CN114838803B - Vibration measuring device and vibration measuring method - Google Patents

Vibration measuring device and vibration measuring method Download PDF

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Publication number
CN114838803B
CN114838803B CN202210467310.9A CN202210467310A CN114838803B CN 114838803 B CN114838803 B CN 114838803B CN 202210467310 A CN202210467310 A CN 202210467310A CN 114838803 B CN114838803 B CN 114838803B
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laser
vibration
measuring
doppler
assembly
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CN114838803A (en
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郭靖
何广源
任永学
郭维振
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Beijing Reallight Technology Co ltd
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Beijing Reallight Technology Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

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  • General Physics & Mathematics (AREA)
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Abstract

A vibration measuring device comprises a laser measuring component, a Doppler measuring component, a signal receiving and transmitting component and an analysis calculator electrically connected with the laser measuring component and the Doppler measuring component; the laser emitted by the laser measuring component and the Doppler measuring component is transmitted to the target after being combined by the signal receiving and transmitting component, and the signal receiving and transmitting component receives the optical signal reflected by the target and enters the laser measuring component and the Doppler measuring component respectively after being split; the laser measuring component measures vibration displacement according to a pulse laser ranging method, the Doppler measuring component measures vibration speed according to a laser Doppler method, and the displacement and speed values of the time sequence are transmitted to the analysis calculator to carry out fusion processing of a Kalman filtering algorithm. In addition, the invention also provides a vibration measuring method which can remotely measure low-frequency vibration. Compared with the prior art, the vibration measuring device and the vibration measuring method can reduce the dependence on the performance of measuring equipment and ensure the detection precision.

Description

Vibration measuring device and vibration measuring method
Technical Field
The present invention relates to the field of monitoring technologies, and in particular, to a vibration measurement device and a vibration measurement method.
Background
Vibration is widely present in life. For example, a car or train may vibrate a bridge when passing the bridge, and a typhoon or the like may vibrate a building when blowing an ultra-high-rise building, a dam, or the like. Although these vibrations are not easily perceived by the naked human eye, the stress generated by the vibrations is accumulated for a long period of time, which may cause loosening and damage of the structure, and affect safety and reliability, so that it is necessary to monitor the amplitude, frequency, etc. of the vibrations. Accurate and reliable monitoring provides data for maintenance of monitoring targets such as buildings and the like, and potential safety hazards are avoided.
In the prior art, vibration monitoring methods are divided into contact type and non-contact type. The contact type monitoring mode such as the sensor is arranged on the monitoring target, so that vibration data can be directly obtained, and the method is visual and simple. However, for large buildings, vibration conditions at different positions may be different, so that a plurality of sensors need to be arranged at different positions, which results in high cost, and the difficulty of sensor installation and adjustment is high, so that remote monitoring cannot be realized. And the non-contact monitoring modes such as an optical interference principle, GPS positioning and the like are utilized, so that the dependency on the equipment performance is high. High-precision monitoring can be realized by high-configuration equipment, but the cost is high, the occupied space of the equipment is large, and the cost and the occupied space of low-configuration equipment can be reduced, but the precision is not ideal, and particularly for the high-level position of a super high-rise building, the monitoring precision is limited, and the requirements of remote monitoring and short-range monitoring cannot be met at the same time.
Disclosure of Invention
Based on this, an object of the present invention is to provide a vibration measuring apparatus capable of realizing low-frequency vibration measurement of a remote non-contact type cooperative or non-cooperative target while ensuring detection accuracy while reducing the dependency on the performance of a measuring device.
The technical scheme adopted by the invention is as follows:
a vibration measuring device comprises a laser measuring component, a Doppler measuring component, a signal receiving and transmitting component and an analysis calculator electrically connected with the laser measuring component and the Doppler measuring component; the laser emitted by the laser measuring assembly and the Doppler measuring assembly is emitted to a target after being combined by the signal receiving and transmitting assembly, and the signal receiving and transmitting assembly receives the optical signal reflected by the target and enters the laser measuring assembly and the Doppler measuring assembly after being split; the laser measuring component measures vibration displacement according to a pulse laser method, the Doppler measuring component measures vibration speed according to a laser Doppler method, and the displacement and speed values of a time sequence are transmitted to the analysis calculator to perform data fusion processing of a Kalman filtering algorithm.
Compared with the prior art, the vibration measuring device disclosed by the invention simultaneously uses two vibration measuring methods of a pulse laser ranging method and a laser Doppler vibration measuring method, and obtains high-precision vibration information through fusion of a Kalman filtering algorithm. The pulse laser ranging method monitors that laser emitted by a laser is received after being reflected to the surface of a target and returned, the round trip time of the laser beam is recorded, and then half of the product of the speed of light and the round trip time is the displacement of the measured target to the laser. And the dynamic displacement of the time sequence is obtained after long-time monitoring, so that the dynamic vibration condition of the target is directly obtained. Because the pulse method laser ranging monitors the intensity of laser, the laser intensity is greatly disturbed by the environment, so the time sequence of the target vibration has higher noise level. The laser doppler vibrometry measures the laser doppler effect caused by the vibration of the target, measures the speed of the vibrating target, and estimates the displacement by integrating the values of the measured speed. In this way, the laser Doppler vibration measurement method can achieve a lower noise level than the pulse laser ranging method. However, since the displacement estimated by laser doppler vibrometry has an integral error, a long-time measurement error is accumulated. The method can utilize the pulse laser ranging method and the laser Doppler vibration measurement data to estimate high-precision displacement by utilizing the data fusion technology, overcomes the limitations of respective measurement methods by a Kalman filtering algorithm, so that the data can obtain high-precision measurement under the combination of the pulse laser ranging method and the laser Doppler vibration measurement method, thus utilizing the advantages of the displacement of the pulse laser ranging method and the speed measurement of the laser Doppler vibration measurement method, effectively reducing the respective defects, realizing the real-time estimation of remote dynamic displacement, having minimum integral error, high sampling rate and low noise level, reducing the dependence on equipment performance and reducing equipment cost and occupied space.
Further, the laser measurement assembly comprises a pulse laser and a detector; the pulse laser emits laser light to the signal receiving and transmitting assembly; the detector acquires the optical signal reflected by the target through the signal receiving and transmitting assembly and converts the optical signal into an electric signal of vibration displacement, so that a pulse laser ranging method is realized.
Further, the detector is an avalanche photodiode detector to improve measurement accuracy.
Further, the pulse laser is a 1535nm microchip laser to reduce equipment space. The 1535nm wavelength is a human eye safe wavelength.
Further, the Doppler measurement component comprises a single-frequency laser, a first beam splitter, an acousto-optic modulator, a first coupler and a balance detector; the laser emitted by the single-frequency laser is split into a first emission beam and a second emission beam at the first beam splitter; after the first emission light beam enters the acousto-optic modulator, the first emission light beam is combined with the laser emitted by the laser measuring assembly through the signal receiving and transmitting assembly; the reflected light of the target enters the first coupler and is combined with the second emitted light beam to be incident on the balance detector so as to be converted into an electric signal with the vibration speed, thereby realizing a laser Doppler vibration measurement method.
Furthermore, the single-frequency laser is a narrow linewidth optical fiber laser with the echo signal of 1550nm so as to improve the measurement accuracy, and the 1550nm wavelength is used as a human eye safety wave band.
Further, the splitting ratio of the first coupler is 50:50, so that the common mode rejection ratio is increased, and the capability of suppressing common mode interference signals during differential mode input is improved.
Further, the signal receiving and transmitting assembly comprises a second beam combiner, a circulator, a receiving and transmitting antenna and a second beam splitter; the second beam combiner combines the laser emitted by the laser measuring assembly and the Doppler measuring assembly, sequentially emits the laser to the circulator and the receiving and transmitting antenna, and emits the laser to the target through the receiving and transmitting antenna; the receiving and transmitting antenna receives the light reflected by the target, and then sequentially transmits the light to the circulator and the second beam splitter, and after the beam splitting of the second beam splitter, the light is respectively transmitted to the laser measuring assembly and the Doppler measuring assembly, and the occupation space of the antenna can be reduced by the vibration measuring device with a single antenna, so that the device is light and portable.
Further, the signal receiving and transmitting assembly comprises a second beam combiner, a transmitting antenna, a receiving antenna and a second beam splitter; the second beam combiner combines the laser emitted by the laser measuring assembly and the Doppler measuring assembly and then emits the laser to the target through the transmitting antenna; the receiving antenna receives the light emitted by the target, emits the light to the second beam splitter to split the light, and emits the light to the laser measuring assembly and the Doppler measuring assembly respectively, so that the mutual influence between the emitted light and the incident light can be reduced, and the measuring precision is improved.
In addition, the invention also provides a vibration measurement method, which comprises the following steps:
setting the vibration measuring device;
the vibration measuring device is used for obtaining vibration displacement and speed of a time sequence through a pulse method laser ranging method and a laser Doppler method;
and according to the linear distance, the acquired time series vibration displacement and speed are fused through a Kalman filtering algorithm, and the time series vibration displacement and speed comprise updating of time and measurement, so that the high-precision time series amplitude is obtained.
Compared with the prior art, the vibration measurement method utilizes the pulse laser ranging method and the laser Doppler vibration measurement data to estimate high-precision dynamic displacement by utilizing the data fusion technology, and overcomes the limitations of the respective measurement methods by a Kalman filtering algorithm.
For a better understanding and implementation, the present invention is described in detail below with reference to the drawings.
Drawings
FIG. 1 is a schematic diagram of a vibration measuring device according to a single antenna embodiment of the present invention;
FIG. 2 is a schematic diagram of a vibration measuring device according to a dual antenna embodiment of the present invention;
FIG. 3 is a flow chart of a vibration measurement method according to the present invention;
fig. 4 is a schematic flow chart of data fusion of a kalman filtering algorithm in the present invention.
Detailed Description
The invention provides a vibration measuring device and a vibration measuring method, wherein the vibration displacement of a target is obtained through pulse laser ranging, the vibration speed value of the target is obtained through laser Doppler method, and the obtained time series vibration displacement and speed are fused through Kalman filtering algorithm, so that accurate dynamic vibration amplitude is obtained, and different requirements of remote monitoring and short-range monitoring are met.
Referring to fig. 1 and 2 in combination, the vibration measuring apparatus of the present invention includes a laser measuring assembly 10, a doppler measuring assembly 20, a signal transceiver assembly 30, and an analysis calculator 40. The laser measurement assembly 10, the Doppler measurement assembly 20, and the signal transceiver assembly 30 are electrically connected to the analysis calculator 40, respectively, and transmit the detected data to the analysis calculator 40 for analysis. The laser measuring component 10 and/or the doppler measuring component 20 respectively emit laser, the laser beams of the two are combined by the signal receiving and transmitting component 30 and transmitted to the target 100, and then the signal receiving and transmitting component 30 receives the reflected light signal of the target 100. After the signal transceiver module 30 splits the reflected light signal, the light signal is respectively obtained by the laser measuring module 10 and the doppler measuring module 20 and converted into an electrical signal, so as to obtain a vibration displacement and a velocity value. Since the laser measuring assembly 10 measures the displacement of the vibration by the pulse laser ranging method, the measuring of the velocity value of the vibration by the doppler measuring assembly 20 by the laser doppler method is a conventional means in the art, and will not be described in detail herein. The laser measurement assembly 10 and the doppler measurement assembly 20 transmit the time-series displacement and velocity values to the analysis calculator 40, and the analysis calculator 40 performs kalman filter algorithm data fusion according to the distance value between the vibration measurement device and the target 100, so as to obtain an accurate vibration displacement value. In this embodiment, the signal transceiver 30 of the vibration measuring device may be configured as a single antenna, a dual antenna, or both.
Single antenna type:
referring to fig. 1, in the present embodiment, the laser measurement assembly 10 is used to obtain the displacement of vibration, and includes a pulse laser 11 and an avalanche photodiode detector 12. The pulse laser is a 1535nm microchip laser. The Doppler measurement assembly 20 is used to acquire the velocity of vibration and includes a single frequency laser 21, a first beam splitter 22, an acousto-optic modulator 23, a first coupler 24, and a balanced detector 25. The single-frequency laser 21 is a narrow linewidth optical fiber laser with an echo signal of 1550 nm. The splitting ratio of the first coupler 24 is 50:50. The use of a beam combiner with a 50:50 splitting ratio allows signals of close intensities to be input to the balanced detector 25 separately, thus eliminating the common mode rejection ratio. The signal transceiver assembly 30 includes a second beam combiner 31, a circulator 32, a transceiver antenna 33, and a second beam splitter 34. The avalanche photodiode detector 12 and the balance detector 25 are electrically connected to the analysis calculator 40.
In use, the laser light emitted by the single-frequency laser 21 enters the first beam splitter 22 to split into a first emission beam 210 and a second emission beam 220. The first emission beam 210 enters the acousto-optic modulator 23 to be emitted to the second beam combiner 31 after frequency shift, and forms a total emission beam 400 with the third emission beam 310 emitted by the pulse laser 11 after beam combining by the second beam combiner 31, the total emission beam 400 is emitted to the circulator 32, and then the total emission beam 400 is emitted to the transceiver antenna 33 through the circulator 32 to be emitted to the target 100. The target 100 reflects the total emitted light beam 400 to form a total reflected light beam 500. The transceiver antenna 33 receives the total reflected beam 500 and sends it to the circulator 32. The circulator 32 separates the total emitted light beam 400 from the total reflected light beam 500 to prevent signal interaction, and emits the total reflected light beam 500 to the second beam splitter 34 for splitting into a first incident light beam 610 and a second incident light beam 620. The first incident beam 610 is incident on the avalanche photodiode detector 12, converted into a shifted electrical signal, and then transmitted to the analysis calculator 40. The second incident beam 620 is incident on the first coupler 24, combined with the second emission beam 220, and then incident on the balance detector 25 for conversion of the displacement electric signal, and then transmitted to the analysis calculator 40. The analysis calculator 40 performs a kalman filter algorithm data fusion.
Further, a reflector such as an angle mirror is provided on the target 100 to enhance the beam return signal and improve the measurement accuracy. A bandpass filter (not shown) is provided between the avalanche photodiode detector 12, the balance detector 25, and the second beam splitter 34 to remove the effects of background and interference, further improving measurement accuracy. In addition, more than two groups of vibration measuring devices can be arranged at different directions and/or different distances of the target 100 to perform networking measurement, so as to obtain the omnibearing vibration condition of the target 100.
The single-antenna vibration measuring device can reduce the occupied space of the antenna, so that the device is light and portable.
Dual antenna type:
referring to fig. 2, the dual-antenna type vibration measuring apparatus has substantially the same structure as the single-antenna type vibration measuring apparatus, except that: the signal transceiver assembly 30 further includes a transmitting antenna 35 and a receiving antenna 36. Optionally, the second beam combiner 31 is a beam combining piece, and the second beam splitter 34 is a beam splitting piece.
In use, the laser light emitted by the single-frequency laser 21 enters the first beam splitter 22 to split into a first emission beam 210 and a second emission beam 220. The first emission beam 210 enters the acousto-optic modulator 23 to be frequency-shifted and adjusted, and then is emitted to the second beam combiner 31 through a reflector group (not labeled), and is combined with the third emission beam 310 emitted by the pulse laser 11 by the second beam combiner 31 to form a total emission beam 400, where the total emission beam 400 is emitted to the emission antenna 35 to be emitted to the target 100. The target 100 reflects the total emitted light beam 400 to form a total reflected light beam 500. The receiving antenna 36 receives the total reflected beam 500 and transmits it to the second beam splitter 34 for splitting into a first incident beam 610 and a second incident beam 620. The first incident beam 610 is incident on the avalanche photodiode detector 12, converted into a displacement electrical signal, and transmitted to the analysis calculator 40. The second incident beam 620 is incident on the first coupler 24, combined with the second emission beam 220, and then incident on the balance detector 25 for speed signal conversion, and then transmitted to the analysis calculator 40. The analysis calculator 40 performs a kalman filter algorithm data fusion.
The dual-antenna vibration measuring device can reduce the mutual influence between the emitted light and the incident light and improve the measuring precision.
In addition, the laser measurement assembly 10 and the Doppler measurement assembly 20 share the same antenna to receive the light signals, so that the volume specific gravity of the antenna occupied by the device can be reduced, the cost is saved, and the occupied space is reduced. Further, the vibration measuring device is further provided with a bracket (not shown), and when precise measurement is performed, the vibration measuring device is supported by the bracket, so that shaking errors caused by hand holding are avoided.
Referring to fig. 3, a measurement method of the vibration measuring apparatus of the present invention will be described based on the above-described configuration:
step S10: setting the vibration measuring device, including setting the laser measuring component 10, the Doppler measuring component 20, the signal receiving and transmitting component 30 and the analysis calculator 40, placing equipment at a position about 1000 meters away from a monitoring target, and realizing remote measurement.
Preferably, the laser measuring component 10, the Doppler measuring component 20 and the signal receiving and transmitting component 30 connected with the same analysis calculator 40 are more than two groups, and are positioned at different orientations of the target 100 and/or have unequal linear distances to the target 100.
Step S20: a linear distance L of the vibration measuring device to the target 100 is measured.
For example, when vibration of a floor of a high-rise building is measured and the vibration measuring device is located on the ground, the linear distance is the linear distance from the ground to the floor to be measured. For another example, when the vibration measuring device is disposed at a place far from the bridge, the linear distance is a linear distance between the vibration measuring device and two points at the bridge.
Step S30: and obtaining vibration displacement and speed of the time sequence by using the vibration measuring device through a pulse method laser ranging and a laser Doppler method.
The pulse method laser ranging and laser Doppler velocity measurement are performed synchronously, the time step of measurement is determined according to the maximum frequency of measurement, and is usually 1/10 of the measured vibration period, and the maximum time step is smaller than 1/2 of the measured vibration period so as to meet the Nyquist sampling law.
Step S40: and according to the linear distance L, fusing the obtained time series vibration displacement and the obtained time series vibration displacement speed by a Kalman filtering algorithm, wherein the time and the measurement are updated, so that a high-precision amplitude sequence is obtained.
Referring to fig. 4, the steps of the kalman filtering algorithm include:
step S41: establishing a state space model of data fusion of pulse method laser ranging and Doppler vibration measurement, wherein x (k) and E (k) are state variables:
x m (k)=Cx(k)+v(k) (1)(2)
wherein the method comprises the steps ofC=[1 0]。
Wherein the method comprises the steps ofFor the velocity measured by Doppler vibrometry, x (k) is the displacement, E (k) comprises w (k) and v (k), respectively the errors of the velocity measurement and the displacement measurement, deltat is the time interval, and k is the time step of sampling.
Step S42: in combination with temporal updating by a kalman filter algorithm.
In the constant velocity model, it is assumed that the velocity is constant during the sampling period, but in practice the velocity is not constant, so that the velocity measured in step S41 contains measurement errors, the variation of which can be modeled with gaussian white noise with zero mean value, i.e. the wiener process velocity model. Thus, for a givenx (k) gives an optimal state estimate x (k+1), the time of the velocity can be updatedWriting:
wherein,is a posterior estimate of the previous time k, derived from equation (7) below. Thus, the resulting update. The covariance matrix of the estimation error is thus:
P(k+1|k)=AP(k|k)A+Q(k) (4)
wherein the method comprises the steps ofHere->Is the variance of w (k). Q (k) can be considered a constant, the variance of the displacement measurement.
Step S43: the measurement is updated according to the time update of step S42.
Posterior estimationIs from the pre-estimated speed ∈ ->And x obtained by pulse method laser ranging measurement m The linear summation of the (k+1) displacement weights.
Where K (k+1) is the kalman filter gain, obtained by the least squares method:
Kk+1)=P(k+1|k)C T (CP(k+1|k)CT+r) -1 (8)
where r is the variance of the displacement measurement noise v (k). The covariance of the error of the posterior estimate may be updated from the prior estimate:
P(k+1|k+1)=P(k+1|k)-K(k+1)CP(k+1|k) (9)
among the numerous laser measurement means, the inventors found that: the pulse laser ranging method monitors the vibration, laser emitted by a laser emits to the surface of a target and returns to the target and then receives, the laser measuring component records the round trip time of the laser beam, and then half of the product of the speed of light and the round trip time is the distance from the measuring target to the laser measuring component. And dynamically monitoring for a long time, and comparing the dynamic displacement with the distance value of the previous state to obtain dynamic displacement of the time sequence, so that the dynamic amplitude of the target is directly obtained. Because the laser intensity is captured in the pulse method laser ranging, the laser intensity is greatly disturbed by the environment, so that the time sequence of the target vibration has higher noise level. The laser doppler vibration measurement method measures the velocity of a vibrating target by using the laser doppler effect caused by the vibration of the target, and estimates the amplitude by integrating the value of the measured velocity. Thus, laser Doppler vibration measurement can achieve lower noise levels than pulse laser ranging. However, since the laser doppler vibrometry estimation amplitude has an integral error, the error is accumulated in the long-time measurement process, so the laser doppler vibrometry method is not suitable for long-time monitoring of the vibrating object. Therefore, the pulse laser ranging method and the laser Doppler vibration measuring method have respective advantages and disadvantages, and the pulse laser ranging method is suitable for long-term monitoring, but has large interference and low precision; while the laser Doppler vibration measurement method has high accuracy, it is not suitable for long-term monitoring. In order to take the advantages of the pulse laser ranging method and the laser Doppler vibration measuring method and overcome the defects, the inventor utilizes a data fusion technology to carry out high-precision displacement estimation on the pulse laser ranging method and the laser Doppler vibration measuring data, and overcomes the limitations of the respective measuring methods through a Kalman filtering algorithm, so that the data can be measured with high precision under the combination of the pulse laser ranging method and the laser Doppler vibration measuring method, the dependence on the equipment performance is reduced, and the equipment cost and the occupied space are reduced.
Compared with the prior art, the invention provides a data fusion technology based on a Kalman filtering algorithm, and dynamic displacement is estimated in real time by combining a speed value measured by a laser Doppler vibration measurement method and a displacement measured by a pulse laser distance measurement method, so that vibration measurement is realized. The proposed technique can be used for measuring low frequency vibrations of millimeter displacements of various large civil infrastructures such as bridges, buildings, tunnels and dams, the vibration frequency being in the order of 1Hz, the distance being up to 1000 meters. On one hand, the large buildings are generally difficult to realize the direct contact of the sensors for monitoring, and long-distance monitoring is often needed; on the other hand, the amplitude of the large building is smaller and the vibration frequency is lower, so that the high-precision monitoring cannot be realized independently by the pulse laser ranging method and the laser Doppler vibration measuring method, and the defects of the measuring method can be overcome and the advantages of the measuring method can be maintained by the vibration measuring device and the vibration measuring method. Furthermore, since the sampling rate of the laser doppler vibrometry is as high as 4MHz, the technique can cover all the response frequency ranges of civil infrastructures. Compared with the prior art, the invention can (1) adopt two completely non-contact optical remote detection technologies for dynamic displacement estimation contrary to the previous research; (2) Under the condition of no integral error, real-time high-precision, high-sampling rate and good signal-to-noise ratio measurement can be realized; (3) The device is light and portable, has small error and simple installation, can monitor the same target by using a plurality of groups of vibration measuring devices to network simultaneously, realizes monitoring of different types of buildings, and has wide application range.
The above examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention.

Claims (6)

1. A vibration measuring apparatus, characterized in that: the system comprises a laser measuring assembly, a Doppler measuring assembly, a signal receiving and transmitting assembly and an analysis calculator electrically connected with the laser measuring assembly and the Doppler measuring assembly; the laser emitted by the laser measuring assembly and the Doppler measuring assembly is emitted to a target after being combined by the signal receiving and transmitting assembly, and the signal receiving and transmitting assembly receives the optical signal reflected by the target and enters the laser measuring assembly and the Doppler measuring assembly after being split; the laser measuring component measures vibration displacement according to a pulse laser method, the Doppler measuring component measures vibration speed according to a laser Doppler method, and the displacement and speed values of a time sequence are transmitted to the analysis calculator to perform data fusion of a Kalman filtering algorithm;
the laser measurement assembly comprises a pulse laser and a detector;
the Doppler measurement component comprises a single-frequency laser, a first beam splitter, an acousto-optic modulator, a first coupler and a balance detector; the laser emitted by the single-frequency laser enters the first beam splitter and is split into a first emission beam and a second emission beam; the first emission beam enters the acousto-optic modulator;
the signal receiving and transmitting assembly comprises a second beam combiner, a transmitting antenna, a receiving antenna and a second beam splitter; the laser emitted by the pulse laser enters the second beam combiner and is combined with the first emission beam from the acousto-optic modulator to form a total emission beam, and the total emission beam is emitted to the target through the emission antenna; then, after the total reflected light beam formed by the target is transmitted to the second beam splitter through the receiving antenna, and the beam is split into a first incident light beam and a second incident light beam; the first incident light beam enters the detector to be converted into an electric signal of vibration displacement; the second incident light beam enters and is combined with the second emission light beam at the first coupler, and the second incident light beam is incident on the balance detector to be converted into an electric signal of vibration speed.
2. The vibration measuring apparatus according to claim 1, wherein: the detector is an avalanche photodiode detector.
3. The vibration measuring apparatus according to claim 1, wherein: the pulse laser is a 1535nm microchip laser.
4. A vibration measuring apparatus according to claim 3, wherein: the single-frequency laser is a narrow linewidth optical fiber laser with the echo signal of 1550 nm.
5. The vibration measuring apparatus according to claim 4, wherein: the split ratio of the first coupler is 50:50.
6. A method of vibration measurement comprising the steps of:
providing a vibration measuring device according to claim 1;
the vibration measuring device is used for obtaining vibration displacement and speed of a time sequence through a pulse method laser ranging method and a laser Doppler method;
and (3) performing fusion processing on the acquired time series vibration displacement and speed by using a Kalman filtering algorithm, wherein the fusion processing comprises updating time and measurement, so as to obtain high-precision time series vibration amplitude.
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