CN114950869B - Glue spreader convenient to operate and operation method thereof - Google Patents
Glue spreader convenient to operate and operation method thereof Download PDFInfo
- Publication number
- CN114950869B CN114950869B CN202210833704.1A CN202210833704A CN114950869B CN 114950869 B CN114950869 B CN 114950869B CN 202210833704 A CN202210833704 A CN 202210833704A CN 114950869 B CN114950869 B CN 114950869B
- Authority
- CN
- China
- Prior art keywords
- colloid
- check ring
- sliding
- rotary table
- baffle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
- B05C5/0212—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1039—Recovery of excess liquid or other fluent material; Controlling means therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Abstract
The invention discloses a glue spreader convenient to operate and an operation method thereof, comprising the following steps: the device comprises a rotary table, a colloid dropper, a retainer ring device, a connecting sliding device, a sliding filter brush device, a liquid collecting and guiding device, a high-strength fan and a colloid recycling device, wherein the colloid dropper is arranged above the rotary table; the retainer ring device is arranged around the turntable; the connecting sliding device is arranged on one side of the inner wall of the check ring device; the sliding filter brush device is annular; the liquid collecting and guiding device is connected with the lower end of the check ring device, and the liquid collecting and guiding device is arranged on the other side of the check ring device; the high-strength fan is arranged below the check ring device, and the high-strength fan is arranged on one side of the check ring device; the colloid recovery device is arranged below the liquid collecting and guiding device. The invention can effectively prevent the colloid from splashing, and scrape the colloid adhered on the enclosing device for recycling. The invention is fully automatic in operation, and the enclosure device is detachable and convenient to clean.
Description
Technical Field
The invention relates to the technical field of glue spreading machines, in particular to a glue spreading machine convenient to operate and an operation method thereof.
Background
In the manufacture and advanced packaging of semiconductor devices, photolithography refers to a process of sequentially performing photoresist coating, exposure, development, etc. on a substrate, such as a semiconductor wafer, and transferring a designed pattern on a photolithography MASK (MASK) into a film layer on the surface of the substrate. In the photoresist coating process, a photoresist film layer is formed by coating photoresist on the surface of a substrate and performing heating treatment on the coated photoresist, and then a specified pattern structure is formed in the photoresist layer on the surface of the substrate through an exposure and development process.
In the photoresist coating process, the wafer is generally put into a special gumming machine and is finished by adopting a rotary gumming method.
However, the colloid needs to completely wrap the upper surface of the wafer, so that the amount of the colloid is difficult to pinch, but a part of colloid is generally selected to be used more, so that the splashed colloid can pollute the space inside the machine, and a device capable of conveniently collecting the waste colloid is urgently needed at present.
Disclosure of Invention
Accordingly, the present invention is directed to a glue spreader that is easy to operate.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
a glue applicator for ease of handling, comprising:
the rotary table is disc-shaped and can rotate by taking the axis of the rotary table as a shaft;
the colloidal dropper is arranged above the turntable;
the check ring device is in a circular ring shape, the check ring device is arranged around the rotary table, and a first gap exists between the check ring device and the rotary table;
the connecting sliding device is arranged on one side of the inner wall of the check ring device, one end of the connecting sliding device is arranged in the check ring device, and the other end of the connecting sliding device protrudes out of the check ring device;
the sliding filter brush device is annular, the sliding filter brush device is arranged between the retainer ring device and the rotary table, the sliding filter brush device is connected with the connecting sliding device in a sliding manner, the sliding filter brush device can move up and down along the connecting sliding device, the sliding filter brush device and the retainer ring device are arranged in a pasting manner, and a second gap is reserved between the sliding filter brush device and the rotary table;
the liquid collecting and guiding device is connected with the lower end of the check ring device, and the liquid collecting and guiding device is arranged on the other side of the check ring device;
the high-strength fan is arranged below the check ring device, and is arranged on one side of the check ring device;
and the colloid recovery device is arranged below the liquid collecting and guiding device.
The above-mentioned spreading machine convenient to operate, wherein, the slip is strained brush device and is included: the inner ring part is arranged in the liquid scraping part, the inner ring part is connected with the liquid scraping part, and the inner ring part is connected with the connecting sliding device through a connecting rod.
