CN114813697A - High-flux multi-channel rapid Raman detection system of micro LED chip - Google Patents
High-flux multi-channel rapid Raman detection system of micro LED chip Download PDFInfo
- Publication number
- CN114813697A CN114813697A CN202210257518.8A CN202210257518A CN114813697A CN 114813697 A CN114813697 A CN 114813697A CN 202210257518 A CN202210257518 A CN 202210257518A CN 114813697 A CN114813697 A CN 114813697A
- Authority
- CN
- China
- Prior art keywords
- chamber
- rotating shaft
- lifting
- walking
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Abstract
The invention discloses a high-flux multichannel rapid Raman detection system of a micro LED chip, which comprises: detecting a platform; the chip placing unit is arranged on the attitude adjusting platform through an attitude adjusting unit, and a plurality of storage chambers for placing chips are arranged on the chip placing unit; the Raman probe group unit is arranged on the detection platform through a lifting unit, is positioned above the chip placing unit and is arranged in one-to-one correspondence with each storage chamber.
Description
Technical Field
The invention relates to the technical field of semiconductor devices, in particular to a high-flux multi-channel rapid Raman detection system of a micro LED chip.
Background
The Micro LED display technology is a display technology in which self-luminous LEDs with a micron level (less than 50 microns) are used as light-emitting pixel units and are assembled on a driving panel to form a high-density LED array. When the Micro LED is used for displaying, the number of chips reaches millions or even tens of millions, and in the production process, the defective points in the display chips need to be detected in time for removal or repair. For example, for a display screen of a 4K television, 4K × 2K × 3 ═ 24M Micro LED chips are required, the conventional detection and sorting speed is in the order of 10K/hour, and the detection and sorting time of the Micro LED on a common 4-inch sheet will reach over 1000 hours, so that the rapid and accurate detection of the Micro LED display chip is an urgent problem to be solved.
Raman scattering refers to the phenomenon that when laser with a certain frequency irradiates the surface of a sample, molecules in a substance absorb or release part of energy, vibrate in different modes and degrees, and then scatter light with different frequencies. The frequency variation is determined by the characteristics of the scattering material, and the mode of vibration of different atomic groups is unique, so that scattered light with specific frequency can be generated, and the scattered light carries information of the vibration of partial molecules in the sample. The composition, structure, vibration symmetry and size of the substance to be measured determine the change of frequency, so that the Raman spectrum can be used as an effective means for researching the structure of the substance.
The detection of the current commercial confocal micro-Raman spectrometer on the micro LED chip is sampling single detection, and the detection efficiency is low.
Disclosure of Invention
In order to achieve the above purpose, the invention discloses a high-flux multi-channel rapid Raman detection system of a micro LED chip, comprising:
a detection platform;
the chip placing unit is arranged on the attitude adjusting platform through an attitude adjusting unit, and a plurality of storage chambers for placing chips are arranged on the chip placing unit;
the Raman probe group unit is arranged on the detection platform through a lifting unit, is positioned above the chip placing unit and is arranged in one-to-one correspondence with each storage chamber.
Preferably, the raman probe group unit is composed of a plurality of raman probes, and the number of the raman probes is equal to that of the storage chambers.
Preferably, the method further comprises the following steps:
the light splitting element is arranged on the lifting unit and is connected with each Raman probe through an optical fiber emission line;
and the light receiving element is arranged on the lifting unit and is connected with the Raman probe through an optical fiber receiving wire.
Preferably, the posture adjustment unit includes:
the walking track is fixedly arranged on the detection platform;
the main walking groove is formed in the walking track;
the two roller traveling grooves are symmetrically arranged on the traveling rail by taking the main traveling groove as a center;
the chip placing unit is arranged at the top end of the walking seat;
the fixed swivel mount is installed at the bottom end of the walking seat, and the fixed swivel mount walks in the main walking groove.
Preferably, the chip placement unit includes:
the chip placing plate is provided with a plurality of storage chambers for placing chips in parallel, and the depth of each storage chamber is less than twice the thickness of each chip;
the chip placing groove is mounted at one end of the chip placing plate, and the other end of the chip placing plate is erected at the top end of the walking seat;
the lifting groove is formed in the top end of the walking seat;
the lifting block is connected in the lifting groove in a sliding manner;
the supporting rod is fixedly connected to the lifting block;
the chip placing plate comprises a first rotating rod, one end of the first rotating rod is rotatably connected with the supporting rod, and the other end of the first rotating rod is rotatably connected with the bottom end of the chip placing plate.
Preferably, the walking seat is provided with:
the power chamber is arranged in the walking seat;
the installation circular groove is formed in the bottom end of the walking seat, and the fixed swivel seat is installed in the installation circular groove;
the two roller mounting chambers are symmetrically arranged in the walking seat by taking the mounting circular groove as a center, and the roller mounting chambers are communicated with the bottom end of the walking seat;
the two transmission box installation chambers are symmetrically arranged in the walking seat by taking the installation circular groove as a center, the transmission box installation chambers are positioned at the ends, far away from the installation circular groove, of the roller installation chambers, are communicated with the roller installation chambers, and the sections of the transmission box installation chambers are designed to be quarter circular arc structures;
the transmission case is arranged in the transmission case installation chamber and is connected in the transmission case installation chamber in a sliding manner;
one end of the roller mounting shaft is connected with the side end of the fixed swivel base, and the other end of the roller mounting shaft extends into the transmission case;
the two first bevel gear mounting chambers are symmetrically arranged in the walking seat by taking the power chamber as a center, and the first bevel gear mounting chambers are positioned above the roller mounting chambers;
the two second bevel gear mounting chambers are symmetrically arranged in the traveling seat by taking the power chamber as a center, and are positioned above the first bevel gear mounting chamber;
one end of the first rotating shaft extends into the first bevel gear mounting chamber, and the other end of the first rotating shaft extends into the transmission case;
the two belt wheels are arranged in the transmission case, one belt wheel is arranged on the first rotating shaft, and the other belt wheel is arranged on the roller wheel mounting shaft;
the transmission belt is arranged in the transmission box and sleeved on the two belt wheels;
the roller is arranged in the roller mounting chamber and is mounted on the roller mounting shaft;
the roller mounting seat is connected to the top of the roller mounting chamber in a sliding mode, the roller mounting seat is connected to the roller mounting shaft through brackets, and the roller is located between the two brackets;
a pair of first bevel gears in meshing engagement, said first bevel gears being disposed within said first bevel gear mounting chamber, one of said first bevel gears being mounted to said first shaft;
a pair of engaged second beveled gears, said second beveled gears disposed within said second beveled gear mounting chamber;
one end of the second rotating shaft extends into the first bevel gear mounting chamber and is connected with the other first bevel gear, and the other end of the second rotating shaft extends into the second bevel gear mounting chamber and is connected with one second bevel gear;
one end of the third rotating shaft extends into the power chamber, and the other end of the third rotating shaft extends into the second bevel gear mounting chamber and is connected with the other second bevel gear;
the upper rotating shaft is rotatably arranged in the power chamber;
the right helical gear is arranged in the power chamber and is arranged on the upper rotating shaft;
the third helical gear is arranged in the power chamber, is meshed with the right helical gear and is arranged on the third rotating shaft;
the driving motor is arranged on the inner wall of the power chamber;
the spline shaft is arranged in the power chamber, is arranged at the output end of the driving motor and is positioned below the upper rotating shaft;
the first straight gear is sleeved on the spline shaft through a spline sleeve;
the second straight gear is arranged on the upper rotating shaft and is meshed with the first straight gear;
the sliding transverse groove is formed in the inner wall of the power chamber;
one end of the magnetic sliding block is connected with the spline sleeve, and the other end of the magnetic sliding block is connected in the sliding transverse groove in a sliding mode;
the electromagnet device is arranged in the sliding transverse groove and is matched with the magnetic sliding block;
the return spring is arranged in the sliding transverse groove and connected between the magnetic sliding block and the inner wall of the sliding transverse groove;
the lower rotating shaft is rotatably arranged in the power chamber and is positioned below the spline shaft;
the third straight gear is arranged on the lower rotating shaft and is meshed with the first straight gear;
one end of the central rotating shaft is fixedly connected to the top end of the fixed swivel base, and the other end of the central rotating shaft penetrates through the installation circular groove and extends into the power chamber;
and the meshed pair of fourth bevel gears is arranged in the power chamber, one of the fourth bevel gears is arranged on the lower rotating shaft, and the other fourth bevel gear is arranged on the central rotating shaft.
Preferably, a right-angle rotating frame is arranged in the first bevel gear mounting chamber, one end of the right-angle rotating frame is rotatably connected to the first rotating shaft, and the other end of the right-angle rotating frame is rotatably connected to the second rotating shaft.
Preferably, the walking seat is further provided with:
the rotating roller mounting shaft is vertically arranged in the power chamber;
the rotating roller is arranged on the rotating roller mounting shaft;
the spiral chute is arranged on the rotating roller;
the lifting top block is attached to the inner wall of the power chamber, the top end of the lifting top block penetrates through the top of the power chamber and extends out of the top end of the walking seat, and the top end of the lifting top block abuts against the bottom end of the chip placing plate;
the first sliding block is connected in the spiral chute in a sliding manner and is fixedly connected with the lifting jacking block;
the lifting vertical groove is formed in the inner wall of the power chamber;
the second sliding block is connected in the lifting vertical groove in a sliding mode and is fixedly connected with the lifting top block;
and the fifth bevel gears are arranged in the power chamber, one of the fifth bevel gears is arranged on the rotating roller mounting shaft, and the other fifth bevel gear is arranged on the upper rotating shaft.
Preferably, the walking seat is further provided with:
the lifting chamber is arranged in the walking seat and communicated with the top end of the walking seat;
the overturning rod is rotatably connected into the lifting chamber through an overturning shaft;
the abutting rod is fixedly connected to the overturning rod, extends out of the lifting chamber and abuts against the bottom end of the chip placing plate;
the transverse moving screw rod is arranged in the lifting chamber, and the lower rotating shaft extends into the lifting chamber and is fixedly connected with the transverse moving screw rod;
the transverse screw block is arranged in the lifting chamber and sleeved on the transverse screw rod;
and one end of the turnover arm is hinged with the transverse moving screw block, and the other end of the turnover arm is hinged on the turnover rod.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural diagram of an attitude adjustment unit according to the present invention;
FIG. 3 is a side sectional view of an attitude adjusting unit according to the present invention;
FIG. 4 is a front sectional view of an attitude adjusting unit according to the present invention;
fig. 5 is a schematic structural view of a power chamber portion in the present invention.
In the figure: 1. a detection platform; 2. a chip placing unit; 3. an attitude adjusting unit; 4. a Raman probe group unit; 5. a lifting unit; 11. a lifting block; 12. a support bar; 31. a traveling rail; 32. a main walking groove; 33. a roller traveling groove; 34. a walking seat; 35. fixing the rotary seat; 36. a power chamber; 37. a roller mounting chamber; 38. a transmission case installation chamber; 39. a transmission case; 30. a first helical gear mounting chamber; 61. a second helical gear mounting chamber; 62. a first rotating shaft; 63. a pulley; 64. a transmission belt; 65. a roller; 66. a first helical gear; 67. a second helical gear; 68. an upper rotating shaft; 69. a drive motor; 60. a spline shaft; 71. a first straight gear; 72. a second spur gear; 73. a sliding transverse slot; 74. a magnetic slider; 75. an electromagnet device; 76. a lower rotating shaft; 77. a third spur gear; 78. a central rotating shaft; 79. a fourth helical gear; 70. a rotating roller; 81. a spiral chute; 82. lifting the jacking block; 83. a lifting chamber; 84. a turning rod; 85. a top rod; 86. traversing the screw rod; 87. transversely moving the screw block; 88. a turning arm; 89. and a fifth helical gear.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Examples
The invention will be further described with reference to the accompanying drawings.
