CN114934951A - Air main shaft air pressure protection system - Google Patents

Air main shaft air pressure protection system Download PDF

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Publication number
CN114934951A
CN114934951A CN202210529760.6A CN202210529760A CN114934951A CN 114934951 A CN114934951 A CN 114934951A CN 202210529760 A CN202210529760 A CN 202210529760A CN 114934951 A CN114934951 A CN 114934951A
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CN
China
Prior art keywords
air
air supply
pressure
supply line
spindle
Prior art date
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Pending
Application number
CN202210529760.6A
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Chinese (zh)
Inventor
万先进
边逸军
王冬冬
黄荣上
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Ningbo Xinfeng Precision Technology Co Ltd
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Ningbo Xinfeng Precision Technology Co Ltd
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Publication date
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Publication of CN114934951A publication Critical patent/CN114934951A/en
Pending legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662Details of hydrostatic bearings independent of fluid supply or direction of load
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/067Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17DPIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00Pipe-line systems
    • F17D1/02Pipe-line systems for gases or vapours
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17DPIPE-LINE SYSTEMS; PIPE-LINES
    • F17D3/00Arrangements for supervising or controlling working operations
    • F17D3/01Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product

Abstract

The invention discloses an air pressure protection system for an air spindle, which comprises the air spindle, a main air supply branch, a standby air supply branch and a controller. The main air supply branch comprises a first air supply pipeline, a pressure sensor, a first electromagnetic valve, a first filtering assembly and a first air source, one end of the first air supply pipeline is communicated with the air main shaft, the other end of the first air supply pipeline is communicated with one end of the first filtering assembly, the other end of the first filtering assembly is communicated with the first air source, the first electromagnetic valve is arranged on the first air supply pipeline, and the pressure sensor is arranged at one end, close to the air main shaft, of the first air supply pipeline. Reserve air feed branch road includes second air supply line, energy storage ware and second solenoid valve, the one end and the first air supply line intercommunication of second air supply line, and the other end and energy storage ware intercommunication, the second solenoid valve setting is on the second air supply line. First solenoid valve, pressure sensor and second solenoid valve all are connected with the controller electricity, can carry out atmospheric pressure protection to the air spindle, and the cost is lower.