The above-mentioned spreading machine convenient to operate, wherein, collect liquid guiding device includes: the baffle, two first curb plates and two second curb plates, the up end of baffle with the lower terminal surface of retaining ring is connected, two first curb plate is located respectively on the both sides face of the upper end of baffle, two first curb plate with have first contained angle between the baffle, two the second curb plate is located respectively on the both sides face of the lower extreme of baffle, two the second curb plate with have the second contained angle between the baffle.
The above-mentioned spreading machine convenient to operate, wherein, the baffle includes: the arc of the baffle plate is the same as that of the check ring device, the upper end face of the arc is connected with the lower end face of the check ring device, the lower end face of the arc is connected with the upper end face of the triangular arc, one corner of the triangular arc is vertically downwards arranged, two first side plates are respectively connected with two side faces of the arc, and two second side plates are respectively connected with two side faces of the triangular arc.
The above-mentioned spreading machine convenient to operate, wherein, colloid recovery unit includes: the device comprises an inlet pipeline, a collecting device and an outlet pipeline, wherein one end of the inlet pipeline is propped against the lower end of the liquid collecting and guiding device, the other end of the inlet pipeline is connected with the collecting device, and the lower end of the collecting device is connected with the outlet pipeline.
The glue spreader convenient to operate is characterized in that a first distance is reserved between the high-strength fan and the check ring device.
The glue spreader convenient to operate is characterized in that a plurality of air outlets are formed in the surface, opposite to the liquid collecting and guiding device, of the high-strength fan.
The glue spreader convenient to operate is characterized in that a first distance is reserved between the sliding filter brush device and the turntable.
The operation method of the glue spreader convenient to operate comprises the following steps: the glue spreader convenient to operate comprises the following specific operation steps:
step one: the colloid dropper drops colloid onto the wafer on the rotary table, the colloid dropper is retracted, and the rotary table rotates to spread the colloid on the upper surface of the wafer;
step two: the retainer ring device is arranged at a position covering the turntable and the wafer, and the high-strength fan is started;
step three: the sliding filter brush device moves downwards along the connecting sliding device to scrape the colloid on the inner wall of the retainer ring device;
step four: simultaneously, the high-strength fan blows the colloid to the liquid collecting and guiding device, and the colloid enters the colloid recovery device along the liquid collecting and guiding device.
The invention adopts the technology, so that compared with the prior art, the invention has the positive effects that:
(1) The invention can effectively prevent the colloid from splashing, and scrape the colloid adhered on the enclosing device for recycling.
(2) The invention is fully automatic in operation, and the enclosure device is detachable and convenient to clean.
Drawings
Fig. 1 is a schematic side view of a convenient handling glue applicator of the present invention.
Fig. 2 is a schematic view of a first direction of the easy-to-operate glue applicator of the present invention.
Fig. 3 is a schematic view of a second direction of the easy-to-handle glue applicator of the present invention.
Fig. 4 is a schematic view of the front of the easy-to-handle applicator of the present invention.
In the accompanying drawings: 1. a turntable; 2. a retainer ring device; 3. connecting a sliding device; 4. a sliding filter brush device; 5. a liquid collecting and guiding device; 51. a first side plate; 52. a second side plate; 6. an introduction pipe; 7. a collection device; 8. a lead-out pipe; 9. a high-strength fan; 91. an air outlet; 10. a gel dropper.
UDetailed Description
The invention is further illustrated, but not limited to, by the following description of the drawings and of the specific embodiments, in which fig. 1 is a schematic side view of a spreading machine according to the invention, which facilitates the handling thereof; fig. 2 is a schematic view of a first direction of a spreading machine of the present invention for ease of operation; FIG. 3 is a schematic view of a second orientation of the easy to handle applicator of the present invention; fig. 4 is a schematic view of the front side of the easy-to-handle dispenser of the present invention, and referring to fig. 1 to 4, there is shown a convenient-to-handle dispenser of a preferred embodiment, comprising: the device comprises a rotary table 1, a colloid dropper 10, a retainer ring device 2, a connecting sliding device 3, a sliding filter brush device 4, a liquid collecting and guiding device 5, a high-strength fan 9 and a colloid recycling device, wherein the rotary table 1 is disc-shaped, and the rotary table 1 can rotate by taking the axis of the rotary table 1 as a shaft; the colloid dropper 10 is arranged above the turntable 1; the retainer ring device 2 is annular, the retainer ring device 2 is arranged around the rotary table 1, and a first gap exists between the retainer ring device 2 and the rotary table 1; the connecting sliding device 3 is arranged on one side of the inner wall of the check ring device 2, one end of the connecting sliding device 3 is arranged in the check ring device 2, and the other end of the connecting sliding device 3 protrudes out of the check ring device 2; the sliding filter brush device 4 is annular, the sliding filter brush device 4 is arranged between the retainer ring device 2 and the rotary table 1, the sliding filter brush device 4 is in sliding connection with the connecting sliding device 3, the sliding filter brush device 4 can move up and down along the connecting sliding device 3, the sliding filter brush device 4 and the retainer ring device 2 are arranged in a pasting mode, and a second gap is reserved between the sliding filter brush device 4 and the rotary table 1; the liquid collecting and guiding device 5 is connected with the lower end of the check ring device 2, and the liquid collecting and guiding device 5 is arranged on the other side of the check ring device 2; the high-strength fan 9 is arranged below the check ring device 2, and the high-strength fan 9 is arranged on one side of the check ring device 2; the colloid recovery device is arranged below the liquid collecting and guiding device 5.
In a preferred embodiment, the sliding filter brush arrangement 4 comprises: the inner ring part is arranged in the scraping part and is connected with the scraping part, and the inner ring part is connected with the connecting sliding device 3 through a connecting rod.
In a preferred embodiment, the liquid collection and diversion device 5 comprises: the baffle, two first side plates 51 and two second side plates 52, the up end of baffle is connected with the lower terminal surface of retaining ring, and two first side plates 51 are located respectively on the both sides face of the upper end of baffle, have first contained angle between two first side plates 51 and the baffle, and two second side plates 52 are located respectively on the both sides face of the lower extreme of baffle, have the second contained angle between two second side plates 52 and the baffle.
In a preferred embodiment, the baffle comprises: the arc part and the triangle arc part, the radian of the baffle is the same as the radian of the retainer ring device 2, the upper end face of the arc part is connected with the lower end face of the retainer ring device 2, the lower end face of the arc part is connected with the upper end face of the triangle arc part, one corner of the triangle arc part is vertically downwards arranged, two first side plates 51 are respectively connected with two side faces of the arc part, and two second side plates 52 are respectively connected with two side faces of the triangle arc part.
As shown in fig. 3, the bottom of the triangular arc part is a vertex angle of a triangle, and the bottom of the triangular arc is attached to the colloid recovery device.
The foregoing is merely a preferred embodiment of the present invention, and is not intended to limit the embodiments and the protection scope of the present invention.
The present invention has the following embodiments based on the above description:
in a further embodiment of the present invention, the colloid recovery apparatus includes: the device comprises an inlet pipeline 6, a collecting device 7 and an outlet pipeline 8, wherein one end of the inlet pipeline 6 is propped against the lower end of the liquid collecting and guiding device 5, the other end of the inlet pipeline 6 is connected with the collecting device 7, and the lower end of the collecting device 7 is connected with the outlet pipeline 8.
In a further embodiment of the invention, there is a first distance between the high-strength fan 9 and the retaining ring device 2.
In a further embodiment of the present invention, a plurality of air outlets 91 are formed on the surface of the high-strength fan 9 opposite to the liquid collecting and guiding device 5.
In a further embodiment of the invention, the sliding filter brush means 4 is at a first distance from the turntable 1.
Specifically, the first distance between the sliding filter brush device 4 and the turntable 1 can effectively control the influence of the air blown by the high-strength fan 9 on the wafer from the baffle back blowing to the turntable 1, and the rotation of the turntable 1 is not influenced.
