixed step length, when the right support stage (4) and the left support stage (11) rise to the target height, repeat S11 and S12; S14. Repeat S13 until the measurement of the vertical height of the target is completed. 6. A kind of gas parameter multi-dimensional measurement method according to claim 5, the laser emission module (10) and the laser detector (5) are respectively in the state of the line light source (17) and the linear matrix detector (18), it is characterized in Yes, including the following steps: S21, the line light source (17) is received by the linear matrix detector (18) on the right support table (4) along a single path through the area to be measured from the initial incident angle; S22, drive the W-axis rotary table (1), repeat S21 after completing a given rotation angle command, and so on until the parallel scanning of all target rotation angles is completed; S23, drive the Z-axis translation stage a (6) and the Z-axis translation stage b (9) according to the fixed step length, when the right support stage (4) and the left support stage (11) rise to the target height, repeat S21 and S22; S24. Repeat S23 until the measurement of the vertical height of the target is completed. 7. A kind of gas parameter multi-dimensional measurement method according to claim 5, the laser emission module (10) and the laser detector (5) are respectively in the state of the surface light source (19) and the plane matrix detector (20), it is characterized in Yes, including the following steps: S31, the surface light source (19) passes through the area to be measured along a single path from the initial incident angle and is received by the plane matrix detector (20) on the right support table (4); S32, drive the Z-axis translation stage a (6) and the Z-axis translation stage b (9) according to the fixed step length, and repeat S31 when the right support stage (4) and the left support stage (11) rise to the target height; S33. Repeat S32 until the measurement of the vertical height of the target is completed.

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