Description

Air main shaft air pressure protection system
Technical Field
The invention relates to the technical field of ultra-precision machining, in particular to an air pressure protection system for an air spindle.
Background
Some air spindles are used in semiconductor equipment such as thinners and die cutters. These air spindles typically employ air bearings to support their rotation, while a motor is provided to provide the motive force for rotation of their shafts. For example, when the air spindle of a semiconductor wafer thinning machine is not ventilated, the rotating shaft and the air bearing are contacted, and the rotating shaft and the air bearing are separated by an air film after the gas with the regulated pressure is ventilated. In order to realize the normal operation of the air spindle, a user is required to provide a continuous and stable air source to ensure the continuous lubrication of the air film. When the air supply system breaks down and stops supplying air to the air spindle suddenly, the pressure monitoring sensor of the air spindle informs the air spindle motor of emergency braking, and the spindle still rotates at a high speed at the moment and can only carry the rotating shaft to brake, but the rotating shaft cannot stop rotating immediately due to inertia. If the time for the supply air pressure to drop from the normal value to the limit value is shorter than the time for the air spindle to stop rotating after being braked from the normal rotating speed, the air film between the rotating shaft and the fixed air bearing is caused to disappear in advance to cause the friction force to increase sharply, and a very small friction force is changed into a very large friction force, so that a large amount of friction heat is further generated between the rotating shaft and the air bearing. If the temperature of each contact material is increased within the melting point range of each contact material due to the friction heat, the contact surface between the rotating shaft and the air spindle is scratched, the form and position tolerance and the surface roughness of the contact surface are damaged, and the original mechanical characteristics of the whole air spindle are failed. Another serious condition is that if the heat is not taken away in time, and the large accumulated heat makes the materials quickly rise to exceed the melting points of the contact materials, the air bearing and the rotating shaft are fused together, so that the air spindle cannot rotate any more, and only the air spindle can be scrapped once the fatal damage occurs.
The key method for protecting the air spindle from being damaged during air cut-off is that the time for controlling the supplied air pressure to drop from a normal value to a limit value is longer than the time for the air spindle to stop rotating from a normal rotating speed to a braked state.
The traditional solutions mainly include:
(1) the braking time is compressed. An electric brake device is added to the associated circuit of the motor powering the air spindle. For example, after the brake resistance is increased, reverse brake current is introduced into the motor to realize emergency braking. However, the inertia of the rotating shaft in the air spindle is large, so that large reverse braking power is often required to be introduced to achieve a braking effect, and large braking resistors must be matched when large power is introduced, and on one hand, the braking resistors occupy a large space in equipment; on the other hand, when the brake resistor works, a large amount of heat is generated inside the equipment, and the heat affects the processing precision of the high-precision equipment and the use state of the components.
(2) A spare air pump is added in a device for providing an air source in a factory. When the main air pump fails, the standby air pump is switched to reduce the pressure drop and maintain the stability of the air film. However, the gas source device of the factory often provides gas for a plurality of devices in the factory, and therefore, the transmission distance of the gas source is generally long, so that even if the factory provides a spare gas pump to provide a spare gas source, a timely supply cannot be instantly provided. Meanwhile, the specification of the standby main air pump is large, and the cost is high. If the supply of the gas source is to be ensured instantaneously, the cross-sectional area of the transfer line must be increased, which increases the costs considerably.
Disclosure of Invention
The invention provides an air pressure protection system of an air main shaft, which can quickly protect the air pressure when the air main shaft is cut off, ensures the processing precision of the air main shaft and has lower cost.
In order to achieve the purpose, the invention adopts the following technical scheme:
an air spindle pressure protection system comprising:
an air spindle;
the main air supply branch comprises a first air supply pipeline, a pressure sensor, a first electromagnetic valve, a first filtering assembly and a first air source, one end of the first air supply pipeline is communicated with the air main shaft, the other end of the first air supply pipeline is communicated with one end of the first filtering assembly, the other end of the first filtering assembly is communicated with the first air source, the pressure sensor and the first electromagnetic valve are both arranged on the first air supply pipeline, and the pressure sensor is arranged at one end, close to the air main shaft, of the first air supply pipeline and used for detecting the air pressure of the air main shaft;
the standby gas supply branch comprises a second gas supply pipeline, an energy accumulator and a second electromagnetic valve, one end of the second gas supply pipeline is communicated with the first gas supply pipeline, the other end of the second gas supply pipeline is communicated with the energy accumulator, the energy accumulator can store gas, and the second electromagnetic valve is arranged on the second gas supply pipeline;
and the first electromagnetic valve, the pressure sensor and the second electromagnetic valve are all electrically connected with the controller.
Optionally, reserve air feed branch road still includes the third air supply line, the one end of third air supply line with the energy storage ware intercommunication, the other end with the second air supply line intercommunication, just the third air supply line with the second solenoid valve forms parallel structure, be equipped with the proportional valve on the third air supply line, the proportional valve with the controller electricity is connected.
Optionally, the device further comprises an air supply branch, the air supply branch comprises an air supply pipeline, a pressure switch, a third electromagnetic valve, a second filtering component and a second air source,
one end of the air supplement pipeline is communicated with the energy accumulator, the other end of the air supplement pipeline is communicated with one end of the second filtering assembly, the other end of the second filtering assembly is communicated with the second air source, the pressure switch is arranged at one end, close to the energy accumulator, of the air supplement pipeline, the third electromagnetic valve is arranged on the air supplement pipeline, and the pressure switch and the third electromagnetic valve are electrically connected with the controller.
Optionally, a check valve is further disposed on the first air supply pipeline, and the check valve is disposed between a joint of the first air supply pipeline and the second air supply pipeline and the first air source.
