CN114935668B - In-tube three-dimensional flow velocity sensor and manufacturing method thereof - Google Patents
In-tube three-dimensional flow velocity sensor and manufacturing method thereof Download PDFInfo
- Publication number
- CN114935668B CN114935668B CN202210347964.8A CN202210347964A CN114935668B CN 114935668 B CN114935668 B CN 114935668B CN 202210347964 A CN202210347964 A CN 202210347964A CN 114935668 B CN114935668 B CN 114935668B
- Authority
- CN
- China
- Prior art keywords
- sensor
- tubular substrate
- parameter
- main body
- simulated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/08—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring variation of an electric variable directly affected by the flow, e.g. by using dynamo-electric effect
- G01P5/086—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring variation of an electric variable directly affected by the flow, e.g. by using dynamo-electric effect by using special arrangements and constructions for measuring the dynamo-electric effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
Abstract
The present disclosure relates to an in-tube three-dimensional flow velocity sensor and a method of manufacturing the same. This intraductal three-dimensional flow velocity sensor includes: a tubular base and a sensor body having at least one branch; each branch comprises a supporting layer, a strain gate layer and a packaging layer which are sequentially stacked, wherein the strain gate layer comprises a strain gate and an input electrode and an output electrode which are connected with the strain gate; each branch comprises a connecting part and a first fixing part and a second fixing part which are connected with each other, the first fixing part and the second fixing part are respectively fixed on the inner wall of the tubular substrate, and each connecting part is convex; the strain gate is at least partially positioned on the connecting part, the input and output electrodes are positioned on the first fixing part, and the input and output electrodes are connected to the detection module; the outer wall of the tubular substrate is fixedly connected with the inner wall of the target pipeline, so that the detection module determines the flow speed of liquid in the target pipeline based on the resistance value detection result of the strain gate. The manufacturing is simple and quick, the three-dimensional flow velocity sensor in the pipe is simple and universal, the forming is good, the integration level, the precision and the sensitivity are high, and the application range is wide.
Description
Technical Field
The disclosure relates to the technical field of advanced manufacturing, in particular to an in-pipe three-dimensional flow velocity sensor and a manufacturing method thereof.
Background
The complex three-dimensional micro-nano structure and the assembly device thereof are concerned in many fields such as material science, mechanical design, micro-nano electronics and the like, and become hot spots of domestic and foreign researches. In the related art, the flow rate sensor includes a mechanical flow rate sensor, an electromagnetic flow rate sensor, an acoustic flow rate sensor, and the like. The flow velocity measurement principle is to convert the change of flow velocity into a field signal for sensing. However, the flow rate sensor in the related art has the following problems: the structural design and the processing technology are complex, and the sensitivity for low-flow-rate measurement is low. The method has low detection environment adaptability to complex curved surfaces and interferes the local flow field of a test area in the tube. How to provide a flow velocity sensor which is simple and universal, has good device forming, high integration level and sensitivity and wide application range is a technical problem to be solved urgently.
Disclosure of Invention
In view of the above, the present disclosure provides an in-tube three-dimensional flow velocity sensor and a method for manufacturing the same.
According to an aspect of the present disclosure, there is provided an in-pipe three-dimensional flow velocity sensor, the sensor including: a tubular substrate and a sensor body comprising at least one branch;
each branch comprises a supporting layer, a strain grid layer positioned on the supporting layer and an encapsulating layer positioned above the supporting layer and encapsulating the strain grid layer, wherein the strain grid layer comprises an input electrode, an output electrode and a strain grid connected between the input electrode and the output electrode;
each branch comprises a first fixing part, a second fixing part and a connecting part connected between the first fixing part and the second fixing part, the first fixing part and the second fixing part are respectively fixed on the inner wall of the tubular substrate, and the distance between the first fixing part and the second fixing part of each branch is smaller than the length of the connecting part, so that the connecting part of each branch is convex in the direction away from the inner wall;
the strain gate is at least partially positioned on the connecting part, the input electrode and the output electrode are positioned on the first fixing part, and the input electrode and the output electrode are used for being connected to a detection module;
the outer surface of the tubular substrate is fixedly connected with the inner wall of the target pipeline, so that when the detection module flows in liquid in the target pipeline, the flow rate of the liquid is determined based on the resistance value detection result of the strain grating.
In a possible implementation manner, the sensor comprises a plurality of branches, each branch is arranged in sequence, and the sensor body is fixed on the inner wall of the tubular substrate in a ring shape;
the first fixing parts of the adjacent branches are fixedly connected, the strain grid layer further comprises at least one lead, each lead is located at the first fixing part and used for connecting the plurality of strain grids in series, and the output electrode and the input electrode are respectively connected to the outermost two of the plurality of strain grids in series.
In a possible implementation manner, each of the branches further includes a thickening layer covering a surface of the package layer near the second fixing portion in the connecting portion, and a width of a first portion of the connecting portion covered with the thickening layer is greater than a width of a second portion of the connecting portion except the first portion.
In one possible implementation, the shape of each of the strain gates and/or the shape of the wires is a malleable shape that includes at least one of: serpentine, S-shaped, zigzag.
