CN114890075A - Device and method for monitoring walking state of air transport trolley - Google Patents
Device and method for monitoring walking state of air transport trolley Download PDFInfo
- Publication number
- CN114890075A CN114890075A CN202210469065.5A CN202210469065A CN114890075A CN 114890075 A CN114890075 A CN 114890075A CN 202210469065 A CN202210469065 A CN 202210469065A CN 114890075 A CN114890075 A CN 114890075A
- Authority
- CN
- China
- Prior art keywords
- walking state
- threshold
- condition
- information
- walking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 34
- 238000012544 monitoring process Methods 0.000 title claims abstract description 30
- 230000002159 abnormal effect Effects 0.000 claims abstract description 51
- 238000012806 monitoring device Methods 0.000 claims abstract description 8
- 239000004065 semiconductor Substances 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 230000001133 acceleration Effects 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 8
- 238000009434 installation Methods 0.000 description 6
- 238000005299 abrasion Methods 0.000 description 3
- 230000007774 longterm Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Emergency Alarm Devices (AREA)
Abstract
The invention provides a device and a method for monitoring the walking state of an air transport trolley, which are applied to the technical field of semiconductor wafer transmission control. Wherein, air transport trolley's walking state monitoring devices includes: the sensor module is arranged above the walking substrate and used for acquiring the motion information of the air transport trolley in real time in the running process of the air transport trolley and acquiring the walking state information of the air transport trolley according to the motion information; the judging module is used for judging the abnormal condition of the operation track according to the walking state information and a preset strategy, wherein the preset strategy comprises the corresponding relation between the walking state information and the abnormal condition of the operation track; the reminding module is used for sending out corresponding reminding information according to the abnormal condition of the operation track. The motion information of the air transport trolley is acquired by newly adding the sensor module, the running state of the air transport trolley can be automatically monitored, and the problem that the transportation safety of the wafer box is influenced due to the abnormal running track is solved.
Description
Technical Field
The specification relates to the technical field of semiconductor wafer transmission control, in particular to a device and a method for monitoring the walking state of an air transport trolley.
Background
The semiconductor integrated circuit manufacturing factory has a high degree of automation, in which the wafer cassette is transported and positioned on the production line according to actual demands. At present, the wafer box is generally transported by using an air transport trolley, so that the wafer box is accurately and safely transported to a specified position.
However, in the process of transporting the wafer box by the air transportation trolley, no scheme for automatically monitoring the working state of the operation track exists, and manual visual inspection is generally needed. The long-term use of the operation track can cause the problems of deformation and the like of different degrees to the operation track, particularly, the problem of poor fracture or abrasion is easily caused, and the air transportation trolley can not stably operate, so that the safety of the wafer box in the transportation process is influenced.
Based on the above, the present application provides a technical solution to solve the above technical problems.
Disclosure of Invention
In view of this, the embodiments of the present specification provide a device for monitoring a traveling state of an air transportation cart, which can monitor information of the traveling state of the air transportation cart in a moving process in real time, and discover whether an abnormal condition exists in a running track in time by monitoring the information of the traveling state, so as to improve safety of a wafer cassette in the transporting process.
The embodiment of the specification provides the following technical scheme:
an embodiment of the present disclosure provides a traveling state monitoring device for an aerial transportation cart, which is applied to a semiconductor wafer transfer system, and includes: the device comprises a sensor module, a judging module and a reminding module;
the sensor module is arranged above the walking substrate and used for acquiring the motion information of the air transport trolley in real time in the running process of the air transport trolley and acquiring the walking state information of the air transport trolley according to the motion information;
the judging module is used for judging the abnormal condition of the operation track according to the walking state information and a preset strategy, wherein the preset strategy comprises the corresponding relation between the walking state information and the abnormal condition of the operation track;
the reminding module is used for sending out corresponding reminding information according to the abnormal condition of the operation track.
The embodiment of the present specification further provides a method for monitoring a traveling state of an air transportation vehicle, including:
acquiring motion information of the air transport trolley in real time, and acquiring walking state information of the air transport trolley according to the motion information;
judging the abnormal conditions of the operation track according to the walking state information and a preset strategy, wherein the preset strategy comprises the corresponding relation between the walking state information and the abnormal conditions of the operation track;
and sending corresponding reminding information according to the abnormal condition of the running track.
