CN114851062A - Full-automatic intelligent polishing machine - Google Patents

Full-automatic intelligent polishing machine Download PDF

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Publication number
CN114851062A
CN114851062A CN202210609906.8A CN202210609906A CN114851062A CN 114851062 A CN114851062 A CN 114851062A CN 202210609906 A CN202210609906 A CN 202210609906A CN 114851062 A CN114851062 A CN 114851062A
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CN
China
Prior art keywords
rotary
air
module
polishing
bearing
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Granted
Application number
CN202210609906.8A
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Chinese (zh)
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CN114851062B (en
Inventor
高令
谭志强
李叶明
白全升
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Shenzhen Xike Precision Technology Co ltd
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Shenzhen Xike Precision Technology Co ltd
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Priority to CN202210609906.8A priority Critical patent/CN114851062B/en
Publication of CN114851062A publication Critical patent/CN114851062A/en
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Publication of CN114851062B publication Critical patent/CN114851062B/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0023—Other grinding machines or devices grinding machines with a plurality of working posts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0069—Other grinding machines or devices with means for feeding the work-pieces to the grinding tool, e.g. turntables, transfer means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/005—Feeding or manipulating devices specially adapted to grinding machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/02—Frames; Beds; Carriages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/20—Drives or gearings; Equipment therefor relating to feed movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

The invention discloses a full-automatic intelligent polishing machine, which comprises: the polishing machine comprises a frame, a rotary transposition mechanism arranged in the middle of the frame and used for switching stations, a plurality of bearing positioning devices arranged on the rotary transposition mechanism in the periphery and used for fixing workpieces, a gas distribution module and a power distribution module arranged in the middle of the rotary transposition mechanism, and a plurality of polishing manipulators arranged at the upper end of the frame and used for processing the workpieces on the bearing positioning devices. The rotary transposition mechanism is provided with a plurality of bearing positioning devices in equal circumference, a plurality of polishing manipulators for processing workpieces are arranged above the rotary transposition mechanism, the bearing positioning devices are driven by the rotary transposition mechanism to be switched among the polishing manipulators, different polishing manipulators are used for finishing processing of different procedures of the workpieces, the workpieces or polishing discs do not need to be repeatedly disassembled and assembled, errors caused by clamping are reduced, and the processing precision is improved.

Description

Full-automatic intelligent polishing machine
The technical field is as follows:
the invention relates to the technical field of polishing processing, in particular to a full-automatic intelligent polishing machine.
Background art:
polishers, also known as grinders, are often used for mechanical grinding, polishing, and waxing. The working principle is as follows: the motor drives the sponge or wool polishing disc arranged on the polishing machine to rotate at a high speed, and the polishing disc and the polishing agent act together and rub the surface to be polished, so that the aims of removing paint surface pollution, oxide layer and shallow mark can be achieved. The rotation speed of the polishing disk is generally 1500-3000r/min, and is mostly continuously variable, and can be adjusted at any time during construction according to requirements.
Traditional burnishing machine structure is not compact, and is bulky, and can only accomplish a process on an equipment usually, and want to accomplish many to the process processing to the product, often need change equipment or change polishing dish, because change equipment or change polishing dish need carry out the clamping again, therefore can produce the clamping error, and then lead to the machining precision to reduce, influence off-the-shelf machining precision, and often machining efficiency also can reduce, has prolonged product processing cycle.
In view of the above, the present inventors propose the following.
The invention content is as follows:
the invention aims to overcome the defects of the prior art and provides a full-automatic intelligent polishing machine.
In order to solve the technical problems, the invention adopts the following technical scheme: a full-automatic intelligent polishing machine comprises: the polishing machine comprises a frame, a rotary transposition mechanism arranged in the middle of the frame and used for switching stations, a plurality of ring periphery arranged on the rotary transposition mechanism and used for fixing a workpiece, a gas distribution module and a power distribution module which are arranged in the middle of the rotary transposition mechanism and used for connecting the rotary transposition mechanism and used for realizing power supply and gas supply of the rotary transposition mechanism, and a plurality of ring periphery arranged on the frame, at the upper end of the frame and used for aligning the rotary transposition mechanism and used for processing the workpiece, wherein the polishing mechanical arm is arranged on the rotary transposition mechanism and used for processing the workpiece, and the polishing mechanical arm is arranged above the rotary transposition mechanism and drives the rotary transposition mechanism to switch the rotary transposition mechanism and the polishing mechanical arm.
Furthermore, in the above technical solution, the bearing and positioning device includes an R-axis module installed on the rotary transposition mechanism and cooperating with the rotary transposition mechanism and the polishing manipulator to precisely position and process the workpiece, a rotary air distribution rotating shaft installed on the R-axis module and used for transmitting air flow and torque, and a positioning fixture installed on the rotary air distribution rotating shaft and used for fixing the workpiece, wherein a first air path penetrating through a rotation center and used for connecting the air distribution module is arranged in the middle of the rotary air distribution rotating shaft.
Further, in the above technical solution, the rotating air distribution rotating shaft includes a hollow rotating inner shaft connecting the output shaft of the R-shaft module and the positioning fixture, an outer shaft sleeve mounted on the outer shell of the R-shaft module and sleeved on the periphery of the hollow rotating inner shaft, at least one air passage groove disposed between the outer shaft sleeve and the hollow rotating inner shaft, a sealing ring set disposed on two sides of the air passage groove, at least one first air passage disposed in the hollow rotating inner shaft and communicated with the air passage groove, at least one second air passage disposed in the outer shaft sleeve and communicated with the air passage groove to communicate the first air passage, and a first bearing disposed between the outer shaft sleeve and the hollow rotating inner shaft, each first air passage, each second air passage and one air passage groove are communicated in a group to form a second air passage; the first air passage passes through an output shaft of the R-shaft module and the hollow rotating inner shaft.
Furthermore, in the above technical solution, the bearing and positioning device further includes a flange plate installed at an upper end of the outer shaft sleeve, and a waterproof cover installed on the flange plate and covering the R-axis module and the rotating air distribution rotating shaft, and the R-axis module includes a first cam divider for installing and supporting the rotating air distribution rotating shaft, and a first servo motor connected to the power distribution module and driving the first cam divider to operate.
Furthermore, in the above technical solution, the bearing and positioning device is further provided with a silencing device, the silencing device includes a sponge body disposed at an exhaust port of the vacuum generator and a sponge mounting cover mounted on an outer side of the waterproof cover and used for fixing the sponge body, and the vacuum generator is connected with the first air path and the air distribution module.
Further, in the above technical solution, a first force sensor for detecting pressure is disposed at the bottom of the bearing and positioning device.
Furthermore, in the above technical solution, the polishing manipulator includes an X-axis moving module installed on the frame and located above the rotary indexing mechanism, a Y-axis moving module installed on the X-axis moving module, a Z-axis moving module vertically installed on the Y-axis moving module, a polishing device installed at a lower end of the Z-axis moving module and used for processing the workpiece, and a second force sensor installed between the Z-axis moving module and the polishing device and used for detecting polishing pressure.
Furthermore, in the above technical solution, the rotary indexing mechanism includes an indexing rotary disk rotatably mounted on the frame and used for mounting and fixing the bearing and positioning device, and a first driving device used for driving the indexing rotary disk to rotate, the air distribution module includes a hollow air supply pipe mounted in a rotation center of the indexing rotary disk, a multi-path air passage joint plate disposed at an upper end of the hollow air supply pipe and correspondingly connected to the bearing and positioning device, and an air supply air tap rotatably mounted at a lower end of the hollow air supply pipe and used for connecting to an air supply pipe, and the multi-path air passage joint plate is provided with branch air taps corresponding to the number of the bearing and positioning devices and connected through a pipe.
Further, in the above technical solution, the first driving device is a second cam divider, the indexing rotary disc is mounted on an output shaft of the second cam divider, and the hollow air feed pipe penetrates through the output shaft of the second cam divider; the distribution module further comprises a plurality of drivers which are arranged on the indexing rotary disk and are electrically connected with the bearing positioning device, a multi-channel conductive slip ring which is arranged at the upper end of the rack and is connected with the drivers, and a slip ring fixing seat which is arranged on a central rotating axis of the rotary transposition mechanism and is used for supporting the multi-channel conductive slip ring.
Furthermore, in the above technical solution, the rotary indexing mechanism is further provided with a water separation device for isolating the gas distribution module from the bearing positioning device and isolating the power distribution module from the bearing positioning device, the water separation device includes a water receiving table mounted on the indexing rotary disk and sleeved on the periphery of the driver to isolate the bearing positioning device and a water receiving tank sleeved on the periphery of the indexing rotary disk to receive the cooling liquid, and the water receiving table is circumferentially provided with a plurality of water-stop notches sleeved on the periphery of the bearing positioning device; the multi-channel conductive slip ring is connected with the plurality of drivers through a plurality of groups of wire harnesses respectively, and the wire harnesses penetrate through the middle of the slip ring fixing seat.
After adopting the technical scheme, compared with the prior art, the invention has the following beneficial effects:
1. according to the invention, a plurality of bearing and positioning devices for installing and positioning workpieces are uniformly arranged on the upper circumference of the rotary transposition mechanism, a plurality of polishing manipulators for processing the workpieces are arranged above the rotary transposition mechanism, the rotary transposition mechanism drives the bearing and positioning devices to be switched with the polishing manipulators, the processing of different procedures on the workpieces is completed through different polishing manipulators, the workpieces or polishing discs do not need to be repeatedly disassembled and assembled, so that the errors caused by clamping are reduced, and the processing precision is improved.
Secondly, will bear positioner and adopt the circumference evenly distributed, can make overall structure compacter, the equipment volume is littleer, reduces the place area occupied, and realizes the processing of a plurality of stations by an equipment, can reduce enterprise manufacturing cost by a wide margin, is favorable to enterprise transformation development.
2. According to the invention, the rotary air distribution rotating shaft for transmitting power and connecting the air distribution module is arranged between the R-axis module and the positioning fixture, the first air passage in the rotary air distribution rotating shaft is connected with the vacuum chuck on the positioning fixture to realize adsorption positioning installation on a workpiece, and the R-axis module can drive the positioning fixture to drive the workpiece to rotate through rotating the air distribution rotating shaft so as to match with the polishing manipulator to realize multi-axis processing on the workpiece, so that the processing capacity of the polishing machine is increased, and the processing universality of the polishing machine is improved. Secondly, an air channel groove is formed between the hollow rotating inner shaft and the outer shaft sleeve, a first air channel and a second air channel which are connected with the air channel groove are respectively arranged in the hollow rotating inner shaft and the outer shaft sleeve, an air channel is formed, and the air channel is closed by the air channel groove, so that the first air channel is always communicated with the second air channel through the air channel groove in the process that the R-shaft module drives the hollow rotating inner shaft to rotate, after the second air channel is connected with the air distribution module through a pipeline, the connecting pipeline cannot be wound in a rotating mode all the time, independent communication of multiple air channels can be achieved between the air distribution module and the positioning fixture through the rotating air distribution rotating shaft, and application of multiple air channels on the positioning fixture in the bearing and positioning device is improved.
3. According to the invention, the sponge body is arranged at the first exhaust nozzle connected with the exhaust port of the vacuum generator, noise is absorbed by the sponge body to achieve the noise reduction effect, and the sponge body is fixed on the outer side of the waterproof cover by the sponge mounting cover, so that the sponge body can be quickly replaced, and the noise reduction effect is prevented from being deteriorated due to the fact that residues carried in grinding fluid and cooling fluid are sucked by the sponge body. Secondly, because the sponge installation cover adopts the fix with screw in the outside of buckler, the dismouting is simple quick, and the cavernosum low price, and the replacement cost is low to when reaching good noise reduction effect, also can reduce the cost of making an uproar by a wide margin.
4. According to the invention, the first force transducer is additionally arranged at the bottom of the bearing and positioning device, the first force transducer is used for sensing and detecting the loss and the offset of a workpiece on the bearing and positioning device in the machining process, and then the numerical control system of the polishing machine is used for controlling the polishing manipulator to automatically correct and compensate according to data fed back by the first force transducer, so that the machining error is further reduced, and the effect of improving the machining precision is achieved. Secondly, a clamping error can be detected after the workpiece is clamped by the positioning clamp through the first force measuring sensor, the clamping error is fed back to a numerical control system of the polishing machine, the numerical control system of the polishing machine controls the bearing positioning device to adjust the position of the workpiece according to data fed back by the first force measuring sensor, and controls the polishing manipulator to automatically adjust the tool setting, so that the error generated in the clamping process is automatically corrected and compensated, and more accurate processing is realized. In addition, the first force measuring sensor can sense and detect pressure change in the machining process, abrasion of a polishing disc on the polishing manipulator can be judged by detecting the pressure change and combining the numerical control system, and then the feeding amount of the polishing manipulator is adjusted to compensate the abrasion of the polishing disc, so that the effect of improving machining precision is achieved. Secondly, adopt to add the second force cell between Z axle removal module and the burnishing device, detect burnishing device's atress change and feed back to the numerical control system of burnishing machine in real time by the response of second force cell, the numerical control system of burnishing machine combines the data of first force cell sensor according to the second force cell and more accurate the judgement out the wearing and tearing volume of polishing dish, thereby the feed volume of more accurate adjustment burnishing machine manipulator, with the wearing and tearing of compensation polishing dish, further promote the effect of machining precision.
5. According to the invention, the hollow air supply pipe is arranged in the rotation center of the indexing rotation disc in a penetrating manner, so that the hollow air supply pipe can rotate coaxially with the indexing rotation disc, the air source air faucet connected with the air supply pipeline is connected with the hollow air supply pipe in a rotating manner, the air source air faucet can be kept still in the process that the hollow air supply pipe rotates coaxially with the indexing rotation disc, the air supply pipeline is prevented from being wound on the indexing rotation disc, and the multi-path air flue joint plate at the upper end of the hollow air supply pipe is connected with different bearing and positioning devices on the indexing rotation disc through the multiple branch air faucets, so that the branch pipelines on the indexing rotation disc are prevented from being wound, an excellent air distribution scheme is achieved, and the problem that the pipelines are easy to wind in the conventional equipment adopting a rotary transposition scheme is solved.
6. In the invention, the drivers which are the same as the bearing positioning devices in number and correspond to the bearing positioning devices one by one are arranged on the indexing rotating disc, each driver independently controls an R-axis module in one bearing positioning device to work, and the multichannel conductive sliding rings are arranged on the rotating central axis at the upper part of the rotating transposition mechanism and are connected with the main control circuit, and the multichannel conductive sliding rings are arranged on the rotating central axis of the rotating transposition mechanism, so that the winding of a lead can be effectively avoided, thereby realizing the electrical connection between the bearing positioning devices and a numerical control system, controlling each bearing positioning device by matching with one driver, effectively reducing the connecting wire harness between the main control circuit and the multichannel conductive sliding rings, further reducing the number of the conductive sliding rings in the multichannel conductive sliding rings, reducing the size of the multichannel conductive sliding rings, leading the overall structure to be more compact, reducing the volume of a polishing machine, and simultaneously reducing the manufacturing or purchasing cost of the multichannel conductive sliding rings, the production cost of enterprises is saved.
7. According to the invention, the rotary transposition mechanism adopts the second cam divider as a driving device to drive the indexing rotary disc to rotate for transposition, so that the workpiece is accurately switched between the polishing manipulators, an accurate replacement process is achieved, and meanwhile, the R-axis module accurately realizes the R-axis adjustment of the workpiece in a mode that the first servo motor drives the first cam divider, so that the workpiece is accurately positioned, and the processing accuracy of the workpiece is improved; and because the workpiece can be processed in a plurality of processes only by clamping once, and the R-axis module can accurately return to the initial position and the angle after the workpiece is processed in all processes by scheduling of the numerical control system, when the next workpiece is clamped, the positioning precision and the clamping error are consistent with the previous workpiece, so that tool setting does not need to be corrected again, the processing precision deviation of batch processed parts caused by different clamping errors is reduced, and the processing precision of the whole batch of workpieces is ensured not to generate large difference. And secondly, controlling the R-axis module to adjust the position of the workpiece by combining the clamping error detected by the first force cell, so as to correct the clamping error and further reduce the clamping error.
Description of the drawings:
FIG. 1 is a perspective view of the present invention;
FIG. 2 is a first internal block diagram of the present invention;
FIG. 3 is a second internal structural view of the present invention;
FIG. 4 is an enlarged view of a portion of FIG. 3 at A;
FIG. 5 is a perspective view of the load bearing positioning device of the present invention;
FIG. 6 is a first cross-sectional view of the load bearing positioning device of the present invention;
FIG. 7 is a second cross-sectional view of the load bearing positioning device of the present invention;
FIG. 8 is a schematic diagram of the distribution modules and the distribution modules of the present invention;
FIG. 9 is a perspective view of the air distribution module of the present invention;
fig. 10 is a perspective view of the polishing robot of the present invention.
The specific implementation mode is as follows:
the invention is further illustrated below with reference to specific embodiments and the accompanying drawings.
As shown in fig. 1 to 10, a fully automatic intelligent polishing machine is provided, which includes: frame 1, set up in 1 middle part of the frame is used for switching station rotatory transposition mechanism 2, a plurality of ring install in rotatory transposition mechanism 2 is last and be used for fixed work piece bear positioner 3, set up in be in rotatory transposition mechanism 2 the centre is used for connecting bear positioner 3 realize the distribution module 4 and the distribution module 5 and a plurality of power supply air feed set up in 1 upper end of the frame and be used for right bear positioner 3 is last the work piece carries out the burnishing machine manipulator 6 of processing, burnishing machine manipulator 6 is located bear positioner 3 top, just rotatory transposition mechanism 2 drive bear positioner 3 in switching between burnishing machine manipulator 6. The ring is equally arranged on the rotary transposition mechanism 2, a plurality of bearing and positioning devices 3 used for installing and positioning workpieces are arranged on the ring, a plurality of polishing manipulators 6 used for processing the workpieces are arranged above the rotary transposition mechanism 2, the rotary transposition mechanism 2 drives the bearing and positioning devices 3 to be switched among the polishing manipulators 6, the processing of different procedures on the workpieces is completed through different polishing manipulators 6, the workpieces or polishing discs do not need to be repeatedly disassembled and assembled, errors caused by clamping are reduced, and the processing precision is improved. Secondly, will bear positioner 3 and adopt the circumference evenly distributed, can make overall structure compacter, the equipment volume is littleer, reduces the place area occupied, and realizes the processing of a plurality of stations by an equipment, can reduce enterprise manufacturing cost by a wide margin, is favorable to enterprise transformation development.
The bearing and positioning device 3 comprises an R shaft module 31 which is arranged on the rotary transposition mechanism 2 and matched with the rotary transposition mechanism 2 and the polishing manipulator 6 to accurately position and process the workpiece, a rotary air distribution rotating shaft 32 which is arranged on the R shaft module 31 and used for transmitting air flow and torque, and a positioning clamp 33 which is arranged on the rotary air distribution rotating shaft 32 and used for fixing the workpiece, wherein a first air passage 34 which penetrates through a rotary center and is used for connecting the air distribution module 4 is arranged in the middle of the rotary air distribution rotating shaft 32. Through at R axle module 31 with set up rotatory distribution pivot 32 transmission power and the rotatory distribution pivot 32 of connecting distribution module 4 between the positioning fixture 33, the vacuum chuck on the positioning fixture 33 is connected by first gas circuit 34 in the rotatory distribution pivot 32, the realization is to the absorption location installation of work piece, and R axle module 31 also can drive positioning fixture 33 through rotatory distribution pivot 32 and drive the work piece rotatory, realize the multiaxis processing to the work piece with cooperation polishing machine hand 6, increase the machining capacity of burnishing machine, promote burnishing machine processing commonality, and in R axle module 31 through rotatory distribution pivot 32 drive positioning fixture 33 rotation process, the pipeline of connecting distribution module 4 and first gas circuit 34 can not twine all the time.
The rotating air distribution rotating shaft 32 includes a hollow rotating inner shaft 321 connecting an output shaft of the R-shaft module 31 and the positioning fixture 33, an outer shaft sleeve 322 mounted on an outer shell of the R-shaft module 31 and sleeved on the periphery of the hollow rotating inner shaft 321, at least one air passage groove 323 disposed between the outer shaft sleeve 322 and the hollow rotating inner shaft 321, sealing ring sets 324 disposed on two sides of the air passage groove 323, at least one first air passage 325 disposed in the hollow rotating inner shaft 321 and communicated with the air passage groove 323, at least one second air passage 326 disposed in the outer shaft sleeve 322 and communicated with the air passage groove 323 to communicate with the first air passage 325, and a first bearing 327 disposed between the outer shaft sleeve 322 and the hollow rotating inner shaft 321, and each first air passage 325 and each second air passage 326 are communicated with one air passage groove 323 to form a second air passage, the first air passage 325 is axially arranged in the hollow rotating inner shaft 321, and the second air passage 326 is radially arranged in the outer shaft sleeve 322; the first air passage 34 passes through the output shaft of the R-axis module 31 and the hollow rotating inner shaft 321. When multiple sets of second air passages are used, the sealing rings in the sealing ring set 32 can be shared between the two air passage grooves 323.
The air channel groove 323 is arranged between the hollow rotating inner shaft 321 and the outer shaft sleeve 322, the first air channel 325 and the second air channel 326 connected with the air channel groove 323 are respectively arranged in the hollow rotating inner shaft 321 and the outer shaft sleeve 322 to form an air channel, and the air channel is sealed by the sealing ring groups 324 arranged at two sides of the air channel groove 323, so that in the process that the R-shaft module 31 drives the hollow rotating inner shaft 321 to rotate, the first air channel 325 is always communicated with the second air channel 326 through the air channel groove 323, after the second air channel 326 is connected with the air distribution module 4 through a pipeline, the connecting pipeline cannot be wound in a rotating mode all the time, and therefore the independent communication of multiple air channels can be realized between the air distribution module 4 and the positioning fixture 33 through the rotating air distribution rotating shaft 32, and the application of multiple air channels on the positioning fixture 33 in the bearing and positioning device 3 is improved. For example: in an embodiment, two sets of second gas circuits are arranged in the rotary gas distribution rotating shaft 32, the cylinder can be additionally arranged on the positioning fixture 33 as a power device through the two sets of second gas circuits, a power source on the positioning fixture 33 can be increased, the workpiece can be adjusted according to the adoption of a linear cylinder or a rotary cylinder and the like, so that the multifunctional application of the bearing positioning device 3 is promoted, the universality of the bearing positioning device 3 is promoted, the multifunctional application of the bearing positioning device 3 can be further promoted through the number of the second gas circuits, and the universality of the bearing positioning device 3 can be increased through the adjustment of the power source. Secondly, the installation of different workpieces can also be achieved by replacing different positioning fixtures 33.
The bearing and positioning device 3 is further provided with a silencing device 8, the silencing device 8 comprises a sponge body arranged at an exhaust port of the vacuum generator 340 and a sponge mounting cover 82 which is arranged on the outer side of the waterproof cover 36 and used for fixing the sponge body, and the vacuum generator 340 is connected with the first air path 34 and the air distribution module 4. The waterproof cover 36 is further provided with a first exhaust nozzle 83 for connecting with the exhaust port of the vacuum generator 340, and one end of the first exhaust nozzle 83 is pressed against the sponge body.
In an embodiment, the positioning fixture 33 is fixed by vacuum chuck, therefore, it is necessary to set the vacuum generator 340 on the pipeline connecting the first air passage 34 and the air distribution module 4, and the grinding fluid and the cooling fluid are sucked into the pipeline in the process of generating negative pressure adsorption by the vacuum generator 340 and discharged through the exhaust port of the vacuum generator 340, since the discharged gas is doped with liquid, a large noise is generated at the exhaust port, the sponge is arranged at the first exhaust nozzle 83 connecting the exhaust port of the vacuum generator 340, and the noise is absorbed by the sponge to achieve the noise reduction effect, and the sponge is fixed outside the waterproof cover 36 by the sponge mounting cover 82, so that the sponge can be replaced quickly to avoid the deterioration of the noise reduction effect caused by the suction of the residue carried in the grinding fluid and the cooling fluid by the sponge. Secondly, because the sponge installation cover 82 is fixed on the outer side of the waterproof cover 36 by adopting screws, the assembly and disassembly are simple and quick, the price of the sponge body is low, and the replacement cost is low, so that the noise reduction cost can be greatly reduced while a good noise reduction effect is achieved.
The bottom of the bearing and positioning device 3 is provided with a first load cell 9 for detecting pressure. The first force measuring sensor 9 is additionally arranged at the bottom of the bearing and positioning device 3, the first force measuring sensor 9 senses and detects the loss and the offset of a workpiece on the bearing and positioning device 3 in the machining process, and then the polishing mechanical arm 6 is controlled by a numerical control system of the polishing machine to automatically correct and compensate according to data fed back by the first force measuring sensor 9, so that the machining error is further reduced, and the effect of improving the machining precision is achieved. Secondly, the first force sensor 9 can detect a clamping error after the workpiece is clamped by the positioning clamp 33, the clamping error is fed back to a numerical control system of the polishing machine, the numerical control system of the polishing machine controls the bearing positioning device 3 to adjust the position of the workpiece according to data fed back by the first force sensor 9, and controls the polishing manipulator 6 to automatically adjust the tool setting, so that the error generated in the clamping process is automatically corrected and compensated, and more accurate processing is realized. In addition, the first force measuring sensor 9 can sense and detect pressure change in the machining process, abrasion of a polishing disc on the polishing manipulator 6 can be judged by detecting the pressure change and combining a numerical control system, and then the feeding amount of the polishing manipulator 6 is adjusted to compensate the abrasion of the polishing disc, so that the effect of improving the machining precision is achieved.
In this embodiment, four polishing manipulators 6 symmetrically located at different positions of the rotary indexing mechanism 2 are disposed on the rack 1, and each polishing manipulator 6 includes an X-axis moving module 61 mounted on the rack 1 and located above the rotary indexing mechanism 2, a Y-axis moving module 62 mounted on the X-axis moving module 61, a Z-axis moving module 63 vertically mounted on the Y-axis moving module 62, a polishing device 64 mounted at a lower end of the Z-axis moving module 63 and configured to process the workpiece, and a second load cell 65 disposed between the Z-axis moving module 63 and the polishing device 64 and configured to detect a polishing pressure. The polishing apparatus 64 is further provided with a nozzle 66 for spraying the abrasive liquid and the coolant.
Adopt and add second force cell 65 between Z axle removal module 63 and the burnishing device 64, detect the atress change of burnishing device 64 and feed back the numerical control system of burnishing machine in real time by second force cell 65 response, the numerical control system of burnishing machine combines the data of first force cell 9 according to second force cell 65 more accurate judgement polishing dish wearing and tearing volume, thereby the feed volume of more accurate adjustment burnishing machine manipulator 6, with the wearing and tearing of compensation polishing dish, further promote the effect of machining precision.
The rotary indexing mechanism 2 comprises an indexing rotary disk 21 which is rotatably mounted on the frame 1 and is used for mounting and fixing the bearing and positioning device 3 and a first driving device 22 for driving the indexing rotary disk 21 to rotate, the air distribution module 4 comprises a hollow air supply pipe 41 which is mounted in the rotation center of the indexing rotary disk 21 in a penetrating manner, a multi-path air passage joint plate 42 which is arranged at the upper end of the hollow air supply pipe 41 and is correspondingly connected with the bearing and positioning device 3, and an air source air tap 43 which is rotatably mounted at the lower end of the hollow air supply pipe 41 and is used for connecting an air supply pipeline, and the multi-path air passage joint plate 42 is provided with branch air taps 44 which correspond to the bearing and positioning device 3 in number and are connected through pipelines.
The hollow air supply pipe 41 is arranged in the rotation center of the indexing rotation disc 21 in a penetrating mode, so that the hollow air supply pipe 41 can rotate coaxially with the indexing rotation disc 21, the air supply air nozzle 43 connected with an air supply pipeline is connected with the hollow air supply pipe 41 in a rotating mode, the air supply air nozzle 43 can be kept still in the process that the hollow air supply pipe 41 rotates coaxially with the indexing rotation disc 21, the air supply pipeline is prevented from being wound on the indexing rotation disc 21, the multi-path air channel joint plate 42 at the upper end of the hollow air supply pipe 41 is connected with different bearing and positioning devices 3 on the indexing rotation disc 21 through the multiple branch air nozzles 44, winding of branch pipelines on the indexing rotation disc 21 is avoided, an excellent air distribution scheme is achieved, and the problem that pipelines are easy to wind in a rotary transposition scheme in traditional equipment is solved.
The first driving device 22 is a second cam divider, the indexing rotary disc 21 is mounted on an output shaft of the second cam divider, and the hollow air supply pipe 41 penetrates through the output shaft of the second cam divider; the power distribution module 5 further comprises a plurality of drivers 51 installed on the indexing rotary disk 21 and electrically connected with the bearing and positioning device 3, a multi-channel conductive slip ring 52 installed at the upper end of the rack 1 and connected with the drivers 51, and a slip ring fixing seat 53 installed on the central rotation axis of the rotary transposition mechanism 2 and used for supporting the multi-channel conductive slip ring 52. The second cam divider is a 110DF flange divider and comprises a servo motor and a cam divider.
The drivers 51 which are the same as the bearing positioning devices 3 in number and correspond to one another are arranged on the indexing rotary disk 21, each driver 51 independently controls the R-axis module 31 in one bearing positioning device 3 to work, the multichannel conductive slip rings 52 are arranged on the rotary central axis at the upper part of the rotary transposition mechanism 2 to be connected with a main control circuit, and the multichannel conductive slip rings 52 are arranged on the rotary central axis of the rotary transposition mechanism 2 to effectively avoid the winding of wires, so that the bearing positioning devices 3 are electrically connected with a numerical control system, each bearing positioning device 3 is controlled by matching one driver 51, the connecting wire harness between the main control circuit and the multichannel conductive slip rings 52 can be effectively reduced, the number of the conductive slip rings in the multichannel conductive slip rings 52 is further reduced, the size of the multichannel conductive slip rings 52 is reduced, the integral structure is more compact, and the volume of the polishing machine is reduced, meanwhile, the manufacturing or purchasing cost of the multi-channel conductive slip ring 52 can be reduced, and the production cost of an enterprise is saved.
The bearing and positioning device 3 further includes a flange 35 mounted on the upper end of the outer shaft sleeve 322, and a waterproof cover 36 mounted on the flange 35 and covering the R-axis module 31 and the rotating air distribution rotating shaft 32, where the R-axis module 31 includes a first cam divider 311 for mounting and supporting the rotating air distribution rotating shaft 32, and a first servo motor 312 connected to the power distribution module 5 and used for driving the first cam divider 311 to operate. The first air passage 34 penetrates the output shaft of the first cam divider 311. The first cam divider 311 is a conventional cam divider.
The rotary transposition mechanism 2 adopts the second cam divider as a driving device to drive the indexing rotary disc 21 to rotate for transposition so as to realize accurate switching of workpieces between the polishing mechanical arms 6 and achieve an accurate replacement process, and meanwhile, the R-axis module 31 adopts a mode that the first servo motor 312 drives the first cam divider 311 to accurately realize R-axis adjustment of the workpieces, so that accurate positioning of the workpieces is achieved, and the machining accuracy of the workpieces is improved; and because the workpiece only needs to be clamped once to realize the processing of a plurality of procedures, and the R-axis module 31 can accurately return to the initial position and the angle after the workpiece is processed in all procedures through the scheduling of the numerical control system, when the next workpiece is clamped, the positioning precision and the clamping error are consistent with the previous workpiece, so that the tool setting is not required to be corrected again, the processing precision deviation caused by different clamping errors of batch processed parts is reduced, and the processing precision of the whole batch of workpieces is ensured not to generate large difference. Secondly, by combining the clamping error detected by the first force cell 9, the numerical control system of the polishing machine controls the R-axis module 31 to adjust the position of the workpiece, so that the deviation of the clamping error is corrected, and the clamping error is further reduced.
The rotary transposition mechanism 2 is further provided with a water separation device 7 for isolating the gas distribution module 4 from the bearing positioning device 3 and isolating the power distribution module 5 from the bearing positioning device 3, the water separation device 7 comprises a water receiving table 71 which is arranged on the indexing rotary disk 21 and sleeved on the periphery of the driver 51 to isolate the bearing positioning device 3 and a water receiving tank 72 which is sleeved on the periphery of the indexing rotary disk 21 and used for receiving cooling liquid, and a plurality of water isolating notches 73 which are sleeved on the periphery of the bearing positioning device 3 are arranged on the water receiving table 71 in a surrounding manner; the multi-channel conductive slip ring 52 is connected with the plurality of drivers 51 through a plurality of groups of wire harnesses, and the wire harnesses pass through the middle of the slip ring fixing seat 53. A feeding and discharging opening 10 for taking and discharging materials is arranged on one side of the frame 1, an extension cover is arranged on the inner side of the feeding and discharging opening 10 and is arranged on a dustproof face cover plate 11 above the bearing and positioning device 3, and a notch 721 which can rotate along with the rotary transposition mechanism 2 and corresponds to the feeding and discharging opening 10 so as to facilitate installation and disassembly of the workpiece is arranged on one side of the water receiving groove 72.
Adopt water receiving platform 71 cover to establish in the periphery of driver 51 to keep apart driver 51 and bear positioner 3, polishing manipulator 6 is carrying on the work piece on the positioner 3 to bear the weight of like this in the course of working lapping liquid and coolant liquid can not splash to driver 51, realize effective waterproof of distribution module 5, and not only collect the coolant liquid incasement with lapping liquid and coolant liquid through the water receiving tank 72 of cover establishing in indexing rotary disk 21 periphery, also can prevent that lapping liquid and coolant liquid from splashing other positions of frame 1, in order to guarantee the cleanness of frame 1.
Install on the water receiving platform 71 and cover and locate carousel window board 74 on the driver 51, sliding ring fixing base 53 install in on the carousel window board 74, carousel window board 74 inboard still be provided with install in be used for detecting the manometer 45 of this intraductal pressure on the pipeline, just be provided with on the carousel window board 74 and correspond manometer 45 is used for reading manometer 45's perspective window 75. The data of the pressure gauge 45 can be read in time through the perspective window 75 arranged on the inner side of the turntable window plate 74, so that a user can monitor the condition of the gas distribution module 4 according to the pressure gauge 45. The indexing rotary disk 21 is further provided with sets of first through holes 210 for the conduits and the wiring harnesses to extend from within the rotary disk window plate 74 into the carrier positioning means 3. One hole of the first through hole group 210 is positioned in the turntable window plate 74, the other hole is positioned in the bearing positioning device 3, and the pipelines and wiring harnesses of the air distribution module 4 and the power distribution module 5 pass through the first through hole group 210 from the lower end of the indexing rotary disk 21 to be connected with the bearing positioning device 3.
In conclusion, when the polishing machine works, a workpiece to be polished is manually installed on the positioning fixture 33 of the bearing and positioning device 3, the bearing and positioning device 3 is driven by the rotary transposition mechanism 2 to be sequentially transferred to the positions below different polishing manipulators 6, the workpiece on the bearing and positioning device 3 is polished by the polishing manipulator 6, and the workpiece is sequentially polished in different processes according to the polishing manipulators 6 at different positions, so that polishing in multiple processes is completed on one piece of equipment; further, after the rotary transposition mechanism 2 drives the bearing positioning device 3 to rotate a station, another workpiece to be polished is manually clamped on the next bearing positioning device 3, the bearing positioning device 3 is continuously driven to perform transposition along with the rotary transposition mechanism 2, a worker continuously clamps the workpiece to be polished on the bearing positioning device 3 at the feeding hole 10, after the workpiece is processed, the rotary transposition mechanism 2 drives the bearing positioning device 3 to carry the workpiece to return to the feeding hole 10, and after the workpiece is manually taken down from the bearing positioning device 3, the workpiece to be polished is installed on the bearing positioning device 3 to continue polishing, so that continuous automatic feeding and discharging without stopping are realized, and the production efficiency is improved.
It should be understood that the above description is only exemplary of the present invention, and is not intended to limit the scope of the present invention, which is defined by the appended claims.

Claims (10)

1. The utility model provides a full-automatic intelligent polishing machine which characterized in that includes: frame (1), set up in frame (1) middle part is used for switching rotary transposition mechanism (2), a plurality of ring week install in rotary transposition mechanism (2) is last and be used for fixed work piece bear positioner (3), set up in be in the middle of rotary transposition mechanism (2) and be used for connecting bear distribution module (4) and distribution module (5) and a plurality of that positioner (3) realized the power supply air feed set up in frame (1) upper end is used for right bear positioner (3) go up polishing manipulator (6) that the work piece carries out processing, polishing manipulator (6) are located bear positioner (3) top, just rotary transposition mechanism (2) drive bear positioner (3) in switch between polishing manipulator (6).
2. The full-automatic intelligent polishing machine according to claim 1, characterized in that: the bearing and positioning device (3) comprises an R shaft module (31) which is arranged on the rotary transposition mechanism (2) and is matched with the rotary transposition mechanism (2) and the polishing manipulator (6) to accurately position and process the workpiece, a rotary air distribution rotating shaft (32) which is arranged on the R shaft module (31) and is used for transmitting air flow and torque, and a positioning clamp (33) which is arranged on the rotary air distribution rotating shaft (32) and is used for fixing the workpiece, wherein a first air passage (34) which penetrates through a rotary center and is used for connecting the air distribution module (4) is arranged in the middle of the rotary air distribution rotating shaft (32).
3. The full-automatic intelligent polishing machine according to claim 2, characterized in that: the rotary air distribution rotating shaft (32) comprises a hollow rotary inner shaft (321) connected with an output shaft of the R shaft module (31) and the positioning clamp (33), an outer shaft sleeve (322) arranged on an outer shell of the R shaft module (31) and sleeved on the periphery of the hollow rotary inner shaft (321), at least one air channel groove (323) arranged between the outer shaft sleeve (322) and the hollow rotary inner shaft (321), sealing ring groups (324) arranged on two sides of the air channel groove (323), at least one path of first air channel (325) arranged in the hollow rotary inner shaft (321) and communicated with the air channel groove (323), at least one path of second air channel (326) arranged in the outer shaft sleeve (322) and communicated with the air channel groove (323) to communicate the first air channel (325), and a first bearing (327) arranged between the outer shaft sleeve (322) and the hollow rotary inner shaft (321), each first air channel (325) and each second air channel (326) are communicated with one air channel groove (323) to form a second air channel; the first air passage (34) penetrates through an output shaft of the R-axis module (31) and the hollow rotating inner shaft (321).
4. The full-automatic intelligent polishing machine according to claim 2, characterized in that: the bearing positioning device (3) further comprises a flange plate (35) arranged at the upper end of the outer shaft sleeve (322) and a waterproof cover (36) which is arranged on the flange plate (35) and covers the R shaft module (31) and the rotary air distribution rotating shaft (32), and the R shaft module (31) comprises a first cam divider (311) used for installing and supporting the rotary air distribution rotating shaft (32) and a first servo motor (312) connected with the power distribution module (5) and used for driving the first cam divider (311) to work.
5. The full-automatic intelligent polishing machine according to claim 4, characterized in that: the bearing and positioning device (3) is further provided with a silencing device (8), the silencing device (8) comprises a sponge body arranged at an exhaust port of the vacuum generator (340) and a sponge mounting cover (82) arranged on the outer side of the waterproof cover (36) and used for fixing the sponge body, and the vacuum generator (340) is connected with the first air path (34) and the air distribution module (4).
6. The full-automatic intelligent polishing machine according to any one of claims 1-5, characterized in that: and a first force measuring sensor (9) for detecting pressure is arranged at the bottom of the bearing and positioning device (3).
7. The full-automatic intelligent polishing machine according to claim 6, characterized in that: the polishing manipulator (6) comprises an X-axis moving module (61) which is arranged on the rack (1) and is positioned above the rotary transposition mechanism (2), a Y-axis moving module (62) which is arranged on the X-axis moving module (61), a Z-axis moving module (63) which is vertically arranged on the Y-axis moving module (62), a polishing device (64) which is arranged at the lower end of the Z-axis moving module (63) and is used for processing the workpiece, and a second force measuring sensor (65) which is arranged between the Z-axis moving module (63) and the polishing device (64) and is used for detecting polishing pressure.
8. The full-automatic intelligent polishing machine according to any one of claims 1-5, characterized in that: the rotary indexing mechanism (2) comprises an indexing rotary disk (21) which is rotatably arranged on the frame (1) and is used for installing and fixing the bearing and positioning device (3) and a first driving device (22) used for driving the indexing rotary disk (21) to rotate, the air distribution module (4) comprises a hollow air supply pipe (41) which is arranged at the rotation center of the indexing rotation disc (21) in a penetrating way, a multi-channel air passage joint plate (42) which is arranged at the upper end of the hollow air supply pipe (41) and correspondingly connected with the bearing positioning device (3), and an air source air tap (43) which is arranged at the lower end of the hollow air supply pipe (41) in a rotatable way and is used for connecting an air supply pipeline, and branch air nozzles (44) which correspond to the bearing positioning devices (3) in number and are connected through pipelines are arranged on the multi-path air passage joint plate (42).
9. The full-automatic intelligent polishing machine according to claim 2, characterized in that: the first driving device (22) is a second cam divider, the indexing rotating disc (21) is installed on an output shaft of the second cam divider, and the hollow air supply pipe (41) penetrates through the output shaft of the second cam divider; the distribution module (5) further comprises a plurality of drivers (51) which are arranged on the indexing rotary disk (21) and electrically connected with the bearing positioning device (3), a multi-channel conductive sliding ring (52) which is arranged at the upper end of the rack (1) and is connected with the drivers (51), and a sliding ring fixing seat (53) which is arranged on a central rotating axis of the rotary transposition mechanism (2) and is used for supporting the multi-channel conductive sliding ring (52).
10. The full-automatic intelligent polishing machine according to claim 9, characterized in that: the rotary transposition mechanism (2) is also provided with a water separation device (7) for isolating the gas distribution module (4) from the bearing positioning device (3) and the power distribution module (5) from the bearing positioning device (3), the water separation device (7) comprises a water receiving table (71) which is arranged on the indexing rotary disc (21) and sleeved on the periphery of the driver (51) to isolate the bearing positioning device (3) and a water receiving groove (72) which is sleeved on the periphery of the indexing rotary disc (21) and used for receiving cooling liquid, and a plurality of water-isolating notches (73) which are sleeved on the periphery of the bearing positioning device (3) are circumferentially arranged on the water receiving table (71); the multi-channel conductive slip ring (52) is respectively connected with the drivers (51) through a plurality of groups of wire harnesses, and the wire harnesses penetrate through the middle of the slip ring fixing seat (53).
CN202210609906.8A 2022-05-31 2022-05-31 Full-automatic intelligent polishing machine Active CN114851062B (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11333715A (en) * 1998-06-01 1999-12-07 Hamai Co Ltd Work attachment/detachment device in four-way planetary gear type parallel flattening machine
KR20110027961A (en) * 2009-09-11 2011-03-17 주식회사 아이매스 Rotary type polishing apparatus for wafer
CN106975926A (en) * 2017-05-23 2017-07-25 安徽永泰汽车零部件有限公司 A kind of digital control rotating disc type multistation bores and attacks building-block machine
CN107685275A (en) * 2017-11-12 2018-02-13 肇庆学院 A kind of site polishing machine of rotating disc type five
CN209737299U (en) * 2018-12-11 2019-12-06 苏州威驰电子有限公司 Automatic polishing machine
CN212601034U (en) * 2020-06-30 2021-02-26 深圳市永霖智能工业技术有限公司 Polishing and grinding equipment with multiple stations and multiple angles

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11333715A (en) * 1998-06-01 1999-12-07 Hamai Co Ltd Work attachment/detachment device in four-way planetary gear type parallel flattening machine
KR20110027961A (en) * 2009-09-11 2011-03-17 주식회사 아이매스 Rotary type polishing apparatus for wafer
CN106975926A (en) * 2017-05-23 2017-07-25 安徽永泰汽车零部件有限公司 A kind of digital control rotating disc type multistation bores and attacks building-block machine
CN107685275A (en) * 2017-11-12 2018-02-13 肇庆学院 A kind of site polishing machine of rotating disc type five
CN209737299U (en) * 2018-12-11 2019-12-06 苏州威驰电子有限公司 Automatic polishing machine
CN212601034U (en) * 2020-06-30 2021-02-26 深圳市永霖智能工业技术有限公司 Polishing and grinding equipment with multiple stations and multiple angles

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