CN114779464A - Optical signal modulator, control method and projection equipment - Google Patents

Optical signal modulator, control method and projection equipment Download PDF

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Publication number
CN114779464A
CN114779464A CN202210569470.4A CN202210569470A CN114779464A CN 114779464 A CN114779464 A CN 114779464A CN 202210569470 A CN202210569470 A CN 202210569470A CN 114779464 A CN114779464 A CN 114779464A
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CN
China
Prior art keywords
optical signal
substrate
signal modulation
angle adjusting
angle
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CN202210569470.4A
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Chinese (zh)
Inventor
刘禹杉
许哲睿
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Beijing Youzhuju Network Technology Co Ltd
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Beijing Youzhuju Network Technology Co Ltd
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Priority to CN202210569470.4A priority Critical patent/CN114779464A/en
Publication of CN114779464A publication Critical patent/CN114779464A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • G02B27/0101Head-up displays characterised by optical features
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/005Projectors using an electronic spatial light modulator but not peculiar thereto
    • G03B21/008Projectors using an electronic spatial light modulator but not peculiar thereto using micromirror devices

Abstract

The present disclosure relates to an optical signal modulator, a control method, and a projection apparatus, the optical signal modulator including: the optical signal modulation device comprises a substrate, a plurality of optical signal modulation units and a plurality of optical signal transmission units, wherein the optical signal modulation units are arranged in an array; the optical signal modulation unit comprises a reflector and at least one angle adjustment module; the angle adjusting module comprises an angle adjusting piece and a control unit, wherein the angle adjusting piece is positioned between the substrate and the reflecting mirror to support the reflecting mirror; the angle adjusting piece can move relative to the substrate; the control unit is used for outputting an analog control signal and controlling the angle adjusting piece to move so as to continuously change the included angle between the plane of the reflector and the plane of the substrate. The pulse width modulation is not needed, a complex pulse width adjustment driving circuit is not needed, and the manufacturing difficulty of the optical signal modulator can be reduced. In addition, the probability of poor display problems such as light leakage, color cast and the like in the working process of the optical signal modulator can be reduced, and the image quality of display equipment comprising the display optical signal modulator is improved.

Description

Optical signal modulator, control method and projection equipment
Technical Field
The present disclosure relates to the field of projection technologies, and in particular, to an optical signal modulator, a control method, and a projection apparatus.
Background
A Digital Micromirror Device (DMD), which is an optical signal modulator, is a core part of Digital Light Processing (DLP). The digital micro-mirror device consists of a CMOS substrate and a deflectable reflector on the CMOS substrate, and the reflector can deflect +/-10 degrees or +/-12 degrees under the action of electromagnetic force. This mode of operation will form three digital modes of operation "1", "0" and "-1". During the display process, the deflection state of the mirror is controlled by the driving circuit on the CMOS substrate, and fast pixel switches are formed. And then, the time duty ratio of the pixel switch is rapidly controlled in a Pulse Width Modulation (PWM) mode, and different gray scales are obtained in a brightness integration mode by utilizing the characteristic of human vision residue.
In the working process of the digital micromirror device, the reflector has only three deflection states, so that digital modulation can be carried out only by utilizing a pulse width modulation mode to obtain different gray scale brightness. In order to realize the pulse width adjustment, a very complicated pulse width modulation driving circuit is needed to realize the rapid change of different gray scales in the display process. In addition, due to the tolerance of the mechanical structure, the deflection control method of the reflector is easy to cause the phenomena of light leakage, color cast and the like, thereby causing the abnormity of the display screen.
Disclosure of Invention
To solve the above technical problem or to at least partially solve the above technical problem, the present disclosure provides an optical signal modulator, a control method, and a projection apparatus.
In a first aspect, the present disclosure provides an optical signal modulator comprising: the optical signal modulation device comprises a substrate, wherein a plurality of optical signal modulation units arranged in an array are arranged on the substrate;
the optical signal modulation unit comprises a reflector and at least one angle adjustment module; the angle adjusting module comprises an angle adjusting piece and a control unit, wherein the angle adjusting piece is positioned between the substrate and the reflecting mirror to support the reflecting mirror; the angle adjusting piece can move relative to the substrate; the control unit is used for outputting an analog control signal and controlling the angle adjusting piece to move so as to continuously change the included angle between the plane where the reflector is located and the plane where the substrate is located.
Furthermore, the first end of the angle adjusting piece is fixed with the substrate, and the second end of the angle adjusting piece is abutted against the reflector; the angle adjusting piece can do telescopic motion along a first direction, and the first direction is crossed with the plane of the substrate.
Further, the optical signal modulation unit includes two angle adjustment modules; the optical signal modulation unit further comprises a supporting piece, one end of the supporting piece is fixed with the substrate, and the other end of the supporting piece is fixed with the reflector and used for limiting the reflector in an area where the corresponding optical signal modulation unit is located; the length of the support part in the direction vertical to the plane of the substrate is fixed;
the two angle adjusting pieces are respectively arranged on two sides of the supporting piece.
Further, the material of the angle adjuster comprises an electrostrictive material.
Further, the material of the angle adjusting piece comprises piezoelectric ceramics.
Further, the material of the angle adjusting piece comprises barium titanate and/or lead zirconate titanate.
Further, the substrate further comprises a plurality of scanning lines and a plurality of data lines; the plurality of scanning lines and the plurality of data lines are crossed to define a plurality of optical signal modulation areas, and the optical signal modulation units are positioned in the optical signal modulation areas;
any one of the control units corresponds to one of the scanning lines and one of the data lines, and the control unit comprises a control switch and a common electrode; the control end of the control switch is electrically connected with the scanning line corresponding to the control end, the input end of the control switch is electrically connected with the data line corresponding to the control end, and the angle adjusting piece is coupled between the output end of the control switch and the common electrode.
Further, the control unit further comprises a storage capacitor;
the storage capacitor and the angle adjusting piece are connected in parallel between the output end of the control switch and the common electrode.
Furthermore, each control switch in the same row of the optical signal modulation units corresponds to the same scanning line; the control switches in the optical signal modulation units in different rows correspond to different scanning lines;
and the time interval for loading scanning signals to the scanning lines corresponding to the two adjacent rows of the optical signal modulation units is greater than a set threshold value.
In a second aspect, the present disclosure also provides a control method of an optical signal modulator, which is applied to the optical signal modulator provided in the first aspect, and includes:
acquiring an image to be displayed;
determining a gray value corresponding to each optical signal modulation unit based on the image to be displayed;
determining a target included angle between the plane of the reflector in each optical signal modulation unit and the plane of the substrate based on the gray value corresponding to each optical signal modulation unit;
and controlling the angle adjusting piece in each optical signal modulation unit to move through a control unit in each optical signal modulation unit so as to enable an included angle between the substrate and the reflector in each optical signal modulation unit to be the target included angle.
In a third aspect, the present disclosure also provides a projection apparatus comprising the optical signal modulator provided in the first aspect.
Further, the projection device is an augmented reality device.
Compared with the prior art, the technical scheme provided by the embodiment of the disclosure has the following advantages:
in the technical scheme provided by the embodiment of the disclosure, the control unit is used for outputting an analog control signal and controlling the movement of the angle adjusting piece so as to continuously change the included angle between the plane of the reflector and the plane of the substrate. When the angle between the plane of the mirror and the plane of the substrate changes, the angle of reflection of the light rays striking the mirror changes. Obviously, if the reflection angles of the light rays irradiating the reflector are different, the reflected light emitted by the optical signal modulation unit carries different gray scale information. Therefore, the essence of the technical solution provided by the embodiments of the present disclosure is to provide a new optical signal modulator. By adopting the optical signal modulator, the included angle between the plane where the reflector is located and the plane where the substrate is located is changed by controlling the movement of the angle adjusting piece, so that different gray scale brightness is obtained. Because the optical signal modulator belongs to analog modulation instead of digital modulation, the pulse width modulation is not needed, and a complex pulse width adjustment driving circuit is not needed, so that the manufacturing difficulty of the optical signal modulator can be reduced. In addition, the technical scheme provided by the embodiment of the disclosure can realize controllable precision of the included angle between the plane where the reflector is located and the plane where the substrate is located, can reduce the probability of poor display problems such as light leakage and color cast in the work of the optical signal modulator, and improves the image quality of the display device comprising the optical signal modulator.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and together with the description, serve to explain the principles of the disclosure.
In order to more clearly illustrate the embodiments or technical solutions in the prior art of the present disclosure, the drawings used in the embodiments or technical solutions in the prior art description will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without inventive labor.
Fig. 1 is a schematic structural diagram of an optical signal modulator according to an embodiment of the present disclosure;
FIG. 2 is a cross-sectional view taken along line A1-A2 of FIG. 1;
FIG. 3 is a cross-sectional view of another optical signal modulator provided by an embodiment of the present disclosure;
fig. 4 is an equivalent circuit diagram of an optical signal modulator according to an embodiment of the present disclosure;
fig. 5 is a flowchart of a control method of an optical signal modulator according to an embodiment of the disclosure.
Detailed Description
In order that the above objects, features and advantages of the present disclosure may be more clearly understood, aspects of the present disclosure will be further described below. It should be noted that, in the case of no conflict, the embodiments and features in the embodiments of the present disclosure may be combined with each other.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present disclosure, but the present disclosure may be practiced in other ways than those described herein; it is to be understood that the embodiments disclosed in the specification are only a few embodiments of the present disclosure, and not all embodiments.
Fig. 1 is a schematic structural diagram of an optical signal modulator according to an embodiment of the disclosure, and fig. 2 is a cross-sectional view taken along a line a1-a2 in fig. 1. As shown in fig. 1, the optical signal modulator includes: a substrate 10, wherein a plurality of optical signal modulation units 20 arranged in an array are arranged on the substrate 10; the optical signal modulation unit 20 includes a mirror 21 and at least one angle adjustment module; the angle adjustment module includes an angle adjustment member 22 and a control unit (not shown in fig. 1 and 2), and the angle adjustment member 22 is located between the substrate 10 and the reflecting mirror 21 to support the reflecting mirror 21. The angle adjuster 22 is movable relative to the substrate 10; the control unit is used for outputting an analog control signal and controlling the movement of the angle adjusting member 22 so as to continuously change the included angle between the plane of the reflecting mirror 21 and the plane of the substrate 10.
The continuous change of the included angle between the plane of the reflector and the plane of the substrate means that the included angle between the plane of the reflector and the plane of the substrate can be kept at any angle within a preset angle range. Illustratively, if the predetermined angle range is [ -10 °, 10 ° ], the control unit controls the movement of the angle adjuster 22 to maintain the included angle between the plane of the mirror 21 and the plane of the substrate 10 at-10 °, -9.8 °, -9.6 °, -9.5 ° … ….
The movement mode of the angle adjusting piece can be various, as long as the included angle between the plane where the reflector is located and the plane where the substrate is located can be continuously changed, and the angle adjusting piece is not limited in the application.
For example, the angle adjusting member can move horizontally on the plane of the substrate, and the purpose of changing the included angle between the plane of the reflector and the plane of the substrate is achieved by changing the supporting position of the reflector. In this case, the displacement of the angle adjusting member is different, and the angle between the plane of the mirror and the plane of the substrate is different.
Or the angle adjusting piece can do telescopic motion along the direction crossed with the plane of the substrate, and the purpose of changing the included angle between the plane of the reflector and the plane of the substrate is achieved by raising or lowering the position of a supporting point, contacted with the angle adjusting piece, on the reflector. In this case, the amount of expansion and contraction of the angle adjusting member is different, and the angle between the plane of the reflecting mirror and the plane of the substrate is different.
When it is necessary to perform image display using a display apparatus including the optical signal modulator, optionally, the method of controlling the optical signal modulator includes:
first, an image to be displayed is acquired.
The image to be displayed is an image that the display device including the optical signal modulator needs to display but has not yet displayed. The image to be displayed is a frame of picture.
Secondly, determining the gray value corresponding to each optical signal modulation unit based on the image to be displayed.
In the optical signal modulator, each optical signal modulation unit corresponds to one pixel unit.
The method for realizing the step comprises the step of dividing an image to be displayed according to the positions of all the optical signal modulation units and the number of the signal modulation units included in the optical signal modulator to obtain a plurality of divided areas, wherein each signal modulation unit uniquely corresponds to one divided area. Based on the image information of each divided region, a gradation value corresponding to the optical signal modulation unit corresponding to each divided region is obtained.
And thirdly, determining a target included angle between the plane of the reflector in each optical signal modulation unit and the plane of the substrate based on the gray value corresponding to each optical signal modulation unit.
Optionally, a corresponding relationship between each gray value and an included angle between a plane of the reflector and a plane of the substrate is predetermined. When the step is executed, the target included angle between the plane where the reflector in each optical signal modulation unit is located and the plane where the substrate is located is determined based on the gray value corresponding to each optical signal modulation unit and the corresponding relation.
Further, determining a target included angle between a plane where the reflector is located in each optical signal modulation unit and a plane where the substrate is located based on the gray value corresponding to each optical signal modulation unit and the corresponding relationship, includes: and inquiring the corresponding relation by taking the gray value corresponding to each optical signal modulation unit as an inquiry condition, and taking each obtained direct result as a target included angle between the plane where the reflector in each optical signal modulation unit is located and the plane where the substrate is located.
And finally, controlling the movement of the angle adjusting piece in each optical signal modulation unit through the control unit in each optical signal modulation unit so as to enable the included angle between the substrate and the reflector in each optical signal modulation unit to be a target included angle.
When the angle between the plane of the mirror and the plane of the substrate changes, the angle of reflection of the light rays striking the mirror changes. Obviously, if the reflection angles of the light rays irradiating the reflector are different, the reflected light emitted by the optical signal modulation unit carries different gray scale information. Therefore, the essence of adopting the technical solution provided by the present application is to provide a new optical signal modulator. By adopting the optical signal modulator, the included angle between the plane where the reflector is located and the plane where the substrate is located is changed by controlling the movement of the angle adjusting piece, so that different gray scale brightness is obtained. Because the optical signal modulator belongs to analog modulation instead of digital modulation, the pulse width modulation is not needed, and a complex pulse width adjustment driving circuit is not needed, so that the manufacturing difficulty of the optical signal modulator can be reduced. In addition, the technical scheme can realize controllable precision of the included angle between the plane where the reflector is located and the plane where the substrate is located, can reduce the probability of poor display problems such as light leakage, color cast and the like in the working process of the optical signal modulator, and improves the image quality of display equipment comprising the optical signal modulator.
On the basis of the above technical solutions, optionally, the first end of the angle adjusting member is fixed to the substrate, and the second end of the angle adjusting member abuts against the reflector; the angle adjusting piece can do telescopic motion along a first direction, and the first direction is crossed with the plane of the substrate. The second end of the angle adjusting piece abuts against the reflector, and the second end of the angle adjusting piece can be fixedly connected with the reflector or not fixedly connected with the reflector, so long as the second end of the angle adjusting piece can provide supporting force for the reflector along the first direction. Because the angle adjusting piece can support the reflector, and the angle adjusting piece can do telescopic motion along the first direction, the distance between the contact point of the angle adjusting piece and the reflector and the plane where the substrate is located can be raised or reduced through the telescopic motion, and the purpose of changing the included angle between the plane where the reflector is located and the plane where the substrate is located is achieved. The arrangement can reduce the manufacturing difficulty of the angle adjusting piece and the control unit.
Optionally, the first direction is perpendicular to the plane of the substrate.
In one embodiment, referring to fig. 2, the optical signal modulation unit further includes a supporting member 13, the supporting member 13 is fixedly located between the substrate 10 and the reflecting mirror 21, one end of the supporting member is fixed to the substrate 10, and the other end of the supporting member is fixed to the reflecting mirror 10, for limiting the reflecting mirror 21 in an area where the corresponding optical signal modulation unit is located; the length of the support 13 in a direction perpendicular to the plane of the substrate 10 is fixed. The purpose of the supporting member 13 is to prevent the mirror 21 from being out of constraint due to repeated change of the included angle between the plane of the mirror 21 and the plane of the substrate 10, which may result in damage of the optical signal modulation unit and the occurrence of undesirable phenomenon that the gray scale cannot be adjusted, thereby prolonging the lifetime of the optical signal modulator.
Fig. 3 is a cross-sectional view of another optical signal modulator provided by an embodiment of the present disclosure. Referring to fig. 3, on the basis of the above technical solution, the optical signal modulation unit includes two angle adjustment modules; the optical signal modulation unit further comprises a support member 13, the support member 13 is fixedly positioned between the substrate 10 and the reflector 21, one end of the support member is fixed with the substrate 10, and the other end of the support member is fixed with the reflector 10, and the support member is used for limiting the reflector 21 in the area where the corresponding optical signal modulation unit is positioned; the length of the support 13 in the direction perpendicular to the plane of the substrate 10 is fixed; the angle adjusting pieces 22 of the two angle adjusting modules are respectively arranged on two sides of the supporting piece 13. This is done to ensure that the mirror 21 rotates smoothly during the process of changing the angle between the plane of the mirror 21 and the plane of the substrate 10.
Optionally, the material of the angle adjuster comprises an electrostrictive material. Further, the material of the angle adjuster includes a piezoelectric ceramic. Illustratively, the material of the angle adjuster includes barium titanate and/or lead zirconate titanate. The piezoelectric ceramic has an inverse piezoelectric effect. Specifically, an electric field with a certain intensity is applied outside the piezoelectric ceramic, the piezoelectric ceramic expands along the direction of an internal lattice polar axis, and the deformation quantity and the electric field intensity of the piezoelectric ceramic are in a linear relation between the electric field from 0 to a certain voltage threshold corresponding to the piezoelectric ceramic, so that the expansion quantity of the piezoelectric ceramic can be accurately controlled by utilizing the inverse piezoelectric effect of the piezoelectric ceramic, the included angle between the plane where the reflector is located and the plane where the substrate is located can be accurately controlled, and the optical signal modulation unit can be accurately controlled to present a certain gray value.
When the material of the angle adjusting member comprises the electrostrictive material, the step of controlling the movement of the angle adjusting member in each optical signal modulation unit through the control unit in each optical signal modulation unit so as to enable the included angle between the substrate and the reflecting mirror in each optical signal modulation unit to be the target included angle is executed, and the method comprises the following steps: determining effective values of voltage signals corresponding to the target included angles; loading the voltage signal of the effective value to each angle adjusting piece through a control unit; and/or determining the amplitude of the voltage signal corresponding to each target included angle; the voltage signal of this amplitude is applied to the angle adjusting elements by the control unit.
Fig. 4 is an equivalent circuit diagram of an optical signal modulator according to an embodiment of the present disclosure. Referring to fig. 4, the substrate 10 further includes a plurality of scan lines 14 and a plurality of data lines 15; the scanning lines 14 and the data lines 15 intersect to define a plurality of optical signal modulation regions, and the optical signal modulation units are located in the optical signal modulation regions; in the optical signal modulation unit, any control unit corresponds to one scanning line 14 and one data line 15, and the control unit comprises a control switch 23 and a common electrode 24; the control end of the control switch 23 is electrically connected with the corresponding scanning line 14, the input end of the control switch 23 is electrically connected with the corresponding data line 15, and the angle adjusting piece 22 is coupled between the output end of the control switch 23 and the common electrode.
In practice, the common electrode may be a ground electrode or a non-ground electrode, and if the common electrode is a non-ground electrode, at least one common electrode line may be disposed on the substrate, and each common electrode is electrically connected to the common electrode line.
When a scan signal is applied to the scan line, the scan signal is transmitted to a control terminal of a control switch electrically connected thereto. If the scanning signal is a starting signal, the input end and the output end of the control switch are electrically conducted, and the data signal loaded on the data line can be transmitted to the angle adjusting piece, so that voltage difference exists between two sides of the angle adjusting piece, and the purpose of controlling the angle adjusting piece to do telescopic motion is achieved.
In one embodiment, the control switch is a thin film transistor. Specifically, the control switch may be a P-type thin film transistor or an N-type thin film transistor.
On the basis of the above embodiments, optionally, each control switch in the same row of optical signal modulation units is set to correspond to the same scanning line; the control switches in the different row light signal modulation units correspond to different scanning lines. When image display is required by using the display device comprising the optical signal modulator, scanning signals are loaded to the scanning lines line by line so as to control the control switches in the optical signal modulation units to be turned on line by line. If the control switch in a certain row of optical signal modulation units is turned on, data information is loaded to each data line, so that the angle adjusting piece moves (for example, the angle adjusting piece is controlled to do telescopic motion), and an included angle between a plane where the substrate in each optical signal modulation unit is located and a plane where the reflector is located is a target included angle.
Furthermore, the time interval for transmitting the scanning signals to the scanning lines corresponding to two adjacent rows of optical signal modulation units is set to be greater than a set threshold value. The reason for this is that, in practice, the scanning signal is not an ideal square wave signal, and the rise time thereof is long. By setting the time interval for transmitting the scanning signals to the scanning lines corresponding to the two adjacent rows of optical signal modulation units to be greater than the set threshold, the probability that the control switches in the two adjacent rows of optical signal modulation units are in the on state at the same time can be fully reduced, and reflected light formed by the two rows of optical signal modulation units is prevented from being mutually interfered.
In each of the above technical solutions, the control unit further includes a storage capacitor; the storage capacitor and the angle adjusting piece are connected between the output end of the control switch and the common electrode in parallel. The purpose of setting up storage capacitor is when control switch opens, writes data signal to storage capacitor in, after control switch closes, can provide and provide stable voltage to angle adjustment spare, maintains the speculum and is in predetermined upset state all the time, and then maintains the contained angle of speculum place plane and substrate place plane and keeps unchangeable, and this control switch opens next time.
Fig. 5 is a flowchart of a control method of an optical signal modulator according to an embodiment of the disclosure. The control method of the optical signal modulator is suitable for the optical signal modulator provided by the embodiment of the disclosure. Referring to fig. 5, the method includes:
and S310, acquiring an image to be displayed.
And S320, determining the gray value corresponding to each optical signal modulation unit based on the image to be displayed.
S330, determining a target included angle between the plane of the reflector in each optical signal modulation unit and the plane of the substrate based on the gray value corresponding to each optical signal modulation unit.
S340, controlling the movement of the angle adjusting piece in each optical signal modulation unit through a control unit in each optical signal modulation unit, so that the included angle between the substrate and the reflector in each optical signal modulation unit is the target included angle.
Since the control method of the optical signal modulator provided by the embodiment of the present disclosure is applicable to the optical signal modulator provided by the embodiment of the present disclosure, the same or corresponding beneficial effects of the optical signal modulator applied thereto are achieved, and details are not repeated herein.
The embodiment of the disclosure also provides a projection device. The projection device comprises the optical signal modulator provided by the embodiment of the disclosure.
Since the projection device provided by the embodiment of the present disclosure includes the optical signal modulator provided by the embodiment of the present disclosure, the same or corresponding beneficial effects of the optical signal modulator included therein are achieved, and details are not repeated here.
In one embodiment, the projection device is an augmented reality device. Here, the Augmented Reality device includes, but is not limited to, an AR (Augmented display) device, a VR (Virtual Reality) device, a MR (Mixed Reality) device, an AV (Augmented Virtual Reality) device, and an AR (Augmented Reality) device
It is noted that, in this document, relational terms such as "first" and "second," and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The previous description is only for the purpose of describing particular embodiments of the present disclosure, so as to enable those skilled in the art to understand or implement the present disclosure. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the disclosure. Thus, the present disclosure is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (12)

1. An optical signal modulator, comprising: the optical signal modulation device comprises a substrate, wherein a plurality of optical signal modulation units arranged in an array are arranged on the substrate;
the optical signal modulation unit comprises a reflector and at least one angle adjustment module; the angle adjusting module comprises an angle adjusting piece and a control unit, wherein the angle adjusting piece is positioned between the substrate and the reflecting mirror to support the reflecting mirror; the angle adjusting member is movable relative to the substrate; the control unit is used for outputting an analog control signal and controlling the angle adjusting piece to move so as to continuously change the included angle between the plane where the reflector is located and the plane where the substrate is located.
2. The optical signal modulator of claim 1, wherein a first end of the angle adjuster is fixed to the substrate and a second end of the angle adjuster abuts the mirror; the angle adjusting piece can do telescopic motion along a first direction, and the first direction is crossed with the plane of the substrate.
3. The optical signal modulator of claim 2, wherein the optical signal modulation unit comprises two of the angle adjustment modules; the optical signal modulation unit further comprises a supporting piece, one end of the supporting piece is fixed with the substrate, and the other end of the supporting piece is fixed with the reflector and used for limiting the reflector in an area where the corresponding optical signal modulation unit is located; the length of the support part in the direction vertical to the plane of the substrate is fixed;
the two angle adjusting pieces are respectively arranged on two sides of the supporting piece.
4. The optical signal modulator of claim 2, wherein the material of the angle adjuster comprises an electrically stretchable material.
5. The optical signal modulator of claim 4, wherein the material of the angle adjuster comprises a piezoelectric ceramic.
6. The optical signal modulator of claim 5, wherein the material of the angle adjuster comprises barium titanate and/or lead zirconate titanate.
7. The optical signal modulator of any of claims 4-6, wherein the substrate further comprises a plurality of scan lines and a plurality of data lines; the plurality of scanning lines and the plurality of data lines are crossed to define a plurality of optical signal modulation areas, and the optical signal modulation units are positioned in the optical signal modulation areas;
any one of the control units corresponds to one of the scanning lines and one of the data lines, and the control unit comprises a control switch and a common electrode; the control end of the control switch is electrically connected with the scanning line corresponding to the control end, the input end of the control switch is electrically connected with the data line corresponding to the control end, and the angle adjusting piece is coupled between the output end of the control switch and the common electrode.
8. The optical signal modulator of claim 7, wherein the control unit further comprises a storage capacitor;
the storage capacitor and the angle adjusting piece are connected in parallel between the output end of the control switch and the common electrode.
9. The optical signal modulator of claim 7,
each control switch in the same row of the optical signal modulation units corresponds to the same scanning line; the control switches in the optical signal modulation units in different rows correspond to different scanning lines;
and the time interval for loading scanning signals to the scanning lines corresponding to the optical signal modulation units in two adjacent rows is greater than a set threshold value.
10. A method for controlling an optical signal modulator, the method being applied to the optical signal modulator according to any one of claims 1 to 9, the method comprising:
acquiring an image to be displayed;
determining a gray value corresponding to each optical signal modulation unit based on the image to be displayed;
determining a target included angle between the plane of the reflector in each optical signal modulation unit and the plane of the substrate based on the gray value corresponding to each optical signal modulation unit;
and controlling the angle adjusting piece in each optical signal modulation unit to move through a control unit in each optical signal modulation unit so as to enable an included angle between the substrate and the reflector in each optical signal modulation unit to be the target included angle.
11. A projection device comprising an optical signal modulator according to any of claims 1-9.
12. The projection device of claim 11, wherein the projection device is an augmented reality device.
CN202210569470.4A 2022-05-24 2022-05-24 Optical signal modulator, control method and projection equipment Pending CN114779464A (en)

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