In a possible implementation, the tubular wall of the tubular base is provided with a slit parallel to the axial direction of the tubular base.
In a possible implementation manner, the support layer, the encapsulation layer, and the strain gate layer in the sensor body are respectively an integrated structure.
According to another aspect of the present disclosure, there is provided a method of manufacturing an in-tube three-dimensional flow velocity sensor, the method including:
manufacturing a tubular substrate of an in-tube three-dimensional flow velocity sensor and a two-dimensional precursor of a sensor body according to structural parameters of a target pipeline, wherein the in-tube three-dimensional flow velocity sensor comprises the in-tube three-dimensional flow velocity sensor;
cutting the tubular substrate along the axial direction of the tubular substrate to obtain a cut tubular substrate, wherein the wall of the cut tubular substrate is provided with a gap parallel to the axial direction of the tubular substrate;
applying prestress to the cut tubular substrate to obtain a flattened tubular substrate;
transferring and fixing the two-dimensional precursor on one surface of the flattened tubular substrate, which corresponds to the inner wall of the tubular substrate;
releasing the prestress applied to the flattened tubular substrate, restoring the flattened tubular substrate to the cut tubular substrate, and deforming the two-dimensional precursor to a sensor main body with a target space configuration in the prestress release process, so as to obtain the in-tube three-dimensional flow velocity sensor comprising the cut tubular substrate and the sensor main body.
In one possible implementation, the method further includes:
and fixedly connecting the side walls on two sides of the gap of the cut tubular substrate in the in-tube three-dimensional flow velocity sensor together.
In one possible implementation, the two-dimensional precursor of the tubular base and the sensor body of the in-tube three-dimensional flow rate sensor is manufactured according to the structural parameters of the target conduit, comprising:
determining the structural parameters of a target base of the tubular base and the structural parameters of a target main body of the sensor main body according to the structural parameters of the target pipeline;
determining a first parameter of a simulated planar structure body corresponding to the sensor main body according to the target main body structure parameter;
performing buckling assembly simulation on the simulated planar structural body based on the first parameter and the target substrate structural parameter to obtain a simulated main body structural parameter of a simulated main body space structural body corresponding to the simulated planar structural body after the simulated planar structural body is assembled on the tubular substrate;
if the relative error between the simulation main body structure parameter and the target main body structure parameter is larger than an error threshold, adjusting the first parameter according to the relative error, and continuing to perform assembly simulation based on the adjusted first parameter; or
And if the relative error between the simulation main body structure parameter and the target main body structure parameter is less than or equal to an error threshold value, manufacturing the two-dimensional precursor according to the first parameter of the current simulation plane structural body.
In a possible implementation manner, performing a buckling assembly simulation on the simulated planar structural body based on the first parameter and the target base structural parameter to obtain a simulated main body structural parameter of a simulated main body spatial structural body corresponding to the simulated planar structural body after the simulated planar structural body is assembled on the tubular base includes:
and performing buckling assembly simulation on the simulated planar structural body in a finite element simulation mode based on the first parameter and the target substrate structural parameter to obtain a simulated main body structural parameter of a simulated main body space structural body corresponding to the simulated planar structural body after the simulated planar structural body is assembled on the tubular substrate.
The embodiment of the disclosure provides an in-tube three-dimensional flow velocity sensor and a manufacturing method thereof, the in-tube three-dimensional flow velocity sensor can be simply, quickly and quantitatively designed, and the manufactured in-tube three-dimensional flow velocity sensor is simple and universal, easy to quantitatively design, good in device forming, high in integration level, precision and sensitivity and wide in application range. And, intraductal three-dimensional flow velocity transducer can be integrated into test system with signal acquisition equipment for wearable flexible electronic equipment, easily industrialization.
Other features and aspects of the present disclosure will become apparent from the following detailed description of exemplary embodiments, which proceeds with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate exemplary embodiments, features, and aspects of the disclosure and, together with the description, serve to explain the principles of the disclosure.
Fig. 1A-1C illustrate a perspective view, a schematic structural view, and a schematic structural disassembly, respectively, of a three-dimensional flow velocity sensor in a tube with one branch, according to an embodiment of the present disclosure.
Fig. 2A-2B show a schematic structural view and a schematic structural disassembly view, respectively, of another in-tube three-dimensional flow velocity sensor with one branch according to an embodiment of the present disclosure.
Fig. 3A-3D illustrate a schematic structural diagram, a schematic structural disassembly diagram, a perspective view, and a top view, respectively, of another three-dimensional flow velocity sensor in tube with three branches, according to an embodiment of the present disclosure.
FIG. 4 illustrates a partial schematic view of an in-tube three-dimensional flow sensor having multiple branches according to an embodiment of the present disclosure.
Fig. 5 shows a flow chart of a method of manufacturing an in-tube three-dimensional flow velocity sensor according to an embodiment of the present disclosure.
FIG. 6 illustrates a flow diagram for manufacturing a two-dimensional precursor according to an embodiment of the present disclosure.
Detailed Description
Various exemplary embodiments, features and aspects of the present disclosure will be described in detail below with reference to the accompanying drawings. In the drawings, like reference numbers can indicate functionally identical or similar elements. While the various aspects of the embodiments are presented in drawings, the drawings are not necessarily drawn to scale unless specifically indicated.
The word "exemplary" is used exclusively herein to mean "serving as an example, embodiment, or illustration. Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments.
Furthermore, in the following detailed description, numerous specific details are set forth in order to provide a better understanding of the present disclosure. It will be understood by those skilled in the art that the present disclosure may be practiced without some of these specific details. In some instances, methods, means, elements and circuits that are well known to those skilled in the art have not been described in detail so as not to obscure the present disclosure.
The flow velocity sensor in the related technology has the disadvantages of complex structural design and processing technology and low sensitivity to low flow velocity measurement; the method can simply and quantitatively design the in-pipe three-dimensional flow velocity sensor, and the manufactured in-pipe three-dimensional flow velocity sensor is simple and universal, is easy to quantitatively design, has good device forming, high integration level, precision and sensitivity and wide application range. And, intraductal three-dimensional flow velocity transducer can be integrated into test system with signal acquisition equipment for wearable flexible electronic equipment, easily industrialization.
Fig. 1A-1C illustrate a perspective view, a schematic structural view, and a schematic structural disassembly, respectively, of a three-dimensional flow velocity sensor in a tube with one branch, according to an embodiment of the present disclosure. Fig. 2A-2B show a schematic structural view and a schematic structural disassembly view, respectively, of another in-tube three-dimensional flow velocity sensor with one branch according to an embodiment of the present disclosure. Fig. 3A-3D illustrate a schematic structural diagram, a schematic structural disassembly diagram, a perspective view, and a top view, respectively, of another three-dimensional flow velocity sensor in tube with three branches, according to an embodiment of the present disclosure. As shown in fig. 1A-1C, 2A-2B, and 3A-3D, the in-tube three-dimensional flow sensor (also referred to herein as a sensor for simplicity) includes: a sensor body 1 and a tubular substrate 2. The sensor body 1 comprises at least one branch. In which the sensors shown in fig. 1A-1C, 2A-2B have one branch and the sensors shown in fig. 3A-3D have three branches. Fig. 3D is a plan view of the liquid in the direction of the liquid in the perspective view shown in fig. 3C.
Each of the branches may include a support layer L1, a strain gate layer L2 on the support layer L1, and an encapsulation layer L3 encapsulating the strain gate layer L2 above the support layer L1, where the strain gate layer L2 includes an input electrode 31, an output electrode 32, and a strain gate 33 connected between the input electrode 31 and the output electrode 32.
Each of the branches may include a first fixing portion 11, a second fixing portion 12 and a connecting portion 21 connected between the first fixing portion 11 and the second fixing portion 12, the first fixing portion 11 and the second fixing portion 12 are respectively fixed on the inner wall of the tubular substrate 2 (as shown in fig. 1A, 3C and 3D), and a distance between the first fixing portion 11 and the second fixing portion 12 of each of the branches is smaller than a length of the connecting portion 21, so that the connecting portion 21 of each of the branches protrudes in a direction away from the inner wall (as shown in fig. 1A, 3C and 3D).
As shown in fig. 1B, fig. 2A, and fig. 3A, the strain gate 33 is at least partially located at the connecting portion 21, the input electrode 31 and the output electrode 32 are located at the first fixing portion 11, and the input electrode 31 and the output electrode 32 are used for connecting to a detection module (not shown in the figure). The arrangement of the strain gauge 33 at least partially in the connecting portion 21 can increase the contact area of the strain gauge 33 with the liquid, so that the strain gauge can contact with the liquid component, and the accuracy and precision of flow rate detection can be improved.
As shown in fig. 3D, the outer surface of the tubular substrate 2 is fixedly connected to the inner wall of the target pipeline G, so that when the detection module flows into the liquid in the target pipeline G, the flow rate of the liquid is determined based on the detection result of the resistance value of the strain gauge 33.
In the present embodiment, the outer surface of the tubular base 2 and the inner wall of the target pipeline G can be fixedly connected by means of adhesion, fastening, nesting, and the like, which is not limited by the present disclosure.
In this embodiment, the material of the strain gate may be a piezoresistive material, for example, the material of the strain gate may be a metal material such as copper, gold, etc.; silicon, germanium silicon carbide and the like. Therefore, different flow rates of the liquid flowing through the sensor can bring different pressures to the strain gauge, so that the resistance value of the liquid changes, and the detection module can memorize the detected current resistance value of the strain gauge and the mapping relation between the predetermined resistance value of the strain gauge and the flow rate to determine the current flow rate of the liquid. After the in-pipe three-dimensional flow velocity sensor is manufactured, the mapping relation between the relative variation of the resistance value of the strain gauge and the flow velocity can be measured by adopting a variable control mode, for example, the in-pipe three-dimensional flow velocity sensor can be installed in a test pipeline corresponding to a target pipeline, then liquid at different flow velocities is controlled to flow into the test pipeline, and then the mapping relation between the relative variation of the resistance value of the strain gauge and the flow velocity is constructed based on the resistance values of the strain gauge at different flow velocities determined by the detection module.
