CN114791665A - Electromagnetic drive type high-speed deflection mirror system - Google Patents
Electromagnetic drive type high-speed deflection mirror system Download PDFInfo
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- CN114791665A CN114791665A CN202210333374.XA CN202210333374A CN114791665A CN 114791665 A CN114791665 A CN 114791665A CN 202210333374 A CN202210333374 A CN 202210333374A CN 114791665 A CN114791665 A CN 114791665A
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- lens holder
- electromagnet
- permanent magnet
- lens
- mirror system
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
Abstract
The invention discloses an electromagnetic drive type high-speed deflection mirror system, which comprises: the rotating component comprises a lens holder, a reflecting lens and permanent magnet assemblies, wherein the reflecting lens is coaxially arranged on the upper surface of the lens holder, and the permanent magnet assemblies are embedded in the lens holder and are uniformly distributed around the reflecting lens; the fixed component is positioned below the rotating component and comprises a base body and an electromagnet assembly arranged on the base body; the universal bearing is arranged on the base body and is fixedly connected with the lens holder so as to enable the lens holder to rotate freely; the electromagnet assembly is electrified to generate magnetic force to drive the permanent magnet assembly to deflect so as to drive the lens holder and the reflecting lens to deflect. The system has stable structure, small volume, simple production and assembly and quick dynamic response.
Description
Technical Field
The invention belongs to the field of scanning. More particularly, the present invention relates to an electromagnetically actuated high-speed deflection mirror system.
Background
At present, the oscillating mirrors and the deflecting mirrors on the market are mainly divided into MEMS mirrors, galvanometer mirrors, piezoelectric ceramic fast mirrors and voice coil motor-driven fast mirrors. The structure of the fast reflector is mainly divided into two structure forms of shafting and shaftless. Wherein, the shaftless structure mostly adopts a flexible structure to replace the traditional mechanical structure. However, the mirror system of each structure cannot simultaneously satisfy the requirements of small volume, large deflection angle, firm structure, high response speed and strong loading capacity.
Disclosure of Invention
An object of the present invention is to solve at least the above problems and/or disadvantages and to provide at least the advantages described hereinafter.
It is yet another object of the present invention to provide an electromagnetically driven high speed deflection mirror system that is robust in construction, compact in size, simple to produce and assemble, and fast in dynamic response.
To achieve these objects and other advantages and in accordance with the purpose of the invention, as embodied and broadly described, there is provided an electromagnetically driven high-speed deflection mirror system comprising:
the rotating component comprises a lens holder, a reflecting lens coaxially arranged on the upper surface of the lens holder, and permanent magnet assemblies embedded in the lens holder and uniformly distributed around the reflecting lens;
the fixed component is positioned below the rotating component and comprises a base body and an electromagnet assembly arranged on the base body;
the universal bearing is arranged on the base body and is fixedly connected with the lens holder so as to enable the lens holder to rotate freely;
the permanent magnet assembly is driven to deflect by magnetic force generated by electrifying the electromagnet assembly, so that the lens holder and the reflecting lens are driven to deflect.
Preferably, the electromagnetically driven high-speed deflection mirror system further includes: an angular position sensor assembly, comprising:
a sensor reflector disposed on a bottom surface of the lens holder;
a photoelectric position detection unit provided on the base;
and the laser generator is arranged on the base body, and laser generated by the laser generator shoots to the sensor reflector plate and is reflected by the sensor reflector plate to shoot to the photoelectric position detection unit so as to detect the angle position of the reflector plate in real time.
Preferably, in the electromagnetically driven high-speed deflection mirror system, the gimbal bearing includes:
the top of the upper semicircular shell is provided with a through hole;
the lower semicircular shell is fixedly connected with the upper semicircular shell, and a spherical cavity is formed between the upper semicircular shell and the lower semicircular shell;
the surface of the bearing ball body is provided with a plurality of balls, the bearing ball body is arranged in the spherical cavity, and the bearing ball body is fixedly connected with the lens holder through the through hole.
Preferably, in the electromagnetically driven high-speed deflection mirror system, the permanent magnet assembly includes a first permanent magnet, a second permanent magnet and a third permanent magnet, and the three cylindrical permanent magnets are uniformly embedded around the mirror plate at equal intervals and have the same distance with the rotation axis of the mirror plate;
the electromagnet assembly comprises a first electromagnet, a second electromagnet and a third electromagnet which are uniformly arranged on the base body, the first electromagnet and the first permanent magnet, the second electromagnet and the second permanent magnet, and the third electromagnet and the third permanent magnet are coaxially arranged one by one.
Preferably, in the electromagnetic drive type high-speed deflection mirror system, a threaded hole is formed in a rotation central axis of the bearing ball, an opening of the threaded hole is upwardly exposed from a through hole of the upper semicircular shell, a fixing screw is arranged at the bottom of the lens holder, and the screw is screwed into the threaded hole to fixedly connect the lens holder and the bearing ball.
Preferably, in the electromagnetically driven high-speed deflection mirror system, the photoelectric position detecting unit is a high-speed high-precision PSD or CCD.
Preferably, in the electromagnetically driven high-speed deflecting mirror system, the specific arrangement manner of the sensor reflecting plate on the bottom surface of the lens holder is as follows:
a first groove is formed in the bottom surface of the lens support, and the sensor reflector is arranged in the first groove, so that the outer side surface of the sensor reflector and the bottom surface of the lens support are positioned on the same plane; and the laser generated by the laser generator arranged on the base body is obliquely emitted upwards and emitted on the sensor reflecting sheet.
Preferably, in the electromagnetic drive type high-speed deflection mirror system, the specific arrangement manner of the sensor reflection sheet on the bottom surface of the lens holder is as follows:
and a second groove is arranged on the bottom surface of the lens support, and the sensor reflector plate is obliquely arranged in the second groove.
Preferably, in the electromagnetically driven high-speed deflection mirror system, a third groove is formed in the upper surface of the base, and the photoelectric position detection unit is disposed in the third groove; three fourth grooves are formed in the base body, and the first electromagnet, the second electromagnet and the third electromagnet are respectively arranged in the fourth grooves; a circular groove is formed in the central position of the base body, and the lower semicircular shell is arranged in the circular groove.
Preferably, in the electromagnetic drive type high-speed deflection mirror system, the edge of the base body extends upwards to form a circular protrusion, and the top surface of the circular protrusion and the top surface of the lens holder are located on the same horizontal plane.
The invention at least comprises the following beneficial effects: because the rotating member comprises the lens support, the reflecting lens coaxially arranged on the upper surface of the lens support and the permanent magnet assembly embedded in the lens support, the lens support is generally made of metal, and therefore, the influence of temperature, vibration and the like on the reflecting lens surface and the position can be reduced. The fixed component is arranged below the rotating component and comprises a base body and an electromagnet assembly arranged on the base body, the electromagnet assembly is electrified to generate magnetic force which can drive the permanent magnet assembly to deflect so as to drive the lens support and the reflecting lens to deflect, the electromagnet is electrified in different sizes, the generated magnetic force is different in size, and the lens support and the reflecting lens can deflect in different angles. The universal bearing who sets up, it sets up on the base member, and with lens holds in the palm fixed connection, consequently, universal bearing can enough provide the support for lens support, reflection lens and permanent magnet subassembly, can realize the two-dimensional rotational degree of freedom of reflection lens again to have wide-angle turned scope, and adopt universal bearing's structure, the overall system's that has significantly reduced structure size.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Drawings
FIG. 1 is a schematic structural diagram of an electromagnetically driven high-speed deflection mirror system in an embodiment of the present invention;
fig. 2 is a schematic structural view of an angular position sensor assembly according to another embodiment of the present invention.
FIG. 3 is a schematic view of a gimbal bearing according to another embodiment of the present invention;
FIG. 4 is a schematic view of a gimbal bearing according to another embodiment of the present invention;
FIG. 5 is a schematic top view of a gimbal bearing according to another embodiment of the present invention;
FIG. 6 is a schematic view of a mounting structure of a universal bearing according to another embodiment of the present invention;
FIG. 7 is a schematic top view of an electromagnetically actuated high-speed deflection mirror system according to another embodiment of the present invention;
FIG. 8 is a schematic structural diagram illustrating an external appearance of an electromagnetically driven high-speed deflection mirror system according to another embodiment of the present invention;
FIG. 9 is a schematic cross-sectional view of an electromagnetically driven high-speed deflection mirror system according to another embodiment of the present invention;
FIG. 10 is a schematic view of the electromagnet assembly and lens holder of another embodiment of the present invention;
fig. 11 is a schematic view of the electromagnet assembly and lens holder according to another embodiment of the present invention.
Detailed Description
The present invention is further described in detail below with reference to the attached drawings so that those skilled in the art can implement the invention by referring to the description text.
It will be understood that terms such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
As shown in fig. 1, an electromagnetic drive type high-speed deflection mirror system provided by an embodiment of the present invention includes: a rotating member 1 including a mirror plate holder 101, a mirror plate 102 coaxially disposed on an upper surface of the mirror plate holder 101, and permanent magnet assemblies 103 embedded inside the mirror plate holder 101 and uniformly distributed around the mirror plate 102; a fixed member 2 located below the rotating member 1, including a base 201 and an electromagnet assembly 202 provided on the base; a universal bearing 3 disposed on the base 201 and fixedly connected to the lens holder 101 so as to allow the lens holder 101 to freely rotate; the magnetic force generated by the electromagnet assembly 202 when energized drives the permanent magnet assembly 103 to deflect, so as to drive the lens holder 101 and the mirror plate 102 to deflect.
Among them, the lens holder 101 is preferably provided in a disc shape, and the disc-shaped lens holder is more stable when rotated. The mirror plate 102 and the plate holder are coaxially arranged. In specific implementation, the reflective mirror may be directly disposed above the mirror holder 101, or a mirror groove may be disposed at a central position of the mirror holder, and the reflective mirror may be disposed in the mirror groove.
In the above embodiments, the lens holder is generally made of metal, so the lens holder can reduce the influence of temperature, vibration and the like on the reflecting mirror surface and the position; the electromagnet assembly is arranged to be electrified to generate magnetic force which can drive the permanent magnet assembly to deflect so as to drive the lens holder and the reflection lens to deflect, the electromagnet is electrified in different sizes, the generated magnetic force is different in size, and the lens holder and the reflection lens can deflect in different angles; the universal bearing that sets up, it sets up on the base member, and with lens holds in the palm fixed connection, consequently, universal bearing can enough provide the support for lens support, reflection lens and permanent magnet subassembly, can realize the two-dimentional rotational degree of freedom of reflection lens again to have wide-angle rotation range, and adopt universal bearing's structure, the overall system's that has significantly reduced structure size.
In one embodiment, as shown in fig. 2, the electromagnetically driven high-speed deflection mirror system further includes: an angular position sensor assembly 4 comprising:
a sensor reflection sheet 401 provided on the bottom surface of the lens holder 101;
a photoelectric position detection unit 402 provided on the base 201;
and the laser generator 403 is arranged on the base body 201, and laser generated by the laser generator 403 is emitted to the sensor reflector 401 and is reflected by the sensor reflector to be emitted to the photoelectric position detection unit 402 so as to detect the angular position of the reflector in real time. The photoelectric position detection unit is a high-speed high-precision PSD or CCD.
In the above embodiment, the sensor reflecting sheet 401 provided on the bottom surface of the lens holder 101 rotates with the deflection of the lens holder, and when the lens holder 101 deflects, the position of the laser beam reflected by the sensor reflecting sheet 401 received by the photoelectric position detecting unit 402 also changes, and therefore, the position angle of the reflecting lens can be detected in real time by reading the position information of the photoelectric position detecting unit.
Specifically, the specific arrangement manner of the sensor reflective sheet 401 disposed on the bottom surface of the lens holder 101 may be as follows:
a first groove is formed in the bottom surface of the lens holder 101, and the sensor reflecting sheet 401 is arranged in the first groove, so that the outer side surface of the sensor reflecting sheet 401 and the bottom surface of the lens holder are located on the same plane; the laser light generated by the laser generator 403 arranged on the substrate is emitted obliquely upwards to the sensor reflector 401, and the laser generator can be obliquely arranged during specific arrangement.
As shown in fig. 2, the arrangement of the sensor reflection sheet may also be: a second groove is formed on the bottom surface of the lens holder 101, and the sensor reflection sheet 401 is obliquely disposed in the second groove.
For the second arrangement, when the sensor reflection sheet 401 is obliquely fixed in the second groove, the embodiment of the invention is not particularly limited with respect to the oblique angle, and the arrangement may be specifically performed according to actual situations.
In one embodiment, as shown in fig. 3 to 6, in the electromagnetically driven high-speed deflecting mirror system, the gimbal bearing 3 includes: an upper semicircular shell 301, the top of which is provided with a through hole; a lower semicircular shell 302, which is fixedly connected with the upper semicircular shell 301, wherein a spherical cavity is formed between the upper semicircular shell 301 and the lower semicircular shell 302; a bearing ball 303 having a plurality of balls disposed on the surface thereof, wherein the bearing ball 303 is disposed in the spherical cavity, and the bearing ball 303 is fixedly connected to the lens holder 101 through the through hole. Wherein a fourth circular groove is arranged at the central position of the base 201, and the lower semicircular shell 302 is arranged in the fourth circular groove.
In the above embodiment, the lower semicircular shell of the universal bearing is disposed in the fourth circular groove at the central position of the base, and the upper semicircular shell of the universal bearing is disposed in the space between the base and the lens holder, so as to stabilize and save space.
In the specific setting, the bearing ball is placed in the lower semicircular shell, then the upper semicircular shell and the lower semicircular shell are fixed, and the specific fixing method is not limited in the embodiment of the invention, and can be realized by screw fixing and welding fixing, and finally the bearing ball and the lens support are fixed. In addition, in the embodiment of the invention, in order to fix the upper semicircular shell and the lower semicircular shell, fixing flanges are respectively arranged on the upper semicircular shell and the lower semicircular shell.
In one embodiment, as shown in fig. 6, in the electromagnetically driven high-speed deflection mirror system, a threaded hole 304 is formed at a rotation central axis of the bearing ball 303, an opening of the threaded hole 304 is upwardly exposed from a through hole of the upper semi-circular housing 301, a fixing screw 305 is disposed at a bottom of the lens holder 101, and the fixing screw 305 is screwed into the threaded hole to fixedly connect the lens holder and the bearing ball.
In one embodiment, as shown in fig. 9 to 11, in the electromagnetic drive type high-speed deflection mirror system, the permanent magnet assembly 103 includes a first permanent magnet, a second permanent magnet and a third permanent magnet, which are embedded around the mirror plate at equal intervals, and have the same distance from the rotation axis of the mirror plate; the electromagnet assembly 202 comprises a first electromagnet, a second electromagnet and a third electromagnet, the three electromagnets are uniformly arranged on the base body, the first electromagnet and the first permanent magnet, the second electromagnet and the second permanent magnet, and the third electromagnet and the third permanent magnet are coaxially arranged one by one.
It should be noted that, regarding the shapes of the first permanent magnet, the second permanent magnet and the third permanent magnet, the first permanent magnet may be a cylindrical permanent magnet, and may also be a square or rectangular permanent magnet.
In the above embodiment, the permanent magnet assembly and the electromagnet assembly are preferably arranged in three, so that the symmetry and stability of the structure are ensured. However, the number of the permanent magnet assemblies and the number of the electromagnet assemblies according to the embodiments of the present invention are not particularly limited, and may be set uniformly so as to ensure symmetry and stability. The electromagnet comprises a coil and a magnetic conductive material arranged in the coil.
In one embodiment, the electromagnetic driven high-speed deflection mirror system has a third groove disposed on the upper surface of the substrate 201, and the photoelectric position detection unit 402 is disposed in the third groove; three fourth grooves are formed in the base body 201, and the first electromagnet, the second electromagnet and the third electromagnet are respectively arranged in the fourth grooves; a circular groove is formed in the central position of the base 201, and the lower semicircular shell is arranged in the circular groove.
In the above embodiment, the photoelectric position detecting unit and the electromagnet are both disposed in the groove, which is stable and reduces the volume.
In one embodiment, as shown in fig. 7 to 8, in the electromagnetic drive type high-speed deflection mirror system, an edge of the substrate 201 extends upward to form a circular protrusion, and a top surface of the circular protrusion and a top surface of the lens holder are located on the same horizontal plane.
The number of apparatuses and the scale of the process described herein are intended to simplify the description of the present invention. Applications, modifications and variations of the electromagnetically driven high-speed deflection mirror system of the present invention will be apparent to those skilled in the art.
As described above, the electromagnetic drive type high-speed deflection mirror system provided by the embodiment of the invention has the advantages of small size, capability of carrying a large load, large-angle swing of the light beam, quick dynamic response, stable structure and simplicity in production and assembly.
While embodiments of the invention have been disclosed above, it is not intended to be limited to the uses set forth in the specification and examples. It can be applied to all kinds of fields suitable for the present invention. Additional modifications will readily occur to those skilled in the art. Therefore, the invention is not to be limited to the specific details and illustrations shown and described herein, without departing from the general concept as defined by the claims and their equivalents.
Claims (10)
1. An electromagnetically driven high-speed deflection mirror system, comprising:
the rotating component comprises a lens holder, a reflecting lens coaxially arranged on the upper surface of the lens holder, and permanent magnet assemblies embedded in the lens holder and uniformly distributed around the reflecting lens;
the fixed component is positioned below the rotating component and comprises a base body and an electromagnet assembly arranged on the base body;
the universal bearing is arranged on the base body and is fixedly connected with the lens holder so as to enable the lens holder to rotate freely;
the permanent magnet assembly is driven to deflect by magnetic force generated by electrifying the electromagnet assembly, so that the lens holder and the reflecting lens are driven to deflect.
2. The electromagnetically driven high-speed deflection mirror system of claim 1, further comprising: an angular position sensor assembly, comprising:
a sensor reflector disposed on a bottom surface of the lens holder;
a photoelectric position detection unit provided on the base;
and the laser generator is arranged on the base body, and laser generated by the laser generator shoots to the sensor reflector plate and is reflected by the sensor reflector plate to shoot to the photoelectric position detection unit so as to detect the angle position of the reflector plate in real time.
3. The electromagnetically driven high-speed deflection mirror system of claim 2, wherein the gimbal bearing comprises:
the top of the upper semicircular shell is provided with a through hole;
the lower semicircular shell is fixedly connected with the upper semicircular shell, and a spherical cavity is formed between the upper semicircular shell and the lower semicircular shell;
the surface of the bearing ball body is provided with a plurality of balls, the bearing ball body is arranged in the spherical cavity, and the bearing ball body is fixedly connected with the lens holder through the through hole.
4. The electromagnetically driven high-speed deflection mirror system as claimed in claim 3, wherein said permanent magnet assembly comprises a first permanent magnet, a second permanent magnet and a third permanent magnet, which are embedded uniformly and equally spaced around said mirror plate at a distance equal to the rotational axis of said mirror plate;
the electromagnet assembly comprises a first electromagnet, a second electromagnet and a third electromagnet, the three electromagnets are uniformly arranged on the base body, the first electromagnet and the first permanent magnet, the second electromagnet and the second permanent magnet, and the third electromagnet and the third permanent magnet are coaxially arranged one by one.
5. The electromagnetic drive high-speed deflection mirror system according to claim 3, wherein a threaded hole is provided at the rotation center axis of the bearing ball, and an opening of the threaded hole is upwardly exposed from the through hole of the upper semi-circular housing, and a fixing screw is provided at the bottom of the lens holder, and the screw is screwed into the threaded hole to fixedly connect the lens holder and the bearing ball.
6. The electromagnetically driven high-speed deflection mirror system as claimed in claim 2, wherein said photoelectric position detecting unit is a high-speed high-accuracy PSD or CCD.
7. The electromagnetic-driven high-speed deflection mirror system according to claim 2, wherein the sensor reflection sheet is provided on the bottom surface of the lens holder in such a manner that:
a first groove is formed in the bottom surface of the lens support, and the sensor reflector is arranged in the first groove, so that the outer side surface of the sensor reflector and the bottom surface of the lens support are positioned on the same plane; and the laser generated by the laser generator arranged on the base body is obliquely emitted upwards and emitted on the sensor reflecting sheet.
8. The electromagnetic drive high-speed deflection mirror system of claim 2, wherein the sensor reflector is disposed on the bottom surface of the mirror support in a manner that:
and a second groove is arranged on the bottom surface of the lens support, and the sensor reflector plate is obliquely arranged in the second groove.
9. An electromagnetically driven high-speed deflection mirror system as claimed in claim 4, wherein a third recess is provided on an upper surface of said base body, and said photoelectric position detecting unit is disposed in said third recess; three fourth grooves are formed in the base body, and the first electromagnet, the second electromagnet and the third electromagnet are arranged on the base body respectively; a circular groove is formed in the central position of the base body, and the lower semicircular shell is arranged in the circular groove.
10. The electromagnetically driven high-speed deflection mirror system as claimed in claim 1, wherein an edge of said base extends upward to form a circular protrusion, and a top surface of said circular protrusion and a top surface of said lens holder are located on a same horizontal plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210333374.XA CN114791665A (en) | 2022-03-31 | 2022-03-31 | Electromagnetic drive type high-speed deflection mirror system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210333374.XA CN114791665A (en) | 2022-03-31 | 2022-03-31 | Electromagnetic drive type high-speed deflection mirror system |
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| CN114791665A true CN114791665A (en) | 2022-07-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202210333374.XA Pending CN114791665A (en) | 2022-03-31 | 2022-03-31 | Electromagnetic drive type high-speed deflection mirror system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116719145A (en) * | 2023-08-09 | 2023-09-08 | 北京瑞控信科技股份有限公司 | Two-dimensional non-frame large-angle quick reflector |
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2022
- 2022-03-31 CN CN202210333374.XA patent/CN114791665A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116719145A (en) * | 2023-08-09 | 2023-09-08 | 北京瑞控信科技股份有限公司 | Two-dimensional non-frame large-angle quick reflector |
| CN116719145B (en) * | 2023-08-09 | 2023-12-29 | 北京瑞控信科技股份有限公司 | Two-dimensional non-frame large-angle quick reflector |
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