CN114883219A - Vacuum film press - Google Patents

Abstract

The application discloses vacuum membrane press includes: the film pressing device comprises a film feeding device, a recovery device and a film pressing device; the film feeding device is used for providing a plastic packaging film; the recovery device is used for recovering the plastic packaging film; the film pressing device comprises an upper cavity and a lower cavity, a vacuum cavity can be formed between the upper cavity and the lower cavity, and the plastic packaging film passes through the space between the upper cavity and the lower cavity; the film feeding device comprises a film feeding assembly, an expansion assembly and a first lifting device; the recovery device comprises a recovery assembly, a tensioning assembly and a second lifting device; the first lifting device and the second lifting device are respectively arranged at two sides of the film pressing device and are used for controlling the plastic packaging film between the upper cavity and the lower cavity to move up and down; the expansion assembly can elastically deform and is used for always expanding the plastic packaging film when the plastic packaging film is moved up and down by the first lifting device and the second lifting device; the tensioning assembly is used for stretching and compressing the plastic packaging film. The plastic packaging film in the vacuum film press keeps an expanded state through the scheme.

Description

Vacuum film press

Technical Field

The application relates to the technical field of semiconductors, in particular to a vacuum film pressing machine.

Background

Wafers are processed by a continuous process to form circuits on their surfaces, so as to complete various electronic components, and the process of wafer processing is determined by the need, and generally includes a plurality of steps such as coating, exposing, developing, etching, ion implantation, metal sputtering and cutting, and generally requires a film-pressing process for the wafer.

In the current wafer processing machine, one of the machines adopts a mechanical roller film pressing machine, and the wafer passes through an upper rolling shaft and a lower rolling shaft, so that a plastic packaging film is contacted and attached with the wafer. And the other method is to adopt a vacuum film press, and to apply pressure to the wafer through an air bag under the vacuum environment, so as to contact and attach the plastic packaging film and the wafer. The film rolling and feeding manner of the vacuum film press has the problem that the plastic packaging film is not enough in tension or is excessively stretched, and the problem becomes a technical problem which needs to be solved by the technical personnel in the field.

Disclosure of Invention

The application aims at providing a vacuum film press, so that a plastic packaging film in the vacuum film press keeps an expansion state.

The application discloses vacuum membrane press includes: the film pressing device comprises a film feeding device, a recovery device and a film pressing device; the film conveying device is used for providing a plastic packaging film; the recovery device is used for recovering the plastic packaging film; the film pressing device comprises an upper cavity and a lower cavity, a vacuum cavity can be formed between the upper cavity and the lower cavity, and the plastic packaging film passes through the space between the upper cavity and the lower cavity; the film feeding device comprises a film feeding assembly, an expansion assembly and a first lifting device; the recovery device comprises a recovery assembly, a tensioning assembly and a second lifting device; the plastic packaging film is output by the film feeding assembly, passes through the expansion assembly, the first lifting device, the film pressing device, the second lifting device and the tensioning assembly, and is recovered by the recovery assembly; the first lifting device and the second lifting device are respectively arranged at two sides of the film pressing device and are used for controlling the plastic packaging film between the upper cavity and the lower cavity to move up and down; the expansion assembly can elastically deform and is used for always expanding the plastic packaging film when the plastic packaging film is moved up and down by the first lifting device and the second lifting device; the tensioning assembly is used for stretching and compressing the plastic packaging film.

Optionally, the plastic envelope membrane have the first face and with the relative second face in first face, the first face of plastic envelope membrane is close to go up the cavity, the second face of plastic envelope membrane is close to down the cavity, the second face of plastic envelope membrane has viscidity, the expansion subassembly with first elevating gear sets up one side of the first face of plastic envelope membrane, the second elevating gear with the tensioning subassembly sets up one side of the second face of plastic envelope membrane.