In this embodiment, as shown in fig. 1C, fig. 2B, and fig. 3B, the encapsulation layer L3 may have the same shape as the support layer L1, so that the strain gate layer L2 may be encapsulated "between the encapsulation layer L3 and the support layer L1", and the strength of the sensor body itself may be improved by the encapsulation layer L3 and the support layer L1 having the same shape. The encapsulation layer L3 may also have a different shape from the support layer L1, and may be smaller than the support layer L1 only covering the strain gate layer L2, so that the material of the encapsulation layer L3 may be saved, and the sensor body may be more sensitive.
In one possible implementation, as shown in fig. 3A-3D, the sensor may include a plurality of branches (e.g., F1, F2, and F3 in fig. 3A), each of which is arranged in sequence, and the sensor body is fixed to the inner wall of the tubular substrate 2 in a ring shape as shown in fig. 3C and 3D. The first fixing portions 11 of the adjacent branches are fixedly connected, the strain gate layer L2 further includes at least one conducting wire 34, each conducting wire 34 is located at the first fixing portion 11 and is used for connecting the plurality of strain gates 33 in series, and the output electrode 32 and the input electrode 31 are respectively connected to the outermost two of the plurality of strain gates 33 in series.
In a possible implementation manner, the first fixing portions 11 of adjacent branches may be fixedly connected by extending portions 41 of the first fixing portions 11. The width of the extension portion 41 may be smaller than the width of the connected first fixing portion 11 to enhance flexibility of the sensor body and improve flexibility of the sensor body. Each of the wires 34 may be disposed in the first fixing portion and the extending portion 41 between two adjacent strain grids 33 to achieve electrical connection between the strain grids.
For example, as shown in fig. 3A, the first fixing portion 11 of the branch F1 and the first fixing portion 11 of the branch F2 are fixedly connected, and the first fixing portion 11 of the branch F2 and the first fixing portion 11 of the branch F3 are fixedly connected. The strained gate 33 in branch F1 is electrically connected to the strained gate 33 in branch F2 by a wire 34, and the strained gates 33 in branch F2 and the strained gates 33 in F3 are electrically connected by a wire 34. The output electrode 32 and said input electrode 31 are connected to the strained gate 33 in the branch F3, respectively the strained gate 33 in the branch F1.
In a possible implementation manner, the support layer L1, the encapsulation layer L3, and the strain gate layer L2 in the sensor body are respectively an integral structure. In this way, the manufacturing process of the sensor body can be simplified in the manufacturing process, and the strength of the sensor body can be enhanced and the structural reliability and stability of the sensor body can be improved by integrating the layers.
In a possible implementation manner, as shown in fig. 2B and 3B, each of the branches may further include a thickening layer L4, the thickening layer L4 covers a surface of the encapsulation layer L3 near the second fixing portion 12 in the connecting portion 21, and a width w2 of a first portion 211 of the connecting portion 21 covered with the thickening layer is greater than a width w3 of a second portion 212 of the connecting portion 21 except the first portion 211. Thus, the thickness of the first portion 211 of the connecting portion 21 can be increased, the strength of the sensor body can be increased, and the structural reliability and stability of the sensor body can be improved.
In a possible implementation manner, the material of the support layer L1, the encapsulation layer L3, and the thickening layer L4 may be a flexible material, for example, polyimide (PI), polyethylene terephthalate (PET), or the like. The materials of the support layer L1, the encapsulation layer L3, and the thickening layer L4 may be the same or different, and the disclosure is not limited thereto. In order to facilitate the fixing of the thickening layer L4 to the surface of the encapsulation layer L3, the material of the thickening layer L4 may also be a material capable of being adhesively fixed to the encapsulation layer L3, such as a soft adhesive tape, and the like, which is not limited by the present disclosure.
In one possible implementation, the shape of each of the strain gates may be a malleable shape. The malleable shape includes serpentine, S-shaped, zig-zag, and the like. FIG. 4 illustrates a partial schematic view of an in-tube three-dimensional flow sensor having multiple branches according to an embodiment of the present disclosure. As shown in fig. 4, the strained gate 33 may be a wire arranged in a serpentine arrangement. In this way, the ductile properties of the strain gauge may be improved so that the sensor body may be better bent for a fixed mounting to the inner wall of the tubular substrate. Moreover, the reliability and stability of the strain gate itself can be improved. The width of the conductive lines in the strain gate 33 may be 20 μm-100 μm, and may be set according to the size of the sensor body, for example, the width of the conductive lines in the strain gate 33 may be 50 μm.
In one possible implementation, the shape of the wire 34 as shown in fig. 3A, 3B may be a malleable shape, including serpentine, S-shaped, zig-zag, etc. In this way, the malleable properties of the lead may be improved so that the sensor body may be better bent for secure mounting to the inner wall of the tubular substrate. Moreover, the reliability and stability of the wire itself can be improved. The width of the conductive line 34 may be 100 μm to 500 μm, and the width of the conductive line 34 may be set according to the size of the sensor body, for example, the width of the conductive line 34 may be 200 μm.