A method of operating a glue applicator for ease of operation, comprising: the glue spreader convenient to operate comprises the following specific operation steps:
step one: the colloid dropper 10 drops colloid onto the wafer on the rotary table 1, the colloid dropper 10 is retracted, and the rotary table 1 rotates to spread the colloid on the upper surface of the wafer;
step two: the retainer ring device 2 is arranged at the position covering the turntable 1 and the wafer, and the high-strength fan 9 is started;
step three: the sliding filter brush device 4 moves downwards along the connecting sliding device 3 to scrape colloid on the inner wall of the retainer ring device 2;
step four: meanwhile, the high-strength fan 9 blows the colloid to the liquid collecting and guiding device 5, and the colloid enters the colloid recovery device along the liquid collecting and guiding device 5.
In a preferred embodiment, a vertical airflow from top to bottom is arranged right above the turntable 1, and the vertical airflow is blocked by the sliding filter brush device 4, so that the influence on the horizontal airflow blown by the high-strength fan 9 is small.
The foregoing is merely illustrative of the preferred embodiments of the present invention and is not intended to limit the embodiments and scope of the present invention, and it should be appreciated by those skilled in the art that equivalent substitutions and obvious variations may be made using the description and illustrations of the present invention, and are intended to be included in the scope of the present invention.
Claims (7)
1. A glue applicator for ease of operation, comprising:
the rotary table is disc-shaped and can rotate by taking the axis of the rotary table as a shaft;
the colloidal dropper is arranged above the turntable;
the check ring device is in a circular ring shape, the check ring device is arranged around the rotary table, and a first gap exists between the check ring device and the rotary table;
the connecting sliding device is arranged on one side of the inner wall of the check ring device, one end of the connecting sliding device is arranged in the check ring device, and the other end of the connecting sliding device protrudes out of the check ring device;
the sliding filter brush device is annular, the sliding filter brush device is arranged between the retainer ring device and the rotary table, the sliding filter brush device is connected with the connecting sliding device in a sliding manner, the sliding filter brush device can move up and down along the connecting sliding device, the sliding filter brush device and the retainer ring device are arranged in a pasting manner, and a second gap is reserved between the sliding filter brush device and the rotary table;
the liquid collecting and guiding device is connected with the lower end of the check ring device, and the liquid collecting and guiding device is arranged on the other side of the check ring device;
the high-strength fan is arranged below the check ring device, and is arranged on one side of the check ring device;
the colloid recovery device is arranged below the liquid collecting and guiding device;
wherein, the slip is strained and is brushed device includes: the inner ring part is arranged in the liquid scraping part, the inner ring part is connected with the liquid scraping part, and the inner ring part is connected with the connecting sliding device through a connecting rod;
wherein, collect liquid guiding device includes: the baffle, two first curb plates and two second curb plates, the up end of baffle with the lower terminal surface of retaining ring is connected, two first curb plate is located respectively on the both sides face of the upper end of baffle, two first curb plate with have first contained angle between the baffle, two the second curb plate is located respectively on the both sides face of the lower extreme of baffle, two the second curb plate with have the second contained angle between the baffle.
2. The easy to operate spreading machine of claim 1 wherein said baffle comprises: the arc of the baffle plate is the same as that of the check ring device, the upper end face of the arc is connected with the lower end face of the check ring device, the lower end face of the arc is connected with the upper end face of the triangular arc, one corner of the triangular arc is vertically downwards arranged, two first side plates are respectively connected with two side faces of the arc, and two second side plates are respectively connected with two side faces of the triangular arc.
3. The easy-to-handle glue applicator of claim 1, wherein the glue recovery device comprises: the device comprises an inlet pipeline, a collecting device and an outlet pipeline, wherein one end of the inlet pipeline is propped against the lower end of the liquid collecting and guiding device, the other end of the inlet pipeline is connected with the collecting device, and the lower end of the collecting device is connected with the outlet pipeline.
4. The easy to handle applicator of claim 1, wherein the high intensity fan and the retainer ring assembly are positioned a first distance apart.
5. The glue spreader of claim 1, wherein the high-strength fan has a plurality of air outlets on a surface facing the liquid collecting and guiding device.
6. The easy to handle applicator of claim 1, wherein the sliding filter brush means is a first distance from the turntable.
7. A method of operating a glue applicator for ease of operation, comprising: a glue applicator according to any one of claims 1 to 6, which is operable with the following steps:
step one: the colloid dropper drops colloid onto the wafer on the rotary table, the colloid dropper is retracted, and the rotary table rotates to spread the colloid on the upper surface of the wafer;
step two: the retainer ring device is arranged at a position covering the turntable and the wafer, and the high-strength fan is started;
step three: the sliding filter brush device moves downwards along the connecting sliding device to scrape the colloid on the inner wall of the retainer ring device;
step four: simultaneously, the high-strength fan blows the colloid to the liquid collecting and guiding device, and the colloid enters the colloid recovery device along the liquid collecting and guiding device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210833704.1A CN114950869B (en) | 2022-07-15 | 2022-07-15 | Glue spreader convenient to operate and operation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210833704.1A CN114950869B (en) | 2022-07-15 | 2022-07-15 | Glue spreader convenient to operate and operation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114950869A CN114950869A (en) | 2022-08-30 |
| CN114950869B true CN114950869B (en) | 2023-05-05 |
Family
ID=82968634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210833704.1A Active CN114950869B (en) | 2022-07-15 | 2022-07-15 | Glue spreader convenient to operate and operation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114950869B (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105289923A (en) * | 2014-05-30 | 2016-02-03 | 盛美半导体设备（上海）有限公司 | Wafer gumming machine and gumming method |
| US10816901B2 (en) * | 2014-09-16 | 2020-10-27 | Acm Research (Shanghai) Inc. | Coater with automatic cleaning function and coater automatic cleaning method |
| CN107783374A (en) * | 2017-11-24 | 2018-03-09 | 西安立芯光电科技有限公司 | A kind of glue spreader system for controlling photoresist sputtering |
| CN107899869A (en) * | 2017-12-11 | 2018-04-13 | 合肥美青工业设计有限公司 | A kind of energy-saving polystyrene extruded plastic thermal insulation board spot gluing equipment |
| CN114653503A (en) * | 2020-12-23 | 2022-06-24 | 盛美半导体设备(上海)股份有限公司 | Glue spreader and process chamber thereof |
| CN215088518U (en) * | 2021-05-31 | 2021-12-10 | 丁立新 | Brushing device for flexible insulating gummed paper |
-
2022
- 2022-07-15 CN CN202210833704.1A patent/CN114950869B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN114950869A (en) | 2022-08-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102612328B1 (en) | Liquid processing apparatus | |
| KR100676038B1 (en) | Solution processing apparatus and method | |
| TWI757316B (en) | Liquid processing apparatus and liquid processing method | |
| JP2010206019A (en) | Liquid processing apparatus, and liquid processing method | |
| CN105289923A (en) | Wafer gumming machine and gumming method | |
| CN104517870A (en) | Liquid processing apparatus | |
| TWI637451B (en) | Semiconductor apparatus and washing method | |
| CN102540769A (en) | Developing method | |
| JP2012033886A (en) | Substrate processing system | |
| JP5387636B2 (en) | Liquid processing equipment | |
| JP4794685B1 (en) | Substrate processing apparatus and substrate processing method | |
| CN114950869B (en) | Glue spreader convenient to operate and operation method thereof | |
| TW201826436A (en) | Substrate treatment device, substrate treatment method and recording medium | |
| JP2006229020A (en) | Washing method and washing device of semiconductor wafer | |
| CN109663693B (en) | Spiral photoresist coating structure and preparation device and method thereof | |
| TWI770046B (en) | Substrate processing apparatus and substrate processing method | |
| JP5807622B2 (en) | Coating film forming method, coating film forming apparatus, substrate processing apparatus, and storage medium | |
| TWI437627B (en) | Substrate cleaning process | |
| US6576055B2 (en) | Method and apparatus for controlling air over a spinning microelectronic substrate | |
| CN110890308A (en) | Wafer bearing device, glue coating developing equipment and glue coating developing method | |
| JP2012015385A (en) | Substrate processing apparatus, substrate processing method, program and computer storage medium | |
| CN210187491U (en) | Spiral photoresist coating structure and preparation device thereof | |
| CN107367910B (en) | Photoetching offset plate figure method, the preparation method of semiconductor structure and semiconductor equipment | |
| US20130136858A1 (en) | Adhesive recycling during spin coating | |
| JP6382110B2 (en) | Substrate processing mechanism and small manufacturing apparatus using the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |