CN114799493A - Automatic focusing device of ultrafast laser processing equipment - Google Patents

Abstract

The utility model relates to an automatic focusing device of ultrafast laser processing equipment, belonging to the technical field of laser processing equipment, comprising an ultrafast laser processing equipment body, wherein the ultrafast laser processing equipment body comprises a laser head and a driving device for driving the laser head to move along XY axes, the driving device comprises a moving seat, and a focusing plate and a first driving piece for driving the focusing plate are arranged on the moving seat; the movable seat is also provided with a second driving piece, the output end of the second driving piece is provided with a lifting plate, the laser head is fixed on the lifting plate, the bottom of the lifting plate is provided with a distance measuring emitter, and the top surface of the focusing plate is provided with a distance measuring receiver matched with the distance measuring emitter; be equipped with in the frame of ultrafast laser cutting machine body and be used for detecting focusing plate to look at the inductor, this application provides an automatic focusing device of ultrafast laser processing equipment for improving machining precision and work efficiency.

Description

Automatic focusing device of ultrafast laser processing equipment

Technical Field

The application relates to the field of laser processing equipment, in particular to an automatic focusing device of ultrafast laser processing equipment.

Background

The term "ultrafast laser" refers to picosecond lasers, femtosecond lasers, and comparatively hot attosecond lasers in the scientific research field among pulsed laser industrial lasers in which the pulse width of output laser is 10-12s, i.e., picosecond or less, and these are in the category of ultrafast lasers. For lasers with pulse widths between tens of picoseconds and 1 nanosecond, the industry would not refer to them as ultrafast lasers, but rather as sub-nanosecond lasers.

Ultrafast laser is one of the important development directions in the laser field, and as a new technical means, has significant advantages in the aspect of precision micromachining. Since the ultra-short pulse generated by the ultra-fast laser has a very short time for interacting with a material and does not thermally affect the surrounding material, the ultra-fast laser processing is also called cold processing. This is because, when the laser pulse width reaches the picosecond or femtosecond order, the influence on the thermal motion of molecules can be largely avoided, resulting in less thermal influence.

When the focal position is lower than the surface of the workpiece, the area of a light spot penetrating through the surface of the workpiece is large, a large bell mouth is generated, and the processing depth is influenced by the reduction of energy density. Therefore, in general, the focus should be precisely positioned on the surface of the material to be processed or slightly below the surface of the material to be processed.

The automatic focusing function of the conventional ultrafast laser processing apparatus is to ensure the most suitable distance between the processed material and the focusing lens by controlling the up-and-down movement of the working platform. However, the automatic focusing is only to keep a safe distance between the processed material and the focusing lens when the ultrafast laser cutting machine is in a working state, before using the automatic focusing, the focal length still needs to be adjusted to the proper height by manually focusing the initial focusing distance once, the initial manual focusing process is that after the working platform is lifted to the proper position, the focusing plate is manually placed on the working platform and is positioned under the laser head, then the height of the focusing plate is adjusted by adjusting the position of the lifting platform, so that the focusing plate reaches the zero point through the pair of vision sensors arranged at the two sides, then the focusing glass with the determined focusing distance is placed on the focusing plate, then the adjusting nut is screwed, and finely adjusting the height of the laser head to enable the distance between the laser head and the focusing glass to be close to the thickness of the focusing glass, and finally screwing an adjusting nut to finish the initial manual focusing.

According to the situation, the problem that the conventional ultrafast laser processing equipment still needs to be manually subjected to initial focusing is known, the precision can be improved only by means of the processing experience of the manual focusing, and meanwhile, the time required by the manual focusing is long, so that the working efficiency is low.

Disclosure of Invention

In order to improve machining precision and work efficiency, the application provides an automatic focusing device of ultrafast laser processing equipment.

The application provides a pair of automatic focusing device of ultrafast laser process equipment adopts following technical scheme:

an automatic focusing device of ultrafast laser processing equipment comprises an ultrafast laser processing equipment body, wherein the ultrafast laser processing equipment body comprises a laser head, a driving device and a lifting platform, the driving device drives the laser head to move along XY axes, the driving device comprises a moving seat, and a focusing plate and a first driving piece for driving the focusing plate are arranged on the moving seat; the movable seat is also provided with a second driving piece, the output end of the second driving piece is provided with a lifting plate, the laser head is fixed on the lifting plate, the bottom of the lifting plate is provided with a distance measuring emitter, and the top surface of the focusing plate is provided with a distance measuring receiver matched with the distance measuring emitter; and a visual sensor for detecting the focusing plate is arranged on the frame of the ultrafast laser cutting machine body.

By adopting the technical scheme, the first driving part drives the focusing plate to move up and down, so that the focusing plate can accurately move to a position between the pair of focusing sensors at two sides, the focusing plate is positioned at a zero point, then the second driving part drives the lifting plate to move up and down, the lifting plate drives the laser head to lift, so that the distance between the laser head and the focusing plate can be automatically adjusted, the relative distance between the laser head and the focusing plate can be measured by utilizing the distance measuring transmitter arranged on the lifting plate and the distance measuring receiver arranged on the top surface of the focusing plate, the accurate distance measurement of the relative distance between the laser head and the focusing plate can be realized, and the processing precision can be improved; meanwhile, initial automatic focusing is performed by utilizing the control of the first driving piece and the second driving piece, the problem that the relative distance between the laser head and the focusing plate needs to be adjusted manually is solved, the automatic focusing of the initial distance between the laser head and the focusing plate is realized, and the processing efficiency is improved.

Preferably, be equipped with the backup pad on the removal seat, the through-hole has been seted up in the backup pad, the through-hole internal rotation is connected with the pivot, be equipped with first driving motor in the backup pad, first driving motor with the pivot is connected, the pivot is kept away from first driving motor's one end is equipped with rotates the seat, first driving piece is fixed rotate on the seat, the output of first driving piece is equipped with the movable plate, the bottom of movable plate is equipped with revolving cylinder, the one end fixed connection of focusing plate is in revolving cylinder's output shaft.

Through adopting above-mentioned technical scheme, after rotatory cylinder drive was rotatory to certain angle to the focusing plate, first driving motor drive pivot was rotated, and the pivot is rotated and is driven the seat of rotating of connection in the pivot, rotates the seat and drives first driving piece and rotate, makes the focusing plate can keep away from lift platform, prevents to produce the hindrance to lift platform's lift to be favorable to processing, improve equipment security.

Preferably, one end of the rotating seat, which is close to the supporting plate, is provided with a limiting rod, the supporting plate is provided with a limiting groove matched with the limiting rod, and the limiting rod is in sliding fit in the limiting groove.

By adopting the technical scheme, the connection and matching between the rotating seat and the supporting plate are increased by utilizing the matching of the limiting rod and the limiting groove, so that the rotating seat can rotate more stably, the possibility of collision between structures is reduced, and the safety of equipment is improved; meanwhile, the limiting rod improves the structural strength between the rotating seat and the supporting plate, and plays a role in distributing the axial supporting force of the rotating shaft, so that the service life of the rotating shaft is prolonged, the maintenance is reduced, and the cost is reduced.

Preferably, the limiting groove rotates clockwise 90 degrees along the axis of the rotating shaft.

Through adopting above-mentioned technical scheme, inject the gag lever post and rotate 90, play the effect of location gag lever post, prevent that the gag lever post from surpassing the rotation stroke to prevent structure and ultrafast laser processing equipment's structure production intercrossing, and then bump, thereby make things convenient for equipment to carry out the processing operation, improve equipment's security.

Preferably, the groove walls on two sides of the limit groove are provided with balls, the balls are arranged along the shape of the limit groove, one end of the limit rod, which is in contact with the balls, is provided with a guide groove, and the balls are connected in the guide groove in a matching manner.

By adopting the technical scheme, the friction force between the limiting rod and the limiting groove is reduced by utilizing the balls, so that the limiting rod can conveniently move in the limiting groove, and the working efficiency is improved; simultaneously, the combination of ball and guide slot makes the joint that the gag lever post can be more firm at the spacing inslot to increase structural strength between the two, improve equipment's security.

Preferably, a support rod is arranged on the moving seat, one end of the support rod is rotatably connected to one side of the moving seat, a support seat is arranged at one end of the support rod, which is far away from the moving seat, a third driving piece is further arranged on the moving seat, one end of the third driving piece is rotatably connected to the moving seat, and the output end of the third driving piece is hinged to the middle part of the support rod; when the focusing plate rotates to be far away from the lifting platform through the rotating shaft, the first driving piece is placed on the top surface of the supporting seat.

Through adopting above-mentioned technical scheme, when keeping away from lift platform to the focusing plate, third driving piece drive bracing piece, the bracing piece rotates the bottom that drives the supporting seat and remove to first driving piece, after first driving motor outage, the focusing plate drives the upper surface at the supporting seat of first driving piece butt after the pivot rotates because of gravity, realize bracing piece and supporting seat to the support of first driving piece, in order to guarantee ultrafast laser processing equipment at the course of the work, the focusing plate can not turn around to lift platform on, thereby improve equipment's security and reduce first driving motor's power output, the cost is saved.

Preferably, one end of the lifting plate, which is close to the moving seat, is provided with a first guide rail, the moving seat is provided with a sliding groove matched with the first guide rail, and the first guide rail is in sliding fit in the sliding groove.

Through adopting above-mentioned technical scheme, utilize first guide rail to carry on spacingly to the removal of lifter plate, reduce the lifter plate and produce the deflection in the lift displacement to keep the straightness that hangs down of laser head, reduce the deviation of laser head, thereby improve the accuracy.

Preferably, the driving device further comprises a transverse shaft driving mechanism and a longitudinal shaft driving mechanism, the transverse shaft driving mechanism comprises a transverse column, first supports are arranged at two ends of the transverse column, the first supports are rotatably connected with screw rods arranged along the length direction of the transverse column, a second driving motor is arranged at one end of each screw rod, and the second driving motor is fixed on the first supports; the transverse column is also provided with a second guide rail arranged along the axial direction of the screw rod, and the moving seat is in sliding fit with the second guide rail; the moving seat is provided with a nut seat, and the nut seat is in threaded connection with the screw; the longitudinal shaft driving mechanism comprises a conveying belt, a second support is arranged on the rack, a rotating rod is rotatably arranged on the second support, the conveying belt is sleeved on the rotating rod, a third driving motor is arranged on the second support, and the third driving motor drives the rotating rod to rotate; the frame is provided with a third guide rail, the transverse column is in sliding fit with the third guide rail, the transverse column is provided with a fixing part, and the fixing part is detachably arranged on the conveyor belt.

By adopting the technical scheme, the second driving motor drives the screw to rotate, the screw drives the movable seat to move on the transverse column in a transverse axis manner, the third driving motor drives the rotating rod to rotate, the rotating rod drives the conveying belt to rotate, and then the transverse column fixedly connected to the conveying belt is driven to move, so that the movable seat can move in a longitudinal axis manner; the transverse shaft driving mechanism and the longitudinal shaft driving mechanism are used for driving the moving seat to move on the frame, so that the moving seat can drive the initial automatic focusing device to move to a position between the focusing sensors, and automatic focusing of the initial automatic focusing device is completed.

Preferably, the mounting includes fixed plate and grip block, the fixed plate is installed one side of spreader, the one end butt of fixed plate in the top surface of conveyer belt, the grip block passes through the bolt centre gripping the conveyer belt with the fixed plate is connected.

Through adopting above-mentioned technical scheme, utilize the mounting to realize the fixed connection of spreader and conveyer belt to make the conveyer belt drive the spreader and move on the third guide rail, realize the longitudinal displacement of spreader.

Preferably, the surface array of lift platform is provided with the boss.

Through adopting above-mentioned technical scheme, utilize the boss to reduce the area of contact of work piece and lift platform, reduce the wearing and tearing to the work piece, prevent simultaneously that laser from taking place to intersect to lift platform to improve lift platform's life.

In summary, the present application includes at least one of the following beneficial technical effects:

the distance measuring device measures the relative distance between the laser head and the focusing plate by utilizing the distance measuring transmitter arranged on the lifting plate and the distance measuring receiver arranged on the top surface of the focusing plate, so that the precise distance measurement of the relative distance between the laser head and the focusing plate is realized, and the processing precision is improved; meanwhile, initial automatic focusing is performed by utilizing the control of the first driving piece and the second driving piece, the problem that the relative distance between the laser head and the focusing plate needs to be adjusted manually is solved, the automatic focusing of the initial distance between the laser head and the focusing plate is realized, and the processing efficiency is improved.

Drawings

Fig. 1 is a schematic overall structure diagram (the device housing is hidden for better illustration) in the embodiment of the present application.

Fig. 2 is an enlarged view a in the embodiment of the present application.

Fig. 3 is an enlarged view B in the embodiment of the present application.

Fig. 4 is a state diagram of the automatic focusing apparatus in the embodiment of the present application, fig. 1.

Fig. 5 is a state diagram of the automatic focusing device in the embodiment of the present application, fig. 2.

FIG. 6 is a partial view of a stop bar and stop slot in an embodiment of the present application.

Fig. 7 is a state diagram of the automatic focusing device in the embodiment of the present application, fig. 3.

Description of reference numerals: 1. a laser head; 2. a drive device; 21. a movable seat; 211. a support plate; 2111. a limiting groove; 2112. a ball bearing; 212. a rotating shaft; 213. a first drive motor; 214. a rotating seat; 215. a limiting rod; 2151. a guide groove; 216. a support bar; 217. a supporting seat; 218. a third driving member; 22. a cross shaft drive mechanism; 221. a cross post; 222. a first support; 223. a screw; 224. a second drive motor; 225. a second guide rail; 226. a nut seat; 23. a longitudinal axis drive mechanism; 231. a conveyor belt; 232. a second support; 233. a rotating rod; 234. a third drive motor; 235. a third guide rail; 24. a fixing member; 241. a fixing plate; 242. a clamping plate; 243. a bolt; 3. a focusing plate; 4. a first driving member; 41. moving the plate; 42. a rotating cylinder; 5. a second driving member; 6. a lifting plate; 61. a first guide rail; 7. a ranging transmitter; 8. a ranging receiver; 9. a sight-seeing sensor; 10. a lifting platform; 101. and (4) a boss.

Detailed Description

The present application is described in further detail below with reference to figures 1-7.

The embodiment of the application discloses an automatic focusing device of ultrafast laser processing equipment.

Referring to fig. 1, an automatic focusing device of an ultrafast laser processing apparatus comprises an ultrafast laser processing apparatus body, wherein the ultrafast laser processing apparatus body comprises a laser head 1, a driving device 2 for driving the laser head 1 to move along an XY axis, and a lifting platform 10.

In this embodiment, the surface array of the lifting platform 10 is provided with a plurality of bosses 101, the number of the bosses 101 is set according to the actual production condition, which is not specifically described in this embodiment; the cross section of the boss 101 is conical, and the top surface of the boss 101 is provided with a round angle.

The contact area between the workpiece and the lifting platform 10 is reduced by using the boss 101, the abrasion to the workpiece is reduced, and meanwhile, the laser is prevented from intersecting the lifting platform 10, so that the service life of the lifting platform 10 is prolonged

Referring to fig. 1, the driving device 2 includes a horizontal axis driving mechanism 22 and a vertical axis driving mechanism 23, wherein, referring to fig. 1 and fig. 2, the horizontal axis driving mechanism 22 includes a horizontal column 221, two first supports 222 are disposed at two ends of the horizontal column 221, a screw 223 is rotatably connected to the first supports 222 along a length direction of the horizontal column 221, specifically, two ends of the screw 223 are respectively rotatably connected to the two first supports 222 at two ends of the horizontal column 221, one of the first supports 222 is fixedly connected to a second driving motor 224, and an output end of the second driving motor 224 is connected to the screw 223.

The top surface of the horizontal column 221 is provided with a second guide rail 225 arranged along the axial direction of the screw 223, a sliding seat is slidably fitted on the second guide rail 225, a moving seat 21 is arranged on the sliding seat, a through hole coaxially arranged with the screw 223 is formed in the moving seat 21, a nut seat 226 is arranged in the through hole, and the nut seat 226 is in threaded connection with the screw 223.

The second driving motor 224 drives the screw 223 to rotate, the screw 223 drives the nut seat 226 connected with the screw, the nut seat 226 drives the movable seat 21 to move on the second guide rail 225, and the movable seat 21 moves on the transverse shaft 221.

Referring to fig. 1 and 3, the longitudinal shaft driving mechanism 23 includes a conveyor belt 231, a frame is provided with two second supports 232, the two second supports 232 are respectively disposed at the front and rear ends of the frame, the second supports 232 are provided with two symmetrical bearing seats, and a rotating rod 233 is rotatably connected between the two bearing seats; the conveying belt 231 is sleeved between the two rotating rods 233 on the two second supports 232 to form a rotatable rotary traction belt.

Furthermore, two conveyor belts are arranged, the conveyor belts are arranged on two sides of the frame by taking the middle point of the transverse column 221 as an axis,

the second support 232 is provided with a third driving motor 234, an output shaft of the third driving motor 234 is connected with a belt pulley, the rotating rod 233 arranged on the same second support 232 as the third driving motor 234 is also provided with a belt pulley, a belt is connected between the two belt pulleys, and the rotating rod 233 on the same side as the third driving motor 234 extends to the second support 232 on the other side of the rack to form a synchronizing rod.

The rack is provided with two third guide rails 235, the third guide rails 235 are arranged at two ends of the transverse column 221 respectively by taking the middle point of the transverse column 221 as an axis, the bottom of the transverse column 221 is provided with a sliding seat in sliding fit with the third guide rails 235, the side surface of the transverse column 221 is provided with a fixing part 24, and the fixing part 24 is detachably mounted on the conveying belt 231.

Referring to fig. 2, in the present embodiment, the fixing member 24 includes a fixing plate 241 and a clamping plate 242, the fixing plate 241 is mounted on a side surface of the lateral column 221, one end of the fixing plate 241 is in contact with an outer side surface of the conveyor belt 231, the clamping plate 242 is disposed at a back side of the conveyor belt 231 in contact with the fixing plate 241 to clamp the conveyor belt 231, and the fixing plate 241 and the clamping plate 242 are fixedly connected by bolts 243 and nuts.

The third driving motor 234 drives the rotating rod 233 to rotate, and the rotating rod 233 rotates to drive the conveying belts 231 on two sides to rotate at the same time, so as to drive the transverse column 221 fixedly connected to the conveying belts 231 to move on the third guide rail 235, thereby realizing the movement of the longitudinal axis of the moving base 21.

Referring to fig. 1 and 7, be provided with in the frame and be used for detecting focusing plate 3 to look at inductor 9, it is specific, be provided with two to looking at inductor 9, two are looked at inductor 9 and are set up the middle part position in the both sides of frame respectively, are the Z axle upper limit position of lift platform 10 and are the zero point position of lift platform 10 to looking at inductor 9, when sensing lift platform 10 to looking at inductor 9 promptly, lift platform 10 is in zero point position, and the relative distance of laser head 1 to lift platform 10 is the focus distance this moment.

Referring to fig. 4, a supporting plate 211 is disposed on the movable seat 21, a through hole is formed in the supporting plate 211, a rotating shaft 212 is rotatably connected in the through hole, a first driving motor 213 is disposed on the supporting plate 211, the first driving motor 213 is fixed on the supporting plate 211 and connected with the rotating shaft 212, a rotating seat 214 is disposed at one end of the rotating shaft 212, which is far away from the first driving motor 213, a mounting plate is disposed at one side of the rotating seat 214, and a first driving member 4 is disposed on the mounting plate.

In this embodiment, the first driving element 4 is a first driving cylinder, the output end of the first driving cylinder is provided with a moving plate 41, and one side of the moving plate 41 far away from the first driving cylinder is fixedly connected with a rotating cylinder 42; specifically, a rotation output shaft of the rotary cylinder 42 is coaxially arranged with an output shaft of the first driving cylinder, the rotation output shaft of the rotary cylinder 42 is fixedly connected with the focusing plate 3, and a distance measuring receiver 8 is arranged on the top surface of one end of the focusing plate 3 far away from the rotary cylinder 42.

After the rotary cylinder 42 drives the focusing plate 3 to rotate to a certain angle, the first driving motor 213 drives the rotating shaft 212 to rotate, the rotating shaft 212 rotates to drive the rotating seat 214 connected to the rotating shaft 212, and the rotating seat 214 drives the first driving member 4 to rotate, so that the focusing plate 3 can be far away from the lifting platform 10.

Referring to fig. 4 and 5, the movable seat 21 is provided with a second driving member 5, and in the present embodiment, the second driving member 5 is a second driving cylinder; specifically, the second drives actuating cylinder fixed connection and drives actuating cylinder's contralateral at first, and the output shaft that the second drove actuating cylinder is perpendicular to lift platform 10, and the output that the second drove actuating cylinder is provided with lifter plate 6, and in this embodiment, lifter plate 6's cross-section is "L" type.

Referring to fig. 5 and 7, one end of the lifting plate 6 is connected to the output end of the second driving cylinder, the laser head 1 is disposed at one side of the lifting plate 6, and the output end of the laser head 1 is perpendicular to the lifting platform 10. The bottom surface of lifter plate 6 is provided with the range finding transmitter 7 that aligns with range finding receiver 8, sets up the surplus through the control cabinet, makes range finding transmitter 7 and range finding receiver 8's working distance be the focus distance.

Referring to fig. 4 and 5, in the present embodiment, one end of the lifting plate 6 close to the moving seat 21 is provided with two first guide rails 61, and the two first guide rails 61 are symmetrically arranged with the output shaft of the second driving cylinder as a central axis; the movable base 21 is provided with a sliding groove matched with the first guide rail 61, and the first guide rail 61 is in sliding fit in the sliding groove. By utilizing the first guide rail 61 to limit the movement of the lifting plate 6, the lifting plate 6 is reduced to deflect in the lifting displacement so as to keep the perpendicularity of the laser head 1, reduce the deviation of the laser head 1 and improve the accuracy.

Referring to fig. 5, a supporting rod 216 is disposed on the movable base 21, specifically, one end of the supporting rod 216 is hinged to one side of the movable base 21 close to the first driving member 4, a supporting seat 217 is disposed at one end of the supporting rod 216 away from the movable base 21, the supporting seat 217 is made of a soft material, in this embodiment, the supporting seat 217 is made of rubber.

Referring to fig. 5, the movable base 21 is provided with a third driving member 218, in this embodiment, the third driving member 218 is a third driving cylinder, an output end of the third driving cylinder is hinged to the middle portion of the supporting rod 216, and another end of the third driving cylinder is rotatably connected to a side of the movable base 21 close to the second driving member 5.

Referring to fig. 4 and 5, when the focusing plate 3 is far away from the lifting platform 10, the third driving member 218 drives the supporting rod 216, the supporting rod 216 rotates to drive the supporting seat 217 to move to the bottom of the first driving member 4, after the first driving motor 213 is powered off, the focusing plate 3 drives the rotating shaft 212 to rotate due to gravity, and then the first driving member 4 abuts against the upper surface of the supporting seat 217, so that the supporting rod 216 and the supporting seat 217 support the first driving member 4, thereby ensuring that the ultrafast laser processing equipment can work, the focusing plate 3 can not rotate to the lifting platform 10, improving the safety of the equipment, reducing the power output of the first driving motor 213, and saving the cost.

Referring to fig. 4, in this embodiment, a limiting rod 215 is disposed at one end of the rotating seat 214 close to the supporting plate 211, a limiting groove 2111 matched with the limiting rod 215 is formed in the supporting plate 211, the limiting rod 215 is slidably matched in the limiting groove 2111, and by utilizing the matching between the limiting rod 215 and the limiting groove 2111, the connection and the matching between the rotating seat 214 and the supporting plate 211 are increased, so that the rotating seat 214 can rotate more stably, the possibility of collision between structures is reduced, and the safety of the device is improved; meanwhile, the limiting rod 215 improves the structural strength between the rotating seat 214 and the supporting plate 211, and plays a role in distributing the axial supporting force of the rotating shaft 212, so that the service life of the rotating shaft 212 is prolonged, the maintenance is reduced, and the cost is reduced.

Referring to fig. 4, in this embodiment, the limiting groove 2111 rotates clockwise 90 ° along the axis of the rotating shaft 212, and rotates 90 ° by limiting the limiting rod 215, so as to position the limiting rod 215, and prevent the limiting rod 215 from exceeding the rotation stroke, so as to prevent the structure from intersecting with the structure of the ultrafast laser processing apparatus, and further from colliding, thereby facilitating the processing operation of the apparatus and improving the safety of the apparatus.

Specifically, the starting point of the limiting groove 2111 is the starting point of the limiting groove 2111 when the output shaft of the first driving cylinder is perpendicular to the lifting platform 10; the end point of the limiting groove 2111 is the end point of the limiting groove 2111 when the output shaft of the first driving cylinder rotates 90 degrees clockwise along the axis of the rotating shaft 212, and the output shaft of the first driving cylinder is parallel to the lifting platform 10.

Referring to fig. 4 and 6, the grooves on the two sides of the limiting groove 2111 are provided with balls 2112, the balls 2112 are arranged along the shape of the limiting groove 2111, one end of the limiting rod 215 contacting the balls 2112 is provided with a circle of guide groove 2151, and the balls 2112 are in rolling fit in the guide groove 2151; the number of the balls 2112 is determined according to actual production conditions, and is not specifically described in the present embodiment.

The ball 2112 is utilized to reduce the friction force between the limiting rod 215 and the limiting groove 2111, so that the limiting rod 215 can conveniently move in the limiting groove 2111, and the working efficiency is improved; meanwhile, the combination of the balls 2112 and the guide groove 2151 enables the limiting rod 215 to be clamped in the limiting groove 2111 more stably, so that the structural strength between the two is increased, and the safety of the device is improved.

Wherein, synthesize the above-mentioned, can realize the initial automatic focusing through the control cabinet through the following steps:

firstly, referring to fig. 1, before a laser head 1 works, an automatic focusing device is in a non-working state; the focusing distance is selected according to the production data, and after the focusing distance is set on the console, the second driving motor 224 and the third driving motor 234 are respectively started to move the movable base 21 to the middle position of the lifting platform 10.

Second, referring to fig. 4, rotary cylinder 42 rotates focusing plate 3 to shift focusing plate 3 from horizontal pole 221.

And thirdly, referring to fig. 5, the third driving cylinder contracts and drives the supporting rod 216, so that the supporting rod 216 rotates to one side of the second driving cylinder, and the supporting seat 217 is separated from the bottom of the first driving cylinder.

Fourthly, referring to fig. 7, the first driving motor 213 is started, and the first driving motor 213 drives the rotating base 214 to rotate, so that the limiting rod 215 rotates from the starting point to the final point, that is, the output end of the first driving cylinder is perpendicular to the lifting platform 10.

Fifthly, referring to fig. 7, the first driving cylinder drives the focusing plate 3 until the focusing sensor 9 is triggered, that is, the focusing plate 3 is at the zero position, and then the rotating cylinder 42 drives the focusing plate 3 to rotate, so that the distance measuring receiver 8 is aligned with the distance measuring transmitter 7.

And sixthly, referring to fig. 7, according to the focusing distance set by the console, the second driving cylinder drives the lifting plate 6 to move until the working distance between the ranging emitter 7 and the ranging receiver 8 reaches the required focusing distance, and then the second driving cylinder stops to finish automatic focusing of the initial focusing distance.

And seventhly, after the automatic focusing is finished, the control console controls the focusing plate 3 to operate in a reverse direction until the focusing plate returns to the original position.

The implementation principle of the automatic focusing device of the ultrafast laser processing equipment in the embodiment of the application is as follows: the relative distance between the laser head 1 and the focusing plate 3 is measured by utilizing the ranging emitter 7 arranged on the lifting plate 6 and the ranging receiver 8 arranged on the top surface of the focusing plate 3, so that the precise ranging of the relative distance between the laser head 1 and the focusing plate 3 is realized, and the processing precision is improved; meanwhile, initial automatic focusing is performed by utilizing the control of the first driving piece 4 and the second driving piece 5, the problem that the relative distance between the laser head 1 and the focusing plate 3 needs to be adjusted manually is solved, the automatic focusing of the initial distance between the laser head 1 and the focusing plate 3 is realized, and the processing efficiency is improved.

The above are all preferred embodiments of the present application, and the present embodiment is only explained for the present application, and the protection scope of the present application is not limited by this, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims (10)

1. An automatic focusing device of ultrafast laser processing equipment comprises an ultrafast laser processing equipment body, wherein the ultrafast laser processing equipment body comprises a laser head (1), a driving device (2) for driving the laser head (1) to move along XY axes and a lifting platform (10), and is characterized in that the driving device (2) comprises a moving seat (21), and a focusing plate (3) and a first driving piece (4) for driving the focusing plate (3) are arranged on the moving seat (21); a second driving piece (5) is further arranged on the moving seat (21), a lifting plate (6) is arranged at the output end of the second driving piece (5), the laser head (1) is fixed on the lifting plate (6), a ranging emitter (7) is arranged at the bottom of the lifting plate (6), and a ranging receiver (8) matched with the ranging emitter (7) is arranged on the top surface of the focusing plate (3); and a sight-seeing sensor (9) for detecting the focusing plate (3) is arranged on the frame of the ultrafast laser cutting machine body.

2. The automatic focusing device of ultrafast laser process equipment according to claim 1, a support plate (211) is arranged on the movable seat (21), a through hole is arranged on the support plate (211), a rotating shaft (212) is rotatably connected in the through hole, a first driving motor (213) is arranged on the supporting plate (211), the first driving motor (213) is connected with the rotating shaft (212), one end of the rotating shaft (212) far away from the first driving motor (213) is provided with a rotating seat (214), the first driving piece (4) is fixed on the rotating seat (214), a moving plate (41) is arranged at the output end of the first driving piece (4), the bottom of the moving plate (41) is provided with a rotary cylinder (42), and one end of the focusing plate (3) is fixedly connected with an output shaft of the rotary cylinder (42).

3. The automatic focusing device of the ultrafast laser processing equipment according to claim 2, wherein a limiting rod (215) is disposed at one end of the rotating seat (214) close to the supporting plate (211), a limiting groove (2111) matched with the limiting rod (215) is disposed on the supporting plate (211), and the limiting rod (215) is slidably fitted in the limiting groove (2111).

4. The automatic focusing device of the ultrafast laser processing apparatus as claimed in claim 3, wherein the limiting groove (2111) is disposed by rotating 90 ° clockwise along the axis of the rotation shaft (212).

5. The automatic focusing device of the ultrafast laser processing equipment according to claim 3, wherein the groove walls of both sides of the limiting groove (2111) are provided with balls (2112), the balls (2112) are arranged along the shape of the limiting groove (2111), one end of the limiting rod (215) contacting with the balls (2112) is provided with a guide groove (2151), and the balls (2112) are connected in the guide groove (2151) in a matching manner.

6. The automatic focusing device of an ultrafast laser processing device as claimed in claim 2, wherein a support rod (216) is disposed on the movable base (21), one end of the support rod (216) is rotatably connected to one side of the movable base (21), a support seat (217) is disposed at an end of the support rod (216) far away from the movable base (21), a third driving member (218) is further disposed on the movable base (21), one end of the third driving member (218) is rotatably connected to the movable base (21), and an output end of the third driving member (218) is hinged to a middle portion of the support rod (216); when the focusing plate (3) rotates away from the lifting platform (10) through the rotating shaft (212), the first driving piece (4) is placed on the top surface of the supporting seat (217).

7. The automatic focusing device of the ultrafast laser processing equipment according to claim 1, wherein a first guide rail (61) is disposed at one end of the lifting plate (6) close to the movable base (21), a sliding slot adapted to the first guide rail (61) is formed in the movable base (21), and the first guide rail (61) is slidably fitted in the sliding slot.

8. The automatic focusing device of the ultrafast laser processing equipment according to claim 1, wherein the driving device (2) further comprises a horizontal axis driving mechanism (22) and a vertical axis driving mechanism (23), the horizontal axis driving mechanism (22) comprises a horizontal column (221), first supports (222) are arranged at two ends of the horizontal column (221), a screw (223) arranged along the length direction of the horizontal column (221) is rotatably connected to the first supports (222), a second driving motor (224) is arranged at one end of the screw (223), and the second driving motor (224) is fixed on the first supports (222); the transverse column (221) is further provided with a second guide rail (225) arranged along the axial direction of the screw (223), and the moving seat (21) is in sliding fit with the second guide rail (225); the moving seat (21) is provided with a nut seat (226), and the nut seat (226) is in threaded connection with the screw rod (223); the longitudinal shaft driving mechanism (23) comprises a conveying belt (231), a second support (232) is arranged on the rack, a rotating rod (233) is rotatably arranged on the second support (232), the conveying belt (231) is sleeved on the rotating rod (233), a third driving motor (234) is arranged on the second support (232), and the rotating rod (233) is driven to rotate by the third driving motor (234); be equipped with third guide rail (235) in the frame, spreader (221) sliding fit is in on third guide rail (235), be equipped with mounting (24) on spreader (221), the detachable installation of mounting (24) is in on conveyer belt (231).

9. The autofocus device for ultrafast laser processing apparatus according to claim 8, wherein the fixing member (24) comprises a fixing plate (241) and a clamping plate (242), the fixing plate (241) is installed at one side of the cross-post (221), one end of the fixing plate (241) abuts against the top surface of the conveyor belt (231), and the clamping plate (242) clamps the conveyor belt (231) by a bolt (243) to connect with the fixing plate (241).

10. The autofocus device for ultrafast laser machining apparatus of claim 1, wherein the surface array of said elevating platform (10) is provided with bosses (101).

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