CN114777967A - Wide-range flexible pressure sensor and preparation method thereof - Google Patents

Wide-range flexible pressure sensor and preparation method thereof Download PDF

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Publication number
CN114777967A
CN114777967A CN202210335287.8A CN202210335287A CN114777967A CN 114777967 A CN114777967 A CN 114777967A CN 202210335287 A CN202210335287 A CN 202210335287A CN 114777967 A CN114777967 A CN 114777967A
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layer
flexible
flexible substrate
packaging
pressure sensor
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冯敬东
周震
其他发明人请求不公开姓名
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Suzhou Leanstar Electronic Technology Co ltd
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Suzhou Leanstar Electronic Technology Co ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/12—Layered products comprising a layer of synthetic resin next to a fibrous or filamentary layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B33/00—Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/14—Printing or colouring
    • B32B38/145—Printing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B5/00—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts
    • B32B5/02—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by structural features of a fibrous or filamentary layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B5/00—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts
    • B32B5/22—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by the presence of two or more layers which are next to each other and are fibrous, filamentary, formed of particles or foamed
    • B32B5/24—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by the presence of two or more layers which are next to each other and are fibrous, filamentary, formed of particles or foamed one layer being a fibrous or filamentary layer
    • B32B5/26—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by the presence of two or more layers which are next to each other and are fibrous, filamentary, formed of particles or foamed one layer being a fibrous or filamentary layer another layer next to it also being fibrous or filamentary
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/02—Apparatus or processes specially adapted for manufacturing resistors adapted for manufacturing resistors with envelope or housing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/065—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/28—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
    • H01C17/281—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals by thick film techniques
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B2038/0052—Other operations not otherwise provided for
    • B32B2038/0076—Curing, vulcanising, cross-linking
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/50—Properties of the layers or laminate having particular mechanical properties
    • B32B2307/558—Impact strength, toughness

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

The invention relates to a wide-range flexible pressure sensor and a preparation method thereof. The invention realizes the pressure enhancement perception detection of the maximum measuring range of 1000N through the design of the hole microstructure and the special bulge structure, and meanwhile, the wide-range flexible device also has good curved/planar conformal attachment detection and better linear output. The flexible additive manufacturing technology is used for integrated molding, so that good adhesion, bonding force and stability among layers are guaranteed, the preparation process is simple, the cost is low, and batch production and preparation are easy.

Description

Wide-range flexible pressure sensor and preparation method thereof
Technical Field
The invention relates to the technical field of flexible pressure sensor preparation, in particular to a wide-range flexible pressure sensor and a preparation method thereof.
Background
With the rapid development of the flexible sensing technology, the flexible sensing technology is widely applied to the fields of internet of things, intelligent wearing, medical health, consumer electronics, intelligent automobiles, human-computer interaction and the like. In recent years, flexible pressure sensors based on flexible sensing technology have great progress in aspects of sensitivity, hysteresis, thickness and the like, but the pressure detection range of the flexible pressure sensors needs to be further expanded in partial market application scenes, and the maximum detection range of the conventional flexible pressure sensors is about 100N at present, so that the requirements of wide-range application scenes are difficult to meet. In order to solve the challenge, the invention provides a wide-range flexible pressure sensor and a preparation method thereof, aiming at some technical problems existing in the existing flexible pressure sensor preparation technology.
Disclosure of Invention
The technical problem to be solved by the invention is to provide a wide-range flexible pressure sensor and a preparation method thereof, wherein the wide-range flexible pressure sensor has super-strong flexibility and mechanical property, and can realize high-sensitivity pressure detection feedback and pressure enhancement perception detection with the maximum range of 1000N.
The technical scheme adopted by the invention for solving the technical problem is as follows:
a wide range flexible pressure sensor comprising:
the device comprises a lower-layer flexible substrate, a first electrode layer and a second electrode layer, wherein a patterned electrode layer is arranged on the surface of the lower-layer flexible substrate;
the surface of the upper layer flexible substrate is provided with a high-sensitivity resistance sensitive layer;
the flexible packaging structure comprises a lower flexible substrate, an upper flexible substrate, a patterned electrode layer, a flexible packaging layer, a flexible supporting layer and a flexible packaging layer, wherein the flexible supporting layer and the flexible packaging layer are positioned between the lower flexible substrate and the upper flexible substrate, and a gap is formed between the patterned electrode layer and the high-sensitivity resistance sensitive layer;
the elastic support layer is arranged at the patterned electrode gap on the surface of the lower flexible substrate or on the high-sensitivity resistance sensitive layer on the surface of the upper flexible substrate, and the thickness of the elastic support layer is far greater than that of the high-sensitivity resistance sensitive layer;
the flexible packaging layer is used for laminating and packaging an upper flexible substrate and a lower flexible substrate, and the flexible packaging layer is arranged on the periphery of the upper flexible substrate and the lower flexible substrate.
Further, the upper and lower layers of flexible substrates are made of flexible films or elastic textile fabrics.
Furthermore, the patterned electrode layer is formed by printing, sintering and curing silver nanowires, silver paste or PEDOT, namely PSS high-molecular conductive material.
Furthermore, the high-sensitivity resistance sensitive layer is formed by adopting a carbon nano material and an elastic high polymer and printing, sintering and curing through a gas-solid two-phase pore-forming technology, so that the high-sensitivity resistance sensitive layer with a micropore structure is formed.
Furthermore, the supporting layer is of a punctiform, strip-shaped or columnar elastic bulge structure and is formed by printing a liquid insulating elastic substance and then curing or adhering a solid insulating elastic substance.
Further, the flexible packaging layer is formed by printing or spin-coating a flexible insulating high polymer liquid material to form a film and then curing the film, or a solid flexible adhesive film is pasted to carry out laminating packaging.
A preparation method of a wide-range flexible pressure sensor comprises the following steps:
s1, preparing a patterned electrode layer, printing the patterned electrode layer on the lower-layer flexible substrate, and curing and molding;
s2, preparing a high-sensitivity resistance sensitive layer, printing a high-sensitivity resistance sensitive material on the upper-layer flexible substrate, and curing and forming;
s3, preparing an elastic support layer, and printing or sticking the elastic support layer on the patterned electrode gap on the surface of the lower flexible substrate or the high-sensitivity resistance sensitive layer on the surface of the upper flexible substrate, wherein the thickness of the elastic support layer is greater than that of the high-sensitivity resistance sensitive layer;
and S4, attaching and packaging, namely printing or pasting a flexible packaging layer on the periphery of the lower layer flexible substrate or the upper layer flexible substrate, and attaching and packaging the upper layer flexible substrate and the lower layer flexible substrate.
The beneficial effects of the invention are:
1. according to the invention, the pressure enhancement perception detection of the maximum range of 1000N is realized through the design of the hole microstructure and the special bulge structure, and meanwhile, the wide-range flexible device also has good curved/planar conformal attachment detection and good linear output.
2. The wide-range flexible pressure sensor is integrally formed by a flexible additive manufacturing technology so as to ensure good adhesion, bonding force and stability among layers, and the wide-range flexible pressure sensor is simple in preparation process, low in cost and easy to produce and prepare in batches.
Drawings
Fig. 1 is a schematic structural diagram of a wide-range flexible pressure sensor according to the present invention.
Fig. 2 is an enlarged view of fig. 1.
FIG. 3 is a flow chart of the fabrication of a wide range flexible pressure sensor of the present invention.
FIG. 4 is a diagram of a range test according to an embodiment of the present invention.
Wherein: 1. the flexible substrate comprises a lower-layer flexible substrate, 101, a patterned electrode layer, 2, an upper-layer flexible substrate, 201, a high-sensitivity resistance sensitive layer, 3, an elastic supporting layer and 4 and a flexible packaging layer.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
A large-range flexible pressure sensor is shown in figures 1 and 2 and comprises an upper flexible substrate, a lower flexible substrate, a patterned electrode layer 101, a high-sensitivity resistance sensitive layer 201, an elastic support layer 3 and a flexible packaging layer 4. The patterning electrode layer 101 is fixed on the surface of the lower flexible substrate 1 in a printing mode, the high-sensitivity resistance sensitive layer 201 is fixed on the surface of the upper flexible substrate 2 in a printing mode, the elastic support layer 3 and the flexible packaging layer 4 are located between the upper flexible substrate and the lower flexible substrate, a gap is formed between the upper flexible substrate 2 and the lower flexible substrate 1, the patterning electrode layer 101 and the high-sensitivity resistance sensitive layer 201 are separated to form the gap, the elastic support layer 3 is used for supporting the electrode layer and the sensitive layer to enable the electrode layer and the sensitive layer to form a proper distance, and the flexible packaging layer 4 is used for fitting and packaging the upper flexible substrate and the lower flexible substrate together.
The elastic support layer 3 separates the patterned electrode layer 101 from the high-sensitivity resistance sensitive layer 201 to form a gap, so that the patterned electrode layer and the sensitive layer can support the patterned electrode layer and the sensitive layer to a certain extent, on one hand, the patterned electrode layer and the resistance sensitive layer can provide a corresponding large range, and on the other hand, the patterned electrode layer and the high-sensitivity resistance layer can be quickly separated after pressure detection is conveniently pressed through the elasticity of the elastic support layer, so that the sensitivity of the sensor is improved. The thickness of the elastic support layer 3 is much greater than the thickness of the high-sensitivity resistance sensitive layer 201 and the patterned electrode layer 101, so that the patterned electrode layer and the high-sensitivity resistance sensitive layer are supported and isolated. The resilient support layer 3 is disposed at the patterned electrode gaps on the surface of the lower flexible substrate, as shown in fig. 2, and may be disposed between the upper and lower gaps of the left and right fingers of the interdigital electrode, or at the front end of the finger, for example, as an interdigital electrode. The elastic supporting layer 3 may also be disposed on the high-sensitivity resistance sensitive layer 201, and when disposed on the sensitive layer, it is necessary to avoid a flexible patterned electrode layer on the surface of the lower flexible substrate, and avoid affecting the contact area between the sensitive layer and the electrode layer, thereby improving the sensitivity of pressure detection.
The flexible packaging layer 4 is used for attaching and packaging the upper and lower layers of flexible substrates together, is arranged on the periphery of the upper and lower layers of flexible substrates, and surrounds and packages the flexible electrode of the patterned electrode layer 101 and the high-sensitivity resistance sensitive layer 201 to form the wide-range flexible pressure sensor.
The flexible film or the elastic textile fabric with the upper and lower flexible substrates is preferably a flexible film, and the flexible film with different thicknesses (1 μm-1 mm), different softness (such as 2H, 4H), and different light transmittances (one of completely transparent, semi-transparent, or opaque) can be selected according to specific application requirements, and is selected from but not limited to one of PET, PEN, PI, PC, PDMS, EVA, PVA, TPU, TPE (polyester, polyethylene naphthalate, polyimide, ethylene-vinyl acetate copolymer, polyvinyl alcohol, polydimethylsiloxane, polyethylene terephthalate, polymethyl methacrylate, polyvinyl alcohol, polyethylene, and the like). When the elastic textile fabric is selected as the flexible substrate, a layer of elastic high polymer film is printed to play a compact supporting role when the patterned electrode layer and the resistance sensitive layer are printed, and the elastic high polymer film adopts TPU, TPE, PDMS or silica gel and the like.
The patterned electrode layer 101 is formed by printing a conductive material (silver nanowire, silver paste or PEDOT: PSS polymer conductive material) on a flexible substrate, sintering and curing, and is specifically customized according to the requirement, wherein the conductive material includes, but is not limited to, an interdigital shape and a spiral shape. The patterned electrode layer comprises a sensing area (the sensing area is in the shape of the interdigital or spiral) which is in contact with the high-sensitivity resistance sensitive layer, and also comprises a specific lead wire which is led out from the sensing area, and the lead wire leads out of the flexible packaging layer for signal transmission.
The high-sensitivity resistance sensitive layer 201 is formed by printing a carbon nano material and an elastic high polymer with super-strong flexibility and mechanical property on an upper flexible substrate, sintering and curing the materials by a gas-solid two-phase pore-forming technology, and forming the high-sensitivity resistance sensitive layer with a micro-pore structure. The carbon nano material is preferably selected from one or more of carbon nano tube, graphene, Reduced Graphene Oxide (RGO) and the like, and the elastic high polymer is preferably selected from one or more of TPU, TPE, PDMS, silica gel and other high polymer materials. The principle of the gas-solid two-phase pore-forming technology is that during sintering and curing of a liquid with high viscosity, a plurality of micro-grooves and micro-pores are formed on the surface of a material during curing along with the volatilization of a volatile solvent in the liquid. According to the tunneling effect, the linear range and the detection range of the cavity deformation of the pressure-sensitive material to the external pressure are wider than those without the cavity, so that the pressure enhancement perception detection with the maximum range of 1000N is realized, and good linear output can be realized through the carbon nano material and the elastic high polymer material with super-high flexibility and mechanical property, and the adhesion and the stability of the material to the flexible substrate are better.
The elastic supporting layer 3 is formed by printing a liquid insulating elastic substance and then curing or sticking a solid insulating elastic substance by adopting a punctiform, strip or columnar elastic bulge structure. The flexible packaging layer 4 is formed by printing or spin-coating a flexible insulating polymer liquid material to form a film and then curing the film, or a solid flexible adhesive film is directly pasted to carry out laminating packaging.
The invention also provides a preparation method of the wide-range flexible pressure sensor, which comprises the following steps as shown in fig. 3:
s1, preparing a patterned electrode layer, printing patterned electrode layer slurry on the lower-layer flexible substrate, and drying, curing and molding at high temperature;
s2, preparing a high-sensitivity resistance sensitive layer, printing high-sensitivity resistance sensitive slurry on an upper-layer flexible substrate, drying at high temperature, curing and forming, and forming a plurality of micro-pores on the surface of the sensitive layer along with volatilization of a volatile solvent in the slurry;
s3, preparing an elastic supporting layer, and printing or sticking the elastic supporting layer on the patterned electrode gap on the surface of the lower layer flexible substrate or the high-sensitivity resistance sensitive layer on the surface of the upper layer flexible substrate, wherein the thickness of the elastic supporting layer is larger than that of the high-sensitivity resistance sensitive layer;
and S4, attaching and packaging, namely printing or pasting a flexible packaging layer on the periphery of the lower layer flexible substrate or the upper layer flexible substrate, and attaching and packaging the upper layer flexible substrate and the lower layer flexible substrate.
As shown in fig. 4, which is a measurement range test chart of the wide-range flexible pressure sensor of the present invention, it can be known from the chart that the sensor can realize the pressure enhanced sensing detection between 0N and 1000N, and meanwhile, the wide-range flexible device also has good curved/planar conformal attachment detection and good linear output.
The above-mentioned embodiments, objects, technical solutions and advantages of the present invention are further described in detail, it should be understood that the above-mentioned embodiments are only examples of the present invention, and should not be construed as limiting the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (7)

1. A wide-range flexible pressure sensor, comprising: the method comprises the following steps:
the surface of the lower layer flexible substrate is provided with a patterned electrode layer;
the surface of the upper layer flexible substrate is provided with a high-sensitivity resistance sensitive layer;
the elastic support layer and the flexible packaging layer are positioned between the lower layer flexible substrate and the upper layer flexible substrate, a gap is formed between the upper layer flexible substrate and the lower layer flexible substrate through the elastic support layer and the flexible packaging layer, and a gap is formed between the patterned electrode layer and the high-sensitivity resistance sensitive layer;
the elastic support layer is arranged at the patterned electrode gap on the surface of the lower-layer flexible substrate or on the high-sensitivity resistance sensitive layer on the surface of the upper-layer flexible substrate, and the thickness of the elastic support layer is far greater than that of the high-sensitivity resistance sensitive layer;
the flexible packaging layer is used for laminating and packaging an upper flexible substrate and a lower flexible substrate, and the flexible packaging layer is arranged on the periphery of the upper flexible substrate and the lower flexible substrate.
2. A wide range flexible pressure sensor as in claim 1, wherein: the upper and lower layers of flexible substrates are made of flexible films or elastic textile fabrics.
3. A wide range flexible pressure sensor as in claim 1, wherein: the patterned electrode layer is formed by printing, sintering and curing silver nanowires, silver paste or PEDOT, PSS high-molecular conductive materials.
4. A wide range flexible pressure sensor as in claim 1, wherein: the high-sensitivity resistance sensitive layer is formed by printing, sintering and curing a carbon nano material and an elastic high polymer through a gas-solid two-phase pore-forming technology, and a high-sensitivity resistance sensitive layer with a micro-hole structure is formed.
5. A wide range flexible pressure sensor as in claim 1, wherein: the supporting layer is a point-shaped, strip-shaped or columnar elastic protruding structure and is formed by printing a liquid insulating elastic substance and then curing or adhering a solid insulating elastic substance.
6. A wide range flexible pressure sensor as in claim 1, wherein: the flexible packaging layer is formed by printing or spin-coating a flexible insulating high polymer liquid material to form a film and then curing the film, or pasting a solid flexible glue film to carry out laminating packaging.
7. A preparation method of a wide-range flexible pressure sensor is characterized by comprising the following steps: the method comprises the following steps:
s1, preparing a patterned electrode layer, printing patterned electrode layer slurry on the lower-layer flexible substrate, and curing and forming;
s2, preparing a high-sensitivity resistance sensitive layer, printing high-sensitivity resistance sensitive slurry on the upper-layer flexible substrate, and curing and forming;
s3, preparing an elastic support layer, and printing or sticking the elastic support layer on the patterned electrode gap on the surface of the lower flexible substrate or the high-sensitivity resistance sensitive layer on the surface of the upper flexible substrate, wherein the thickness of the elastic support layer is greater than that of the high-sensitivity resistance sensitive layer;
and S4, attaching and packaging, namely printing or pasting a flexible packaging layer on the periphery of the lower layer flexible substrate or the upper layer flexible substrate, and attaching and packaging the upper layer flexible substrate and the lower layer flexible substrate.
CN202210335287.8A 2022-03-31 2022-03-31 Wide-range flexible pressure sensor and preparation method thereof Pending CN114777967A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024103263A1 (en) * 2022-11-15 2024-05-23 京东方科技集团股份有限公司 Pressure sensor, manufacturing method therefor, and electronic apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024103263A1 (en) * 2022-11-15 2024-05-23 京东方科技集团股份有限公司 Pressure sensor, manufacturing method therefor, and electronic apparatus

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