CN114839083A - Device for testing bending strength of scribing cutter and using method - Google Patents

Device for testing bending strength of scribing cutter and using method Download PDF

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Publication number
CN114839083A
CN114839083A CN202210574198.9A CN202210574198A CN114839083A CN 114839083 A CN114839083 A CN 114839083A CN 202210574198 A CN202210574198 A CN 202210574198A CN 114839083 A CN114839083 A CN 114839083A
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CN
China
Prior art keywords
bending strength
testing
microscope
scribing
fine adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210574198.9A
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Chinese (zh)
Inventor
乔帅
王战
刘建双
董峰
栗云慧
窦文海
陈月涛
付林泊
杨森
杨双
高鹏
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Zhengzhou Research Institute for Abrasives and Grinding Co Ltd
Original Assignee
Zhengzhou Research Institute for Abrasives and Grinding Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhengzhou Research Institute for Abrasives and Grinding Co Ltd filed Critical Zhengzhou Research Institute for Abrasives and Grinding Co Ltd
Priority to CN202210574198.9A priority Critical patent/CN114839083A/en
Publication of CN114839083A publication Critical patent/CN114839083A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/20Investigating strength properties of solid materials by application of mechanical stress by applying steady bending forces
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/02Details
    • G01N3/04Chucks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0014Type of force applied
    • G01N2203/0023Bending

Abstract

The invention discloses a device for testing the bending strength of a scribing knife, which comprises a clamping mechanism for clamping the scribing knife and a rotary driving mechanism for driving the clamping mechanism to rotate; the microscope also comprises a feeding mechanism for loading the measuring needle and a three-axis fine adjustment platform for loading the microscope; the feeding mechanism is movably matched with the clamping mechanism so that the measuring pin contacts the scribing knife; the tri-axial fine adjustment platform cooperates with the clamping mechanism to align the microscope to the point of contact of the stylus and the saw blade. The scribing knife is clamped by the pneumatic chuck, and the focusing point of the microscope is adjusted by using the high-precision fine adjustment platform, so that clear observation and measurement are facilitated; the force measuring piece is driven to move horizontally through the linear module, the measuring pin is in contact with the cutting edge of the scribing cutter, a displacement-force curve is output through the controller, the contact position of the measuring pin and the scribing cutter is adjusted by controlling the moving displacement, the multiplying power of a microscope and the rotation of a pneumatic chuck, the local bending strength of the blade is tested, and high-repeatability and nondestructive testing can be achieved.

Description

Device for testing bending strength of scribing cutter and using method
Technical Field
The invention relates to the technical field of cutter testing, in particular to a device for testing bending strength of a scribing cutter and a using method thereof.
Background
Bending strength is the ability of an object to resist bending deformation (deflection) and belongs to the field of material mechanics. The flexural strength is generally evaluated by a three-point flexural test or a four-point test. The four-point test method needs to apply two loading forces and is relatively complex; three-point testing is most commonly used. The value of the test standard is in direct proportion to the maximum pressure to be born, the test standard is generally based on the bending strength national standard (GB/T6569-86) or the ISO 14704 plus 2000 test sample (35 multiplied by 3 multiplied by 4) standard, the scribing knife related to the invention is an electroplating scribing knife which is described in patent 201610886536.7, the appearance is disc-shaped and is a composite abrasive layer, the invention is applied to the field of semiconductor precision processing and mainly used for scribing and grooving hard and brittle materials such as semiconductor silicon wafers, oxide wafers and the like, the standard test sample is generally of a beam structure and a strip structure, the application scene difference is very large, and the test is not suitable for the bending strength test of an electroplating hub type scribing knife.
The invention discloses an integral anti-bending test method and device for an ultrathin grinding wheel, and relates to the technical field of solving the problems that an integral anti-bending strength of a hubless blade is high, annular force is applied, the blade is integrally broken, and the problem that an integral ring falls off in the using process is generally solved, while an electroplated hub type scribing knife product is thin (generally 0.01-0.03 mm), and is mainly applied to special occasions of high-speed cutting, common failures of partial breakage of a blade edge, snakelike cutting channels and the like in failure modes are caused, and the circumferential and radial thicknesses and tissues of the hub type scribing knife are not uniform structures, so that the method cannot judge the local anti-bending strength of different positions on the circumference of the blade. Moreover, the patent can only test the integral tissue performance of the blades to be consistent, the breaking strength is high, one blade is damaged after one test, and the bending strength of the blade cannot be detected in a nondestructive mode.
The invention discloses a method for manufacturing a hub-type electroplated ultrathin diamond cutting grinding wheel, which is disclosed in the patent application No. CN 201610886536.7, wherein the length of a blade of the scribing knife is usually 380-760 micrometers, the selection of a measuring position is difficult to ensure the repeatability precision of the measuring position through the combination of naked eyes and machinery, and the reliability of the testing method and the device cannot be evaluated.
Utility model patent ultra-thin abrasive cut-off wheel abrasive material layer and base member cohesion test couple that application number is CN201020675792.X, application number is CN 201420012990.6's utility model patent resin cutting piece interface bonding strength quick verifying attachment etc. have solved the test of ultra-thin abrasive cut-off wheel abrasive material layer with the base member cohesion, can only use in the rough test cohesion of nature, can't judge the bending strength on the compound abrasive material layer of cutting edge.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a scribing knife bending strength testing device and a using method thereof, and solves the problem that the testing device in the prior art is not suitable for the bending strength test of an electroplating hub type scribing knife.
The technical scheme of the invention is realized as follows:
a device for testing the bending strength of a scribing knife comprises a clamping mechanism for clamping the scribing knife and a rotary driving mechanism for driving the clamping mechanism to rotate; the microscope also comprises a feeding mechanism for loading the measuring needle and a three-axis fine adjustment platform for loading the microscope; the feeding mechanism is movably matched with the clamping mechanism so that the measuring pin contacts the scribing knife; the three-axis fine adjustment platform is matched with the clamping mechanism to enable the microscope to be aligned with the contact point of the measuring pin and the scribing knife.
Further, the clamping device comprises a support, the clamping mechanism is connected with the support through a supporting seat, and the supporting seat is connected with the support in a lifting adjustable mode.
Furthermore, a U-shaped support is arranged on the support, a sliding clamping groove clamped on the U-shaped support is arranged on the support, and the sliding clamping groove is vertically matched with the U-shaped support in a sliding manner; a vertical bar hole is formed in the U-shaped support, a screw rod penetrating through the vertical bar hole is arranged in the sliding clamping groove, and a nut is connected to the screw rod.
Further, the clamping mechanism comprises a rotating main shaft which is rotatably connected to the supporting seat, and a pneumatic chuck which is arranged at the end part of the rotating main shaft and is used for clamping the scribing knife.
Furthermore, the rotary driving mechanism comprises a servo motor arranged on the support and a synchronous belt wheel connected to an output shaft of the servo motor, the synchronous belt wheel is arranged on the rotary main shaft, and the synchronous belt wheels are connected through a synchronous belt.
Furthermore, the feeding mechanism comprises a linear module arranged on the support and a force measuring piece connected with the moving end of the linear module, and the measuring pin is connected to the force measuring piece.
Further, the feeding mechanism further comprises a fine adjustment platform, and the force measuring piece is connected with the moving end of the linear module through the fine adjustment platform.
Further, still include the controller, sharp module and servo motor all are connected with the controller.
The use method of the scribing knife bending strength testing device comprises the scribing knife bending strength testing device and further comprises the following steps:
s1, debugging the device;
s2, manually controlling the linear module to drive the force measuring piece to move, enabling the measuring needle to slowly approach to a measuring position, when just contacting the scribing cutter, resetting the coordinate value and the number value of the force measuring piece of the linear module to a safe distance, and setting the feeding displacement and the feeding speed;
and S3, controlling the linear module to drive the force measuring piece to automatically feed through the controller, and returning the linear module to the initial point after the force measuring piece reaches the designated position and moves.
The S1 includes the following steps:
s11, manually adjusting the three-axis fine adjustment platform, and adjusting XYZ coordinates of the microscope to enable the lens of the microscope to see the blade of the scribing knife;
and S12, manually adjusting the coordinates of the force measuring piece and the fine adjustment platform to enable the measuring needle to approach the part to be measured, and the measuring needle can be seen under a microscope.
The invention has the beneficial effects that: the scribing knife is clamped by the pneumatic chuck, and the focusing point of the microscope is adjusted by using the high-precision fine adjustment platform, so that the measuring position can be observed clearly; the force measuring piece is driven to move horizontally through the linear module, the measuring pin is in contact with the cutting edge of the scribing cutter, a displacement-force curve is output through the controller, the contact position of the measuring pin and the scribing cutter is adjusted by controlling the moving displacement, the multiplying power of a microscope and the rotation of a pneumatic chuck, the local bending strength of the blade is tested, and high-repeatability and nondestructive testing can be achieved.
Drawings
In order to illustrate the embodiments of the invention more clearly, the drawings that are needed in the description of the embodiments will be briefly described below, it being apparent that the drawings in the following description are only some embodiments of the invention, and that other drawings may be derived from those drawings by a person skilled in the art without inventive effort.
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a partial structural schematic diagram of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without inventive effort based on the embodiments of the present invention, are within the scope of the present invention.
As shown in fig. 1 and 2, the device for testing bending strength of a dicing blade in embodiment 1 includes a clamping mechanism for clamping the dicing blade 6 and a rotary driving mechanism for driving the clamping mechanism to rotate, and after the dicing blade 6 is clamped by the clamping mechanism, the rotary driving mechanism drives the dicing blade 6 to rotate, so as to measure strength values of different positions of the circumference of the dicing blade 6. Wherein the dicing blade 6 comprises a dicing blade base body and a cutting edge 19. The scribing knife bending strength testing device also comprises a feeding mechanism for loading the measuring needle 8 and a three-axis fine adjustment platform for loading the microscope 13; the feeding mechanism is movably matched with the clamping mechanism to enable the measuring pin 8 to contact the scribing knife 6, namely the measuring pin 8 is loaded on the feeding mechanism, the feeding mechanism moves towards the clamping mechanism to drive the measuring pin 8 to contact the cutting edge 19 of the scribing knife 6, the local bending strength of the cutting blade is tested, and the scribing knife 6 is not damaged. The three-axis fine adjustment platform is matched with the clamping mechanism and the feeding mechanism, namely the three-axis fine adjustment platform is arranged at the position of one side between the clamping mechanism and the feeding mechanism, so that the microscope 13 is aligned to the contact point of the measuring pin 8 and the scribing knife 6, and the measuring position is clearly observed.
Further, the clamping device comprises a support, the support comprises a base 1 and a U-shaped support 16 fixed on the base 1, the clamping mechanism is connected with the U-shaped support 16 of the support through a supporting seat 15, and the supporting seat 15 is connected with the U-shaped support 16 of the support in a lifting adjustable manner. Specifically, a sliding clamping groove clamped on one side of the U-shaped support 16 is arranged on the support seat 15, and the sliding clamping groove is vertically matched with the U-shaped support 16 in a sliding manner; a vertical bar hole is formed in one side of the U-shaped support 16, a screw rod 14 penetrating through the vertical bar hole is arranged in the sliding clamping groove, a nut is connected onto the screw rod 14, and the supporting seat 15 can ascend and descend adjustably through tightness of the nut and up-and-down movement of the screw rod 14 in the vertical bar hole.
Further, the clamping mechanism comprises a rotary spindle 5 rotatably connected to the support base 15 and a pneumatic chuck 7 provided at an end of the rotary spindle 5 for clamping the dicing blade 6.
Embodiment 2, which is different from embodiment 1 in that the rotation driving mechanism includes a servo motor 2 disposed on a U-shaped support 16 and a synchronous pulley 3 connected to an output shaft of the servo motor 2, one end of a rotation main shaft 5 away from a pneumatic chuck 7 is provided with the synchronous pulley 3, and the synchronous pulleys 3 are connected through a synchronous belt 4; the synchronous belt 4 is connected with a tensioning mechanism for tensioning the synchronous belt 4 after the lifting adjustment of the supporting seat 15.
Embodiment 3, which differs from embodiment 1 in that the feed mechanism comprises a linear die set 11 arranged on a carriage and a load cell 9 connected to the moving end of the linear die set 11, the stylus 8 being connected to the load cell 9.
Embodiment 4, which is different from embodiment 3, is that the feeding mechanism further comprises a fine adjustment platform 10, and the force measuring piece 9 is connected with the movable end of the linear module 11 through the fine adjustment platform 10. One end of the fine tuning platform 10 is fixed with the moving end of the linear module 11, and the other end is fixed with the force measuring piece 9. The force measuring element 9 is a force meter or a force sensor. The fine adjustment platform 10 is a spiral fine adjustment linear displacement platform or a manual linear displacement platform.
Embodiment 5, it is different from embodiment 3 in that it further includes a controller 17, and the linear module 11 and the servo motor 2 are both connected to the controller 17. Repeated automatic testing by the control device 17 is facilitated.
Embodiment 6, a method for using a device for testing bending strength of a dicing blade:
1. preparing: a scribing blade 6 with an outer diameter of 56mm, an inner hole diameter of 19mm, a blade width of 500 μm and a blade thickness of 20 μm;
2. installing and debugging the device: adjusting the air source pressure of the pneumatic chuck 7, further adjusting the opening amplitude of a clamping shaft of the pneumatic chuck 7, and installing the scribing knife 6 to be tested on the pneumatic chuck 7 to ensure the reliable clamping of the scribing knife 6; fixing the measuring pin 8 at the head of the force measuring element 9; the supporting seat 15 is adjusted through the adjusting screw 14, and the tensioning degree of the synchronous belt 4 is adjusted;
3. a calibration device: the manual moving linear module 11 drives the force measuring piece 9 and the measuring pin 8 fixed at the front end to horizontally move together to be close to the cutting edge, then the position of the microscope 13 is manually adjusted, the measuring pin and the cutting edge can be clearly observed on the microscope, the coordinate in the vertical direction of the fine adjustment platform 10 is manually adjusted, the measuring pin 8 is enabled to reach the position shown in the figure 2, the distance between the measuring pin 8 and the boundary of the scribing knife substrate is 200 mu m, the manual moving guide rail feeds 0.01mm each time, the measuring pin 8 contacts the cutting edge 19, the force measuring piece 9 displays numerical values, the position is calibrated to be a starting zero point, a safety distance is manually retracted, and the position is an automatic starting position.
4. And (3) testing: and controlling the linear module 11 by using the controller 17 to set the probe 8 to feed 10 micrometers each time according to the set movement, continuously feeding for 3 times, respectively recording the force values, then controlling the probe 8 to retreat to the position before measurement, equally dividing the circumference of the blade by 4, driving the pneumatic chuck 7 and the scribing cutter base 6 to rotate by 90 degrees by the servo motor 2, and repeating the previous measurement and recording until the test is finished.
5. Data processing: the bending rigidity value is calculated by using software designed in the controller 17, and the software adopts data processing software in the prior art to input test data.
6. The force values of different positions can be tested by adjusting the contact position of the measuring needle and the blade, and the bending strength value and the corresponding curve can be obtained through software calculation.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims (10)

1. The utility model provides a scribing knife bending strength testing arrangement which characterized in that: comprises a clamping mechanism for clamping a scribing knife (6) and a rotary driving mechanism for driving the clamping mechanism to rotate; the device also comprises a feeding mechanism for loading the measuring needle (8) and a three-axis fine adjustment platform for loading the microscope (13); the feeding mechanism is movably matched with the clamping mechanism so that the measuring needle (8) contacts the scribing knife (6); the three-axis fine adjustment platform is matched with the clamping mechanism to align the microscope (13) with the contact point of the measuring pin (8) and the scribing knife (6).
2. The device for testing the bending strength of the dicing blade of claim 1, wherein: the clamping mechanism is connected with the support through a supporting seat (15), and the supporting seat (15) is connected with the support in a lifting-adjustable manner.
3. The device for testing the bending strength of the dicing blade of claim 2, wherein: the support is provided with a U-shaped support (16), the support seat (15) is provided with a sliding clamping groove clamped on the U-shaped support (16), and the sliding clamping groove is vertically matched with the U-shaped support (16) in a sliding manner; a vertical bar hole is formed in the U-shaped support (16), a screw rod (14) penetrating through the vertical bar hole is arranged in the sliding clamping groove, and a nut is connected to the screw rod (14).
4. The device for testing the bending strength of the dicing blade of claim 2 or 3, wherein: the clamping mechanism comprises a rotating main shaft (5) rotatably connected to the supporting seat (15) and a pneumatic chuck (7) which is arranged at the end part of the rotating main shaft (5) and used for clamping the scribing knife (6).
5. The device for testing the bending strength of the dicing blade of claim 4, wherein: the rotary driving mechanism comprises a servo motor (2) arranged on the support and a synchronous belt wheel (3) connected to an output shaft of the servo motor (2), the synchronous belt wheel (3) is arranged on the rotary main shaft (5), and the synchronous belt wheels (3) are connected through a synchronous belt (4).
6. The device for testing the bending strength of the dicing blade of claim 2, 3 or 5, wherein: the feeding mechanism comprises a linear module (11) arranged on the support and a force measuring piece (9) connected with the moving end of the linear module (11), and the measuring needle (8) is connected to the force measuring piece (9).
7. The device for testing the bending strength of the dicing blade of claim 6, wherein: the feeding mechanism further comprises a fine adjustment platform (10), and the force measuring piece (9) is connected with the moving end of the linear module (11) through the fine adjustment platform (10).
8. The saw blade bending strength testing apparatus of claim 7, wherein: the linear module is characterized by further comprising a controller (17), and the linear module (11) and the servo motor (2) are connected with the controller (17).
9. The use method of the scribing knife bending strength testing device is characterized in that: the device for testing the bending strength of the dicing blade of any one of claims 1 to 8, further comprising the steps of:
s1, debugging the device;
s2, manually controlling the linear module (11) to drive the force measuring piece (9) to move, enabling the measuring needle (8) to slowly approach to a measuring position, when the measuring needle is just in contact with the scribing cutter (6), after zero clearing is carried out on the coordinate value of the linear module (11) and the numerical value of the force measuring piece (9), returning to a safe distance, and setting the feeding displacement and the feeding speed;
s3, the controller (17) controls the linear module (11) to drive the force measuring piece (9) to automatically feed, and after the force measuring piece reaches the designated position and moves, the linear module (11) retreats to the starting point.
10. The method for using the device for testing the bending strength of the dicing blade of claim 9, wherein the step S1 comprises the steps of:
s11, manually adjusting the three-axis fine adjustment platform (18), adjusting the XYZ coordinates of the microscope (13) and enabling the lens of the microscope (13) to be capable of seeing the blade (19) of the scribing knife (6);
s12, coordinates of the force measuring piece (9) and the fine adjustment platform (10) are adjusted manually, the measuring needle (8) is close to the position to be measured, and the measuring needle (8) can be seen under the microscope (13).
CN202210574198.9A 2022-05-25 2022-05-25 Device for testing bending strength of scribing cutter and using method Pending CN114839083A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210574198.9A CN114839083A (en) 2022-05-25 2022-05-25 Device for testing bending strength of scribing cutter and using method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210574198.9A CN114839083A (en) 2022-05-25 2022-05-25 Device for testing bending strength of scribing cutter and using method

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CN114839083A true CN114839083A (en) 2022-08-02

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115201017A (en) * 2022-09-16 2022-10-18 三维医疗科技江苏股份有限公司 Detection device for medical instrument strength test

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115201017A (en) * 2022-09-16 2022-10-18 三维医疗科技江苏股份有限公司 Detection device for medical instrument strength test
CN115201017B (en) * 2022-09-16 2022-12-09 三维医疗科技江苏股份有限公司 Detection device for testing strength of medical instrument

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