As shown in fig. 1, the high-throughput multi-channel fast raman detection system of a micro LED chip provided in this embodiment includes:
a detection platform 1;
the chip placing unit 2 is installed on the posture adjusting platform 1 through a posture adjusting unit 3, and a plurality of storage chambers for placing chips are arranged on the chip placing unit 2;
the Raman probe group unit 4 is arranged on the detection platform 1 through a lifting unit 5, and the Raman probe group unit 4 is positioned above the chip placing unit 2 and is arranged corresponding to each storage chamber one by one.
The working principle and the beneficial effects of the technical scheme are as follows:
the invention discloses a high-flux multichannel rapid Raman detection system for micro LED chips, wherein the micro LED chips are placed in storage cavities of a chip placing unit 2, only one micro LED chip is placed in each storage cavity, a Raman probe group unit 4 is installed on a detection platform 1 through a lifting unit 5, and the Raman probe group unit 4 is used for synchronously detecting the micro LED chips in each storage cavity.
In an embodiment provided by the present invention, the raman probe group unit 4 is composed of a plurality of raman probes, and the number of the raman probes is equal to that of the storage chambers.
The working principle and the beneficial effects of the technical scheme are as follows:
it has 14 to deposit the cavity, and 7 parts of quantity are a set of, and be provided with two sets of side by side, and raman probe group unit 4 comprises 14 raman probe, can carry out synchronous detection to 14 micro LED chips simultaneously, has improved detection efficiency.
In one embodiment, the present invention further includes:
the light splitting element is arranged on the lifting unit 5 and is connected with each Raman probe through an optical fiber emission line;
and the light receiving element is arranged on the lifting unit 5 and is connected with the Raman probe through an optical fiber receiving wire.
As shown in fig. 2, in an embodiment of the present invention, the posture adjustment unit 3 includes:
the walking track 31 is fixedly arranged on the detection platform 1;
a main traveling groove 32, the main traveling groove 32 being opened on the traveling rail 31;
the two roller traveling grooves 33 are symmetrically formed on the traveling rail 31 with the main traveling groove 32 as the center;
the traveling seat 34, the traveling seat 34 travels on the traveling rail 31, and the chip placing unit 2 is installed at the top end of the traveling seat 34;
and the fixed swivel mount 35 is arranged at the bottom end of the walking seat 34, and the fixed swivel mount 35 walks in the main walking groove 32.
The working principle and the beneficial effects of the technical scheme are as follows:
the micro LED chips are placed on the chip placing units 2, the walking seats 34 displace the chip placing units 2 to the Raman probe group unit 4 along the walking tracks 31, so that Raman detection of the micro LED chips is completed, the fixed rotary seats 35 walk in the main walking grooves 32, and walking tracks of the chip placing units 2 are limited.
As shown in fig. 4, in an embodiment provided by the present invention, the chip placing unit 2 includes:
the chip placing plate is provided with a plurality of storage chambers for placing chips in parallel, and the depth of each storage chamber is less than twice the thickness of each chip;
the chip placing groove is mounted at one end of the chip placing plate, and the other end of the chip placing plate is erected at the top end of the walking seat 34;
the lifting groove is formed in the top end of the walking seat 34;
the lifting block 11 is connected in the lifting groove in a sliding manner;
the supporting rod 12 is fixedly connected to the lifting block 11;
and one end of the first rotating rod is rotatably connected with the supporting rod 12, and the other end of the first rotating rod is rotatably connected with the bottom end of the chip placing plate.
The working principle and the beneficial effects of the technical scheme are as follows:
the chip is placed the board and is the tilting setting, and the chip is placed the board and is close to the chip and place the groove end for the high-order end, and the chip is placed the board and is kept away from the chip and place the groove end for the low-order end, and micro LED chip is placed in the chip standing groove, and the chip is placed the board and is close to chip and place the groove end and do the rising movement along lift groove, elevator 11 to place the board to the chip and be close to chip and place the groove end and strike the vibration, and then the quick micro LED chip of placing in depositing the cavity.
As shown in fig. 3 to 5, in an embodiment of the present invention, the walking base 34 is provided with:
the power chamber 36, the said power chamber 36 locates in the said walking seat 34;
the installation circular groove is formed in the bottom end of the walking seat 34, and the fixed swivel mount 35 is installed in the installation circular groove;
the two roller mounting chambers 37 are symmetrically arranged in the walking seat 34 by taking the mounting circular groove as a center, and the roller mounting chambers 37 are communicated with the bottom end of the walking seat 34;
the two transmission box installation chambers 38 are symmetrically arranged in the walking seat 34 by taking the installation circular groove as a center, the transmission box installation chambers 38 are positioned at the ends, far away from the installation circular groove, of the roller installation chambers 37, the transmission box installation chambers 38 are communicated with the roller installation chambers 37, and the sections of the transmission box installation chambers 38 are designed to be quarter circular arc-shaped structures;
a transmission case 39, wherein the transmission case 39 is installed in the transmission case installation chamber 38, and the transmission case 39 is slidably connected in the transmission case installation chamber 38;
a roller mounting shaft, one end of which is connected with the side end of the fixed swivel mount 35, and the other end of which extends into the transmission case 39;
two first bevel gear mounting chambers 30 are symmetrically arranged in the traveling base 34 by taking the power chamber 36 as a center, and the first bevel gear mounting chambers 30 are positioned above the roller mounting chamber 37;
a second bevel gear mounting chamber 61, wherein the two second bevel gear mounting chambers 61 are symmetrically arranged in the traveling base 34 with the power chamber 36 as a center, and the second bevel gear mounting chamber 61 is positioned above the first bevel gear mounting chamber 30;
a first rotating shaft 62, one end of the first rotating shaft 62 extends into the first bevel gear mounting chamber 30, and the other end of the first rotating shaft 62 extends into the transmission case 39;
two belt wheels 63, wherein the two belt wheels 63 are arranged in the transmission case 39, one belt wheel 63 is mounted on the first rotating shaft 62, and the other belt wheel 63 is mounted on the roller mounting shaft;
the transmission belt 64 is arranged in the transmission box 39, and the transmission belt 64 is sleeved on the two belt wheels 63;
a roller 65, the roller 65 being disposed in the roller mounting chamber 37, the roller 65 being mounted on the roller mounting shaft;
the roller mounting seat is connected to the top of the roller mounting chamber 37 in a sliding mode, the roller mounting seat is connected to the roller mounting shaft through a support, and the roller 65 is located between the two supports;
a pair of first beveled gears 66 in meshing engagement, said first beveled gears 66 being disposed within said first beveled gear mounting chamber 30, one of said first beveled gears 66 being mounted to said first shaft 62;
a pair of second bevel gears 67 engaged with each other, the second bevel gears 67 being provided in the second bevel gear mounting chamber 61;
one end of the second rotating shaft extends into the first bevel gear mounting chamber 30 and is connected with the other first bevel gear 66, and the other end of the second rotating shaft extends into the second bevel gear mounting chamber 61 and is connected with one second bevel gear 67;
one end of the third rotating shaft extends into the power chamber 36, and the other end of the third rotating shaft extends into the second bevel gear mounting chamber 61 and is connected with the other second bevel gear 67;
the upper rotating shaft 68 is rotatably arranged in the power chamber 36;
the right bevel gear is arranged in the power chamber 36 and is arranged on the upper rotating shaft 68;
the third helical gear is arranged in the power chamber 36, is engaged with the right helical gear and is arranged on the third rotating shaft;
the driving motor 69 is mounted on the inner wall of the power chamber 36;
the spline shaft 60 is arranged in the power chamber 36, the spline shaft 60 is installed at the output end of the driving motor 69, and the spline shaft 30 is positioned below the upper rotating shaft 68;
the first straight gear 71 is sleeved on the spline shaft 60 through a spline sleeve;
a second spur gear 72, wherein the second spur gear 72 is mounted on the upper rotating shaft 68, and the second spur gear 72 is meshed with the first spur gear 71;
a sliding transverse groove 73, wherein the sliding transverse groove 73 is arranged on the inner wall of the power chamber 36;
one end of the magnetic sliding block 74 is connected with the spline housing, and the other end of the magnetic sliding block 74 is slidably connected in the sliding transverse groove 73;
the electromagnet device 75 is installed in the sliding transverse groove 73, and the electromagnet device 75 is matched with the magnetic sliding block 74;
the return spring is arranged in the sliding transverse groove 73 and is connected between the magnetic slider 74 and the inner wall of the sliding transverse groove 73;
a lower rotating shaft 76, wherein the lower rotating shaft 76 is rotatably installed in the power chamber 36, and the lower rotating shaft 76 is located below the spline shaft 60;
a third spur gear 77, the third spur gear 77 being mounted on the lower rotating shaft 76, the third spur gear 77 being engaged with the first spur gear 71;
one end of the central rotating shaft 78 is fixedly connected to the top end of the fixed swivel base 35, and the other end of the central rotating shaft 78 penetrates through the installation circular groove and extends into the power chamber 36;
a pair of engaged fourth beveled gears 79, said fourth beveled gears 79 disposed within said power compartment 36, one of said fourth beveled gears 79 mounted to said lower shaft 76 and the other of said fourth beveled gears 79 mounted to said central shaft 78.
The working principle and the beneficial effects of the technical scheme are as follows:
in the initial state, the walking base 34 is separated from the raman probe set unit, at this time, the length direction of the chip placement plate is perpendicular to the raman probe set unit, the electromagnet device 75 works to generate suction to the magnetic sliding block 74, the magnetic sliding block 74 drives the spline housing connected with the magnetic sliding block to move along the slotting direction of the sliding transverse slot 73 to the stretching direction of the return spring, the first spur gear 71 and the second spur gear 72 are engaged, the driving motor 69 works to drive the spline shaft 60 installed at the output end of the driving motor 69 to rotate, the spline shaft 60 drives the upper rotating shaft 68 to rotate through the spline housing, the first spur gear 71 and the second spur gear 72, the upper rotating shaft 68 drives the third rotating shaft to rotate through the right bevel gear and the third bevel gear, the third rotating shaft drives the second rotating shaft to rotate through the second bevel gear 67 located in the second bevel gear installation chamber 61, the second rotating shaft drives the first rotating shaft 62 to rotate through the first bevel gear 66 located in the first bevel gear installation chamber 30, first pivot 62 is through the band pulley 63 that is located transmission case 39, drive belt 64 drives the rotation of roller installation axle, thereby it rotates to drive the gyro wheel 65 of installing in the epaxial gyro wheel of roller installation, gyro wheel 65 rolls in gyro wheel walking groove 33, thereby drive walking seat 34, install the chip on walking seat 34 and place the board and move under being close to raman probe group unit 4, thereby place the board displacement to raman probe group unit 4 with the chip fast under, with carry out raman detection to micro LED chip fast.
In one embodiment of the present invention, a right-angle rotating frame is disposed in the first bevel gear installation chamber 30, one end of the right-angle rotating frame is rotatably connected to the first rotating shaft 62, and the other end of the right-angle rotating frame is rotatably connected to the second rotating shaft.
The working principle and the beneficial effects of the technical scheme are as follows:
the arrangement of the right-angle rotating frame facilitates the first rotating shaft 62 to rotate 90 degrees by taking the second rotating shaft as a center, and meanwhile, the first bevel gear 66 always keeps a meshed state.
In an embodiment of the present invention, the walking base 34 further includes:
a rotating roller mounting shaft vertically provided in the power chamber 36;
a rotating roller 70, the rotating roller 70 being mounted on the rotating roller mounting shaft;
a spiral chute 81, the spiral chute 81 being provided on the rotating roller 70;
the lifting top block 82 is attached to the inner wall of the power chamber 36, the top end of the lifting top block 82 penetrates through the top of the power chamber 36 and extends out of the top end of the walking seat 34, and the top end of the lifting top block 82 abuts against the bottom end of the chip placing plate;
the first sliding block is slidably connected into the spiral chute 81 and fixedly connected with the lifting top block 82;
the lifting vertical groove is formed in the inner wall of the power chamber 36;
the second sliding block is connected in the lifting vertical groove in a sliding mode and is fixedly connected with the lifting top block 82;
a pair of fifth beveled gears 89 in meshing engagement, said fifth beveled gears 89 being disposed within said power chamber 36, one of said fifth beveled gears 89 being mounted on said rotatable roller mounting shaft, the other of said fifth beveled gears 89 being mounted on said upper rotatable shaft 68.
The working principle and the beneficial effects of the technical scheme are as follows:
when the chip placing plate is displaced to the position under the Raman probe group unit 4, synchronously, the third rotating shaft drives the rotating roller installation shaft to rotate through the meshed pair of fifth bevel gears 89, thereby driving the rotating roller 70 installed on the rotating roller installation shaft to rotate, under the cooperation of the spiral chute 81 on the rotating roller 70 and the first slider, the lifting top block 82 connected with the first slider is driven to do periodic lifting motion along the lifting vertical groove slotting direction, the lifting top block 82 is continuously knocked to vibrate the chip placing plate to be close to the chip placing groove end, thereby rapidly sliding the micro LED in the chip placing groove onto the chip placing plate, and tiling the micro LED into the storage cavity, sliding the storage cavity into the storage cavity, because the depth of the storage cavity is less than the double chip thickness, thereby only one micro LED chip can be placed in the storage cavity.
In an embodiment of the present invention, the walking base 36 further includes:
the lifting chamber 83 is arranged in the walking seat 34, and the lifting chamber 83 is communicated with the top end of the walking seat 34;
the overturning rod 84 is connected into the lifting chamber 83 in a rotating way through an overturning shaft;
the abutting rod 85 is fixedly connected to the overturning rod 84, and the abutting rod 85 extends out of the lifting chamber 83 and abuts against the bottom end of the chip placing plate;
the traverse screw 86 is arranged in the lifting chamber 83, and the lower rotating shaft 76 extends into the lifting chamber 83 and is fixedly connected with the traverse screw 86;
the transverse moving screw block 87, the transverse moving screw block 87 is arranged in the lifting chamber 83, and the transverse moving screw block 87 is sleeved on the transverse moving screw 86;
and one end of the turning arm 88 is hinged with the transverse moving screw block 87, and the other end of the turning arm 88 is hinged on the turning rod 84.
The working principle and the beneficial effects of the technical scheme are as follows:
the electromagnet device 75 stops working, under the action of the return spring, the magnetic sliding block 74 drives the spline housing, the first straight gear 71 mounted on the spline housing moves towards the contraction direction of the return spring, the first straight gear 71 is meshed with the third straight gear 77, so as to drive the lower rotating shaft 76 connected with the first straight gear 77 to rotate, the lower rotating shaft 76 drives the central rotating shaft 78 to rotate through the meshed fourth helical gear 79, so as to drive the traveling seat 34 to rotate on the fixed swivel mount 35 by 90 degrees, the length direction of the chip placing plate is horizontally distributed with the raman probe set unit, the bottom end of the traveling seat 34 is positioned above the traveling rail 31, so as to prevent the traveling rail 31 from causing interference to the traveling seat 34 when the traveling seat 34 rotates, and synchronously, the lower rotating shaft 76 drives the traverse screw 87 sleeved on the traverse screw 86 through the traverse screw 86 positioned in the lifting chamber 83 to move, so as to overturn the traverse screw 87 towards the direction far away from the power chamber 36 through the turnover rod 84 connected with the turnover arm 88, the ejector rod 85 connected with the turning rod 84 abuts against the lower end of the chip placing plate, so that the chip placing plate is horizontally distributed, and the Raman probes and the storage chambers are convenient to correspond one to one.
After the detection, driving motor 69 reverse rotation, the chip is placed the board and is recovered the slope and be vertical distribution with raman probe group unit, and walking seat 34 drives the chip and places the board and withdraw from raman probe group unit under 4, and the convenient back micro LED that detects takes out and replaces.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications derived therefrom are intended to be within the scope of the invention.
Claims (9)
1. The utility model provides a high flux multichannel quick raman detection system of micro LED chip which characterized in that includes:
an inspection platform (1);
the chip placing unit (2) is installed on the posture adjusting platform (1) through a posture adjusting unit (3), and a plurality of storage chambers for placing chips are arranged on the chip placing unit (2);
the Raman probe group unit (4) is installed on the detection platform (1) through a lifting unit (5), and the Raman probe group unit (4) is located above the chip placing unit (2) and corresponds to the storage chambers one by one.
2. The high-throughput multi-channel rapid Raman detection system of micro LED chips according to claim 1, wherein the Raman probe group unit (4) is composed of a plurality of Raman probes, and the number of Raman probes is equal to that of the storage chambers.
3. The high-throughput multi-channel fast Raman detection system of micro LED chips of claim 2, further comprising:
the light splitting element is arranged on the lifting unit (5) and is connected with each Raman probe through an optical fiber emission line;
and the light receiving element is arranged on the lifting unit (5) and is connected with the Raman probe through an optical fiber receiving wire.
4. The high-throughput multi-channel fast raman detection system of micro LED chips according to claim 2, wherein said attitude adjustment unit (3) comprises:
the walking track (31), the walking track (31) is fixedly arranged on the detection platform (1);
the main walking groove (32), the main walking groove (32) is arranged on the walking track (31);
the two roller walking grooves (33) are symmetrically arranged on the walking track (31) by taking the main walking groove (32) as a center;
the chip placing unit (2) is arranged at the top end of the walking seat (34);
the fixed swivel mount (35), fixed swivel mount (35) install in walking seat (34) bottom, fixed swivel mount (35) walk in main walking groove (32).
5. High-throughput multi-channel fast Raman detection system of micro LED chips according to claim 4, wherein said chip placement unit (2) comprises:
the chip placing plate is provided with a plurality of storage chambers for placing chips in parallel, and the depth of each storage chamber is less than twice the thickness of each chip;
the chip placing groove is mounted at one end of the chip placing plate, and the other end of the chip placing plate is erected at the top end of the walking seat (34);
the lifting groove is formed in the top end of the walking seat (34);
the lifting block (11), the said lifting block (11) is connected to the said lifting trough slidably;
the supporting rod (12), the said supporting rod (12) is fixedly connected to the said lifting block (11);
one end of the first rotating rod is rotatably connected with the supporting rod (12), and the other end of the first rotating rod is rotatably connected with the bottom end of the chip placing plate.
6. The high-throughput multi-channel rapid Raman detection system of micro LED chips according to claim 5, wherein the walking base (34) is provided with:
the power chamber (36), the said power chamber (36) locates in the said walking seat (34);
the installation circular groove is formed in the bottom end of the walking seat (34), and the fixed rotary seat (35) is installed in the installation circular groove;
the two roller mounting chambers (37) are symmetrically arranged in the walking seat (34) by taking the mounting circular groove as a center, and the roller mounting chambers (37) are communicated with the bottom end of the walking seat (34);
the two transmission box installation chambers (38) are symmetrically arranged in the walking seat (34) by taking the installation circular groove as a center, the transmission box installation chambers (38) are positioned at the ends, far away from the installation circular groove, of the roller installation chambers (37), the transmission box installation chambers (38) are communicated in the roller installation chambers (37), and the sections of the transmission box installation chambers (38) are designed to be quarter arc-shaped structures;
the transmission box (39) is installed in the transmission box installation chamber (38), and the transmission box (39) is connected in the transmission box installation chamber (38) in a sliding mode;
one end of the roller mounting shaft is connected with the side end of the fixed swivel base (35), and the other end of the roller mounting shaft extends into the transmission case (39);
the two first bevel gear mounting chambers (30) are symmetrically arranged in the walking seat (34) by taking the power chamber (36) as a center, and the first bevel gear mounting chambers (30) are positioned above the roller mounting chamber (37);
the two second bevel gear mounting chambers (61) are symmetrically arranged in the traveling seat (34) by taking the power chamber (36) as a center, and the second bevel gear mounting chambers (61) are positioned above the first bevel gear mounting chamber (30);
one end of the first rotating shaft (62) extends into the first bevel gear mounting chamber (30), and the other end of the first rotating shaft (62) extends into the transmission case (39);
the two belt wheels (63) are arranged in the transmission case (39), one belt wheel (63) is arranged on the first rotating shaft (62), and the other belt wheel (63) is arranged on the roller mounting shaft;
the transmission belt (64) is arranged in the transmission box (39), and the transmission belt (64) is sleeved on the two belt wheels (63);
a roller (65), wherein the roller (65) is arranged in the roller mounting chamber (37), and the roller (65) is mounted on the roller mounting shaft;
the roller mounting seat is connected to the inner top of the roller mounting chamber (37) in a sliding mode, the roller mounting seat is connected to a roller mounting shaft through a support, and the roller (65) is located between the two supports;
a pair of first beveled gears (66) in meshing engagement, said first beveled gears (66) being disposed within said first beveled gear mounting chamber (30), one of said first beveled gears (66) being mounted to said first rotating shaft (62);
a pair of second bevel gears (67) in meshing engagement, said second bevel gears (67) being disposed within said second bevel gear mounting chamber (61);
one end of the second rotating shaft extends into the first bevel gear mounting chamber (30) and is connected with the other first bevel gear (66), and the other end of the second rotating shaft extends into the second bevel gear mounting chamber (61) and is connected with one of the second bevel gears (67);
one end of the third rotating shaft extends into the power chamber (36), and the other end of the third rotating shaft extends into the second bevel gear mounting chamber (61) and is connected with the other second bevel gear (67);
the upper rotating shaft (68), the upper rotating shaft (68) is rotatably arranged in the power chamber (36);
the right helical gear is arranged in the power chamber (36) and is arranged on the upper rotating shaft (68);
the third helical gear is arranged in the power chamber (36), is engaged with the right helical gear and is arranged on the third rotating shaft;
the driving motor (69), the said driving motor (69) is mounted on the inboard wall of the said power room (36);
the spline shaft (60) is arranged in the power chamber (36), the spline shaft (60) is installed at the output end of the driving motor (69), and the spline shaft (30) is positioned below the upper rotating shaft (68);
the first straight gear (71), the said first straight gear (71) is fitted on the said spline shaft (60) through the spline housing;
a second spur gear (72), wherein the second spur gear (72) is mounted on the upper rotating shaft (68), and the second spur gear (72) is meshed with the first spur gear (71);
the sliding transverse groove (73), the sliding transverse groove (73) is arranged on the inner wall of the power chamber (36);
one end of the magnetic sliding block (74) is connected with the spline sleeve, and the other end of the magnetic sliding block (74) is connected in the sliding transverse groove (73) in a sliding mode;
the electromagnet device (75) is installed in the sliding transverse groove (73), and the electromagnet device (75) is matched with the magnetic sliding block (74);
the return spring is arranged in the sliding transverse groove (73) and connected between the magnetic slider (74) and the inner wall of the sliding transverse groove (73);
the lower rotating shaft (76), the lower rotating shaft (76) is rotatably arranged in the power chamber (36), and the lower rotating shaft (76) is positioned below the spline shaft (60);
a third spur gear (77), the third spur gear (77) being mounted on the lower rotating shaft (76), the third spur gear (77) being engaged with the first spur gear (71);
one end of the central rotating shaft (78) is fixedly connected to the top end of the fixed swivel base (35), and the other end of the central rotating shaft (78) penetrates through the mounting circular groove and extends into the power chamber (36);
a pair of engaged fourth beveled gears (79), said fourth beveled gears (79) being disposed within said power compartment (36), one of said fourth beveled gears (79) being mounted to said lower shaft (76), the other of said fourth beveled gears (79) being mounted to said central shaft (78).
7. The high-throughput multi-channel fast Raman detection system for micro LED chips according to claim 6, wherein a right-angle rotating frame is arranged in the first helical gear installation chamber (30), one end of the right-angle rotating frame is rotatably connected to the first rotating shaft (62), and the other end of the right-angle rotating frame is rotatably connected to the second rotating shaft.
8. The high-flux multi-channel rapid Raman detection system of micro LED chips according to claim 6, wherein the walking base (34) is further provided with:
a rotating roller mounting shaft vertically arranged in the power chamber (36);
a rotating roller (70), wherein the rotating roller (70) is arranged on the rotating roller mounting shaft;
a spiral chute (81), wherein the spiral chute (81) is arranged on the rotating roller (70);
the lifting top block (82) is attached to the inner wall of the power chamber (36), the top end of the lifting top block (82) penetrates through the inner top of the power chamber (36) and extends out of the top end of the walking seat (34), and the top end of the lifting top block (82) abuts against the bottom end of the chip placing plate;
the first sliding block is connected in the spiral chute (81) in a sliding manner, and is fixedly connected with the lifting jacking block (82);
the lifting vertical groove is formed in the inner wall of the power chamber (36);
the second sliding block is connected in the lifting vertical groove in a sliding mode and is fixedly connected with the lifting top block (82);
a pair of fifth bevel gears (89) in mesh, said fifth bevel gears (89) being disposed within said power chamber (36), one of said fifth bevel gears (89) being mounted on said rotatable roller mounting shaft, and the other of said fifth bevel gears (89) being mounted on said upper rotatable shaft (68).
9. The high-flux multi-channel rapid Raman detection system of micro LED chips according to claim 6, wherein the walking base (36) is further provided with:
the lifting chamber (83) is arranged in the walking seat (34), and the lifting chamber (83) is communicated with the top end of the walking seat (34);
the overturning rod (84) is rotatably connected into the lifting chamber (83) through an overturning shaft;
the supporting rod (85) is fixedly connected to the overturning rod (84), and the supporting rod (85) extends out of the lifting chamber (83) and is abutted to the bottom end of the chip placing plate;
the traverse screw (86), the said traverse screw (86) is set up in the said lift chamber (83), the said lower spindle (76) stretches into the said lift chamber (83), and fixedly connect with said traverse screw (86);
the transverse moving screw block (87), the transverse moving screw block (87) is arranged in the lifting chamber (83), and the transverse moving screw block (87) is sleeved on the transverse moving screw rod (86);
and one end of the turnover arm (88) is hinged with the transverse moving screw block (87), and the other end of the turnover arm (88) is hinged on the turnover rod (84).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210257518.8A CN114813697B (en) | 2022-03-16 | 2022-03-16 | High-flux multi-channel rapid Raman detection system of micro LED chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210257518.8A CN114813697B (en) | 2022-03-16 | 2022-03-16 | High-flux multi-channel rapid Raman detection system of micro LED chip |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114813697A true CN114813697A (en) | 2022-07-29 |
| CN114813697B CN114813697B (en) | 2022-12-27 |
Family
ID=82529223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210257518.8A Active CN114813697B (en) | 2022-03-16 | 2022-03-16 | High-flux multi-channel rapid Raman detection system of micro LED chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114813697B (en) |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030059820A1 (en) * | 1997-11-26 | 2003-03-27 | Tuan Vo-Dinh | SERS diagnostic platforms, methods and systems microarrays, biosensors and biochips |
| US20070077595A1 (en) * | 2005-09-30 | 2007-04-05 | Intel Corporation | Miniaturized spectometer using optical waveguide and integrated Raman system on-chip |
| GB0812681D0 (en) * | 2008-07-10 | 2008-08-20 | Sec Dep For Innovation Universities | Apparatus and methods for effecting chemical assays |
| CN101777743A (en) * | 2010-03-30 | 2010-07-14 | 湖南大学 | Intelligent robot for removing ice in high-voltage transmission line |
| CN103376169A (en) * | 2012-04-28 | 2013-10-30 | 杭州鸿雁电器有限公司 | Method for measuring temperature of LED chip and encapsulated active region with high precision and high spatial resolution |
| CN207199318U (en) * | 2017-05-31 | 2018-04-06 | 岭澳核电有限公司 | Multiple degrees of freedom is adaptively popped one's head in clamping device |
| CN111610177A (en) * | 2020-06-11 | 2020-09-01 | 北京大学 | Raman enhancement detection method and device for micro LED chip |
| CN111812127A (en) * | 2020-07-01 | 2020-10-23 | 南京大学 | Real-time microstructure visible in-situ transmission electron microscope/Raman scattering combined system and construction method thereof |
| CN112113951A (en) * | 2020-09-09 | 2020-12-22 | 中国科学院苏州生物医学工程技术研究所 | High-throughput multichannel rapid Raman detection system |
| CN212321444U (en) * | 2020-03-07 | 2021-01-08 | 浙江大学 | Detection device combining surface enhanced Raman scattering with SPR sensing |
| CN112578108A (en) * | 2020-12-11 | 2021-03-30 | 欧波丝迪生物科技(广州)有限公司 | Immune chip laser scanning system for biological health research |
| CN113645761A (en) * | 2021-08-09 | 2021-11-12 | 恩纳基智能科技无锡有限公司 | Chip mounter with calibration function |
| CN113679957A (en) * | 2021-07-27 | 2021-11-23 | 武汉博激世纪科技有限公司 | Semiconductor laser therapeutic instrument with adjustable probe |
-
2022
- 2022-03-16 CN CN202210257518.8A patent/CN114813697B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030059820A1 (en) * | 1997-11-26 | 2003-03-27 | Tuan Vo-Dinh | SERS diagnostic platforms, methods and systems microarrays, biosensors and biochips |
| US20070077595A1 (en) * | 2005-09-30 | 2007-04-05 | Intel Corporation | Miniaturized spectometer using optical waveguide and integrated Raman system on-chip |
| GB0812681D0 (en) * | 2008-07-10 | 2008-08-20 | Sec Dep For Innovation Universities | Apparatus and methods for effecting chemical assays |
| CN101777743A (en) * | 2010-03-30 | 2010-07-14 | 湖南大学 | Intelligent robot for removing ice in high-voltage transmission line |
| CN103376169A (en) * | 2012-04-28 | 2013-10-30 | 杭州鸿雁电器有限公司 | Method for measuring temperature of LED chip and encapsulated active region with high precision and high spatial resolution |
| CN207199318U (en) * | 2017-05-31 | 2018-04-06 | 岭澳核电有限公司 | Multiple degrees of freedom is adaptively popped one's head in clamping device |
| CN212321444U (en) * | 2020-03-07 | 2021-01-08 | 浙江大学 | Detection device combining surface enhanced Raman scattering with SPR sensing |
| CN111610177A (en) * | 2020-06-11 | 2020-09-01 | 北京大学 | Raman enhancement detection method and device for micro LED chip |
| CN111812127A (en) * | 2020-07-01 | 2020-10-23 | 南京大学 | Real-time microstructure visible in-situ transmission electron microscope/Raman scattering combined system and construction method thereof |
| CN112113951A (en) * | 2020-09-09 | 2020-12-22 | 中国科学院苏州生物医学工程技术研究所 | High-throughput multichannel rapid Raman detection system |
| CN112578108A (en) * | 2020-12-11 | 2021-03-30 | 欧波丝迪生物科技(广州)有限公司 | Immune chip laser scanning system for biological health research |
| CN113679957A (en) * | 2021-07-27 | 2021-11-23 | 武汉博激世纪科技有限公司 | Semiconductor laser therapeutic instrument with adjustable probe |
| CN113645761A (en) * | 2021-08-09 | 2021-11-12 | 恩纳基智能科技无锡有限公司 | Chip mounter with calibration function |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114813697B (en) | 2022-12-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104302988A (en) | Tracking-type photovoltaic generator | |
| CN114813697B (en) | High-flux multi-channel rapid Raman detection system of micro LED chip | |
| CN113253497B (en) | High-definition liquid crystal display assembling tool clamp and assembling method | |
| CN218270559U (en) | Flatness measurer for house construction | |
| CN113432087B (en) | LED road lighting monitoring system | |
| CN213550549U (en) | Novel rocker transmission mechanism for compact shelf | |
| CN115030656A (en) | Drilling device for geotechnical engineering investigation and using method thereof | |
| CN109443198B (en) | Casing inner chamber characteristic detection machine | |
| CN113080664A (en) | Architectural design removes show stand | |
| CN111392423A (en) | Glass plate blanking conveying table | |
| CN216892341U (en) | Adjustable road bed compactness detection device for highway construction | |
| CN206192359U (en) | Laser scale subassembly | |
| CN110535414A (en) | A kind of combination type solar photovoltaic panel convenient for adjusting angle | |
| CN116312309A (en) | Detection device for OLED display screen | |
| CN201173857Y (en) | Automobile front shining lamp detector elevating mechanism | |
| CN216104414U (en) | Linear pneumatic circulating assembly structure | |
| CN218599268U (en) | Tunnel top fracture safety inspection device | |
| CN209946222U (en) | PCBA board measuring device | |
| CN219573556U (en) | Mineral geological survey sampling device | |
| CN115076547B (en) | Glacier material balance full-time measurement system | |
| CN220170491U (en) | Movable test bench for laser products | |
| CN214504853U (en) | Three screen swinging devices of LED | |
| CN213126253U (en) | Production monitoring device under linear electron accelerator beam | |
| CN216613896U (en) | Integral lifting mechanism for upper frame of cleaning machine | |
| CN218524725U (en) | Automatic change mineral detector |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |