CN114799499A - Adsorption laser processing rotating table - Google Patents

Abstract

The invention relates to an adsorption laser processing rotating table which sequentially comprises a fixed base, a motor, an adsorption table base and an adsorption table from bottom to top, wherein the motor is arranged on the fixed base below, a driving end at the top of the motor is in driving connection with the adsorption table base above, and the adsorption table is arranged on the adsorption table base. According to the invention, the product is adsorbed, fixed and positioned during laser cutting, so that the problems of product flatness, anti-static processing efficiency, large-angle rotation and the like are solved; the invention can adjust the planeness of the table top through the adjusting mechanism.

Description

Adsorption laser processing rotating table

Technical Field

The invention relates to the technical field of semiconductor chip correlation, in particular to an adsorption laser processing rotary table, and specifically relates to a 12-inch adsorption laser processing rotary table.

Background

The semiconductor chip industry is the most popular at present, and the state also vigorously supports research and development of related enterprise scientific research institutions, realizes independent chip production early, prevents the chip from being 'clamped neck' abroad, and gradually localizes related equipment for semiconductor processing; the chip manufacturing process is complex, the number of working procedures is large, silicon wafer cutting is one of links, eight-inch wafers are mainly used at present, and twelve inches are used later, so that the efficiency is improved.

At present, two silicon wafer processing modes are provided: one is knife wheel cutting; the other is laser processing;

the cutting wheel has low cutting efficiency, poor appearance and expensive material consumption, and generates much waste water and pollutes the environment;

the laser processing efficiency is high, and the appearance is consistent and beautiful; the laser needs to process products by using focal energy, the flatness requirement of the processed products is high, the processed products are processed by eight-inch sheets conventionally, the flatness requirement of table tops is high by twelve-inch processing at present, the processing by rotating at multiple angles is also needed, and the anti-static processing is also needed.

In view of the above-mentioned drawbacks, the present designer has made active research and innovation to create an adsorption laser processing rotary table, which has industrial application value.

Disclosure of Invention

In order to solve the above technical problems, an object of the present invention is to provide an adsorption laser processing rotary table.

In order to achieve the purpose, the invention adopts the following technical scheme:

an adsorption laser processing rotary table comprises a fixed base, a motor, an adsorption table base and an adsorption table from bottom to top in sequence, wherein the motor is arranged on the fixed base below, a driving end at the top of the motor is in driving connection with the adsorption table base above, the adsorption table is arranged on the adsorption table base, a gas-electric slip ring is arranged at the bottom of the adsorption table base and is connected with a first slip ring fixing plate at the top, the first slip ring fixing plate is arranged at the bottom of the adsorption table base, a second sealing ring is arranged in a groove on the first slip ring fixing plate, the bottom of the gas-electric slip ring is connected with a first sealing plate below through the second slip ring fixing plate, a second sealing plate is arranged on one side of the first sealing plate, the first sealing plate and the second sealing plate are both positioned in a groove at the bottom of the motor, and the adsorption table is positioned on the adsorption table base through the first sealing ring and a positioning pin, the first sealing ring is arranged in a central groove of the adsorption platform base, and the positioning pin and the conductive column are screwed into holes of the adsorption platform base respectively.

As a further improvement of the invention, the motor is arranged on the fixed base through an adjusting mechanism, the adjusting mechanism comprises a bottom flat pad, a threaded sleeve, a locking nut, an adjusting nut, a spacer bush, an upper thick flat pad, a butterfly-shaped elastic pad, an upper thin flat pad and a locking screw, the bottom flat pad is fixed on the fixed base, the adjusting nut is screwed into the internal thread of the threaded sleeve and then is screwed into the threaded hole of the motor bottom plate integrally, the bottom of the motor bottom plate is locked and fixed by the locking nut, the spacer bush is placed into the inner hole of the adjusting nut, and the upper thin flat pad, the four butterfly-shaped elastic pads and the upper thick flat pad are sleeved with the locking screw from top to bottom in sequence and then are locked with the threaded hole of the fixed base integrally and through the spacer bush by the locking screw.

As a further improvement of the invention, a horizontal first limiting block is arranged on the side surface of the adsorption platform base, a vertical second limiting block is connected to the bottom of the first limiting block, a limiting pin is screwed into a threaded hole of the second limiting block, a limiting mechanism is arranged on the motor at one side of the adsorption platform base, and the limiting pin is matched with the limiting mechanism at the lower part.

As a further improvement of the invention, the limiting mechanism comprises a bottom plate, a pushing block, induction sheets, guide rails, a sliding block and inductors, wherein the two inductors are fixed on two sides of the bottom plate along the Y-axis direction, the guide rails are arranged on the bottom plate along the Y-axis direction, the pushing block is connected with the lower guide rail through the sliding block at the bottom, the induction sheets are arranged on two sides of the pushing block along the Y-axis direction, and a limiting pin is arranged in a matching manner with the lower pushing block.

As a further improvement of the invention, two sides of the guide rail along the Y-axis direction are respectively installed on the bottom plate through the baffle plates, two extension springs are arranged on the bottom plate between the baffle plates along the Y-axis direction, one ends of the two extension springs along the Y-axis direction are fixed on the bottom plate, and the other ends of the two extension springs along the Y-axis direction are connected with the push block.

As a further improvement of the invention, the two sides of the gas-electric slip ring are respectively connected with a joint, the two joints are respectively connected with two paths of vacuum, wherein one path of vacuum enters an internal flow channel of the base of the adsorption platform through the gas-electric slip ring, vacuum is formed between the base of the adsorption platform and the adsorption platform, the adsorption platform can be fixed, and the adsorption platform can be taken away after the vacuum is closed; the other path of vacuum directly enters the interior of the porous material on the upper surface of the adsorption table to adsorb the processed product, and the gas-electric slip ring realizes that the two paths of vacuum are not disconnected when the motor rotates.

By the scheme, the invention at least has the following advantages:

according to the invention, the product is adsorbed, fixed and positioned during laser cutting, so that the problems of product flatness, anti-static processing efficiency, large-angle rotation and the like are solved; the invention can adjust the planeness of the table top through the adjusting mechanism.

The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical solutions of the present invention more clearly understood and to implement them in accordance with the contents of the description, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

FIG. 1 is a schematic view of an adsorption laser processing turntable according to the present invention;

FIG. 2 is a schematic view of the structure of FIG. 1 with the parts removed;

FIG. 3 is a schematic view of the internal structure of the adjustment mechanism of FIG. 1 or FIG. 2;

FIG. 4 is a schematic view of the internal structure of FIG. 1;

FIG. 5 is a schematic structural view of the limiting mechanism in FIG. 1 or FIG. 2;

fig. 6 is a schematic view of the structure of the gas-electric slip ring portion of fig. 4.

In the drawings, the meanings of the reference numerals are as follows.

1 fixed base 2 motor

3 adsorption table 4 adjusting mechanism

5 limiting mechanism 6 adsorption table base

7 first seal ring 8 locating pin

9 first stopper 10 second stopper

11 spacing pin 12 conductive column

13 gas electric slip ring 14 first slip ring fixing plate

15 second seal ring 16 second slip ring fixing plate

17 joint 18 first seal plate

19 second sealing plate 4-1 bottom flat gasket

4-2 thread bush 4-3 lock nut

4-4 adjusting nut 4-5 spacer bush

4-6 thick upper flat pad and 4-7 butterfly elastic pad

4-8 upper thin flat pad 4-9 locking screw

5-1 bottom plate 5-2 baffle

5-3 push block 5-4 induction sheet

5-5 guide rail 5-6 slide block

5-7 inductor 5-8 extension spring

A a first regulation point and B a second regulation point

C third adjustment point D fourth adjustment point

E fifth adjustment point

Detailed Description

The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.

In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.

Examples

As shown in figures 1 to 6 of the drawings,

an adsorption laser processing rotating platform sequentially comprises a fixed base 1, a motor 2, an adsorption platform base 6 and an adsorption platform 3 from bottom to top, wherein the motor 2 is arranged on the fixed base 1 below, the driving end at the top of the motor 2 is in driving connection with the adsorption platform base 6 above, the adsorption platform base 6 is provided with the adsorption platform 3, the bottom of the adsorption platform base 6 is provided with an pneumoelectric slip ring 13, the pneumoelectric slip ring 13 is connected with a first slip ring fixing plate 14 at the top, the first slip ring fixing plate 14 is arranged at the bottom of the adsorption platform base 6, a second sealing ring 15 is arranged in a groove on the first slip ring fixing plate 14, the bottom of the pneumoelectric slip ring 13 is connected with a first sealing plate 18 below through a second fixing plate slip ring 16, one side of the first sealing plate 18 is provided with a second sealing plate 19, and the first sealing plate 18 and the second sealing plate 19 are both positioned in the groove at the bottom of the motor 2, adsorb platform 3 and place on adsorbing platform base 6 through first sealing washer 7 and locating pin 8 location, realize fixing on adsorbing base 6 through the vacuum, first sealing washer 7 is arranged in the central slot who adsorbs platform base 6, and locating pin 8 twists respectively with leading electrical pillar 12 and is adsorbed platform base 6 downthehole.

Preferably, the motor 2 is arranged on the fixed base 1 through the adjusting mechanism 4, the adjusting mechanism 4 comprises a bottom flat pad 4-1, a threaded sleeve 4-2, a locking nut 4-3, an adjusting nut 4-4, a spacer sleeve 4-5, an upper thick flat pad 4-6, a butterfly elastic pad 4-7, an upper thin flat pad 4-8 and a locking screw 4-9, the bottom flat pad 4-1 is fixed on the fixed base 1, the adjusting nut 4-4 is screwed into the internal thread of the threaded sleeve 4-2 and then is screwed into the threaded hole of the bottom plate of the motor 2 integrally, the bottom of the bottom plate of the motor 2 is locked and fixed by the locking nut 4-3, the spacer sleeve 4-5 is placed into the inner hole of the adjusting nut 4-4, the upper thin flat pad 4-8, the four butterfly elastic pads 4-7 and the upper thick flat pad 4-6 are sequentially sleeved into the locking screw 4-9 from top to bottom, and then the whole body is locked with the threaded hole of the fixed base 1 through a locking screw 4-9 passing through the spacer 4-5.

Preferably, be provided with the first stopper 9 of horizontally on adsorbing a side of base 6, the bottom of first stopper 9 is connected with vertical second stopper 10, and the spacer pin 11 twists in the threaded hole of second stopper 10, is provided with stop gear 5 on adsorbing a motor 2 of base 6 one side, and spacer pin 11 sets up with the 5 cooperation of stop gear of below.

Preferably, the limiting mechanism 5 comprises a bottom plate 5-1, a push block 5-3, induction sheets 5-4, guide rails 5-5, a sliding block 5-6 and inductors 5-7, the two inductors 5-7 are fixed on two sides of the bottom plate 5-1 along the Y-axis direction, the guide rails 5-5 are installed on the bottom plate 5-1 along the Y-axis direction, the push block 5-3 is connected with the lower guide rails 5-5 through the bottom sliding block 5-6, the induction sheets 5-4 are installed on two sides of the push block 5-3 along the Y-axis direction, and a limiting pin 11 is arranged in a matching manner with the lower push block 5-3.

Preferably, two sides of the guide rail 5-5 along the Y-axis direction are respectively installed on the bottom plate 5-1 through the baffle plates 5-2, two extension springs 5-8 are arranged on the bottom plate 5-1 between the baffle plates 5-2 along the Y-axis direction, one ends of the two extension springs 5-8 along the Y-axis direction are fixed on the bottom plate 5-1, and the other ends of the two extension springs 5-8 along the Y-axis direction are connected with the push block 5-3.

Preferably, two sides of the gas-electric slip ring 13 are respectively connected with a connector 17, and the two connectors 17 are respectively connected with two paths of vacuum, wherein one path of vacuum enters an internal flow channel of the adsorption platform base 6 through the gas-electric slip ring 13, vacuum is formed between the adsorption platform base 6 and the adsorption platform 3, the adsorption platform 3 can be fixed, and the adsorption platform 3 can be taken away after the vacuum is closed; the other path of vacuum directly enters the porous material on the upper surface of the adsorption platform 3 to adsorb the processed product, and the gas-electric slip ring 13 realizes that the two paths of vacuum are not disconnected when the motor 2 rotates.

The working principle and the working process of the invention are as follows:

after the whole mechanism is assembled, the flatness of the adsorption platform 3 needs to be adjusted firstly, and the flatness is realized through the adjusting mechanism 4. The adjusting nut 4-4 is matched with the threaded sleeve 4-2 through a fine thread with the thread pitch of 0.25mm, the upper height and the lower height of the whole motor 2 are adjusted by rotating the outer hexagon at the lower end of the adjusting nut 4-4, and a distance of about 2mm is reserved between the motor 2 and the fixed base 1 to serve as a leveling space. The butterfly-shaped elastic pad 4-7 is pressed down by rotating the locking screw 4-9, the butterfly-shaped elastic pad 4-7 is stopped after being compressed for about 2mm, and the remaining compressible space is used for leveling and is fixed on the fixed base 1 through the reverse force of the compression of the butterfly-shaped elastic pad 4-7 by the motor 2.

The two connectors 17 are respectively connected with two paths of vacuum, wherein one path of vacuum enters an internal flow channel of the adsorption platform base 6 through the gas-electric slip ring 13, vacuum is formed between the adsorption platform base 6 and the adsorption platform 3, the adsorption platform 3 can be fixed, and the adsorption platform 3 can be taken away and replaced by adsorption platforms with different sizes when the vacuum is closed; the other path of vacuum directly enters the porous material on the upper surface of the adsorption platform 3 to adsorb the processed product, and the gas-electric slip ring 13 realizes that the two paths of vacuum are not disconnected when the motor 2 rotates.

When the motor 2 rotates, the limiting pin 11 collides with the push block 5-3, the sliding block 5-6 connected with the push block 5-3 slides along the guide rail 5-5, the extension spring 5-8 on one side is extended, the extension spring 5-8 on the other side is compressed, the sensing piece 5-4 on the push block 5-3 has in-place sensing signal output when moving to the sensor 5-7, the motor 2 stops rotating, when the motor 2 rotates in the opposite direction, the extension spring 5-8 is restored to enable the push block 5-3 to move to the middle position, and the same action process is also adopted when the limiting pin 11 rotates from the other direction, so that the motor 2 can rotate 380 degrees, and cutting at any angle can be realized.

Electrostatic treatment: adsorb platform 3 and place when adsorbing on platform base 6, it is compressed to lead electrical pillar 12, it is used for adsorbing to inlay porous carborundum material to adsorb 3 upper surfaces of platform, adsorb 3 inside metal parts of inlaying of platform, the metal parts upper surface switches on with carborundum, the metal parts lower surface with lead electrical pillar 12 contact, it adorns on inlaying the metal parts on adsorbing platform base 6 to lead electrical pillar 12, this metal parts back links to each other with the electric wire of pneumo-electric slip ring 13, the electric wire ground connection that pneumo-electric slip ring 13 came out, the static that finally realizes adsorbing 3 surfaces of platform can be derived successfully, reach the purpose of static elimination.

Leveling: a 2mm space is reserved between an adjusting nut 4-4 for adjusting a fourth adjusting point D and a fifth adjusting point E and a bottom flat cushion 4-1, and locking screws 4-9 at the two points are not screwed into threaded holes of the fixed base 1; the flatness of the surface of the adsorption platform 3 is measured through an image mechanism, three points of a first adjusting point A, a second adjusting point B and a third adjusting point C are adjusted, a plane is determined by the three points, after horizontal adjustment is completed, adjusting nuts 4-4 of a fourth adjusting point D and a fifth adjusting point E are rotated to move downwards and attach to a bottom flat cushion 4-1, locking screws 4-9 of the two points are screwed into threaded holes of the fixing base 1 to be locked, and the motor 3 is connected with the fixing base 1 in an integrally reinforced mode.

The invention is used for adsorbing, fixing and positioning a product during laser cutting of a twelve-inch silicon wafer, and solves the problems of product flatness, static electricity prevention of processing efficiency, large-angle rotation and the like. The invention adopts a structure of matching threads with the elastic pad to adjust the flatness of the table top; the movement limit of the sliding block realizes large-angle rotation of the motor, and the porous silicon carbide is matched with the conductive column and the slip ring to realize the function of static electricity derivation, thereby meeting the requirements of the semiconductor industry; the efficiency is improved by laser processing, and the appearance of the product is improved.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly referring to the number of technical features being grined. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection: either mechanically or electrically: the terms may be directly connected or indirectly connected through an intermediate member, or may be a communication between two elements.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, it should be noted that, for those skilled in the art, many modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims (6)

1. An adsorption laser processing rotating platform is characterized by sequentially comprising a fixed base (1), a motor (2), an adsorption platform base (6) and an adsorption platform (3) from bottom to top, wherein the motor (2) is arranged on the fixed base (1) below, a driving end at the top of the motor (2) is in driving connection with the adsorption platform base (6) above, the adsorption platform (3) is arranged on the adsorption platform base (6), a pneumoelectric slip ring (13) is arranged at the bottom of the adsorption platform base (6), the pneumoelectric slip ring (13) is connected with a first slip ring fixing plate (14) at the top, the first slip ring fixing plate (14) is arranged at the bottom of the adsorption platform base (6), a second sealing ring (15) is arranged in a groove on the first slip ring fixing plate (14), the bottom of the pneumoelectric slip ring (13) is connected with a first sealing plate (18) below through a second slip ring fixing plate (16), one side of first closing plate (18) is provided with second closing plate (19), first closing plate (18) and second closing plate (19) all are located the inslot of motor (2) bottom, adsorb platform (3) and place on adsorbing platform base (6) through first sealing washer (7) and locating pin (8) location, the central inslot of adsorbing platform base (6) is arranged in first sealing washer (7), it is downthehole that adsorbs platform base (6) is twisted respectively in locating pin (8) and lead electrical pillar (12).

2. An adsorption laser processing rotary table according to claim 1, wherein the motor (2) is mounted on the fixed base (1) through an adjusting mechanism (4), the adjusting mechanism (4) comprises a bottom flat pad (4-1), a threaded sleeve (4-2), a locking nut (4-3), an adjusting nut (4-4), a spacer sleeve (4-5), an upper thick flat pad (4-6), a butterfly spring pad (4-7), an upper thin flat pad (4-8) and a locking screw (4-9), the bottom flat pad (4-1) is fixed on the fixed base (1), the adjusting nut (4-4) is screwed into the internal thread of the threaded sleeve (4-2) and then screwed into the threaded hole of the bottom plate of the motor (2) in an integral manner, the bottom of the bottom plate of the motor (2) is locked and fixed by the locking nut (4-3), the spacer bush (4-5) is placed into an inner hole of the adjusting nut (4-4), the upper thin flat pad (4-8), the four butterfly elastic pads (4-7) and the upper thick flat pad (4-6) are sequentially sleeved with the locking screw (4-9) from top to bottom, and then the spacer bush (4-5) is integrally passed through the locking screw (4-9) to be locked with a threaded hole of the fixed base (1).

3. An adsorption laser processing rotary table according to claim 1, wherein a horizontal first limit block (9) is arranged on a side surface of the adsorption table base (6), a vertical second limit block (10) is connected to the bottom of the first limit block (9), a limit pin (11) is screwed into a threaded hole of the second limit block (10), a limit mechanism (5) is arranged on the motor (2) on one side of the adsorption table base (6), and the limit pin (11) is matched with the lower limit mechanism (5).

4. An adsorption laser processing rotary table according to claim 3, wherein the position limiting mechanism (5) comprises a bottom plate (5-1), a push block (5-3), a sensing piece (5-4), a guide rail (5-5), a slide block (5-6) and two sensors (5-7), the two sensors (5-7) are fixed on the bottom plate (5-1) along two sides of the Y-axis direction, the guide rail (5-5) is arranged on the bottom plate (5-1) along the Y-axis direction, the push block (5-3) is connected with the guide rail (5-5) below through a slide block (5-6) at the bottom, the induction sheets (5-4) are arranged on two sides of the push block (5-3) in the Y-axis direction, and the limiting pin (11) is matched with the push block (5-3) below.

5. An adsorption laser processing rotary table according to claim 4, wherein the guide rails (5-5) are respectively mounted on the bottom plate (5-1) through the baffles (5-2) at two sides along the Y-axis direction, two extension springs (5-8) are arranged on the bottom plate (5-1) between the baffles (5-2) along the Y-axis direction, one ends of the two extension springs (5-8) along the Y-axis direction are fixed on the bottom plate (5-1), and the other ends of the two extension springs (5-8) along the Y-axis direction are connected with the push block (5-3).

6. An adsorption laser processing rotary table as claimed in claim 1, wherein two sides of said gas-electric slip ring (13) are respectively connected with a connector (17), two of said connectors (17) are respectively connected with two paths of vacuum, wherein one path of vacuum enters an internal flow channel of the adsorption table base (6) through the gas-electric slip ring (13), vacuum is formed between the adsorption table base (6) and the adsorption table (3), the adsorption table (3) can be fixed, and the adsorption table (3) can be taken away after the vacuum is closed; the other path of vacuum directly enters the interior of the porous material on the upper surface of the adsorption platform (3) to adsorb a processed product, and the two paths of vacuum are not disconnected by the aid of the gas-electric slip ring (13) when the motor (2) rotates.

Images