CN114923448A - Detection device for light-emitting diode wafer - Google Patents
Detection device for light-emitting diode wafer Download PDFInfo
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- CN114923448A CN114923448A CN202210491579.0A CN202210491579A CN114923448A CN 114923448 A CN114923448 A CN 114923448A CN 202210491579 A CN202210491579 A CN 202210491579A CN 114923448 A CN114923448 A CN 114923448A
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- 238000001514 detection method Methods 0.000 title claims abstract description 53
- 238000013016 damping Methods 0.000 claims description 20
- 238000007689 inspection Methods 0.000 claims description 15
- 238000012360 testing method Methods 0.000 claims description 13
- 238000007789 sealing Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 8
- 238000009434 installation Methods 0.000 claims description 6
- 238000001125 extrusion Methods 0.000 abstract description 3
- 230000009471 action Effects 0.000 description 8
- 239000000306 component Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
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- 238000004891 communication Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000012840 feeding operation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
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Abstract
The invention discloses a detection device for a light-emitting diode wafer, which comprises a detection table, a detection unit and a detection unit, wherein the detection table is of an internal hollow structure and is used for providing a support platform for the light-emitting diode wafer to be detected; the pre-positioning assembly is arranged inside the detection table and is used for concentrically pre-clamping the light-emitting diode wafer; the flexible positioning assembly is arranged in the detection table and is used for concentrically positioning and clamping the light-emitting diode wafer in a flexible mode; a main drive assembly. According to the invention, the air pressure in the air bag package is increased and expanded through the cavity formed by the air to the rubber strip and the air bag package, so that the air bag package is expanded and drives the rubber strip to bend towards the middle part of the detection table, and further the rubber strip bends and drives the light-emitting diode wafer to move to the central position of the top of the detection table in a flexible mode, thereby realizing automatic positioning of the light-emitting diode wafer and avoiding the situation of extrusion damage of the light-emitting diode wafer.
Description
Technical Field
The invention relates to the technical field of wafer detection, in particular to a detection device for a light-emitting diode wafer.
Background
The light emitting diode wafer is a semiconductor light emitting component composed of semiconductor substances, the light emitting diode wafer is a main raw material of an LED and is a light emitting core component of the LED, and parameters such as brightness, voltage, wavelength, length, thickness, width and the like of the semiconductor wafer need to be detected in the production and manufacturing process of the light emitting diode wafer.
However, in the prior art, when the device is used in practice, the light emitting diode wafer detection device adopts a manual centering mode to adjust the position of the light emitting diode wafer on the detection table in the using process, so that the use convenience of the thickness detection of the light emitting diode wafer is reduced, and meanwhile, due to the structure for automatically adjusting the position of the light emitting diode wafer, the risk that the light emitting diode wafer is extruded and damaged is easily caused.
Disclosure of Invention
The present invention is directed to a testing apparatus for led chips, which solves the above problems.
In order to achieve the purpose, the invention provides the following technical scheme: the method comprises the following steps:
the detection platform is of a hollow structure and is used for providing a supporting platform for the LED wafer to be detected;
the pre-positioning assembly is arranged in the detection table and is used for concentrically pre-clamping the light-emitting diode wafer;
the flexible positioning assembly is arranged in the detection table and is used for concentrically positioning and clamping the light-emitting diode wafer in a flexible mode;
and the main driving assembly is fixedly arranged in the detection table and is used for driving the pre-positioning assembly and the flexible positioning assembly to work.
Preferably, the main driving assembly comprises a driving cylinder, the driving cylinder is fixedly connected to the bottom of the inner wall of the detection table, an output shaft of the driving cylinder is fixedly connected with a driving frame, one end, far away from the driving cylinder, of the driving frame is of an open frame-shaped structure, and the middle of the top of the detection table is of a protruding structure.
Preferably, the prepositioning subassembly includes the fixed axle, fixed axle fixed connection is in the bottom of examining test table inner wall, the surface rotation of fixed axle is connected with the rotation connecting seat, the surface that rotates the connecting seat is seted up flutedly, and the inner wall of recess articulates there is the articulated arm, the articulated arm is kept away from the one end that rotates the connecting seat position and is articulated to have a movable seat, the quantity of articulated arm is three, and three articulated arm circularizes and sets up on the surface that rotates the connecting seat.
Preferably, the bottom fixedly connected with installation piece of sliding seat, the inner wall swing joint of installation piece has the slider, and slider fixed connection is in the bottom of examining test table inner wall, the top fixedly connected with guide rail of sliding seat, the fixed first centre gripping subassembly that is used for prepositioning the emitting diode wafer that is equipped with in top of guide rail.
Preferably, first centre gripping subassembly includes the dead lever, dead lever fixed connection is at the top of guide rail, the surperficial swing joint of dead lever has the movable sleeve, the top fixedly connected with fixed block of dead lever, and fixed block swing joint is at the inner wall of movable sleeve, the first damping spring of bottom fixedly connected with of fixed block, and first damping spring fixed connection is in the bottom of movable sleeve inner wall, the opening diameter of movable sleeve bottom is less than the diameter of fixed block bottom, the drive frame is kept away from the one end rotation that drives the cylinder position and is connected the middle part at one of them sliding seat, the fixed surface of movable sleeve is connected with the rubber layer, detect the top of the corresponding movable sleeve position of platform and seted up first movable groove, and the surface swing joint of the inner wall of first movable groove and movable sleeve.
Preferably, flexible locating component includes the mounting panel, mounting panel fixed connection is at the one end inner wall of the corresponding drive cylinder position of drive frame, the one end fixedly connected with bellows of drive cylinder position is kept away from to the mounting panel, the one end fixedly connected with fixed plate of mounting panel position is kept away from to the bellows, and fixed plate fixed connection is at the top of fixed axle, the fixed surface of fixed plate is connected with fixed pipe, the through-hole has been seted up at the middle part of fixed plate, the inner wall swing joint of fixed pipe has the piston, the top fixedly connected with second damping spring of piston, the equal fixed connection of second damping spring and fixed pipe is at the top of examining the platform inner wall, the inside of bellows, through-hole and fixed pipe is linked together, the fixed second centre gripping subassembly that adopts flexible tentacle to realize clamping function that is equipped with in the top of fixed pipe.
Preferably, the second centre gripping subassembly includes the connecting frame, the fixed embedding of connecting frame is on the surface at fixed pipe top, the one end fixedly connected with rubber strip and the gasbag package of fixed pipe position are kept away from to the connecting frame, and rubber strip fixed connection is at the top of gasbag package, the expansion coefficient that rubber strip position one end surface was kept away from to the gasbag package reduces gradually, the quantity of connecting frame is three, and three connecting frame is the annular and sets up the surface at fixed pipe, the inside of constituteing the cavity between the inside of fixed pipe and connecting frame and rubber strip and the gasbag package is linked together, the surface of fixed pipe is equipped with the atmospheric pressure circulation subassembly that is used for accomplishing the air admission and exhaust function.
Preferably, the atmospheric pressure circulation subassembly includes first fixed frame, the fixed embedding of first fixed frame is on the surface of fixed pipe, the fixed check valve that is equipped with in back side of first fixed frame, the fixed frame of second that has do not fixed embedding is equallyd divide at the both ends of first fixed frame, the middle part activity of the fixed frame of second is pegged graft and is had the closing plate, two the equal fixedly connected with connecting plate in top of closing plate, the bottom fixedly connected with reset spring of connecting plate, and reset spring fixed connection is at the top of the fixed frame of second, other fixedly connected with guide block is equallyd divide to the bottom at connecting plate both ends, the guide block is semi-circular structure, the top fixedly connected with drive yoke of the corresponding guide block position of drive frame.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, the air pressure in the air bag package is increased and expanded through the cavity formed by the air to the rubber strip and the air bag package, so that the air bag package is expanded and drives the rubber strip to bend towards the middle part of the detection table, and further the rubber strip bends and drives the light-emitting diode wafer to move to the central position of the top of the detection table in a flexible manner, thereby realizing automatic positioning of the light-emitting diode wafer and avoiding the situation of extrusion damage;
2. the invention also drives the driving frame to move to the position of the guide block through the driving frame, and drives the connecting plate to move upwards through the driving frame and the guide block, so that the connecting plate drives the sealing plate to move upwards and stretches the return spring, so that the second fixing frame is in a communicated state, so that the fixing pipe is communicated with the outside through the first fixing frame and the second fixing frame, at the moment, air in the fixing pipe is discharged outwards through the first fixing frame and the second fixing frame, namely, under the action of the resetting and stretching of the second damping spring, the second damping spring drives the piston to move downwards, so that the air in the cavity formed by the rubber strip and the air bag returns to the top of the fixing pipe, namely, the rubber strip and the connecting frame are in a dry-shriveled state and are retracted into the detection table through the second movable groove, so that the device is restored to the initial state, and simultaneously, the return spring is arranged, when the mounting plate drives the corrugated pipe to contract again, the driving frame and the guide block are far away from the mounting plate, the connecting plate drives the sealing plate to move downwards under the action of the reset contraction of the reset spring, the sealing plate closes the second fixing frame again, and therefore the device can be repeatedly and continuously used.
Drawings
FIG. 1 is a schematic view of an overall structure of an inspection apparatus for an LED wafer according to the present invention;
FIG. 2 is a first schematic view of a pre-positioning assembly of a detecting apparatus for LED chips according to the present invention;
FIG. 3 is a sectional view of the whole structure of an inspection apparatus for LED chips according to the present invention;
FIG. 4 is a cross-sectional view of the overall structure of an inspection apparatus for LED chips according to the present invention;
FIG. 5 is a schematic diagram of a second embodiment of a pre-positioning assembly of the detecting device for LED chips according to the present invention;
FIG. 6 is a third schematic view of a pre-positioning assembly of the detecting apparatus for LED chips according to the present invention;
FIG. 7 is a first schematic view of a flexible positioning assembly of an inspection apparatus for LED chips according to the present invention;
FIG. 8 is a schematic structural diagram of a flexible positioning assembly of the inspection apparatus for LED chips according to the present invention;
FIG. 9 is a sectional view of a movable sleeve structure of an inspection apparatus for LED chips according to the present invention;
FIG. 10 is a schematic view of an air pressure circulation assembly of a testing apparatus for LED chips according to the present invention;
FIG. 11 is a cross-sectional view of a rubber strip structure of an inspection device for LED chips according to the present invention;
FIG. 12 is a front sectional view of an air pressure circulating assembly of an inspection apparatus for LED chips according to the present invention.
In the figure: 1. a detection table; 2. a main drive assembly; 201. a driving cylinder; 202. a drive frame; 3. a pre-positioning assembly; 301. a fixed shaft; 302. rotating the connecting seat; 303. an articulated arm; 304. a movable seat; 305. mounting blocks; 306. a slider; 307. a guide rail; 31. a first clamping assembly; 310. a fixing rod; 311. a movable sleeve; 312. a fixed block; 313. a first damping spring; 314. a first movable slot; 4. a flexible positioning assembly; 401. mounting a plate; 402. a bellows; 403. a fixing plate; 404. a fixed tube; 405. a through hole; 406. a piston; 407. a second damping spring; 41. a second clamping assembly; 410. a connecting frame; 411. a rubber strip; 412. an air bag package; 413. a second movable slot; 42. a pneumatic circulation assembly; 421. a first fixed frame; 422. a one-way valve; 423. a second fixed frame; 424. a sealing plate; 425. a connecting plate; 426. a return spring; 427. a guide block; 428. a driving frame.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-12, the present invention provides a technical solution: the method comprises the following steps:
the detection table 1 is of a hollow structure and is used for providing a supporting platform for the LED wafer to be detected;
the pre-positioning assembly 3 is arranged inside the detection table 1 and is used for concentrically pre-clamping the light-emitting diode wafer;
the flexible positioning assembly 4 is arranged in the detection table 1 and is used for concentrically positioning and clamping the light-emitting diode wafer in a flexible mode;
and the main driving assembly 2 is fixedly arranged in the detection table 1 and is used for driving the pre-positioning assembly 3 and the flexible positioning assembly 4 to work.
Main drive assembly 2 is including driving actuating cylinder 201, drives actuating cylinder 201 and passes through support fixed mounting in the bottom of examining test table 1 inner wall, and the output shaft that drives actuating cylinder 201 has drive frame 202 through bolt fixed mounting, and the one end that drive actuating cylinder 201 position was kept away from to drive frame 202 is open-ended frame shape structure, examines the middle part at test table 1 top and is the protrusion structure.
Pre-positioning assembly 3 includes fixed axle 301, fixed axle 301 passes through flange fixed mounting in the bottom of examining 1 inner wall of test table, fixed axle 301's surface is rotated and is connected with rotation connecting seat 302, the recess has been seted up on the surface of rotation connecting seat 302, and the inner wall of recess articulates there is articulated arm 303, articulated arm 303 keeps away from the one end that rotates connecting seat 302 position and articulates there is sliding seat 304, the quantity of articulated arm 303 is three, and three articulated arm 303 circularizes the surface that sets up at rotation connecting seat 302, because fixed axle 301 and rotation connecting seat 302 are the pivoted relation, and be the articulated relation between articulated arm 303 and the rotation connecting seat 302, can only remove along the direction of slider 306 through installing block 305 simultaneously, this makes when sliding seat 304 removes to rotation connecting seat 302, can make sliding seat 304 cooperation articulated arm 303 drive rotation connecting seat 302 and use fixed axle 301 to rotate, and then make rotation connecting seat 302 cooperation articulated arm 303 drive other sliding seat 304 at installing block 305 and slider 302 at installing block 304 306 moves downwardly in cooperation with one end of the rotating connector block 302.
There is installation piece 305 bottom of sliding seat 304 through bolt fixed mounting, and the inner wall swing joint of installation piece 305 has slider 306, and slider 306 passes through bolt fixed mounting in the bottom of examining test table 1 inner wall, and there is guide rail 307 at the top of sliding seat 304 through bolt fixed mounting, and the top of guide rail 307 is fixed to be equipped with and is used for the first centre gripping subassembly 31 to the predetermined position of emitting diode wafer.
The first clamping assembly 31 comprises a fixed rod 310, the fixed rod 310 is fixedly installed at the top of the guide rail 307, the surface of the fixed rod 310 is movably connected with a movable sleeve 311, a fixed block 312 is fixedly installed at the top of the fixed rod 310, the fixed block 312 is movably connected with the inner wall of the movable sleeve 311, a first damping spring 313 is fixedly installed at the bottom of the inner wall of the movable sleeve 311, the opening diameter of the bottom of the movable sleeve 311 is smaller than the diameter of the bottom of the fixed block 312, one end, far away from the driving cylinder 201, of the driving frame 202 is rotatably connected to the middle of one of the movable seats 304 through a pin shaft, a rubber layer is fixedly installed on the surface of the movable sleeve 311, a first movable groove 314 is formed in the top of the position, corresponding to the movable sleeve 311, of the detection platform 1, and the inner wall of the first movable groove 314 is movably connected with the surface of the movable sleeve 311.
The flexible positioning assembly 4 comprises a mounting plate 401, the mounting plate 401 is fixedly mounted on the inner wall of one end of the driving frame 202 corresponding to the position of the driving cylinder 201 through bolts, a corrugated pipe 402 is fixedly mounted on one end of the mounting plate 401 far away from the position of the driving cylinder 201, a fixing plate 403 is fixedly mounted on one end of the corrugated pipe 402 far away from the position of the mounting plate 401, and fixed plate 403 fixed mounting is at the top of fixed axle 301, the fixed surface mounting of fixed plate 403 has fixed pipe 404, through-hole 405 has been seted up at the middle part of fixed plate 403, the inner wall swing joint of fixed pipe 404 has piston 406, the top fixed mounting of piston 406 has second damping spring 407, the equal fixed mounting of second damping spring 407 and fixed pipe 404 is at the top of examining test table 1 inner wall, bellows 402, the inside of through-hole 405 and fixed pipe 404 is linked together, the fixed second centre gripping subassembly 41 that adopts flexible tentacle to realize clamping function that is equipped with in top of fixed pipe 404.
The second clamping assembly 41 comprises a connecting frame 410, the connecting frame 410 is fixedly embedded in the surface of the top of the fixed pipe 404, one end of the connecting frame 410, far away from the position of the fixed pipe 404, is fixedly provided with a rubber strip 411 and an air bag package 412, the rubber strip 411 is fixedly arranged at the top of the air bag package 412, the expansion coefficient of one end of the air bag package 412, far away from the surface of the rubber strip 411, is gradually reduced, the number of the connecting frames 410 is three, the three connecting frames 410 are annularly arranged on the surface of the fixed pipe 404, the interiors of the fixed pipe 404 and the connecting frames 410 are communicated with the interiors of cavities formed between the rubber strip 411 and the air bag package 412, and the surface of the fixed pipe 404 is provided with an air pressure circulating assembly 42 for completing air intake and exhaust functions.
The pneumatic circulation assembly 42 includes a first fixing frame 421, the first fixing frame 421 is fixedly embedded in the surface of the fixing pipe 404, a one-way valve 422 is fixedly disposed at the rear end of the first fixing frame 421, a second fixing frame 423 is fixedly embedded at both ends of the first fixing frame 421, a sealing plate 424 is movably inserted in the middle of the second fixing frame 423, a connecting plate 425 is fixedly mounted at the top of each of the two sealing plates 424, a return spring 426 is fixedly mounted at the bottom of the connecting plate 425, the return spring 426 is fixedly mounted at the top of the second fixing frame 423, guide blocks 427 are fixedly mounted at the bottom of both ends of the connecting plate 425, the guide blocks 427 are semi-circular structures, a driving frame 428 is fixedly mounted at the top of the driving frame 202 corresponding to the positions of the guide blocks 427, when the movable sleeve 311 is restored to the initial position, the driving cylinder 201 drives the driving frame 202 to restore to the initial position, so that the driving frame 428 is driven to move to the positions of the guide blocks 427, and the driving frame 428 cooperates with the guiding block 427 to drive the connecting plate 425 to move upwards, so that the connecting plate 425 drives the sealing plate 424 to move upwards and stretch the return spring 426, so that the second fixing frame 423 is in a communication state, so that the fixing tube 404 is communicated with the outside through the first fixing frame 421 and the second fixing frame 423, at this time, the air in the fixing tube 404 is discharged outwards through the first fixing frame 421 and the second fixing frame 423, that is, under the action of the resetting and stretching of the second damping spring 407, the second damping spring 407 drives the piston 406 to move downwards, so that the air in the cavity formed by the rubber strip 411 and the airbag package 412 returns to the top of the fixing tube 404, that is, at this time, the rubber strip 411 and the connecting frame 410 are in a dry-shriveled state and are retracted into the detection table 1 through the second movable slot 413, so that the device is restored to an initial state, and at the return spring 426 is provided, so that when the mounting plate 401 retracts the bellows 402 again, the driving frame 428 is away from the guide block 427, and the connecting plate 425 moves the sealing plate 424 downward under the restoring and retracting action of the restoring spring 426, and the sealing plate 424 closes the second fixing frame 423 again, so that the device can be used repeatedly and continuously.
The working principle is as follows: when the device is used, the driving cylinder 201 is electrified and contracted, the driving cylinder 201 drives the driving frame 202 to move, the driving frame 202 drives the movable seat 304 to move towards one end of the position of the rotary connecting seat 302, the articulated arm 303 is matched with the rotary connecting seat 302, the three movable seats 304 synchronously move towards one end of the rotary connecting seat 302, when the three movable seats 304 simultaneously move towards one end of the position of the rotary connecting seat 302, the movable seat 304 drives the first clamping component 31 to move towards the middle of the detection platform 1 through the guide rail 307, the movable sleeve 311 moves on the inner wall of the first movable groove 314 and gathers the LED wafer on the detection platform 1 towards the middle, when the first clamping component 31 moves towards the middle of the detection platform 1, because the middle of the top of the detection platform 1 is of a convex structure, when the first clamping component 31 moves towards the middle of the detection platform 1, the movable sleeve 311 can be guided by a protruding structure at the top of the detection table 1, the detection table 1 can drive the movable sleeve 311 to move upwards, the movable sleeve 311 is always located on the plane at the top of the detection table 1, the light-emitting diode wafer can be well driven, and the purpose of pre-positioning the light-emitting diode wafer is achieved, meanwhile, when the movable sleeve 311 moves upwards in the direction of the detection table 1, the movable sleeve 311 can be matched with the fixed block 312 to extrude the first damping spring 313, so that when the movable sleeve 311 moves to one end far away from the middle position of the detection table 1, the movable sleeve 311 can be restored to the initial position under the action of the reset and stretching of the first damping spring 313, the top of the movable sleeve 311 is located at the bottom of the highest position at the top of the detection table 1, and the normal feeding operation of the light-emitting diode wafer cannot be influenced by the movable sleeve 311, meanwhile, the rubber pads on the surface of the movable sleeve 311 can better protect the LED chip when the driving cylinder 201 drives the driving frame 202 to contract, so that the driving frame 202 drives the corrugated pipe 402 to stretch through the mounting plate 401, the volume of the corrugated pipe 402 is increased, the air pressure inside the corrugated pipe 402 is reduced, the inside of the corrugated pipe 402 generates negative pressure, at the moment, the outside air penetrates through the first fixing frame 421 through the one-way valve 422 and enters the inside of the fixing pipe 404 until the movable sleeve 311 completes the pre-positioning of the LED chip, the LED chip is driven to the protruding structure position at the top of the detection table 1, the corrugated pipe 402 is stretched to the maximum state, meanwhile, the inside of the corrugated pipe 402 sucks partial air, then the driving cylinder 201 drives the driving frame 202 to stretch, and the driving frame 202 drives the movable base 304 to move to one end far away from the position of the rotary connecting base 302, and then the rotating connection base 302 cooperates with the hinge arm 303 to drive the three movable bases 304 to move towards the end far away from the rotating connection base 302, and further the movable sleeve 311 can return to the initial state, and when the driving cylinder 201 drives the driving frame 202 to stretch, the driving frame 202 cooperates with the fixed plate 403 through the mounting plate 401 to squeeze the corrugated pipe 402, and further the air inside the corrugated pipe 402 enters the inside of the fixed pipe 404 through the through hole 405, and the air pressure drives the piston 406 to move upwards and squeeze the second damping spring 407, and when the piston 406 moves upwards, the piston 406 can inject the air on the top of the piston 406 in the fixed pipe 404 into the connection frame 410, and further the air on the top of the fixed pipe 404 enters the cavity formed by the rubber strip 411 and the airbag 412 through the connection frame 410, which makes the air enter the cavity formed by the rubber strip 411 and the airbag 412, make the inside atmospheric pressure increase of gasbag package 412 and take place the inflation, simultaneously because gasbag package 412 keeps away from the coefficient of expansion on rubber strip 411 position one end surface and reduces gradually, thereby make gasbag package 412 inflation and drive rubber strip 411 at the inner wall of second activity groove 413 to the bending of examining test table 1 middle part, and then make three rubber strip 411 crooked simultaneously and drive the emitting diode wafer with flexible mode and remove to the central point who examines test table 1 top and put, thereby realize avoiding simultaneously taking place its condition of extrusion damage to emitting diode wafer automatic positioning.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. A detection device for a light-emitting diode wafer is characterized in that: the method comprises the following steps:
the detection table (1) is of a hollow structure and is used for providing a supporting platform for the LED wafer to be detected;
the pre-positioning assembly (3) is arranged in the detection table (1) and is used for concentrically pre-clamping the light-emitting diode wafer;
the flexible positioning assembly (4) is arranged in the detection table (1) and is used for concentrically positioning and clamping the light-emitting diode wafer in a flexible mode;
the main driving assembly (2) is fixedly arranged in the detection table (1) and used for driving the pre-positioning assembly (3) and the flexible positioning assembly (4) to work.
2. The inspection apparatus for led chips as set forth in claim 1, wherein: the main driving assembly (2) comprises a driving cylinder (201), the driving cylinder (201) is fixedly connected to the bottom of the inner wall of the detection table (1), an output shaft fixedly connected with driving frame (202) of the driving cylinder (201), one end, away from the position of the driving cylinder (201), of the driving frame (202) is of an open frame-shaped structure, and the middle of the top of the detection table (1) is of a protruding structure.
3. The inspection apparatus for led chips as set forth in claim 2, wherein: predetermined position subassembly (3) include fixed axle (301), fixed axle (301) fixed connection is in the bottom of examining test table (1) inner wall, the surface rotation of fixed axle (301) is connected with rotation connecting seat (302), the surface that rotates connecting seat (302) is seted up flutedly, and the inner wall of recess articulates there is articulated arm (303), articulated arm (303) are kept away from the one end that rotates connecting seat (302) position and are articulated to have movable seat (304), the quantity of articulated arm (303) is three, and three articulated arm (303) circularize and set up on the surface that rotates connecting seat (302).
4. The inspection apparatus for LED chips as defined in claim 3, wherein: the bottom fixedly connected with installation piece (305) of sliding seat (304), the inner wall swing joint of installation piece (305) has slider (306), and slider (306) fixed connection is in the bottom of examining test table (1) inner wall, the top fixedly connected with guide rail (307) of sliding seat (304), the fixed first centre gripping subassembly (31) that are used for the prepositioning to the emitting diode wafer that are equipped with in top of guide rail (307).
5. The inspection apparatus for LED wafer as claimed in claim 4, wherein: the first clamping assembly (31) comprises a fixed rod (310), the fixed rod (310) is fixedly connected to the top of a guide rail (307), the surface of the fixed rod (310) is movably connected with a movable sleeve (311), the top of the fixed rod (310) is fixedly connected with a fixed block (312), the fixed block (312) is movably connected to the inner wall of the movable sleeve (311), the bottom of the fixed block (312) is fixedly connected with a first damping spring (313), the first damping spring (313) is fixedly connected to the bottom of the inner wall of the movable sleeve (311), the opening diameter of the bottom of the movable sleeve (311) is smaller than the diameter of the bottom of the fixed block (312), one end, far away from the driving cylinder (201), of the driving frame (202) is rotatably connected to the middle of one movable seat (304), the surface of the movable sleeve (311) is fixedly connected with a rubber layer, a first movable groove (314) is formed in the top of the detection platform (1) corresponding to the position of the movable sleeve (311), and the inner wall of the first movable groove (314) is movably connected with the surface of the movable sleeve (311).
6. The inspection apparatus for LED chips as defined in claim 5, wherein: the flexible positioning assembly (4) comprises a mounting plate (401), the mounting plate (401) is fixedly connected to the inner wall of one end, corresponding to the position of the driving cylinder (201), of the driving frame (202), the mounting plate (401) is far away from one end of the corrugated pipe (402), far away from the position of the mounting plate (401), of the corrugated pipe is fixedly connected with a fixing plate (403), the fixing plate (403) is fixedly connected to the top of the fixing shaft (301), the surface of the fixing plate (403) is fixedly connected with a fixing pipe (404), a through hole (405) is formed in the middle of the fixing plate (403), the inner wall of the fixing pipe (404) is movably connected with a piston (406), the top of the piston (406) is fixedly connected with a second damping spring (407), and the second damping spring (407) and the fixing pipe (404) are both fixedly connected to the top of the inner wall of the detection table (1), bellows (402), through-hole (405) and fixed inside of managing (404) are linked together, the fixed second centre gripping subassembly (41) that adopt flexible tentacle to realize clamping function that is equipped with in the top of fixed pipe (404).
7. The inspection apparatus for LED wafer as claimed in claim 6, wherein: the second clamping assembly (41) comprises a connecting frame (410), the connecting frame (410) is fixedly embedded in the surface of the top of the fixed pipe (404), one end of the connecting frame (410) far away from the fixed tube (404) is fixedly connected with a rubber strip (411) and an air bag (412), the rubber strips (411) are fixedly connected to the top of the air bag package (412), the expansion coefficient of the surface of one end, far away from the rubber strips (411), of the air bag package (412) is gradually reduced, the number of the connecting frames (410) is three, and three connection frames (410) are annularly arranged on the surface of the fixed pipe (404), the inner parts of the fixed tube (404) and the connecting frame (410) are communicated with the inner part of a cavity formed between the rubber strip (411) and the air bag (412), the surface of the fixed pipe (404) is provided with a pneumatic circulation assembly (42) for completing air intake and exhaust functions.
8. The inspection apparatus for led chips as set forth in claim 7, wherein: the air pressure circulating assembly (42) comprises a first fixed frame (421), the first fixed frame (421) is fixedly embedded in the surface of the fixed pipe (404), a one-way valve (422) is fixedly arranged at the rear side end of the first fixed frame (421), a second fixed frame (423) is respectively fixedly embedded at the two ends of the first fixed frame (421), the middle part of the second fixing frame (423) is movably inserted with a sealing plate (424), the top parts of the two sealing plates (424) are fixedly connected with a connecting plate (425), the bottom of the connecting plate (425) is fixedly connected with a return spring (426), and a return spring (426) is fixedly connected to the top of the second fixing frame (423), the bottoms of the two ends of the connecting plate (425) are respectively and fixedly connected with a guide block (427), the guide blocks (427) are of a semicircular structure, and the top of the driving frame (202) corresponding to the positions of the guide blocks (427) is fixedly connected with a driving frame (428).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210491579.0A CN114923448B (en) | 2022-05-07 | 2022-05-07 | Detection device for light-emitting diode wafer |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210491579.0A CN114923448B (en) | 2022-05-07 | 2022-05-07 | Detection device for light-emitting diode wafer |
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| CN114923448B CN114923448B (en) | 2023-11-14 |
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| CN115741534A (en) * | 2022-11-30 | 2023-03-07 | 广东领丰智能科技股份有限公司 | Mobile phone middle frame detection jig and method |
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| CN114923448B (en) | 2023-11-14 |
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