CN114934254A - Mask assembly, manufacturing method of mask assembly and display panel - Google Patents

Mask assembly, manufacturing method of mask assembly and display panel Download PDF

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Publication number
CN114934254A
CN114934254A CN202210567917.4A CN202210567917A CN114934254A CN 114934254 A CN114934254 A CN 114934254A CN 202210567917 A CN202210567917 A CN 202210567917A CN 114934254 A CN114934254 A CN 114934254A
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CN
China
Prior art keywords
mask
strips
stripes
stretching
opening
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CN202210567917.4A
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Chinese (zh)
Inventor
黄世雄
陈军涛
谢涛峰
黄倍慈
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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Application filed by BOE Technology Group Co Ltd, Chengdu BOE Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN202210567917.4A priority Critical patent/CN114934254A/en
Publication of CN114934254A publication Critical patent/CN114934254A/en
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

Abstract

The embodiment of the application provides a mask assembly, a manufacturing method of the mask assembly and a display panel, wherein the mask assembly is applied to manufacturing a display panel mother board, the display panel mother board comprises a plurality of display panels, the mask assembly comprises an opening mask, the opening mask comprises a first frame and a first main body part, the first main body part is fixedly connected with the first frame, the first main body part comprises a plurality of first mask strips which are arranged in parallel, and a plurality of second mask strips which are arranged in parallel, the plurality of first mask strips and the plurality of second mask strips are arranged in a crossed mode and limit a plurality of first opening areas, and the plurality of first opening areas are used for being arranged corresponding to display areas in the plurality of display panels. According to the mask assembly, the manufacturing method of the mask assembly and the display panel, the frame size of the display panel can be reduced, and the screen occupation ratio of the display panel is improved.

Description

Mask assembly, manufacturing method of mask assembly and display panel
Technical Field
The present disclosure relates to the field of display technologies, and in particular, to a mask assembly, a method for manufacturing the mask assembly, and a display panel.
Background
This section provides background information related to the present application that is not necessarily prior art.
With the continuous development of display technologies, users have an increasing demand for large-screen display devices, and therefore, the OLED display panel is required to have a higher screen ratio so as to have a better display effect. The screen occupation ratio of the display panel is closely related to the mask used in the manufacturing process of the display panel. Typically, a reticle is composed of a reticle body and a Frame (Frame). The key step in reticle assembly is the stretching and welding of the reticle body to the frame, a process commonly referred to as tentering.
In the related art, the precision of the mask after stretching in the stretching direction is not easy to control, and in order to ensure the pixel position precision of the mask after stretching in the stretching direction, a large deformation area needs to be reserved for the mask between the display area and the packaging area of the display panel, so that the display panel needs to reserve a wide peripheral area, the narrow frame design of the display panel is not facilitated, and the screen occupation ratio of the display panel is influenced.
Disclosure of Invention
The embodiment of the application aims to provide a mask assembly, a manufacturing method of the mask assembly and a display panel. The size of the frame of the display panel is reduced, and the screen occupation ratio of the display panel is improved. The specific technical scheme is as follows:
an embodiment of the first aspect of the present application provides a mask assembly, is applied to the preparation display panel motherboard, the display panel motherboard includes a plurality of display panels, the mask assembly includes opening mask, opening mask includes first frame and first main part, first main part with first frame fixed connection, first main part includes a plurality of first mask strips of mutual parallel arrangement to and a plurality of second mask strips of mutual parallel arrangement, a plurality of first mask strips reach a plurality of second mask strips cross arrangement and inject a plurality of first open areas, a plurality of first open areas be used for with display area among a plurality of display panels corresponds the setting.
In some embodiments, the first frame and the first open area are rectangular in shape.
In some embodiments, the connection of the first frame and the first body portion comprises a welded connection.
In some embodiments, the mask assembly further comprises a cathode mask, and the opening mask is connected with the cathode mask.
In some embodiments, the cathode mask includes a second frame and a second main body portion, the second main body portion is fixedly connected to the second frame, the second main body portion includes a plurality of third mask strips arranged in parallel to each other and a plurality of fourth mask strips arranged in parallel to each other, the plurality of third mask strips and the plurality of fourth mask strips are arranged in a crossing manner and define a plurality of second opening regions, and an orthogonal projection of the plurality of first opening regions falls into an orthogonal projection of the plurality of second opening regions along a direction perpendicular to the opening mask.
Embodiments of a second aspect of the present application provide a method for manufacturing a reticle assembly, the method including:
providing a plurality of first mask stripes and a plurality of second mask stripes, wherein the plurality of first mask stripes and the plurality of second mask stripes are in a curved shape, and the plurality of first mask stripes and the plurality of second mask stripes are arranged in a crossed manner;
providing a first frame;
stretching the plurality of first mask strips and the plurality of second mask strips in a stretching mode, connecting the plurality of first mask strips with the first frame, and connecting the plurality of second mask strips with the first frame to obtain an open mask, wherein the plurality of first mask strips after stretching in the stretching mode are arranged in parallel, the plurality of second mask strips after stretching in the stretching mode are arranged in parallel, the plurality of first mask strips after stretching in the stretching mode and the plurality of second mask strips after stretching in the stretching mode are arranged in a crossed mode and define a plurality of first opening areas, and the plurality of first opening areas are used for being arranged corresponding to display areas in the plurality of display panels;
and forming a mask assembly through the opening mask.
In some embodiments, the step of providing a plurality of first mask stripes and a plurality of second mask stripes comprises:
providing a plurality of first mask stripes and a plurality of second mask stripes, and carrying out nonlinear compensation on the first mask stripes and the second mask stripes aiming at each first mask stripe and each second mask stripe so as to enable the first mask stripes and the second mask stripes to be in a curve shape.
In some embodiments, the step of forming a reticle assembly through the open reticle comprises: and providing a cathode mask, and fixedly connecting the cathode mask and the opening mask to obtain the mask component.
In some embodiments, before providing a cathode mask, the steps further comprise:
providing a plurality of third mask stripes and a plurality of fourth mask stripes, wherein the plurality of third mask stripes and the plurality of fourth mask stripes are in a curved shape, and the plurality of third mask stripes and the plurality of fourth mask stripes are arranged in a crossed manner;
providing a second frame;
and stretching the plurality of third mask strips and the plurality of fourth mask strips in a stretching mode, connecting the plurality of third mask strips with the second frame, and connecting the plurality of fourth mask strips with the second frame to obtain the cathode mask, wherein the plurality of third mask strips after stretching in the stretching mode are arranged in parallel, the plurality of fourth mask strips after stretching in the stretching mode are arranged in parallel, the plurality of third mask strips after stretching in the stretching mode and the plurality of fourth mask strips after stretching in the stretching mode are arranged in a crossing mode and define a plurality of second opening areas, and the forward projections of the plurality of first opening areas fall into the forward projections of the plurality of second opening areas in the direction perpendicular to the opening mask.
Embodiments of a third aspect of the present application provide a display panel, where the display panel is cut by a display panel mother board manufactured by using the mask assembly as described in any one of the above.
The embodiment of the application has the following beneficial effects:
in the embodiment of the application, the mask plate assembly comprises a first frame and a first main body part fixedly connected with the first frame, the first main body part comprises a plurality of first mask strips and a plurality of second mask strips, the first mask strips are arranged in parallel, the second mask strips are arranged in parallel, namely the first mask strips and the second mask strips in the expanded open mask plate are all in a straight line shape, and each edge of a first open area defined by the first mask strips and the second mask strips is also in a straight line shape. Each of the first opening regions in the first main body portion may correspond to a display region of one display panel, and the first mask stripes and the second mask stripes disposed around the first opening region may correspond to a peripheral region around the display region. The first mask strips and the second mask strips after stretching the net are in a straight line shape, so that in the stretching process of the net, the difference value between the deformation of the area with the maximum deformation degree in the opening mask and the deformation of the area with the minimum deformation degree is reduced, the change range of the size of the opening mask is smaller, the area of the deformation area reserved for the opening mask in the peripheral area is smaller, the area of the peripheral area is reduced, the frame width of the display panel is reduced, and the screen occupation ratio of the display panel is improved.
Of course, it is not necessary for any product or method of the present application to achieve all of the above-described advantages at the same time. The above description is only an overview of the technical solutions of the present application, and the present application may be implemented in accordance with the content of the description so as to make the technical means of the present application more clearly understood, and the detailed description of the present application will be given below in order to make the above and other objects, features, and advantages of the present application more clearly understood.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art that other embodiments can be obtained by using the drawings without creative efforts.
FIG. 1 is a schematic diagram of a reticle assembly of the related art;
FIG. 2 is a schematic view of another related art reticle assembly;
FIG. 3 is a schematic diagram of a structure of a reticle assembly in some embodiments of the present application;
FIG. 4 is a schematic view of another embodiment of a reticle assembly of the present application;
FIG. 5 is a schematic view of a variation of the shape of the area A in FIG. 4;
FIG. 6 is a schematic view of a variation of the shape of the region A' in FIG. 2;
FIG. 7 is a schematic diagram of a partial structure of a reticle assembly of the related art;
FIG. 8 is a schematic view of a partial structure of a reticle assembly in some embodiments of the present application;
fig. 9 is a schematic diagram showing a variation of the X-axis deformation of the first main body portion of an aperture mask in the related art;
FIG. 10 is a schematic diagram showing a variation of a Y-axis deformation of a first main body portion of an aperture mask in the related art;
FIG. 11 is a flow chart of a method of fabricating a reticle assembly in some embodiments of the present application.
Reference numerals: 1-opening mask, 110-first frame, 120-first main body part, 121-first mask strip, 122-second mask strip, 123-first opening area, 130-first deformation area, 2-cathode mask, 230-second deformation area, 310-display area, 320-packaging area, 330-peripheral area, 340-connection area, 510-first state, 520-ideal state and 530-second state.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following examples are merely used to more clearly illustrate the technical solutions of the present application, and therefore are only examples, and the protection scope of the present application is not limited thereby.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "including" and "having," and any variations thereof, in the description and claims of this application and the description of the above figures are intended to cover non-exclusive inclusions.
In the description of the embodiments of the present application, the technical terms "first", "second", and the like are used only for distinguishing different objects, and are not to be construed as indicating or implying relative importance or implicitly indicating the number, specific order, or primary-secondary relationship of the technical features indicated. In the description of the embodiments of the present application, "a plurality" means two or more unless specifically defined otherwise.
Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by one skilled in the art that the embodiments described herein may be combined with other embodiments.
In the description of the embodiments of the present application, the term "and/or" is only one kind of association relationship describing an associated object, and means that three relationships may exist, for example, a and/or B, and may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.
In the description of the embodiments of the present application, the term "plurality" refers to two or more (including two), and similarly, "plural sets" refers to two or more (including two), and "plural pieces" refers to two or more (including two).
In the description of the embodiments of the present application, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations and positional relationships that are based on the orientations and positional relationships shown in the drawings, and are used only for convenience in describing the embodiments of the present application and for simplicity in description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the embodiments of the present application.
In the description of the embodiments of the present application, unless otherwise explicitly stated or limited, the terms "mounted," "connected," "fixed," and the like are used in a broad sense, and for example, may be fixedly connected, detachably connected, or integrated; mechanical connection or electrical connection is also possible; they may be directly connected or indirectly connected through intervening media, or may be connected through the use of two elements or the interaction of two elements. The specific meanings of the above terms in the embodiments of the present application can be understood by those of ordinary skill in the art according to specific situations.
In the related art, a reticle is composed of a reticle body and a frame. Taking the opening mask 1 'as an example, in the manufacturing process of the opening mask 1', the main body of the opening mask 1 'needs to be stretched and welded with the first frame 110'. The opening mask 1 'may deform during the stretching process of the expanded mesh, and the deformation amount of each region in the opening mask 1' may be different during the stretching process of the expanded mesh. The opening mask 1 'is used for manufacturing light emitting layers of display panels in a display panel motherboard, in order to ensure the accuracy of alignment between a first opening area 123' in the opening mask 1 'after stretching and a display area 310' of each display panel, a deformation area of the opening mask 1 'needs to be reserved in a peripheral area 330' of each display panel, the range of the deformation area is related to a deformation allowance value in the stretching process of the opening mask 1 ', and the deformation allowance value is a difference value between a deformation value of an area with the maximum deformation degree and a deformation value of an area with the minimum deformation degree in the stretching process of the opening mask 1'. In the related art, as shown in fig. 1 and fig. 2, the main body of the aperture mask 1 ' is planar before stretching, and is convex after stretching along the peripheral direction, so that the deformation margin during stretching of the aperture mask 1 ' is large, the deformation area of the peripheral region 330 ' is large, and the narrow-frame design of the display panel is not favorable.
An embodiment of the first aspect of the present application provides a mask assembly, which is applied to manufacturing a display panel motherboard, the display panel motherboard includes a plurality of display panels, the mask assembly includes an open mask 1, the open mask 1 includes a first frame 110 and a first main body portion 120, the first main body portion 120 is fixedly connected to the first frame 110, the first main body portion 120 includes a plurality of first mask stripes 121 arranged in parallel to each other, and a plurality of second mask stripes 122 arranged in parallel to each other, the plurality of first mask stripes 121 and the plurality of second mask stripes 122 are arranged in a crossing manner and define a plurality of first open areas 123, and the plurality of first open areas 123 are used for being arranged corresponding to display areas 310 in the plurality of display panels.
In the embodiment of the present application, the opening mask 1 is used for manufacturing a light emitting layer in a display panel. Specifically, the opening mask 1 may be used to fabricate a hole injection layer in the light emitting layer.
In the mask assembly provided in the embodiment of the present application, the mask assembly includes a first frame 110 and a first main body 120 fixedly connected to the first frame 110, the first main body 120 includes a plurality of first mask stripes 121 and a plurality of second mask stripes 122, the plurality of first mask stripes 121 are arranged in parallel, and the plurality of second mask stripes 122 are arranged in parallel, that is, the plurality of first mask stripes 121 and the plurality of second mask stripes 122 in the stretched open mask 1 are all linear, and each edge of a first open area 123 defined by the plurality of first mask stripes 121 and the plurality of second mask stripes 122 is also linear. Each of the first opening regions 123 of the first body part 120 may correspond to a display region 310 of one display panel, and the first mask stripes 121 and the second mask stripes 122 disposed around the first opening region 123 may correspond to a peripheral region 330 surrounding the display region 310. First mask strip 121 and second mask strip 122 after stretching of a net are the linearity, make in the stretching process of a net, the difference between the deflection in the region that the degree of deformation is the biggest in the opening mask version 1 and the deflection in the region that the degree of deformation is the minimum reduces, make the change range of the size of opening mask version 1 less, make the area of the deformation region that peripheral region 330 reserved for opening mask version 1 less, thereby reduce the area of peripheral region 330, reduce display panel's frame width, improve display panel's screen ratio.
Specifically, in order to make the plurality of first mask stripes 121 and the plurality of second mask stripes 122 linear after the first main body 120 is stretched, it is necessary to set a compensation value for the first main body 120 before the web stretching, to make the first main body 120 contract in a direction opposite to the stretching direction so that the plurality of first mask stripes 121 and the plurality of second mask stripes 122 are curved before the web stretching, and to make the first main body 120 before the web stretching into an inner concave shape, as shown in fig. 3. Before web stretching, compensation values are set for the plurality of first mask stripes 121 and the plurality of second mask stripes 122 in the first main body portion 120, so that the first mask stripes 121 and the plurality of second mask stripes 122 after web stretching are linear, and the difference in deformation amount of each region of the first main body portion 120 during web stretching, that is, the deformation margin of the first main body portion 120, can be reduced.
For example, as shown in fig. 5, fig. 5 shows the change of the area a before and after stretching in the aperture mask 1. Zone a has a first state 510 before web stretching, a second state 530 after web stretching, and a desired state 520 after web stretching. As can be seen from fig. 3, the second state 530 of the open mask 1 after the stretching is made to be close to the ideal state 520 after the compensation of the area a before the stretching is made so that the periphery of the area a becomes curved and then the stretching is made to be linear.
In a comparative example, as shown in fig. 6, fig. 6 shows the change before and after stretching of the area a 'in an open mask 1' in the related art. The area a 'has a first state 510' before web stretching, a second state 530 'after web stretching, and an ideal state 520' after web stretching. In contrast, in the embodiment of the present application, the compensation is performed on each region in the open mask 1 before the open mask 1 is stretched, so that the precision after the open mask 1 is stretched can be closer to the ideal state 520, and the deformation margin during the stretching process of the open mask 1 can be reduced.
In addition, as shown in fig. 8, the display panel includes a display region 310 and a peripheral region 330 disposed around the display region 310. The peripheral region 330 includes a first deformation region 130, a second deformation region 230, and a connection region 340. The first deformation region 130 is used for reserving a deformation region for the opening mask 1 in the stretching process of the tensioned net, and the second deformation region 230 is used for reserving a deformation region for the cathode mask 2 in the stretching process of the tensioned net. The connection region 340 between the first deformation region 130 and the second deformation region 230 is used for arranging traces in the display panel, such as SD traces, Gate traces, and the like. The range of the first deformation region 130 is related to the difference between the deformation amount of the region with the largest deformation degree and the deformation amount of the region with the smallest deformation degree in the stretching process of the open-mesh mask 1.
In a comparative example, as shown in fig. 7, a display panel manufactured by an aperture mask 1 'in the related art includes a display region 310' and a peripheral region 330 'surrounding the display region 310'. The peripheral region 330 'includes a first deformation region 130', a second deformation region 230 ', and a connection region 340'. Correspondingly, the first deformation region 130 'is used for reserving a deformation region for the open mask 1' during the stretching process of the tensioned net, and the second deformation region 230 'is used for reserving a deformation region for the cathode mask 2' during the stretching process of the tensioned net. As shown in fig. 7, the width of the first deformation region 130 'is D1', i.e. the difference between the deformation of the region with the largest deformation and the deformation of the region with the smallest deformation in the expanded stretching process of the open mask 1 'is D1'.
In contrast, the width of D1 is much smaller than D1', i.e., the range of the first deformation region 130 is significantly reduced in the embodiment of the present application, so that the width D3 of the peripheral region 330 can be reduced. Therefore, in the mask assembly provided in the embodiment of the present application, as shown in fig. 7 and fig. 8, the first mask stripes 121 and the second mask stripes 122 after stretching are linear, so that a difference between a deformation amount of a region with a maximum deformation degree and a deformation amount of a region with a minimum deformation degree in the stretching process of the open mask 1 can be reduced, a width of the first deformation region 130 is greatly reduced, an area of the peripheral region 330 is reduced, a frame width of the display panel is reduced, and a screen area ratio of the display panel is improved.
Further, the display panel further includes a package region 320, which is used to improve the sealing performance of each display panel after the mother board of the display panel is cut. The peripheral region 330 may be a region between the display region 310 and the encapsulation region 320 in the display panel.
Further, in the embodiment of the present application, the compensation value before stretching of 1 piece of open mask can be determined according to the variation value during the stretching of 1 piece of open mask. For example, if the variation value of the aperture mask 1 during the stretching process is 80 μm to 130 μm, the compensation value may be-80 μm to-130 μm, i.e., the first body portion 120 is retracted 80 μm to 130 μm in the direction opposite to the stretching direction of the expanded web before the stretching of the expanded web.
Furthermore, the open mask 1 before stretching can be subjected to nonlinear compensation, namely compensation values of all areas in the open mask 1 are different, a specific compensation value is set for each area in the open mask 1, and the deformation margin value in the stretching process of the open mask 1 is further reduced.
For example, as shown in fig. 3 and 4, the aperture mask 1 includes a short-side direction X and a long-side direction Y, and different compensation values are set for different regions in the long-side direction and different regions in the short-side direction, respectively. At this time, the compensation values at different positions can be set according to the deformation amounts at different positions in the stretching process of the open mask 1.
Specifically, as shown in fig. 9, fig. 9 is a schematic diagram of the deformation amount of different areas in the short side direction X of the aperture mask 1 during the stretching process of the expanded mesh. The solid lines indicate that the opening mask 1 is expanded by first pulling force, and the dotted lines indicate that the opening mask 1 is expanded by second pulling force. Wherein the first pulling force is smaller than the second pulling force. As shown in fig. 9, in the stretching process of the expanded web, the amount of deformation of the aperture mask 1 at 30 μm in the short side direction X is 25 μm under the first tension, and the amount of deformation at the second tension is 85 μm, and then in the embodiment of the present application, the compensation amount of the aperture mask 1 at 30 μm in the short side direction X is determined based on the amount of deformation at 25 μm under the first tension or the amount of deformation at 85 μm under the second tension. For example, the offset may be-25 μm or-85 μm.
As shown in fig. 10, fig. 10 is a schematic diagram of the deformation amount of different regions in the long side direction Y of the aperture mask 1 during the stretching process of the expanded mesh. As shown in fig. 10, in the stretching process of the expanded screen, the amount of deformation of the aperture mask 1 at 100 μm in the longitudinal direction Y is 170 μm under the first tension, and the amount of deformation at the second tension is 160 μm, and in the embodiment of the present application, the amount of compensation of the aperture mask 1 at 100 μm in the longitudinal direction Y is determined based on the amount of deformation at 170 μm under the first tension or the amount of deformation at 160 μm under the second tension. For example, the offset may be-170 μm or-160 μm.
In the embodiment of the application, the compensation value can be preferentially determined according to the deformation of the opening mask 1 which is expanded by adopting the first pulling force. As shown in fig. 9 and 10, since the first pulling force is smaller than the second pulling force, when the first pulling force stretching is adopted, the deformation of the aperture mask 1 in the short side direction X is greatly reduced, which is beneficial to the precision control of the aperture mask 1. And the deformation in the long side direction Y is increased, so that the stretched open mask 1 is not easy to warp the edge, and the lamination evaporation process equipment can be better. Furthermore, the deformation amount of the first main body part 120 is small in the stretching process, so that the open mask 1 is not easy to deform in the manufacturing process of the display panel, the drooping amount of the first frame 110 can be reduced, and the flatness of the open mask 1 is improved.
In some embodiments, as shown in fig. 4, the first frame 110 and the first open area 123 are rectangular in shape.
In the embodiment of the present application, as shown in fig. 4, the first frame 110 and the first opening area 123 are rectangular, and the display area 310 of the display panel manufactured by the opening mask 1 is also substantially rectangular, so as to facilitate cutting of the mother substrate of the display substrate. The first open area 123 is rectangular, and the first mask stripes 121 and the second mask stripes 122 after stretching are linear, so that the difference between the deformation amount of the area with the maximum deformation degree and the deformation amount of the area with the minimum deformation degree is reduced, the range D1 of the first deformation area 130 is reduced, the range D3 of the peripheral area 330 is reduced, the area of the peripheral area 330 is reduced, the frame width of the display panel is reduced, and the screen occupation ratio of the display panel is improved in the stretching process of the open mask 1.
In some embodiments, the connection of the first frame 110 and the first body portion 120 includes a welded connection.
In the embodiment of the present application, the first frame 110 and the first main body 120 are welded and connected, so that the connection tightness between the first frame 110 and the first main body 120 can be improved, the probability that the first main body 120 is separated from the first frame 110 in the stretching process of the open mask 1 is reduced, and the yield of the display panel manufactured by using the mask assembly is improved.
In some embodiments, the mask assembly further comprises a cathode mask 2, and the opening mask 1 is connected with the cathode mask 2.
In the embodiment of the application, the opening mask 1 is connected with the cathode mask 2, and when the deformation of the opening mask 1 is reduced, the deformation of the cathode mask 2 is also reduced, so that the pixel position precision of the mask component is improved, and the yield of the display panel manufactured by using the mask component is improved.
In some embodiments, the cathode mask 2 includes a second frame and a second main body portion, the second main body portion is fixedly connected to the second frame, the second main body portion includes a plurality of third mask strips disposed parallel to each other and a plurality of fourth mask strips disposed parallel to each other, the plurality of third mask strips and the plurality of fourth mask strips are disposed crosswise and define a plurality of second open regions, and an orthogonal projection of the plurality of first open regions 123 falls within an orthogonal projection of the plurality of second open regions in a direction perpendicular to the open mask 1.
In the embodiment of the present application, the cathode mask 2 is used to fabricate a cathode layer in each display panel of the display panel motherboard. The orthographic projections of the first opening areas 123 fall into the orthographic projections of the second opening areas, and further, the orthographic projection area of each first opening area 123 is smaller than that of the corresponding second opening area, so that the influence of the opening mask 1 on the cathode mask 2 in the manufacturing process is reduced. The cathode mask 2 comprises a second frame and a second main body part fixedly connected with the second frame, the second main body part comprises a plurality of third mask strips and a plurality of fourth mask strips, the third mask strips are arranged in parallel, the fourth mask strips are arranged in parallel, namely the third mask strips and the fourth mask strips in the cathode mask 2 after stretching, are all in a straight line shape, and edges of second opening areas defined by the third mask strips and the fourth mask strips are also in a straight line shape. Each of the second open areas in the second body portion may correspond to a display area 310 of one display panel, and the third and fourth mask stripes disposed around the second open area may correspond to a peripheral area 330 surrounding the display area 310. Third mask strip and fourth mask strip after stretching a net are the linearity, make in the stretching process of a net, the difference between the deflection of the region of the biggest deformation degree in the cathode mask 2 and the deflection of the region of the minimum deformation degree reduces, make the change range of the size of cathode mask 2 less, make the area of the deformation region that peripheral region 330 reserved for cathode mask 2 less, thereby reduce the area of peripheral region 330, reduce display panel's frame width, improve display panel's screen ratio.
Specifically, in order to make the plurality of third mask stripes and the plurality of fourth mask stripes linear after the second main body is stretched, it is necessary to set a compensation value for the second main body before the web is stretched, to retract the second main body in a direction opposite to the stretching direction, to make the plurality of third mask stripes and the plurality of fourth mask stripes curved before the web is stretched, to make the second main body before the web is stretched concave, and to set a compensation value for the plurality of third mask stripes and the plurality of fourth mask stripes in the second main body before the web is stretched, to make the third mask stripes and the fourth mask stripes linear after the web is stretched, to reduce a difference in deformation amount of each region of the second main body during the web stretching, that is, to reduce a deformation margin value of the second main body.
In a comparative example, as shown in fig. 7, the width of the second deformed region 230 'is D2', i.e., the difference between the amount of deformation of the region with the greatest degree of deformation and the amount of deformation of the region with the least degree of deformation during the stretching of the expanded web of the cathode mask 2 'is D2'.
In contrast, the width of D2 is much smaller than D2', i.e. the range of the second deformation region 230 in the embodiment of the present application is significantly reduced, so that the width D3 of the peripheral region 330 can be reduced. Therefore, in the mask assembly provided in the embodiment of the present application, as shown in fig. 7 and fig. 8, the third mask stripes and the fourth mask stripes after stretching are linear, so that a difference between a deformation amount of a region with a maximum deformation degree and a deformation amount of a region with a minimum deformation degree in the stretching process of the cathode mask 2 can be reduced, a width D2 of the second deformation region 230 is greatly reduced, an area of the peripheral region 330 is reduced, a frame width of the display panel is reduced, and a screen area ratio of the display panel is improved. The determination method of the compensation amount in the cathode mask 2 may be substantially the same as the determination method of the compensation amount in the opening mask 1, and is not described herein again.
Embodiments of the second aspect of the present application provide a method for manufacturing a reticle assembly, as shown in fig. 11, the method includes:
step S701, providing a plurality of first mask strips and a plurality of second mask strips, wherein the plurality of first mask strips and the plurality of second mask strips are in a curve shape, and the plurality of first mask strips and the plurality of second mask strips are arranged in a crossed mode;
step S702, providing a first frame;
step S703, stretching a plurality of first mask strips and a plurality of second mask strips, connecting the plurality of first mask strips and a first frame, and connecting the plurality of second mask strips and the first frame to obtain an open mask, wherein the plurality of first mask strips after stretching the web are arranged in parallel, the plurality of second mask strips after stretching the web are arranged in parallel, the plurality of first mask strips after stretching the web and the plurality of second mask strips after stretching the web are arranged in a crossed manner and define a plurality of first open areas, and the plurality of first open areas are used for being arranged corresponding to the display areas in the plurality of display panels;
step S704, a mask assembly is formed by opening the mask.
In the embodiment of the present application, as shown in fig. 4, the mask assembly includes a first frame 110 and a first main body 120 fixedly connected to the first frame 110, the first main body 120 includes a plurality of first mask stripes 121 and a plurality of second mask stripes 122, the plurality of first mask stripes 121 are arranged in parallel, the plurality of second mask stripes 122 are arranged in parallel, that is, the plurality of first mask stripes 121 and the plurality of second mask stripes 122 in the open mask 1 after stretching, are all linear, and each edge of the first open area 123 defined by the plurality of first mask stripes 121 and the plurality of second mask stripes 122 is also linear. Each of the first open regions 123 in the main body portion may correspond to a display region 310 of one display panel, and the first mask stripes 121 and the second mask stripes 122 disposed around the first open region 123 may correspond to a peripheral region 330 surrounding the display region 310. First mask strip 121 and second mask strip 122 after stretching of a net are the linearity, make in the stretching process of a net, the difference between the deflection in the region that the degree of deformation is the biggest in the opening mask version 1 and the deflection in the region that the degree of deformation is the minimum reduces, make the change range of the size of opening mask version 1 less, make the area of the deformation region that peripheral region 330 reserved for opening mask version 1 less, thereby reduce the area of peripheral region 330, reduce display panel's frame width, improve display panel's screen ratio.
In some embodiments, step S701 may be refined to: a plurality of first mask stripes 121 and a plurality of second mask stripes 122 are provided, and for each of the first mask stripes 121 and the second mask stripes 122, the first mask stripes 121 and the second mask stripes 122 are nonlinearly compensated to make the first mask stripes 121 and the second mask stripes 122 curve.
In the embodiment of the present application, the non-linear compensation is performed on the plurality of first mask stripes 121 and the plurality of second mask stripes 122 before stretching the web, that is, in the direction opposite to the stretching direction, so that different positions of the first mask stripes 121 and the second mask stripes 122 are retracted by a specific compensation value. And the compensation values of the respective regions of the first and second mask stripes 121 and 122 are different. Further, the opening mask 1 can be stretched by adopting a smaller pulling force, and the compensation value of each area in the opening mask 1 is determined based on the deformation of each area in the stretching process of the opening mask 1 through the smaller pulling force. The first mask stripes 121 and the second mask stripes 122 are subjected to nonlinear compensation, and a specific compensation value is set for each region in the open mask 1, so that the deformation margin in the stretching process of the open mask 1 can be further reduced.
In some embodiments, the step of forming the reticle assembly by opening the reticle 1 comprises: and providing a cathode mask 2, and fixedly connecting the cathode mask 2 and the opening mask 1 to obtain a mask assembly.
In the embodiment of the present application, the opening mask 1 and the cathode mask 2 are connected to form a mask assembly, the connection mode includes nesting, and the first opening area 123 of the opening mask 1 and the second opening area of the cathode mask 2 jointly define the display area 310 of the display panel.
In some embodiments, before providing a cathode mask 2, the steps further include:
providing a plurality of third mask strips and a plurality of fourth mask strips, wherein the plurality of third mask strips and the plurality of fourth mask strips are in a curve shape, and the plurality of third mask strips and the plurality of fourth mask strips are arranged in a crossed manner;
step two, providing a second frame;
and step three, stretching the plurality of third mask strips and the plurality of fourth mask strips, connecting the plurality of third mask strips with the second frame, and connecting the plurality of fourth mask strips with the second frame to obtain a cathode mask 2, wherein the plurality of third mask strips after stretching the mesh are arranged in parallel, the plurality of fourth mask strips after stretching the mesh are arranged in parallel, the plurality of third mask strips after stretching the mesh and the plurality of fourth mask strips after stretching the mesh are arranged in a crossed manner and define a plurality of second opening areas, and the orthographic projections of the plurality of first opening areas 123 fall into the orthographic projections of the plurality of second opening areas in the direction perpendicular to the opening mask 1.
In this embodiment, the cathode mask 2 includes a second frame and a second main body portion fixedly connected to the second frame, the second main body portion includes a plurality of third mask strips and a plurality of fourth mask strips, the plurality of third mask strips are arranged in parallel, and the plurality of fourth mask strips are arranged in parallel, that is, the plurality of third mask strips and the plurality of fourth mask strips in the cathode mask 2 after stretching the expanded mesh are arranged in parallel
The four mask stripes are all linear, and each edge of the second opening area defined by the third mask stripes and the fourth mask stripes is also linear. Each of the second open areas in the second body portion may correspond to a display area 310 of one display panel, and the third and fourth mask stripes disposed around the second open area may correspond to a peripheral area 330 surrounding the display area 310. Third mask strip and fourth mask strip after stretching of a net are the linearity, make in the stretching process of a net, the deflection in the region that the degree of deformation is the biggest in the negative pole mask 2 and the difference between the deflection in the region that the degree of deformation is the minimum reduce, make the change range of the size of negative pole mask 2 less, make the area of the deformation zone that peripheral region 330 reserved for negative pole mask 2 less, thereby reduce the area of peripheral region 330, reduce display panel's frame width, improve display panel's screen ratio.
In some embodiments, step one may be subdivided into: and providing a plurality of third mask stripes and a plurality of fourth mask stripes, and aiming at each third mask stripe and each fourth mask stripe, carrying out nonlinear compensation on the third mask stripes and the fourth mask stripes so that the third mask stripes and the fourth mask stripes are in a curve shape.
In the embodiment of the present application, the non-linear compensation is performed on the plurality of third mask stripes and the plurality of fourth mask stripes before stretching the web, that is, in a direction opposite to the stretching direction, so that different positions of the third mask stripes and the fourth mask stripes are retracted by a specific compensation value. And the compensation values of the respective regions in the third mask stripes and the fourth mask stripes are different. Furthermore, the cathode mask 2 can be stretched by a small pulling force, and the compensation value of each region in the cathode mask 2 is determined based on the deformation of each region of the cathode mask 2 in the stretching process of stretching by the small pulling force. And the third mask strips and the fourth mask strips are subjected to nonlinear compensation, and a specific compensation value is set for each region in the cathode mask 2, so that the deformation margin value in the process of stretching the 2 meshes of the cathode mask can be further reduced.
Embodiments of a third aspect of the present application provide a display panel, which is cut by a display panel mother board manufactured by using the mask assembly as described in any one of the above.
In the embodiment of the present application, the display panel includes, but is not limited to, a display screen of a product such as a mobile phone, a tablet computer, a display, a television, a picture screen, an advertisement screen, and electronic paper. Since the display panel is cut from the display panel mother board manufactured by the mask assembly, the display panel has all the advantages of the mask assembly.
Finally, it should be noted that: the above embodiments are only used for illustrating the technical solutions of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present disclosure, and the present disclosure should be construed as being covered by the claims and the specification. In particular, the technical features mentioned in the embodiments can be combined in any way as long as there is no structural conflict. The present application is not intended to be limited to the particular embodiments disclosed herein but is to cover all embodiments that may fall within the scope of the appended claims.

Claims (10)

1. The utility model provides a mask subassembly, is applied to the preparation display panel mother board, the display panel mother board includes a plurality of display panel, its characterized in that, including the opening mask, the opening mask includes:
a first frame;
the first main body part is fixedly connected with the first frame, the first main body part comprises a plurality of first mask strips arranged in parallel and a plurality of second mask strips arranged in parallel, the plurality of first mask strips and the plurality of second mask strips are arranged in a crossed mode and define a plurality of first opening areas, and the plurality of first opening areas are used for being arranged corresponding to display areas in the plurality of display panels.
2. The reticle assembly of claim 1, wherein the first frame and the first open area are rectangular in shape.
3. The reticle assembly of claim 1, wherein the means of connecting the first frame and the first body portion comprises a welded connection.
4. The reticle assembly of claim 1, further comprising a cathode reticle, the opening reticle being connected to the cathode reticle.
5. The reticle assembly of claim 4, wherein the cathode reticle comprises:
a second frame;
the second main body part, the second main body part with second frame fixed connection, the second main body part includes a plurality of third mask strips of mutual parallel arrangement to and a plurality of fourth mask strips of mutual parallel arrangement, a plurality of third mask strips reach a plurality of fourth mask strips cross arrangement and inject a plurality of second opening areas, along the perpendicular to in the direction of opening mask version, the orthographic projection of a plurality of first opening areas falls into in the orthographic projection of a plurality of second opening areas.
6. A method for manufacturing a mask assembly, the method comprising:
providing a plurality of first mask stripes and a plurality of second mask stripes, wherein the plurality of first mask stripes and the plurality of second mask stripes are in a curved shape, and the plurality of first mask stripes and the plurality of second mask stripes are arranged in a crossed manner;
providing a first frame;
stretching the plurality of first mask strips and the plurality of second mask strips in a stretching mode, connecting the plurality of first mask strips with the first frame, and connecting the plurality of second mask strips with the first frame to obtain an open mask, wherein the plurality of first mask strips after stretching in the stretching mode are arranged in parallel, the plurality of second mask strips after stretching in the stretching mode are arranged in parallel, the plurality of first mask strips after stretching in the stretching mode and the plurality of second mask strips after stretching in the stretching mode are arranged in a crossed mode and define a plurality of first opening areas, and the plurality of first opening areas are used for being arranged corresponding to display areas in the plurality of display panels;
and forming a mask assembly through the opening mask.
7. The method of claim 6, wherein the step of providing a plurality of first mask stripes and a plurality of second mask stripes comprises:
providing a plurality of first mask stripes and a plurality of second mask stripes, and carrying out nonlinear compensation on the first mask stripes and the second mask stripes aiming at each first mask stripe and each second mask stripe so as to enable the first mask stripes and the second mask stripes to be in a curve shape.
8. The method of claim 6, wherein the step of forming the reticle assembly through the open reticle comprises:
and providing a cathode mask, and fixedly connecting the cathode mask and the opening mask to obtain the mask component.
9. The method of claim 8, wherein prior to providing a cathode mask, the steps further comprise:
providing a plurality of third mask stripes and a plurality of fourth mask stripes, wherein the plurality of third mask stripes and the plurality of fourth mask stripes are in a curved shape, and the plurality of third mask stripes and the plurality of fourth mask stripes are arranged in a crossed manner;
providing a second frame;
and stretching the plurality of third mask strips and the plurality of fourth mask strips, connecting the plurality of third mask strips with the second frame, connecting the plurality of fourth mask strips with the second frame to obtain a cathode mask, wherein the plurality of third mask strips after stretching are arranged in parallel, the plurality of fourth mask strips after stretching are arranged in parallel, the plurality of third mask strips after stretching and the plurality of fourth mask strips after stretching are arranged in a crossed manner and define a plurality of second opening areas, and the orthographic projections of the plurality of first opening areas fall into the orthographic projections of the plurality of second opening areas in the direction perpendicular to the opening mask.
10. A display panel cut from a display panel mother substrate made from the mask assembly according to any one of claims 1 to 5.
CN202210567917.4A 2022-05-24 2022-05-24 Mask assembly, manufacturing method of mask assembly and display panel Pending CN114934254A (en)

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Application Number Priority Date Filing Date Title
CN202210567917.4A CN114934254A (en) 2022-05-24 2022-05-24 Mask assembly, manufacturing method of mask assembly and display panel

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Application Number Priority Date Filing Date Title
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104561893A (en) * 2014-12-25 2015-04-29 信利（惠州）智能显示有限公司 Manufacturing method for mask plate
CN107227438A (en) * 2017-06-15 2017-10-03 京东方科技集团股份有限公司 The design method of metal mask plate, the preparation method of metal mask plate
CN109504938A (en) * 2019-01-09 2019-03-22 昆山国显光电有限公司 A kind of mask cell and preparation method thereof, mask plate
CN110188502A (en) * 2019-06-10 2019-08-30 京东方科技集团股份有限公司 Design method, production method and the designing system of mask plate
CN112251715A (en) * 2020-10-21 2021-01-22 云谷（固安）科技有限公司 Method for repairing mask plate
CN112662994A (en) * 2020-12-04 2021-04-16 合肥维信诺科技有限公司 Mask and preparation method thereof
CN114438444A (en) * 2022-01-24 2022-05-06 深圳市华星光电半导体显示技术有限公司 Mask frame and mask assembly

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104561893A (en) * 2014-12-25 2015-04-29 信利（惠州）智能显示有限公司 Manufacturing method for mask plate
CN107227438A (en) * 2017-06-15 2017-10-03 京东方科技集团股份有限公司 The design method of metal mask plate, the preparation method of metal mask plate
CN109504938A (en) * 2019-01-09 2019-03-22 昆山国显光电有限公司 A kind of mask cell and preparation method thereof, mask plate
CN110188502A (en) * 2019-06-10 2019-08-30 京东方科技集团股份有限公司 Design method, production method and the designing system of mask plate
CN112251715A (en) * 2020-10-21 2021-01-22 云谷（固安）科技有限公司 Method for repairing mask plate
CN112662994A (en) * 2020-12-04 2021-04-16 合肥维信诺科技有限公司 Mask and preparation method thereof
CN114438444A (en) * 2022-01-24 2022-05-06 深圳市华星光电半导体显示技术有限公司 Mask frame and mask assembly

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