Compared with the prior art, the beneficial effects that can be achieved by the at least one technical scheme adopted by the embodiment of the specification at least comprise:
through newly adding the sensor module, can acquire the motion information of air transportation dolly in the operation in real time to realize carrying out automated monitoring to the walking state information of air transportation dolly, can improve the monitoring efficiency to air transportation dolly walking state information, avoided because of factors such as orbit anomaly to the harmful effects that the walking state of air transportation dolly produced, thereby guaranteed the transportation security of wafer box.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a walking state monitoring device of an air transportation vehicle provided in an embodiment of the present specification;
fig. 2 is a comparison diagram of a normal state and an abnormal state of a track guide surface of a device for monitoring a traveling state of an aerial transportation vehicle provided in an embodiment of the present disclosure;
fig. 3 is a comparison diagram of a normal state and an abnormal state of a track running surface of a device for monitoring a running state of an aerial transportation trolley provided in an embodiment of the present disclosure;
fig. 4 is a schematic rail wear diagram of a device for monitoring a traveling state of an aerial transportation vehicle according to an embodiment of the present disclosure;
fig. 5 is a flowchart of a method for monitoring a traveling state of an air transportation vehicle according to an embodiment of the present disclosure.
Detailed Description
The embodiments of the present application will be described in detail below with reference to the accompanying drawings.
The following description of the embodiments of the present application is provided by way of specific examples, and other advantages and effects of the present application will be readily apparent to those skilled in the art from the disclosure herein. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. The present application is capable of other and different embodiments and its several details are capable of modifications and/or changes in various respects, all without departing from the spirit of the present application. It should be noted that the features in the following embodiments and examples may be combined with each other without conflict. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It is noted that various aspects of the embodiments are described below within the scope of the appended claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the present application, one skilled in the art should appreciate that one aspect described herein may be implemented independently of any other aspects and that two or more of these aspects may be combined in various ways. For example, an apparatus may be implemented and/or a method practiced using any number and aspects set forth herein. Additionally, such an apparatus may be implemented and/or such a method may be practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present application, and the drawings only show the components related to the present application rather than the number, shape and size of the components in actual implementation, and the type, amount and ratio of the components in actual implementation may be changed arbitrarily, and the layout of the components may be more complicated.
In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects may be practiced without these specific details.
Due to the practicability and the transportation accuracy of the air transportation trolley, the air transportation trolley is widely applied to the transportation process of the wafer box at present, but due to the fact that a device and a method for monitoring the walking state information of the air transportation trolley are not provided, when abnormal conditions are generated due to long-term use of the operation track, the abnormal conditions cannot be found in time, the air transportation trolley is easy to walk unstably in the process of transporting the wafer box, and the safety of the wafer box is affected.
In view of this, the embodiment of the present specification provides a traveling state monitoring device for an aerial transportation trolley, which can automatically monitor traveling state information of the aerial transportation trolley according to real-time motion information of the aerial transportation trolley, and send out a warning message when monitoring that the traveling state of the aerial transportation trolley is abnormal, so as to protect the stability of the operation of the aerial transportation trolley, and further improve the safety of the wafer box during transportation while ensuring the accurate transportation of the wafer box.
Technical solutions provided by the embodiments of the present application are described below with reference to fig. 1 to 5.
Example one
The embodiment of this description provides a walking state monitoring devices of air transportation dolly, includes: the device comprises a sensor module, a judging module and a reminding module;
the sensor module 1 is arranged above the walking substrate 2 and used for acquiring the motion information of the air transport trolley in real time in the running process of the air transport trolley and acquiring the walking state information of the air transport trolley according to the motion information;
the judging module is used for judging the abnormal condition of the operation track 3 according to the walking state information and a preset strategy, wherein the preset strategy comprises the corresponding relation between the walking state information and the abnormal condition of the operation track 3;
the reminding module is used for sending out corresponding reminding information according to the abnormal condition of the operation track 3.
In implementation, as shown in fig. 1, the sensor module 1 is arranged above the walking substrate 2, and in the process that the air transportation trolley runs along the running track 3, the sensor module 1 can acquire the motion information of the air transportation trolley in real time, so that the walking state information of the air transportation trolley can be timely and accurately acquired, the automatic monitoring of the air transportation trolley is realized, the monitoring efficiency is improved, and the cost of manual monitoring is reduced.
In implementation, the judgment module judges the abnormal condition of the operation track 3 according to the motion information of the air transportation trolley. Specifically, the determining module obtains the traveling state information of the air transportation vehicle output by the sensor module 1, compares the traveling state information with a preset strategy, and determines whether the operation track 3 is abnormal.
It should be noted that the sensor module 1 includes a device capable of acquiring the operation information of the air transportation vehicle, so that the installation manner, the installation number, and the like of the sensor module 1 can be determined according to actual requirements, and are not limited herein.
In implementation, the reminding module is used for sending out corresponding reminding information according to the abnormal condition of the operation track 3. According to actual requirements, the reminding information can be set to comprise any one of the following reminding information: voice alert information, animation alert information, text alert information, and icon alert information, without limitation.
In some embodiments, the determination module includes the following policies:
the judgment module sets a first threshold, a second threshold and a third threshold;
determining a first relation between the walking state information and a first threshold, and determining that the running track 3 has a guide surface fault when the first relation meets a first preset condition, wherein the first preset condition is used for representing a condition that the running track 3 has the guide surface fault;
determining a second relation between the walking state information and a second threshold, and determining that the running track 3 has a walking surface fault when the second relation meets a second preset condition, wherein the second preset condition is used for representing the condition that the running track 3 has the walking surface fault;
determining a third relation between the walking state information and a third threshold, and determining that the running track 3 is abraded when the third relation meets a third preset condition, wherein the third preset condition is used for representing the condition that the running track 3 is abraded;
the first threshold, the second threshold and the third threshold are different thresholds.
In practice, the abnormal conditions of the operation track 3 include: guide surface offset, walking surface offset and abrasion. As shown in fig. 2, the left side is a schematic diagram of the running track 3 when the guiding surface is normal, and the right side is a schematic diagram of the running track 3 when the guiding surface is abnormal, so that it can be obviously seen that a fault exists in an abnormal state, and the air transportation trolley passes over the fault and shakes due to the fault of the guiding surface; as shown in fig. 3, the left side is a schematic diagram of the running surface of the running rail 3 when the running surface is normal, and the right side is a schematic diagram of the abnormal condition of the running surface of the running rail 3, so that it can be obviously seen that a fault exists in an abnormal state, and the air transportation trolley passes over the fault and shakes due to the uneven slope; as shown in fig. 4, when there is wear on the running rail 3, the aerial delivery vehicle may shake while passing over due to the depression of the wear portion.
In implementation, the judgment module sets a first threshold, a second threshold and a third threshold according to different abnormal conditions of the operation track 3. The judging module compares the received traveling state information of the air transport trolley with a preset strategy and determines the type of the abnormal condition of the running track 3.
It should be noted that the first threshold may be set according to a specific application condition, for example, the first preset condition is set to a range, and the range may be used to express a numerical range corresponding to a difference between the traveling state information of the air transportation vehicle and the first threshold when the running track 3 has a guiding surface fault, and therefore, the first threshold is not specifically limited herein.
It should be noted that the second threshold may be set according to a specific application condition, for example, the second preset condition is set to a range, and the range may be used to express a numerical range corresponding to a difference between the traveling state information of the air transportation vehicle and the second threshold when the traveling track 3 has a traveling surface fault, and therefore, the present invention is not limited thereto.
It should be noted that the third threshold may be set according to a specific application condition, for example, the third preset condition is set to a range, and the range may be used to express a numerical range corresponding to a difference between the traveling state information of the air transportation vehicle and the third threshold when the running track 3 is worn, and therefore, the third threshold is not limited in this embodiment.
