CN114923417A - Method and system for positioning multiple circular workpieces for dicing saw - Google Patents
Method and system for positioning multiple circular workpieces for dicing saw Download PDFInfo
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Abstract
The invention relates to the technical field of chip cutting, and provides a method and a system for positioning a plurality of circular workpieces for a dicing saw, wherein the method for positioning the plurality of circular workpieces determines the accurate circle center coordinates of the circular workpieces by respectively extracting corresponding coordinates of three extraction points on the edges of the circular workpieces, and does not need to acquire the image of the whole circular workpiece, so that the visual field range of an image acquisition assembly can be reduced, and the positioning accuracy is improved; simultaneously, according to a preset path, the rough extraction point and the rough extraction circle center coordinate of each circular workpiece are sequentially determined, and the accurate circle center coordinate of each circular workpiece is sequentially determined, so that the path required by positioning the plurality of circular workpieces is shortest, the positioning time is saved, the positioning efficiency of the plurality of circular workpieces is favorably improved, meanwhile, the non-circular arc part of the trimmed circular workpieces can be effectively identified, and the circle center positioning accuracy is improved.
Description
Technical Field
The invention relates to the technical field of chip cutting, in particular to a method and a system for positioning a plurality of circular workpieces for a dicing saw.
Background
When an existing scribing machine is used for positioning a circular workpiece, a drawing acquisition system with a large enough visual field is needed, the whole image of the circular product to be positioned is acquired, then the outline of the circular product is found through a related image algorithm, and then the center of the product is positioned according to the radius of the circular product.
The existing dicing saw mode can only realize the positioning of the circle center by collecting the whole image of the circular product, so that the limitation in practical application is large, for example, the requirement on installation space exists, and the whole circular product cannot be collected in a very small installation space. The larger the field of view, the lower the accuracy at the same resolution.
Meanwhile, the existing dicing saw generally adopts a mode of simultaneously dicing a plurality of wafers, and the wafers in the wafer dicing saw are round chips which are trimmed in many cases and have non-circular-arc-shaped edges, so that although a method for positioning the circle center of a single chip through a local image exists in the prior art, the method for positioning the circle center of a round workpiece by applying the method to the inside of the wafer dicing saw has great difficulty, is easy to generate great errors and has low efficiency.
Disclosure of Invention
The invention aims to provide a method and a system for positioning a plurality of circular workpieces for a dicing saw, which aim to solve the problems of low positioning accuracy and low positioning efficiency of the existing dicing saw.
In a first aspect, an embodiment of the present invention provides a method for positioning multiple circular workpieces for a dicing saw, including the following steps:
s100, controlling an image acquisition component to sequentially acquire a crude extraction point coordinate on the edge of each circular workpiece according to a preset path, and determining a crude extraction circle center coordinate of each circular workpiece;
s200, taking the crude extraction circle center coordinate of the current circular workpiece as a reference point, and acquiring a first extraction point coordinate, a second extraction point coordinate and a third extraction point coordinate of the edge of the current circular workpiece by adopting an edge extraction algorithm;
s300, determining the precise circle center coordinate of the current circular workpiece according to the first extraction point coordinate, the second extraction point coordinate and the third extraction point coordinate;
s400, determining the accuracy of the accurate circle center coordinate according to the deviation value between the accurate circle center coordinate and the crude circle center coordinate;
s500, if the accurate circle center coordinates are accurately positioned, determining whether to continue to execute the steps S200-S400 on other circular workpieces along a preset path according to the consistency between the accumulated accurate circle center coordinate number and the preset circular workpiece number until the accurate circle center coordinates of all the circular workpieces are determined, and then completing positioning.
Optionally, in step S100, controlling the image capturing component to sequentially obtain a crude extraction point coordinate on an edge of each circular workpiece according to a preset path, and determining a crude extraction circle center coordinate of each circular workpiece, including:
controlling an image acquisition component to sequentially acquire coordinates corresponding to the most protruded positions of the arcs on the edges of the circular workpieces as crude extraction point coordinates according to a clockwise direction or a counterclockwise direction;
and determining the crude extraction circle center coordinate of each circular workpiece according to the crude extraction point coordinate and the radius corresponding to each circular workpiece.
Optionally, in the step S200, taking the rough extraction circle center coordinate of the current circular workpiece as a reference point, the method includes:
and taking the last circular workpiece along the preset path as the first current circular workpiece in accurate circle center coordinate positioning.
Optionally, in step S200, obtaining the coordinates of the first extraction point of the current edge of the circular workpiece by using an edge extraction algorithm includes:
driving an image acquisition assembly to move to the edge of the current circular workpiece along a first direction by taking the rough extraction circle center coordinate as a reference point;
acquiring image information of the circular workpiece in real time, and calculating a gray average value corresponding to the current image information;
and if the gray average value corresponding to the image information of the current position is smaller than the gray average value corresponding to the image information of the previous position, stopping moving and extracting one point of an edge as the coordinate of the first extraction point. Optionally, in step S200, obtaining coordinates of a second extraction point of the current edge of the circular workpiece by using an edge extraction algorithm includes:
driving an image acquisition assembly to move to the edge of the current circular workpiece along a second direction by taking the crude extraction circle center coordinate as a reference point;
acquiring image information of the circular workpiece in real time, and calculating a gray average value corresponding to the current image information;
and if the gray average value corresponding to the image information of the current position is smaller than the gray average value corresponding to the image information of the previous position, stopping moving and extracting one point of an edge as the coordinate of the second extraction point.
Optionally, in step S200, obtaining coordinates of a third extraction point of the current edge of the circular workpiece by using an edge extraction algorithm includes:
driving an image acquisition assembly to move to the edge of the current circular workpiece along a third direction by taking the rough extraction circle center coordinate as a reference point;
acquiring image information of the circular workpiece in real time, and calculating a gray average value corresponding to the current image information;
and if the gray average value corresponding to the image information of the current position is smaller than the gray average value corresponding to the image information of the previous position, stopping moving and extracting one point of an edge as the coordinate of the third extraction point.
Optionally, the second direction is parallel to the first direction, and an included angle between the third direction and the first direction and an included angle between the third direction and the second direction are 90 degrees;
or the included angle between the second direction and the first direction is 90 degrees, and the included angle between the third direction and the second direction is 90 degrees and is opposite to the first direction;
or the included angle between any two directions of the second direction, the third direction and the first direction is 120 degrees.
Optionally, in step S300, determining an accurate circle center coordinate of the current circular workpiece according to the first extraction point coordinate, the second extraction point coordinate, and the third extraction point coordinate includes:
and determining the current accurate circle center coordinate of the circular workpiece according to the perpendicular bisector of the connecting line of any two coordinates in the first extraction point coordinate, the second extraction point coordinate and the third extraction point coordinate.
Optionally, in the step S400, determining the accuracy of the accurate circle center coordinate according to the deviation value between the accurate circle center coordinate and the rough extraction circle center coordinate includes:
acquiring a deviation value between the accurate circle center coordinate and the crude circle center coordinate;
if the deviation value is larger than the error threshold value, generating an alarm signal of the accurate circle center coordinate positioning error, and executing the step S200 again;
if the deviation value is smaller than or equal to an error threshold value, respectively acquiring error values of distances and radiuses from the first extraction point coordinate, the second extraction point coordinate and the third extraction point coordinate to the accurate circle center coordinate; and if the error value is smaller than the error threshold value, the current circular workpiece is accurately positioned.
Optionally, in the step S500, if the precise circle center coordinates are accurately located, determining whether to continue to perform the steps S200 to S400 on other circular workpieces along a preset path according to a consistency between the accumulated precise circle center coordinate number and the preset circular workpiece number, until the precise circle center coordinates of all the circular workpieces are determined, and including:
if the current accurate circle center coordinates are accurately positioned, calculating whether the number of the accurate circle center coordinates obtained through accumulation is equal to the number of the set circular workpieces or not;
if the number of the precise circle center coordinates obtained in an accumulated mode is smaller than the number of the set circular workpieces, continuing to execute the steps S200-S400 on other circular workpieces along a preset path;
and if the number of the precisely-obtained circle center coordinates is equal to the number of the set circular workpieces, completing circle center positioning of the circular workpieces.
In a second aspect, an embodiment of the present invention provides a multi-piece circular workpiece positioning system for a dicing saw, including:
the image acquisition assembly is arranged on the dicing saw and used for acquiring image information of different positions of the circular workpiece;
a control unit, communicatively connected to the image acquisition assembly, for performing the steps of the method for positioning a plurality of circular workpieces for a dicing saw according to the first aspect.
The embodiment of the invention at least has the following technical effects:
according to the method and the system for positioning the plurality of circular workpieces for the dicing saw, provided by the embodiment of the invention, the accurate circle center coordinates of the circular workpieces are determined by respectively extracting the coordinates corresponding to the three extraction points on the edges of the circular workpieces, and the image of the whole circular workpiece does not need to be acquired, so that the visual field range of the image acquisition assembly can be reduced, and the positioning accuracy is improved; meanwhile, according to the preset path, the rough extraction point and the rough extraction circle center coordinate are sequentially determined for each circular workpiece, and the accurate circle center coordinate is sequentially determined for each circular workpiece, so that the path required by positioning of the plurality of circular workpieces is shortest, the positioning time is saved, the positioning efficiency of the plurality of circular workpieces is favorably improved, meanwhile, the non-circular arc part of the trimmed circular workpiece can be effectively identified, and the circle center positioning accuracy is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a flowchart of a method for positioning multiple circular workpieces for a dicing saw according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a plurality of circular workpieces positioned according to a predetermined path for a dicing saw according to an embodiment of the present invention;
FIG. 3 is a flowchart illustrating a detailed step S100 of a method for positioning a plurality of circular workpieces for a dicing saw according to an embodiment of the present invention;
FIG. 4 is a flowchart illustrating a step S200 of a method for positioning a plurality of circular workpieces for a dicing saw according to an embodiment of the present invention;
FIG. 5 is a schematic diagram illustrating the extraction of a rough extraction point of a single circular workpiece in a method for positioning multiple circular workpieces of a dicing saw according to an embodiment of the present invention;
FIG. 6 is a schematic diagram illustrating the extraction of a rough extraction point of a single circular workpiece in another method for positioning multiple circular workpieces of a dicing saw according to an embodiment of the present invention;
FIG. 7 is a schematic diagram illustrating the extraction of a coarse extraction point of a single circular workpiece in another method for positioning multiple circular workpieces of a dicing saw according to an embodiment of the present invention;
FIG. 8 is a schematic diagram of precise circle center coordinate determination in another method for positioning multiple circular workpieces of a dicing saw according to an embodiment of the present invention;
FIG. 9 is a flowchart illustrating the detailed step S400 of a method for positioning a plurality of circular workpieces for a dicing saw according to an embodiment of the present invention;
FIG. 10 is a flowchart illustrating a step S500 of a method for positioning a plurality of circular workpieces for a dicing saw according to an embodiment of the present invention;
fig. 11 is a schematic view of an overall flowchart framework of a method for positioning multiple circular workpieces for a dicing saw according to an embodiment of the present invention.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the following embodiments, and it should be apparent that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes all or any element and all combinations of one or more of the associated listed items.
As shown in fig. 1, an embodiment of the present invention provides a method for positioning multiple circular workpieces of a dicing saw, including the following steps:
and S100, controlling the image acquisition assembly to sequentially acquire a crude extraction point coordinate on the edge of each circular workpiece according to a preset path, and determining a crude extraction circle center coordinate of each circular workpiece.
Alternatively, since the circular workpieces in the present embodiment (the circular workpieces in the present embodiment are wafers) include standard circular workpieces and non-standard circular workpieces, the application range is wider, and the four circular workpieces (all of which are trimmed non-standard circular workpieces) illustrated in fig. 2 are exemplified in the present embodiment.
It should be noted that, in order to extract a rough extraction point on the edge of the non-standard circular workpiece, the notch directions of the non-standard circular workpieces need to be adjusted to be consistent in advance, and an alternative way is to select the rough extraction point of each circular workpiece to the 9 o' clock direction position in fig. 2.
S200, taking the crude extraction circle center coordinate of the current circular workpiece as a reference point, and acquiring the first extraction point coordinate, the second extraction point coordinate and the third extraction point coordinate of the edge of the current circular workpiece by adopting an edge extraction algorithm.
S300, determining the precise circle center coordinate of the current circular workpiece according to the first extraction point coordinate, the second extraction point coordinate and the third extraction point coordinate.
And S400, determining the accuracy of the accurate circle center coordinate according to the deviation value between the accurate circle center coordinate and the crude circle center coordinate. Optionally, the accuracy of the precise center coordinate of each circular workpiece needs to be verified, and the next circular workpiece is positioned on the premise that the center coordinate is accurately positioned, otherwise, the circular workpiece needs to be positioned again.
S500, if the accurate circle center coordinates are accurately positioned, determining whether to continue to execute the steps S200-S400 on other circular workpieces along the preset path according to the consistency between the accumulated accurate circle center coordinate number and the preset circular workpiece number until the accurate circle center coordinates of all the circular workpieces are determined, and then completing positioning.
According to the method for positioning the plurality of circular workpieces for the dicing saw, the accurate circle center coordinates of the circular workpieces are determined by respectively extracting the coordinates corresponding to the three extraction points on the edges of the circular workpieces, and the image of the whole circular workpiece does not need to be acquired, so that the view range of an image acquisition assembly can be reduced, and the positioning accuracy is improved; simultaneously, according to a preset path, crude extraction points and crude extraction circle center coordinates of the circular workpieces are sequentially determined, and accurate circle center coordinates of the circular workpieces are sequentially determined, so that the path required by positioning the circular workpieces is shortest, the positioning time is saved, the positioning efficiency of the circular workpieces is improved, the non-circular arc part of the trimmed circular workpiece can be effectively identified through the judgment of the accuracy of the accurate circle center, and the accuracy of circle center positioning is further improved.
In an alternative embodiment, as shown in fig. 3, in step S100, controlling the image capturing component to sequentially obtain coordinates of a crude extraction point on an edge of each circular workpiece according to a preset path, and determining coordinates of a crude extraction center of each circular workpiece, includes:
and S110, controlling the image acquisition assembly to sequentially acquire coordinates corresponding to the most protruded positions of the arcs on the edges of the circular workpieces as crude extraction point coordinates according to a clockwise direction or a counterclockwise direction.
Specifically, the most protruding positions of the circular arcs on the edge of the circular workpiece correspond to the circular arc edges in the 3 o 'clock direction, the 6 o' clock direction, the 9 o 'clock direction, and the 12 o' clock direction, and the positions of the notches and the shape of the circular workpiece can be adjusted. In this embodiment, assuming that the notch of each non-standard circular workpiece faces 12 o 'clock, the first rough extraction point coordinate is schematically illustrated by taking the circular edge coordinate of the circular workpiece in the 9 o' clock direction as an example, so that the rough extraction point coordinate position of other circular workpieces can be more easily found along the preset path. In addition, the embodiment provides an exemplary illustration of the preset trace in the clockwise direction in fig. 2.
And S120, determining the crude extraction circle center coordinates of the circular workpieces according to the crude extraction point coordinates and the radius corresponding to the circular workpieces.
Specifically, after the crude extraction point coordinates corresponding to each circular workpiece are determined, the corresponding crude extraction circle center coordinates can be determined according to the respective radius (which can be obtained by pre-measurement) of each circular workpiece. For example: assuming that the crude extraction point coordinates of each circular workpiece are all in the 9 o' clock direction, the crude extraction center coordinates of the corresponding circular workpiece can be obtained by moving a position with a radius along the horizontal direction.
In an alternative embodiment, in step S200, taking the rough center coordinates of the current circular workpiece as a reference point includes:
and taking the last circular workpiece along the preset path as the first current circular workpiece in the accurate circle center coordinate positioning.
Specifically, in step S100, after sequentially extracting the crude extraction point coordinates on each circular workpiece and determining the crude extraction circle center coordinates of each circular workpiece along a preset path (clockwise or counterclockwise), the image capturing component stays above the last circular workpiece in the first cycle of the preset path, and at this time, the image capturing component does not need to return to the position above the circular workpiece at the initial position, but directly uses the last circular workpiece as the first circular workpiece for precise circle center positioning, and continuously positions the circular workpieces one by one along the preset path.
It can be understood that the second circular workpiece for performing accurate circle center positioning is the first circular workpiece for obtaining the coordinates of the crude extraction point.
In this embodiment, the last circular workpiece in the preset path is used as the first current circular workpiece in the accurate circle center coordinate positioning, so that the total moving path in the positioning of the plurality of circular workpieces can be shortened, and the positioning efficiency of the plurality of circular workpieces is further improved.
In some optional embodiments, as shown in fig. 4, in step S200, the obtaining the first extracted point coordinates of the current circular workpiece edge by using an edge extraction algorithm includes:
and S210, driving the image acquisition assembly to move to the edge of the current circular workpiece along the first direction by taking the rough extraction circle center coordinate as a reference point.
Specifically, the specific orientation of the first direction may be determined according to the overall shape of the circular workpiece and the notch direction.
S220, acquiring the image information of the circular workpiece in real time, and calculating the gray average value corresponding to the current image information.
Specifically, the image acquisition assembly is used for extracting image information of different positions on the circular workpiece, and the edge positions of the circular workpiece can be determined by utilizing the difference of the gray average values in consideration of the difference of materials on the circular workpiece and outside the circular workpiece and the difference of the gray average values of the corresponding image information.
S230, if the average value of the gray levels corresponding to the image information at the current position is smaller than the average value of the gray levels corresponding to the image information at the previous position, stopping the movement and extracting a point of the edge as a first extracted point coordinate.
It should be noted that the frequency of acquiring image information can be reasonably set according to the radius size of the circular workpiece, so that the moving speed of the acquisition lens in the image acquisition assembly is reasonably controlled, the stepping distance is moderate at each time, the coordinate selection of the edge extraction point is inaccurate due to the overlarge stepping distance, and the whole positioning efficiency is reduced due to the undersize stepping distance.
In some optional embodiments, as shown in fig. 4, in step S200, the obtaining the second extracted point coordinates of the current circular workpiece edge by using an edge extraction algorithm includes:
and S240, driving the image acquisition assembly to move to the edge of the current circular workpiece along the second direction by taking the rough extraction circle center coordinate as a reference point.
Specifically, the included angle between the second direction and the first direction may be determined according to the overall shape of the circular workpiece and the direction of the notch.
And S250, acquiring the image information of the circular workpiece in real time, and calculating the gray average value corresponding to the current image information.
Specifically, the image acquisition assembly is used for extracting image information of different positions on the circular workpiece, and the edge positions of the circular workpiece can be determined by utilizing the difference of the gray average values in consideration of the difference of materials on the circular workpiece and outside the circular workpiece and the difference of the gray average values of the corresponding image information.
S260, if the average value of the gray levels corresponding to the image information at the current position is smaller than the average value of the gray levels corresponding to the image information at the previous position, stopping moving and extracting a point of the edge as a second extraction point coordinate.
In some optional embodiments, as shown in fig. 4, in step S200, the obtaining of the coordinates of the third extraction point of the current circular workpiece edge by using the edge extraction algorithm includes:
and S270, driving the image acquisition assembly to move to the edge of the current circular workpiece along the third direction by taking the rough extraction circle center coordinate as a reference point.
Specifically, after the coordinates of the second extraction point are determined, the acquisition lens of the image acquisition component needs to be controlled to be repositioned at the position of the crude extraction circle center coordinates, so that the crude extraction circle center coordinates are started from the edge of the circular workpiece.
And S280, acquiring the image information of the circular workpiece in real time, and calculating the gray average value corresponding to the current image information.
Specifically, the determination of the coordinates of the third extraction point is also obtained by using an edge extraction algorithm, and the edge extraction algorithm needs to be obtained according to the comparison of the gray average values corresponding to the image information at the adjacent positions, so that the image information at different positions needs to be continuously acquired.
S290, if the average value of the gray levels corresponding to the image information at the current position is smaller than the average value of the gray levels corresponding to the image information at the previous position, stopping the movement and extracting a point of the edge as a third extracted point coordinate.
According to the method for positioning the multiple circular workpieces, the crude extraction circle center coordinates are used as reference points, the three extraction point coordinates of the edges of the circular workpieces are moved in three different directions and are respectively obtained by combining an edge extraction algorithm, so that the accurate circle center coordinates are determined by using the three extraction point coordinates, and the determination of the extraction point coordinates does not need to acquire images of the whole circular workpieces, so that the positioning accuracy of the circle center can be improved.
Optionally, in step S230 provided in the foregoing embodiment, that is, after the first extraction point coordinate is determined, the second extraction point coordinate may be directly moved along an edge from the first extraction point coordinate to another position of the circular workpiece, and an edge extraction algorithm is also used to obtain the second extraction point coordinate, so that the rough extraction point coordinate does not need to be reset, and the positioning efficiency of the precise circle center is improved.
Optionally, in step S260 provided in the foregoing embodiment, that is, after the second extraction point coordinate is determined, the second extraction point coordinate may be directly moved along an edge from the second extraction point coordinate to another position of the circular workpiece, and an edge extraction algorithm is also used to obtain a third extraction point coordinate, so that the rough extraction point coordinate is not required to be reset, and the efficiency of positioning the precise circle center is further improved.
Alternatively, as shown in fig. 5, the second direction is parallel to the first direction, and the third direction forms an angle of 90 degrees with the first direction and the second direction, that is, when the notch direction of the non-standard circular workpiece faces to the 12 o 'clock direction, the coordinate of the first extraction point (schematically shown as 1) is located in the 9 o' clock direction of the circular workpiece, the coordinate of the second extraction point (schematically shown as 2) is located in the 3 o 'clock direction of the circular workpiece, and the coordinate of the third extraction point (schematically shown as 3) is located in the 6 o' clock direction of the circular workpiece.
Alternatively, as shown in fig. 6, the second direction is 90 degrees from the first direction, the third direction is opposite to the first direction and 90 degrees from the second direction, that is, when the notch direction of the non-standard circular workpiece faces to 12 o 'clock direction, the first extracted point coordinate (indicated by 1 in the figure) is located to 9 o' clock direction of the circular workpiece, the second extracted point coordinate (indicated by 2 in the figure) is located to 6 o 'clock direction of the circular workpiece, and the third extracted point coordinate (indicated by 3 in the figure) is located to 3 o' clock direction of the circular workpiece.
Alternatively, as shown in fig. 7, when the circular workpieces are all standard circles, the included angle between any two of the second direction, the third direction and the first direction is 120 degrees, that is, the corresponding first extracted point coordinate (1 shown in the figure) is located in the 9 o ' clock direction of the circular workpiece, the second extracted point coordinate (2 shown in the figure) is located in the 1 o ' clock direction of the circular workpiece, and the third extracted point coordinate (3 shown in the figure) is located in the 5 o ' clock direction of the circular workpiece.
Optionally, the corresponding first extracted point coordinate is located in the 9 o ' clock direction of the circular workpiece, the second extracted point coordinate is located in the 5 o ' clock direction of the circular workpiece, and the third extracted point coordinate is located in the 1 o ' clock direction of the circular workpiece.
In some embodiments, in step S300, determining the precise center coordinates of the current circular workpiece according to the first extraction point coordinates, the second extraction point coordinates and the third extraction point coordinates includes:
according to the perpendicular bisector of the connection line of any two coordinates in the first extraction point coordinate (schematically shown as 1 in the figure), the second extraction point coordinate (schematically shown as 2 in the figure) and the third extraction point coordinate (schematically shown as 3 in the figure), the precise circle center coordinate of the current circular workpiece is determined, which can be specifically referred to as fig. 8.
In some embodiments, as shown in fig. 9, the determining the accuracy of the precise center coordinate according to the deviation value between the precise center coordinate and the rough center coordinate in step S400 includes:
s410, obtaining a deviation value between the accurate circle center coordinate and the crude circle center coordinate.
And S420, if the deviation value is greater than the error threshold value, generating an alarm signal of the accurate circle center coordinate positioning error, and executing the step S200 again.
S430, if the deviation value is smaller than or equal to the error threshold value, respectively obtaining the error values of the distance and the radius from the first extraction point coordinate, the second extraction point coordinate and the third extraction point coordinate to the accurate circle center coordinate; and if the error value is smaller than the error threshold value, the current circular workpiece is accurately positioned.
Optionally, in step S440, if the error value is greater than the error threshold, step S200 is executed again.
