CN114888658B - Round corner processing method of ITO target - Google Patents
Round corner processing method of ITO target Download PDFInfo
- Publication number
- CN114888658B CN114888658B CN202210245382.9A CN202210245382A CN114888658B CN 114888658 B CN114888658 B CN 114888658B CN 202210245382 A CN202210245382 A CN 202210245382A CN 114888658 B CN114888658 B CN 114888658B
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- target
- clamping
- grinding
- electromagnetic chuck
- target material
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- 238000003672 processing method Methods 0.000 title abstract description 5
- 238000000034 method Methods 0.000 claims abstract description 17
- 238000005498 polishing Methods 0.000 claims abstract description 8
- 239000013077 target material Substances 0.000 claims description 37
- 230000007704 transition Effects 0.000 claims description 3
- 238000003754 machining Methods 0.000 claims description 2
- 238000007688 edging Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0092—Grinding attachments for lathes or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/02—Bench grinders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model discloses a fillet processing method of an ITO target, which aims to reduce the operation difficulty when the target is clamped, and adopts the technical scheme that: the electromagnetic chuck is arranged on the grinding machine; the clamping assembly comprises 2 clamping blocks, wherein the 2 clamping blocks are oppositely arranged, and a clamping space is formed between the two clamping blocks; the clamping blocks can be sucked tightly by the electromagnetic chuck; the 2 clamping blocks are connected with an elastic device; the method comprises the following steps: inserting the target into the clamping space, expanding the clamping space, and driving the clamping block to reset and clamp the target by the elastic device; starting an electromagnetic chuck, and tightly sucking 2 clamping blocks by the electromagnetic chuck; starting a grinding machine, and grinding the top side of the target by a grinding wheel of the grinding machine; after polishing the target, closing the grinder and the electromagnetic chuck, and taking down the target, and belongs to the technical field of target processing.
Description
Technical Field
The utility model belongs to the technical field of target processing, and particularly relates to a fillet processing method of an ITO target.
Background
In the production process of the target, the edging process is carried out to ensure that the target meets the production requirement; the edging process, that is, polishing the side edge of the target material, is generally realized by a CNC or grinding machine.
When the edging process is carried out, the target is clamped by a clamp, so that the target is vertically arranged, and the top edge of the target is polished by a grinding wheel of a CNC or grinding machine; during polishing, the side face of the target material can be polished, or the edge of the side face of the target material is ground into a round angle.
The planar target edging and chamfering assembly type clamp comprises a first clamping block and a second clamping block, wherein a first vertical clamping surface is arranged on the first clamping block, a second vertical clamping surface matched with the first vertical clamping surface is arranged on the second clamping block, a first oblique clamping surface is arranged on the first clamping block, and a second oblique clamping surface matched with the first oblique clamping surface is arranged on the second clamping block.
According to the specification and the drawing, when the edging process of the target is realized, the two vertical clamping surfaces of the first clamping block and the second clamping block for the linear cutting target are vertically clamped and fixed on a magnetic workbench of a surface grinding machine, the clamp and the target are stably fixed on the workbench of the grinding machine through magnetic force, and edging processing is performed by using a grinding wheel.
In the edging process of the target, a worker is required to hold the target so as to enable the target to be vertical, then the first clamping block and the second clamping block are operated to clamp the target, and finally the electromagnetic chuck is started; in the process, the first clamping block and the second clamping block are required to be ensured to clamp the target material at any time, or the target material is easy to incline and topple, so that the clamping work is affected; the operation process of opening the electromagnetic chuck while clamping the target by the first clamping block and the second clamping block is ensured, and the difficulty is high.
Disclosure of Invention
The utility model mainly aims to provide a fillet processing method of an ITO target, which aims to reduce the operation difficulty when the target is clamped.
According to a first aspect of the utility model, there is provided a method for machining a rounded corner of an ITO target, involving a grinding machine, an electromagnetic chuck and a clamping assembly, wherein the electromagnetic chuck is arranged on the grinding machine; the clamping assembly comprises 2 clamping blocks, wherein the 2 clamping blocks are oppositely arranged, and a clamping space is formed between the two clamping blocks; the clamping blocks can be sucked tightly by the electromagnetic chuck;
the 2 clamping blocks are connected with an elastic device, and when the clamping space is expanded, the elastic device enables the clamping blocks to have a resetting trend;
the method comprises the following steps:
inserting the target into the clamping space, expanding the clamping space, and driving the clamping block to reset and clamp the target by the elastic device;
starting an electromagnetic chuck, and tightly sucking 2 clamping blocks by the electromagnetic chuck;
starting a grinding machine, and grinding the top side of the target by a grinding wheel of the grinding machine; the grinding wheel comprises a first grinding table and a second grinding table arranged on the first grinding table, wherein the first grinding table and the second grinding table are both cylindrical and coaxially arranged, and the diameter of the first grinding table is larger than that of the second grinding table; the first grinding table and the second grinding table are connected in a smooth transition mode through a round corner structure; the round corner structure of the grinding wheel grinds the edge of the top side of the target material;
after polishing the target, closing the grinder and the electromagnetic chuck, and taking down the target.
In a particular embodiment of the utility model, the elastic means is a gas spring, which is arranged on the side of the clamping block remote from the clamping space.
In a specific embodiment of the present utility model, the electromagnetic chuck is further provided with a first groove body, and the first groove body is used for guiding the clamping block to move.
In a specific embodiment of the utility model, the electromagnetic chuck is further provided with a second groove body, and the second groove body is perpendicular to the first groove body;
the electromagnetic chuck is characterized by further comprising a limiting block, wherein the limiting block can be sucked tightly by the electromagnetic chuck;
when the target material is inserted into the clamping space, the bottom of the target material is matched with the second groove body, and the limiting block is placed in the second groove body and abuts against the side edge of the target material.
In a specific embodiment of the utility model, the clamping block is further provided with a buffer cushion, and the buffer cushion is positioned on one side of the clamping block, which is close to the clamping space.
In a specific embodiment of the present utility model, the number of the first grinding tables is 2, and the first grinding tables are respectively connected with two ends of the second grinding table.
In a specific embodiment of the utility model, the tool setting operation is carried out before the grinding wheel polishes the target material; when the tool is set, a first positioning plate is placed on the side surface of the target material, and the inner side of the first grinding table takes one side, far away from the target material, of the first positioning plate as a reference side; the top surface of the target material is provided with a second locating plate, and the bottom of the second grinding table is used for locating the reference side of one side of the second locating plate far away from the target material.
One of the above technical solutions of the present utility model has at least one of the following advantages or beneficial effects:
in the utility model, after the target is inserted into the clamping space, the target is spread out of the clamping space, the elastic device drives the clamping block to reset, so that the target can be clamped, the clamping block is not required to be manually operated by a worker to clamp the target, and the target cannot be tilted or inclined after being clamped; at this time, the staff can go to open electromagnetic chuck, has reduced the operation degree of difficulty when pressing from both sides tight target effectively.
Drawings
The utility model is further described below with reference to the drawings and examples;
FIG. 1 is a flow chart of embodiment 1 of the present utility model;
FIG. 2 is a block diagram of embodiment 1 of the present utility model with the grinding wheel removed;
FIG. 3 is a structural view of embodiment 1 of the present utility model;
FIG. 4 is a schematic view of the grinding wheel of example 1 of the present utility model in setting;
fig. 5 is another schematic view of the grinding wheel of example 1 of the present utility model in tool setting.
Detailed Description
Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only for explaining the present utility model and are not to be construed as limiting the present utility model.
Example 1
Referring to fig. 1 to 5, a method for processing a round angle of an ITO target material relates to a grinding machine, an electromagnetic chuck 1 and a clamping assembly, wherein the electromagnetic chuck 1 is arranged on the grinding machine; the clamping assembly comprises 2 clamping blocks 2, and the 2 clamping blocks 2 are oppositely arranged to form a clamping space between the two clamping blocks; the clamping blocks 2 can be sucked tightly by the electromagnetic chuck 1, namely, the clamping blocks 2 are made of metal materials which can be magnetically sucked;
the clamping blocks 2 are connected with an elastic device 3, and when the clamping space is expanded, the elastic device 3 enables the clamping blocks 2 to have a resetting trend;
the method comprises the following steps:
step 1: inserting the target A into the clamping space, expanding the clamping space, and driving the clamping block 2 to reset and clamp the target A by the elastic device 3;
step 2: opening an electromagnetic chuck 1, wherein the electromagnetic chuck 1 sucks 2 clamping blocks 2;
step 3: starting a grinding machine, and grinding the top side of the target material A by a grinding wheel 4 of the grinding machine;
the grinding wheel 4 comprises a first grinding table 41 and a second grinding table 42 arranged on the first grinding table 41, wherein the first grinding table 41 and the second grinding table 42 are both cylindrical and coaxially arranged, and the diameter of the first grinding table 41 is larger than that of the second grinding table 42; the first grinding table 41 and the second grinding table 42 are connected in a smooth transition manner through a round corner structure 43;
the round corner structure 43 of the grinding wheel 4 grinds the edge of the top side of the target material A to realize round corner processing of the target material A;
specifically, the grinding wheel 4 performs tool setting operation before grinding the target material A; when in tool setting, a first positioning plate a is placed on the side surface of the target A, and the inner side of the first grinding table 41 takes one side, far away from the target A, of the first positioning plate a as a reference side; the top surface of the target A is provided with a second positioning plate b, and the bottom of the second grinding table 42 is provided with a side reference side of the second positioning plate b, which is far away from the target A; the contact of the other parts of the grinding wheel 4 except the round corner structure 43 with the target material A can be avoided, and the influence on the surface quality of the target material A due to the processing quality problem of the grinding wheel 4 is avoided.
Step 4: after polishing the target A, closing the grinder and the electromagnetic chuck 1, and taking down the target A.
In practical application, the sequence of the steps can be adjusted according to the actual production requirement, and the embodiment does not limit the steps; the sequence of steps described in this embodiment is only one specific implementation.
In the embodiment, after the target A is inserted into the clamping space, the target A is spread out of the clamping space, the elastic device 3 drives the clamping block 2 to reset, so that the target A can be clamped, a worker does not need to manually operate the clamping block 2 to clamp the target A, and the target A cannot fall or tilt after being clamped; at this time, the staff can go to open the electromagnetic chuck 1, so that the operation difficulty in clamping the target material A is effectively reduced.
In this embodiment, the elastic device 3 may be a compression spring, a rubber block, an elastic telescopic rod, etc., which is not limited in this embodiment;
as a specific implementation of this embodiment, the elastic device 3 is a gas spring, which is disposed at a part of the clamping block 2 far away from the clamping space, and has a large adjusting range and strong resetting capability, so as to effectively ensure the clamping work;
specifically, one clamp block 2 corresponds to 3 gas springs;
in this embodiment, the correct moving direction of the clamping block 2 can be ensured by a guide rod mode or a sliding rail and sliding block mode, so that normal operation can be ensured, and the embodiment is not limited to this; as a specific implementation of this embodiment, the electromagnetic chuck 1 is further provided with a first groove body 11, where the first groove body 11 is used for guiding the clamping block 2 to move, that is, the width of the first groove body 11 is adapted to the width of the clamping block 2, so as to ensure that the guiding function is achieved.
In a specific embodiment of the present utility model, the electromagnetic chuck 1 is further provided with a second groove body 12, and the second groove body 12 is arranged perpendicular to the first groove body 11; the electromagnetic chuck also comprises a limiting block 5, wherein the limiting block 5 can be sucked tightly by the electromagnetic chuck 1; when the target A is inserted into the clamping space, the bottom of the target A is matched with the second groove body 12, the limiting block 5 is placed in the second groove body 12 and abuts against the side edge of the target A, so that the target A can be prevented from moving during polishing, and the processing effect of the target A is ensured;
the number of limiting blocks 5 can be 1, and the limiting blocks are abutted against one side of the rear end of the target A, which is positioned in the polishing direction of the grinding wheel 4; or 2, which respectively abut against two sides of the target a, which is not limited in this embodiment.
In this embodiment, the clamping block 2 is further provided with a buffer pad 21, and the buffer pad 21 is located at one side of the clamping block 2, which is close to the clamping space, so as to avoid clamping the target material a.
As a preferred embodiment, the number of the first grinding tables 41 is 2, and the two ends of the first grinding tables 41 are respectively connected with the two ends of the second grinding table 42, that is, the section of the grinding wheel 4 is i-shaped, so that the round corner processing of two edges on one side of the target material a can be realized, when the round corner processing of the other edge is performed, the target material a does not need to be converted, and only the tool setting is needed again, so that the round corner processing operation of the target material a is simpler.
While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.
Claims (4)
1. The method for machining the round angle of the ITO target is characterized by comprising a grinding machine, an electromagnetic chuck (1), a clamping assembly and a limiting block (5) capable of being sucked by the electromagnetic chuck (1), wherein the electromagnetic chuck (1) is arranged on the grinding machine, and the electromagnetic chuck (1) is further provided with a first groove body (11) for guiding the clamp block (2) to move and a second groove body (12) perpendicular to the first groove body (11); the limiting block (5) is placed in the second groove body (12) and used for abutting against the side edge of the target material (A); the clamping assembly comprises 2 clamping blocks (2), and the 2 clamping blocks (2) are oppositely arranged to form a clamping space between the two clamping blocks; the clamping block (2) can be sucked by the electromagnetic chuck (1);
the clamping blocks (2) are connected with an elastic device (3), and when the clamping space is opened, the elastic device (3) enables the clamping blocks (2) to have a resetting trend;
the method comprises the following steps:
inserting the target material (A) into the clamping space, enabling the bottom of the target material (A) to be matched with the second groove body (12), enabling the limiting block (5) to abut against the side edge of the target material (A), expanding the clamping space, and enabling the elastic device (3) to drive the clamping block (2) to reset and clamp the target material (A);
opening an electromagnetic chuck (1), wherein the electromagnetic chuck (1) sucks 2 clamping blocks (2);
starting a grinding machine, and grinding the top side of the target (A) by a grinding wheel (4) of the grinding machine; the grinding wheel (4) comprises a first grinding table (41) and a second grinding table (42) arranged on the first grinding table (41), wherein the first grinding table (41) and the second grinding table (42) are both cylindrical and coaxially arranged, and the diameter of the first grinding table (41) is larger than that of the second grinding table (42); the first grinding table (41) and the second grinding table (42) are connected in a smooth transition mode through a round corner structure (43); a round corner structure (43) of the grinding wheel (4) grinds the edge of the top side of the target material (A);
after polishing the target material (A), closing the grinding machine and the electromagnetic chuck (1) and taking down the target material (A);
wherein, the tool setting operation is carried out before the grinding wheel (4) grinds the target material (A); when in tool setting, a first positioning plate (a) is placed on the side surface of the target material (A), and the inner side of the first grinding table (41) takes one side, far away from the target material (A), of the first positioning plate (a) as a reference side; a second locating plate (b) is placed on the top surface of the target (A), and the bottom of the second grinding table (42) is used for locating the reference side of one side, far away from the target (A), of the second locating plate (b).
2. The method for rounding ITO targets according to claim 1, characterized in that the elastic means (3) are gas springs, which are arranged on the side of the clamping block (2) facing away from the clamping space.
3. The method for rounding ITO target according to claim 2, characterized in that the clamping block (2) is further provided with a cushion pad (21), the cushion pad (21) being located at a side of the clamping block (2) close to the clamping space.
4. The method for rounding an ITO target according to claim 1, wherein the number of first grinding stages (41) is 2, which are respectively connected to both ends of the second grinding stage (42).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210245382.9A CN114888658B (en) | 2022-03-13 | 2022-03-13 | Round corner processing method of ITO target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210245382.9A CN114888658B (en) | 2022-03-13 | 2022-03-13 | Round corner processing method of ITO target |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114888658A CN114888658A (en) | 2022-08-12 |
| CN114888658B true CN114888658B (en) | 2024-04-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210245382.9A Active CN114888658B (en) | 2022-03-13 | 2022-03-13 | Round corner processing method of ITO target |
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| Country | Link |
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| CN (1) | CN114888658B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2008108837A (en) * | 2006-10-24 | 2008-05-08 | Mitsubishi Electric Corp | Grinding apparatus of semiconductor wafer and method for manufacturing semiconductor device |
| CN203171428U (en) * | 2013-03-04 | 2013-09-04 | 韶关西格玛技术有限公司 | Assembled type jig for plane target material edging and chamfering machining |
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| CN110340760A (en) * | 2019-06-19 | 2019-10-18 | 广州城建职业学院 | A kind of construction sanding and polishing equipment |
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| CN209632694U (en) * | 2019-02-22 | 2019-11-15 | 重庆市万州区天金机械有限公司 | A kind of grinding device |
| CN210188545U (en) * | 2019-07-04 | 2020-03-27 | 永嘉木禾工贸有限公司 | Aperture adjustable button perforating device |
| CN211361707U (en) * | 2019-10-31 | 2020-08-28 | 福建福晶科技股份有限公司 | Optical round window sheet rounding device |
| CN212578109U (en) * | 2020-06-15 | 2021-02-23 | 新昌县天拓机械有限公司 | Lathe fixture for bearing |
| CN213258550U (en) * | 2020-06-23 | 2021-05-25 | 烟台精锐模具有限公司 | Edging device of mould processing usefulness |
| CN213673726U (en) * | 2020-10-19 | 2021-07-13 | 北方工程设计研究院有限公司 | Quick clamping device for machine manufacturing |
-
2022
- 2022-03-13 CN CN202210245382.9A patent/CN114888658B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008108837A (en) * | 2006-10-24 | 2008-05-08 | Mitsubishi Electric Corp | Grinding apparatus of semiconductor wafer and method for manufacturing semiconductor device |
| CN203171428U (en) * | 2013-03-04 | 2013-09-04 | 韶关西格玛技术有限公司 | Assembled type jig for plane target material edging and chamfering machining |
| JP2016089181A (en) * | 2014-10-29 | 2016-05-23 | 住友金属鉱山株式会社 | Cylindrical target material and method for manufacturing the same, and cylindrical sputtering target and method for manufacturing the same |
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Also Published As
| Publication number | Publication date |
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| CN114888658A (en) | 2022-08-12 |
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