CN114789273A - Method for processing reversed steps of gas distribution plate part - Google Patents
Method for processing reversed steps of gas distribution plate part Download PDFInfo
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- CN114789273A CN114789273A CN202210578196.7A CN202210578196A CN114789273A CN 114789273 A CN114789273 A CN 114789273A CN 202210578196 A CN202210578196 A CN 202210578196A CN 114789273 A CN114789273 A CN 114789273A
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- 238000009826 distribution Methods 0.000 title claims abstract description 62
- 238000000034 method Methods 0.000 title claims description 40
- 238000003801 milling Methods 0.000 claims abstract description 201
- 238000005520 cutting process Methods 0.000 claims abstract description 92
- 238000003672 processing method Methods 0.000 claims abstract description 14
- 238000003754 machining Methods 0.000 claims description 26
- 238000005498 polishing Methods 0.000 claims description 10
- 238000009966 trimming Methods 0.000 claims description 10
- 230000003139 buffering effect Effects 0.000 claims description 2
- 238000012986 modification Methods 0.000 claims 1
- 230000004048 modification Effects 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 8
- 239000010935 stainless steel Substances 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 238000007730 finishing process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C3/00—Milling particular work; Special milling operations; Machines therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C5/00—Milling-cutters
- B23C5/02—Milling-cutters characterised by the shape of the cutter
- B23C5/12—Cutters specially designed for producing particular profiles
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Abstract
The invention provides a processing method of a reversed step of a gas distribution plate part, which comprises the following steps: sequentially carrying out rough cutting treatment and fine cutting treatment on the surface of the gas distribution plate part; the rough cutting treatment comprises the steps of forming a groove on the surface of the gas distribution plate part by using a first milling cutter, and milling at least two cylindrical protrusions at the bottom of the groove; the fine cutting treatment comprises the step of respectively cutting and milling the cylindrical bulges by adopting a second milling cutter to form inverted steps; the rough cutting treatment and the fine cutting treatment are independently processed in a horizontal processing lathe respectively. The milling cutter with a specific structure is adopted, so that the operation is simple, the precision is high, and the processing efficiency is improved.
Description
Technical Field
The invention belongs to the technical field of semiconductor manufacturing, relates to processing of a gas distribution plate part, and particularly relates to a method for processing a reversed step of the gas distribution plate part.
Background
Chemical vapor deposition atomic layer deposition is a key step for preparing a thin film device in a semiconductor process, and conventional chemical vapor deposition equipment comprises a chemical substance gas distributor, wherein chemical substances participating in a reaction overflow from the gas distributor and finally enter a reaction area to be deposited on a semiconductor process piece. In the chemical vapor deposition process, the gas distribution plate needs to ensure good ventilation performance, so that the stability of the deposition process is ensured, but some small holes are positioned at the inverted step, the processing difficulty of the gas distribution plate part is increased, and the product failure is easily caused.
CN103208439A discloses a gas distribution heater for semiconductor medium etchers, comprising the following steps of processing a porous heating disk body made of high-purity aluminum alloy: two grooves for placing heating pipes are designed at the positions of the gas distribution heating plate close to the outer ring, and the depth and the width of the grooves are the same as the diameter of the heating pipes; the outlet of the heating pipe is designed into a bevel edge shape, which plays a role in guiding the heating pipe and can realize the whole-process close fit of the heating plate and the heating pipe; a plurality of uniformly distributed small holes with the same diameter are arranged on the gas distribution heating plate and are used for distributing plasma working gas; the gas distribution heating plate is divided into a base plate and a cover plate, a kidney-shaped opening is arranged at the position of the outlet of the heating pipe on the cover plate, and a sealing area is arranged at the periphery of the kidney-shaped opening.
CN103203590A discloses a new process for machining a gas distributor of a dielectric etching machine, which comprises determining the hole number, the hole diameter and the hole position data of the gas distributor as follows: according to the requirements of the gas distributor to be achieved during use, the external dimension, the diameter dimension, the number and the arrangement mode of the small holes of the gas distributor are determined, and the abrasion of a cutter in the machining process can slightly influence the working dimension. The processing of the small holes is generally carried out one by one according to the arrangement sequence of the small holes, and the small holes finally show the size rule that the first small hole has the largest diameter and then the small holes become smaller as the cutter is continuously worn.
CN110434549A discloses a method for processing V-shaped groove of stainless steel component for semiconductor, comprising the following steps: (1) early preparation: processing a stainless steel plate by a milling machine; (2) drilling a side surface: processing a plurality of deep drilled holes on the side surfaces of two sides between the upper surface and the lower surface of the stainless steel plate by using a deep hole drilling machine; (3) roughly machining a V-shaped groove; (4) solid solution aging treatment; (5) finely processing the V-shaped groove; (6) processing a water area constant-temperature hole groove; (7) correcting and leveling the stainless steel plate; (8) and detecting the size of the stainless steel plate.
In order to realize good ventilation performance of the gas distribution plate, a plurality of small holes which are uniformly distributed need to be formed on the surface of the gas distribution plate, but the manufacturing difficulty is increased because some small holes are positioned at the inverted step, and the process for forming the inverted step on the surface of the existing gas distribution plate is not ideal.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a method for processing the reversed steps of the gas distribution plate component, which adopts a milling cutter with a specific structure, solves the problem of processing the reversed steps in the gas distribution plate component of a semiconductor machine, is simple to operate and improves the processing efficiency.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a processing method of a reversed step of a gas distribution plate part, which comprises the following steps: sequentially carrying out rough cutting treatment and fine cutting treatment on the surface of the gas distribution plate part;
the rough cutting treatment comprises the steps of forming a groove on the surface of the gas distribution plate component by using a first milling cutter, and milling at least two cylindrical protrusions at the bottom of the groove;
the fine cutting treatment comprises the step of respectively cutting and milling the cylindrical bulges by adopting a second milling cutter to form inverted steps;
the rough cutting treatment and the fine cutting treatment are independently processed in a horizontal processing lathe respectively.
The method provided by the invention adopts the specific milling cutter, firstly carries out rough cutting treatment to remove the machining front allowance, avoids the problem that the second milling cutter cannot go deep to the bottom of the groove, and then generates a complete inverted step by adopting fine cutting treatment, thereby simplifying the operation steps, having high machining precision and improving the product quality.
As a preferable technical scheme of the invention, the rotation speed of the main shaft in the rough cutting treatment is 6400-6550 r/min, for example, 6400r/min, 6420r/min, 6450r/min, 6480r/min, 6500r/min, 6520r/min or 6550r/min, but the invention is not limited to the numerical values listed, and other numerical values not listed in the numerical value range are also applicable.
Preferably, the feed rate of the rough cutting treatment is 4700 to 6100mm/min, for example 4700mm/min, 4800mm/min, 5000mm/min, 5200mm/min, 5500mm/min, 5700mm/min, 5800mm/min, 6000mm/min or 6100mm/min, but is not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, the milling depth of the first milling cutter during the rough cutting process is 0.35 to 0.55mm each time, and may be, for example, 0.35mm, 0.37mm, 0.38mm, 0.40mm, 0.42mm, 0.45mm, 0.48mm, 0.50mm, 0.52mm, 0.53mm or 0.55mm, but is not limited to the enumerated values, and other non-enumerated values within the numerical range are also applicable.
In a preferred embodiment of the present invention, the diameter of the groove is 268 to 292mm, for example 268mm, 270mm, 272mm, 275mm, 278mm, 280mm, 284mm, 285mm, 288mm, 290mm or 292mm, but the groove is not limited to the above-mentioned values, and other values not listed in the above-mentioned range are also applicable.
Preferably, the depth of the groove is 22.5-24.8 mm, such as 22.5mm, 22.7mm, 23.0mm, 23.2mm, 23.3mm, 23.7mm, 24.0mm, 24.2mm, 24.5mm or 24.8mm, but not limited to the values listed, and other values not listed in the range are equally applicable.
Preferably, the diameter of the cylindrical protrusion is 6.4 to 8.5mm, for example 6.4mm, 6.5mm, 6.7mm, 7.0mm, 7.3mm, 7.5mm, 7.7mm, 8.0mm, 8.2mm or 8.5mm, but is not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, the height of the cylindrical protrusion is 11 to 14mm, and may be, for example, 11.0mm, 11.5mm, 11.7mm, 12.0mm, 12.5mm, 12.7mm, 13.0mm, 13.2mm, 13.6mm or 14.0mm, but is not limited to the recited values, and other values not recited in the range of values are also applicable.
In a preferred embodiment of the present invention, the spindle rotation speed of the finish cutting process is 2850 to 4000r/min, and may be, for example, 2850r/min, 2900r/min, 3000r/min, 3200r/min, 3500r/min, 3600r/min, 3700r/min, 3800r/min, 3900r/min or 4000r/min, but the present invention is not limited to the above-mentioned values, and other values not listed in the above-mentioned range are also applicable.
Preferably, the feed rate of the fine cutting treatment is 850 to 1200mm/min, for example, 850mm/min, 860mm/min, 880mm/min, 900mm/min, 920mm/min, 950mm/min, 1000mm/min, 1100mm/min, 1150mm/min, 1180mm/min or 1200mm/min, but is not limited to the values listed, and other values not listed in the range of values are also applicable.
Preferably, during the fine cutting process, the second milling cutter has a milling depth of 0.05 to 0.2mm each time, for example, 0.05mm, 0.06mm, 0.07mm, 0.08mm, 0.09mm, 0.10mm, 0.12mm, 0.13mm, 0.14mm, 0.16mm, 0.18mm or 0.20mm, but is not limited to the recited values, and other values not recited in the range of values are also applicable.
As a preferred technical solution of the present invention, the inverted step includes a step section and a smooth section extending upward from a bottom surface of the groove.
Preferably, the height of the stage is 5.5 to 7mm, for example 5.5mm, 5.6mm, 5.8mm, 6.0mm, 6.2mm, 6.5mm, 6.7mm or 7.0mm, but is not limited to the values listed and other values not listed in this range are equally applicable.
Preferably, the step section comprises a first end and a second end, the first end is connected with the groove, the second end is connected with the smooth section, and the diameter of the step section is gradually enlarged from the first end to one side of the second end.
Preferably, the diameter of the second end portion is greater than the diameter of the smooth section.
Preferably, the diameter of the second end portion is 6.4 to 8.5mm, and may be, for example, 6.4mm, 6.5mm, 6.7mm, 7.0mm, 7.3mm, 7.5mm, 7.7mm, 8.0mm, 8.2mm or 8.5mm, but is not limited to the values listed, and other values not listed in this range of values are equally applicable.
Preferably, the diameter of the smooth section is 5.2 to 7.2mm, for example 5.2mm, 5.5mm, 5.6mm, 5.8mm, 6.0mm, 6.2mm, 6.5mm, 6.7mm, 7.0mm or 7.2mm, but is not limited to the values listed, and other values not listed in this range of values are equally suitable.
As a preferred technical solution of the present invention, the first milling cutter is a helical-edge cylindrical milling cutter.
Preferably, the second milling cutter comprises a milling section, a buffer section, a divergent section and a fixed section which are connected in sequence, the cross section of the milling section is of a trapezoidal structure with gradually reduced width, the cross sections of the buffer section and the fixed section are of rectangular structures respectively, and the cross section of the divergent section is of a trapezoidal structure with gradually enlarged width.
Preferably, the height of the second milling cutter is 40-60 mm, for example, 40mm, 42mm, 45mm, 48mm, 50mm, 52mm, 55mm, 56mm, 58mm or 60mm, but not limited to the values listed, and other values not listed in the range of the values are also applicable.
Preferably, the height of the milled segments is 5.5 to 7mm, for example 5.5mm, 5.6mm, 5.8mm, 6.0mm, 6.2mm, 6.5mm, 6.7mm or 7.0mm, but not limited to the values listed, and other values not listed within this range are equally applicable.
Preferably, the height of the buffer section is 6.5 to 8.2mm, for example 6.5mm, 6.7mm, 7.0mm, 7.3mm, 7.5mm, 7.7mm, 8.0mm or 8.2mm, but is not limited to the recited values, and other values not recited in the range of values are equally applicable.
Preferably, the height of the divergent section is 2.2 to 3.4mm, for example 2.2mm, 2.4mm, 2.5mm, 2.6mm, 2.8mm, 3.0mm, 3.2mm or 3.4mm, but is not limited to the values listed, and other values not listed within this range are equally applicable.
As a preferred technical solution of the present invention, the fine cutting process includes: and tightly attaching the surface of one side, far away from the buffering section, of the milling section of the second milling cutter to the bottom surface of the groove, and tightly attaching the side wall of the milling section to the outer surface of the cylindrical bulge to process the stage and the smooth section.
As a preferable technical scheme of the invention, the processing main shaft in the horizontal processing lathe is horizontally arranged.
It should be noted that, the numerical control machining center is a high-efficiency automatic machine tool which is composed of mechanical equipment and a numerical control system and is suitable for machining complex parts. The comprehensive processing capacity is strong, a plurality of processing contents can be completed after the workpiece is clamped once, the processing precision is high, batch workpieces with medium processing difficulty can be processed, and the efficiency is 5-10 times that of common equipment. The main shaft of the horizontal processing center is in a horizontal state in space, and a T-shaped groove of the gas distribution plate component of the semiconductor machine component, which meets the use requirement, can be stably produced.
As a preferred embodiment of the present invention, the processing method further comprises: and after finishing the fine cutting treatment, performing fine trimming treatment on the surface of the inverted step.
Preferably, the finishing treatment is carried out by using a second milling cutter.
Preferably, the spindle speed of the finishing treatment is 2850 to 4000r/min, for example 2850r/min, 2900r/min, 3000r/min, 3200r/min, 3500r/min, 3600r/min, 3700r/min, 3800r/min, 3900r/min or 4000r/min, but is not limited to the values listed, and other values not listed in this range are equally applicable.
Preferably, the feed rate of the finishing treatment is 480 to 600mm/min, for example 480mm/min, 485mm/min, 490mm/min, 500mm/min, 520mm/min, 550mm/min, 580mm/min or 600mm/min, but not limited to the values listed, and other values not listed in this range are equally applicable.
Preferably, in the finishing process, the milling depth of the second milling cutter is 0.05 to 0.2mm each time, and may be, for example, 0.05mm, 0.06mm, 0.07mm, 0.08mm, 0.09mm, 0.10mm, 0.12mm, 0.13mm, 0.14mm, 0.16mm, 0.18mm or 0.20mm, but is not limited to the enumerated values, and other unrecited values within the numerical range are also applicable.
Preferably, the processing method further comprises: and after finishing the fine cutting treatment, performing at least one polishing treatment on the surface of the inverted step.
As a preferred technical scheme of the invention, the processing method specifically comprises the following steps:
fixing a gas distribution disc component to be processed in a horizontal processing lathe, roughly cutting the surface of the gas distribution disc component by using a first milling cutter to form a groove, and milling at least two cylindrical protrusions at the bottom of the groove, wherein the rotating speed of a main shaft for rough cutting is 6400-6550 r/min, the feeding amount is 4700-6100 mm/min, and the milling depth of the first milling cutter is 0.35-0.55 mm each time;
(II) respectively carrying out fine cutting treatment on the at least two cylindrical protrusions in the step (I), enabling the surface of one side, away from the buffer section, of the milling section of the second milling cutter to be tightly attached to the bottom surface of the groove, enabling the side wall of the milling section to be tightly attached to the outer surface of the cylindrical protrusion to carry out cutting in a stage and a smooth section, wherein the rotating speed of a main shaft for the fine cutting treatment is 2850-4000 r/min, the feeding amount is 850-1200 mm/min, and the cutting depth of the second milling cutter is 0.05-0.2 mm each time;
and (III) after finishing the fine cutting treatment in the step (II), performing fine trimming treatment by using a second milling cutter, wherein the rotating speed of a main shaft of the fine trimming treatment is 2850-4000 r/min, the feeding amount is 480-600 mm/min, the milling depth of the second milling cutter is 0.05-0.2 mm each time, and then performing at least one polishing treatment on the surface of the inverted step to finish the processing.
The numerical ranges set forth herein include not only the recited values but also any values between the recited numerical ranges not enumerated herein, and are not intended to be exhaustive or otherwise clear from the intended disclosure of the invention in view of brevity and clarity.
Compared with the prior art, the invention has the beneficial effects that:
according to the method for processing the inverted-buckle-type step of the gas distribution plate component, provided by the invention, the milling cutter with a specific structure is adopted, firstly, rough cutting treatment is carried out to remove the machining front allowance, the problem that a second milling cutter cannot go deep to the bottom of the groove is avoided, and then, fine cutting treatment is adopted to generate the complete inverted-buckle-type step, so that the problem of processing the inverted-buckle-type step in the gas distribution plate component of a semiconductor machine is solved, the operation steps are simplified, the processing precision is high, and the product quality is improved.
Drawings
FIG. 1 is a schematic structural view of a gas distribution plate member provided in embodiment 1 of the present invention;
fig. 2 is a schematic structural view of an inverted step provided in embodiment 1 of the present invention;
fig. 3 is a schematic structural diagram of a second milling cutter provided in embodiment 1 of the present invention.
Wherein, 1-gas distribution plate part; 2-groove; 3-a reversed step; 4-stage; 5-a smoothing section; 6-milling and cutting into sections; 7-a buffer section; 8-a divergent section; 9-fixed section.
Detailed Description
It is to be understood that in the description of the present invention, the terms "central," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the present invention and to simplify the description, but are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner and therefore are not to be construed as limiting the invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
It should be noted that, in the description of the present invention, unless otherwise explicitly specified or limited, the terms "disposed," "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
In one embodiment, the invention provides a method for processing a reversed step 3 of a gas distribution plate part 1, which specifically comprises the following steps:
(1) fixing a gas distribution disc component 1 to be processed in a horizontal processing lathe, roughly cutting the surface of the gas distribution disc component 1 by adopting a first milling cutter to form a groove 2, and milling at least two cylindrical protrusions at the bottom of the groove 2, wherein the rotating speed of a main shaft for roughly cutting is 6400-6550 r/min, the feeding amount is 4700-6100 mm/min, and the milling depth of the first milling cutter is 0.35-0.55 mm each time;
(2) respectively carrying out fine cutting treatment on at least two cylindrical bulges in the step (1), enabling the surface of one side, far away from a buffer section 7, of a milling section 6 of a second milling cutter to be tightly attached to the surface of the bottom of the groove 2, and enabling the side wall of the milling section 6 to be tightly attached to the outer surface of the cylindrical bulge to carry out milling of a bench stage 4 and a smooth section 5, wherein the rotating speed of a main shaft subjected to fine cutting treatment is 2850-4000 r/min, the feeding amount is 850-1200 mm/min, and the milling depth of the second milling cutter is 0.05-0.2 mm each time;
(3) and (3) after finishing the fine cutting treatment in the step (2), performing fine finishing treatment by using a second milling cutter, wherein the rotating speed of a main shaft of the fine finishing treatment is 2850-4000 r/min, the feeding amount is 480-600 mm/min, the milling depth of the second milling cutter is 0.05-0.2 mm each time, and then performing at least one polishing treatment on the surface of the reversed step 3 to finish the processing.
Example 1
The present embodiment provides a gas distribution plate member 1, as shown in fig. 1, twelve inverted steps 3 with a height of 12.7mm are disposed at an inner circle of the gas distribution plate member, as shown in fig. 2, each inverted step 3 includes a step section 4 and a smooth section 5, the height of the step section 4 is 6.4mm, the step section 4 includes a first end and a second end, the diameter of the step section 4 gradually expands from the first end to one side of the second end, the diameter of the first end is 6.3mm, the diameter of the second end is 7.6mm, and the diameter of the smooth section 5 is 6.3 mm.
The machining process of the reverse-type step 3 adopts a first milling cutter and a second milling cutter as shown in fig. 3. The first milling cutter is a spiral blade cylindrical milling cutter. The second milling cutter comprises a milling section 6, a buffer section 7, a gradually expanding section 8 and a fixed section 9 which are sequentially connected, the cross section of the milling section 6 is of a trapezoidal structure with gradually reduced width, the cross sections of the buffer section 7 and the fixed section 9 are respectively of a rectangular structure, and the cross section of the gradually expanding section 8 is of a trapezoidal structure with gradually expanded width. The height of the second milling cutter is 54mm, the height of the milling section 6 is 6.4mm, the height of the buffer section 7 is 7mm, and the height of the divergent section 8 is 2.8 mm.
The method of processing the reverse step 3 is as follows:
(1) fixing a gas distribution disc component 1 to be processed in a horizontal processing lathe, roughly cutting the surface of the gas distribution disc component 1 by using a first milling cutter to form a groove 2, wherein the diameter of the groove 2 is 284mm, the depth of the groove 2 is 23.6mm, twelve cylindrical protrusions are milled at the bottom of the groove 2, the diameter of each cylindrical protrusion is 7.6mm, the height of each cylindrical protrusion is 12.7mm, the rotating speed of a main shaft subjected to rough cutting is 6500r/min, the feeding amount is 5100mm/min, and the milling depth of the first milling cutter is 0.42mm each time;
(2) respectively carrying out fine cutting treatment on each cylindrical protrusion in the step (1), enabling the surface of one side, far away from the buffer section 7, of the milling section 6 of the second milling cutter to be tightly attached to the bottom surface of the groove 2, enabling the side wall of the milling section 6 to be tightly attached to the outer surface of each cylindrical protrusion to carry out milling of the stage 4 and the smooth section 5, wherein the rotating speed of a spindle subjected to fine cutting treatment is 3600r/min, the feeding amount is 980mm/min, and the milling depth of the second milling cutter is 0.1mm each time;
(3) and (3) after finishing the fine cutting treatment in the step (2), performing fine finishing treatment by using a second milling cutter, wherein the rotating speed of a main shaft of the fine finishing treatment is 3600r/min, the feeding amount is 500mm/min, and the milling depth of the second milling cutter is 0.1mm each time, and then performing polishing treatment on the surface of the reversed step 3 once to finish machining.
The processing method provided by the embodiment is adopted to process a plurality of gas distribution plate parts 1, the product yield after processing is 99%, the average surface roughness of the step section 4 of the inverted step 3 is 0.3 μm, and the average surface roughness of the smooth section 5 is 0.31 μm.
Example 2
The embodiment provides a gas distribution plate part 1, its inner circle department is provided with fourteen back-off type steps 3 that highly is 11mm, back-off type step 3 includes stage 4 and smooth section 5, the height of step section 4 is 5.5mm, step section 4 includes first end and second end, the diameter of step section 4 is gradually expanded by one side of first end to the second end, the diameter of its first end is 5.2mm, the diameter of second end is 6.4mm, the diameter of smooth section 5 is 5.2 mm.
A first milling cutter and a second milling cutter are adopted in the machining process of the reverse-buckling step 3. The first milling cutter is a spiral blade cylindrical milling cutter. The second milling cutter comprises a milling section 6, a buffer section 7, a gradually expanding section 8 and a fixed section 9 which are sequentially connected, the cross section of the milling section 6 is of a trapezoid structure with gradually reduced width, the cross sections of the buffer section 7 and the fixed section 9 are of rectangular structures respectively, and the cross section of the gradually expanding section 8 is of a trapezoid structure with gradually expanded width. The height of the second milling cutter is 42mm, the height of the milling section 6 is 5.5mm, the height of the buffer section 7 is 6.8mm, and the height of the divergent section 8 is 2.2 mm.
The method of processing the reverse step 3 is as follows:
(1) fixing a gas distribution disk component 1 to be processed in a horizontal processing lathe, roughly cutting the surface of the gas distribution disk component 1 by using a first milling cutter to form a groove 2, wherein the diameter of the groove 2 is 270mm, the depth of the groove 2 is 22.5mm, fourteen cylindrical bulges are milled at the bottom of the groove 2, the diameter of each cylindrical bulge is 6.4mm, the height of each cylindrical bulge is 11mm, the rotating speed of a main shaft for roughly cutting is 6400r/min, the feeding amount is 4700mm/min, and the milling depth of the first milling cutter is 0.35mm each time;
(2) performing fine cutting treatment on each cylindrical protrusion in the step (1), enabling the surface of one side, far away from the buffer section 7, of the milling section 6 of the second milling cutter to be tightly attached to the bottom surface of the groove 2, enabling the side wall of the milling section 6 to be tightly attached to the outer surface of the cylindrical protrusion, and performing milling of the stage 4 and the smooth section 5, wherein the rotating speed of a main shaft subjected to fine cutting treatment is 2850r/min, the feeding amount is 850mm/min, and the milling depth of the second milling cutter is 0.05mm each time;
(3) and (3) after finishing the finish cutting treatment in the step (2), performing finish cutting treatment by using a second milling cutter, wherein the rotating speed of a main shaft subjected to the finish cutting treatment is 2850r/min, the feed rate is 480mm/min, and the milling depth of the second milling cutter is 0.05mm each time, and then performing polishing treatment twice on the surface of the inverted step 3 to finish the processing.
The processing method provided by the embodiment is adopted to process a plurality of gas distribution plate parts 1, the product yield after processing is 98.2%, the average surface roughness of the step section 4 of the inverted step 3 is 0.36 μm, and the average surface roughness of the smooth section 5 is 0.36 μm.
Example 3
The embodiment provides a gas distribution plate part 1, its inner circle department is provided with fourteen back-off type steps 3 that highly is 12mm, back-off type step 3 includes stage 4 and smooth section 5, the height of stage 4 is 6mm, stage 4 includes first end and second end, the diameter of stage 4 is gradually expanded by one side of first end to the second end, the diameter of its first end is 5.8mm, the diameter of second end is 7mm, the diameter of smooth section 5 is 5.8 mm.
And a first milling cutter and a second milling cutter are adopted in the machining process of the inverted step 3. The first milling cutter is a spiral blade cylindrical milling cutter. The second milling cutter comprises a milling section 6, a buffer section 7, a gradually expanding section 8 and a fixed section 9 which are sequentially connected, the cross section of the milling section 6 is of a trapezoidal structure with gradually reduced width, the cross sections of the buffer section 7 and the fixed section 9 are respectively of a rectangular structure, and the cross section of the gradually expanding section 8 is of a trapezoidal structure with gradually expanded width. The height of the second milling cutter is 48mm, the height of the milling section 6 is 6mm, the height of the buffer section 7 is 7.2mm, and the height of the divergent section 8 is 2.6 mm.
The method of processing the reverse step 3 is as follows:
(1) fixing a gas distribution disk component 1 to be processed in a horizontal processing lathe, roughly cutting the surface of the gas distribution disk component 1 by adopting a first milling cutter to form a groove 2, wherein the diameter of the groove 2 is 280mm, the depth of the groove 2 is 23mm, fourteen cylindrical bulges are milled at the bottom of the groove 2, the diameter of each cylindrical bulge is 7mm, the height of each cylindrical bulge is 12mm, the rotating speed of a main shaft for roughly cutting is 6450r/min, the feeding amount is 4900mm/min, and the milling depth of the first milling cutter is 0.42mm each time;
(2) respectively carrying out fine cutting treatment on each cylindrical protrusion in the step (1), enabling the surface of one side, away from the buffer section 7, of the milling section 6 of the second milling cutter to be tightly attached to the surface of the bottom of the groove 2, enabling the side wall of the milling section 6 to be tightly attached to the outer surface of each cylindrical protrusion, and carrying out milling in a stage 4 and a smooth section 5, wherein the rotating speed of a main shaft subjected to fine cutting treatment is 3000r/min, the feeding amount is 900mm/min, and the milling depth of the second milling cutter is 0.08mm each time;
(3) and (3) after finishing the finish cutting treatment in the step (2), performing finish cutting treatment by using a second milling cutter, wherein the rotating speed of a main shaft subjected to the finish cutting treatment is 3000r/min, the feed rate is 500mm/min, the milling depth of the second milling cutter is 0.08mm each time, and then performing polishing treatment on the surface of the inverted step 3 once to finish the machining.
The processing method provided by the embodiment is adopted to process a plurality of gas distribution plate parts 1, the product yield after processing is 98.6%, the average surface roughness of the step section 4 of the inverted step 3 is 0.34 μm, and the average surface roughness of the smooth section 5 is 0.33 μm.
Example 4
The embodiment provides a gas distribution plate part 1, its inner circle department is provided with twelve back-off type steps 3 that height is 13.2mm, back-off type step 3 includes stage 4 and smooth section 5, the height of step section 4 is 6.5mm, step section 4 includes first end and second end, the diameter of step section 4 is gradually expanded by one side of first end to second end, the diameter of its first end is 6.8mm, the diameter of second end is 8mm, the diameter of smooth section 5 is 6.8 mm.
A first milling cutter and a second milling cutter are adopted in the machining process of the reverse-buckling step 3. The first milling cutter is a spiral blade cylindrical milling cutter. The second milling cutter comprises a milling section 6, a buffer section 7, a gradually expanding section 8 and a fixed section 9 which are sequentially connected, the cross section of the milling section 6 is of a trapezoidal structure with gradually reduced width, the cross sections of the buffer section 7 and the fixed section 9 are respectively of a rectangular structure, and the cross section of the gradually expanding section 8 is of a trapezoidal structure with gradually expanded width. The height of the second milling cutter is 56mm, the height of the milling section 6 is 6.5mm, the height of the buffer section 7 is 7.8mm, and the height of the divergent section 8 is 3.2 mm.
The method of processing the reverse step 3 is as follows:
(1) fixing a gas distribution disc component 1 to be processed in a horizontal processing lathe, roughly cutting the surface of the gas distribution disc component 1 by using a first milling cutter to form a groove 2, wherein the diameter of the groove 2 is 285mm, the depth of the groove 2 is 24.2mm, twelve cylindrical protrusions are milled at the bottom of the groove 2, the diameter of each cylindrical protrusion is 8mm, the height of each cylindrical protrusion is 13.2mm, the rotating speed of a main shaft for roughly cutting is 6500r/min, the feeding amount is 5650mm/min, and the milling depth of the first milling cutter is 0.5mm each time;
(2) respectively carrying out fine cutting treatment on each cylindrical protrusion in the step (1), enabling the surface of one side, away from the buffer section 7, of the milling section 6 of the second milling cutter to be tightly attached to the bottom surface of the groove 2, enabling the side wall of the milling section 6 to be tightly attached to the outer surface of each cylindrical protrusion to carry out milling of the stage 4 and the smooth section 5, wherein the rotating speed of a main shaft subjected to fine cutting treatment is 3500r/min, the feeding amount is 1100mm/min, and the milling depth of the second milling cutter is 0.12mm each time;
(3) and (3) after finishing the finish cutting treatment in the step (2), performing finish cutting treatment by using a second milling cutter, wherein the rotation speed of a main shaft subjected to finish cutting treatment is 3500r/min, the feed rate is 500mm/min, the milling depth of the second milling cutter is 0.12mm each time, and then performing polishing treatment on the surface of the inverted step 3 once to finish machining.
The processing method provided by the embodiment is adopted to process a plurality of gas distribution plate parts 1, the product yield after processing is 98.8%, the average surface roughness of the step section 4 of the inverted step 3 is 0.33 μm, and the average surface roughness of the smooth section 5 is 0.34 μm.
Example 5
The embodiment provides a gas distribution plate part 1, its inner circle department is provided with twelve back-off type steps 3 that height is 14mm, back-off type step 3 includes stage 4 and smooth section 5, the height of stage 4 is 7mm, stage 4 includes first end and second end, the diameter of stage 4 is gradually expanded by one side of first end to the second end, the diameter of its first end is 7.2mm, the diameter of second end is 8.5mm, the diameter of smooth section 5 is 7.2 mm.
A first milling cutter and a second milling cutter are adopted in the machining process of the reverse-buckling step 3. The first milling cutter is a spiral blade cylindrical milling cutter. The second milling cutter comprises a milling section 6, a buffer section 7, a gradually expanding section 8 and a fixed section 9 which are sequentially connected, the cross section of the milling section 6 is of a trapezoidal structure with gradually reduced width, the cross sections of the buffer section 7 and the fixed section 9 are respectively of a rectangular structure, and the cross section of the gradually expanding section 8 is of a trapezoidal structure with gradually expanded width. The height of the second milling cutter is 60mm, the height of the milling section 6 is 7mm, the height of the buffer section 7 is 8.2mm, and the height of the divergent section 8 is 3.4 mm.
The method of processing the reverse step 3 is as follows:
(1) fixing a gas distribution disk component 1 to be processed in a horizontal processing lathe, roughly cutting the surface of the gas distribution disk component 1 by using a first milling cutter to form a groove 2, wherein the diameter of the groove 2 is 292mm, the depth of the groove 2 is 24.8mm, twelve cylindrical protrusions are milled at the bottom of the groove 2, the diameter of each cylindrical protrusion is 8.5mm, the height of each cylindrical protrusion is 14mm, the rotating speed of a main shaft subjected to rough cutting is 6550r/min, the feeding amount is 6000mm/min, and the milling depth of the first milling cutter is 0.53mm each time;
(2) respectively carrying out fine cutting treatment on each cylindrical protrusion in the step (1), enabling the surface of one side, away from the buffer section 7, of the milling section 6 of the second milling cutter to be tightly attached to the bottom surface of the groove 2, enabling the side wall of the milling section 6 to be tightly attached to the outer surface of each cylindrical protrusion to carry out milling of the stage 4 and the smooth section 5, wherein the rotating speed of a spindle subjected to fine cutting treatment is 4000r/min, the feeding amount is 1200mm/min, and the milling depth of the second milling cutter is 0.18mm each time;
(3) and (3) after finishing the fine cutting treatment in the step (2), performing fine trimming treatment by using a second milling cutter, wherein the rotating speed of a main shaft of the fine trimming treatment is 4000r/min, the feeding amount is 600mm/min, the milling depth of the second milling cutter is 0.18mm each time, and then performing polishing treatment on the surface of the reversed step 3 once to finish machining.
The processing method provided by the embodiment is adopted to process a plurality of gas distribution plate parts 1, the product yield after processing is 98.3%, the average surface roughness of the step section 4 of the inverted step 3 is 0.33 μm, and the average surface roughness of the smooth section 5 is 0.33 μm.
Example 6
The present embodiment provides a gas distribution plate member 1, which is different from embodiment 1 in that: in the preparation process of the reversed step 3, the finishing process is not set, and the rest of the operating conditions and the process parameters are completely the same as those of the example 1.
The processing method provided by the embodiment is adopted to process a plurality of gas distribution plate parts 1, the product yield after processing is 87.2%, the average surface roughness of the step section 4 of the inverted step 3 is 0.45 μm, and the average surface roughness of the smooth section 5 is 0.47 μm.
Comparative example 1
This comparative example provides a gas distribution plate member 1, differing from example 1 in that: in the preparation process of the inverted step 3, a first milling cutter is adopted for milling the step section 4 and the smooth section 5 in the step (2), and the rest of operating conditions and process parameters are completely the same as those in the example 1.
The processing method provided by the comparative example is adopted to process a plurality of gas distribution plate parts 1, the product yield after processing is 78.3%, the average surface roughness of the step section 4 of the inverted step 3 is 0.53 μm, and the average surface roughness of the smooth section 5 is 0.36 μm.
As can be seen from the examples 1 to 5, the reversed step 3 of the gas distribution plate component 1 obtained by the processing method provided by the invention has the advantages of product percent of pass of more than 98%, smooth outer surface, roughness of less than 0.4 μm, high processing precision and high product quality. Comparing example 1 with example 6, it can be seen that the outer surface of the reversed step 3 cannot be effectively finished without finishing treatment during the processing, which results in unsmooth surface of the product and reduces the yield of the product. As can be seen from the embodiment 1 and the comparative example 1, when the second milling cutter is used for milling the step section 4 of the inverted-buckle-shaped step 3, the milling section 6 of the second milling cutter is matched with the step section 4 in structure, so that the required step structure can be stably processed, the roughness of the outer surface of the product is reduced, and the processing precision of the product is improved.
The applicant declares that the above description is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be understood by those skilled in the art that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are within the scope and disclosure of the present invention.
Claims (10)
1. A method for processing a reversed step of a gas distribution plate component is characterized by comprising the following steps: carrying out rough cutting treatment and fine cutting treatment on the surface of the gas distribution plate part in sequence;
the rough cutting treatment comprises the steps of forming a groove on the surface of the gas distribution plate component by using a first milling cutter, and milling at least two cylindrical protrusions at the bottom of the groove;
the fine cutting treatment comprises the step of respectively milling the cylindrical bulges by adopting a second milling cutter to form inverted steps;
the rough cutting treatment and the fine cutting treatment are independently processed in a horizontal processing lathe respectively.
2. The machining method according to claim 1, wherein a spindle rotation speed of the rough cutting process is 6400 to 6550 r/min;
preferably, the feeding amount of the rough cutting treatment is 4700-6100 mm/min;
preferably, in the rough cutting process, the milling depth of the first milling cutter is 0.35-0.55 mm each time.
3. The machining method according to claim 1 or 2, wherein the diameter of the groove is 268 to 292 mm;
preferably, the depth of the groove is 22.5-24.8 mm;
preferably, the diameter of the cylindrical protrusion is 6.4-8.5 mm;
preferably, the height of the cylindrical protrusion is 11-14 mm.
4. The machining method according to any one of claims 1 to 3, wherein the rotation speed of the main shaft for the finish cutting treatment is 2850 to 4000 r/min;
preferably, the feeding amount of the fine cutting treatment is 850-1200 mm/min;
preferably, in the fine cutting process, the milling depth of the second milling cutter is 0.05-0.2 mm each time.
5. The machining method according to any one of claims 1 to 4, wherein the inverted step includes a step section and a smooth section extending upward from the bottom surface of the groove;
preferably, the height of the stage is 5.5-7 mm;
preferably, the step section comprises a first end and a second end, the first end is connected with the groove, the second end is connected with the smooth section, and the diameter of the step section is gradually enlarged from the first end to one side of the second end;
preferably, the diameter of the second end portion is greater than the diameter of the smooth section;
preferably, the diameter of the second end part is 6.4-8.5 mm;
preferably, the diameter of the smooth section is 5.2-7.2 mm.
6. A method of machining according to any one of claims 1 to 5, wherein the first milling cutter is a helical-edge cylindrical milling cutter;
preferably, the second milling cutter comprises a milling section, a buffer section, a divergent section and a fixed section which are connected in sequence, the cross section of the milling section is of a trapezoidal structure with gradually reduced width, the cross sections of the buffer section and the fixed section are respectively of a rectangular structure, and the cross section of the divergent section is of a trapezoidal structure with gradually enlarged width;
preferably, the height of the second milling cutter is 40-60 mm;
preferably, the height of the milling section is 5.5-7 mm;
preferably, the height of the buffer section is 6.5-8.2 mm;
preferably, the height of the divergent section is 2.2-3.4 mm.
7. The machining method according to claim 6, wherein the finish-cutting process comprises: and tightly attaching the surface of one side, far away from the buffering section, of the milling section of the second milling cutter to the bottom surface of the groove, and tightly attaching the side wall of the milling section to the outer surface of the cylindrical bulge to process the stage and the smooth section.
8. The machining method according to any one of claims 1 to 7, wherein the machining spindle in the horizontal machining lathe is disposed horizontally.
9. The process of any one of claims 1 to 8, further comprising: after finishing the fine cutting treatment, performing fine trimming treatment on the surface of the inverted step;
preferably, the finishing treatment is carried out by adopting a second milling cutter;
preferably, the rotating speed of the main shaft subjected to the fine trimming treatment is 2850-4000 r/min;
preferably, the feeding amount of the fine trimming treatment is 480-600 mm/min;
preferably, in the fine modification treatment, the milling depth of the second milling cutter is 0.05-0.2 mm each time;
preferably, the processing method further comprises: and after finishing the fine cutting treatment, performing at least one polishing treatment on the surface of the reversed step.
10. The machining method according to any one of claims 1 to 9, characterized in that it comprises in particular the steps of:
fixing a gas distribution disc component to be processed in a horizontal processing lathe, roughly cutting the surface of the gas distribution disc component by adopting a first milling cutter to form a groove, and milling at least two cylindrical protrusions at the bottom of the groove, wherein the rotating speed of a main shaft for roughly cutting is 6400-6550 r/min, the feeding amount is 4700-6100 mm/min, and the milling depth of the first milling cutter is 0.35-0.55 mm each time;
(II) respectively carrying out fine cutting treatment on the at least two cylindrical protrusions in the step (I), enabling the surface of one side, away from the buffer section, of the milling section of the second milling cutter to be tightly attached to the bottom surface of the groove, and enabling the side wall of the milling section to be tightly attached to the outer surface of the cylindrical protrusion to carry out cutting in a bench stage and a smooth section, wherein the rotating speed of a spindle for the fine cutting treatment is 2850-4000 r/min, the feeding amount is 850-1200 mm/min, and the milling depth of the second milling cutter is 0.05-0.2 mm each time;
and (III) after finishing the fine cutting treatment in the step (II), performing fine trimming treatment by using a second milling cutter, wherein the rotating speed of a main shaft of the fine trimming treatment is 2850-4000 r/min, the feeding amount is 480-600 mm/min, the milling depth of the second milling cutter is 0.05-0.2 mm each time, and then performing at least one polishing treatment on the surface of the inverted step to finish the processing.
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| CN202210578196.7A CN114789273A (en) | 2022-05-25 | 2022-05-25 | Method for processing reversed steps of gas distribution plate part |
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| CN202210578196.7A CN114789273A (en) | 2022-05-25 | 2022-05-25 | Method for processing reversed steps of gas distribution plate part |
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