In implementation, according to different abnormal conditions of the operation track 3, the reminding module sends out different types of reminding information, so that the abnormal conditions of the operation track 3 can be located in time while the abnormality of the operation track 3 is located quickly.
In implementation, the walking state information of the air transport trolley in the operation process can be automatically monitored, whether the operation track 3 has abnormal conditions or not can be timely judged, the type of the abnormal conditions of the operation track 3 can be quickly positioned, and the monitoring efficiency is greatly improved.
In some embodiments, the sensor module 1 comprises a gyroscope sensor, and the motion information of the air transport vehicle comprises: and angular speed information of the air transport trolley in the operation process.
In some embodiments, the sensor module 1 comprises at least one gyro sensor.
In implementation, the gyroscope sensor acquires angular velocity information of the air transport trolley in the operation process, and the walking state information of the air transport trolley is calculated according to the angular velocity information. By using the gyroscope sensor, the obtained motion information is slightly influenced by external factors, the measurement precision is higher, and the information is accurate. Meanwhile, the gyroscope sensor is economical and practical in price and high in cost performance.
It should be noted that the gyro sensor is a device capable of acquiring the motion state of the air transportation vehicle, and therefore, the installation manner and the installation number of the gyro sensor may be set according to actual requirements, which is not limited herein.
In some embodiments, the sensor module 1 comprises a vibration sensor, and the motion information of the air transportation vehicle comprises: vibration parameters of the air transportation trolley.
In some embodiments, the sensor module 1 comprises at least one vibration sensor.
In some embodiments, the vibration sensor comprises any one of: displacement sensor, velocity sensor, acceleration sensor.
In implementation, the vibration sensor obtains the motion information of the air transport trolley through the direct distance change between the end part of the sensor and the air transport trolley, and calculates the walking state information of the air transport trolley. The vibration sensor is simple to install and has strong adaptability, so that the vibration sensor is suitable for most of the environmental conditions of machines.
It should be noted that the vibration sensor is a device capable of acquiring a motion state of the air transportation vehicle, and therefore, an installation manner and an installation number of the vibration sensor may be set according to actual requirements, which is not limited herein.
Example two
The embodiment of the present specification further provides a method for monitoring a traveling state of an aerial transportation trolley, which is characterized in that the method for monitoring the traveling state of the aerial transportation trolley includes:
acquiring motion information of the air transport trolley in real time, and acquiring walking state information of the air transport trolley according to the motion information;
judging the abnormal situation of the operation track 3 according to the walking state information and a preset strategy, wherein the preset strategy comprises the corresponding relation between the walking state information and the abnormal situation of the operation track 3;
and sending out corresponding reminding information according to the abnormal condition of the running track 3.
In implementation, as shown in fig. 5, in the process that the air transportation trolley runs along the running track 3, the motion information of the air transportation trolley is obtained in real time, so that the walking state information of the air transportation trolley is timely and accurately obtained. And judging whether the running track 3 is abnormal or not according to the comparison between the running state information of the air transport trolley and a preset strategy.
In implementation, according to the actual application requirement, the reminding information can be set to include any one or more of the following reminding information: voice prompt information, animation prompt information, character prompt information and icon prompt information.
In some embodiments, the method for monitoring the walking state of the air transportation vehicle further comprises: acquiring a first threshold, a second threshold and a third threshold;
determining a first relation between the walking state information and a first threshold, and determining that the running track 3 has a guide surface fault when the first relation meets a first preset condition, wherein the first preset condition is used for representing a condition that the running track 3 has the guide surface fault;
determining a second relation between the walking state information and a second threshold, and determining that the running track 3 has a walking surface fault when the second relation meets a second preset condition, wherein the second preset condition is used for representing the condition that the running track 3 has the walking surface fault;
determining a third relation between the walking state information and a third threshold, and determining that the running track 3 is abraded when the third relation meets a third preset condition, wherein the third preset condition is used for representing the condition that the running track 3 is abraded;
the first threshold, the second threshold and the third threshold are different thresholds.
In some embodiments, the motion information comprises: and angular speed information of the air transport trolley in the operation process.
In some embodiments, the motion information comprises: vibration parameters of the air transportation trolley.
In practice, the abnormal conditions of the operation track 3 include: guide surface offset, walking surface offset and abrasion. When the running track 3 is abnormal, the influence on the running of the air transport vehicle is different according to the position of the abnormal condition. Specifically, three different thresholds, namely a first threshold, a second threshold and a third threshold, are set according to different abnormal conditions of the operation track 3. The type of the abnormal condition of the running track 3 is determined by comparing the running state information of the air transport trolley with a preset strategy.
In implementation, according to the different abnormal types of the operation track 3, the control unit sends different types of reminding information, so that the abnormal condition of the operation track 3 can be timely positioned when the operation track 3 is positioned rapidly and is abnormal, and the monitoring efficiency of the safety transportation of the air transport trolley is greatly improved.
The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments can be referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the method embodiments described later, since they correspond to the system, the description is simple, and for the relevant points, reference may be made to the partial description of the system embodiments.
The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present application should be covered within the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. A walking state monitoring device of an aerial transportation trolley is applied to a semiconductor wafer conveying system, and is characterized by comprising: the device comprises a sensor module, a judging module and a reminding module;
the sensor module is arranged above the walking substrate and used for acquiring the motion information of the air transport trolley in real time in the running process of the air transport trolley and acquiring the walking state information of the air transport trolley according to the motion information;
the judging module is used for judging the abnormal condition of the running track according to the walking state information and a preset strategy, wherein the preset strategy comprises the corresponding relation between the walking state information and the abnormal condition of the running track;
the reminding module is used for sending corresponding reminding information according to the abnormal condition of the operation track.
2. The device for monitoring the walking state of the air transportation vehicle as claimed in claim 1, wherein the judging module comprises the following strategies:
the judging module is used for setting a first threshold, a second threshold and a third threshold;
determining a first relation between the walking state information and the first threshold, and determining that the running track has a guide surface fault when the first relation meets a first preset condition, wherein the first preset condition is used for representing a condition that the running track has the guide surface fault;
determining a second relation between the walking state information and the second threshold, and determining that the running rail has a walking surface fault when the second relation meets a second preset condition, wherein the second preset condition is used for representing a condition that the running rail has the walking surface fault;
determining a third relation between the walking state information and the third threshold, and determining that the running track is abraded when the third relation meets a third preset condition, wherein the third preset condition is used for representing a condition that the running track is abraded;
wherein the first threshold, the second threshold and the third threshold are different thresholds.
3. The device for monitoring the walking state of an aerial delivery vehicle according to claim 1, wherein the sensor module comprises a gyroscope sensor, and the motion information of the aerial delivery vehicle comprises: and angular speed information of the air transport trolley in the operation process.
4. The aerial transportation cart walking state monitoring device of claim 3, wherein said sensor module comprises at least one gyroscope sensor.
5. The device for monitoring the walking state of an aerial delivery vehicle according to claim 1, wherein the sensor module comprises a vibration sensor, and the motion information of the aerial delivery vehicle comprises: vibration parameters of the aerial transportation trolley.
6. The aerial transportation cart walking condition monitoring device of claim 5, wherein said sensor module comprises at least one vibration sensor.
7. The device for monitoring the walking state of an air transportation vehicle according to claim 5, wherein the vibration sensor comprises any one of the following sensors: displacement sensor, velocity sensor, acceleration sensor.
8. A method for monitoring the walking state of an aerial transportation trolley is characterized by comprising the following steps:
acquiring motion information of the air transport trolley in real time, and acquiring walking state information of the air transport trolley according to the motion information;
judging the abnormal condition of the operation track according to the walking state information and a preset strategy, wherein the preset strategy comprises the corresponding relation between the walking state information and the abnormal condition of the operation track;
and sending corresponding reminding information according to the abnormal condition of the running track.
9. The method of monitoring the walking state of an aerial conveyance cart of claim 8, further comprising: acquiring a first threshold, a second threshold and a third threshold;
determining a first relation between the walking state information and the first threshold, and determining that the running track has a guide surface fault when the first relation meets a first preset condition, wherein the first preset condition is used for representing a condition that the running track has the guide surface fault;
determining a second relation between the walking state information and the second threshold, and determining that the running rail has a walking surface fault when the second relation meets a second preset condition, wherein the second preset condition is used for representing a condition that the running rail has the walking surface fault;
determining a third relation between the walking state information and the third threshold, and determining that the running track is abraded when the third relation meets a third preset condition, wherein the third preset condition is used for representing a condition that the running track is abraded;
wherein the first threshold, the second threshold and the third threshold are different thresholds.
10. The method of claim 8, wherein the motion information comprises: angular velocity information of the air transport trolley in the operation process;
and/or, the motion information comprises: vibration parameters of the aerial transportation trolley.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210469065.5A CN114890075B (en) | 2022-04-29 | 2022-04-29 | Walking state monitoring device and method for air transportation trolley |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210469065.5A CN114890075B (en) | 2022-04-29 | 2022-04-29 | Walking state monitoring device and method for air transportation trolley |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114890075A true CN114890075A (en) | 2022-08-12 |
| CN114890075B CN114890075B (en) | 2024-06-25 |
Family
ID=82719725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210469065.5A Active CN114890075B (en) | 2022-04-29 | 2022-04-29 | Walking state monitoring device and method for air transportation trolley |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114890075B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116960040A (en) * | 2023-09-15 | 2023-10-27 | 季华实验室 | Air transport vehicle control method, system, electronic equipment and storage medium |
| CN117923087A (en) * | 2024-03-06 | 2024-04-26 | 尊芯智能科技(苏州)有限公司 | Track and track assembly |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018165189A (en) * | 2017-03-28 | 2018-10-25 | 新日鐵住金株式会社 | Rail abnormality detection method, device, and program |
| CN110379041A (en) * | 2019-07-18 | 2019-10-25 | 亳州职业技术学院 | A kind of travel position intelligence automatic identifying method based on vehicle location |
| CN110510521A (en) * | 2019-07-16 | 2019-11-29 | 青岛港国际股份有限公司 | Automated container terminal track sling attitude detecting method, device and system |
| JP2020007143A (en) * | 2018-07-12 | 2020-01-16 | コベルコ建機株式会社 | Mobile crane |
| CN214089492U (en) * | 2020-09-28 | 2021-08-31 | 郑州江智自动化技术有限公司 | Synchronous monitoring system of bridge girder erection machine |
| CN113353802A (en) * | 2021-05-17 | 2021-09-07 | 唐山不锈钢有限责任公司 | Device and method for automatically judging degradation of crown block wheel and track |
| CN113511592A (en) * | 2021-06-30 | 2021-10-19 | 三一海洋重工有限公司 | Shore bridge monitoring method and system and shore bridge |
| CN113879799A (en) * | 2021-11-08 | 2022-01-04 | 北京京东乾石科技有限公司 | Transport vehicle attitude anomaly detection device and method and goods transport system |
| CN215709067U (en) * | 2021-06-30 | 2022-02-01 | 库卡机器人制造（上海）有限公司 | Material transportation track and material transportation system with same |
| CN114354975A (en) * | 2022-01-14 | 2022-04-15 | 雷沃工程机械集团有限公司 | System for judging abnormal motion state of engineering machinery vehicle |
-
2022
- 2022-04-29 CN CN202210469065.5A patent/CN114890075B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018165189A (en) * | 2017-03-28 | 2018-10-25 | 新日鐵住金株式会社 | Rail abnormality detection method, device, and program |
| JP2020007143A (en) * | 2018-07-12 | 2020-01-16 | コベルコ建機株式会社 | Mobile crane |
| CN110510521A (en) * | 2019-07-16 | 2019-11-29 | 青岛港国际股份有限公司 | Automated container terminal track sling attitude detecting method, device and system |
| CN110379041A (en) * | 2019-07-18 | 2019-10-25 | 亳州职业技术学院 | A kind of travel position intelligence automatic identifying method based on vehicle location |
| CN214089492U (en) * | 2020-09-28 | 2021-08-31 | 郑州江智自动化技术有限公司 | Synchronous monitoring system of bridge girder erection machine |
| CN113353802A (en) * | 2021-05-17 | 2021-09-07 | 唐山不锈钢有限责任公司 | Device and method for automatically judging degradation of crown block wheel and track |
| CN113511592A (en) * | 2021-06-30 | 2021-10-19 | 三一海洋重工有限公司 | Shore bridge monitoring method and system and shore bridge |
| CN215709067U (en) * | 2021-06-30 | 2022-02-01 | 库卡机器人制造（上海）有限公司 | Material transportation track and material transportation system with same |
| CN113879799A (en) * | 2021-11-08 | 2022-01-04 | 北京京东乾石科技有限公司 | Transport vehicle attitude anomaly detection device and method and goods transport system |
| CN114354975A (en) * | 2022-01-14 | 2022-04-15 | 雷沃工程机械集团有限公司 | System for judging abnormal motion state of engineering machinery vehicle |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116960040A (en) * | 2023-09-15 | 2023-10-27 | 季华实验室 | Air transport vehicle control method, system, electronic equipment and storage medium |
| CN116960040B (en) * | 2023-09-15 | 2023-11-24 | 季华实验室 | Air transport vehicle control method, system, electronic equipment and storage medium |
| CN117923087A (en) * | 2024-03-06 | 2024-04-26 | 尊芯智能科技(苏州)有限公司 | Track and track assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114890075B (en) | 2024-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN114890075A (en) | Device and method for monitoring walking state of air transport trolley | |
| KR101395073B1 (en) | Moving carriage system and self-diagnostic method therefor | |
| CN103826960B (en) | Train control system | |
| US8989985B2 (en) | Vehicle-based positioning system and method of using the same | |
| CN104944237B (en) | A kind of elevator self-adaption regulation system and method | |
| CN103842236B (en) | Train control system | |
| JP4931377B2 (en) | Train management system | |
| JP6586521B2 (en) | On-vehicle device and train occupation range calculation method | |
| CN105264387A (en) | Method for determining at least one speed in a rail vehicle | |
| KR101841597B1 (en) | Conveying vehicle system, method of inspecting conveying vehicle system, and inspection truck | |
| TW202028705A (en) | Temperature abnormality detection system and temperature abnormality detection method | |
| CN109383512A (en) | Method and apparatus for running automation mobile system | |
| KR101859698B1 (en) | Protectin function verification system for moving device and method thereof | |
| CN112811294B (en) | Maintenance data based on combined dashboard weather and escalator conditions | |
| US11548764B2 (en) | Selective wireless escalator data acquisition | |
| JP2005030589A (en) | Abnormality checking system for bearing with ic tag sensor in railway car | |
| TWM651596U (en) | Rail vehicle monitoring management system | |
| CN106781602B (en) | A kind of method and device showing vehicle running track | |
| CN112562323A (en) | Block chain based highway overrun overload management method and device | |
| CN110901688A (en) | System for linking alarm data of physically separated wireless sensors to a running train | |
| KR102277215B1 (en) | Method of controlling operations of transport vehicle | |
| US11214466B2 (en) | Monitoring systems for passenger conveyors | |
| KR102641202B1 (en) | Smart axial fan for predicting troble reason and for sensing rotational direction based on smart sensor and smart axial fan administration system | |
| CN117851788B (en) | Automatic wafer transmission scheduling method and system based on crown block | |
| CN113696910B (en) | Method and device for correcting lateral drift of automatic driving vehicle |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: 201306 1st Floor, No. 3-4, Lane 1775, Qiushan Road, Lingang New Area, China (Shanghai) Pilot Free Trade Zone, Pudong New Area, Shanghai Applicant after: Mifei Technology (Shanghai) Co.,Ltd. Address before: 200131 floor 1, No. 3-4, Lane 1775, Qiushan Road, Lingang xinpian District, China (Shanghai) pilot Free Trade Zone, Pudong New Area, Shanghai Applicant before: MI FEI INDUSTRIAL (SHANGHAI) Co.,Ltd. |
|
| GR01 | Patent grant |