CN114878032B - Flexible self-powered pressure sensor and preparation method and application thereof - Google Patents

Flexible self-powered pressure sensor and preparation method and application thereof Download PDF

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CN114878032B
CN114878032B CN202210344248.4A CN202210344248A CN114878032B CN 114878032 B CN114878032 B CN 114878032B CN 202210344248 A CN202210344248 A CN 202210344248A CN 114878032 B CN114878032 B CN 114878032B
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pressure sensor
flexible self
barium titanate
powered
powered pressure
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CN114878032A (en
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宁成云
林坚
付如民
周蕾
钟新香
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South China University of Technology SCUT
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/16Measuring force or stress, in general using properties of piezoelectric devices
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/44Detecting, measuring or recording for evaluating the integumentary system, e.g. skin, hair or nails
    • A61B5/441Skin evaluation, e.g. for skin disorder diagnosis
    • A61B5/445Evaluating skin irritation or skin trauma, e.g. rash, eczema, wound, bed sore
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/42Nitriles
    • C08F220/44Acrylonitrile
    • C08F220/46Acrylonitrile with carboxylic acids, sulfonic acids or salts thereof
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02Details of sensors specially adapted for in-vivo measurements
    • A61B2562/0247Pressure sensors
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/16Details of sensor housings or probes; Details of structural supports for sensors
    • A61B2562/164Details of sensor housings or probes; Details of structural supports for sensors the sensor is mounted in or on a conformable substrate or carrier

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  • Heart & Thoracic Surgery (AREA)
  • Dermatology (AREA)
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Abstract

The invention discloses a flexible self-powered pressure sensor and a preparation method and application thereof; the method for manufacturing the flexible self-powered pressure sensor comprises the following steps: sequentially dissolving p-styrene sulfonate, acrylonitrile, a cross-linking agent, an initiator and modified barium titanate in an organic solvent, carrying out heat preservation reaction under an inert atmosphere to obtain a prepolymer, then carrying out freeze drying treatment on the prepolymer, and coating silver paste and copper foil to obtain the flexible self-powered pressure sensor. The preparation method disclosed by the invention is simple in process, and the prepared flexible self-powered pressure sensor is good in electromechanical response and stable in mechanical property; the prepared pressure sore monitoring sensor can monitor pressure sores well.

Description

Flexible self-powered pressure sensor and preparation method and application thereof
Technical Field
The invention relates to the technical field of flexible pressure sensors, in particular to a flexible self-powered pressure sensor, and a preparation method and application thereof.
Background
Pressure sores, also known as bedsores (pressure sores are designated by the pressure sores advisory group of the united states of america (NPUAP) in 2016), are due to the relatively long time that local tissue is under pressure, resulting in persistent ischemia, hypoxia, malnutrition of the tissue, and ulceration and necrosis of the tissue. With the increasing degree of aging of the population, various chronic diseases are gradually developed with the aging, and the incidence rate is continuously rising. Prevention of chronic diseases is critical in enabling long-term monitoring, but large-scale equipment in hospitals is not suitable for long-term monitoring. Particularly in the prevention of pressure sores/pressure injuries in paralyzed or elderly persons, pressure is the most immediate cause of pressure sores, where the temperature and humidity of the pressure site can accelerate the occurrence of pressure sores/pressure injuries in the tissue. The chronic refractory wound surface is produced, and the recovery of later-period patients and the living quality of the old are greatly influenced. The causative factors of stress injury are numerous and the result of many complex factors, and can be generally classified into endogenous factors and exogenous factors. Exogenous factors include local pressure, friction, skin microenvironment including local temperature and local humidity, and the like. Endogenous factors include nutrition, vascular parameters (arterial pressure, blood glucose, etc.), voluntary activities, age and sex, etc. To address future aging of the population, to avoid pressure sores/stress injuries during patient recovery and to reduce the workload of nurses accordingly. It is necessary to monitor the pressure, temperature and humidity of the affected and aged people. The flexible wearable electronic equipment is very suitable for monitoring and preventing the chronic diseases due to the advantages of small size, flexibility and skin compliance and capability of monitoring in real time. Therefore, the preparation and development of the flexible self-powered wearable sensor have important significance.
