CN114852662A

CN114852662A - Manual guide machine

Info

Publication number: CN114852662A
Application number: CN202210650492.3A
Authority: CN
Inventors: 荣国青
Original assignee: Suzhou Huiken Electronic Technology Co ltd
Current assignee: Suzhou Huiken Electronic Technology Co ltd
Priority date: 2022-06-09
Filing date: 2022-06-09
Publication date: 2022-08-05

Abstract

The invention discloses a manual wafer guide machine which comprises a wafer guide base, wherein a push block structure and a limiting structure are arranged on the wafer guide base, the push block structure comprises a guide rod limiting block, the guide rod limiting block is fixed below the wafer guide base, a guide rod penetrates through the guide rod limiting block, one end of the guide rod is connected with a push block connecting block, the end, far away from the guide rod, of the push block connecting block is connected with a push block, the end, far away from the push block connecting block, of the guide rod is connected with a movable wafer fixing block, the side, close to the wafer guide base, of the movable wafer fixing block is provided with a movable wafer, the side, adjacent to the side provided with the movable wafer, of the movable wafer fixing block is connected with a handle, four second limiting blocks which are arranged in a rectangular array are arranged above the wafer guide base, and limiting grooves are formed in the second limiting blocks. The invention has the beneficial effects that: the wafer box is pushed to move, so that the wafers are placed accurately and conveniently, and the wafers are placed in the wafer box, and the manual wafer guide function is realized; the manual wafer guide machine is ingenious in structure and accurate in wafer box moving position.

Description

Manual guide machine

Technical Field

The invention relates to the technical field of wafer arrangement equipment, in particular to a manual wafer guide machine.

Background

The wafer is the most basic semiconductor material for making the IC, and the quality of the wafer will directly determine the quality of the finished IC. As is well known, a wafer is a silicon wafer used for manufacturing a silicon semiconductor circuit, and is a silicon wafer formed by grinding, polishing, and slicing a silicon ingot. In the production of the semiconductor industry, wafers adopt different production processes in the process, and wafer carrying disks used by production equipment of the different production processes are different, so that the wafers need to be frequently circulated among the different carrying disks in the whole process. Because the requirement of the wafer is very high, a wafer box is usually adopted to bear the wafer so as to ensure the accurate placement of the wafer. Therefore, the position of the wafer box is required to be set very high to ensure the placement of the wafer, and an apparatus capable of realizing accurate positioning of the wafer box is needed.

Disclosure of Invention

The invention aims to provide a manual film guide machine to solve the problems in the background technology.

In order to achieve the purpose, the invention provides the following technical scheme: a manual guide piece machine comprises a guide piece base, wherein the guide piece base is of a rectangular block structure, a push block structure and a limiting structure are arranged on the guide piece base, the push block structure comprises a guide rod limiting block, the guide rod limiting block is fixed below the guide piece base, a guide rod penetrates through the guide rod limiting block, the guide rod is arranged along the length direction of the guide piece base and is parallel to the guide piece base, one end of the guide rod is connected with a push block connecting block, the end, far away from the guide rod, of the push block connecting block is connected with a push block, the push block is arranged above the guide piece base, the end, far away from the push block connecting block, of the guide rod is connected with a movable piece fixing block, the side, close to the guide piece base, of the movable piece fixing block is provided with a movable piece, the side, adjacent to the side provided with the movable piece, of the movable piece is connected with a handle, and four second limiting blocks which are arranged in a rectangular array are arranged above the guide piece base, and a limiting groove is formed in the second limiting block.

Further preferably, limit structure contains spacing fixed block, spacing fixed block is fixed in the below of guide piece base, the side of keeping away from the guide piece base of spacing fixed block is rotated and is connected with spacing, spacing sets up along the length direction of guide piece base, the one end of spacing is rotated and is connected with spacing pin, the side of keeping away from spacing pin of spacing and spacing fixed block tie point is equipped with the spring, the spring is located between spacing and the spacing fixed block.

Preferably, the guide vane base is provided with four through holes arranged in a rectangular array, and the number of the limiting structures is four, and the four limiting screws of the limiting structures penetrate through the four through holes respectively.

Preferably, the four through holes are formed in the inner sides of the four second limiting blocks, and the four first limiting blocks arranged in a rectangular array are arranged on the outer sides of the four second limiting blocks.

Further preferably, the positions of the guide piece base corresponding to the first limiting block and the second limiting block are provided with positioning grooves, and the position of the guide piece base close to the push block connecting block is provided with a push groove.

Further preferably, the ejector pad connecting block is the structural design of falling L shape, the ejector pad perpendicular to guide piece base sets up, be equipped with the handle fixed block between activity piece fixed block and the handle, the side of keeping away from the ejector pad connecting block of ejector pad is equipped with a plurality of sand grips.

Preferably, foot pad columns are arranged at four corners below the guide sheet base, and foot pads are arranged below the foot pad columns.

Further preferably, the side of the movable sheet close to the guide sheet base is provided with an inclined plane, and the inclined plane on the movable sheet is arranged on the side of the movable sheet close to the push block connecting block.

Has the beneficial effects that: according to the manual wafer guide machine, the wafer box is pushed to move through the push block structure, the wafer box is moved to the set position, the wafer is convenient to place in the wafer box, the manual wafer guide function is realized, and the wafer box is pushed to the set position through the limiting structure; this manual wafer guide's structure is ingenious, the manual removal wafer box of being convenient for, and the shift position is accurate, and the accurate of the wafer of being convenient for is put.

Drawings

Fig. 1 is a first view structural diagram of a manual film guide according to an embodiment of the present invention;

fig. 2 is a second view structural diagram of the manual film guide according to the embodiment of the present invention;

fig. 3 is a schematic view of a third view structure of a manual film guide according to an embodiment of the disclosure;

fig. 4 is a fourth view structural diagram of a manual film guide according to an embodiment of the disclosure;

FIG. 5 is a schematic structural diagram of a push block structure disclosed in the embodiments of the present invention;

fig. 6 is a schematic structural diagram of a limiting structure disclosed in the embodiment of the present invention;

FIG. 7 is a schematic view of a guide plate base according to an embodiment of the present invention;

fig. 8 is a schematic structural diagram of a manual wafer guide pushing a wafer cassette according to an embodiment of the present invention.

Reference numerals: 1-linear module, 11-servo motor, 12-single-shaft precision module, 2-first mounting plate, 3-air cylinder, 4-push plate, 5-second mounting plate, 51-mounting groove, 52-mounting hole, 6-thrust sensor, 7-pressure head, 8-linear guide rail and 9-reinforcing plate.

Detailed Description

The following are specific embodiments of the present invention and are further described with reference to the accompanying drawings, but the present invention is not limited to these embodiments.

As shown in fig. 1-8, a manual wafer guiding machine includes a wafer guiding base 1, the wafer guiding base 1 is a worktable, the wafer guiding base 1 is a rectangular block structure, and a pushing block structure 3 and a limiting structure 4 are disposed thereon, wherein the pushing block structure 3 is used for pushing a wafer box 7 to move, and moving the wafer box 7 to a set position, so as to facilitate placing of a wafer, and facilitate placing of the wafer in the wafer box 7, thereby realizing a manual wafer guiding function; the limiting structure 4 is used for limiting the position of the wafer box 7, and ensures that the wafer box 7 is pushed to a set position. Ejector pad structure 3 contains guide arm stopper 31, guide arm stopper 31 is fixed in the below of guide plate base 1, wear to be equipped with guide arm 32 on the guide arm stopper 31, guide arm 32 sets up and parallels with guide plate base 1 along the length direction of guide plate base 1, the one end of guide arm 32 is connected with ejector pad connecting block 33, the guide arm 32 end of keeping away from of ejector pad connecting block 33 is connected with ejector pad 34, ejector pad 34 sets up in the top of guide plate base 1, the ejector pad connecting block 33 end of keeping away from of guide arm 32 is connected with activity piece fixed block 35, the side that is close to guide plate base 1 of activity piece fixed block 35 is equipped with activity piece 38, the side that is adjacent with the side that is equipped with activity piece 38 on the activity piece fixed block 35 is connected with handle 37. The guide rod limiting block 31 is used for supporting and guiding the guide rod 32, and the guide rod 32 is used for driving the pushing block connecting block 33 to move along the length direction of the guide piece base 1, so that the pushing block 34 is pushed to move, the wafer box 7 on the guide piece base 1 is pushed to move, and the wafer box 7 is pushed to a set position; the movable piece fixing block 35 and the movable piece 38 ensure the balance of the guide rod 32, ensure that the guide rod 32 can be always parallel to the guide piece base 1, and ensure that the guide rod 32 moves stably and smoothly; the handle 37 is arranged to facilitate manual pushing of the guide rod 32. The top of guide plate base 1 is equipped with four second stoppers 6 that are the rectangular array and arrange, is equipped with spacing recess on the second stopper 6 for spacing and the location of the position of wafer box 7 guarantee that wafer box 7 can accurately move to the settlement position.

In this application, limit structure 4 contains spacing strip fixed block 41, spacing strip fixed block 41 is fixed in the below of guide vane base 1, the side of keeping away from guide vane base 1 of spacing strip fixed block 41 rotates and is connected with spacing strip 42, spacing strip 42 sets up along the length direction of guide vane base 1, the one end of spacing strip 42 rotates and is connected with spacing pin 43, the side of keeping away from spacing pin 43 of spacing strip 42 and the tie point of spacing strip fixed block 41 is equipped with spring 44, spring 44 is located between spacing strip 42 and the spacing strip fixed block 41. The limiting pin 43 is used for limiting the position of the wafer box 7, the limiting strip fixing block 41 is fixed with the guide piece base 1 through a jackscrew and used for installing the limiting strip 42, the limiting pin 43, the limiting strip 42 and the limiting strip fixing block 41 are connected in a rotating mode, the limiting pin 43 can move relative to the guide piece base 1, namely the limiting pin 43 stretches in the through hole 13, the limiting pin 43 can shrink when the wafer box 7 touches the limiting pin 43, and the wafer box 7 is convenient to position; meanwhile, the spring 44 can jack up the limit strip 42, so that the limit pin 43 always has an upward force, when the wafer box 7 moves to a set position, the limit pin 43 can extend out and jack a positioning hole in the wafer box 7, the wafer box 7 is positioned and limited, and the reset function of the limit pin 43 is realized. In this application, limit structure 4 has four, is equipped with four through-holes 13 that are the rectangular array and arrange on the guide plate base 1, and four limit structure 4's stop screw 43 wears to locate four through-holes 13 respectively in, and four limit structure 4 realize the location of wafer box 7 position on guide plate base 1, guarantee that wafer box 7 position before the removal places the position accuracy after accurate and the removal accurate. The wafer box 7 is placed at a position of the guide plate base 1 close to the push block connecting block 33 before moving, and is positioned above the two limit screws 43, and when the wafer box 7 moves to a position far away from the two limit screws 43 of the push block connecting block 33, the position of the wafer box 7 is limited and positioned through the limit screws 43.

In the application, the four through holes 13 are arranged on the opposite inner sides of the four second limiting blocks 6, so that the limiting screws 43 can be ensured to correspond to the bottoms of the wafer boxes 7; the relative outside of four second stopper 6 is equipped with four first stopper 5 that are the rectangular array and arrange, realizes the restriction to wafer box 7 position on guide piece base 1 through four first stopper 5 and four second stopper 6, guarantees that the position of wafer box 7 places the accuracy.

In the application, the guide sheet base 1 is provided with positioning grooves 12 corresponding to the first limiting block 5 and the second limiting block 6, so that the first limiting block 5 and the second limiting block 6 can be conveniently installed; the position of guide vane base 1, which is close to ejector pad connecting block 33, is provided with push slot 11, which is convenient for ejector pad connecting block 33 to move, and increases the moving distance of ejector pad connecting block 33.

In the application, the pushing block connecting block 33 is designed to be of an inverted L-shaped structure, so that the pushing block 34 can be conveniently installed; the pushing block 34 is arranged perpendicular to the guide vane base 1, so that the pushing block 34 can push the wafer box 7; a handle fixing block 36 is arranged between the movable sheet fixing block 35 and the handle 37, so that the handle 37 can be conveniently installed; the side surface of the pushing block 34 far away from the pushing block connecting block 33 is provided with a plurality of convex strips, so that the friction force of the contact point of the pushing block 34 and the wafer box 7 is increased, and the relative movement between the wafer box 7 and the pushing block 34 when being pushed is reduced.

In the application, four corners below the guide sheet base 1 are provided with foot pad columns 2 for supporting the guide sheet base 1; the foot pad 21 is arranged below the foot pad column 2, so that the friction force between the foot pad column 2 and a supporting surface or the ground is increased, and the guide sheet base 1 is firmly fixed.

In this application, the side that is close to guide vane base 1 of movable plate 38 is equipped with the inclined plane, and the inclined plane on the movable plate 38 sets up in the side that is close to ejector pad connecting block 33 of movable plate 38, guarantees that the round trip movement of movable plate 38 is smooth and easy, can not receive limit structure 4's hindrance.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the content of the present invention within the scope of the protection of the present invention.

Claims

1. The utility model provides a manual guide machine which characterized in that: comprises a guide piece base (1), the guide piece base (1) is a rectangular block structure, a push block structure (3) and a limiting structure (4) are arranged on the guide piece base, the push block structure (3) comprises a guide rod limiting block (31), the guide rod limiting block (31) is fixed below the guide piece base (1), a guide rod (32) is arranged on the guide rod limiting block (31) in a penetrating manner, the guide rod (32) is arranged along the length direction of the guide piece base (1) and is parallel to the guide piece base (1), one end of the guide rod (32) is connected with a push block connecting block (33), the end of the push block connecting block (33) far away from the guide rod (32) is connected with a push block (34), the push block (34) is arranged above the guide piece base (1), the end of the guide rod (32) far away from the push block connecting block (33) is connected with a movable piece fixing block (35), the side of the movable piece fixing block (35) close to the guide piece base (1) is provided with a movable piece (38), the side that is adjacent with the side that is equipped with movable piece (38) on movable piece fixed block (35) is connected with handle (37), the top of guide piece base (1) is equipped with four second stopper (6) that are the rectangular array and arrange, be equipped with spacing recess on second stopper (6).

2. A manual sheet guide as claimed in claim 1, wherein: spacing structure (4) contain spacing strip fixed block (41), spacing strip fixed block (41) are fixed in the below of guide piece base (1), the side of keeping away from guide piece base (1) of spacing strip fixed block (41) is rotated and is connected with spacing strip (42), spacing strip (42) set up along the length direction of guide piece base (1), the one end of spacing strip (42) is rotated and is connected with spacing pin (43), the side of keeping away from spacing pin (43) of spacing strip (42) and spacing strip fixed block (41) tie point is equipped with spring (44), spring (44) are located between spacing strip (42) and spacing strip fixed block (41).

3. A manual sheet guide as claimed in claim 2, wherein: the guide vane base (1) is provided with four through holes (13) arranged in a rectangular array, the limiting structures (4) are four, and the limiting screws (43) of the limiting structures (4) are respectively arranged in the four through holes (13) in a penetrating mode.

4. A manual sheet guide according to claim 3, wherein: the four through holes (13) are formed in the inner sides, relative to the four second limiting blocks (6), of the four second limiting blocks (6), and four first limiting blocks (5) arranged in a rectangular array are arranged on the outer sides, relative to the second limiting blocks (6).

5. The manual sheet guide of claim 4, wherein: the position that corresponds first stopper (5) and second stopper (6) on guide piece base (1) all is equipped with constant head tank (12), the position that is close to ejector pad connecting block (33) of guide piece base (1) is equipped with and pushes away groove (11).

6. A manual sheet guide as claimed in claim 1, wherein: ejector pad connecting block (33) are the structural design of falling L shape, ejector pad (34) perpendicular to guide piece base (1) sets up, be equipped with handle fixed block (36) between activity piece fixed block (35) and handle (37), the side of keeping away from ejector pad connecting block (33) of ejector pad (34) is equipped with a plurality of sand grips.

7. A manual sheet guide as claimed in claim 1, wherein: the guide vane is characterized in that four corners below the guide vane base (1) are provided with foot pad columns (2), and foot pads (21) are arranged below the foot pad columns (2).

8. A manual sheet guide as claimed in claim 1, wherein: the side of the movable sheet (38) close to the guide sheet base (1) is provided with an inclined plane, and the inclined plane on the movable sheet (38) is arranged on the side of the movable sheet (38) close to the push block connecting block (33).