CN114812470A - Measurement calibration method for film on-line thickness gauge - Google Patents
Measurement calibration method for film on-line thickness gauge Download PDFInfo
- Publication number
- CN114812470A CN114812470A CN202210342756.9A CN202210342756A CN114812470A CN 114812470 A CN114812470 A CN 114812470A CN 202210342756 A CN202210342756 A CN 202210342756A CN 114812470 A CN114812470 A CN 114812470A
- Authority
- CN
- China
- Prior art keywords
- film
- measurement
- thickness
- scanning speed
- thickness gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 title claims abstract description 84
- 238000000034 method Methods 0.000 title claims abstract description 40
- 238000000691 measurement method Methods 0.000 claims abstract description 9
- 238000005303 weighing Methods 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 238000012360 testing method Methods 0.000 claims description 7
- 238000012795 verification Methods 0.000 claims description 2
- 238000011160 research Methods 0.000 claims 2
- 229920002799 BoPET Polymers 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 6
- 238000004364 calculation method Methods 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000013178 mathematical model Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-NJFSPNSNSA-N Strontium-90 Chemical compound [90Sr] CIOAGBVUUVVLOB-NJFSPNSNSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000003490 calendering Methods 0.000 description 1
- TVFDJXOCXUVLDH-RNFDNDRNSA-N cesium-137 Chemical compound [137Cs] TVFDJXOCXUVLDH-RNFDNDRNSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- DNNSSWSSYDEUBZ-OUBTZVSYSA-N krypton-85 Chemical compound [85Kr] DNNSSWSSYDEUBZ-OUBTZVSYSA-N 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- VQMWBBYLQSCNPO-NJFSPNSNSA-N promethium-147 Chemical compound [147Pm] VQMWBBYLQSCNPO-NJFSPNSNSA-N 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention relates to a measurement and calibration method of a film on-line thickness gauge, which comprises the steps of detecting the measurement and calibration method and the quantity value tracing of the film on-line thickness gauge; the invention solves the measurement calibration and tracing of the film on-line thickness gauge, and judges whether the film on-line thickness gauge has perfect function and accurate measurement by measuring and detecting the appearance and the working state of the film on-line thickness gauge, the thickness measurement indicating value error, the thickness measurement repeatability, the scanning speed indicating value error, the scanning speed repeatability and the like. The quantity tracing adopts a direct measurement method and an indirect weighing method, and the quantity transmission of the equipment is ensured to be accurate and reliable.
Description
Technical Field
The invention relates to a measurement calibration method, in particular to a measurement calibration method of a film on-line thickness gauge.
Background
The film on-line thickness gauge is an application instrument which combines photoelectric detection, a computer and an industrial control technology, realizes on-line thickness measurement, is widely used in a novel film material film production line, can measure the thickness of various film materials in real time, has the characteristics of non-contact measurement, no damage to the surface of an object, no environmental pollution, strong anti-interference capability, high precision, full data acquisition and processing functions and the like, and is important equipment for controlling the product quality of the novel film material industrial production line. At present, the film on-line thickness measuring instrument mainly comprises a laser on-line thickness measuring instrument, a coating on-line thickness measuring instrument, a ray on-line thickness measuring instrument, an infrared on-line thickness measuring instrument and the like.
At present, the film on-line thickness gauge is generally installed on a bulky film production line, the position of a sensor is hidden and is not easy to disassemble, and part of the film on-line thickness gauge has ray radiation, so that direct detection is complicated and dangerous, source tracing cannot be carried out, and a related metering calibration method is not provided.
In the high-speed vibration environment of a production line, a sensor and a measuring circuit device of the film on-line thickness measuring instrument are susceptible to the influence of the environment along with the time, and particularly, after radioactive sources such as promethium-147, krypton-85, strontium-90, cesium-137 and the like with beta rays are attenuated, the requirements on the thickness or the scanning speed of a product cannot be met, and finally the quality of the product is unstable.
In view of the important function of the film on-line thickness gauge on a film material production line, the method for measuring and calibrating the film on-line thickness gauge is necessary and has important practical significance in order to avoid the occurrence of defective film events as much as possible, ensure the accuracy and reliability of the value data of the film on-line thickness gauge and the consistency of the value tracing.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a measurement and calibration method for a film online thickness meter, so as to solve the detection of measurement characteristics such as the appearance and the working state of the film online thickness meter, the indication error of thickness measurement, the repeatability of thickness measurement, the indication error of scanning speed, the repeatability of scanning speed and the like, and solve the measurement and calibration and standard tracing of the film online thickness meter.
In order to achieve the purpose, the technical solution of the invention is as follows:
a measurement and calibration method for a film on-line thickness gauge comprises the following steps:
(1) standard films were selected and confirmed: according to the maximum measurement thickness of the film in the online thickness measurement specification, selecting PET (polyethylene terephthalate) film with the minimum thickness, half of the maximum thickness and the maximum thickness as standard films, confirming the thickness of the film through a direct measurement method and an indirect measurement method, and confirming that the value tracing is accurate;
(2) judging the appearance and the working state: checking whether the appearance of the film on-line thickness gauge is intact, whether the production line runs normally and whether an output display device is provided;
(3) thickness measurement indication error: three standard thickness films of minimum thickness, half of maximum thickness and maximum thickness which can be detected by the device are placed on a feeding roller, parameters of an online thickness gauge are set, continuous measurement is carried out for at least 6 times, the displayed average value is calculated, and the indicating value error is calculated according to the following formula,
in the formula:
σ: absolute error in micrometers (μm);
L o : standard film thickness values in microns (μm);
(4) repeatability of thickness measurement: three standard thickness films of minimum thickness, half of maximum thickness and maximum thickness which can be detected by the equipment are placed on a feeding roller, parameters of an online thickness gauge are set, continuous measurement is carried out for at least 6 times on the same layer, and the repeatability is calculated according to the following formula;
in the formula:
s L : repeatability in microns (μm);
L i : measurement columns in micrometers (μm);
(5) confirming that the scanning speed digital tachometer is accurate in value:
confirming that the digital tachometer passes the upper unit quantity value tracing and is qualified in verification;
(6) scanning speed indication error:
when the scanning speed of the film on-line thickness gauge is measured, the minimum scanning speed, half of the maximum scanning speed and the maximum scanning speed of the device are required to be detected, the same speed is measured for at least 6 times, the indicating value error is calculated according to the following formula,
in the formula:
δ νi : scanning speed indication error (%) at the ith measurement point;
V i : an indication of the scanning speed at the ith measurement point, in units of (m/s);
n i : measuring by a non-contact tachometer at the ith measuring point to obtain the rotating speed, wherein the unit is (r/min);
(7) scanning speed repeatability:
continuously measuring the same point for at least 6 times according to the method, calculating the scanning speed, and calculating the obtained measurement column according to the following formula:
in the formula:
s V : repeatability, unit is m/s;
V i : the scanning of each time displays the value, and the unit is m/s;
Compared with the prior art, the invention has the following beneficial effects:
the invention solves the problems that the film on-line thickness gauge cannot trace the source and cannot be calibrated, the value is transmitted to the standard film by a superior unit direct measurement method and an indirect weighing method, and the superior unit rotating speed is transmitted to the working tachometer by a direct comparison method and a direct measurement method. The film on-line thickness meter is subjected to measurement characteristics such as appearance, working state, thickness measurement indication error, thickness measurement repeatability, scanning speed indication error, scanning speed repeatability and the like, and measurement calibration and standard traceability of the film on-line thickness meter are achieved. And the measurement guarantee is provided for the measurement development of the film industry.
Drawings
FIG. 1 is a flow chart of the measurement and calibration of the on-line thickness gauge of the present invention.
Detailed Description
To further illustrate the technical means and effects of the present invention adopted to achieve the predetermined objects, the following detailed description of the embodiments, structures, features and effects according to the present invention will be made with reference to the accompanying drawings and preferred embodiments.
As shown in FIG. 1, the measurement and calibration method of the film on-line thickness gauge of the invention comprises the following steps:
the first step is as follows: standard film tracing
1. By direct measurement
(1) The environmental requirements are as follows:
measuring the film sample under the same temperature, humidity and cleanliness conditions as those of the film on-line thickness gauge; the influence of dust, vibration, noise, corrosive gas and a strong magnetic field which influence the measurement is avoided; the power supply for the inductance micrometer should avoid voltage jump.
(2) Preparation work:
before self-calibration, a 0.01-micrometer gear of the inductance micrometer is selected, the isothermal balance time of the inductance micrometer and a calibration tool is guaranteed to be not less than 4h, the inductance micrometer is electrified and preheated for more than 30min, and when a lateral measuring head is used for calibration, the axis of a measuring rod of the inductance micrometer is perpendicular to the vertical direction of a working surface of a rack.
(3) The acquisition requirements of the standard film sample are as follows:
and selecting the PET material film with the minimum thickness, half of the maximum thickness and the maximum thickness according to the maximum thickness of the film in the online thickness measurement specification. The test piece was cut with a blade across the entire width in the transverse direction at a distance of about 1m from the longitudinal end of the test piece, and was 100mm wide. The sample should be smooth without wrinkles and other defects. The samples were measured in single or multiple layers, the number of layers measured being required as shown in Table 1:
table 1 measurement layer number requirement table
| Nominal thickness/mum | Number of sample layers/layer |
| ≤16 | 10 |
| 17～25 | 5 |
| ＞25 | 1 |
The position point of the thickness to be measured is determined by dividing the length of the sample equally, and the method is as follows:
a) measuring 10 points when the length of the sample is less than or equal to 300 mm;
b) measuring 20 points when the length of the sample is between 300mm and 1500 mm;
c) the length of the sample is more than or equal to 1500mm, and at least 30 points are measured.
For uncut edge samples, the measurement should start 50mm from the edge.
(4) Calculation method of standard film:
directly measuring by using an inductance micrometer, and calculating the average thickness indicating value error according to the formula (1) after obtaining the measured value:
in the formula:
W a : relative indication error of average thickness,%;
δ 1 : average thickness in microns (μm);
δ 0 : nominal thickness in microns (μm).
The thickness indication error is calculated according to the formula (2):
in the formula:
W u : maximum (minimum) thickness error,%;
δ 2 : maximum (minimum) thickness in micrometers (μm);
δ 0 : nominal thickness in microns (μm).
2. An indirect weighing method is adopted:
(1) standard film sampling selection:
and selecting the PET material film with the minimum thickness, half of the maximum thickness and the maximum thickness according to the maximum thickness of the film in the online thickness measurement specification. A web of film or sheet is unwound into a stack as the material to be cut. Before measuring the width, the material and the production environment are ensured, and the non-coiled material sample is adjusted in a state of 30 min.
The material is placed on a plane, the material is supported and placed on the material to form a right angle with the longitudinal direction of the material, zero scales on the ruler are aligned to the left longitudinal side of the material, the right side of the measured material is located at the exact position of the ruler and is accurate to 1mm, the measured material is cut out from two samples at intervals which are about equal to each other in the width direction, and the distance between the two samples in the longitudinal direction is 1 m.
The minimum number of samples cut from a film or sheet will depend on the width of the sample: cutting 3 blocks when the width is less than or equal to 1000 mm; when the width is larger than 1000mm and less than or equal to 1500mm, cutting 5 blocks; cutting 10 blocks when the width is larger than 1500 mm; for a film of very thin thickness, two samples adjacent in the extrusion/calendering direction were tested as one sample when its 100cm2 ± 0.5cm2 mass was less than 1 g; the area of the sample was measured and recorded.
(2) Calculation of net weight
The sample roll was centered on the balance pan to ensure it was not in contact with other objects and the net weight of the sample was weighed.
The average value of the samples was calculated in kilograms according to equation (3).
In the formula:
n: number of measurements (times);
m i : measuring the mass of the sample in kilograms (kg);
(3) Density calculating method
In order to ensure the accuracy of the test result, the prepared alcohol is used for cleaning the sample, and the condition that the surface of the sample put into water does not generate bubbles is ensured. The sample is placed in the center of a hanging fence inside the electronic densitometer, and the hanging fence is completely submerged in the water of the electronic densitometer and is not in contact with the water tank. The electronic densitometer was operated to record the density value of the sample at that time.
(4) Thickness indicating error calculation
Calculation of average weighed thickness: average weighed thickness h of a monolithic sample s Calculated according to equation (4) in microns.
In the formula: a. the s : mass of the sample per unit area in grams per 100g/cm 2;
ρ: the density of the sample is in g/cm 3.
If two samples are superposed, the sample is weighed to a thickness h s And (4) calculating according to the formula (5), wherein the unit is micrometer, and the like.
After the average measurement is obtained, the thickness index error is calculated by substituting equation (6):
in the formula:
W a : mean thickness error,%;
δ 1 : the device displays thickness in microns (μm);
δ 0 : the actual average thickness is in microns (μm).
According to different quality of the sample, the thickness indication error meets the requirements of the following table 2:
TABLE 2 thickness reading error
The second step: the method for judging the appearance and the working state of the film on-line thickness gauge comprises the following steps:
after the standard film is traced, measured and confirmed through the two modes, the standard film is placed on a raw material roller of a production line. And checking whether the appearance of the film on-line thickness gauge is intact, whether the production line runs normally or not, and whether an output display device is provided or not, and if the production line runs normally, preparing to carry out next measurement and calibration.
The third step: thickness measurement indication error:
three standard thicknesses of the minimum thickness, half of the maximum thickness and the maximum thickness which can be detected by the equipment are placed on a feeding roller, parameters of an online thickness gauge are set, continuous measurement is carried out for at least 6 times, and the displayed average value is calculated to calculate the indicating value error according to the following formula 7.
In the formula:
σ: absolute error in micrometers (μm);
L o : standard film thickness values in microns (μm).
The fourth step: repeatability of thickness measurement:
three standard thicknesses of the minimum thickness, half of the maximum thickness and the maximum thickness which can be detected by the equipment are placed on a feeding roller, parameters of an online thickness gauge are set, continuous measurement is carried out for at least 6 times on the same layer, and the repeatability is calculated according to the following formula 8.
In the formula:
s L : repeatability in microns (μm);
L i : measurement columns in micrometers (μm);
The fifth step: measuring scanning speed of film on-line thickness meter
The apparatus is required to detect the minimum scanning speed, half of the maximum scanning speed and the maximum scanning speed, the same speed is measured at least 6 times, and the indicating error is calculated according to the following equation 9.
In the formula:
δ νi : scanning speed indication error (%) at the ith measurement point;
V i : an indication of the scanning speed at the ith measurement point, in units of (m/s);
n i : measuring by a non-contact tachometer at the ith measuring point to obtain the rotating speed, wherein the unit is (r/min);
And a sixth step: scanning speed repeatability:
at the same point, at least 6 consecutive measurements are taken, and the resulting measurement column is calculated as (10):
in the formula:
s V : repeatability, unit is m/s;
V i : the scanning of each time displays the value, and the unit is m/s;
The seventh step: evaluation of measurement uncertainty:
1 overview
1.1 measurement according to: film on-line thickness gauge self-calibration protocol (taking the measurement method as an example, the weighing method refers to this method for evaluation).
1.2 environmental conditions: and (3) measuring the film sample under the same temperature, humidity and cleanliness conditions as those of the film on-line thickness gauge, and standing the measuring standard device in the environment for more than 2 h.
1.3 main measurement standards: a digital display type inductance micrometer with resolution (division value) of 0.01 μm; the measuring range (0-500) mm, the index value 1 mm.
1.4 measured object: film on-line measuring instrument.
1.5 measurement method
And taking off the film material on the line according to the requirements of the specification environment, and cutting the film material after measuring by using a straight steel ruler in a mode required in the specification. And measuring the thickness of the cut sample by using a digital display type inductance micrometer, and calculating indicating value error, plane non-parallelism and repeatability.
2 establishing a mathematical model
2.1 mathematical model
In the formula:
Δ P: mean thickness reading error in microns (μm);
L i : the on-line thickness gauge shows the value in micrometers (mum);
3. Standard uncertainty assessment of input quantities
3.1 Standard uncertainty of input u (P) Quilt ) Is mainly composed ofThe source inductance micrometer measures the indication value and the zero point error.
3.1.1 input quantity P Quilt Standard uncertainty u (P) of Quilt ) Evaluation of (2)
Input quantity P Quilt The standard uncertainty of (2) is mainly the measurement repeatability of the inductance micrometer, and a measurement column can be obtained by measuring the repeatability condition and evaluated according to the A-type method. The measurement of the film on-line thickness meter is carried out for 10 times of repeated measurement, and the result is as follows:
TABLE 3 film on-line pachymeter measuring 10 times measurement value
| Number of readings | 1 | 2 | 3 | 4 | 5 |
| Measured value (μm) | 19.7 | 19.9 | 19.8 | 20.1 | 19.9 |
| Number of readings | 6 | 7 | 8 | 9 | 10 |
| Measured value (μm) | 19.9 | 20.1 | 19.9 | 20.1 | 20.1 |
Having an average value of
The single value experiment standard deviation sigma calculated by Bessel formula includes:
in order to show more representativeness and credibility, samples of the same product at different collection positions are randomly selected to continuously carry out 2 groups of measurements, each group is measured for 10 times under the condition of repeatability, 10 groups of measurement columns are obtained in total, each group of measurement columns respectively obtain the experimental standard deviation of single measurement according to the calculation, and as shown in the table II, the following conclusion is obtained:
pooled sample standard deviation
In the actual measurement situation, the input quantity P is measured Quilt The measurements were performed 2 times under repetitive conditions, and the arithmetic mean of the 2 measurements was taken as the result of each measurement. The standard uncertainty of the result is obtained:
3.1.2 input quantity p Quilt 1 Standard uncertainty u (p) of Quilt 1 ) Evaluation of (2)
Under the measuring condition, the difference between the maximum value and the minimum value of the position of the zero scale mark of the inductance micrometer is 0.4 μm, the half width is 0.2 μm, and the maximum value and the minimum value are supposed to be uniformly distributed in the interval range and contain factors
Assessed according to class B uncertainty.
Then
3.1.3 Standard uncertainty of input u (p) Quilt 1 ) Due to the input quantity u (p) Quilt 1 ) Are independent of each other, and are therefore independent of each other
3.2 Standard uncertainty u (P-Scale) assessment of input quantities
The half-width bits a of the maximum allowable error of the inductance micrometer determined according to the technical index are uniformly distributed in the interval and comprise a factor of
Assessed according to class B uncertainty.
α＝0.25×40μm/100＝0.1μm
4. Standard uncertainty summary table
| Component of standard uncertainty | Source of uncertainty | Standard uncertainty |
| u (P test) | 0.1333μm | |
| u (P quilt) | Measurement repeatability | 0.0665μm |
| u (P quilt) | Zero point | 0.1155μm |
| u (P mark) | Inductance micrometer | 0.0577μm |
5. Uncertainty of synthetic standard
Since xi are independent of each other, the synthesis uncertainty is
6. Extended uncertainty
When k is 2, U is 0.29 μm.
Although the present invention has been described with reference to the preferred embodiments, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (9)
1. The measurement calibration method of the film on-line thickness gauge is characterized by comprising the following steps: calibrating a film online thickness gauge by using a standard film, wherein the parameters of the film online thickness gauge include appearance, working state, indicating value error and repeatability; constructing a thickness tracing chain of the standard film for metering and calibrating by adopting a direct measurement method and an indirect weighing method; and (3) constructing a scanning speed tracing chain of the standard film for metering and calibrating by adopting a direct measurement method and a comparison method.
2. The on-line thickness gauge metering calibration method according to claim 1, characterized in that: the standard film is made of a PET film material, and the width of the standard film is equal to the maximum width measured by the on-line thickness gauge; at the highest set speed of the field device, the length is at least 1 cycle around the rack.
3. The on-line thickness gauge metering calibration method according to claim 1 or 2, characterized in that: when the standard film adopts a direct measuring method for tracing, a verification device of the Chinese metrological scientific research institute is transmitted to an inductance micrometer calibrator of a municipal metrological test station, and then the calibration device is transmitted to a working electricity sensing micrometer; when the method is used for tracing the source by adopting a weighing indirect weighing method, the weight calibrating device of the provincial metrological scientific research institute is transmitted to the electronic balance calibrating device of the city metrological testing institute, and then the weight calibrating device is transmitted to the electronic balance for work and the electronic densimeter.
4. The on-line thickness gauge metering calibration method according to claim 1 or 2, characterized in that: the tracing chain of the scanning speed is transmitted to a municipal metering hospital from a rotating speed standard device of a superior metering hospital through a comparison measuring method, then a calibration device of a municipal tachometer is transmitted to a digital tachometer, finally the speed of a standard film is directly measured by the digital tachometer for work, and the actual scanning speed of the on-line thickness gauge is obtained through measurement.
5. The on-line thickness gauge metering calibration method according to claim 1, characterized in that: when the appearance and the working state are calibrated, whether the appearance of the film on-line thickness gauge is intact or not and whether the production line runs normally or not are checked, and whether the production line has an output display device or not is judged.
6. The method for calibrating the metering of the on-line thickness gauge according to claim 1, wherein: when the indicating value error is calibrated, three standard thicknesses of the minimum thickness, half of the maximum thickness and the maximum thickness which can be detected by the equipment are placed on a feeding roller, the parameters of an online thickness gauge are set, the measurement is continuously carried out for at least 6 times on the same layer, and the indicating value error and the repeatability of the thickness measurement are calculated.
7. The on-line thickness gauge metering calibration method according to claim 6, characterized in that:
the method specifically comprises the following steps:
(1) thickness measurement indication error: three standard thickness films of minimum thickness, half of maximum thickness and maximum thickness which can be detected by the equipment are placed on a feeding roller, parameters of an online thickness gauge are set, continuous measurement is carried out for at least 6 times, a displayed average value is calculated, and an indicating value error is calculated according to the following formula,
in the formula:
σ: absolute error in micrometers (μm);
L o : standard film thickness values in microns (μm);
(2) repeatability of thickness measurement: three standard thickness films of minimum thickness, half of maximum thickness and maximum thickness which can be detected by the equipment are placed on a feeding roller, parameters of an online thickness gauge are set, continuous measurement is carried out for at least 6 times on the same layer, and the repeatability is calculated according to the following formula;
in the formula:
s L : reproducibility in micrometers (μm);
L i : measurement columns in micrometers (μm);
8. The on-line thickness gauge metering calibration method according to claim 1, characterized in that: when the scanning speed of the film on-line thickness gauge is measured, the minimum scanning speed, half of the maximum scanning speed and the maximum scanning speed of the device are required to be detected, the same speed is measured for at least 6 times, and the indication value error and repeatability of the scanning speed are calculated.
9. The on-line thickness gauge metering calibration method according to claim 8, characterized in that: the method specifically comprises the following steps:
(1) scanning speed indication error:
when the scanning speed of the film on-line thickness gauge is measured, the minimum scanning speed, half of the maximum scanning speed and the maximum scanning speed of the device are required to be detected, the same speed is measured for at least 6 times, the indicating value error is calculated according to the following formula,
in the formula:
δ νi : scanning speed indication error (%) at the ith measurement point;
V i : an indication of the scanning speed at the ith measurement point, in units of (m/s);
n i : measuring by a non-contact tachometer at the ith measuring point to obtain the rotating speed, wherein the unit is (r/min);
(2) scanning speed repeatability:
continuously measuring the same point for at least 6 times according to the method, calculating the scanning speed, and calculating the obtained measurement column according to the following formula:
in the formula:
s V : repeatability, unit is m/s;
V i : the scanning of each time displays the value, and the unit is m/s;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210342756.9A CN114812470A (en) | 2022-03-31 | 2022-03-31 | Measurement calibration method for film on-line thickness gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210342756.9A CN114812470A (en) | 2022-03-31 | 2022-03-31 | Measurement calibration method for film on-line thickness gauge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114812470A true CN114812470A (en) | 2022-07-29 |
Family
ID=82531959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210342756.9A Pending CN114812470A (en) | 2022-03-31 | 2022-03-31 | Measurement calibration method for film on-line thickness gauge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114812470A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117190887A (en) * | 2023-11-06 | 2023-12-08 | 深圳市磐锋精密技术有限公司 | Aerogel thickness automatic detection system for mobile phone production |
| CN117537758A (en) * | 2023-11-27 | 2024-02-09 | 宿迁市计量测试所 | Calibration method and system of online film length measuring instrument |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4160208A (en) * | 1976-01-27 | 1979-07-03 | Elektro-Physik, Hans Nix & Dr. -Ing E. Steingroever Kg. | Method of calibrating magnetic thickness gauges |
| JPH07260436A (en) * | 1994-03-22 | 1995-10-13 | Asahi Glass Co Ltd | Thickness measuring apparatus for transparent plate |
| EP0678729A1 (en) * | 1994-04-18 | 1995-10-25 | Grapha-Holding Ag | Thickness measuring procedure |
| JP2001165648A (en) * | 1999-12-09 | 2001-06-22 | Mitsubishi Electric Corp | Film thickness measuring device and film thickness measuring method |
| CN104101407A (en) * | 2014-06-27 | 2014-10-15 | 中航复合材料有限责任公司 | Automatic honeycomb sheet weight and thickness measuring method |
| CN104154852A (en) * | 2014-08-20 | 2014-11-19 | 中国科学技术大学 | Conductive film thickness measurement system based on eddy current sensor and method thereof |
| CN104296712A (en) * | 2014-10-29 | 2015-01-21 | 深圳怡化电脑股份有限公司 | Thickness sensor detection device and method |
| CN104677261A (en) * | 2013-12-02 | 2015-06-03 | 成都博智维讯信息技术有限公司 | Standard silicon wafer thickness measuring device |
| CN104944116A (en) * | 2015-05-22 | 2015-09-30 | 桂林电子科技大学 | Detection system used for detecting thickness of coal layer on belt conveyor |
| CN110672047A (en) * | 2019-10-16 | 2020-01-10 | 江苏省特种设备安全监督检验研究院 | Laser ultrasonic measurement method for thickness of high-temperature metal material |
| CN112254658A (en) * | 2020-09-28 | 2021-01-22 | 广东工业大学 | Method for tracing magnitude of film thickness |
| CN112344864A (en) * | 2020-11-04 | 2021-02-09 | 常州奥瑞克精密测量系统有限公司 | Precision calibration method and device for laser thickness and length synchronous measuring instrument |
| CN113091662A (en) * | 2021-04-02 | 2021-07-09 | 中国计量科学研究院 | Self-supporting multi-material coating thickness standard suite and preparation method thereof |
-
2022
- 2022-03-31 CN CN202210342756.9A patent/CN114812470A/en active Pending
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4160208A (en) * | 1976-01-27 | 1979-07-03 | Elektro-Physik, Hans Nix & Dr. -Ing E. Steingroever Kg. | Method of calibrating magnetic thickness gauges |
| JPH07260436A (en) * | 1994-03-22 | 1995-10-13 | Asahi Glass Co Ltd | Thickness measuring apparatus for transparent plate |
| EP0678729A1 (en) * | 1994-04-18 | 1995-10-25 | Grapha-Holding Ag | Thickness measuring procedure |
| JP2001165648A (en) * | 1999-12-09 | 2001-06-22 | Mitsubishi Electric Corp | Film thickness measuring device and film thickness measuring method |
| CN104677261A (en) * | 2013-12-02 | 2015-06-03 | 成都博智维讯信息技术有限公司 | Standard silicon wafer thickness measuring device |
| CN104101407A (en) * | 2014-06-27 | 2014-10-15 | 中航复合材料有限责任公司 | Automatic honeycomb sheet weight and thickness measuring method |
| CN104154852A (en) * | 2014-08-20 | 2014-11-19 | 中国科学技术大学 | Conductive film thickness measurement system based on eddy current sensor and method thereof |
| CN104296712A (en) * | 2014-10-29 | 2015-01-21 | 深圳怡化电脑股份有限公司 | Thickness sensor detection device and method |
| CN104944116A (en) * | 2015-05-22 | 2015-09-30 | 桂林电子科技大学 | Detection system used for detecting thickness of coal layer on belt conveyor |
| CN110672047A (en) * | 2019-10-16 | 2020-01-10 | 江苏省特种设备安全监督检验研究院 | Laser ultrasonic measurement method for thickness of high-temperature metal material |
| CN112254658A (en) * | 2020-09-28 | 2021-01-22 | 广东工业大学 | Method for tracing magnitude of film thickness |
| CN112344864A (en) * | 2020-11-04 | 2021-02-09 | 常州奥瑞克精密测量系统有限公司 | Precision calibration method and device for laser thickness and length synchronous measuring instrument |
| CN113091662A (en) * | 2021-04-02 | 2021-07-09 | 中国计量科学研究院 | Self-supporting multi-material coating thickness standard suite and preparation method thereof |
Non-Patent Citations (6)
| Title |
|---|
| 付百学: "《高等院校"十一五"规划教材·汽车类 汽车试验技术》", 31 August 2007, 北京：中国质检出版社, pages: 247 - 90 * |
| 朱小平 等: "单基体多镀层膜厚标准的设计及应用研究", 计量学报, 31 December 2017 (2017-12-31), pages 39 - 42 * |
| 朱小平;: "JJF1306-2011《X射线荧光镀层测厚仪校准规范》解读", 中国计量, no. 08, 10 August 2012 (2012-08-10), pages 129 - 130 * |
| 李加福;朱小平;杜华;王凯;赵沫;: "金属薄膜厚度测量技术分析", 计量技术, no. 07, 18 July 2020 (2020-07-18), pages 64 - 67 * |
| 王月花: "薄膜光学原理与技术", 30 September 2020, 中国矿业大学出版社, pages: 116 * |
| 田勇: "《长度计量器具建标指南》", 北京：中国质检出版社, pages: 247 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117190887A (en) * | 2023-11-06 | 2023-12-08 | 深圳市磐锋精密技术有限公司 | Aerogel thickness automatic detection system for mobile phone production |
| CN117190887B (en) * | 2023-11-06 | 2024-01-30 | 深圳市磐锋精密技术有限公司 | Aerogel thickness automatic detection system for mobile phone production |
| CN117537758A (en) * | 2023-11-27 | 2024-02-09 | 宿迁市计量测试所 | Calibration method and system of online film length measuring instrument |
| CN117537758B (en) * | 2023-11-27 | 2024-04-09 | 宿迁市计量测试所 | Calibration method and system of online film length measuring instrument |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN114812470A (en) | Measurement calibration method for film on-line thickness gauge | |
| CN109990712B (en) | Online calibration method for width gauge | |
| CN100570273C (en) | A kind of resistor strain type apparatus for measuring diameter and using method thereof | |
| CN112304989B (en) | Method for continuously monitoring platinum loading capacity change of membrane electrode in real time | |
| CN105043190A (en) | Five-axis linkage machine tool RTCP dynamic precision calibrating apparatus and calibrating method thereof | |
| CN106705823A (en) | Field calibration method for linear displacement sensor | |
| CN205808350U (en) | A kind of New Instrument for Crack Width indication error detection device | |
| CN110319779A (en) | Rubber semi-products width dimensions on-line measuring device and detection method | |
| CN112344864A (en) | Precision calibration method and device for laser thickness and length synchronous measuring instrument | |
| CN210773947U (en) | Non-contact valve plate flatness detection device | |
| CN201237496Y (en) | Resistor strain type diameter measurement apparatus | |
| CN112964212B (en) | Method for checking coating thickness by using coating thickness detector | |
| CN108534676A (en) | A kind of coordinate measuring machine measures the method for inspection of space error in space | |
| CN104697712A (en) | Inspection method for mass center of revolving workpiece | |
| JPS5979110A (en) | Measuring method for inspection of accuracy of machine tool and device for executing said method | |
| CN103822599B (en) | Composite material laminated structural member pulse reflection thickness measuring method | |
| CN211120958U (en) | Measuring device of double-wall transillumination ray inspection positioning ray source | |
| CN218601224U (en) | Ladder contrast test block for coating thickness measurement | |
| CN211855140U (en) | Online measuring device for relative elevation of roller system | |
| CN213455347U (en) | On-line scanning laser thickness monitoring instrument | |
| CN216694747U (en) | Height detection gauge | |
| Papananias et al. | Evaluation of automated flexible gauge performance using experimental designs | |
| CN218297053U (en) | End degree length comparator | |
| Shi et al. | Calibration Specification for Seawater pH Analyzer. | |
| HRIVNIAK et al. | CALIBRATION CURVE OF SENSOR WORKING BY THE TRIANGULATION PRINCIPLE AND EFFECT OF TILT ON MEASUREMENT ABILITY |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |