CN114813670A - Low-temperature diamond nitrogen vacancy color center optical microscope - Google Patents
Low-temperature diamond nitrogen vacancy color center optical microscope Download PDFInfo
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- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
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- G01N21/6456—Spatial resolved fluorescence measurements; Imaging
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- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
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- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
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Abstract
The invention discloses a low-temperature diamond nitrogen vacancy color center optical microscope, which aims to solve the problems that the existing diamond nitrogen vacancy color center magnetic microscope is rarely researched, can only be used for room-temperature experiments in atmospheric environment, and cannot be used for researching magnetic materials in low-temperature environment, and comprises an optical platform used as an installation substrate and a main chamber arranged on the optical platform, wherein the main chamber is provided with a cryostat used for maintaining the low temperature in the main chamber and an ion pump used for maintaining the ultrahigh vacuum environment in the main chamber, and a diamond nitrogen vacancy color center magnetic microscope scanning head used for high-resolution magnetic imaging is arranged in the main chamber; and the optical platform is provided with a light path piece which is used for enabling laser to enter the scanning head of the diamond nitrogen-vacancy color-center magnetic microscope, focusing the laser on a sample and receiving fluorescence returned from an original path. The invention is especially suitable for the research of the nano-scale magnetic material in the low-temperature environment, and has higher social use value and application prospect.
Description
Technical Field
The invention relates to the technical field of optical microscopes, in particular to a low-temperature diamond nitrogen vacancy color center optical microscope.
Background
The microscopic imaging and observation of the magnetic material are helpful for researching the microstructure and the formation mechanism of the magnetic material, and with the development of scientific research technology, the research scale of the magnetic material tends to be submicron or even nanometer. Therefore, ultra-high resolution and ultra-high sensitivity testing of magnetic materials has helped to study these nanoscale magnetic materials.
At present, traditional microscopic observation equipment for magnetic material research mainly comprises a Kerr microscope (with the resolution of about 300 nm), a Magnetic Force Microscope (MFM) (with the resolution of about 50 nm) and the like, and a diamond nitrogen vacancy color center magnetic force microscope is combined with a diamond nitrogen vacancy color center magnetic measurement technology and a scanning imaging technology, so that high-resolution magnetic imaging of about 30nm can be realized, quantitative magnetic analysis can be realized, and the magnetic microscopic observation equipment has remarkable advantages in magnetic microscopic imaging.
At present, the research on diamond nitrogen vacancy color center magnetic microscopes is few in China, room temperature experiments can be carried out only in the atmospheric environment, and the research on magnetic materials in the low-temperature environment cannot be carried out. Therefore, a low-temperature diamond nitrogen vacancy color center optical microscope is provided.
Disclosure of Invention
It is an object of the present invention to solve or at least alleviate problems in the prior art.
The invention provides a low-temperature diamond nitrogen vacancy color center optical microscope, which comprises an optical platform used as an installation substrate and a main chamber arranged on the optical platform, wherein the main chamber is provided with a cryostat used for maintaining the low temperature in the main chamber and an ion pump used for maintaining the ultrahigh vacuum environment in the main chamber, and a diamond nitrogen vacancy color center magnetic microscope scanning head used for high-resolution magnetic imaging is arranged in the main chamber;
and the optical platform is provided with a light path piece which is used for enabling laser to enter the scanning head of the diamond nitrogen-vacancy color-center magnetic microscope, focusing the laser on a sample and receiving fluorescence returned from an original path.
Optionally, one side of the main chamber is connected with a sample chamber through a transfer chamber, the sample chamber is provided with a molecular pump for maintaining a vacuum state in the sample chamber, and the transfer chamber and the sample chamber are provided with sample transfer rods for in-situ sample transfer without removing a vacuum low-temperature environment of the main chamber.
Optionally, the scanning head of the diamond nitrogen vacancy color center magnetic microscope comprises an outer frame fixed on the inner wall of the main chamber, and an atomic force microscope for scanning a sample to obtain a surface topography image of the sample, an objective lens assembly for converging excitation light and collecting fluorescence, and a microwave antenna assembly for performing microwave control on the nitrogen vacancy color center are arranged in the outer frame;
wherein, atomic force microscope includes tip subassembly and sample subassembly.
Optionally, the needle tip assembly includes a diamond needle tip detachably mounted on the needle tip holder through a needle tip holder pressing sheet, the positive and negative poles of the diamond needle tip are connected with electrodes for needle tip vibration control and detection, the needle tip holder is mounted on the output end of an X-direction piezoelectric ceramic stepping motor, the X-direction piezoelectric ceramic stepping motor is mounted on the output end of a first Y-direction piezoelectric stepping motor, and the first Y-direction piezoelectric stepping motor is fixed on the top wall of the outer frame.
Optionally, the sample assembly includes a sample holder for storing a sample, and the sample holder is mounted on an output end of the XY direction coupling piezoelectric stepping motor through a pluggable sample holder pressing sheet, and a piezoelectric scanning stage for implementing needle insertion operation and high-precision sample scanning is further mounted on an output end of the XY direction coupling piezoelectric stepping motor, and the XY direction coupling piezoelectric stepping motor is fixed on an output end of the first Z direction piezoelectric stepping motor, and the first Z direction piezoelectric stepping motor is mounted on a top wall of the outer frame through an adaptor.
Optionally, the objective lens assembly includes an objective lens, the objective lens is mounted on an output end of a second Z-direction piezoelectric stepping motor through an adapter to adjust a Z-direction position of the objective lens so that a converging laser focus of the objective lens coincides with a color center of a nitrogen vacancy in the diamond tip, and the second Z-direction piezoelectric stepping motor is fixed on a bottom wall of the outer frame.
Optionally, the microwave antenna assembly includes a microwave antenna, the microwave antenna is mounted on an output end of the second Y-direction piezoelectric stepping motor through an adaptor, the second Y-direction piezoelectric stepping motor is mounted on an output end of the Z-direction piezoelectric stepping motor, and the Z-direction piezoelectric stepping motor is mounted on a bottom wall of the outer frame.
Optionally, the microwave antenna assembly further comprises a microwave source for generating a microwave signal and an amplifier for microwave signal amplification.
Optionally, the microwave antenna is at a distance of 90-110um from the diamond tip.
The invention mainly has the following beneficial effects:
1. the vacuum degree of the invention is superior to 5x10 by arranging the cryostat and the ion pump on the main chamber -8 The working temperature in the main chamber is 10K-300K under the ultra-high vacuum low-temperature working environment with the temperature of about 10K under Pa, so that the magnetic property of the sample under the low-temperature environment can be tested, the in-situ replacement of the diamond needle point and the sample can be realized, and the experimental efficiency is effectively improved.
2. The invention realizes quantitative nondestructive imaging of magnetic properties by arranging the scanning head of the diamond nitrogen vacancy color center magnetic microscope, has high spatial resolution of about 30nm and ultrahigh detection sensitivity of single spin, realizes high-resolution magnetic imaging of about 30nm, provides technical support for the research of nano-scale magnetic materials in low-temperature environment, and has wide application prospect in the fields of magnetic domain imaging, two-dimensional materials, topological magnetic structures and the like.
Drawings
The foregoing features, technical features, advantages and implementations of a low temperature diamond nitrogen vacancy color center optical microscope will be further described in the following detailed description of preferred embodiments in a clearly understood manner with reference to the accompanying drawings.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural view of a diamond nitrogen vacancy color center magnetic force microscope scanning head in the invention;
FIG. 3 is a schematic view of a tip assembly according to the present invention;
FIG. 4 is a schematic diagram of a sample assembly according to the present invention;
FIG. 5 is a schematic view of an objective lens assembly according to the present invention;
FIG. 6 is a schematic diagram of a microwave antenna assembly according to the present invention;
FIG. 7 is a flow chart of the imaging process of the low-temperature diamond nitrogen vacancy color center optical microscope of the invention.
In the figure: a cryostat 10, an ion pump 20, a main chamber 30, a transfer chamber 301, a diamond nitrogen vacancy position color center magnetic force microscope scanning head 40, an outer frame 41, a needle point component 42, an X-direction piezoelectric stepping motor 421, a first Y-direction piezoelectric stepping motor 422, a needle point supporting sheet 423, an electrode 424, a needle point support 425, a diamond needle point 426, a diamond nitrogen vacancy position magnetic force microscope scanning head, a diamond nitrogen vacancy position color center magnetic force microscope scanning head, a needle point component, a X-direction piezoelectric stepping motor 421, a first Y-direction piezoelectric stepping motor 422, a needle point supporting sheet 423, an electrode 424, a needle point support 425, a diamond needle point component, a diamond nitrogen vacancy position magnetic force microscope scanning head, a needle point component, a diamond nitrogen vacancy position magnetic force microscope scanning head, a probe head, a needle point component, a probe head, a probe,
A sample assembly 43, an adapter 431, a first Z-direction piezoelectric stepping motor 432, an XY-direction coupling piezoelectric stepping motor 433, a piezoelectric scanning table 434, a sample holder 435, a sample holder pressing sheet 436,
An objective lens assembly 44, an objective lens 441, an adapter 442, a second Z-direction piezoelectric stepping motor 443,
A microwave antenna assembly 45, a microwave antenna 451, a second Y-direction piezoelectric stepping motor 452, an adaptor 453, a Z-direction piezoelectric stepping motor 454, a transfer rod 50, an optical path component 60, a sample chamber 70, a molecular pump 80, and an optical platform 90;
in fig. 7: the laser comprises a laser 001, a coupler 002, a single-mode optical fiber 003, a collimator 004, a long-wave-pass dichroic mirror 005, a scanning galvanometer 006, a first lens 007, a second lens 008, an objective lens 009, a microwave antenna 010, a diamond probe 011, a sample 012, an amplifier 013, a microwave source 014, a displacement table 015, a third lens 016, a long-wave-pass filter 017, a multimode optical fiber 018, a photon counter 019, a beam splitter 020, an infinity lens barrel 021, a CCD 022, a flexible optical fiber light guide 023, an optical fiber illuminator 024 and a three-dimensional displacement table 025.
Detailed Description
The invention will be further illustrated with reference to the following figures 1 to 7 and examples:
example 1
The invention provides a low-temperature diamond nitrogen vacancy color center optical microscope, which comprises an optical platform 90 as an installation base body and a main chamber 30 arranged on the optical platform 90, wherein the main chamber 30 is provided with a low-temperature thermostat 10 for maintaining the low temperature in the main chamber 30 and an ion pump 20 for maintaining the ultrahigh vacuum environment in the main chamber 30;
the main chamber 30 is provided with a diamond nitrogen vacancy color center magnetic microscope scanning head 40 for high resolution magnetic imaging, and the optical platform 90 is provided with a light path element 60 for emitting laser to the diamond nitrogen vacancy color center magnetic microscope scanning head 40, focusing on a sample and receiving fluorescence returned from the original path.
The scanning head 40 of the diamond nitrogen vacancy color center magnetic force microscope comprises an outer frame 41 fixed on the inner wall of the main chamber 30, and an atomic force microscope used for scanning a sample to obtain a sample surface appearance image, an objective lens assembly 44 used for converging exciting light and collecting fluorescence and a microwave antenna assembly 45 used for performing microwave regulation and control on a nitrogen vacancy color center are arranged in the outer frame 41;
wherein, the atomic force microscope comprises a needle point component 42 and a sample component 43; in this embodiment, the scanning head 40 of the diamond nitrogen vacancy color center magnetic microscope is made of non-magnetic materials such as pure titanium, and is suitable for experiments in a strong magnetic vacuum low-temperature environment.
In this embodiment, the light path element 60 emits a collimated gaussian beam and enters the objective lens assembly 44 of the diamond nitrogen vacancy color center magnetic microscope scanning head 40, the objective lens assembly 44 converges the excitation light at the diamond tip 426 of the tip element 42, the nitrogen vacancy color center in the diamond tip 426 generates a fluorescence primary path which returns through the objective lens assembly 44, the objective lens assembly 44 collects the fluorescence and the emitted fluorescence primary path returns to the light path element 60, and the fluorescence is received and detected by a photon counter built in the light path element 60.
In this embodiment, as shown in fig. 3, the tip assembly 42 includes a diamond tip 426 detachably mounted on a tip holder 425 through a tip holder pressing piece 423, an extra light path is not needed to detect the amplitude of the tip, the collection efficiency of color center fluorescence of the special optical coupling structure is high, the positive and negative poles of the diamond tip 426 are connected with electrodes 424 for tip vibration control and detection, the tip holder 425 is mounted on the output end of an X-direction piezoelectric ceramic stepping motor 421, the X-direction piezoelectric ceramic stepping motor 421 is mounted on the output end of a first Y-direction piezoelectric stepping motor 422, and the first Y-direction piezoelectric stepping motor 422 is fixed on the top wall of an outer frame 41, so as to effectively ensure the adjustment of the diamond tip 426 in the X-direction and the Y-direction, and further adjust the position of the diamond tip 426 to move the nitrogen-vacancy color center to the focus of an objective lens 441.
In this embodiment, as shown in fig. 4, the sample assembly 43 includes a sample holder 435 for storing a sample, and the sample holder 435 is mounted on an output end of an XY direction coupling piezoelectric stepping motor 433 through a pluggable sample holder pressing piece 436, and a piezoelectric scanning stage 434 for implementing needle insertion operation and high-precision sample scanning is further mounted on the output end of the XY direction coupling piezoelectric stepping motor 433, and the XY direction coupling piezoelectric stepping motor 433 is fixed on an output end of a first Z direction piezoelectric stepping motor 432, and the first Z direction piezoelectric stepping motor 432 is mounted on a top wall of the outer frame 41 through an adaptor 431, and the first Z direction piezoelectric stepping motor 432 and the XY direction coupling piezoelectric stepping motor 433 can adjust a position of the sample holder 435 in a three-dimensional direction, and further adjust a position of the sample to be detected to move to the diamond probe tip 426 for testing.
In this embodiment, as shown in fig. 5, the objective lens assembly 44 includes an objective lens 441, the objective lens 441 is mounted on an output end of a second Z-direction piezoelectric stepping motor 443 through an adaptor 442 to adjust a Z-direction position of the objective lens 441 so that a converging laser focus of the objective lens 441 coincides with a nitrogen vacancy color center in the diamond tip 426, and the second Z-direction piezoelectric stepping motor 443 is fixed on a bottom wall of the outer frame 41.
In this embodiment, as shown in fig. 6, the microwave antenna assembly 45 includes a microwave antenna 451, a microwave source 014 for generating a microwave signal, and an amplifier 013 for amplifying the microwave signal, and the microwave antenna 451 is mounted on an output end of the second Y-direction piezoelectric stepping motor 452 through an adaptor 453, the second Y-direction piezoelectric stepping motor 452 is mounted on an output end of the Z-direction piezoelectric stepping motor 454, the Z-direction piezoelectric stepping motor 454 is mounted on a bottom wall of the outer frame 41, and the second Y-direction piezoelectric stepping motor 452 and the Z-direction piezoelectric stepping motor 454 can two-dimensionally adjust a position of the microwave antenna 451 in the Y direction and the Z direction, so that a distance between the microwave antenna 451 and the diamond tip 426 is 90-110 um;
in this embodiment, the microwave generated by the microwave source is amplified and emitted from the microwave antenna 451, the microwave antenna 451 is located near the diamond tip 426, the spin state of the nitrogen vacancy color center can be operated and detected by laser and microwave, an external magnetic field is usually measured by an Optical Detection Magnetic Resonance (ODMR) method, and a magnetic field distribution imaging diagram of the sample surface can be obtained after the magnetic field on the sample surface is continuously detected by a scanning probe.
In this embodiment, the vacuum degree superior to 5 × 10 can be achieved by arranging the cryostat 10 and the ion pump 20 on the main chamber 30 -8 The working temperature in the main chamber 30 is 10K-300K under the ultrahigh vacuum low-temperature working environment with the temperature of about 10K under Pa, so that the magnetic property of the sample under the low-temperature environment can be tested; meanwhile, the arrangement of the diamond nitrogen-vacancy color-center magnetic microscope scanning head 40 realizes quantitative nondestructive imaging of magnetic properties, has high spatial resolution of about 30nm and ultrahigh detection sensitivity of single spin, realizes high-resolution magnetic imaging of about 30nm, provides technical support for research of nano-scale magnetic materials in a low-temperature environment, and has wide application prospects in the fields of magnetic domain imaging, two-dimensional materials, topological magnetic structures and the like.
Example 2
The present embodiment is different from embodiment 1 in that, as shown in fig. 6, a sample introduction chamber 70 is connected to one side of a main chamber 30 through a transfer chamber 301, a molecular pump 80 for maintaining a vacuum state in the sample introduction chamber 70 is installed on the sample introduction chamber 70, a sample transfer rod 50 for performing in-situ sample transfer without removing a low temperature vacuum environment in the main chamber 30 is installed on the transfer chamber 301 and the sample introduction chamber 70, a diamond tip 426 detachably installed on a tip holder 425 through a tip holder pressing piece 423 and a sample holder 435 installed on an output end of an XY direction coupling piezoelectric stepping motor 433 through a pluggable sample holder pressing piece 436 are fitted, and then in-situ sample exchange and the diamond tip 426 in the sample holder 435 can be realized through manipulation of the sample transfer rod 50.
Other undescribed structures refer to example 1.
Referring to fig. 7, 532nm laser emitted from a laser 001 enters a single-mode optical fiber 003 through a coupler 002 and is emitted from a collimator 004 to be a collimated gaussian beam, the collimated gaussian beam is reflected by a long-wavelength dichroic mirror 005, enters a scanning galvanometer 006, enters an entrance pupil of an objective 009 through a 4F optical system and is focused at the needle tip of the diamond probe 011, a primary fluorescence path generated by the nitrogen vacancy color center in the diamond probe 011 returns to pass through the objective 009, the 4F optical system, the scanning galvanometer 006 and a long-wavelength dichroic mirror 005, is focused by a third lens 016, passes through a long-wavelength filter 017, enters a multimode optical fiber 018, and is finally received and detected by a photon counter 019, wherein the angle of the third lens 016 can be adjusted through a displacement stage 015 to focus fluorescence;
in addition, a 4F optical system for performing scanning and positioning of the color center of the nitrogen vacancy together with the scanning galvanometer 006 is disposed in the optical path member 60, and in fig. 7, the first lens 007 and the second lens 008 constitute the 4F optical system in the present embodiment.
And early debugging stage: a beam splitter 020 is arranged between a 4F optical system and an objective lens 009, white light emitted by an optical fiber illuminator 024 passes through a flexible optical fiber light guide 023, an infinite lens barrel 021 and the beam splitter 020 to be reflected into the objective lens 009 to be focused on a needle point of a diamond probe 011 and a sample 012, reflected light returns to enter a CCD 022 for imaging, alignment of a laser focal point and a nitrogen vacancy color center and positioning of the sample 012 can be carried out through the debugging, the infinite lens barrel 021 and the CCD 022 can realize position adjustment through a three-dimensional displacement table 025, the white light is guaranteed to be focused on the needle point of the diamond probe 011 and the sample 012, and the reflected light enters the CCD 022 for imaging;
microwave generated by a microwave source 014 is transmitted by a microwave antenna 010 after passing through an amplifier 013, the microwave antenna 010 is positioned near a diamond probe 011, the nitrogen vacancy color center spinning state in the diamond probe 011 can be operated and detected through laser and microwave, and an external magnetic field is measured by adopting an Optical Detection Magnetic Resonance (ODMR) method generally; after the scanning probe continuously detects the magnetic field on the surface of the sample 012, an image of the magnetic field distribution on the surface of the sample 012 can be obtained, in which the objective lens 009, the microwave antenna 010, the diamond probe 011 and the sample 012 are all located in the vacuum main chamber 30.
According to the low-temperature diamond nitrogen vacancy color center optical microscope of the embodiment of the invention, the vacuum degree superior to 5x10 can be realized through the arrangement of the cryostat 10 and the ion pump 20 on the main chamber 30 -8 The working temperature in the main chamber 30 is 10K-300K under the ultra-high vacuum low-temperature working environment with the temperature of about 10K and Pa, the magnetic property of a sample in the low-temperature environment can be tested, the in-situ replacement of the diamond needle point and the sample can be realized, and the experimental efficiency is effectively improved;
meanwhile, the arrangement of the diamond nitrogen-vacancy color-center magnetic microscope scanning head 40 realizes quantitative nondestructive imaging of magnetic properties, has high spatial resolution of about 30nm and ultrahigh detection sensitivity of single spin, realizes high-resolution magnetic imaging of about 30nm, provides technical support for research of nano-scale magnetic materials in a low-temperature environment, and has wide application prospects in the fields of magnetic domain imaging, two-dimensional materials, topological magnetic structures and the like.
In the description of the present invention, it should be noted that the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present invention, which are used for illustrating the technical solutions of the present invention and not for limiting the same, and the protection scope of the present invention is not limited thereto, although the present invention is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the embodiments of the present invention, and they should be construed as being included therein. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (9)
1. A low-temperature diamond nitrogen vacancy color center optical microscope comprises an optical platform (90) used as an installation base body and a main chamber (30) arranged on the optical platform (90), and is characterized in that a cryostat (10) used for maintaining the low temperature in the main chamber (30) and an ion pump (20) used for maintaining the ultrahigh vacuum environment in the main chamber (30) are arranged on the main chamber (30), and a diamond nitrogen vacancy color center magnetic microscope scanning head (40) used for high-resolution magnetic imaging is arranged in the main chamber (30);
and the optical platform (90) is provided with an optical path piece (60) which is used for enabling laser to enter the diamond nitrogen vacancy color center magnetic force microscope scanning head (40), focus on the sample and receive the original path returned fluorescence.
2. The low temperature diamond nitrogen vacancy color center optical microscope of claim 1, wherein: one side of main cavity room (30) has into appearance room (70) through transfer chamber (301) through-going connection, installs on appearance room (70) and is used for maintaining the molecular pump (80) of the interior vacuum state of appearance room (70), is equipped with on transfer chamber (301) and appearance room (70) and is used for not removing the sample transfer pole (50) that main cavity room (30) vacuum low temperature environment carried out the normal position and trades the sample.
3. The low temperature diamond nitrogen vacancy color center optical microscope of claim 1, wherein: the diamond nitrogen vacancy color center magnetic force microscope scanning head (40) comprises an outer frame (41) fixed on the inner wall of a main chamber (30), wherein an atomic force microscope used for scanning a sample to obtain a sample surface appearance image, an objective lens assembly (44) used for converging exciting light and collecting fluorescence and a microwave antenna assembly (45) used for performing microwave regulation and control on a nitrogen vacancy color center are arranged in the outer frame (41);
wherein, atomic force microscope includes tip subassembly (42) and sample subassembly (43).
4. The low temperature diamond nitrogen vacancy color center optical microscope of claim 3, wherein: the needle point component (42) comprises a diamond needle point (426) detachably mounted on a needle point support (425) through a needle point support pressing sheet (423), the positive electrode and the negative electrode of the diamond needle point (426) are connected with electrodes (424) used for needle point vibration control and detection, the needle point support (425) is mounted on the output end of an X-direction piezoelectric ceramic stepping motor (421), the X-direction piezoelectric ceramic stepping motor (421) is mounted on the output end of a first Y-direction piezoelectric stepping motor (422), and the first Y-direction piezoelectric stepping motor (422) is fixed on the top wall of an outer frame (41).
5. The low temperature diamond nitrogen vacancy color center optical microscope of claim 3, wherein: the sample assembly (43) comprises a sample frame (435) for storing a sample, the sample frame (435) is installed at the output end of an XY direction coupling piezoelectric stepping motor (433) through a pluggable sample frame pressing sheet (436), a piezoelectric scanning table (434) for realizing needle inserting operation and high-precision sample scanning is further installed at the output end of the XY direction coupling piezoelectric stepping motor (433), the XY direction coupling piezoelectric stepping motor (433) is fixed at the output end of a first Z direction piezoelectric stepping motor (432), and the first Z direction piezoelectric stepping motor (432) is installed on the top wall of the outer frame (41) through a connector (431).
6. The low temperature diamond nitrogen vacancy color center optical microscope of claim 4, wherein: the objective lens assembly (44) comprises an objective lens (441), the objective lens (441) is installed on the output end of a second Z-direction piezoelectric stepping motor (443) through an adapter (442) so as to adjust the Z-direction position of the objective lens (441) to enable the focal point of the converged laser of the objective lens (441) to coincide with the color center of the nitrogen vacancy in the diamond needle point (426), and the second Z-direction piezoelectric stepping motor (443) is fixed on the bottom wall of the outer frame (41).
7. The low temperature diamond nitrogen vacancy color center optical microscope of claim 5, wherein: the microwave antenna assembly (45) comprises a microwave antenna (451), the microwave antenna (451) is installed on the output end of a second Y-direction piezoelectric stepping motor (452) through an adapter (453), the second Y-direction piezoelectric stepping motor (452) is installed on the output end of a Z-direction piezoelectric stepping motor (454), and the Z-direction piezoelectric stepping motor (454) is installed on the bottom wall of the outer frame (41).
8. The low temperature diamond nitrogen vacancy color center optical microscope of claim 7, wherein: the microwave antenna assembly (45) further comprises a microwave source (014) for generating a microwave signal and an amplifier (013) for amplifying the microwave signal.
9. The low temperature diamond nitrogen vacancy color center optical microscope of claim 7, wherein: the distance between the microwave antenna (451) and the diamond tip (426) is 90-110 um.
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