Optionally, the error threshold is set to be 3mm or less. Research shows that when the non-circumferential points of the trimming wafer are determined as the extraction points due to the fact that the trimming wafer is not placed in a standard mode and the coordinates of the extraction points are obtained to be deviated, the deviation value is at least 3mm, and therefore the step is set and the deviation value is set to be smaller than 3mm, the fact that the non-circumferential portions of the wafer are used as the extraction points to conduct circle center positioning and cause circle center positioning errors can be effectively prevented.
In some optional embodiments, as shown in fig. 10, in step S500, if the positioning of the precise circle center coordinates is accurate, according to the consistency between the accumulated precise circle center coordinate number and the preset circular workpiece number, it is determined whether to continue to perform steps S200 to S400 on other circular workpieces along the preset path until the precise circle center coordinates of all the circular workpieces are determined, and the positioning is completed, including:
and S510, if the current accurate circle center coordinates are accurately positioned, calculating whether the number of the accurate circle center coordinates obtained through accumulation is equal to the number of the set circular workpieces.
S520, if the number of the precise circle center coordinates obtained through accumulation is smaller than the number of the set circular workpieces, continuing to execute the steps S200-S400 on other circular workpieces along the preset path.
And S530, if the number of the precise circle center coordinates obtained through accumulation is equal to the number of the set circular workpieces, completing circle center positioning of the circular workpieces.
The following describes the whole process of the method for positioning a plurality of circular workpieces in an exemplary manner with reference to the flow chart diagram 11:
(1) starting circle center positioning, setting the number of circular workpieces, extracting a point position on the edge of each circular workpiece as a crude extraction point coordinate according to a clockwise or anticlockwise sequence, and calculating a corresponding crude extraction circle center coordinate;
(2) starting from the edge of the circular workpiece by taking the crude extraction point coordinate of the current circular workpiece as a reference point and acquiring image information of the circular workpiece in real time;
(3) if the gray average value corresponding to the image information of the current position is smaller than the gray average value corresponding to the image information of the previous position, stopping moving and extracting one point on the edge of the circular workpiece as a first extraction point coordinate;
(4) if the number of the obtained extraction point coordinates is less than 3, continuing to start from the edge of the circular workpiece along the other direction by taking the crude extraction circle center coordinate as a reference point and collecting image information of the circular workpiece in real time, and extracting one point on the edge of the circular workpiece as a second extraction point coordinate and a third extraction point coordinate according to the mode of (3);
(5) if the number of the obtained extraction point coordinates is judged to be equal to 3, determining accurate circle center coordinates according to the first extraction point coordinates, the second extraction point coordinates and the third extraction point coordinates;
(6) judging whether the precise circle center coordinate is qualified or not, and if the precise circle center coordinate is not qualified, executing the step (2) again; if the number of the accumulated accurate circle center coordinates is qualified, judging whether the number of the accumulated accurate circle center coordinates reaches the set number of the circular workpieces, and if the number of the accumulated accurate circle center coordinates does not reach the set number of the circular workpieces, sequentially executing the steps (2) to (5) along a preset path; and if the number of the set circular workpieces is reached, completing the circle center positioning of the circular workpieces.
Based on the same inventive concept, the embodiment of the invention provides a multi-piece circular workpiece positioning system for a dicing saw, which comprises: the device comprises an image acquisition assembly and a control unit; the image acquisition assembly is specifically arranged on a Z axis of the dicing saw and is used for acquiring image information of different positions of the circular workpiece. The control unit is in communication connection with the image acquisition assembly and is used for executing the steps in the multi-piece circular workpiece positioning method for the dicing saw in the embodiment.
Optionally, the image acquisition assembly comprises an industrial area-array camera, a high-magnification telecentric lens and a light source, and is used for improving the resolution of the image. The control unit in this embodiment may be a separate image processing controller, or may be integrated in the main controller of the dicing saw.
Those of skill in the art will appreciate that various operations, methods, steps in the processes, acts, or solutions discussed in the present application may be alternated, modified, combined, or deleted. Further, various operations, methods, steps in the flows, which have been discussed in the present disclosure, may also be alternated, modified, rearranged, split, combined, or deleted. Further, steps, measures, schemes in various operations, methods, procedures disclosed in the prior art and the present invention can also be alternated, changed, rearranged, decomposed, combined, or deleted.
In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in a specific situation by those skilled in the art.
In the description herein, particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
It should be understood that, although the steps in the flowcharts of the figures are shown in order as indicated by the arrows, the steps are not necessarily performed in order as indicated by the arrows. The steps are not performed in the exact order shown and may be performed in other orders unless explicitly stated herein. Moreover, at least a portion of the steps in the flow chart of the figure may include multiple sub-steps or multiple stages, which are not necessarily performed at the same time, but may be performed at different times, which are not necessarily performed in sequence, but may be performed alternately or alternately with other steps or at least a portion of the sub-steps or stages of other steps.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A method for positioning a plurality of circular workpieces for a dicing saw is characterized by comprising the following steps:
s100, controlling an image acquisition component to sequentially acquire a crude extraction point coordinate on the edge of each circular workpiece according to a preset path, and determining a crude extraction circle center coordinate of each circular workpiece;
s200, taking the crude extraction circle center coordinate of the current circular workpiece as a reference point, and acquiring a first extraction point coordinate, a second extraction point coordinate and a third extraction point coordinate of the edge of the current circular workpiece by adopting an edge extraction algorithm;
s300, determining the precise circle center coordinate of the current circular workpiece according to the first extraction point coordinate, the second extraction point coordinate and the third extraction point coordinate;
s400, determining the accuracy of the accurate circle center coordinate according to the deviation value between the accurate circle center coordinate and the crude circle center coordinate;
s500, if the accurate circle center coordinates are accurately positioned, determining whether to continue to execute the steps S200-S400 to other circular workpieces along a preset path according to the consistency between the number of the accurate circle center coordinates obtained through accumulation and the number of the preset circular workpieces until the accurate circle center coordinates of all the circular workpieces are determined, and then completing positioning.
2. The method as claimed in claim 1, wherein in step S100, controlling the image capturing component to sequentially obtain a crude extraction point coordinate on an edge of each circular workpiece according to a preset path, and determining a crude extraction circle center coordinate of each circular workpiece, includes:
controlling an image acquisition component to sequentially acquire coordinates corresponding to the most protruded positions of the arcs on the edges of the circular workpieces as crude extraction point coordinates according to a clockwise direction or a counterclockwise direction;
and determining the crude extraction circle center coordinate of each circular workpiece according to the crude extraction point coordinate and the radius corresponding to each circular workpiece.
3. The method as claimed in claim 1, wherein the step S200 of using the coarse extraction center coordinates of the current circular workpiece as a reference point comprises:
and taking the last circular workpiece along the preset path as the first current circular workpiece in accurate circle center coordinate positioning.
4. The method of claim 1, wherein the step S200 of obtaining the coordinates of the first extraction point of the current edge of the circular workpiece by using an edge extraction algorithm comprises:
driving an image acquisition assembly to move to the edge of the current circular workpiece along a first direction by taking the rough extraction circle center coordinate as a reference point;
acquiring image information of the circular workpiece in real time, and calculating a gray average value corresponding to the current image information;
and if the gray average value corresponding to the image information of the current position is smaller than the gray average value corresponding to the image information of the previous position, stopping moving and extracting one point of an edge as the coordinate of the first extraction point.
5. The method as claimed in claim 4, wherein the step S200 of obtaining the second coordinates of the current edge of the circular workpiece by using an edge extraction algorithm comprises:
driving an image acquisition assembly to move to the edge of the current circular workpiece along a second direction by taking the rough extraction circle center coordinate as a reference point;
acquiring image information of the circular workpiece in real time, and calculating a gray average value corresponding to the current image information;
and if the gray average value corresponding to the image information of the current position is smaller than the gray average value corresponding to the image information of the previous position, stopping moving and extracting one point of an edge as the coordinate of the second extraction point.
6. The method as claimed in claim 5, wherein the step S200 of obtaining the coordinates of the third extraction point of the current edge of the circular workpiece by using an edge extraction algorithm comprises:
driving an image acquisition assembly to move to the edge of the current circular workpiece along a third direction by taking the crude extraction circle center coordinate as a reference point;
acquiring image information of the circular workpiece in real time, and calculating a gray average value corresponding to the current image information;
and if the gray average value corresponding to the image information of the current position is smaller than the gray average value corresponding to the image information of the previous position, stopping moving and extracting one point of an edge as the coordinate of the third extraction point.
7. The method of claim 6, wherein the second direction is parallel to the first direction, and the third direction is at a 90 degree angle to the first direction and the second direction;
or the included angle between the second direction and the first direction is 90 degrees, and the included angle between the third direction and the second direction is 90 degrees and is opposite to the first direction;
or the included angle between any two directions of the second direction, the third direction and the first direction is 120 degrees.
8. The method as claimed in claim 1, wherein the step S400 of determining the accuracy of the precise center coordinates according to the deviation value between the precise center coordinates and the rough center coordinates comprises:
acquiring a deviation value between the accurate circle center coordinate and the crude circle center coordinate;
if the deviation value is larger than the error threshold value, generating an alarm signal of the accurate circle center coordinate positioning error, and re-executing the step S200;
if the deviation value is smaller than or equal to an error threshold value, respectively obtaining error values of distances and radiuses from the first extraction point coordinate, the second extraction point coordinate and the third extraction point coordinate to the accurate circle center coordinate; and if the error value is smaller than the error threshold value, the current circular workpiece is accurately positioned.
9. The method for positioning multiple circular workpieces for a dicing saw according to claim 1, wherein in the step S500, if the precise circle center coordinates are accurately positioned, determining whether to continue performing the steps S200 to S400 on other circular workpieces along a preset path according to a consistency between the number of the precise circle center coordinates obtained by the accumulation and a preset number of the circular workpieces until the precise circle center coordinates of all the circular workpieces are determined, and then completing the positioning includes:
if the current accurate circle center coordinates are accurately positioned, calculating whether the number of the accurate circle center coordinates obtained through accumulation is equal to the number of the set circular workpieces or not;
if the number of the precisely-obtained circle center coordinates is less than the number of the set circular workpieces, continuing to perform the steps S200-S400 on the other circular workpieces along a preset path;
and if the number of the precisely-obtained circle center coordinates is equal to the number of the set circular workpieces, completing circle center positioning of the circular workpieces.
10. A multi-piece circular workpiece positioning system for a dicing saw, comprising:
the image acquisition assembly is arranged on the dicing saw and is used for acquiring image information of different positions of the circular workpiece;
a control unit, communicatively connected to the image acquisition assembly, for performing the steps of the method for positioning a plurality of circular workpieces for a dicing saw of any one of claims 1 to 9.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116125907A (en) * | 2023-04-20 | 2023-05-16 | 沈阳和研科技股份有限公司 | Continuous cutting method for accidental interruption of circular cutting |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06281411A (en) * | 1993-03-26 | 1994-10-07 | Honda Motor Co Ltd | Measuring method for hole position |
| JP2001328326A (en) * | 2000-05-19 | 2001-11-27 | Ricoh Co Ltd | Method and equipment for measuring plate shift, and recording medium |
| JP2005313215A (en) * | 2004-04-30 | 2005-11-10 | Laser Solutions Co Ltd | Alignment method in laser beam machining device and alignment program |
| CN101334263A (en) * | 2008-07-22 | 2008-12-31 | 东南大学 | Circular target circular center positioning method |
| CN103111763A (en) * | 2013-02-04 | 2013-05-22 | 福建省威诺数控有限公司 | Planning method of motion path of wafer cutting machine tool |
| CN103258333A (en) * | 2013-04-17 | 2013-08-21 | 东北林业大学 | Bamboo cross section extraction algorithm based on Lab color space |
| CN103729632A (en) * | 2014-01-22 | 2014-04-16 | 哈尔滨工业大学 | Round Mark point positioning method based on connected region filtering |
| CN106446894A (en) * | 2016-09-27 | 2017-02-22 | 广东技术师范学院 | Method for recognizing position of spherical object based on contour |
| JP2018100892A (en) * | 2016-12-20 | 2018-06-28 | 株式会社ニッシン | Surface checkup program for curved surface material |
| CN108717692A (en) * | 2018-04-02 | 2018-10-30 | 浙江工业大学 | A kind of cutting material method for correcting error based on ccd image processing |
| CN109583504A (en) * | 2018-12-05 | 2019-04-05 | 河北工业大学 | A kind of pcb board circular locating openings quick and precisely recognition methods of view-based access control model |
| DE102019125517A1 (en) * | 2019-09-23 | 2021-03-25 | Valeo Schalter Und Sensoren Gmbh | Estimating a yaw angle position of an active optical sensor system |
-
2022
- 2022-07-22 CN CN202210865449.9A patent/CN114923417B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06281411A (en) * | 1993-03-26 | 1994-10-07 | Honda Motor Co Ltd | Measuring method for hole position |
| JP2001328326A (en) * | 2000-05-19 | 2001-11-27 | Ricoh Co Ltd | Method and equipment for measuring plate shift, and recording medium |
| JP2005313215A (en) * | 2004-04-30 | 2005-11-10 | Laser Solutions Co Ltd | Alignment method in laser beam machining device and alignment program |
| CN101334263A (en) * | 2008-07-22 | 2008-12-31 | 东南大学 | Circular target circular center positioning method |
| CN103111763A (en) * | 2013-02-04 | 2013-05-22 | 福建省威诺数控有限公司 | Planning method of motion path of wafer cutting machine tool |
| CN103258333A (en) * | 2013-04-17 | 2013-08-21 | 东北林业大学 | Bamboo cross section extraction algorithm based on Lab color space |
| CN103729632A (en) * | 2014-01-22 | 2014-04-16 | 哈尔滨工业大学 | Round Mark point positioning method based on connected region filtering |
| CN106446894A (en) * | 2016-09-27 | 2017-02-22 | 广东技术师范学院 | Method for recognizing position of spherical object based on contour |
| JP2018100892A (en) * | 2016-12-20 | 2018-06-28 | 株式会社ニッシン | Surface checkup program for curved surface material |
| CN108717692A (en) * | 2018-04-02 | 2018-10-30 | 浙江工业大学 | A kind of cutting material method for correcting error based on ccd image processing |
| CN109583504A (en) * | 2018-12-05 | 2019-04-05 | 河北工业大学 | A kind of pcb board circular locating openings quick and precisely recognition methods of view-based access control model |
| DE102019125517A1 (en) * | 2019-09-23 | 2021-03-25 | Valeo Schalter Und Sensoren Gmbh | Estimating a yaw angle position of an active optical sensor system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116125907A (en) * | 2023-04-20 | 2023-05-16 | 沈阳和研科技股份有限公司 | Continuous cutting method for accidental interruption of circular cutting |
| CN116125907B (en) * | 2023-04-20 | 2024-01-30 | 沈阳和研科技股份有限公司 | Continuous cutting method for accidental interruption of circular cutting |
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|---|---|
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