CN114892257B - Metal material surface shaping device and shaping method - Google Patents
Metal material surface shaping device and shaping method Download PDFInfo
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- CN114892257B CN114892257B CN202210535081.XA CN202210535081A CN114892257B CN 114892257 B CN114892257 B CN 114892257B CN 202210535081 A CN202210535081 A CN 202210535081A CN 114892257 B CN114892257 B CN 114892257B
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/16—Polishing
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/16—Polishing
- C25F3/22—Polishing of heavy metals
- C25F3/26—Polishing of heavy metals of refractory metals
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Abstract
The invention discloses a metal material surface shaping device and a shaping method, wherein the metal material surface shaping device comprises an electrolyte circulation assembly and a shaping assembly, the electrolyte circulation assembly comprises a spray head, a liquid inlet conveying piece and a liquid return conveying piece, one end of the spray head is provided with a liquid outlet and a liquid return port which are adjacently arranged, electrolyte is sprayed out from the liquid outlet and flows back to a liquid return cavity from the liquid return port, the shaping assembly comprises a power supply, an electrode and a platform, the anode of the power supply is electrically connected with a metal material, and the cathode of the power supply is electrically connected with the electrode; the method for shaping the surface of the metal material is carried out by the shaping device. According to the invention, the liquid outlet is arranged adjacent to the liquid return port, the electrolyte flows back to the liquid return cavity from the liquid return port by the liquid suction power of the liquid return conveying member, and the electrolyte is concentrated in the single-point shape correction area, so that the metal material can be dissolved at fixed points, and can be accurately positioned to the actual area of the metal material to be corrected, thereby achieving the effect of high-precision shape correction.
Description
Technical Field
The invention relates to the technical field of metal material processing, in particular to a metal material surface shaping device and a shaping method.
Background
The surface flatness and roughness of the metal material are critical to the service performance of the metal material, and the traditional cutting, mechanical polishing, chemical polishing and other modes are used for processing the material, so that the defects of low efficiency, cutter loss, subsurface damage of the material, residual stress in the material and clamping deformation of the material exist, and in the related technology, the electrochemical polishing mode is adopted to overcome the defects and damage caused by mechanical acting force, but the high-precision shape modification of the surface of the metal material cannot be realized.
Disclosure of Invention
The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, the invention provides a metal material surface shaping device which can carry out high-precision shaping on the metal material surface.
The invention also provides a metal material surface modification method applying the metal material surface modification device.
According to an embodiment of the first aspect of the present invention, a metallic material surface modifying apparatus includes:
the electrolyte circulation assembly comprises a spray head, a liquid inlet conveying part and a liquid return conveying part, wherein the spray head comprises a liquid inlet cavity and a liquid return cavity, one end of the spray head is provided with a liquid outlet and a liquid return port which are adjacently arranged, the liquid outlet is communicated with the liquid inlet cavity, the liquid return port is communicated with the liquid return cavity, the liquid inlet conveying part is used for conveying electrolyte to the liquid inlet cavity so as to spray the electrolyte from the liquid outlet, and the liquid return conveying part is used for extracting the electrolyte so as to enable the sprayed electrolyte to flow back to the liquid return cavity from the liquid return port and be discharged;
the shape modifying assembly comprises a power supply, an electrode and a platform, wherein the platform is used for placing a metal material to be processed, the spray head faces towards the platform, the anode of the power supply is electrically connected with the metal material, the cathode of the power supply is electrically connected with the electrode, and the electrode is accommodated in the liquid inlet cavity and/or the liquid return cavity.
The metal material surface shaping device provided by the embodiment of the invention has at least the following beneficial effects:
according to the metal material surface shaping device, the liquid outlet is arranged adjacent to the liquid return port, the sprayed electrolyte is returned to the liquid return cavity from the liquid return port by the liquid suction power of the liquid return conveying member, the electrolyte sprayed by the spray head is concentrated in the single-point shaping area, the metal material can be dissolved at fixed points, the actual area of the metal material to be shaped can be accurately positioned, and the electrolyte is sprayed in the corresponding area, so that the effect of high-precision shaping is achieved.
According to some embodiments of the invention, the spray head comprises a first baffle wall and a second baffle wall, the sections of the first baffle wall and the second baffle wall are annular, the second baffle wall is sleeved outside the first baffle wall, a gap is arranged between the first baffle wall and the second baffle wall, one of the gap and an inner cavity of the first baffle wall is the liquid inlet cavity, and the other is the liquid return cavity.
According to some embodiments of the invention, the inner cavity of the first baffle wall is the liquid inlet cavity, the gap between the first baffle wall and the second baffle wall forms the liquid return cavity, and the liquid inlet conveying member is connected to the bottom of the spray head through a pipeline.
According to some embodiments of the invention, the electrolyte circulation assembly further comprises a liquid inlet pipe, a liquid return pipe and a liquid storage container, wherein the liquid inlet conveying member is connected to the liquid inlet pipe, the liquid return conveying member is connected to the liquid return pipe, the liquid inlet pipe and the liquid return pipe are communicated with the liquid storage container, and the liquid storage container is used for containing electrolyte.
According to some embodiments of the invention, the electrolyte circulation assembly further comprises a flow control valve connected to the feed line and/or the return line.
According to some embodiments of the invention, the spray head comprises a platform, a spray head, a drive module, a control module and a control module.
According to a second aspect of the present invention, a method for modifying a surface of a metal material includes:
acquiring an initial surface shape of a metal material to be processed, and comparing the initial surface shape with a preset surface shape to obtain a shape modification data set;
acquiring a relation function of the metal material surface removal rate and etching residence time, and obtaining a modification residence time distribution function according to the modification data set;
preparing an electrolyte and forming a metal material surface modification device according to the embodiment of the first aspect;
the surface shaping device of the metal material works to perform surface shaping of the metal material.
According to some embodiments of the invention, the step of obtaining the modified residence time distribution function comprises:
and adjusting a modification parameter to enable a relation function of the metal material surface removal rate and the etching residence time to be a linear function, wherein the modification parameter is at least one of electrolyte composition, electrolyte concentration, power supply voltage, electrolyte temperature and distance between the spray head and the platform.
According to some embodiments of the invention, the modification parameter is adjusted to make the electrolyte perform isotropic etching on the metal material, wherein the modification parameter is at least one of electrolyte composition, electrolyte concentration, power supply voltage, electrolyte temperature and distance between the spray head and the platform.
According to some embodiments of the invention, the surface of the metal material is washed and dried before the initial surface shape is obtained, and after finishing the surface modification, the surface of the metal material is washed and dried, and the surface detection is performed on the metal material, and the surface modification step is selectively repeated a plurality of times.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
The invention is further described with reference to the accompanying drawings and examples, in which:
FIG. 1 is a schematic view of a surface modification apparatus for metallic materials according to an embodiment of the present invention;
FIG. 2 is a schematic view of one embodiment of the sprinkler head of FIG. 1;
FIG. 3 is a schematic cross-sectional view of one embodiment of the sprinkler head of FIG. 1;
FIG. 4 is a schematic cross-sectional view of another embodiment of the sprinkler head of FIG. 1;
FIG. 5 is a schematic cross-sectional view of another embodiment of the sprinkler head of FIG. 1;
FIG. 6 is a surface state before the metal material is shaped;
FIG. 7 is a graph of a surface relief height profile of a metallic material prior to modification;
FIG. 8 is a schematic view of roughness of a metallic material prior to modification;
FIG. 9 is a surface state of a metal material after being modified;
FIG. 10 is a graph of a surface relief height profile of a metallic material after modification;
FIG. 11 is a schematic view of the roughness of a metal material after being shaped; .
Reference numerals:
a shaping assembly 100, a power source 110, an electrode 120, a platform 130; electrolyte circulation assembly 200, shower nozzle 210, feed liquor chamber 211, return liquor chamber 212, liquid outlet 213, return liquor mouth 214, first retaining wall 215, second retaining wall 216, connecting wall 217, feed liquor conveying member 220, return liquor conveying member 230, feed liquor pipeline 240, return liquor pipeline 250, liquid storage container 260, flow control valve 270.
Detailed Description
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the invention.
In the description of the present invention, it should be understood that references to orientation descriptions such as upper, lower, front, rear, left, right, etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description of the present invention and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention.
In the description of the present invention, the meaning of a number is one or more, the meaning of a number is two or more, and greater than, less than, exceeding, etc. are understood to exclude the present number, and the meaning of a number is understood to include the present number. The description of the first and second is for the purpose of distinguishing between technical features only and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present invention, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly and the specific meaning of the terms in the present invention can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical scheme.
In the description of the present invention, the descriptions of the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
As shown in fig. 1, in the embodiment of the present invention, a metal material surface shaping apparatus is provided, which includes an electro-shaping assembly 100 and an electrolyte circulation assembly 200, wherein the electrolyte circulation assembly 200 includes a nozzle 210, a liquid inlet conveying member 220 and a liquid return conveying member 230, the liquid inlet conveying member 220 is used for conveying electrolyte to the nozzle 210, the electrolyte is sprayed from the nozzle 210, and the liquid return conveying member 230 is used for extracting the electrolyte sprayed from the nozzle 210 to recover the electrolyte; specifically, referring to fig. 1 and fig. 2, the spray head 210 includes a liquid inlet cavity 211 and a liquid return cavity 212, one end of the spray head 210 has a liquid outlet 213 and a liquid return cavity 214 that are adjacently disposed, the liquid outlet 213 is communicated with the liquid inlet cavity 211, the liquid return cavity 214 is communicated with the liquid return cavity 212, the liquid inlet conveying member 220 conveys electrolyte to the liquid inlet cavity 211, the electrolyte is sprayed out from the liquid outlet 213 by the conveying power of the liquid inlet conveying member 220, and because the liquid outlet 213 is adjacently disposed with the liquid return cavity 214, the sprayed electrolyte flows back from the liquid return cavity 212 to the liquid return cavity 212 by the pumping power of the liquid return conveying member 230, and then is discharged from the liquid return cavity 212.
The shape modifying assembly 100 comprises a power supply 110, an electrode 120 and a platform 130, wherein the platform 130 is used for placing a metal material to be processed, the spray head 210 is arranged towards the platform 130, so that electrolyte sprayed out from the spray head 210 can contact the surface of the metal material, the anode of the power supply 110 is electrically connected with the metal material, the cathode of the power supply 110 is electrically connected with the electrode 120, and the electrode 120 is accommodated in the liquid inlet cavity 211 and/or the liquid return cavity 212. After the metal material is the positive electrode, the electrode 120 is the negative electrode, an electric field is generated between the metal material and the electrode 120, the electrolyte is concentrated in the single-point shape trimming area after being sprayed onto the surface of the metal material, an oxidant in the electrolyte dissolves the surface of the metal material, a single-point etching pit is formed on the surface of the metal material, the surface of the metal material at the single-point etching pit has higher flatness, and the effect of fixed-point flattening of the metal material is achieved, so that the shape trimming device in the embodiment can accurately position the area of the metal material needing shape trimming and carry out fine shape trimming on the metal material.
It should be noted that, in the conventional electrochemical polishing, a metal material is generally soaked in an electrolyte, and a selective solution is performed on the surface of the metal material by utilizing the combined action of an electric field and an oxidant in the electrolyte, so that the surface polishing of the metal material is realized, but the polishing mode is aimed at the whole surface of the metal material, high-precision shape modification processing cannot be performed on the surface of the metal material, and the shape and size precision of the metal material cannot be ensured. According to the metal material surface shaping device provided by the embodiment of the invention, the electrolyte sprayed by the spray head 210 is concentrated in the single-point shaping area, so that the metal material can be dissolved at fixed points, the electrolyte can be precisely positioned to the actual area of the metal material to be shaped, and the electrolyte is sprayed in the corresponding area, so that the effect of high-precision shaping is achieved, and the shaped metal material has a smooth surface and higher corrosion resistance.
It is conceivable that the cross section of the nozzle 210 may be circular, elliptical, polygonal, etc., and in one embodiment of the present invention, the cross section of the nozzle 210 is circular, the electrolyte may form a circular single-point etching pit on the surface of the metal material, and the edge of the circular single-point etching pit is smoother, which is beneficial to improving the flatness of the combined areas of different single-point etching pits, so that the boundary of the modified area of the metal material is smoother. In addition, the size of the single-point etching pit can be adjusted by changing the sectional area of the nozzle 210, for example, the sectional area of the nozzle 210 can be reduced, and the shape correction accuracy of the metal material can be further improved.
In one embodiment, as shown in fig. 3, the nozzle 210 includes a first blocking wall 215, a second blocking wall 216 and a connecting wall 217, where the first blocking wall 215 and the second blocking wall 216 are respectively located at two sides of the connecting wall 217, an inner cavity formed by the first blocking wall 215 and the connecting wall 217 is a liquid inlet cavity 211, an inner cavity formed by the second blocking wall 216 and the connecting wall 217 is a liquid return cavity 212, a liquid outlet 213 is disposed adjacent to the liquid return opening 214, and the electrolyte sprayed from the liquid inlet cavity 211 can be quickly recovered into the liquid return cavity 212.
In another embodiment, as shown in fig. 4, the nozzle 210 includes a first blocking wall 215 and a second blocking wall 216, the first blocking wall 215 and the second blocking wall 216 are both annular, the second blocking wall 216 is sleeved outside the first blocking wall 215, a gap is formed between the first blocking wall 215 and the second blocking wall 216, the gap is a liquid inlet cavity 211, an inner cavity of the first blocking wall 215 is a liquid return cavity 212, a liquid outlet 213 is annularly arranged outside the liquid return opening 214, the liquid outlet 213 is adjacently arranged with the liquid return opening 214, so that electrolyte is convenient to flow back, and the electrolyte discharged from the liquid outlet 213 can flow back into the liquid return cavity 212 easily due to the fact that the whole inner circumference of the first blocking wall 215 is annularly arranged outside the liquid return opening 214, so that the backflow efficiency of the electrolyte is improved.
In other embodiments, as shown in fig. 5, the gap between the first blocking wall 215 and the second blocking wall 216 forms the liquid return cavity 212, the inner cavity of the first blocking wall 215 is the liquid inlet cavity 211, the liquid return opening 214 is annularly arranged outside the liquid outlet 213, and the whole periphery of the first blocking wall 215 is surrounded on the inner side of the liquid return opening 214, so that the electrolyte sprayed from the liquid outlet 213 can flow back into the liquid return cavity 212 completely, loss of the electrolyte is reduced, and recycling rate of the electrolyte is improved.
Further, in order to facilitate the liquid feeding of the nozzle 210 and the liquid returning of the electrolyte, in one embodiment, the liquid feeding conveying member 220 is connected to the bottom of the nozzle 210 through a pipe, and the electrolyte enters the liquid feeding cavity 211 from the bottom of the nozzle 210 and is ejected upwards, so that the straightness of the electrolyte column ejected by the nozzle 210 and the precision of the single-point etching pit are improved, and the high-precision shape modification of the metal material is facilitated.
Fig. 6 to 11 show comparative diagrams before and after the surface modification of the high-purity tungsten, fig. 6 shows the surface state of the high-purity tungsten before the modification, from which it is known that the surface of the high-purity tungsten is flat but a large number of scratches are distributed, fig. 7 shows the highly undulating state of the surface of the high-purity tungsten before the modification, between the point P1 and the point P2, from which it is known that the undulation of the surface of the high-purity tungsten is unstable between the point P1 and the point P2, and fig. 8 shows a schematic diagram of the surface roughness of the high-purity tungsten before the modification, from which it is known that the surface roughness of the high-purity tungsten before the modification is 20.2nm. Fig. 9 shows the surface state of the high-purity tungsten after the modification, and it is known that since the dissolution of the metal is limited to the inner side of the outer edge of the showerhead 210, an etching pit having a certain depth is formed on the surface of the high-purity tungsten after the modification, fig. 10 shows the undulating state of the surface of the high-purity tungsten between the P3 point and the P4 point after the modification, and it is known that the undulation of the surface of the high-purity tungsten in the etching pit is low between the P3 point and the P4 point, and fig. 11 shows the surface roughness of the high-purity tungsten after the modification, and it is known that the surface roughness of the high-purity tungsten after the modification is 1.28nm, and the surface roughness of the high-purity tungsten after the modification is reduced, and scratches are removed. Thus, by localized spot-working of the surface of the metallic material by the spray head 210, precise shaping of the metallic material may be achieved.
The liquid return conveying member 230 is connected to the side portion of the second retaining wall 216 through a pipeline, the side portion of the second retaining wall 216 is large in area, a plurality of pipelines can be connected simultaneously, the liquid return conveying member 230 can be connected to each pipeline, the connecting positions of the pipelines and the second retaining wall 216 are uniformly distributed along the circumferential direction of the second retaining wall 216, and therefore different areas of the liquid return port 214 can be subjected to liquid suction effect of the liquid return conveying member 230, and the liquid return conveying member 230 is more uniform and thorough in electrolyte suction effect.
In addition, the bottom of the nozzle 210 may be connected with a plurality of pipes, each pipe may be connected with the liquid inlet conveying member 220, and the liquid inlet conveying members 220 may be used for conveying liquid to the liquid inlet cavity 211 independently or in combination, and by adjusting the working number and working power of the liquid inlet conveying members 220, and the working number and working power of the liquid return conveying members 230, the electrolyte amount sprayed from the liquid outlet 213 and the electrolyte amount returned from the liquid return port 214 are kept in dynamic balance, so as to avoid the situation that the electrolyte has insufficient dissolving strength for the metal material or excessive loss of the electrolyte.
As shown in fig. 1, the electrolyte circulation assembly 200 further includes a liquid inlet pipe 240, a liquid return pipe 250 and a liquid storage container 260, the liquid inlet conveying member 220 is connected to the liquid inlet pipe 240, the liquid return conveying member 230 is connected to the liquid return pipe 250, both the liquid inlet pipe 240 and the liquid return pipe 250 are communicated with the liquid storage container 260, the liquid storage container 260 is used for containing electrolyte, the electrolyte in the liquid storage container 260 is conveyed to the liquid inlet cavity 211 through the liquid inlet pipe 240 under the conveying action of the liquid inlet conveying member 220, the electrolyte flowing back from the liquid return cavity 212 enters the liquid return pipe 250 and flows to the liquid storage container 260 for storage under the conveying action of the liquid return conveying member 230, so that the recycling of the electrolyte is realized, and the resource utilization rate is high.
In addition, a filter is disposed between the liquid return pipe 250 and the liquid storage container 260, and the filter is used for filtering impurities in the returned electrolyte, so as to maintain the purity of the electrolyte in the liquid storage container 260.
The electrolyte circulation assembly 200 further includes a flow control valve 270, where the flow control valve 270 is connected to the liquid inlet pipe 240 and/or the liquid return pipe 250, and the flow control valve 270 is used for adjusting the liquid inlet flow of the electrolyte and the liquid return flow of the electrolyte, and by adjusting the flow control valve 270, the amount of the electrolyte sprayed from the liquid outlet 213 of the spray head 210 and the amount of the electrolyte recovered from the liquid return port 214 can be dynamically balanced in unit time, so as to reduce the electrolyte loss.
The metal material surface shaping device further comprises a driving module, wherein the driving module is connected with the platform 130 or the spray head 210 and is used for driving the spray head 210 or the platform 130 to move relatively, the driving module can be a mechanical arm, a multi-axis module and the like, and the driving module can drive the platform 130 or the spray head 210 to move along different directions. For example, in one embodiment, the driving module is connected with the platform 130 and drives the platform 130 to move or rotate in a horizontal plane, the metal material and the spray head 210 change relative positions in the horizontal plane, the spray head 210 can spray electrolyte towards different positions of the metal material so as to accurately shape the different positions of the metal material, and the driving module drives the platform 130 to move along a preset movement track, so that the shape of the corresponding area on the surface of the metal material can be modified; in another embodiment, the driving module is connected to the platform 130, and drives the platform 130 to lift in the vertical direction, so as to change the distance between the metal material and the nozzle 210, and adjust the dissolution strength of the electrolyte to the metal material.
The invention also provides a metal material surface shaping method, which comprises the following steps:
acquiring an initial surface shape of a metal material to be processed, and comparing the initial surface shape with a preset surface shape to obtain a modified data set;
acquiring a relation function of the metal material surface removal rate and etching residence time, and acquiring a modification residence time distribution function according to the modification data set;
preparing electrolyte and forming the metal material surface modification device;
the surface shaping device of the metal material works to shape the surface of the metal material.
Firstly, selecting a preset surface shape, wherein the preset surface shape is a final surface shape after the metal material is modified, inputting a data set of the preset surface shape into a system module, measuring the initial surface shape of the metal material through a white light interferometer, a laser interferometer and the like to obtain a data set of the initial surface shape of the metal material, and comparing the data set of the initial surface shape with the data set of the preset surface shape by the system module to obtain a modified data set, wherein the modified data set is a set of height differences needing to be modified in the direction of electrolyte injection.
The surface removal rate of the metal material (the depth of the single-point etching pit formed on the surface of the metal material) is different for different types of metal materials, and the removal rate is related to the time (etching residence time) of the nozzle 210 at the same modification point of the metal material, namely, a single pit removal function, and then according to the modification data set, the single pit removal function can be calculated as a modification residence time distribution function, so that the time required for the nozzle 210 to reside at different modification points of the metal material can be known.
And configuring corresponding types of electrolyte to match a single pit removal function, injecting the electrolyte into an electrolyte container, starting the liquid inlet conveying member 220 and the liquid return conveying member 230, enabling the electrolyte to circulate stably, controlling the residence time of the spray head 210 at corresponding shaping points according to a shaping residence time distribution function, enabling the spray head 210 to move according to a preset track, and finishing shaping of a shaping area required by the metal material to obtain a preset surface shape.
The pit removal function is related to parameters such as the composition of the electrolyte, the concentration of the electrolyte, the voltage level of the power supply 110, the temperature of the electrolyte, and the distance between the showerhead 210 and the metal material. For example, the stronger the oxidizing ability of the oxidizing agent in the electrolyte, the higher the concentration of the oxidizing agent in the electrolyte, the higher the temperature of the electrolyte, the greater the removal rate per unit time; the greater the voltage of the power supply 110, the smaller the distance between the showerhead 210 and the metallic material, and the greater the removal rate per unit time. Therefore, the single pit removal function is affected by a plurality of factors, and can be obtained by setting the composition, concentration, temperature of the electrolyte, voltage of the power supply 110, the distance between the nozzle 210 and the metal material, and the like, and measuring the removal rate of the nozzle 210 residing on the surface of the metal material for different times.
In one embodiment, the step of obtaining the modification residence time distribution function includes that the relation function between the metal material surface removal rate and the etching residence time is a linear function by adjusting modification parameters, so that the calculation amount and the calculation difficulty of the etching residence time distribution are reduced, and the calculation efficiency of a system module is improved. The above-described modification parameters include at least one of a composition of the electrolyte, a concentration of the electrolyte, a voltage level of the power supply 110, a temperature of the electrolyte, and a distance between the showerhead 210 and the metal material.
In addition, the metal material has the characteristic of isotropic etching in the corresponding modification parameter range, namely, in the etching process, different crystal faces of the material show the same etching rate, and the material has higher flatness in the isotropic etching area. In one embodiment of the present invention, the step of obtaining the modification resident distribution time function further includes adjusting modification parameters to isotropically etch the surface of the metal material by the electrolyte, the modification parameters including at least one of a composition of the electrolyte, a concentration of the electrolyte, a voltage level of the power supply 110, a temperature of the electrolyte, and a distance between the showerhead 210 and the metal material.
It should be noted that, in the shaping process, the power supply 110 and the driving module are turned on simultaneously, and the nozzle 210 or the platform 130 starts to move, so that the nozzle 210 moves along a preset track relative to the metal material to shape the metal material. An overlapping area is arranged between adjacent shape-modifying etching pits so as to avoid fracture between the adjacent shape-modifying etching pits and influence the flatness of the metal surface.
In addition, before the initial surface shape of the metal material is obtained, the surface of the metal material is cleaned and dried to remove impurities on the surface of the metal material and residual cleaning liquid, so that the impurities or the cleaning liquid are prevented from affecting the obtaining precision of the initial surface shape. The cleaning liquid can be absolute ethyl alcohol, and is cleaned by ultrasonic, and then is put into an oven for drying.
After finishing the single surface shaping, the metal material is taken down from the platform 130, the cleaning liquid on the surface of the metal material is removed by ultrapure water, then ultrasonic cleaning is carried out, and finally the metal material is put into an oven for drying. The method comprises the steps of measuring and observing the surface shape of a metal material by a scanning electron microscope and an atomic force microscope, measuring the height set of the surface, obtaining the surface state of the metal material after shape modification, terminating shape modification according to the measured surface shape modification height set of the metal material, and selectively repeating the surface shape modification step for a plurality of times if a shape modification substandard area exists so as to ensure shape modification precision, wherein the surface shape modification step refers to a processing flow of moving and modifying a spray head relative to the metal material according to corresponding tracks after a shape modification data set and an etching residence time distribution function are obtained.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present invention. Furthermore, embodiments of the invention and features of the embodiments may be combined with each other without conflict.
Claims (9)
1. A method for modifying a surface of a metallic material, comprising:
obtaining an initial surface shape of a metal material to be processed, comparing the initial surface shape with a preset surface shape, and obtaining a shape modification data set, wherein the preset surface shape is a final surface shape of the metal material after shape modification, and the shape modification data set is a set of height differences needing shape modification in the direction of electrolyte injection;
obtaining a single pit removal function of the metal material surface removal rate and etching residence time, wherein the metal material surface removal rate is the depth of a single point etching pit formed on the metal material surface, the etching residence time is the residence time of a spray head at the same repair point of the metal material, and the single pit removal function is calculated as a modification residence time distribution function according to the modification data set;
configuring electrolyte to match the single pit removal function and form a metal material surface modification device;
the metal material surface shaping device comprises an electrolyte circulation assembly and a shaping assembly, wherein the electrolyte circulation assembly comprises a spray head, a liquid inlet conveying member and a liquid return conveying member, the spray head comprises a liquid inlet cavity and a liquid return cavity, one end of the spray head is provided with a liquid outlet and a liquid return port which are adjacently arranged, the liquid outlet is communicated with the liquid inlet cavity, the liquid return port is communicated with the liquid return cavity, the liquid inlet conveying member is used for conveying electrolyte to the liquid inlet cavity so that the electrolyte is sprayed out from the liquid outlet, and the liquid return conveying member is used for extracting the electrolyte so that the sprayed electrolyte flows back to the liquid return cavity from the liquid return port and is discharged; the shape modifying assembly comprises a power supply, an electrode and a platform, wherein the platform is used for placing a metal material to be processed, the spray head is arranged towards the platform, the anode of the power supply is electrically connected with the metal material, the cathode of the power supply is electrically connected with the electrode, and the electrode is accommodated in the liquid inlet cavity and/or the liquid return cavity; and injecting electrolyte into the electrolyte container, starting the liquid inlet conveying part and the liquid return conveying part, enabling the electrolyte to circulate stably, controlling the residence time of the spray head at the corresponding shaping point according to the shaping residence time distribution function, enabling the spray head to move along a preset track, and finishing shaping of a shaping area required by the metal material to obtain the preset surface shape.
2. The method of claim 1, wherein the step of obtaining the modification residence time distribution function comprises:
and adjusting a modification parameter to enable a relation function of the metal material surface removal rate and the etching residence time to be a linear function, wherein the modification parameter is at least one of electrolyte composition, electrolyte concentration, power supply voltage, electrolyte temperature and distance between the spray head and the platform.
3. The method of claim 1, wherein the modification parameters are adjusted to cause the electrolyte to isotropically etch the metal material, the modification parameters being at least one of electrolyte composition, electrolyte concentration, supply voltage, electrolyte temperature, and spacing of the showerhead from the platen.
4. The method of claim 1, wherein the surface of the metal material is washed and dried before the initial surface shape is obtained, and after the surface modification is completed, the surface of the metal material is washed and dried, and the surface of the metal material is inspected, and the surface modification step is selectively repeated a plurality of times.
5. The method according to any one of claims 1 to 4, wherein the nozzle comprises a first baffle wall and a second baffle wall, the sections of the first baffle wall and the second baffle wall are annular, the second baffle wall is sleeved outside the first baffle wall, a gap is formed between the first baffle wall and the second baffle wall, and one of the gap and an inner cavity of the first baffle wall is the liquid inlet cavity, and the other is the liquid return cavity.
6. The method of claim 5, wherein the inner cavity of the first blocking wall is the liquid inlet cavity, the gap between the first blocking wall and the second blocking wall forms the liquid return cavity, and the liquid inlet conveying member is connected to the bottom of the nozzle through a pipeline.
7. The method of claim 5, wherein the nozzle comprises a first blocking wall, a second blocking wall and a connecting wall, the first blocking wall and the second blocking wall are respectively connected to two sides of the connecting wall, an inner cavity formed by the first blocking wall and the connecting wall is the liquid inlet cavity, and an inner cavity formed by the second blocking wall and the connecting wall is the liquid return cavity.
8. The method of claim 5, wherein the electrolyte circulation assembly further comprises a liquid inlet pipe, a liquid return pipe and a liquid storage container, the liquid inlet conveying member is connected to the liquid inlet pipe, the liquid return conveying member is connected to the liquid return pipe, the liquid inlet pipe and the liquid return pipe are both communicated with the liquid storage container, and the liquid storage container is used for containing electrolyte.
9. The method of claim 8, wherein the electrolyte circulation assembly further comprises a flow control valve connected to the feed line and/or the return line.
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