In a possible realization, the tubular base 2 has its wall provided with slits parallel to the axial direction of said tubular base 2. For example, a slit F in the axial direction is provided in the pipe wall of the tubular base 2 as shown in fig. 3D. The width w6 of the gap F may be set according to the inner diameter of the target pipe. Therefore, the three-dimensional flow velocity sensor in the pipe can be ensured to be fixed on the inner wall of the target pipeline under the action of the gap F under the condition that the inner diameter of the target pipeline is larger than or smaller than the outer diameter of the tubular substrate 2, and the installation matching degree of the three-dimensional flow velocity sensor in the pipe and the target pipeline is enhanced. Then, assuming that the outer circumference of the tubular base 2 is C, the tubular base may be installed in a target pipe having an inner diameter greater than or equal to (C-w 6)/π.
In one possible implementation, as shown in fig. 3A, the length D of the sensor body may be less than the inner perimeter of the tubular substrate 2, so that the sensor body may be fixedly mounted to the inner wall of the tubular substrate 2. The width w4 of the first fixing portion 11 in each branch of the sensor body may be greater than the width w1 of the second fixing portion 12, and/or the width w2 of the first portion 211 of the connecting portion 21 may be greater than the width w3 of the second portion 212 of the connecting portion 21 and less than the width w1 of the second fixing portion 12, that is, w4 > w1 > w2 > w3. Therefore, the flexibility and the ductility of the sensor main body can be ensured, and the reliability and the stability of the sensor main body can be improved. The length L of each branch of the sensor main body can be set according to the structural parameters of the target pipeline.
In one possible implementation, the thickness of the support layer L1 may be 0.5 μm to 5 μm. The thickness of the strained gate layer L2 may be 100nm to 500nm. The thickness of the encapsulation layer L3 may be 10 μm to 200 μm. The thickness of the thickening layer L4 may be 50 μm to 500. Mu.m. The thickness of the pipe wall of the tubular substrate, the thickness of the support layer L1, the thickness of the strain gate layer L2, the thickness of the encapsulation layer L3, and the thickness of the thickening layer L4 may be set according to the structural parameters of the target pipe, which is not limited by the present disclosure. For example, the thickness of the support layer L1 may be 1 μm. The thickness of the strained gate layer L2 may be 300nm. The thickness of the encapsulation layer L3 may be 30 μm. The thickness of the thickening layer L4 may be 200 μm.
In this embodiment, the structures and the sizes of the tubular substrate and the sensor body can be set according to the structural parameters of the target pipeline, so as to ensure that the three-dimensional flow velocity sensor in the pipe can be matched with the target pipeline. For example, for a target pipeline, the tubular substrate may have an inner diameter of 11mm and a length of 25mm for its corresponding three-dimensional flow rate sensor inside the pipe. The length L of each branch in the sensor body may be 21.80mm, the length D of the sensor body may be 33.40mm, the width w4 of the first fixing part 11 may be 5mm, the width w1 of the second fixing part 12 may be 4.75mm, the width w2 of the first portion 211 of the connection part 21 may be 3.11mm, and the width w3 of the second portion 212 of the connection part 21 may be 1.65mm. The width of the conductive line 34 may be 200 μm and the width of the conductive line in the strain gate 33 may be 50 μm. The thickness of the support layer L1 may be 1 μm. The thickness of the strained gate layer L2 may be 300nm. The thickness of the encapsulation layer L3 may be 30 μm. The thickness of the thickening layer L4 may be 200 μm.
The present disclosure also provides a method for manufacturing a sensor body, as an exemplary method for manufacturing the sensor body provided by the present disclosure, a person skilled in the art may set the steps of the method according to actual needs, and the present disclosure does not limit this. Then, the method may include:
in the first step, a support layer is directly prepared on a temporary substrate, or a pre-prepared support layer can be directly fixed on the temporary substrate.
And secondly, if the material of the strain gate is different from that of the lead wire connected with the adjacent strain gate, respectively preparing a strain gate made of a non-metal material, a lead wire connected with the adjacent strain gate, an output electrode and an input electrode made of a metal material on the supporting layer, and finally obtaining the strain gate layer. Or if the strain gate and the lead connecting the adjacent strain gates are made of metal, a metal layer can be directly prepared on the supporting layer, and then the metal layer is etched to obtain the strain gate layer.
And thirdly, packaging the strained gate layer to obtain a packaging layer.
And fourthly, preparing a thickening layer on the surface of the packaging layer and the position of the first part of the connecting part to finish the preparation of the sensor main body.
Fig. 5 shows a flow chart of a method of manufacturing an in-tube three-dimensional flow velocity sensor according to an embodiment of the present disclosure. As shown in fig. 5, a method for manufacturing an in-tube three-dimensional flow velocity sensor according to an embodiment of the present disclosure includes steps S11 to S15.
In step S11, a two-dimensional precursor of the sensor body and the tubular base of the in-tube three-dimensional flow velocity sensor, which is the in-tube three-dimensional flow velocity sensor described above in the present disclosure, is manufactured according to the structural parameters of the target conduit.
In one possible implementation, step S11 may include fabricating a two-dimensional precursor. FIG. 6 illustrates a flow diagram for manufacturing a two-dimensional precursor according to an embodiment of the present disclosure. As shown in fig. 6, the step of manufacturing a two-dimensional precursor includes: step S300-step S306.