Optionally, a filter is further disposed on the second air supply pipeline, and the filter is disposed between a connection of the second air supply pipeline and the first air supply pipeline and a connection of the second air supply pipeline and the third air supply pipeline.
Optionally, a first pressure gauge is disposed on the first air supply pipeline at a position close to the pressure sensor.
Optionally, a second pressure gauge is disposed on the air supply pipeline at a position close to the pressure switch.
Optionally, a fourth solenoid valve is further disposed on the second air supply pipeline, the fourth solenoid valve is disposed between a joint of the second air supply pipeline and the first air supply pipeline and a joint of the second air supply pipeline and the third air supply pipeline, and the fourth solenoid valve is electrically connected to the controller.
The invention has the beneficial effects that:
through the arrangement of the standby air supply branch, when the pressure sensor detects that the air pressure of the air main shaft is lower than the limit use requirement value, the controller controls the second electromagnetic valve to be opened after receiving a signal of the pressure sensor, and at the moment, the air in the energy accumulator can rapidly supplement air to the air main shaft, so that the air main shaft is protected from being damaged. Compared with a standby air source of a factory adopted in the prior art, the energy accumulator can be arranged at a position close to the air main shaft, so that quick and effective gas protection is provided for the air main shaft; on the other hand, the energy accumulator has lower cost and can effectively reduce the cost.
Drawings
FIG. 1 is a schematic structural diagram of an air spindle pressure protection system provided by the present invention;
fig. 2 is a schematic structural diagram of a main air supply branch of the air spindle air pressure protection system provided by the invention;
FIG. 3 is a schematic diagram of an air spindle pressure protection system according to the present invention;
fig. 4 is a schematic diagram of the operation process of another air spindle pressure protection system provided by the present invention.
In the figure:
1. an air spindle; 2. a first air supply line; 3. a pressure sensor; 4. a first solenoid valve; 5. a first filter assembly; 6. a first gas source; 7. a second air supply line; 8. an accumulator; 9. a second solenoid valve; 10. a third air supply line; 11. a proportional valve; 12. an air supply pipeline; 13. a pressure switch; 14. a third electromagnetic valve; 15. a second filter assembly; 16. a second gas source; 17. a one-way valve; 18. a filter; 19. a first pressure gauge; 20. a second pressure gauge; 21. and a fourth solenoid valve.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Where the terms "first position" and "second position" are two different positions, and where a first feature is "over", "above" and "on" a second feature, it is intended that the first feature is directly over and obliquely above the second feature, or simply means that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in a specific case to those of ordinary skill in the art.
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention and are not to be construed as limiting the present invention.
The invention provides an air pressure protection system for an air spindle, which can quickly protect the air pressure when the air spindle is cut off, ensures the processing precision of the air spindle and has lower cost.
Specifically, as shown in fig. 1, the air spindle pressure protection system includes an air spindle 1, a main air supply branch, a standby air supply branch, and a controller. The main gas supply branch comprises a first gas supply pipeline 2, a pressure sensor 3, a first electromagnetic valve 4, a first filtering component 5 and a first gas source 6. One end of the first air supply line 2 communicates with the air spindle 1 for supplying air from the first air source 6 to the air spindle 1. The other end of the first air supply pipeline 2 is communicated with one end of the first filtering component 5, the other end of the first filtering component 5 is communicated with the first air source 6, the first filtering component 5 can control the air pressure input into the air spindle 1 by the first air source 6 and filter the gas output from the first air source 6, liquid water and liquid oil drops in the gas are separated out, dust and solid impurities in the gas are removed, the normal operation of the air spindle 1 is prevented from being influenced, and the machining precision of the air spindle 1 is guaranteed. The first electromagnetic valve 4 is arranged on the first air supply pipeline 2 and used for controlling the on-off of the first air supply pipeline 2. The standby gas supply branch comprises a second gas supply line 7, an accumulator 8 and a second solenoid valve 9. One end of the second air supply pipeline 7 is communicated with the first air supply pipeline 2, and the other end of the second air supply pipeline is communicated with the energy accumulator 8, so that the gas stored in the energy accumulator 8 is input into the first air supply pipeline 2 to supplement the gas for the air spindle 1. The second air supply pipeline 7 is provided with a second electromagnetic valve 9 for controlling the on-off of the second air supply pipeline 7. The first solenoid valve 4, the second solenoid valve 9 and the pressure sensor 3 are all electrically connected with the controller.
In this embodiment, when the air spindle 1 operates, the first electromagnetic valve 4 is in an open state, the second electromagnetic valve 9 is in a closed state, the first air source 6 continuously supplies air to the air spindle 1, and at this time, the air in the first air source 6 sequentially passes through the first filtering assembly 5 and the first electromagnetic valve 4 and enters the air spindle 1. The energy accumulator 8 does not work at this time, and the pressure sensor 3 monitors the air pressure in the air spindle 1 in real time and transmits a signal to the controller so as to detect the working state of the air spindle 1. When the pressure sensor 3 detects that the air pressure of the air spindle 1 is lower than a limit use value, the controller controls the second electromagnetic valve 9 to be opened, the air in the energy accumulator 8 is rapidly supplemented into the air spindle 1 to protect the control spindle, and the air spindle 1 can be safely braked.
Further, with reference to fig. 1, the spare gas supply branch may further include a third gas supply line 10, one end of the third gas supply line 10 is communicated with the energy accumulator 8, the other end of the third gas supply line 10 is communicated with the second gas supply line 7, the third gas supply line 10 and the second electromagnetic valve 9 form a parallel connection, a proportional valve 11 is disposed on the third gas supply line 10, and the proportional valve 11 is electrically connected with the controller. When the pressure sensor 3 detects that the air pressure of the air spindle 1 is between the normal working value and the limit use value, the air spindle 1 can still work normally without emergency braking, but because the air pressure of the air spindle 1 is lower than the normal working air pressure, the machining precision of the air spindle 1 may be affected, at this time, the controller controls the proportional valve 11 to be opened, the opening degree of the proportional valve 11 is adjusted according to the pressure of the air spindle 1 detected by the pressure sensor 3, so that the energy accumulator 8 supplies gas to the air spindle 1, the working air pressure of the air spindle 1 is improved, and the machining precision of the air spindle 1 is ensured.
Preferably, a first pressure gauge 19 can be arranged on the first air supply pipeline 2 at a position close to the pressure sensor 3, so that a worker can visually monitor the working air pressure of the air spindle 1, and further, the emergency can be timely handled, and the loss caused by faults is reduced.
Preferably, in order to prevent the gas in the second gas supply pipeline 7 from flowing to the end of the first gas supply pipeline 2 away from the air spindle 1, a one-way valve 17 may be disposed on the first gas supply pipeline 2, and the one-way valve 17 may be disposed between the connection point of the first gas supply pipeline 2 and the second gas supply pipeline 7 and the first gas source 6, so that the gas in the second gas supply pipeline 7 can completely flow into the air spindle 1, and the waste of the gas is avoided.
Preferably, a filter 18 may be disposed on the second air supply line 7 for filtering the gas in the accumulator 8, so as to prevent impurities in the gas in the accumulator 8 from affecting the quality and the processing precision of the air spindle 1. More preferably, the filter 18 is disposed between the connection between the second air supply line 7 and the first air supply line 2 and the connection between the second air supply line 7 and the third air supply line 10, so that the cleanliness of the air supplied to the air spindle 1 by the spare air supply branch can be ensured by one filter 18, the use of parts is reduced, and the cost is reduced.
As a preferable technical solution, a fourth electromagnetic valve 21 may be disposed on the second air supply line 7, and the fourth electromagnetic valve 21 is disposed between a connection position of the second air supply line 7 and the first air supply line 2 and a connection position of the second air supply line 7 and the third air supply line 10, when the air pressure of the air spindle 1 is normal air pressure, the fourth electromagnetic valve 21 is in a closed state, on one hand, gas supplement is not required to be performed by the energy accumulator 8; on the other hand, the gas in the first gas supply line 2 is prevented from flowing into the second gas supply line 7 and is dissipated into the atmosphere over time, resulting in waste of gas.
Preferably, since the accumulator 8 itself has no air supply function, when the working pressure is insufficient due to the consumption of the gas in the accumulator 8, the accumulator 8 needs to be taken away to supply the high-pressure gas, which is troublesome. Therefore, a gas supply branch can be provided for supplying gas in the accumulator 8 at any time. Specifically, the air supply branch comprises an air supply pipeline 12, a pressure switch 13, a third electromagnetic valve 14, a second filter assembly 15 and a second air source 16. One end of the gas supply pipeline 12 is communicated with the energy accumulator 8, and is used for inputting the gas in the second gas source 16 into the energy accumulator 8. The other end of the air supply pipeline 12 is communicated with one end of a second filter assembly 15, and the other end of the second filter assembly 15 is communicated with a second air source 16. The second filtering component 15 can control the air pressure of the second air source 16 input into the energy accumulator 8 and filter the gas output from the second air source 16, separate liquid water and liquid oil drops in the gas, remove dust and solid impurities in the gas, ensure the cleanliness of the gas in the energy accumulator 8, and further ensure the machining precision of the air spindle 1. The pressure switch 13 is arranged at one end of the air supply pipeline 12 close to the energy accumulator 8 and is used for monitoring the air pressure of the energy accumulator 8 and transmitting signals to the controller. The third electromagnetic valve 14 is arranged on the air supply pipeline 12 and used for controlling the on-off of the air supply pipeline 12. When the pressure switch 13 detects that the pressure in the accumulator 8 is low and gas is to be supplemented, the monitored signal is transmitted to the controller, and then the controller controls the third solenoid valve 14 to be opened, and the second gas source 16 supplements the gas for the accumulator 8.
Alternatively, in this embodiment, the first filter assembly 5 and the second filter assembly 15 may be pneumatic triplets. Of course, in other embodiments, the filter assembly may be other, and may be configured according to actual needs.
Preferably, a second pressure gauge 20 may be disposed on the gas supply line 12 at a position close to the pressure switch 13, so that a worker can intuitively connect the gas pressure in the energy accumulator 8, thereby facilitating timely handling of emergency and reducing loss caused by accidents.
For ease of understanding, the operation of the air spindle pressure protection system described above will now be briefly described:
1. when the pressure sensor 3 detects that the air pressure of the air spindle 1 is at a normal working value, as shown in fig. 1 and 2, the first electromagnetic valve 4 is opened, the second electromagnetic valve 9 is closed, the third electromagnetic valve 14 is closed, the fourth electromagnetic valve 21 is closed, only the main air supply branch works at this time, and the first air source 6 continuously supplies air to the air spindle 1.
2. When the pressure sensor 3 detects that the air pressure of the air spindle 1 is lower than the normal working value but higher than the limit use value, as shown in fig. 3, at this time, the main air supply branch continuously works, the first electromagnetic valve 4 is in an open state, the second electromagnetic valve 9 continues to be closed, the controller controls the fourth electromagnetic valve 21 and the proportional valve 11 to be opened, the opening degree of the proportional valve 11 is adjusted according to the pressure value of the pressure sensor 3, so that the energy accumulator 8 provides a small amount of gas for the air spindle 1 to stabilize the pressure of the air spindle 1, and the processing precision of the air spindle 1 is ensured.
3. When the pressure sensor 3 detects that the air pressure of the air spindle 1 is lower than the limit use value, as shown in fig. 4, at this time, the air spindle 1 needs emergency braking, the main air supply branch continuously works, the first electromagnetic valve 4 is in an open state, the proportional valve 11 is in a closed state, and the controller controls the second electromagnetic valve 9 and the fourth electromagnetic valve 21 to be opened, so that the energy accumulator 8 can rapidly supply air to the air spindle 1, rapidly increase the air pressure of the air spindle 1, and ensure stable braking of the air spindle 1.
4. When the pressure sensor 3 detects that the air pressure of the air main shaft 1 is at a normal working value and the pressure switch 13 detects that the pressure in the energy accumulator 8 is lower than the working pressure, the main air supply branch continuously works, the first pressure switch 13 is in an open state, the standby air supply branch does not work, the second electromagnetic valve 9, the proportional valve 11 and the fourth electromagnetic valve 21 are closed, the controller controls the third electromagnetic valve 14 to be opened, the second air source 16 supplements air for the energy accumulator 8, and the controller controls the third electromagnetic valve 14 to be closed until the pressure switch 13 detects that the pressure of the air in the energy accumulator 8 meets the requirement, and the second air source 16 stops supplying air for the energy accumulator 8.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. This need not be, nor should it be exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims (8)

1. An air spindle pressure protection system, comprising:
an air spindle (1);
the main air supply branch comprises a first air supply pipeline (2), a pressure sensor (3), a first electromagnetic valve (4), a first filtering component (5) and a first air source (6), one end of the first air supply pipeline (2) is communicated with the air main shaft (1), the other end of the first air supply pipeline (2) is communicated with one end of the first filtering component (5), the other end of the first filtering component (5) is communicated with the first air source (6), the pressure sensor (3) and the first electromagnetic valve (4) are both arranged on the first air supply pipeline (2), and the pressure sensor (3) is arranged at one end, close to the air main shaft (1), of the first air supply pipeline (2) and used for detecting the air pressure of the air main shaft (1);
the standby gas supply branch comprises a second gas supply pipeline (7), an energy accumulator (8) and a second electromagnetic valve (9), one end of the second gas supply pipeline (7) is communicated with the first gas supply pipeline (2), the other end of the second gas supply pipeline is communicated with the energy accumulator (8), the energy accumulator (8) can store gas, and the second electromagnetic valve (9) is arranged on the second gas supply pipeline (7);
the first electromagnetic valve (4), the pressure sensor (3) and the second electromagnetic valve (9) are all electrically connected with the controller.
2. The air spindle pressure protection system as claimed in claim 1, wherein the spare air supply branch further comprises a third air supply pipeline (10), one end of the third air supply pipeline (10) is communicated with the accumulator (8), the other end is communicated with the second air supply pipeline (7), the third air supply pipeline (10) and the second electromagnetic valve (9) form a parallel structure, a proportional valve (11) is arranged on the third air supply pipeline (10), and the proportional valve (11) is electrically connected with the controller.
3. The air spindle pressure protection system according to claim 2, further comprising an air supply branch including an air supply line (12), a pressure switch (13), a third solenoid valve (14), a second filter assembly (15), and a second air supply (16),
one end of the air supplement pipeline (12) is communicated with the energy accumulator (8), the other end of the air supplement pipeline is communicated with one end of the second filtering assembly (15), the other end of the second filtering assembly (15) is communicated with the second air source (16), the pressure switch (13) is arranged at one end, close to the energy accumulator (8), of the air supplement pipeline (12), the third electromagnetic valve (14) is arranged on the air supplement pipeline (12), and the pressure switch (13) and the third electromagnetic valve (14) are electrically connected with the controller.
4. A protection system for air spindle pressure according to any of claims 1-3, characterized in that a non-return valve (17) is provided on the first air supply line (2), and that the non-return valve (17) is provided between the connection of the first air supply line (2) to the second air supply line (7) and the first air source (6).
5. The air spindle pressure protection system according to claim 2, characterized in that a filter (18) is further provided on the second air supply line (7), and the filter (18) is provided between the connection of the second air supply line (7) with the first air supply line (2) and the connection of the second air supply line (7) with the third air supply line (10).
6. A protection system for air spindle pressure according to any of claims 1-3, characterized in that a first pressure gauge (19) is provided on the first air supply line (2) close to the pressure sensor (3).
7. A protection system for air spindle pressure according to claim 3, characterized in that a second pressure gauge (20) is provided on the air supply line (12) close to the pressure switch (13).
8. The air spindle pressure protection system according to claim 2, wherein a fourth solenoid valve (21) is further provided on the second air supply line (7), and the fourth solenoid valve (21) is provided between a connection of the second air supply line (7) and the first air supply line (2) and a connection of the second air supply line (7) and the third air supply line (10), the fourth solenoid valve (21) being electrically connected to the controller.
CN202210529760.6A 2022-04-01 2022-05-16 Air main shaft air pressure protection system Pending CN114934951A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN2022103478147 2022-04-01
CN202210347814 2022-04-01

Publications (1)

Publication Number Publication Date
CN114934951A true CN114934951A (en) 2022-08-23

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1828257A (en) * 2006-04-10 2006-09-06 浙江大学 Multifunctional high voltage apparatus safe property checking device
CN201714898U (en) * 2010-06-25 2011-01-19 株洲时代新材料科技股份有限公司 Pneumatic automatic airbag adjusting device
DE102012001734A1 (en) * 2012-01-31 2013-08-01 Wabco Gmbh Compressed air supply system, pneumatic system and method for operating a compressed air supply system or a pneumatic system
WO2015014204A1 (en) * 2013-08-01 2015-02-05 深圳市品川新智科技发展有限公司 Air energy cycle power generator
CN112096740A (en) * 2020-09-14 2020-12-18 华海清科股份有限公司 Air supply system for air bearing and grinding tool
CN113268029A (en) * 2021-05-25 2021-08-17 李晓萌 High-precision multi-channel air pressure controller

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1828257A (en) * 2006-04-10 2006-09-06 浙江大学 Multifunctional high voltage apparatus safe property checking device
CN201714898U (en) * 2010-06-25 2011-01-19 株洲时代新材料科技股份有限公司 Pneumatic automatic airbag adjusting device
DE102012001734A1 (en) * 2012-01-31 2013-08-01 Wabco Gmbh Compressed air supply system, pneumatic system and method for operating a compressed air supply system or a pneumatic system
WO2015014204A1 (en) * 2013-08-01 2015-02-05 深圳市品川新智科技发展有限公司 Air energy cycle power generator
CN112096740A (en) * 2020-09-14 2020-12-18 华海清科股份有限公司 Air supply system for air bearing and grinding tool
CN113268029A (en) * 2021-05-25 2021-08-17 李晓萌 High-precision multi-channel air pressure controller

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