CN114778570B - X-ray ultrafast imaging system and method based on radiation conversion and spectral filtering - Google Patents

X-ray ultrafast imaging system and method based on radiation conversion and spectral filtering

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CN114778570B
CN114778570B CN202210273352.9A CN202210273352A CN114778570B CN 114778570 B CN114778570 B CN 114778570B CN 202210273352 A CN202210273352 A CN 202210273352A CN 114778570 B CN114778570 B CN 114778570B
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module
ray
pulse light
chirped pulse
semiconductor chip
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CN114778570A (en
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田进寿
何凯
李亚晖
闫欣
高贵龙
汪韬
姚东
尹飞
岳猛猛
李知兵
张�杰
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

The invention provides an X-ray ultrafast imaging system and method based on radiation conversion and spectral filtering, which solve the problems of poor generality, low time resolution or limited framing number of the existing ultrafast X-ray imaging technology. The system comprises an X-ray coupling module for coupling a target X-ray signal to form an image on a semiconductor chip module, a semiconductor chip module for converting the X-ray intensity space-time distribution into the chip refractive index space-time distribution, a chirped pulse light generating module, a chirped pulse light coupling module for irradiating the linear chirped pulse light generated by the chirped pulse light generating module to the semiconductor chip module and coupling the pulse light reflected by the semiconductor chip module into a phase extraction module, a spectral filtering framing reading module for framing the linear chirped light intensity space-time distribution signal output by the phase extraction module to form an image on a data acquisition module, a data acquisition module and an image processing module for processing the image output by the data acquisition module.

Description

X-ray ultra-fast imaging system and method based on radiation conversion and spectral filtering
Technical Field
The invention belongs to the field of X-ray ultrafast imaging, and particularly relates to an X-ray multi-framing ultrafast imaging system and method based on radiation conversion and spectral filtering framing reading.
Background
The X-ray ultra-fast imaging technology is widely applied to the fields of high-energy physics and the like, such as laser-driven inertial confinement fusion experiments, deuterium-tritium target pellets are driven by laser, so that implosion compression is enabled to generate fusion, high-temperature and high-density substances generated when the implosion compression reaches the maximum degree are used as core parts, and the fusion efficiency is affected by the symmetry of core part hot spots. Since the evolution process of the core hot spots is in the order of hundred picoseconds, the spontaneous X-ray spectrum can reach hard X-rays, so that the picosecond time-resolved X-ray ultrafast imaging technology is essential for researching the evolution process of the core hot spots and has important significance for improving fusion efficiency.
The traditional ultrafast X-ray imaging technology comprises an active pumping probe method, a traveling wave gating framing technology, a solid framing technology and the like. The active pumping probe method irradiates a target by using sub-picosecond free electron laser, and inverts a target structure by using an ultrafast diffraction pattern of the target, however, an active imaging mode limits the application of the method in experiments such as inertial confinement fusion and the like, and the spontaneous X-ray evolution process of high-temperature high-density plasma cannot be captured. The time resolution of the travelling wave gating and framing technology is in the order of hundred picoseconds, and the capturing of dynamic events with the time scale shorter than the order of hundred picoseconds cannot be met. The solid-state framing technique is proposed (K.L.Baker,R.E.Stewart,P.T.Steele,S.P.Vernon,W.W.Hsing,andB.A.Remington,"Solid-state framing camera with multiple time frames,"Appl.Phys.Lett.,vol.103,p.151111,Oct.2013.K.L.Baker,P.T.Steele,R.E.Stewart,S.P.Vernon,W.W.Hsing,andB.A.Remington,"Solid-state framing camera operating in interferometric mode,"Rev.Sci.Instrum.,vol.89,no.10,p.10G107,2018.), by Lorentz Li Fuma R national laboratory K.L.Baker et al to realize radiation conversion by using a semiconductor chip, convert an X-ray signal to short-wave infrared probe light, and realize passive ultrafast X-ray imaging with time resolution of 5ps by multi-framing imaging of the probe light. However, in the solid-state framing technology, multi-framing imaging of probe light is realized through polarization delay and polarization beam splitting, the number of frames is limited to two, and the dynamic information of a continuously frozen target cannot be refined. Therefore, development of an ultra-fast X-ray imaging means with time resolution on the order of picoseconds and frame number on the order of tens of frames is highly demanded.