Optionally, the expansion assembly includes first expansion wheel, first support, second expansion wheel, second support and elastic construction, the one end of first support with the coaxial rotatable fixing of one end of second support, first expansion wheel sets up the other end of first support, second expansion wheel sets up the other end of second support, first support with adopt between the second support the elastic construction is connected the plastic envelope membrane receives when first elevating gear with second elevating gear reciprocates, first expansion wheel with between the second expansion wheel the elastic construction is in the expansion state.

Optionally, the expansion assembly comprises a third expansion wheel and an elastic telescopic rod, and when the plastic package film is moved up and down by the first lifting device and the second lifting device, the elastic telescopic rod is in a contraction state.

Optionally, the expansion assembly is arranged at one end of the first lifting device, and the first lifting device controls the expansion assembly to move up and down.

Optionally, the expansion assembly is fixedly arranged between the film feeding assembly and the first lifting device.

Optionally, when the plastic packaging film is moved up and down by the first lifting device and the second lifting device, the first expanding wheel and the second expanding wheel are always abutted to the plastic packaging film, and the elastic structure is always in an expanding state.

Optionally, when the plastic packaging film is moved up and down by the first lifting device and the second lifting device, the third expanding wheel is always abutted to the plastic packaging film, and the elastic structure is always in a contracted state.

Optionally, the film feeding assembly comprises a dry film wheel, a release film wheel, a front pressing wheel and a rear pressing wheel, the dry film wheel outputs a composite film to the rear pressing wheel, the front pressing wheel separates the release film on the composite film and outputs the separated release film to the release film wheel, and the release film wheel is used for recovering the release film; the rear pressing wheel outputs the separated plastic packaging film to the expansion assembly, wherein the composite film comprises a plastic packaging film and a release film arranged on the plastic packaging film.

Optionally, the first lifting device includes a first lifting roller and a first lifting cylinder; the second lifting device comprises a clamping structure, a second lifting roller and a second lifting cylinder, the plastic packaging film is output to the recovery assembly by the second lifting roller after passing through the clamping structure, and the clamping structure and the second lifting roller are driven by the second lifting cylinder to move up and down; the tensioning assembly comprises a lower pressing wheel, a middle pressing wheel and an upper pressing wheel; the recycling assembly comprises a recycling wheel, the upper pressing wheel, the middle pressing wheel and the lower pressing wheel are arranged in the vertical direction, the plastic package film is output by the second lifting roller and then enters the space between the lower pressing wheel and the middle pressing wheel, the plastic package film surrounds the middle pressing wheel in the anticlockwise direction, the middle pressing wheel outputs the plastic package film between the upper pressing wheel and the middle pressing wheel, and the plastic package film surrounds the middle pressing wheel in the clockwise direction and then outputs the plastic package film to the recycling wheel.

This application acts on the plastic envelope membrane through setting up expansion subassembly and tensioning assembly respectively, and wherein, the tensioning assembly acts on the plastic envelope membrane of accomplishing the press mold process for tensile and compress tightly the plastic envelope membrane, can conveniently retrieve, and the pulling force acts on the plastic envelope membrane moreover, can make the plastic envelope membrane keep tension state. And expansion subassembly this application has certain elasticity, can take place elastic deformation, all the time and the plastic envelope membrane between the butt back, its elasticity counteracts the plastic envelope membrane, and then reaches the expansion the effect of plastic envelope membrane. Under the action of the elastic force counteractive force, even if the tension of the tensioning assembly is small, the tension of the plastic packaging film can be kept according to the elastic force, so that the plastic packaging film is kept in a horizontal and flat state. And this expansion subassembly still makes the plastic envelope membrane protect the expansion state all the time under first elevating gear and second elevating gear's effect, keeps the level, the leveling condition.