In step S300, according to the structural parameters of the target pipeline, a target base spatial structure of the tubular base and a target main body spatial structure of the sensor main body are determined, and further, target base structural parameters of the tubular base and target main body structural parameters of the sensor main body are determined.
In step S301, a first parameter of the simulated planar structure corresponding to the sensor body is determined according to the target body structure parameter. The first parameter may include geometric parameters such as length, width, and thickness of different parts of the simulated planar structure, and may also include physical and/or chemical performance parameters of the simulated planar structure, which are not limited in this disclosure.
In step S302, a buckling assembly simulation is performed on the simulated planar structural body based on the first parameter and the target substrate structural parameter, so as to obtain a simulated main body structural parameter of a simulated main body space structural body corresponding to the simulated planar structural body after the simulated planar structural body is assembled on the tubular substrate.
In a possible implementation manner, in step S302, based on the first parameter and the target substrate structural parameter, a buckling assembly simulation may be performed on the simulated planar structural body in a finite element simulation manner, so as to obtain a simulated main body structural parameter of the simulated main body spatial structural body corresponding to the simulated planar structural body after the simulated planar structural body is installed on the tubular substrate. Therefore, the simulation main body structure parameters can be determined through simulation, and the process of verifying the assembly of the simulation plane structure body to form the simulation main body space structure body can be simplified. It is understood that the implementation of the buckling assembly simulation may also be provided by those skilled in the art, and the present disclosure is not limited thereto.
In step S303, a relative error between the simulated subject structure parameter and the target subject structure parameter is calculated.
The target body structure parameters may include one or more parameters, such as the height of different parts of the sensor body relative to the inner wall of the tubular substrate, the relative thickness or relative width of different parts, physical and/or chemical performance parameters of the sensor body after the external field is applied under actual application conditions, and the like. The calculated relative error may include a relative error between the simulated subject structure parameter and the corresponding respective target subject structure parameter, e.g., a relative error in spatial coordinates between the target subject spatial structure and the simulated subject spatial structure of the sensor subject.
In step S304, if it is determined that the relative error between the simulated subject structure parameter and the target subject structure parameter is greater than the error threshold, step S305 is performed. If the relative error between the simulation subject structure parameter and the target subject structure parameter is less than or equal to the error threshold, step S306 is executed.
The error threshold may be set corresponding to different parameters according to different parameters of the target subject structure parameter. The relative error is less than or equal to the error threshold, which may mean that the relative error corresponding to each simulated subject structure parameter is less than or equal to the corresponding error threshold; otherwise, the relative error is larger than the error threshold value. Or the relative error is less than or equal to the error threshold, which may mean that the relative error corresponding to at least a specified number of parameters in the simulation subject structure parameters is less than or equal to the corresponding error threshold; otherwise, the relative error is larger than the error threshold value. The relative error is greater than the error threshold and the relative error is less than or equal to the error threshold, which can be set by those skilled in the art according to practical needs, and the disclosure does not limit this.
In step S305, a first parameter of the simulated planar structure is adjusted according to the relative error, and step S302 is executed after the first parameter is adjusted.
The first parameter of the simulated planar structure can be adjusted according to the relative error between the simulated main body structure parameter and the target main body structure parameter, so that the simulated main body structure parameter of the simulated planar structure corresponding to the simulated main body space structure after the simulated planar structure is assembled on the tubular substrate can be adjusted, and the relative error between the simulated main body structure parameter and the target main body structure parameter can be reduced.
In step S306, a first parameter of the current simulated planar structure is determined as a first parameter of a two-dimensional precursor of the sensor body to be manufactured, and the two-dimensional precursor is manufactured according to the first parameter of the current simulated planar structure.
In this implementation manner, according to the first parameter of the current simulated planar structure, one or more of the techniques such as 3D printing, laser cutting, lithography micro-nano processing, etc. may be adopted to manufacture the two-dimensional precursor, which is not limited by the present disclosure.
In step S12, the tubular substrate is cut along the axial direction of the tubular substrate to obtain a cut tubular substrate, and a slit parallel to the axial direction of the tubular substrate is formed on a tube wall of the cut tubular substrate.
In a possible implementation, page S12 of step S may be omitted in case the tubular base itself already has a slit parallel to the axial direction of the tubular base.
In step S13, a pre-stress is applied to the cut tubular substrate to obtain a flattened tubular substrate.
In this embodiment, pre-stressing the cut tubular substrate to obtain a flattened tubular substrate may include: firstly, flattening the cut tubular substrate in a bending mechanical loading mode, then respectively stretching and loading prestress in two directions along a first direction and a second direction, and finally obtaining the flattened tubular substrate. Wherein the first direction and the second direction may be an x-axis direction and a y-axis direction, respectivelyThen, the strain epsilon corresponding to the tubular substrate in the x-axis direction and the y-axis direction respectively can be determined according to the predetermined strain epsilon of the flattened tubular substrate x And ε y Applying a pre-stress such that the flattened tubular substrate has strains epsilon in the x-axis direction and the y-axis direction, respectively x And ε y 。
In step S14, the two-dimensional precursor is transferred and fixed to a surface of the flattened tubular substrate corresponding to the inner wall of the tubular substrate.
In this embodiment, after the two-dimensional precursor is transferred to the flattened tubular substrate, the two-dimensional precursor may be fixed to the flattened tubular substrate by fixing means such as adhesion, and the portions of the two-dimensional precursor corresponding to the first fixing portion and the second fixing portion may be fixed to the flattened tubular substrate.
In step S15, releasing the prestress applied to the flattened tubular substrate, so as to restore the flattened tubular substrate to the cut tubular substrate, and deform the two-dimensional precursor to a sensor body having a target body spatial structure in the prestress release process, thereby obtaining an in-tube three-dimensional flow velocity sensor including the cut tubular substrate and the sensor body.
By the method, the three-dimensional flow velocity sensor in the pipe with the gap on the tubular substrate can be simply and quickly manufactured.
In one possible implementation, the method may further include: and fixedly connecting the side walls on two sides of the gap of the cut tubular substrate in the three-dimensional flow velocity sensor in the tube. The three-dimensional flow velocity sensor in the tube having a seamless tubular substrate can be manufactured quickly.
It should be noted that, although the in-pipe three-dimensional flow rate sensor and the manufacturing method thereof provided by the embodiments of the present disclosure have been described above by taking the above embodiments as examples, those skilled in the art will understand that the present disclosure should not be limited thereto. In fact, the user can flexibly set the structural shape of the sensor and the flow steps of the method according to personal preference and/or practical application scenes, as long as the technical scheme of the disclosure is met.
Having described embodiments of the present disclosure, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the disclosed embodiments. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen in order to best explain the principles of the embodiments, the practical application, or improvements made to the technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.
Claims (10)
1. An in-tube three-dimensional flow velocity sensor, the sensor comprising: a tubular substrate and a sensor body comprising at least one branch;
each branch comprises a supporting layer, a strain gate layer positioned on the supporting layer and an encapsulating layer positioned above the supporting layer and encapsulating the strain gate layer, wherein the strain gate layer comprises an input electrode, an output electrode and a strain gate connected between the input electrode and the output electrode;
each branch comprises a first fixing part, a second fixing part and a connecting part connected between the first fixing part and the second fixing part, the first fixing part and the second fixing part are respectively fixed on the inner wall of the tubular substrate, and the distance between the first fixing part and the second fixing part of each branch is smaller than the length of the connecting part, so that the connecting part of each branch is convex in the direction away from the inner wall;
the strain gate is at least partially positioned on the connecting part, the input electrode and the output electrode are positioned on the first fixing part, and the input electrode and the output electrode are used for being connected to a detection module;
the outer surface of the tubular substrate is fixedly connected with the inner wall of a target pipeline, so that when the detection module flows in liquid in the target pipeline, the flow rate of the liquid is determined based on the detection result of the resistance value of the strain grating.
2. The sensor of claim 1, wherein the sensor comprises a plurality of branches, each branch being arranged in series, the sensor body being annularly affixed to the inner wall of the tubular substrate;
the first fixing parts of the adjacent branches are fixedly connected, the strain grid layer further comprises at least one lead, each lead is located at the first fixing part and used for connecting the plurality of strain grids in series, and the output electrode and the input electrode are respectively connected to the outermost two of the plurality of strain grids in series.
3. The sensor according to claim 1, wherein each of the branches further includes a thickening layer covering a surface of the encapsulation layer near the second fixing portion in the connection portion, and a width of a first portion of the connection portion covered with the thickening layer is larger than a width of a second portion of the connection portion other than the first portion.
4. The sensor of claim 2, wherein the shape of each of the strain gauges and/or the wires is a malleable shape that includes at least one of: serpentine, S-shaped, zigzag.
5. The sensor of claim 1, wherein the tubular substrate has a wall provided with a slit parallel to the axial direction of the tubular substrate.
6. The sensor of claim 1, wherein the support layer, the encapsulation layer, and the strain gate layer are each a unitary structure in the sensor body.
7. A method of manufacturing an in-tube three-dimensional flow sensor, the method comprising:
fabricating a two-dimensional precursor of a tubular base and a sensor body of an in-tube three-dimensional flow rate sensor according to structural parameters of a target conduit, the in-tube three-dimensional flow rate sensor being the in-tube three-dimensional flow rate sensor of any one of claims 1-6;
cutting the tubular substrate along the axial direction of the tubular substrate to obtain a cut tubular substrate, wherein the wall of the cut tubular substrate is provided with a gap parallel to the axial direction of the tubular substrate;
applying prestress to the cut tubular substrate to obtain a flattened tubular substrate;
transferring and fixing the two-dimensional precursor on one surface of the flattened tubular substrate, which corresponds to the inner wall of the tubular substrate;
releasing the prestress applied to the flattened tubular substrate, restoring the flattened tubular substrate to the cut tubular substrate, and deforming the two-dimensional precursor to a sensor main body with a target space configuration in the prestress release process, so as to obtain the in-tube three-dimensional flow velocity sensor comprising the cut tubular substrate and the sensor main body.
8. The method of claim 7, further comprising:
and fixedly connecting the side walls on two sides of the gap of the cut tubular substrate in the in-tube three-dimensional flow velocity sensor together.