Disclosure of Invention
The invention provides an X-ray ultra-fast imaging system and method based on radiation conversion and spectrum filtering, which are used for solving the technical problems that the existing ultra-fast X-ray imaging technology has poor generality or time resolution in the order of hundred picoseconds and cannot meet the requirement of capturing dynamic events with the time scale shorter than the order of hundred picoseconds or the number of frames is limited.
In order to achieve the above purpose, the technical scheme provided by the invention is as follows:
The invention provides an X-ray ultrafast imaging system based on radiation conversion and spectral filtering, which is characterized by comprising an X-ray coupling module, a semiconductor chip module, a chirped pulse light generating module, a chirped pulse light coupling module, a phase extraction module, a spectral filtering framing reading module, a data acquisition module, an image processing module and a synchronous control module;
The X-ray coupling module is used for coupling X-ray signals of the target to be imaged on the semiconductor chip module;
The semiconductor chip module is used for detecting X-ray signals of a target and converting the X-ray intensity space-time distribution into chip refractive index space-time distribution;
The chirped pulse light generating module is used for generating linear chirped pulse light;
The chirped pulse optical coupling module is used for irradiating the linear chirped pulse light generated by the chirped pulse light generating module to the semiconductor chip module after beam expansion and collimation, and is used for coupling the linear chirped pulse light which is reflected by the semiconductor chip module and carries the chip refractive index space-time distribution into the phase extraction module;
The phase extraction module is used for extracting the chip refractive index space-time distribution carried by the linear chirped pulse light into linear chirped light intensity space-time distribution information;
The spectrum filtering framing reading module is used for framing and imaging the linear chirped light intensity space-time distribution signal output by the phase extraction module on the data acquisition module, and comprises a first convex lens, a diffraction optical element, a narrow-band filter and a second convex lens which are sequentially arranged along the light beam transmission direction, wherein the narrow-band filter is obliquely arranged with the optical axis of the light beam, and the diffraction optical element is used for dividing the incident light beam into a plurality of sub-light beams and imaging different areas of a detector in the data acquisition module;
The data acquisition module is used for acquiring the image output by the spectrum filtering framing reading module in single exposure and transmitting the image to the image processing module;
the image processing module is used for processing the image output by the data acquisition module, extracting multiple images of different time signals carried by the linear chirped light from the image, and inverting the time-varying X-ray signal multiple images of the target by using an X-ray signal inversion algorithm;
the synchronous control module is used for picosecond-level synchronization among the target, the chirped pulse light generating module and the data acquisition module.
Further, the chirped pulse optical coupling module is a beam splitter;
The beam splitter reflects the linear chirped pulse light generated by the chirped pulse light generating module and transmits the linear chirped pulse light which is reflected by the semiconductor chip module and carries the space-time distribution of the refractive index of the chip.
Further, an optical fiber is arranged between the beam splitter and the chirped pulse light generating module, one end of the optical fiber is connected with the chirped pulse light generating module, and the other end of the optical fiber is coupled with the beam splitter.
Further, a reflecting mirror is arranged between the beam splitter and the chirped pulse light generating module.
Further, the semiconductor chip module response time is on the order of picoseconds;
the pulse width of the linearly chirped pulse light is in the order of nanosecond to picosecond, and the central wavelength is 700 nm-850 nm.
In a second aspect, the present invention also provides an X-ray ultra-fast imaging method based on radiation conversion and spectral filtering, which is characterized by comprising the following steps:
1) The X-ray coupling module couples an X-ray signal of the target to the semiconductor chip module, and simultaneously the target transmits a trigger signal to the synchronous control module, and the synchronous control module transmits a first control signal and a second control signal according to the trigger signal;
2) The semiconductor chip module converts the X-ray intensity space-time distribution into chip refractive index space-time distribution;
3) The chirped pulse light generating module receives a first control signal sent by the synchronous control module to generate linear chirped pulse light, and the linear chirped pulse light irradiates the semiconductor chip module after being expanded and collimated by the chirped pulse light coupling module and is reflected by the semiconductor chip module, and enters the phase extraction module after passing through the chirped pulse light coupling module;
4) The phase extraction module extracts the chip refractive index space-time distribution carried by the linear chirped pulse light into linear chirped light intensity space-time distribution information;
5) The linear chirped light intensity space-time distribution information enters a spectrum filtering framing reading module, is divided into N sub-beams by a diffraction optical element after passing through a first convex lens, and is incident into a narrow-band filter plate which is obliquely arranged at different angles, and the N sub-beams after filtering are coupled and imaged on a data acquisition module through a second convex lens;
The center wavelengths of the different sub-beams are different and carry signal information at different moments, and the different sub-beams are imaged in different areas of the detector in the data acquisition module;
6) The data acquisition module receives a second control signal sent by the synchronous control module, acquires signals output by the spectrum filtering framing reading module in single exposure, transmits acquired data to the image processing module, extracts multiple framing images of different time signals corresponding to different areas of the image, and uses an X-ray signal inversion algorithm to invert the time-varying X-ray signal multiple framing images of the target;
further, in step 6), the X-ray signal inversion algorithm performs inversion using a correspondence relationship between an X-ray intensity-semiconductor chip refractive index variation-chirped pulse light phase variation-phase extraction system intensity variation-image intensity variation.
Compared with the prior art, the invention has the advantages that:
the system and the method adopt a semiconductor chip to realize the radiation conversion from an X-ray time-varying signal to a short-wave infrared chirped pulse probe optical signal, carry out spectrum filtering type framing reading on the chirped pulse probe light, adopt the mode of beam splitting, narrow-band filtering and imaging of a large array surface detector by an optical diffraction element, and under the condition of ensuring picosecond-level time resolution, the number of reconstructed framing can be improved to tens of orders of magnitude.
Drawings
FIG. 1 is a schematic diagram of the principle structure of an X-ray ultra-fast imaging system based on radiation conversion and spectral filtering of the present invention;
FIG. 2 is a schematic diagram of the operation of a spectral filtering framing read module according to an embodiment of the present invention;
Wherein, the reference numerals are as follows:
The device comprises a 101-object, a 102-X-ray coupling module, a 103-semiconductor chip module, a 104-chirped pulse light generating module, a 105-chirped pulse light coupling module, a 106-reflecting mirror, a 107-phase extraction module, a 108-spectral filtering framing reading module, a 109-first convex lens, a 110-diffraction optical element, a 111-narrow-band filter, a 112-second convex lens, a 113-data acquisition module, a 114-image processing module and a 115-synchronous control module.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1, the X-ray ultra-fast imaging system based on radiation conversion and spectral filtering of the present invention includes an X-ray coupling module 102, a semiconductor chip module 103, a chirped pulse light generating module 104, a chirped pulse light coupling module 105, a phase extraction module 107, a spectral filtering framing reading module 108, a data acquisition module 113, an image processing module 114, and a synchronization control module 115.
The X-ray coupling module 102 is used to couple X-ray signals of the object 101 to be imaged on the semiconductor chip module 103.
The semiconductor chip module 103 is used for detecting the X-ray signal of the target 101 and converting the X-ray intensity space-time distribution into the chip refractive index space-time distribution, and the response time of the semiconductor chip module 103 is in the picosecond order.
The chirped pulse light generation module 104 is used for generating linear chirped pulse light with pulse width in the order of nanoseconds to picoseconds and central wavelength of 700 nm-850 nm.
The chirped pulse optical coupling module 105 is configured to amplify and collimate the linear chirped pulse light generated by the chirped pulse light generating module 104, irradiate the linear chirped pulse light to the semiconductor chip module 103, and couple the linear chirped pulse light which is reflected back from the semiconductor chip module 103 and carries the chip refractive index space-time distribution into the phase extraction module 107.
The phase extraction module 107 is configured to extract the chip refractive index spatial-temporal distribution carried by the linearly chirped pulse light as linearly chirped light intensity spatial-temporal distribution information.
The spectrum filtering framing reading module 108 is composed of a first convex lens 109, a diffraction optical element 110, a narrow-band filter 111 and a second convex lens 112 which are sequentially arranged along the transmission direction of the light beam, the narrow-band filter 111 is obliquely arranged with the optical axis of the light beam, the spectrum filtering framing reading module 108 is used for framing and imaging the time-varying intensity signals output by the phase extraction module 107 on the data acquisition module 113, and signals at different moments are imaged on different areas of a detector in the data acquisition module 113.
The data acquisition module 113 is used for acquiring the signal output by the spectrum filtering framing reading module 108 in a single exposure.
The image processing module 114 is configured to process the image output by the data acquisition module 113, extract multiple images of the signals at different times carried by the linearly chirped light from the image, and invert the multiple images of the time-varying X-ray signals of the target 101 using an X-ray signal inversion algorithm.
The synchronization control module 115 is used for picosecond level synchronization between the target 101, the chirped pulse light generation module 104, and the data acquisition module 113.
The chirped pulse optical coupling module 105 is a beam splitter, which reflects the linearly chirped pulse light generated by the chirped pulse light generating module 104 to the semiconductor chip module 103, and transmits the linearly chirped pulse light reflected by the semiconductor chip module 103 and carrying the spatial-temporal distribution of the refractive index of the chip to the phase extraction module 107. In this embodiment, the chirped pulse optical coupling module 105 is provided with a reflecting mirror 106 between the beam splitter and the chirped pulse light generating module 104 for turning over the linear chirped pulse light generated by the chirped pulse light generating module 104 to achieve miniaturization of the system, and in other embodiments, an optical fiber is provided between the beam splitter and the chirped pulse light generating module 104, an incident end of the optical fiber is connected with the chirped pulse light generating module 104, an exit end faces the beam splitter, and a beam emitted from the exit end of the optical fiber enters the beam splitter and is emitted to the semiconductor chip module 103 through the beam splitter.
Based on the above-mentioned X-ray ultrafast imaging system, the present embodiment provides an X-ray ultrafast imaging method based on radiation conversion and spectral filtering, comprising the steps of:
1) The X-ray coupling module 102 couples the X-ray signal of the target 101 to the semiconductor chip module 103, and simultaneously the X-ray generating device of the target 101 transmits a trigger signal to the synchronization control module 115, and the synchronization control module 115 performs clock delay according to the trigger signal and transmits a first control signal to the chirped pulse light generating module 104 and transmits a second control signal to the data acquisition module 113, so as to realize synchronization among the target 101, the chirped pulse light generating module 104 and the data acquisition module 113;
2) The semiconductor chip module 103 converts the X-ray intensity spatial-temporal distribution into a chip refractive index spatial-temporal distribution;
3) The chirped pulse light generating module 104 receives the first control signal sent by the synchronous control module 115, generates linear chirped pulse light with the pulse width in the order of nanoseconds to picoseconds and the center wavelength of 700 nm-850 nm, and irradiates the linear chirped pulse light to the semiconductor chip module 103 after being expanded and collimated by the chirped pulse light coupling module 105, is reflected by the semiconductor chip module 103, and enters the phase extraction module 107 after passing through the chirped pulse light coupling module 105;
4) The phase extraction module 107 extracts the chip refractive index space-time distribution carried by the linear chirped pulse light as linear chirped light intensity space-time distribution information;
5) The linear chirped light intensity space-time distribution information enters the spectrum filtering framing reading module 108, is divided into N sub-beams by the diffraction optical element 110 after passing through the first convex lens 109, the N sub-beams are incident into the narrow-band filter 111 which is obliquely arranged at different angles, the center wavelengths of the different sub-beams are different after filtering and carry signal information at different moments, and finally the N sub-beams are coupled and imaged on the data acquisition module 113 through the second convex lens 112, and the different sub-beams are imaged on different areas of the detector in the data acquisition module 113;
6) The data acquisition module 113 receives the second control signal sent by the synchronization control module 115, acquires the signal output by the spectrum filtering framing reading module 108 in a single exposure, transmits the acquired data to the image processing module 114, extracts multiple frames of images corresponding to different time signals at different areas of the image, and inverts the multiple frames of images of the time-varying X-ray signal of the target 101 by using an X-ray signal inversion algorithm.
In step 5), the working principle of the spectral filtering framing reading module 108 is shown in fig. 2, in this embodiment, the object plane size is d, the focal length of the first convex lens 109 is f 1, the focal length of the second convex lens 112 is f 2, the center wavelengths of different sub-beams are respectively lambda 12,…,λn, the sub-beams respectively correspond to signals at the moment t 1,t2,…,tn, the sub-beams are imaged at different positions of the image plane, the single-frame image size of the image plane is d' =ad, wherein a=f 2/f1 is the magnification, and the distance between adjacent images is Δ;
In the step 6), the X-ray signal inversion algorithm performs inversion by using the correspondence between the X-ray intensity and the refractive index variation of the semiconductor chip and the chirped pulse light phase variation and the phase extraction system intensity variation and the image intensity variation.
According to the embodiment, the semiconductor chip is adopted to realize the radiation conversion from an X-ray time-varying signal to a short-wave infrared chirped pulse probe optical signal, spectrum filtering type framing reading is carried out on the chirped pulse probe light, an optical diffraction element beam splitting, narrow-band filtering and large-array-surface detector imaging mode is adopted, the number of reconstructed framing can be increased to tens of orders of magnitude under the condition that picosecond-level time resolution is guaranteed, and because each image is imaged at different positions of an effective image surface of the detector, a single image has the advantage of a large dynamic range, and continuous high-sensitivity fine X-ray imaging of a large dynamic range dynamic phenomenon can be realized.
The above description is only of the preferred embodiments of the present invention, and the technical solution of the present invention is not limited thereto, and any modifications made by those skilled in the art based on the main technical concept of the present invention are included in the technical scope of the present invention.

Claims (6)

1.一种基于辐射转换和光谱滤波的X射线超快成像系统,其特征在于:包括X射线耦合模块(102)、半导体芯片模块(103)、啁啾脉冲光产生模块(104)、啁啾脉冲光耦合模块(105)、相位提取模块(107)、光谱滤波分幅读取模块(108)、数据采集模块(113)、图像处理模块(114)以及同步控制模块(115);1. An X-ray ultrafast imaging system based on radiation conversion and spectral filtering, characterized in that: it includes an X-ray coupling module (102), a semiconductor chip module (103), a chirped pulse light generation module (104), a chirped pulse light coupling module (105), a phase extraction module (107), a spectral filtering and amplitude division reading module (108), a data acquisition module (113), an image processing module (114), and a synchronization control module (115); 所述X射线耦合模块(102)用于将目标(101)的X射线信号耦合成像在半导体芯片模块(103)上;The X-ray coupling module (102) is used to couple and image the X-ray signal of the target (101) onto the semiconductor chip module (103); 所述半导体芯片模块(103)用于探测目标(101)的X射线信号,将X射线强度时空分布转换为芯片折射率时空分布;The semiconductor chip module (103) is used to detect the X-ray signal of the target (101) and convert the spatiotemporal distribution of X-ray intensity into the spatiotemporal distribution of chip refractive index; 所述啁啾脉冲光产生模块(104)用于产生线性啁啾脉冲光;The chirped pulse light generation module (104) is used to generate linear chirped pulse light; 所述啁啾脉冲光耦合模块(105)用于将啁啾脉冲光产生模块(104)产生的线性啁啾脉冲光扩束、准直后,照射至半导体芯片模块(103),以及用于将经半导体芯片模块(103)反射的携带芯片折射率时空分布的线性啁啾脉冲光耦合进相位提取模块(107);The chirped pulse light coupling module (105) is used to expand and collimate the linear chirped pulse light generated by the chirped pulse light generation module (104) and then irradiate it onto the semiconductor chip module (103), and to couple the linear chirped pulse light carrying the spatiotemporal distribution of the chip's refractive index reflected by the semiconductor chip module (103) into the phase extraction module (107). 所述相位提取模块(107)用于将线性啁啾脉冲光携带的芯片折射率时空分布提取为线性啁啾光强度时空分布信息;The phase extraction module (107) is used to extract the spatiotemporal distribution of the chip refractive index carried by the linearly chirped pulse light into spatiotemporal distribution information of the linearly chirped light intensity; 所述光谱滤波分幅读取模块(108)用于将相位提取模块(107)输出的线性啁啾光强度时空分布信号分幅成像于数据采集模块(113),其包括沿光束传输方向依次设置的第一凸透镜(109)、衍射光学元件(110)、窄带滤波片(111)和第二凸透镜(112),且窄带滤波片(111)与光束的光轴倾斜设置,所述衍射光学元件(110)用于将入射光束分为多个子光束,并成像于数据采集模块(113)中探测器的不同区域;The spectral filtering and amplitude division reading module (108) is used to image the spatiotemporal distribution signal of linear chirped light intensity output by the phase extraction module (107) onto the data acquisition module (113). It includes a first convex lens (109), a diffractive optical element (110), a narrowband filter (111), and a second convex lens (112) arranged sequentially along the beam transmission direction. The narrowband filter (111) is inclined to the optical axis of the beam. The diffractive optical element (110) is used to divide the incident beam into multiple sub-beams and image them onto different regions of the detector in the data acquisition module (113). 所述数据采集模块(113)用于在单次曝光内采集光谱滤波分幅读取模块(108)输出的图像,并传输给图像处理模块(114);The data acquisition module (113) is used to acquire the image output by the spectral filtering and amplitude reading module (108) in a single exposure and transmit it to the image processing module (114). 所述图像处理模块(114)用于处理数据采集模块(113)输出的图像,从图像中提取线性啁啾光携带的不同时刻信号的多分幅图像,并使用X射线信号反演算法反演出目标(101)的时变X射线信号多分幅图像;所述X射线信号反演算法使用X射线强度-半导体芯片折射率变化量-啁啾脉冲光相位变化量-相位提取系统强度变化量-图像强度变化量之间的对应关系进行反演;The image processing module (114) is used to process the image output by the data acquisition module (113), extract multi-frame images of signals carried by linear chirped light at different times from the image, and use an X-ray signal inversion algorithm to invert the time-varying X-ray signal multi-frame image of the target (101); the X-ray signal inversion algorithm uses the correspondence between X-ray intensity, semiconductor chip refractive index change, chirped pulse phase change, phase extraction system intensity change, and image intensity change for inversion. 所述同步控制模块(115)用于目标(101)、啁啾脉冲光产生模块(104)和数据采集模块(113)之间的皮秒级同步。The synchronization control module (115) is used for picosecond-level synchronization between the target (101), the chirped pulse light generation module (104), and the data acquisition module (113). 2.根据权利要求1所述基于辐射转换和光谱滤波的X射线超快成像系统,其特征在于:所述啁啾脉冲光耦合模块(105)为分束镜;2. The X-ray ultrafast imaging system based on radiation conversion and spectral filtering according to claim 1, characterized in that: the chirped pulsed light coupling module (105) is a beam splitter; 所述分束镜对啁啾脉冲光产生模块(104)产生的线性啁啾脉冲光反射,对经半导体芯片模块(103)反射的携带芯片折射率时空分布的线性啁啾脉冲光透射。The beam splitter reflects the linear chirped pulse light generated by the chirped pulse light generation module (104) and transmits the linear chirped pulse light carrying the spatiotemporal distribution of the chip's refractive index, which is reflected by the semiconductor chip module (103). 3.根据权利要求2所述基于辐射转换和光谱滤波的X射线超快成像系统,其特征在于:所述分束镜与啁啾脉冲光产生模块(104)之间设置有光纤,光纤的一端与啁啾脉冲光产生模块(104)相连,另一端与分束镜耦合。3. The X-ray ultrafast imaging system based on radiation conversion and spectral filtering according to claim 2, characterized in that: an optical fiber is provided between the beam splitter and the chirped pulse light generation module (104), one end of the optical fiber is connected to the chirped pulse light generation module (104), and the other end is coupled to the beam splitter. 4.根据权利要求2所述基于辐射转换和光谱滤波的X射线超快成像系统,其特征在于:所述分束镜与啁啾脉冲光产生模块(104)之间设置有反射镜(106)。4. The X-ray ultrafast imaging system based on radiation conversion and spectral filtering according to claim 2, characterized in that: a reflector (106) is provided between the beam splitter and the chirped pulse light generation module (104). 5.根据权利要求1至4任一所述基于辐射转换和光谱滤波的X射线超快成像系统,其特征在于:所述半导体芯片模块(103)响应时间在皮秒量级;5. The X-ray ultrafast imaging system based on radiation conversion and spectral filtering according to any one of claims 1 to 4, characterized in that: the response time of the semiconductor chip module (103) is on the order of picoseconds; 所述线性啁啾脉冲光的脉宽为纳秒到皮秒量级,中心波长在700nm~850nm。The pulse width of the linearly chirped pulse light is on the order of nanoseconds to picoseconds, and the center wavelength is between 700nm and 850nm. 6.一种基于辐射转换和光谱滤波的X射线超快成像方法,基于权利要求1所述基于辐射转换和光谱滤波的X射线超快成像系统,其特征在于,包括以下步骤:6. An X-ray ultrafast imaging method based on radiation conversion and spectral filtering, based on the X-ray ultrafast imaging system based on radiation conversion and spectral filtering as described in claim 1, characterized in that it includes the following steps: 1)X射线耦合模块(102)将目标(101)的X射线信号耦合成像在半导体芯片模块(103)上,同时目标(101)发射一个触发信号给同步控制模块(115),同步控制模块(115)根据触发信号发射第一控制信号和第二控制信号;1) The X-ray coupling module (102) couples the X-ray signal of the target (101) onto the semiconductor chip module (103), and at the same time the target (101) emits a trigger signal to the synchronization control module (115). The synchronization control module (115) emits a first control signal and a second control signal according to the trigger signal. 2)半导体芯片模块(103)将X射线强度时空分布转换为芯片折射率时空分布;2) The semiconductor chip module (103) converts the spatiotemporal distribution of X-ray intensity into the spatiotemporal distribution of chip refractive index; 3)啁啾脉冲光产生模块(104)接收同步控制模块(115)发出的第一控制信号,产生线性啁啾脉冲光,然后线性啁啾脉冲光经啁啾脉冲光耦合模块(105)扩束、准直后,照射至半导体芯片模块(103),并由半导体芯片模块(103)反射,经啁啾脉冲光耦合模块(105)后进入相位提取模块(107);3) The chirped pulse light generation module (104) receives the first control signal sent by the synchronization control module (115) and generates linear chirped pulse light. Then, the linear chirped pulse light is expanded and collimated by the chirped pulse light coupling module (105) and then irradiates the semiconductor chip module (103). The light is reflected by the semiconductor chip module (103) and enters the phase extraction module (107) after passing through the chirped pulse light coupling module (105). 4)相位提取模块(107)将线性啁啾脉冲光携带的芯片折射率时空分布提取为线性啁啾光强度时空分布信息;4) The phase extraction module (107) extracts the spatiotemporal distribution of the chip refractive index carried by the linearly chirped pulse light into the spatiotemporal distribution information of the linearly chirped light intensity; 5)线性啁啾光强度时空分布信号进入光谱滤波分幅读取模块(108),经第一凸透镜(109)后,由衍射光学元件(110)分为N个子光束,N个子光束以不同的角度入射倾斜放置的窄带滤波片(111),经滤波后N个子光束经第二凸透镜(112)耦合成像于数据采集模块(113);5) The spatiotemporal distribution signal of linear chirped light intensity enters the spectral filtering and amplitude division reading module (108), and after passing through the first convex lens (109), it is divided into N sub-beams by the diffractive optical element (110). The N sub-beams are incident at different angles on the tilted narrowband filter (111). After filtering, the N sub-beams are coupled and imaged on the data acquisition module (113) by the second convex lens (112). 其中,不同子光束的中心波长不同,携带不同时刻的信号信息,不同子光束成像于数据采集模块(113)中探测器的不同区域;Among them, the center wavelengths of different sub-beams are different, carrying signal information at different times, and the different sub-beams are imaged in different regions of the detector in the data acquisition module (113); 6)数据采集模块(113)接收同步控制模块(115)发出的第二控制信号,在单次曝光内,采集光谱滤波分幅读取模块(108)输出的信号,并将采集到的数据传输到所述图像处理模块(114),提取图像不同区域处对应的不同时刻信号的多分幅图像,并使用X射线信号反演算法反演出目标(101)的时变X射线信号多分幅图像。6) The data acquisition module (113) receives the second control signal sent by the synchronization control module (115), acquires the signal output by the spectral filtering and segmented reading module (108) within a single exposure, and transmits the acquired data to the image processing module (114), extracts the multi-segmented images of signals at different times corresponding to different regions of the image, and uses the X-ray signal inversion algorithm to invert the time-varying X-ray signal multi-segmented image of the target (101).
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CN111443062A (en) * 2020-04-26 2020-07-24 中国科学院西安光学精密机械研究所 Ultrafast detection device and method for transient refractive index of semiconductor material
CN111781629A (en) * 2020-07-09 2020-10-16 中国工程物理研究院激光聚变研究中心 X-ray Optical Framing Imaging System

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CN111443062A (en) * 2020-04-26 2020-07-24 中国科学院西安光学精密机械研究所 Ultrafast detection device and method for transient refractive index of semiconductor material
CN111781629A (en) * 2020-07-09 2020-10-16 中国工程物理研究院激光聚变研究中心 X-ray Optical Framing Imaging System

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