Drawings

The accompanying drawings, which are included to provide a further understanding of the embodiments of the application, are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the principles of the application. It is obvious that the drawings in the following description are only some embodiments of the application, and that for a person skilled in the art, other drawings can be derived from them without inventive effort. In the drawings:

FIG. 1 is a schematic view of a vacuum film press of a first embodiment of the present application;

FIG. 2 is a schematic view of a vacuum film press of a first embodiment of the present application;

FIG. 3 is a schematic view of a vacuum film press according to a first embodiment of the present application in a second state;

FIG. 4 is a schematic view of a vacuum film press according to a second embodiment of the present application in a first state;

fig. 5 is a schematic view of a second state of the vacuum film press according to the second embodiment of the present application.

Wherein, 10, a vacuum film press; 20. plastic packaging the film; 100. a film feeding device; 110. a film feeding assembly; 111. a dry film wheel; 112. a release film wheel; 113. a front press wheel; 114. a rear pressing wheel; 130. an expansion assembly; 131. a first expansion wheel; 132. a first bracket; 133. a second expansion wheel; 134. a second bracket; 135. an elastic structure; 136. a third expansion wheel; 137. an elastic telescopic rod; 150. a first lifting device; 151. a first lifting roller; 152. a first lifting cylinder; 200. a recovery device; 210. a recovery assembly; 211. a recovery wheel; 230. a tension assembly; 231. pressing the wheel down; 232. a medium-pressure wheel; 233. pressing wheels are arranged; 250. a second lifting device; 251. a second lifting roller; 252. a second lifting cylinder; 253. a clamping structure; 300. a film pressing device; 310. an upper cavity; 320. and a lower cavity.

Detailed Description

It is to be understood that the terminology, the specific structural and functional details disclosed herein are for the purpose of describing particular embodiments only, and are representative, but that the present application may be embodied in many alternate forms and should not be construed as limited to only the embodiments set forth herein.

In the description of the present application, the terms "first", "second" are used for descriptive purposes only and are not to be construed as indicating relative importance or as implicitly indicating the number of technical features indicated. Thus, unless otherwise specified, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature; "plurality" means two or more. The terms "comprises" and "comprising," and any variations thereof, are intended to cover a non-exclusive inclusion, such that one or more other features, integers, steps, operations, elements, components, and/or combinations thereof may be present or added.

Further, terms of orientation or positional relationship indicated by "center", "lateral", "upper", "lower", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, are described based on the orientation or relative positional relationship shown in the drawings, are simply for convenience of description of the present application, and do not indicate that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present application.

Furthermore, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly and may include, for example, fixed connections, removable connections, and integral connections; can be mechanically or electrically connected; either directly or indirectly through intervening media, or through both elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

The present application is described in detail below with reference to the figures and alternative embodiments.

Fig. 1 is a schematic view of a vacuum film press according to a first embodiment of the present application, and as shown in fig. 1, the vacuum film press 10 includes: send membrane device 100, recovery unit 200 and film pressing device 300, send membrane device 100 to be used for providing plastic envelope membrane 20 to film pressing device 300, recovery unit 200 is used for retrieving the plastic envelope membrane 20 after the use that comes out from film pressing device 300, and film pressing device 300 includes cavity 310 and lower cavity 320, plastic envelope membrane 20 follows go up cavity 310 with pass through between the cavity 320 down, should go up cavity 310 and cavity 320 and seal the back down, can make through the mode of evacuation and form the vacuum cavity in the film pressing device 300. It should be understood that the mold film 20 is thin and does not affect the sealing between the upper cavity 310 and the lower cavity 320.

Fig. 2 is a schematic view of a vacuum film press according to a first embodiment of the present application, and as shown in fig. 2, the film apparatus includes: the film feeding assembly 110, the expansion assembly 130 and the first lifting device 150; the recycling apparatus 200 includes: a recovery assembly 210, a tensioning assembly 230, and a second lifting device 250; the plastic film 20 is output from the film feeding assembly 110, passes through the expanding assembly 130, the first lifting device 150, the film pressing device 300, the second lifting device 250 and the tensioning assembly 230, and is recovered by the recovering assembly 210; the first lifting device 150 and the second lifting device 250 are respectively arranged at two sides of the film pressing device 300 and are used for controlling the plastic packaging film 20 between the upper cavity 310 and the lower cavity 320 to move up and down; the expansion assembly 130 is elastically deformable and is used for always expanding the plastic packaging film 20 when the plastic packaging film 20 is moved up and down by the first lifting device 150 and the second lifting device 250; the tension assembly 230 is used to stretch and compress the plastic film 20.

This application acts on plastic packaging film 20 through setting up expansion assembly 130 and tensioning assembly 230 respectively, and wherein, tensioning assembly 230 acts on the plastic packaging film 20 of accomplishing the press mold process for tensile and compress tightly plastic packaging film 20, can conveniently retrieve, and pulling force acts on plastic packaging film 20 moreover, can be so that plastic packaging film 20 keeps the tension state. And extension subassembly 130 this application has certain elasticity, can take place elastic deformation, all the time with the plastic envelope membrane 20 between the butt back, its elasticity counteracts in plastic envelope membrane 20, and then reaches the expansion plastic envelope membrane 20's effect. Under the elastic reaction force, even if the tensile force of the tension assembly 230 is small, the tension of the plastic film 20 is maintained according to the elastic force, so that the plastic film 20 is maintained in a horizontal and flat state. Moreover, the expansion assembly 130 also enables the plastic package film 20 to be always protected in an expanded state and to be kept in a horizontal and flat state under the action of the first lifting device 150 and the second lifting device 250. It should be understood that, as shown in fig. 1, the plastic film 20 is not supported in the film pressing device 300, i.e., the plastic film 20 section between the film feeding device 100 and the recycling device 200, and the pulling force between the film feeding device 100 and the recycling device 200 is required to maintain the height of the plastic film 20 and to keep the plastic film 20 in a horizontal state. However, when the tension is too large or too small, the plastic film 20 may be stretched too much or cannot be kept in a horizontal flat state, which may cause inconvenience in laminating the wafer. The vacuum film press of fig. 2 of the present application can completely solve this problem.

Specifically, the first lifting device 150 and the second lifting device 250 are used for controlling the plastic packaging film 20 between the upper cavity 310 and the lower cavity 320 to move up and down, and the main purpose of the first lifting device is to prevent the plastic packaging film 20 from touching the wafer during moving, so that the plastic packaging film 20 is far away from the wafer during moving and renewing, and in this embodiment, due to the arrangement of the expansion assembly 130, only the plastic packaging film 20 between the upper cavity 310 and the lower cavity 320 can be controlled to move up and down without controlling the up and down movement of the whole film feeding device 100 and the whole recovery device 200, and the plastic packaging film 20 between the upper cavity 310 and the lower cavity 320 can be correspondingly moved. The lamination process of the wafer may include: the method comprises the steps of placing a wafer which is not subjected to film pressing treatment on a working disc of a lower cavity 320, providing an unused plastic packaging film 20 above the wafer through the action of a film conveying device 100 and a recovery device 200, enabling the plastic packaging film 20 not to be in direct contact with the wafer at the moment, moving the plastic packaging film 20 between an upper cavity 310 and the lower cavity 320 downwards, moving the upper cavity 310 downwards, sealing the upper cavity 310 and a lower wall and vacuumizing, inflating an air bag on the upper cavity 310 to perform film pressing treatment on the wafer, moving the upper cavity 310 upwards after the film pressing treatment is completed, cutting the plastic packaging film 20, taking the wafer which is subjected to film pressing treatment down, circularly taking the wafer which is not subjected to film pressing treatment again, and completing the film pressing process on the wafer which is not subjected to film pressing treatment next time. Of course, in order to better realize the film pressing process of the wafer, the upper chamber body 310 and the lower chamber body 320 in this embodiment are also movable respectively. The first lifting device 150 and the second lifting device 250 can adopt a mode of an air cylinder and a push wheel, the push wheel is controlled by the air cylinder to move up and down, and the plastic packaging film 20 is abutted to the push wheel.

As shown in fig. 2, the film feeding assembly 110 includes a dry film wheel 111, a release film wheel 112, a front pressing wheel 113 and a rear pressing wheel 114, the dry film wheel 111 outputs a composite film to the rear pressing wheel 114, the front pressing wheel 113 separates the release film on the composite film and outputs the separated release film to the release film wheel 112, and the release film wheel 112 is used for recovering the release film; the rear pressing wheel 114 outputs the separated plastic packaging film 20 to the expansion assembly 130, wherein the composite film comprises the plastic packaging film 20 and a release film arranged on the plastic packaging film 20; the plastic envelope membrane have the first face and with the relative second face in first face, the first face of plastic envelope membrane 20 is close to go up cavity 310, the second face of plastic envelope membrane 20 is close to cavity 320 down, the second face of plastic envelope membrane 20 has viscidity, set up on the second face of plastic envelope membrane 20 from the type membrane. The composite film is generally formed by a three-layer structure, in which an EMC (Epoxy resin film) film or an RP (Photo Resist) film is disposed in the middle, both sides of the EMC have viscosity, release films are respectively attached to both sides of the EMC, the release films are generally PET (Polyethylene terephthalate) films, and in this embodiment, the release films are output to the release film wheel 112 through the front pressing wheel 113 and recovered. The front pressing wheel 113 and the release film wheel 112 are arranged on the same side, the rear pressing wheel 114 and the dry film wheel 111 are arranged on the other side, and the front pressing wheel 113 and the rear pressing wheel 114 are horizontally arranged and only mutually abutted through a composite film.

Considering that the first surface of the molding film 20 has no viscosity, the second surface of the molding film 20 has viscosity, and the second surface of the molding film 20 needs to be pressed against the wafer, the second surface of the molding film 20 cannot directly contact any structure during the process from the output of the molding film 20 from the rear pressing wheel 114 to the entrance of the upper cavity 310. Therefore, the expansion member 130 and the first lifting device 150 are disposed at one side of the first face of the plastic film 20. However, there is no limitation to the plastic film 20 after exiting the film pressing device 300, and the second lifting device 250 and the tensioning assembly 230 may be disposed on one side of the second surface of the plastic film 20, and may support the plastic film 20 together.

Specifically, the first lifting device 150 includes a first lifting roller 151 and a first lifting cylinder 152; the second lifting device 250 comprises a clamping structure 253, a second lifting roller 251 and a second lifting cylinder 252, the plastic film 20 passes through the clamping structure 253 and is output to the recovery assembly 210 by the second lifting roller 251, and the clamping structure 253 and the second lifting roller 251 are driven by the second lifting cylinder 252 to move up and down; the clamping structure 253 is used for flattening the plastic packaging film 20 and then transmitting the flattened plastic packaging film 20 to the tensioning assembly 230, so that the problems of overlapping and winding of the cut plastic packaging film 20 are solved.

Specifically, the tensioning assembly 230 includes a lower pressing wheel 231, a middle pressing wheel 232 and an upper pressing wheel 233, the recycling assembly 210 includes a recycling wheel 211, wherein the upper pressing wheel 233, the middle pressing wheel 232 and the lower pressing wheel 231 are arranged along a vertical direction, and only the plastic packaging film 20 can pass through between the upper pressing wheel 233 and the middle pressing wheel 232 and between the middle pressing wheel 232 and the lower pressing wheel 231, and the three are tightly matched to compress the plastic packaging film 20. After being output from the second lifting roller 251, the plastic packaging film 20 enters the tensioning assembly 230 from between the lower pressing wheel 231 and the middle pressing wheel 232, is output from between the middle pressing wheel 232 and the upper pressing wheel 233 after surrounding the middle pressing wheel 232 anticlockwise, and is output to the recovery wheel 211 after surrounding the upper pressing wheel 233 clockwise, wherein the recovery wheel 211 is arranged above the upper pressing wheel 233, and a guide wheel can be further arranged between the upper pressing wheel 233 and the recovery wheel 211, so that the plastic packaging film 20 between the recovery wheel 211 and the upper pressing wheel 233 is prevented from being in a loose state through the guide wheel, and the part of the plastic packaging film 20 is in a tension state.

Fig. 3 is a schematic diagram of a second state of the vacuum film press according to the first embodiment of the present application, wherein the expanding assembly 130 includes a first expanding wheel 131, a first bracket 132, a second expanding wheel 133, a second bracket 134 and an elastic structure 135, one end of the first bracket 132 and one end of the second bracket 134 are coaxially and rotatably fixed, the first expanding wheel 131 is disposed at the other end of the first bracket 132, the second expanding wheel 133 is disposed at the other end of the second bracket 134, the first bracket 132 and the second bracket 134 are connected by the elastic structure 135, and when the plastic sealing film 20 moves up and down by the first lifting device 150 and the second lifting device 250, the elastic structure 135 between the first expanding wheel 131 and the second expanding wheel 133 is in an expanded state. Specifically, the expansion assembly 130 may be fixedly disposed between the film feeding assembly 110 and the first lifting device 150.

Referring to fig. 2 and 3, fig. 2 shows a state that the plastic film 20 is far away from the wafer, wherein the first expanding wheel 131 and the second expanding wheel 133 of the expanding assembly 130 are far away from each other, and at this time, the elastic force of the elastic structure 135 is larger, so that the plastic film 20 between the film feeding device 100 and the recycling device 200 is kept in a tension state. When the tension of the plastic packaging film 20 is not enough and is smaller than the elasticity of the elastic structure 135, the elastic structure 135 contracts, and the first expanding wheel 131 and the second expanding wheel 133 move towards the closing direction, so that the plastic packaging film 20 expands outwards and the tension is increased. When the tension of the plastic film 20 is too large and is greater than the elasticity of the elastic structure 135, the elastic structure 135 is stretched, and the first expanding wheel 131 and the second expanding wheel 133 move in the direction away from each other, so that the plastic film 20 contracts inward and the tension is reduced. Fig. 3 shows the mold film 20 in proximity to the wafer, and the adjustment process of the expansion assembly 130 is similar to that described above. The tension of the plastic packaging film 20 is adjusted by the expansion assembly 130, so that the plastic packaging film 20 is always in a tension state, and the plastic packaging film 20 in the film pressing device 300 is kept in a horizontal state. Moreover, in the limit, when the tension of the plastic film 20 in the section is not enough, the elastic structure 135 has recovered to the natural state, so that the plastic film 20 between the rear pressing wheel 114 and the first lifting device 150 is in the maximum expansion state, and the plastic film 20 in the film pressing device 300 is not enough in tension to keep flat, and can be further adjusted by lifting the second lifting device 250 or the tensioning assembly 230, so that the plastic film 20 in the film pressing device 300 is enough in tension to keep flat.

It should be noted that, in the process of elastic deformation of the expansion assembly 130, the central axis of the expansion assembly 130 is perpendicular to the plastic sealing film 20 between the first expansion wheel 131 and the second expansion wheel 133. The elastic structure 135 may be a spring or the like. In one case, when the plastic package film 20 is moved up and down by the first lifting device 150 and the second lifting device 250, the first expanding wheel 131 and the second expanding wheel 133 are always abutted against the plastic package film 20, and the elastic structure 135 is always in an expanded state. In another case, the spring structure 135 of FIG. 3 is in a natural state. The elastic structure 135 is expanded to an extended state of the elastic structure 135 and contracted to a contracted state. The two conditions are related to the lengths of the first and second supports 132 and 134 and the distance between the plastic sealing films 20, and may be set according to actual conditions.

In another embodiment, the expansion member 130 is disposed at one end of the first lifting device 150, and the first lifting device 150 controls the expansion member 130 to move up and down. The above effects can be also obtained.

Fig. 4 is a schematic view showing a first state of a vacuum film press according to a second embodiment of the present application, and fig. 5 is a schematic view showing a second state of the vacuum film press according to the second embodiment of the present application, in this embodiment, other structures are the same as those in the first and second embodiments, wherein the expansion assembly 130 is different, the expansion assembly 130 includes a third expansion wheel 136 and an elastic expansion link 137, and the elastic expansion link 137 is in a contracted state when the plastic film 20 is moved up and down by the first lifting device 150 and the second lifting device 250. When the plastic package film 20 is moved up and down by the first lifting device 150 and the second lifting device 250, the third expanding wheel 136 is always abutted against the plastic package film 20, and the elastic structure 135 is always in a contracted state. Specifically, the expansion assembly 130 is fixedly disposed between the film feeding assembly 110 and the first lifting device 150.

Fig. 4 shows a state where the plastic film 20 is away from the wafer, wherein the elastic structure 135 of the expansion assembly 130 is in a compressed state, and the degree of contraction is large, at this time, the elastic force of the elastic structure 135 is large, so that the plastic film 20 between the film feeding device 100 and the recovery device 200 is kept in a tension state. When the tension of the plastic packaging film 20 is not enough and is less than the elasticity of the elastic structure 135, the elastic structure 135 extends, and the third expanding wheel 136 moves towards the extending direction of the elastic structure 135, so that the plastic packaging film 20 expands outwards, and the tension is increased. When the tension of the section of plastic package film 20 is too large and is greater than the elasticity of the elastic structure 135, the elastic structure 135 contracts, and the third expanding wheel 136 moves towards the contraction direction of the elastic structure 135, so that the plastic package film 20 contracts inwards and the tension is reduced. Fig. 5 shows the mold film 20 in proximity to the wafer, and the adjustment process of the expansion assembly 130 is similar to that described above. The tension of the plastic packaging film 20 is adjusted by the expansion assembly 130, so that the plastic packaging film 20 is always in a tension state, and the plastic packaging film 20 in the film pressing device 300 is kept in a horizontal state.

In another embodiment, the expansion member 130 is disposed at one end of the first lifting device 150, and the first lifting device 150 controls the expansion member 130 to move up and down. The above effects can be also obtained. It should be noted that fig. 2-5 illustrate the structure of the film feeding device 100, such as the dry film roller 111, the release film roller 112, the front pressing roller 113, and the rear pressing roller 114, the first lifting cylinder of the first lifting device 150, the second lifting cylinder 252 of the second lifting structure, and the lower pressing roller 231, the middle pressing roller 232, and the upper pressing roller 233 recycling roller 211, respectively fixed in the vacuum film press 10.

It should be noted that the inventive concept of the present application can form many embodiments, but the present application has a limited space and cannot be listed one by one, so that, on the premise of no conflict, any combination between the above-described embodiments or technical features can form a new embodiment, and after the embodiments or technical features are combined, the original technical effect will be enhanced.

The foregoing is a more detailed description of the present application in connection with specific alternative embodiments, and the specific implementations of the present application are not to be considered limited to these descriptions. For those skilled in the art to which the present application pertains, several simple deductions or substitutions may be made without departing from the concept of the present application, and all should be considered as belonging to the protection scope of the present application.

Claims (10)

1. A vacuum film press comprising:

the film feeding device is used for providing a plastic packaging film;

the recovery device is used for recovering the plastic packaging film; and

the film pressing device comprises an upper cavity and a lower cavity, a vacuum cavity can be formed between the upper cavity and the lower cavity, and the plastic packaging film passes through the space between the upper cavity and the lower cavity;

the film feeding device is characterized by comprising a film feeding assembly, an expansion assembly and a first lifting device;

the recovery device comprises a recovery assembly, a tensioning assembly and a second lifting device;

the plastic packaging film is output by the film feeding assembly, passes through the expansion assembly, the first lifting device, the film pressing device, the second lifting device and the tensioning assembly, and is recovered by the recovery assembly;

the first lifting device and the second lifting device are respectively arranged at two sides of the film pressing device and are used for controlling the plastic packaging film between the upper cavity and the lower cavity to move up and down;

the expansion assembly can elastically deform and is used for always expanding the plastic packaging film when the plastic packaging film is moved up and down by the first lifting device and the second lifting device; the tensioning assembly is used for stretching and compressing the plastic packaging film.

2. The vacuum film press of claim 1, wherein the plastic film has a first face and a second face opposite the first face, the first face of the plastic film is adjacent to the upper cavity, the second face of the plastic film is adjacent to the lower cavity, the second face of the plastic film has a tackiness, the expansion assembly and the first lifting device are disposed on one side of the first face of the plastic film, and the second lifting device and the tensioning assembly are disposed on one side of the second face of the plastic film.

3. The vacuum film press according to claim 2, wherein the expansion assembly comprises a first expansion wheel, a first bracket, a second expansion wheel, a second bracket and an elastic structure, one end of the first bracket and one end of the second bracket are coaxially and rotatably fixed, the first expansion wheel is arranged at the other end of the first bracket, the second expansion wheel is arranged at the other end of the second bracket, the first bracket and the second bracket are connected by the elastic structure, and the elastic structure between the first expansion wheel and the second expansion wheel is in an expanded state when the plastic packaging film moves up and down by the first lifting device and the second lifting device.

4. The vacuum film press of claim 2, wherein the expansion assembly comprises a third expansion wheel and an elastic telescopic rod, and the elastic telescopic rod is in a contracted state when the plastic film is moved up and down by the first lifting device and the second lifting device.

5. The vacuum film press according to claim 3 or 4, wherein the expansion assembly is disposed at one end of the first lifting device, and the first lifting device controls the expansion assembly to move up and down.

6. The vacuum film press of claim 3 or 4, wherein the expansion assembly is fixedly disposed between the film feeding assembly and the first lifting device.

7. The vacuum film press according to claim 3, wherein when the plastic film is moved up and down by the first lifting device and the second lifting device, the first expanding wheel and the second expanding wheel are always abutted against the plastic film, and the elastic structure is always in an expanded state.

8. The vacuum film press according to claim 4, wherein when the plastic film is moved up and down by the first lifting device and the second lifting device, the third expanding wheel is always abutted against the plastic film, and the elastic structure is always in a contracted state.

9. The vacuum film press according to claim 1, wherein the film feeding assembly comprises a dry film wheel, a release film wheel, a front pressing wheel and a rear pressing wheel, the dry film wheel outputs the composite film to the rear pressing wheel, the front pressing wheel separates the release film on the composite film and outputs the separated release film to the release film wheel, and the release film wheel is used for recovering the release film; the rear pressing wheel outputs the separated plastic packaging film to the expansion assembly, wherein the composite film comprises a plastic packaging film and a release film arranged on the plastic packaging film.

10. The vacuum film press of claim 1, wherein the first lifting device comprises a first lifting roller and a first lifting cylinder; the second lifting device comprises a clamping structure, a second lifting roller and a second lifting cylinder, the plastic packaging film is output to the recovery assembly by the second lifting roller after passing through the clamping structure, and the clamping structure and the second lifting roller are driven by the second lifting cylinder to move up and down; the tensioning assembly comprises a lower pressing wheel, a middle pressing wheel and an upper pressing wheel; the recycling assembly comprises a recycling wheel, the upper pressing wheel, the middle pressing wheel and the lower pressing wheel are arranged in the vertical direction, the plastic package film is output by the second lifting roller and then enters the space between the lower pressing wheel and the middle pressing wheel, the plastic package film surrounds the middle pressing wheel in the anticlockwise direction, the middle pressing wheel outputs the plastic package film between the upper pressing wheel and the middle pressing wheel, and the plastic package film surrounds the middle pressing wheel in the clockwise direction and then outputs the plastic package film to the recycling wheel.

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