9. The method of claim 7, wherein fabricating a two-dimensional precursor of the tubular base and sensor body of the in-tube three-dimensional flow rate sensor according to the structural parameters of the target conduit comprises:
determining the structural parameters of a target base of the tubular base and the structural parameters of a target main body of the sensor main body according to the structural parameters of the target pipeline;
determining a first parameter of a simulated planar structure body corresponding to the sensor main body according to the target main body structure parameter;
performing buckling assembly simulation on the simulated planar structural body based on the first parameter and the target substrate structural parameter to obtain a simulated main body structural parameter of a simulated main body space structural body corresponding to the simulated planar structural body after the simulated planar structural body is assembled on the tubular substrate;
if the relative error between the simulation main body structure parameter and the target main body structure parameter is larger than an error threshold, adjusting the first parameter according to the relative error, and continuing to perform assembly simulation based on the adjusted first parameter;
and if the relative error between the simulation main body structure parameter and the target main body structure parameter is less than or equal to an error threshold value, manufacturing the two-dimensional precursor according to the first parameter of the current simulation plane structural body.
10. The method of claim 9, wherein performing a buckling assembly simulation on the simulated planar structure based on the first parameters and the target substrate structure parameters to obtain simulated body structure parameters of a corresponding simulated body space structure after the simulated planar structure is assembled on the tubular substrate comprises:
and performing buckling assembly simulation on the simulated planar structural body in a finite element simulation mode based on the first parameter and the target substrate structural parameter to obtain a simulated main body structural parameter of a simulated main body space structural body corresponding to the simulated planar structural body after the simulated planar structural body is assembled on the tubular substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210347964.8A CN114935668B (en) | 2022-04-01 | 2022-04-01 | In-tube three-dimensional flow velocity sensor and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210347964.8A CN114935668B (en) | 2022-04-01 | 2022-04-01 | In-tube three-dimensional flow velocity sensor and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114935668A CN114935668A (en) | 2022-08-23 |
| CN114935668B true CN114935668B (en) | 2023-03-21 |
Family
ID=82862177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210347964.8A Active CN114935668B (en) | 2022-04-01 | 2022-04-01 | In-tube three-dimensional flow velocity sensor and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114935668B (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108918906B (en) * | 2018-07-27 | 2020-08-14 | 北京航空航天大学 | Preparation method of flow velocity sensor |
| CN210604681U (en) * | 2019-08-19 | 2020-05-22 | 浙江工业大学 | Intelligent pipeline of fluid monitoring |
| DE102019126709A1 (en) * | 2019-10-02 | 2021-04-08 | Endress + Hauser Flowtec Ag | Sensor, measuring tube, measuring device, electromagnetic flow measuring point |
| CN110987089B (en) * | 2019-12-26 | 2021-01-15 | 华中科技大学 | Multifunctional flexible metamorphic sensor with single metal layer electrode, preparation method and application |
| CN112129328A (en) * | 2020-08-13 | 2020-12-25 | 江苏大学 | Miniature wind pressure and wind speed integrated sensor and manufacturing and detecting method |
| CN112816090A (en) * | 2021-02-23 | 2021-05-18 | 陕西科技大学 | Preparation method of sensor, strain gate preparation device and sensor |
-
2022
- 2022-04-01 CN CN202210347964.8A patent/CN114935668B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN114935668A (en) | 2022-08-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2150791B1 (en) | Suspended membrane pressure sensing array | |
| US7360455B2 (en) | Force detector and acceleration detector and method of manufacturing the same | |
| EP0767363B1 (en) | Methods of manufacturing a capacitive detector with three substrates, surrounding regions, and a working body ( force, acceleration, magnetism ) | |
| CN102483443B (en) | Magnetic field sensor | |
| US7051595B2 (en) | Monolithic multi-functional integrated sensor and method for fabricating the same | |
| EP1975587A1 (en) | Pressure sensor package and electronic part | |
| US11079298B2 (en) | MEMS pressure sensor with multiple sensitivity and small dimensions | |
| JP3200026B2 (en) | Perimeter sensor | |
| US5932809A (en) | Sensor with silicon strain gage | |
| CN114935668B (en) | In-tube three-dimensional flow velocity sensor and manufacturing method thereof | |
| US20140260644A1 (en) | Modular Systems for Piezoresistive Transducers | |
| JP2003042861A (en) | Solid type strain sensor | |
| JP4182228B2 (en) | Flexible flow sensor | |
| JP6950427B2 (en) | Position detector | |
| CN116819126A (en) | Double-layer multi-beam acceleration sensor based on bionic hole seam and preparation method | |
| JP6812953B2 (en) | Capacitive pressure sensor | |
| CN113677970A (en) | Sensor for detecting pressure, level, density, temperature, mass and flow | |
| KR101101220B1 (en) | The Micro Flow Sensor and Hydrophone Using the Same | |
| CN213714602U (en) | Film resistor strain pressure transmitter, pressure detection equipment and engineering machinery | |
| CN111256884B (en) | Flexible sensor capable of identifying pressure and shear force | |
| JP3051508B2 (en) | Acceleration detection method and acceleration sensor | |
| WO2022000117A1 (en) | Axial force sensor assembly, robot gripper and robot | |
| JP2016206062A (en) | Sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |