CN114883240B - Low-pressure-difference steady-state vacuum chuck based on stepped conical flow channel - Google Patents
Low-pressure-difference steady-state vacuum chuck based on stepped conical flow channel Download PDFInfo
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- CN114883240B CN114883240B CN202210811710.7A CN202210811710A CN114883240B CN 114883240 B CN114883240 B CN 114883240B CN 202210811710 A CN202210811710 A CN 202210811710A CN 114883240 B CN114883240 B CN 114883240B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Abstract
The invention discloses a low-pressure-difference steady-state vacuum chuck based on a stepped conical flow channel, which belongs to the technical field of tool fixtures and comprises a top cover and a base, wherein the top of the top cover is fixedly connected with a plurality of bosses, the top of each boss is fixedly connected with the bottoms of a plurality of limiting columns, a plurality of air suction holes are also formed in each boss, each air suction hole penetrates through the boss and the top cover, an anti-skid layer is formed on the side wall of the top cover, and a plurality of positioning holes are formed in the position, close to the anti-skid layer, of the top cover; through the cooperation of the locating pin of rigid coupling on the locating hole of seting up on the top cap and the base for keep relatively stable between top cap and base, utilize the indent of seting up bottom the top cap to pass through the cooperation of sealing strip with the ring channel, further make keep stable between top cap and base, avoid chip top cap and base to take place relative movement in the course of working, ensure the bottom of suction hole and guiding gutter intercommunication all the time, make the operation that vacuum chuck can be stable.
Description
Technical Field
The invention belongs to the technical field of tool fixtures, and particularly relates to a low-pressure-difference steady-state vacuum chuck based on a stepped conical flow channel.
Background
The vacuum chuck is mainly used for positioning and clamping a machined part in machining, the positioning device is the key point for ensuring the machining precision in the machining operation process, the existing electromagnetic chuck can be used for positioning and machining magnetic substances such as iron, and the like, but the vacuum chuck is needed when non-magnetic chips such as rubber, wood, plastic and the like are machined, and the magnetic chips can also be machined by the vacuum chuck.
At present, to current vacuum chuck, chinese patent like publication number CN209273275U, its surfacing, lack certain positioner, be not convenient for the quick location of chip, low efficiency, make the position that the chip was placed inconsistent, absorbent poor stability, it is low to lead to chip machining precision, chinese patent like publication number CN211332308U, the top cap and the base separation of its vacuum chuck disk body are inconvenient, be difficult to the dismouting change, antiskid is not seted up to the lateral wall of top cap simultaneously, make the top cap at the easy landing of dismantlement in-process collision even, there is certain drawback.
Disclosure of Invention
The invention aims to provide a low-pressure-difference steady-state vacuum chuck based on a stepped conical flow channel, so as to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: a low-pressure-difference steady-state vacuum chuck based on a stepped conical flow channel comprises a top cover and a base, wherein the top of the top cover is fixedly connected with a plurality of bosses, the top of each boss is fixedly connected with the bottoms of a plurality of limiting columns, each boss is also provided with a plurality of air suction holes, each air suction hole penetrates through the boss and the top cover, the side wall of the top cover is provided with an anti-skid layer, the top of the top cover is provided with a plurality of positioning holes at positions close to the anti-skid layer, the bottom of the top cover is provided with a flow guide groove, the top of the base is also provided with a flow guide groove, the flow guide groove arranged at the bottom of the top cover corresponds to the flow guide groove arranged at the top of the base, the side wall of the base is provided with a threaded hole, the base is connected with a connector through threaded hole in a sealing manner, the flow channel of the flow guide groove along the air suction direction of the connector is in a transverse stepped conical shape, the diameter of the flow guide groove close to the connector is smaller than the diameter of the flow guide groove far away from the connector, the overall shape of the flow channel of the flow guide groove along the air suction vertical direction of the connector is a longitudinal step funnel shape, and the diameter of the flow guide groove close to the connector is smaller than that of the flow guide groove far away from the connector.
As a preferred embodiment, the thickness of the top cover is not less than 0.32mm, the thickness of the top cover is 10% -40% of that of the base, and the top cover and the base are made of six-series aluminum alloy.
In a preferable embodiment, the number of the air suction holes is not more than 240, the distance between two adjacent air suction holes is not less than 20mm, and the diameter of the air suction holes is between 1.0 and 3.5 mm.
As a preferred embodiment, the top of the base is fixedly connected with the bottoms of the positioning pins, the positioning pins are matched with the positioning holes formed in the top cover for use, the top of the base is provided with an annular groove, and the diversion groove is located on the inner side of the annular groove.
As a preferred embodiment, the distance between the bottom of the base and the bottom of the diversion trench arranged at the top of the base is not less than 0.32mm, the distance between the top of the top cover and the top of the diversion trench arranged at the bottom of the top cover is not less than 0.32mm, and the diameter of the diversion trench is between 5 and 16 mm.
As a preferred embodiment, a plurality of counter bores are formed in the top of the base, the bottoms of the counter bores penetrate through the bottom of the base, and the counter bores are located in an area formed by the diversion trenches in a staggered manner.
As a preferred embodiment, the sealing strip is detachably connected in the annular groove, the diameter of the sealing strip is not smaller than that of the annular groove, the bottom of the sealing strip is attached to the bottom of the annular groove, the top of the sealing strip is attached to the top of the pressure groove, the pressure groove is formed in the bottom of the top cover, and the diameter of the sealing strip is not smaller than that of the pressure groove.
As a preferred embodiment, the bottom of screw hole and the top of air guide hole intercommunication, and the inside working air pressure of air guide hole is between 50pa ~3200pa, seted up the connecting hole on the base, and the top of connecting hole is located the guiding gutter, the bottom of connecting hole and the lateral wall intercommunication of air guide hole, the base has the connector through screw hole sealing thread connection, the screw hole is seted up on the lateral wall of base, the bottom of connector and the top intercommunication of air guide hole.
In a preferred embodiment, the annular groove has a major arc cross-sectional shape, the pressure groove has a minor arc cross-sectional shape, and the bottom of the suction hole communicates with the guide groove.
As a preferred embodiment, the chamfer radius of the joint of the two adjacent transverse stepped tapered runners is not less than 3.7mm, the chamfer radius of the joint of the two adjacent longitudinal stepped tapered runners is between 1.3mm and 6.5mm, and the chamfer radius of the joint of the two adjacent longitudinal stepped tapered runners far away from the connector is greater than the chamfer radius of the joint of the two adjacent longitudinal stepped tapered runners close to the connector.
Compared with the prior art, the low-pressure-difference steady-state vacuum chuck based on the stepped conical flow channel, provided by the invention, at least has the following beneficial effects:
(1) the top cover and the base are kept at fixed relative positions by matching of a positioning hole formed in the top cover and a positioning pin fixedly connected to the base, the top cover and the base are further kept stable by matching of a sealing strip and an annular groove by using a pressure groove formed in the bottom of the top cover, the top cover and the base are prevented from moving relatively in the chip processing process, the bottom of an air suction hole is ensured to be communicated with a flow guide groove all the time, the vacuum chuck can stably run, the chip processing precision is improved, a chip placed on the top cover can be quickly positioned by using a limiting column, and the chip processing efficiency is higher;
(2) the anti-slip layer arranged on the side wall of the top cover is utilized, so that the top cover is more convenient to fold and unfold, the stability of the top cover during folding and unfolding is also kept, the top cover is prevented from being collided due to sliding in the moving process, the stable matching between the top cover and the base is ensured, the structure is simple, and the cost is low;
(3) the thickness of the top cover and the minimum distance between the bottom of the diversion trench and the bottom of the base are both larger than 0.32mm, so that the stability and reliability of the whole device are ensured, the heat change of the diversion trench can be caused in the process of gas pressure change, the heat transfer efficiency is improved by adopting six series aluminum alloy, the heat dissipation of the base and the top cover is facilitated, the deformation of the top cover and the base is avoided, and the precision of the whole device is ensured;
(4) when the distance between two adjacent air suction holes is not less than 20.00mm, the deviation of the adsorption capacity of each air suction hole to each chip is not more than 5% under the condition that the number of 5 air suction holes is not more than 240, so that each chip can be stably adsorbed, and the diameter range of the diversion trench is 5-16 mm, so that the flow of flowing gas in the diversion trench can be ensured, and the air suction holes can stably adsorb the chips;
(5) the sealing strip is detachably connected in the annular groove, so that the sealing strip is convenient to replace, the structure is simple, the use cost is lower, and meanwhile, the diameter of the sealing strip is not smaller than the diameters of the annular groove and the pressure groove, so that the sealing strip deforms under stress in the compression process of the sealing strip, the sealing strip can completely fill the whole annular groove and the pressure groove, the sealing stability is ensured, and the high-precision requirement is met;
(6) the cross section of the annular groove is in a major arc shape, so that after the sealing strip is placed in the annular groove, the center of gravity of the sealing groove is located in the annular groove, the sealing strip is prevented from sliding, the sealing stability is ensured, meanwhile, the cross section of the pressing groove is in a minor arc shape, the top cover is kept stable under the combined action of the positioning hole and the pressing groove, and meanwhile, the pressing groove is arranged, so that the sealing is more stable;
(7) the atmospheric pressure of air guide hole work is between 50pa ~3200pa, when the atmospheric pressure of air guide hole work is no longer than 3200pa, can ensure that the chip on all bosss can all be stably fixed, avoids taking place to rock, when the atmospheric pressure of air guide hole work is not less than 50pa, can ensure that the chip of placing on the boss can not produce the deformation because of adsorbing, ensures that the chip can not suffer destruction.
Drawings
FIG. 1 is a schematic view of the structure of the present invention;
FIG. 2 is a schematic view of the connection process between the top cover and the base according to the present invention;
FIG. 3 is a schematic top view of the base of the present invention;
FIG. 4 is a schematic cross-sectional structural perspective view of the present invention;
FIG. 5 is a schematic plan view of the present invention in cross-section;
FIG. 6 is a schematic cross-sectional structural perspective view of the base of the present invention;
FIG. 7 is a schematic cross-sectional structural plan view of the base of the present invention;
FIG. 8 is a schematic sectional structural perspective view of the top cover of the present invention;
FIG. 9 is a schematic plan view of the top cover of the present invention in section;
fig. 10 is a perspective view of the vacuum region in the working state of the present invention.
In the figure: 1. a top cover; 2. a base; 3. a boss; 4. a limiting post; 5. a suction hole; 6. an anti-slip layer; 7. positioning holes; 8. positioning pins; 9. an annular groove; 10. a diversion trench; 11. a counter bore; 12. a sealing strip; 13. pressing a groove; 14. a threaded hole; 15. an air vent; 16. connecting holes; 17. a connecting head.
Detailed Description
The present invention will be further described with reference to the following examples.
The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention. The conditions in the embodiments can be further adjusted according to specific conditions, and simple modifications of the method of the present invention based on the concept of the present invention are within the scope of the claimed invention.
Referring to fig. 1-10, the invention provides a low-pressure-difference steady-state vacuum chuck based on a stepped conical flow channel, which comprises a top cover 1 and a base 2, wherein the top of the top cover 1 is fixedly connected with a plurality of bosses 3, the top of each boss 3 is fixedly connected with the bottoms of a plurality of limiting columns 4, each boss 3 is further provided with a plurality of air suction holes 5, each air suction hole 5 penetrates through the boss 3 and the top cover 1, the side wall of the top cover 1 is provided with an anti-skid layer 6, the top of the top cover 1 is provided with a plurality of positioning holes 7 near the anti-skid layer 6, the bottom of the top cover 1 is provided with a flow guide groove 10, the top of the base 2 is also provided with a flow guide groove 10, the flow guide groove 10 arranged at the bottom of the top cover 1 corresponds to the flow guide groove 10 arranged at the top of the base 2, the side wall of the base 2 is provided with a threaded hole 14, the base 2 is in sealing threaded connection with a connector 17 through the threaded hole 14, the flow channel of the flow guide groove 10 along the air suction direction of the connector 17 is in a transverse stepped conical shape, the diameter of the flow guide groove 10 close to the connector 17 is smaller than that of the flow guide groove 10 far away from the connector 17, the overall shape of the flow channel of the flow guide groove 10 along the air suction vertical direction of the connector 17 is a longitudinal stepped funnel shape, and the diameter of the flow guide groove 10 close to the connector 17 is smaller than that of the flow guide groove 10 far away from the connector 17 (see fig. 1, 4, 5, 8 and 9); the existence of boss 3 is convenient for take out the chip that the processing was accomplished from top cap 1, guarantees that the chip is putting and gets the in-process and remain stable, and spacing post 4 then ensures to place the chip on the boss 3 and can not take place to rock, is favorable to suction hole 5 to the absorption of chip for the chip precision of processing is higher on the boss 3, and the existence of skid resistant course 6 has increaseed the roughness of top cap 1 lateral wall, then be convenient for putting of top cap 1 and get.
The thickness of the top cover 1 is not less than 0.32mm, the thickness of the top cover 1 is 10% -40% of the thickness of the base 2, and the top cover 1 and the base 2 are both made of six-series aluminum alloy (see fig. 1, 2, 4, 5, 8 and 9); in order to secure the cost and safety of the whole apparatus, the minimum thickness required for the gas sealing in the material guiding chute 10 should be determined
Where a is a constant coefficient, p is 50pa, D represents the diameter of channel 10,
representing the yield strength of the base 2 and,
representing the sealing coefficient, F representing the design coefficient, t representing the temperature reduction coefficient when the temperature is not more than 100 ℃, t taking 1.0 to obtain
Therefore, the designed minimum distance between the bottom of the diversion trench 10 and the bottom of the base 2 is not less than 0.32mm, the safety of the whole device can be ensured, the heat change of the diversion trench 10 can be caused in the gas pressure change process, and the heat transfer efficiency is improved by adopting the six-series aluminum alloy, so that the heat dissipation of the base 2 and the top cover 1 is facilitated.
The number of the air suction holes 5 is no more than 240, the distance between every two adjacent air suction holes 5 is no less than 20mm, and the diameter of each air suction hole 5 is 1.0-3.5 mm (see the figures 1, 4, 5, 8, 9 and 10); considering that the guiding grooves 10 are communicated with the plurality of air suction holes 5, the plurality of air suction holes 5 are grouped according to the distance between the tops of the air suction holes 5 and the tops of the air guide holes 15, and the distance between two adjacent groups of air suction holes 5 can be determined according to the distance between the tops of the two adjacent groups of air suction holes 5
And
a determination is made wherein L is the pitch of the adjacent two groups of suction holes 5,
representing the gas pressure at the top of one of the two groups of suction holes 5,
representing the top gas pressure of the other group of suction holes 5 of the two groups of suction holes 5, K representing the loss factor, Q representing the gas flow rate,
the pressure at the top of the gas-guiding hole 15 is shown,
which represents the pressure at the top of the suction holes 5, a represents a correction coefficient, n represents the number of sets of suction holes 5,
represents a stability factor, and
can be obtained in
Under the condition that the distance between two adjacent groups of the air suction holes 5 is not more than 3200pa, the distance is not less than 20.00mm, namely the adsorption capacity of each air suction hole 5 to the chip is not more than 1% deviation under the condition that the number of the air suction holes 5 is not more than 240, and each chip can be stably adsorbed.
The top of the base 2 is fixedly connected with the bottoms of the positioning pins 8, the positioning pins 8 are matched with the positioning holes 7 formed in the top cover 1 for use, the top of the base 2 is provided with an annular groove 9, and the diversion trench 10 is positioned inside the annular groove 9 (see fig. 1, 2, 3, 5, 6, 7, 8, 9 and 10); through locating pin 8 and locating hole 7 for top cap 1 position can be confirmed, ensures that the bottom of suction hole 5 communicates with guiding gutter 10 all the time, ensures that the device can steady operation, utilizes guiding gutter 10 to be located ring channel 9, ensures that gas can not follow top cap 1 and base 2 complex clearance and gets into in the guiding gutter 10, is favorable to suction hole 5 to carrying out stable absorption to the chip of placing on top cap 1.
The distance between the bottom of the base 2 and the bottom of the diversion trench 10 arranged at the top of the base 2 is not less than 0.32mm, the distance between the top of the top cover 1 and the top of the diversion trench 10 arranged at the bottom of the top cover 1 is not less than 0.32mm, and the diameter of the diversion trench 10 is between 4 mm and 16mm (see fig. 2, 4, 5, 6, 7, 8 and 9); the diameter of the diversion trench 10 is determined by combining design flow and design pressure with the design standard of GB/T9711-2017 steel pipes, namely the diameter is determined
Wherein
For safety factor, D represents the diameter of the guiding gutter 10, Q is the calculated flow rate,
represents the average temperature of channel 10,
which is representative of the standard pressure of the gas,
representing the average flow velocity in channel 10,
representing the temperature of the channel 10 under standard conditions,
the pressure representing the design of channel 10, and thus determiningThe range of D is 5-16 mm.
A plurality of counter bores 11 are formed in the top of the base 2, the bottoms of the counter bores 11 penetrate through the bottom of the base 2, and the counter bores 11 are all located in a region formed by the diversion trench 10 in a staggered manner (see fig. 2, 3 and 6); the counter bore 11 is utilized to ensure that the vacuum sucker is integrally and conveniently fixed, thereby being beneficial to the disassembly and the assembly of the vacuum sucker.
A sealing strip 12 is detachably connected in the annular groove 9, the diameter of the sealing strip 12 is not smaller than that of the annular groove 9, the bottom of the sealing strip 12 is attached to the bottom of the annular groove 9, the top of the sealing strip 12 is attached to the top of a pressing groove 13, the pressing groove 13 is formed in the bottom of the top cover 1, and the diameter of the sealing strip 12 is not smaller than that of the pressing groove 13 (see fig. 2, 3, 4, 5, 6, 7, 8 and 9); sealing strip 12 can be dismantled and connect in annular groove 9, then makes things convenient for the change of sealing strip 12, and the diameter of sealing strip 12 is no less than the diameter of annular groove 9 and indent 13, and when sealing strip 12 was pressed, sealing strip 12 atress warp, can fill whole annular groove 9 and indent 13 completely, ensures sealed stability.
The bottom of the threaded hole 14 is communicated with the top of the air guide hole 15, the working air pressure in the air guide hole 15 is between 50pa and 3200pa, a connecting hole 16 is formed in the base 2, the top of the connecting hole 16 is located in the flow guide groove 10, the bottom of the connecting hole 16 is communicated with the side wall of the air guide hole 15, the base 2 is connected with a connector 17 through the threaded hole 14 in a sealing and threaded mode, the threaded hole 14 is formed in the side wall of the base 2, and the bottom of the connector 17 is communicated with the top of the air guide hole 15 (see fig. 4, 5, 6 and 7); utilize screw hole 14, ensure that base 2 and connector 17 can sealed threaded connection, through screw hole 14, air guide hole 15 and connecting hole 16 for the gas in guiding gutter 10 can be smooth flow through connector 17, for ensuring that suction opening 5 can carry out stable absorption with the chip of placing on boss 3, can receive frictional resistance when considering that gas flows in the pipeline, gas flows in the pipeline and satisfies the requirement
Wherein Q is the calculated flowQuantity, C is a constant coefficient, R is the section radius of the diversion trench 10,
the pressure at the top of the gas-guiding hole 15 is shown,
the pressure at the top of the suction holes 5 is shown,
the absolute value of the change of the cross-sectional area of the top of the gas guide hole 15 and the top of the suction hole 5 is shown,
represents the energy loss coefficient, Z represents the gas compression coefficient,
denotes an absolute value of a temperature difference between the top of the gas guide hole 15 and the top of the gas suction hole 5 due to the gas flow, g denotes a gravitational acceleration, and L denotes a length of a pipe participating in the gas flow, wherein
To ensure that the top of the suction hole 5 can be stably adsorbed on the chip, it is necessary to satisfy
Wherein
And is made of
Expressing the atmospheric pressure, S is the area of one suction hole 5 in contact with a single chip, and F is not less than 500% of the gravity of the chip itself in consideration of the stability of the suction hole 5 to the chip adsorption, thereby calculating
Not more than 3200pa, can ensure that the chip on all bosss can all be stably fixed this moment, avoid taking place to rock, when the atmospheric pressure in guiding gutter 10 was crossed lowly, regard as the area of looking at with the chip just to suction opening 5 as the area of looking at this moment, at this moment
Wherein
L is the suction hole 5 and H is the thickness of the chip, for the yield strength of the chip, so
Then
Thereby combining
Can obtain the product
Not less than 50pa can prevent the chip from being damaged when
When the value of (A) is 50pa to 3200pa, the chips on all the bosses can be stably fixed.
The section of the annular groove 9 is in a major arc shape, the section of the pressure groove 13 is in a minor arc shape, and the bottom of the air suction hole 5 is communicated with the diversion groove 10 (see fig. 5, 7 and 9); the cross sectional shape that utilizes ring channel 9 is excellent arc for back in ring channel 9 is placed to sealing strip 12, and the focus of seal groove is located ring channel 9, avoids sealing strip 12 to slide, ensures sealed stability, utilizes indent 13's cross sectional shape to be inferior arc simultaneously, makes top cap 1 remain stable under locating hole 7 and indent 13's combined action, and the existence of indent 13 also makes sealed more stable simultaneously.
The chamfer radius of the joint of two adjacent transverse stepped tapered runners is not less than 3.7mm, the chamfer radius of the joint of two adjacent longitudinal stepped tapered runners is between 1.3mm and 6.5mm, and the chamfer radius of the joint of two adjacent longitudinal stepped tapered runners far away from the connector 17 is larger than the chamfer radius of the joint of two adjacent longitudinal stepped tapered runners close to the connector 17 (see fig. 2, 3, 6 and 10); through a large number of repeated tests, when the flow channel shape of the diversion trench 10 along the air suction direction of the connector 17 is a transverse step taper, the diameter of the diversion trench 10 of the connector 17 is smaller than that of the diversion trench 10 far away from the connector 17, the air pressure of the diversion trench 10 along the air suction direction of the connector 17 can be kept stable, the step taper can play a role of correcting the air pressure, the air pressure at the top of each air suction hole 5 is ensured to be consistent after the air pressure is suddenly changed, the chamfer radius of the joint of two adjacent transverse step taper flow channels is not smaller than 3.7mm, the turbulent phenomenon at the joint of the adjacent transverse step taper flow channels can be avoided, the chamfer radius of the joint of two adjacent longitudinal step tapers is between 1.3mm and 6.5mm, and the chamfer radius of the joint of the two adjacent longitudinal step taper flow channels far away from the connector 17 is larger than the chamfer radius of the joint of the two adjacent longitudinal step taper flow channels near the connector 17, the gas flow can be smooth and stable, and the pressure change is smooth.
When the device is used, the whole device is assembled, a plurality of chips are placed on the boss 3, the chips are attached to the upper surface of the boss 3 under the action of gravity, the chips are prevented from shaking on the boss 3 under the action of the limiting columns 4, the chips placed on the boss 3 are kept stable, air in the connector 17 is extracted by an external device, air in the diversion trench 10 flows out through the connecting hole 16, the air guide hole 15 and the connector 17, the air pressure in the diversion trench 10 is reduced, the chips are extruded onto the air suction holes 5 by the external atmospheric pressure, the chips cannot jump on the boss 3 in the chip processing process, the processing precision of the chips is higher, when the air pressure in the diversion trench 10 is reduced, the external atmospheric pressure can also extrude the top cover 1, the top cover 1 extrudes the sealing strip 12, the sealing strip 12 is deformed, and the sealing effect between the top cover 1 and the base 2 is better, meanwhile, the top cover 1 is prevented from shaking, the bottom of the air suction hole 5 is ensured to be communicated with the flow guide groove 10 all the time, after the chip is processed, the external device is removed to suck air in the connector 17, the air pressure in the flow guide groove 10 is recovered to be normal, and the chip is taken out conveniently at the moment.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. The utility model provides a low dropout steady state vacuum chuck based on ladder toper runner, includes top cap (1) and base (2), its characterized in that: the top of the top cover (1) is fixedly connected with a plurality of bosses (3), the top of each boss (3) is fixedly connected with the bottoms of a plurality of limiting columns (4), each boss (3) is also provided with a plurality of air suction holes (5), each air suction hole (5) penetrates through the boss (3) and the top cover (1), the side wall of the top cover (1) is provided with an anti-skid layer (6), the top of the top cover (1) is provided with a plurality of positioning holes (7) close to the anti-skid layer (6), the bottom of the top cover (1) is provided with a diversion trench (10), the top of the base (2) is also provided with a diversion trench (10), the diversion trench (10) arranged at the bottom of the top cover (1) corresponds to the diversion trench (10) arranged at the top of the base (2), the side wall of the base (2) is provided with a threaded hole (14), the base (2) is connected with a connector (17) through the threaded hole (14) in a sealing manner, the flow channel shape of the flow guide groove (10) along the air suction direction of the connector (17) is a transverse step cone, the diameter of the flow guide groove (10) close to the connector (17) is smaller than that of the flow guide groove (10) far away from the connector (17), the overall shape of the flow channel of the flow guide groove (10) along the air suction vertical direction of the connector (17) is a longitudinal step funnel shape, and the diameter of the flow guide groove (10) close to the connector (17) is smaller than that of the flow guide groove (10) far away from the connector (17).
2. The low pressure difference steady-state vacuum chuck based on the stepped tapered flow passage as claimed in claim 1, wherein: the thickness of the top cover (1) is not less than 0.32mm, the thickness of the top cover (1) is 10% -40% of that of the base (2), and the top cover (1) and the base (2) are made of six-series aluminum alloy.
3. The low pressure difference steady-state vacuum chuck based on the stepped tapered flow passage as claimed in claim 1, wherein: the number of the air suction holes (5) is no more than 240, the distance between every two adjacent air suction holes (5) is no less than 20mm, and the diameter of each air suction hole (5) is 1.0-3.5 mm.
4. The low-pressure-difference steady-state vacuum chuck based on the stepped conical flow channel as claimed in claim 1, wherein: the top of base (2) and the bottom rigid coupling of a plurality of locating pins (8), and locating pin (8) and locating hole (7) the cooperation of offering on top cap (1) use, annular groove (9) have been seted up at the top of base (2), and guiding gutter (10) are located annular groove (9) inboardly.
5. The low-pressure-difference steady-state vacuum chuck based on the stepped conical flow channel as claimed in claim 1, wherein: the distance between base (2) bottom and blast groove (10) the bottom of seting up at base (2) top is not less than 0.32mm, distance between top cap (1) top and blast groove (10) the top of seting up in top cap (1) bottom is also not less than 0.32mm, and the diameter of blast groove (10) is between 5~16 mm.
6. The low pressure difference steady-state vacuum chuck based on the stepped tapered flow passage as claimed in claim 1, wherein: a plurality of counter bores (11) are formed in the top of the base (2), the bottoms of the counter bores (11) penetrate through the bottom of the base (2), and the counter bores (11) are located in the area formed by the diversion trenches (10) in a staggered mode.
7. The low pressure difference steady-state vacuum chuck based on the stepped tapered flow passage as claimed in claim 4, wherein: can dismantle in ring channel (9) and be connected with sealing strip (12), and the diameter of sealing strip (12) is not less than the diameter of ring channel (9), and the bottom of sealing strip (12) is laminated with the bottom of ring channel (9), and the top of sealing strip (12) is laminated with the top of indent (13), and the bottom at top cap (1) is seted up in indent (13), and the diameter of sealing strip (12) is not less than the diameter of indent (13).
8. The low pressure difference steady-state vacuum chuck based on the stepped tapered flow passage as claimed in claim 1, wherein: the bottom of screw hole (14) and the top intercommunication of air guide hole (15), and the inside operating pressure of air guide hole (15) is between 50pa ~3200pa, connecting hole (16) have been seted up on base (2), and the top of connecting hole (16) is located guiding gutter (10), the bottom of connecting hole (16) and the lateral wall intercommunication of air guide hole (15), base (2) have connector (17) through screw hole (14) sealing thread connection, screw hole (14) are seted up on the lateral wall of base (2), the bottom of connector (17) and the top intercommunication of air guide hole (15).
9. The low-pressure-difference steady-state vacuum chuck based on the stepped conical flow channel as claimed in claim 4, wherein: the section of the annular groove (9) is in a major arc shape, the section of the pressure groove (13) is in a minor arc shape, and the bottom of the air suction hole (5) is communicated with the diversion groove (10).
10. The low-pressure-difference steady-state vacuum chuck based on the stepped conical flow channel as claimed in claim 1, wherein: the chamfer radius of two adjacent horizontal ladder toper runner junctions is not less than 3.7mm, the chamfer radius of two adjacent vertical ladder toper runner junctions is between 1.3mm ~6.5mm, and keeps away from the chamfer radius of two adjacent vertical ladder toper runner junctions of connector (17) and is greater than the chamfer radius of two adjacent vertical ladder toper runner junctions that are close to connector (17).
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| CN202210811710.7A CN114883240B (en) | 2022-07-12 | 2022-07-12 | Low-pressure-difference steady-state vacuum chuck based on stepped conical flow channel |
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| CN202210811710.7A CN114883240B (en) | 2022-07-12 | 2022-07-12 | Low-pressure-difference steady-state vacuum chuck based on stepped conical flow channel |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103769880A (en) * | 2012-10-25 | 2014-05-07 | 西安志越机电科技有限公司 | Special jig for major-diameter thin plate disc turning |
| CN203738423U (en) * | 2014-03-03 | 2014-07-30 | 东莞市南兴家具装备制造股份有限公司 | Vacuum adsorption device of cantilever type machining center |
| CN206084513U (en) * | 2016-08-31 | 2017-04-12 | 深圳市旺保利科技有限公司 | Processing mobile phone rear shell's vacuum clamp |
| CN106763105A (en) * | 2017-01-17 | 2017-05-31 | 宁波市峰铭日用品制造有限公司 | A kind of vacuum cup |
| CN208117657U (en) * | 2018-04-03 | 2018-11-20 | 东莞市中硕五金科技有限公司 | A kind of vacuum fixture |
| CN211053313U (en) * | 2019-11-18 | 2020-07-21 | 深圳市信濠光电科技股份有限公司 | Glass cover plate fixing mechanism |
| CN214292105U (en) * | 2020-12-18 | 2021-09-28 | 惠州威博精密科技有限公司 | Vacuum clamp for processing plate-shaped product |
| CN214771446U (en) * | 2020-12-07 | 2021-11-19 | 赣州市同兴达电子科技有限公司 | Quick-change jig for TFT (thin film transistor) processing |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN206393289U (en) * | 2017-01-13 | 2017-08-11 | 珠海菲高科技股份有限公司 | A kind of air flue type vacuum adsorption fixture |
| CN216098509U (en) * | 2021-09-17 | 2022-03-22 | 锦州神工半导体股份有限公司 | Vacuum chuck for clamping silicon part |
-
2022
- 2022-07-12 CN CN202210811710.7A patent/CN114883240B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103769880A (en) * | 2012-10-25 | 2014-05-07 | 西安志越机电科技有限公司 | Special jig for major-diameter thin plate disc turning |
| CN203738423U (en) * | 2014-03-03 | 2014-07-30 | 东莞市南兴家具装备制造股份有限公司 | Vacuum adsorption device of cantilever type machining center |
| CN206084513U (en) * | 2016-08-31 | 2017-04-12 | 深圳市旺保利科技有限公司 | Processing mobile phone rear shell's vacuum clamp |
| CN106763105A (en) * | 2017-01-17 | 2017-05-31 | 宁波市峰铭日用品制造有限公司 | A kind of vacuum cup |
| CN208117657U (en) * | 2018-04-03 | 2018-11-20 | 东莞市中硕五金科技有限公司 | A kind of vacuum fixture |
| CN211053313U (en) * | 2019-11-18 | 2020-07-21 | 深圳市信濠光电科技股份有限公司 | Glass cover plate fixing mechanism |
| CN214771446U (en) * | 2020-12-07 | 2021-11-19 | 赣州市同兴达电子科技有限公司 | Quick-change jig for TFT (thin film transistor) processing |
| CN214292105U (en) * | 2020-12-18 | 2021-09-28 | 惠州威博精密科技有限公司 | Vacuum clamp for processing plate-shaped product |
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| CN114883240A (en) | 2022-08-09 |
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