At present, the sensor manufactured by utilizing the piezoelectric effect has the advantages of simple manufacturing method and high sensitivity, and many scientific researchers are researching the sensor. Among various piezoelectric materials, barium titanate has a relatively high dielectric constant and piezoelectric coefficient (d 33 >200 pC/N) is widely used, but barium titanate piezoelectric ceramics have mechanical brittleness and are not suitable for flexible sensors. There are studies showing that pressure sensor is fabricated using ferroelectric piezoelectric material barium titanate nanoparticles as dielectric (Novel Piezoelectric Paper-Based Flexible Nanogenerators Composed of BaTiO 3 Nanoparticles and Bacterial Cellulose). But how to obtain a flexible piezoelectric sensor with higher piezoelectricity based on barium titanate is important. And combining temperature and humidity sensing, the requirement of manufacturing the pressure sore monitoring sensing unit is urgent.
Disclosure of Invention
Aiming at the defects of the prior art, the primary purpose of the invention is to provide a flexible self-powered pressure sensor and a preparation method thereof.
Another object of the present invention is to provide the use of the flexible self-powered sensor described above in medical health monitoring and pressure sore prevention
The above object of the present invention is achieved by the following technical scheme:
a preparation method of a flexible self-powered pressure sensor comprises the following steps:
sequentially dissolving p-styrene sulfonate, acrylonitrile, a cross-linking agent, an initiator and modified barium titanate in an organic solvent, carrying out heat preservation reaction under an inert atmosphere to obtain a prepolymer, then carrying out freeze drying treatment on the prepolymer, and coating silver paste and copper foil to obtain the flexible self-powered pressure sensor.
Preferably, the barium titanate of the modified barium titanate is barium titanate with piezoelectric tetragonal phase, and the modifier is a silane coupling agent;
further preferably, the modifier is propyl 3- (trimethoxysilyl) methacrylate (TMSPM).
Preferably, the dosage of the modified barium titanate is 3% of the total mass of sodium styrene sulfonate and acrylonitrile.
Preferably, the barium titanate nanoparticles are prepared by hydrothermal reaction.
Preferably, the preparation method of the modified barium titanate comprises the following steps: dissolving acetic acid in deionized water to obtain solution A; dissolving 3- (trimethoxysilyl) propyl methacrylate in ethanol to obtain solution B; and adding the solution A into the solution B, adding barium titanate, performing ultrasonic treatment, and cleaning to obtain the modified barium titanate.
Further preferably, the volume fraction of acetic acid in the solution A is 5-30%, and the volume fraction of 3- (trimethoxysilyl) propyl methacrylate in the solution B is 5-30%; the volume ratio of the liquid A to the liquid B is 1:3-8; more preferably, the volume fraction of acetic acid in the solution a is 10%, and the volume fraction of 3- (trimethoxysilyl) propyl methacrylate in the solution B is 10%; the volume ratio of the liquid A to the liquid B is 1:5.
Preferably, the organic solvent is at least one selected from dimethyl sulfoxide (DMSO), N-Dimethylformamide (DMF), tetrahydrofuran (THF), and ethylene glycol dimethyl ether.
Preferably, the p-styrenesulfonate is sodium p-styrenesulfonate.
Preferably, the cross-linking agent is N, N' -methylenebisacrylamide;
preferably, the initiator is a thermal initiator or a photoinitiator.
Further preferably, the initiator is Ammonium Persulfate (APS).
Preferably, the mass ratio of the components is (10-20): 60-80): 4-6, and the solid content dissolved in the organic solvent is 12-15 w/v%.
Further preferably, the mass ratio of the components is 20:80:6:5 for styrene sulfonate, acrylonitrile and cross-linking agent and initiator. The solid content dissolved in the organic solvent was 15w/v%.
Preferably, the temperature of the heat preservation reaction is 40-60 ℃, and the time of the heat preservation reaction is 10-40 min;
further preferably, the temperature of the incubation reaction is 60 ℃, and the time of the incubation reaction is 20min.
Preferably, the freeze drying temperature is-80 to-20 ℃ and the time is 24 to 48 hours.
Further preferably, the freeze-drying temperature is-60 ℃ and the time is 36 hours.
Preferably, the inert atmosphere refers to a nitrogen atmosphere.
The flexible self-powered pressure sensor is prepared by the preparation method.
The application of the flexible self-powered pressure sensor in preparing a pressure sore monitoring sensor comprises the following steps: and installing a temperature and humidity sensor on the flexible self-powered pressure sensor to obtain the pressure sore monitoring sensor unit. The pressure sore monitoring sensor unit is further assembled into a pressure sore monitoring sensor array.
The prepared pressure sore monitoring sensor is applied to pressure sore monitoring in real time.
Compared with the prior art, the invention has the following advantages and effects:
(1) The preparation method disclosed by the invention is simple in process, and the prepared flexible self-powered pressure sensor is good in electromechanical response and stable in mechanical property;
(2) The pressure sore monitoring sensor prepared by the invention can well monitor pressure sores.
Drawings
Fig. 1 is a cyclic compressive stress-strain diagram of a flexible self-powered sensor fabricated in example 4;
fig. 2 is a derived voltage plot of the flexible self-powered sensor fabricated in example 4;
FIG. 3 is a graph of the self-powered sensor voltage output made in example 4 and comparative example 1;
fig. 4 is a schematic diagram of the pressure sore application of the pressure sore monitoring sensor made in example 7.
Detailed Description
Specific implementations of the invention are further described below with reference to the drawings and examples, but the implementation and protection of the invention are not limited thereto. It should be noted that the following processes, if not specifically described in detail, can be realized or understood by those skilled in the art with reference to the prior art. The reagents or apparatus used were not manufacturer-specific and were considered conventional products commercially available.
Example 1
Preparation of a flexible self-powered pressure sensor:
sodium p-styrenesulfonate, acrylonitrile, a cross-linking agent N, N' -methylene bisacrylamide and an initiator Ammonium Persulfate (APS) are sequentially dissolved in DMSO according to the mass ratio of 20:80:6:5, wherein the mass ratio of modified barium titanate nano particles is 0% of the sum of the acrylonitrile and the sodium p-styrenesulfonate, the solid content is 15w/v%, and the slurry is poured into a manufactured mold, and N is the same as the total weight of the sodium p-styrenesulfonate 2 And (3) carrying out heat preservation reaction for 20min at 60 ℃ under the atmosphere, then carrying out freeze drying at the temperature of-60 ℃ for 36h, and coating silver paste and copper foil to obtain the flexible self-powered pressure sensor. The preparation method of the modified barium titanate comprises the following steps: 1ml of acetic acid was dissolved in 10ml of deionized water to obtain solution A, and 5ml of TMSPM modifier was dissolved in 50ml of ethanol to obtain solution B. Adding the liquid A into the liquid B to obtain a mixed solution, adding barium titanate into the mixed solution, performing ultrasonic treatment for 24 hours, and cleaning to obtain the barium titanate.
The amplitude of the electrical signal of the flexible self-powered force sensor obtained by the embodiment is about 10 mV.
Example 2
Preparation of a flexible self-powered pressure sensor:
sodium p-styrenesulfonate, acrylonitrile, a cross-linking agent N, N' -methylene bisacrylamide and an initiator Ammonium Persulfate (APS) are sequentially dissolved in DMSO according to the mass ratio of 20:80:6:5, wherein the mass ratio of modified barium titanate nano particles is 1 percent of the sum of the acrylonitrile and the sodium p-styrenesulfonate, the solid content is 15w/v percent, the slurry is poured into a manufactured mold, and the N is the same as the total mass ratio of the acrylonitrile and the sodium p-styrenesulfonate 2 And (3) carrying out heat preservation reaction for 20min at 60 ℃ under the atmosphere, then carrying out freeze drying at the temperature of-60 ℃ for 36h, and coating silver paste and copper foil to obtain the flexible self-powered pressure sensor. The preparation method of the modified barium titanate comprises the following steps: 1ml of acetic acid was dissolved in 10ml of deionized water to obtain solution A, and 5ml of TMSPM modifier was dissolved in 50ml of ethanol to obtain solution B. Adding the liquid A into the liquid B to obtain a mixed solution, adding barium titanate into the mixed solution, performing ultrasonic treatment for 24 hours, and cleaning to obtain the barium titanate.
The amplitude of the electrical signal of the flexible self-powered force sensor obtained by the embodiment is about 15 mV.
Example 3
Preparation of a flexible self-powered pressure sensor:
sodium p-styrenesulfonate, acrylonitrile, a cross-linking agent N, N' -methylene bisacrylamide and an initiator ammonium persulfate are sequentially dissolved in DMSO according to the mass ratio of 20:80:6:5, wherein the mass ratio of modified barium titanate nano particles is 2% of the sum of the acrylonitrile and the sodium p-styrenesulfonate, the solid content is 15w/v%, the slurry is poured into a manufactured mold, and the N is added into the mold 2 And (3) carrying out heat preservation reaction for 20min at 60 ℃ under the atmosphere, then carrying out freeze drying at the temperature of-60 ℃ for 36h, and coating silver paste and copper foil to obtain the flexible self-powered pressure sensor. Wherein, the method for modifying barium titanate uses 1ml of acetic acid to be dissolved in 10ml of deionized water to obtain solution A, and 5ml of TMSPM modifier to be dissolved in 50ml of ethanol to obtain solution B. Adding the liquid A into the liquid B to obtain a mixed solution, adding barium titanate into the mixed solution, performing ultrasonic treatment for 24 hours, and cleaning to obtain the barium titanate.
The amplitude of the electrical signal of the flexible self-powered force sensor obtained by the embodiment is about 22 mv.
Example 4
Preparation of a flexible self-powered pressure sensor:
sodium p-styrenesulfonate, acrylonitrile, a cross-linking agent N, N' -methylene bisacrylamide and an initiator ammonium persulfate are sequentially dissolved in DMSO according to the mass ratio of 20:80:6:5, wherein the mass ratio of modified barium titanate nano particles is 3 percent of the sum of the acrylonitrile and the sodium p-styrenesulfonate, the solid content is 15w/v percent, the slurry is poured into a manufactured mold, and the N is added into the mold 2 The reaction is carried out for 20min at 60 ℃ under the atmosphere, and then freeze drying is carried out for 36h at the temperature of minus 60 ℃; and coating silver paste and copper foil to obtain the flexible self-powered pressure sensor. Wherein, the method for modifying barium titanate uses 1ml of acetic acid to be dissolved in 10ml of deionized water to obtain solution A, and 5ml of TMSPM modifier to be dissolved in 50ml of ethanol to obtain solution B. Adding the liquid A into the liquid B to obtain a mixed solution, adding barium titanate into the mixed solution, performing ultrasonic treatment for 24 hours, and cleaning to obtain the barium titanate.
The amplitude of the electrical signal of the flexible self-powered force sensor obtained by the embodiment is about 60 mv.
Comparative example 1
Preparation of a flexible self-powered pressure sensor:
sodium p-styrenesulfonate, acrylonitrile, a cross-linking agent N, N' -methylene bisacrylamide and an initiator ammonium persulfate are sequentially dissolved in DMSO according to the mass ratio of 20:80:6:5, wherein the mass ratio of unmodified barium titanate nano particles is 3% of the sum of the acrylonitrile and the sodium p-styrenesulfonate, the solid content is 15w/v%, and the slurry is poured into a manufactured mold, and N 2 And (3) carrying out heat preservation reaction for 20min at 60 ℃ under the atmosphere, then carrying out freeze drying at the temperature of-60 ℃ for 36h, and coating silver paste and copper foil to obtain the flexible self-powered pressure sensor.
The cyclic compressive stress-strain diagram with flexible piezoelectric pressure sensor obtained in example 4 is shown in fig. 1. The resulting derived voltage plot for the flexible piezoelectric sensor (elastomer with mechatronic response) obtained in example 4 is shown in fig. 2 (the test conditions of fig. 2 were obtained under a test of 12.5N force). The self-powered sensor voltage output graph made in example 4 and comparative example 1 is shown in fig. 3.
From the results of fig. 1, it can be seen that the resiliency of the sensor with electromechanical response is very excellent, the hysteresis curves are substantially coincident and the hysteresis is very small for each stress-strain; fig. 2 shows that the electrical signal amplitude of the flexible self-powered sensor is around 60 mv. Fig. 3 shows that the piezoelectric properties of the modified piezoelectric elastomer are significantly improved relative to the unmodified piezoelectric elastomer of comparative example 1. The reason is that the modified barium titanate is not simply blended with the polymer, but the modified barium titanate may participate in the polymerization as a crosslinking agent.
Example 5
Preparation of a flexible self-powered pressure sensor:
sodium p-styrenesulfonate, acrylonitrile, a cross-linking agent N, N' -methylene bisacrylamide and an initiator ammonium persulfate are sequentially dissolved in DMSO according to the mass ratio of 20:80:6:5, wherein the mass ratio of modified barium titanate nano particles is 4% of the sum of the acrylonitrile and the sodium p-styrenesulfonate, the solid content is 15w/v%, the slurry is poured into a manufactured mold, and the N is added into the mold 2 The reaction is carried out for 20min at 60 ℃ under the atmosphere, and then freeze drying is carried out for 36h at the temperature of minus 60 ℃; and coating silver paste and copper foil to obtain the flexible self-powered pressure sensor. Wherein, the method for modifying barium titanate uses 1ml of acetic acid to be dissolved in 10ml of deionized water to obtain solution A, and 5ml of TMSPM modifier to be dissolved in 50ml of ethanol to obtain solution B. Adding the liquid A into the liquid B to obtain a mixed solution, adding barium titanate into the mixed solution, performing ultrasonic treatment for 24 hours, and cleaning to obtain the barium titanate.
The amplitude of the electrical signal of the flexible self-powered force sensor obtained by the embodiment is about 30 mv.
Example 6
Preparation of a flexible self-powered pressure sensor:
sodium p-styrenesulfonate, acrylonitrile, a cross-linking agent N, N' -methylene bisacrylamide and an initiator ammonium persulfate are sequentially dissolved in DMSO according to the mass ratio of 20:80:6:5, the mass ratio of modified barium titanate nano particles is 5 percent of the sum of the acrylonitrile and the sodium p-styrenesulfonate, the solid content is 15w/v percent, the slurry is poured into a manufactured mold,N 2 the reaction is carried out for 20min at 60 ℃ under the atmosphere, and then freeze drying is carried out for 36h at the temperature of minus 60 ℃; and coating silver paste and copper foil to obtain the flexible self-powered pressure sensor. Wherein, the method for modifying barium titanate uses 1ml of acetic acid to be dissolved in 10ml of deionized water to obtain solution A, and 5ml of TMSPM modifier to be dissolved in 50ml of ethanol to obtain solution B. Adding the liquid A into the liquid B to obtain a mixed solution, adding barium titanate into the mixed solution, performing ultrasonic treatment for 24 hours, and cleaning to obtain the barium titanate.
The amplitude of the electrical signal of the flexible self-powered force sensor obtained by the embodiment is about 30 mv.
Example 7
Preparation of a pressure sore monitoring sensor:
the flexible self-powered pressure sensor prepared in example 4 was mounted with a temperature and humidity sensor to obtain a pressure sore monitoring sensor unit. The pressure sore monitoring sensor unit is further assembled into a pressure sore monitoring sensor array.
The pressure sore monitoring sensor array prepared in this embodiment is shown in fig. 4, and includes: conductive silver paste lines, piezoelectric elastomers and temperature and humidity sensors.
The above examples are preferred embodiments of the present invention, but the embodiments of the present invention are not limited to the above examples, and any other changes, modifications, substitutions, combinations, and simplifications that do not depart from the spirit and principle of the present invention should be made in the equivalent manner, and the embodiments are included in the protection scope of the present invention.

Claims (10)

1. The preparation method of the flexible self-powered pressure sensor is characterized by comprising the following steps of:
sequentially dissolving p-styrene sulfonate, acrylonitrile, a cross-linking agent, an initiator and modified barium titanate in an organic solvent, carrying out heat preservation reaction under an inert atmosphere to obtain a prepolymer, then carrying out freeze drying treatment on the prepolymer, and coating silver paste and copper foil to obtain the flexible self-powered pressure sensor; the modifier of the modified barium titanate is 3- (trimethoxysilyl) propyl methacrylate, and the dosage of the modified barium titanate is 3% of the total mass of sodium p-styrenesulfonate and acrylonitrile.
2. The method of claim 1, wherein the barium titanate of the modified barium titanate is barium titanate having a piezoelectric tetragonal phase.
3. The method for preparing a flexible self-powered pressure sensor as claimed in claim 1, wherein the method for preparing the modified barium titanate is as follows: dissolving acetic acid in deionized water to obtain solution A; dissolving 3- (trimethoxysilyl) propyl methacrylate in ethanol to obtain solution B; and adding the solution A into the solution B, adding barium titanate, performing ultrasonic treatment, and cleaning to obtain the modified barium titanate.
4. The method for manufacturing a flexible self-powered pressure sensor as claimed in claim 1, wherein said organic solvent is at least one selected from the group consisting of dimethyl sulfoxide, N-dimethylformamide, tetrahydrofuran, and ethylene glycol dimethyl ether; the p-styrenesulfonate is sodium p-styrenesulfonate.
5. The method of claim 1, wherein the cross-linking agent is N, N' -methylenebisacrylamide; the initiator is a thermal initiator or a photoinitiator.
6. The method of claim 5, wherein the initiator is ammonium persulfate.
7. The preparation method of the flexible self-powered pressure sensor according to claim 1, wherein the mass ratio of the components is (10-20) of styrene sulfonate, (60-80) of an initiator, (4-6) of an initiator and the solid content dissolved in an organic solvent is 12-15 w/v%.
8. The method for manufacturing a flexible self-powered pressure sensor as claimed in claim 1, wherein the temperature of the incubation reaction is 40-60 ℃ and the time of the incubation reaction is 10-40 min; the freeze drying temperature is-80 to-20 ℃ and the time is 24 to 48 hours.
9. A flexible self-powered pressure sensor prepared by the method of any one of claims 1 to 8.
10. Use of a flexible self-powered pressure sensor as claimed in claim 9 for the preparation of a pressure wound monitoring sensor, comprising the steps of: and installing a temperature and humidity sensor on the flexible self-powered pressure sensor to obtain the pressure sore monitoring and sensing unit.
CN202210344248.4A 2022-04-02 2022-04-02 Flexible self-powered pressure sensor and preparation method and application thereof Active CN114878032B (en)

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CN106366574B (en) * 2016-10-07 2018-11-06 嘉兴尚云自动化设备有限公司 A kind of preparation method of piezoelectric material
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WO2020110183A1 (en) * 2018-11-27 2020-06-04 株式会社アドマテックス Surface-modified barium titanate particle material, barium titanate-containing resin composition, and barium titanate dispersion
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CN111664970B (en) * 2020-05-28 2021-06-11 浙江大学 Self-powered flexible pressure sensing device and preparation method thereof
CN113218543B (en) * 2021-05-07 2023-04-28 中国科学院苏州纳米技术与纳米仿生研究所 Flexible pressure sensor, dielectric layer thereof and preparation method of dielectric layer

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