CN114803281B - Hoist that conversion of butt joint dustless workshop was used - Google Patents
Hoist that conversion of butt joint dustless workshop was used Download PDFInfo
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- CN114803281B CN114803281B CN202210479726.2A CN202210479726A CN114803281B CN 114803281 B CN114803281 B CN 114803281B CN 202210479726 A CN202210479726 A CN 202210479726A CN 114803281 B CN114803281 B CN 114803281B
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- conveying mechanism
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 11
- 210000001503 joint Anatomy 0.000 title claims description 9
- 230000007246 mechanism Effects 0.000 claims abstract description 161
- 238000003825 pressing Methods 0.000 claims description 9
- 239000000428 dust Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 13
- WEJZHZJJXPXXMU-UHFFFAOYSA-N 2,4-dichloro-1-phenylbenzene Chemical compound ClC1=CC(Cl)=CC=C1C1=CC=CC=C1 WEJZHZJJXPXXMU-UHFFFAOYSA-N 0.000 description 17
- 238000000034 method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000001668 ameliorated effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000009351 contact transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/02—Roller-ways having driven rollers
- B65G13/06—Roller driving means
- B65G13/07—Roller driving means having endless driving elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
The invention discloses a lifter for conversion of a butted dust-free workshop, which comprises a frame, wherein a first conveying mechanism, a second conveying mechanism, a lifting mechanism and a fork mechanism are arranged in the frame, the input end of the first conveying mechanism is butted with an external conveying mechanism of a common workshop, the output end of the second conveying mechanism is butted with external equipment of the dust-free workshop, the lifting mechanism and the fork mechanism are arranged between the first conveying mechanism and the second conveying mechanism, the movable end of the lifting mechanism is connected with the fork mechanism, and the fork mechanism is driven to move between the output end of the first conveying mechanism and the input end of the second conveying mechanism. The elevator for conversion of the butt-joint dust-free workshop provided by the invention reduces the situations of manual or machine board shifting caused by the fact that equipment cannot be connected with the dust-free workshop and a common workshop, saves manpower and material resources, improves the production efficiency and improves the production automation degree of factories.
Description
Technical Field
The invention relates to the technical field of PCB automation equipment, in particular to a lifter for converting a butt-joint dust-free workshop.
Background
The 21 st century electronic industry develops rapidly, the PCB is one of the important parts of the electronic industry, the performance and quality requirements of the PCB are also continuously improved, the current technical level of the domestic PCB production has no great gap with overseas manufacturers, and the key of future competition differentiation is the degree of production automation.
At present, many elevator transportation equipment of PCB board on the market has, but most equipment only singly uses in ordinary workshop or dust-free workshop, especially when transferring the PCB board from ordinary workshop to dust-free workshop, most equipment all relies on manual work or other machines to transfer at present, can't form a production line operation, and is consuming time and consuming power, and this kind of condition will improve the cost of labor high, and is efficient, and the manual work trades the board and causes the PCB board to scrape the flower damage easily moreover, and degree of automation is low, is unfavorable for the mill to improve automation and intelligent degree.
The above drawbacks are to be ameliorated.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a hoisting machine for conversion of a butt-joint dust-free workshop.
The technical scheme of the invention is as follows:
the utility model provides a hoist that conversion of butt joint dustless workshop was used, includes the frame, be provided with first conveying mechanism, second conveying mechanism, elevating system and fork frame mechanism in the frame, first conveying mechanism's input and the external conveying mechanism butt joint in ordinary workshop, second conveying mechanism's output and the external equipment butt joint in dustless workshop, elevating system with fork frame mechanism sets up first conveying mechanism with between the second conveying mechanism, elevating system's free end with fork frame mechanism connects, and drives fork frame mechanism is in first conveying mechanism's output with move between second conveying mechanism's the input.
According to the invention of the scheme, the first conveying mechanism comprises a first fixing frame, a first conveying motor, a first conveying belt and a plurality of first conveying rollers which are horizontally and uniformly distributed, wherein the first fixing frame is fixed with the frame, the first conveying motor is fixed with the first fixing frame, and the first conveying belt is sleeved on the front ends of the plurality of first conveying rollers and the output shafts of the first conveying motor so as to drive the first conveying rollers to rotate.
Further, the second conveying mechanism comprises a second fixing frame, a second conveying motor, a second conveying belt and a plurality of second conveying rollers which are horizontally and uniformly distributed, the second fixing frame is fixed with the frame, the second conveying motor is fixed with the second fixing frame, and the second conveying belt is sleeved on the front ends of the second conveying rollers and the output shafts of the second conveying motor so as to drive the second conveying rollers to rotate.
Still further, fork frame mechanism includes third mount and a plurality of horizontal evenly distributed's fork board pole, the third mount with hoist mechanism's movable end is fixed, a plurality of the fork board pole the rear end with the third mount is fixed, adjacent two center distance between the first conveying roller, adjacent two center distance between the second conveying roller and adjacent two center distance between the fork board pole is the same, and adjacent two interval between the first conveying roller and adjacent two interval between the second conveying roller are all greater than the diameter of fork board pole.
Still further, the output top of second conveying mechanism is provided with clamp plate cylinder mechanism, clamp plate cylinder mechanism with the interval between the second conveying mechanism cooperatees with the thickness of PCB board.
Further, the platen roller mechanism rotates in synchronization with the second conveying mechanism.
Further, the platen roller mechanism comprises a plurality of platen rollers which are horizontally distributed.
Further, each pressing plate roller is connected with the corresponding second conveying roller through a synchronous mechanism.
Still further, the synchromesh mechanism includes initiative magnetic gear and driven magnetic gear, initiative magnetic gear with driven magnetic gear transmission is connected, initiative magnetic gear with the one end of corresponding second conveying roller is connected, driven magnetic gear with the one end of corresponding clamp plate cylinder is connected.
According to the invention of the scheme, the lifting mechanism comprises a horizontal module for driving the fork frame mechanism to horizontally move and a lifting module for driving the fork frame mechanism to vertically move, the lifting module is fixed with the frame, the horizontal module is fixed with the movable end of the lifting module, and the fork frame mechanism is fixed with the movable end of the horizontal module.
Compared with the prior art, the invention has the beneficial effects that:
1. the elevator for the conversion of the butt-joint dust-free workshop is mainly used for transporting the PCB (printed circuit board) from a common workshop to the dust-free workshop in the production and manufacturing process, can realize automatic and stable operation of the conversion of the vertical plane height of the PCB in the process, reduces the condition of manual or machine board shifting caused by the fact that equipment cannot be connected with the dust-free workshop and the common workshop, saves manpower and material resources, improves the production efficiency and improves the production automation degree of factories;
2. the pressing plate roller mechanism is arranged above the output end of the second conveying mechanism, so that the PCB can stably run under the air pressure impact of a dust-free workshop and a common workshop, and smoothly enter the dust-free workshop, so that the situation of a floating plate is avoided due to the impact caused by the air pressure difference between the two workshops.
Drawings
FIG. 1 is a top view of the present invention;
FIG. 2 is a front view of the present invention;
FIG. 3 is a top view of a first conveyor mechanism according to the present invention;
FIG. 4 is a top view of the second conveyor mechanism coupled to the platen roller mechanism in accordance with the present invention;
FIG. 5 is a front view of the second conveyor mechanism coupled to the platen roller mechanism of the present invention;
FIG. 6 is a top view of the attachment of the lift mechanism to the fork carriage mechanism of the present invention;
fig. 7 is a front view of the attachment of the lifting mechanism to the fork carriage mechanism of the present invention.
In the drawing of the figure,
1. a frame; 2. a first conveying mechanism; 21. a first fixing frame; 22. a first conveying motor; 23. a first conveyor belt; 24. a first conveying roller; 3. a second conveying mechanism; 31. the second fixing frame; 32. a second conveying motor; 33. a second conveyor belt; 34. a second conveying roller; 4. a lifting mechanism; 41. a horizontal module; 42. a lifting module; 5. a fork frame mechanism; 51. a third fixing frame; 52. fork plate rod; 6. an external device; 7. a PCB board; 8. a platen roller mechanism; 81. a platen roller; 9. a synchronizing mechanism; 91. a driving magnetic gear; 92. driven magnetic gear.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the invention is further described in detail below with reference to the accompanying drawings and embodiments.
It should be noted that the terms "comprising" and "having" and any variations thereof in the description and claims of the present invention are intended to cover a non-exclusive inclusion. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those listed steps or elements but may include other steps or elements not listed or inherent to such process, method, article, or apparatus. The terms "disposed," "connected," "secured," "mounted," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The directions or positions indicated by the terms "upper", "lower", "left", "right", "front", "rear", etc. are directions or positions based on those shown in the drawings, are for convenience of description only, and are not to be construed as limiting the present technical solution. The terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features. The meaning of "several" means one or more than one, unless expressly specified otherwise.
Referring to fig. 1 and 2, an embodiment of the invention provides a lifter for converting a butt-joint dust-free workshop, which comprises a frame 1, wherein the frame 1 is used for building a device structure partition, a first conveying mechanism 2, a second conveying mechanism 3, a lifting mechanism 4 and a fork mechanism 5 are arranged in the frame 1, an input end of the first conveying mechanism 2 is in butt joint with an external conveying mechanism of a common workshop and is used for receiving a Printed Circuit Board (PCB) conveyed by the common workshop, and an output end of the second conveying mechanism 3 is in butt joint with an external device 6 of the dust-free workshop and is used for conveying the PCB to the dust-free workshop. Since the heights of the external conveying mechanism of the general workshop and the external equipment 6 of the dust-free workshop are generally inconsistent, there is a difference in height between the first conveying mechanism 2 and the second conveying mechanism 3 in the vertical direction, as in the present embodiment, the first conveying mechanism 2 is lower than the second conveying mechanism 3. The lifting mechanism 4 and the fork frame mechanism 5 are arranged between the first conveying mechanism 2 and the second conveying mechanism 3, and the movable end of the lifting mechanism 4 is connected with the fork frame mechanism 5 and drives the fork frame mechanism 5 to move between the output end of the first conveying mechanism 2 and the input end of the second conveying mechanism 3. When the PCB 7 is directly conveyed onto the first conveying mechanism 2 through the external conveying mechanism in a common workshop, when the PCB 7 reaches the output end (namely the stop position) of the first conveying mechanism 2, the lifting mechanism 4 drives the fork mechanism 5 to convey the PCB 7 to the input end of the second conveying mechanism 3, and the second conveying mechanism 3 further conveys the PCB 7 onto the external equipment 6 of the dust-free workshop to enter the next working step.
The elevator for the conversion of the butt-joint dust-free workshop is mainly used for transporting the PCB 7 (printed circuit board) from a common workshop to the dust-free workshop in the production and manufacturing process, can realize automatic and stable operation of the conversion of the vertical plane height of the PCB 7 in the process, reduces the condition of manual or machine board shifting caused by the fact that equipment cannot be connected with the dust-free workshop and the common workshop, saves manpower and material resources, improves the production efficiency and improves the production automation degree of factories.
Referring to fig. 3, in the present embodiment, the first conveying mechanism 2 includes a first fixing frame 21, a first conveying motor 22, a first conveying belt 23, and a plurality of first conveying rollers 24 that are uniformly distributed horizontally, the first fixing frame 21 is fixed to the frame 1, the first conveying motor 22 is fixed to the first fixing frame 21, and the first conveying belt 23 is sleeved on the front ends of the plurality of first conveying rollers 24 and an output shaft of the first conveying motor 22 to drive the first conveying rollers 24 to rotate.
Referring to fig. 4 and 5, the second conveying mechanism 3 includes a second fixing frame 31, a second conveying motor 32, a second conveying belt 33, and a plurality of second conveying rollers 34 uniformly distributed horizontally, the second fixing frame 31 is fixed with the frame 1, the second conveying motor 32 is fixed with the second fixing frame 31, and the second conveying belt 33 is sleeved on the front ends of the plurality of second conveying rollers 34 and the output shaft of the second conveying motor 32 to drive the second conveying rollers 34 to rotate.
Referring to fig. 6 and 7, the lifting mechanism 4 includes a horizontal module 41 for driving the fork mechanism 5 to translate left and right, and a lifting module 42 for driving the fork mechanism 5 to translate up and down, the lifting module 42 is fixed to the frame 1, the horizontal module 41 is fixed to a movable end of the lifting module 42, and the fork mechanism 5 is fixed to a movable end of the horizontal module 41. Through the horizontal module 41 and the lifting module 42, the fork frame mechanism 5 is driven to move up and down and left and right, so that the PCB 7 at the output end of the first conveying mechanism 2 is stably conveyed to the input end of the second conveying mechanism 3. Since the elevation module 42 and the horizontal module 41 are the prior art, their specific structures will not be described in detail.
Referring to fig. 6 and 7, the fork frame mechanism 5 includes a third fixing frame 51 and a plurality of fork plate rods 52 uniformly distributed horizontally, the third fixing frame 51 is fixed with the movable end of the lifting mechanism 4, the rear ends of the fork plate rods 52 are fixed with the third fixing frame 51, the center distance between two adjacent first conveying rollers 24, the center distance between two adjacent second conveying rollers 34 and the center distance between two adjacent fork plate rods 52 are the same, and the distance between two adjacent first conveying rollers 24 and the distance between two adjacent second conveying rollers 34 are larger than the diameter of the fork plate rods 52, so that the fork plate rods 52 can pass through the gap between two adjacent first conveying rollers 24 and the gap between two adjacent second conveying rollers 34.
When the PCB 7 is transported to the output end of the first transporting mechanism 2, the lifting module 42 and the horizontal module 41 cooperate to move the fork mechanism 5 to reach the lower part of the output end of the first transporting mechanism 2, then the lifting module 42 drives the fork mechanism 5 to move upwards, the fork rod 52 of the fork mechanism 5 passes through the gap of the first transporting mechanism 2, the PCB 7 on the output end of the first transporting mechanism 2 is transferred to the fork rod 52, after the PCB 7 is obtained, the lifting module 42 and the horizontal module 41 cooperate to move the fork mechanism 5 to reach the upper part of the input end of the second transporting mechanism 3, then the lifting module 42 drives the fork mechanism 5 to move downwards, the fork rod 52 of the fork mechanism 5 passes through the gap of the second transporting mechanism 3, the PCB 7 on the fork rod 52 is transferred to the input end of the second transporting mechanism 3, and at this time the lifting module 42 and the horizontal module 41 cooperate to move the fork mechanism 5 back to the origin, and continue to fork and remove the PCB 7.
Referring to fig. 1 and 2, in this embodiment, because an air pressure difference generally occurs when a PCB 7 is abutted between a normal workshop and a dust-free workshop, in order to avoid a flyplate situation when the PCB 7 on the second conveying mechanism 3 moves an external device 6 of the dust-free workshop due to the air pressure difference, a pressing plate roller mechanism 8 is disposed above an output end of the second conveying mechanism 3, and a space between the pressing plate roller mechanism 8 and the second conveying mechanism 3 is matched with a thickness of the PCB 7, so that the PCB 7 can stably run under air pressure impact between the dust-free workshop and the normal workshop, and smoothly enter the dust-free workshop, thereby avoiding the flyplate situation due to the impact caused by the air pressure difference between the two workshops.
Referring to fig. 3 and 4, the platen roller mechanism 8 includes a plurality of platen rollers 81 distributed horizontally, each platen roller 81 is connected with a corresponding second conveying roller 34 through a synchronizing mechanism 9, so that the platen roller mechanism 8 and the second conveying mechanism 3 synchronously rotate, and then the PCB 7 is pressed by the mutual movement of the platen roller 81 and the second conveying roller 34 and is stably conveyed to the external device 6 of the dust-free workshop.
Specifically, the synchronizing mechanism 9 includes a driving magnetic gear 91 and a driven magnetic gear 92, the driving magnetic gear 91 is in transmission connection with the driven magnetic gear 92, the driving magnetic gear 91 is connected with one end of the corresponding second conveying roller 34, and the driven magnetic gear 92 is connected with one end of the corresponding platen roller 81. The driving magnetic gear 91 and the driven magnetic gear 92 which adopt magnetic transmission realize synchronous rotation of the second conveying mechanism 3 and the pressing plate roller mechanism 8, so that a driving motor can be saved, a control system of the equipment is simpler, and the structure of the equipment is more compact; the driving magnetic gear 91 and the driven magnetic gear 92 are non-contact transmission power, have no mechanical loss and long service life, and if the temperature and the humidity are proper, the magnetic gears are permanently used without frequent replacement and maintenance.
It will be understood that modifications and variations will be apparent to those skilled in the art from the foregoing description, and it is intended that all such modifications and variations be included within the scope of the following claims.
While the invention has been described above with reference to the accompanying drawings, it will be apparent that the implementation of the invention is not limited by the above manner, and it is within the scope of the invention to apply the inventive concept and technical solution to other situations as long as various improvements made by the inventive concept and technical solution are adopted, or without any improvement.
Claims (7)
1. The lifting machine for the conversion of the butt-joint dust-free workshop is characterized by comprising a frame, wherein a first conveying mechanism, a second conveying mechanism, a lifting mechanism and a fork mechanism are arranged in the frame, the input end of the first conveying mechanism is in butt joint with an external conveying mechanism of a common workshop, the output end of the second conveying mechanism is in butt joint with an external device of the dust-free workshop, the lifting mechanism and the fork mechanism are arranged between the first conveying mechanism and the second conveying mechanism, and the movable end of the lifting mechanism is connected with the fork mechanism and drives the fork mechanism to move between the output end of the first conveying mechanism and the input end of the second conveying mechanism;
a pressing plate roller mechanism is arranged above the output end of the second conveying mechanism, the distance between the pressing plate roller mechanism and the second conveying mechanism is matched with the thickness of the PCB, and the pressing plate roller mechanism comprises a plurality of pressing plate rollers which are horizontally distributed;
the lifting mechanism comprises a horizontal module used for driving the fork frame mechanism to horizontally move and a lifting module used for driving the fork frame mechanism to vertically move, wherein the lifting module is fixed with the frame, the horizontal module is fixed with the movable end of the lifting module, and the fork frame mechanism is fixed with the movable end of the horizontal module.
2. The elevator for converting a butted dust-free workshop according to claim 1, wherein the first conveying mechanism comprises a first fixing frame, a first conveying motor, a first conveying belt and a plurality of first conveying rollers which are horizontally and uniformly distributed, the first fixing frame is fixed with the frame, the first conveying motor is fixed with the first fixing frame, and the first conveying belt is sleeved on the front ends of the plurality of first conveying rollers and the output shaft of the first conveying motor so as to drive the first conveying rollers to rotate.
3. The elevator for converting a butted dust-free workshop according to claim 2, wherein the second conveying mechanism comprises a second fixing frame, a second conveying motor, a second conveying belt and a plurality of second conveying rollers which are horizontally and uniformly distributed, the second fixing frame is fixed with the frame, the second conveying motor is fixed with the second fixing frame, and the second conveying belt is sleeved on the front ends of the plurality of second conveying rollers and the output shaft of the second conveying motor so as to drive the second conveying rollers to rotate.
4. The hoisting machine for converting a butted dust-free workshop according to claim 3, wherein the fork frame mechanism comprises a third fixing frame and a plurality of fork plate rods which are horizontally and uniformly distributed, the third fixing frame is fixed with the movable end of the hoisting mechanism, the rear ends of the fork plate rods are fixed with the third fixing frame, the center distance between two adjacent first conveying rollers, the center distance between two adjacent second conveying rollers and the center distance between two adjacent fork plate rods are the same, and the distance between two adjacent first conveying rollers and the distance between two adjacent second conveying rollers are larger than the diameter of the fork plate rods.
5. A hoist for converting a butted dust free shop according to claim 3, wherein the platen roller mechanism rotates in synchronization with the second conveying mechanism.
6. The lift for converting a butted dust-free workshop according to claim 5, wherein each of the platen rollers is connected to the corresponding second conveying roller by a synchronizing mechanism.
7. The hoist for switching a butted dust-free workshop according to claim 6, wherein the synchronizing mechanism includes a driving magnetic gear and a driven magnetic gear, the driving magnetic gear is in driving connection with the driven magnetic gear, the driving magnetic gear is connected with one end of the corresponding second conveying roller, and the driven magnetic gear is connected with one end of the corresponding platen roller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210479726.2A CN114803281B (en) | 2022-05-05 | 2022-05-05 | Hoist that conversion of butt joint dustless workshop was used |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210479726.2A CN114803281B (en) | 2022-05-05 | 2022-05-05 | Hoist that conversion of butt joint dustless workshop was used |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114803281A CN114803281A (en) | 2022-07-29 |
| CN114803281B true CN114803281B (en) | 2024-03-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202210479726.2A Active CN114803281B (en) | 2022-05-05 | 2022-05-05 | Hoist that conversion of butt joint dustless workshop was used |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115477151A (en) * | 2022-10-28 | 2022-12-16 | 深圳市创新特科技有限公司 | Take corner machine equipment of compression roller |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101096245A (en) * | 2006-06-26 | 2008-01-02 | 株式会社未来视野 | Substrate transporting mechanism, substrate transporting method and substrate processing system |
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| CN114803281A (en) | 2022-07-29 |
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