CN114818395A - 一种基于ropn模型的生产调度仿真方法及其装置 - Google Patents
一种基于ropn模型的生产调度仿真方法及其装置 Download PDFInfo
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- 238000012545 processing Methods 0.000 claims description 33
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- 230000003111 delayed effect Effects 0.000 claims description 12
- 238000012216 screening Methods 0.000 claims description 7
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- 235000012431 wafers Nutrition 0.000 description 38
- 230000008569 process Effects 0.000 description 33
- 229940095676 wafer product Drugs 0.000 description 24
- 230000006870 function Effects 0.000 description 18
- 238000012360 testing method Methods 0.000 description 11
- 230000001960 triggered effect Effects 0.000 description 11
- 238000001459 lithography Methods 0.000 description 9
- 238000005498 polishing Methods 0.000 description 9
- 238000004140 cleaning Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 238000004590 computer program Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000032258 transport Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004422 calculation algorithm Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000010485 coping Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007687 exposure technique Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001393 microlithography Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000007619 statistical method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
库所 | 含义 | 变迁 | 含义 |
S | 产品分拣中心 | t0 | 将完成的晶圆产品移到成品库 |
D | 产品成品库 | ti,0 | 将需要进行加工工序i的晶圆产品移到区域i的缓冲区 |
Bi | 区域i的晶圆产品缓冲区 | ti,j | 将区域i的代加工晶圆产品移到设备j上 |
Eij | 区域i的第j个设备 | ti,j,0 | 将区域i设备j的已加工晶圆产品移到产品分拣中心 |
di,j | 在区域i设备j上驻留(加工) |
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Cited By (1)
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CN115794506A (zh) * | 2022-10-26 | 2023-03-14 | 北京北方华创微电子装备有限公司 | 一种晶片调度方法和一种电子设备 |
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CN115794506A (zh) * | 2022-10-26 | 2023-03-14 | 北京北方华创微电子装备有限公司 | 一种晶片调度方法和一种电子设备 |
CN115794506B (zh) * | 2022-10-26 | 2023-10-13 | 北京北方华创微电子装备有限公司 | 一种晶片调度方法和一种电子设备 |
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Address after: 401123 Building 4, No. 101, Zizhu Road, Liangjiang New District, Yubei District, Chongqing Patentee after: Ax Industries Ltd. Address before: 518000 room 701, building 6, Shenzhen Bay science and technology ecological park, no.6, Gaoxin South 9th Road, high tech Zone community, Yuehai street, Nanshan District, Shenzhen City, Guangdong Province Patentee before: Exxon industries (Guangdong) Co.,Ltd. |
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