CN114764781A

CN114764781A - Method and device for adjusting flatness of slide glass table

Info

Publication number: CN114764781A
Application number: CN202110742805.3A
Authority: CN
Inventors: 陈鲁; 王天民; 张嵩
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2020-12-31
Filing date: 2021-06-30
Publication date: 2022-07-19

Abstract

A method and a device for adjusting the flatness of a slide glass platform are provided, the slide glass platform comprises a plurality of supporting columns, the supporting columns are used for bearing an object to be borne, and the leveling method comprises the following steps: according to the first region, the operation region of the object to be supported can be quickly and pertinently locked, the distance between the target supporting column and the image acquisition device is changed through the pre-adjustment treatment, the size of the surface of the object to be supported in the depth of view of the image acquisition device is changed, after the pre-adjustment treatment is carried out, the second region is acquired according to the image of the object to be supported, which is acquired by the image acquisition device, the adjustment direction of the target supporting column is determined according to the change from the first analysis diagram to the second analysis diagram and the adjustment direction of the pre-adjustment treatment, the target supporting column corresponding to the operation region is prevented from being adjusted blindly, the adjustment of the target supporting column is enabled to be circulated in a sealed manner, the adjustment efficiency of the planeness of the object to be supported is improved, the adjustment accuracy of the planeness of the object to be supported is improved, and better planeness of the object to be supported is easier to obtain.

Description

Method and device for adjusting flatness of slide glass table

Technical Field

The invention relates to the field of optical detection, in particular to a method and a device for adjusting the flatness of a slide glass table.

Background

In recent years, display technology has been rapidly developed, and the demand for display panels has been increasing. However, the conventional manufacturing technology of display panels cannot completely avoid the occurrence of display defects, and therefore, in the manufacturing process of various display panels such as TFT, LTPS, AM-OLED, etc., it is necessary to perform optical inspection on the display panel, for example, to check whether the panel has defects such as color mura and bright and dark spots.

With the development of the intelligent manufacturing technology, Automatic optical Inspection (AOI for short) is increasingly widely used in the production Inspection link of display panels. The automatic optical detection adopts an unmanned automatic detection mode, has high detection speed, stable performance and good controllability, and becomes a main detection mode for replacing manual detection.

At present, in panel automatic optical inspection equipment, due to cost considerations, a probe for performing full inspection scanning is generally not equipped with an automatic focusing sensor, and then in order to ensure the focusing definition of the full inspection probe, it is necessary to ensure that the flatness level of the panel inside a machine table cannot exceed the depth of field of a full inspection lens. In the detection equipment, a slide holder is generally adopted to carry the panel, a plurality of Support columns (Support pins) for supporting the panel are arranged on the slide holder, the flatness of the panel is mainly ensured by manually adjusting the heights of the Support columns, the factors are numerous, the adjustment accuracy requirement is high, and therefore, the leveling work usually takes a long time; and in some cases, even if the adjustment area of the support column is determined, the adjustment direction of the support column is wrong, resulting in a low adjustment efficiency of the panel.

Disclosure of Invention

The embodiment of the invention solves the problem of providing a method and a device for adjusting the flatness of a slide glass platform, and improving the flatness of an object to be carried.

In order to solve the above problems, an embodiment of the present invention provides a method for adjusting the flatness of a slide stage, where the slide stage includes a plurality of support pillars, and the support pillars are used to support an object to be supported, and the method includes: acquiring a first analysis chart of an object to be borne by an image acquisition device; acquiring a first area in the first analysis chart, wherein the uniformity of the first area is less than or equal to a preset threshold value; acquiring an operation area of the object to be carried according to the first area, wherein the first area is a first analysis chart of the operation area of the object to be carried; acquiring a target supporting column according to the operation area, wherein the target supporting column is a supporting column for supporting the operation area; carrying out pre-adjustment processing to change the distance between the target supporting column and the image acquisition device; after the pre-adjustment treatment, acquiring a second analysis chart of the object to be carried according to the image acquisition device, wherein the second analysis chart of the operation area of the object to be carried is a second area; and determining the adjusting direction of the target supporting column according to the change from the first analysis diagram to the second analysis diagram and the adjusting direction of the pre-adjusting treatment.

The embodiment of the invention also provides a device for adjusting the flatness of the slide glass table, which comprises: the slide holder comprises a plurality of supporting columns, and the supporting columns are used for bearing an object to be carried; the image acquisition device is used for acquiring images of the object to be borne when the distances between the image acquisition device and the object to be borne are different; the processing unit is used for acquiring a first area in the first analysis chart according to the first analysis chart of the object to be carried acquired by the image acquisition device, wherein the uniformity of the first area is less than or equal to a preset threshold value; the operation area is used for acquiring the object to be carried according to the first area, and the first area is a first analysis chart of the operation area of the object to be carried; the operation area is used for acquiring the object to be carried according to the first area, and the first area is a first analysis chart of the operation area of the object to be carried; the target support column is obtained according to the operation area; the second analysis chart is used for acquiring the object to be carried according to the image acquisition device, and the second analysis chart of the operation area of the object to be carried is a second area; the analysis unit is used for determining the adjusting direction of the target supporting column according to the change from the first analysis chart to the second analysis chart and the adjusting direction of the pre-adjusting treatment; the adjusting unit is used for carrying out pre-adjusting processing and changing the distance between the target supporting column and the image acquisition device; for adjusting the target support column in accordance with the adjustment direction determined by the analysis unit.

Compared with the prior art, the technical scheme of the embodiment of the invention has the following advantages:

in the method for adjusting the flatness of the slide glass stage provided by the embodiment of the invention, according to the first region, the operation region of the object to be supported can be quickly and pertinently locked, the distance between a target supporting column and the image acquisition device is changed through preconditioning treatment, so that the size of the surface of the object to be supported in the depth of field of the image acquisition device is changed, after the distance between the target supporting column and the image acquisition device is preconditioned, a second region is acquired according to the image of the object to be supported acquired by the image acquisition device, the adjusting direction of the target supporting column is determined according to the change from the first analysis diagram to the second analysis diagram and the adjusting direction of the preconditioning treatment, the target supporting column corresponding to the operation region is prevented from being blindly adjusted, so that the adjustment of the target supporting column is just-in-rules and-round, and the adjusting efficiency of the flatness of the object to be supported is improved, and the adjustment accuracy of the flatness of the object to be supported is improved, and better flatness of the object to be supported is easier to obtain.

Drawings

FIG. 1 is a schematic view of a stage according to the present invention;

FIG. 2 is a schematic flow chart of the adjusting method for the flatness of the slide glass table of the present invention;

FIG. 3 is a schematic view of the depth of field of the image capturing device in the adjusting method for the flatness of the slide glass stage according to the present invention;

FIG. 4 is a schematic view of a first region of the present invention located above a first plane;

FIG. 5 is a schematic view of the first region of the present invention positioned below the second plane;

FIG. 6 is a schematic flow chart of a first analysis chart obtained in the adjusting method for the flatness of the slide glass table according to the present invention;

FIG. 7 is a graph of sharpness distribution in the method of adjusting the flatness of the slide glass stage according to the present invention;

FIG. 8 is a schematic view of recording position information of support posts on a stage on the sharpness profile;

FIG. 9 is a first example of a second region of the present invention;

FIG. 10 is a second example of a second zone of the present invention;

FIG. 11 is a third example of a second region of the present invention;

FIG. 12 is a fourth example of a second region of the present invention;

fig. 13 is a schematic structural diagram of the adjusting device for the flatness of the slide glass table of the invention.

Detailed Description

It is known from the background art that, in the panel automatic optical inspection apparatus, the probe for performing full inspection scanning is generally not equipped with an automatic focusing sensor, and in order to ensure the focusing definition of the full inspection probe, it is necessary to ensure that the flatness level of the panel inside the machine platform cannot exceed the depth of field of the full inspection lens. In the detection equipment, a slide holder is generally adopted to carry the panel, a plurality of Support columns (Support pins) for supporting the panel are arranged on the slide holder, the flatness of the panel is mainly ensured by manually adjusting the heights of the Support columns, the factors are numerous, the adjustment accuracy requirement is high, and therefore, the leveling work usually takes a long time; and in some cases, even if the adjustment area of the support column is determined, the adjustment direction of the support column is wrong, resulting in a low adjustment efficiency of the panel.

In order to solve the technical problem, an embodiment of the present invention provides a method for adjusting the flatness of a slide stage, where an operating area of an object to be supported can be quickly and specifically locked according to a first region, a distance between a target supporting column and an image acquiring device is changed through a pre-adjustment process, so that a dimension of a surface of the object to be supported in a depth of a scene of the image acquiring device changes, after the distance between the target supporting column and the image acquiring device is pre-adjusted, a second region is acquired according to an image of the object to be supported acquired by the image acquiring device, an adjusting direction of the target supporting column is determined according to a change from a first analysis diagram to a second analysis diagram and an adjusting direction of the pre-adjustment process, so as to avoid blind adjustment of the target supporting column corresponding to the operating area, and make adjustment of the target supporting column possible under rules, the adjusting efficiency of the flatness of the object to be supported is improved, the adjusting accuracy of the flatness of the object to be supported is improved, and the better flatness of the object to be supported is easier to obtain.

In order to make the aforementioned objects, features and advantages of the embodiments of the present invention comprehensible, specific embodiments accompanied with figures are described in detail below.

Referring to fig. 1, a stage 300 is provided, the stage 300 is used for carrying an object to be carried, and the stage 300 includes a plurality of support pins 100(support pins).

Subsequently, the object to be supported is placed on the slide stage 300, and the object to be supported is adjusted by the slide stage flatness adjusting method. In this embodiment, the object to be supported includes a panel 400, and the stage 300 is used to support the panel 400 to be supported for Automatic Optical Inspection (AOI).

The supporting column 100 is used for supporting a panel 400 subsequently placed on the stage 300, the supporting column 100 can be relatively displaced with the stage 300 in the normal direction of the surface of the stage 300, the flatness of the surface of the panel 400 can be adjusted by adjusting the height of the supporting column 100, so that the flatness of the surface of the panel 400 is high, and in the process of detecting the panel 400 by the automatic optical detection equipment for the panel 400, even if an all-inspection lens of the all-inspection scanning is not provided with an automatic focusing sensor, the whole top surface of the panel 400 can be positioned in the depth of field (DOF) range of the all-inspection lens, so that the flatness of the surface of the panel 400 meets the requirement of automatic optical detection.

In this embodiment, the support column 100 is manually adjusted to move in the direction of the normal of the stage 300. In other embodiments, the support columns may be equipped with a corresponding drive system, so that the respective support columns on the stage are moved relative to each other in the direction of the normal of the stage by a motorized device.

In this embodiment, the supporting pillars 100 are arranged on the stage 300 in a matrix manner.

Compared with the situation that the support columns 100 are arranged on the slide holder 300 in a scattered and non-chapter manner, the support columns 100 are arranged in a matrix manner, so that all areas of the panel 400 subsequently placed on the support columns 100 can be uniformly supported, and the probability of the surface of the panel 400 having depressions or protrusions due to the sparse or dense distribution of the support columns 100 is reduced.

FIG. 2 is a schematic flow chart of the adjusting method for the flatness of the slide glass stage according to the present invention.

Step S1, referring to fig. 3 in conjunction with fig. 2, a first analysis chart of the object to be carried is acquired by the image acquisition device 10 (shown in fig. 3).

The image acquisition device 10 is used for acquiring an image of the surface of the object to be carried.

The Depth of Field (DOF) of the image acquisition apparatus 10 is the distance from the closest focused object plane to the farthest focused object plane. In the present embodiment, the depth of field DOF of the image acquisition apparatus 10 is a region between a first plane a (closest focused object plane) and a second plane B (farthest focused object plane).

In this embodiment, the image acquiring apparatus 10 includes a full-inspection scanning probe and a lens. In other embodiments, the image acquisition device further includes a detector, and specifically, the detector includes an area array detector and a linear array detector.

In this embodiment, the depth of field of the image capturing apparatus 10 is 20 μm to 100 μm.

In this embodiment, the image capturing device 10 is located above the stage 300, and the distance between the image capturing device 10 and the object to be carried can be changed in the normal direction of the surface of the stage 300.

It should be noted that in the adjusting method of the flatness of the slide stage, an object to be carried, that is, a panel 400, is placed on the supporting column 100.

In this embodiment, the panel 400 includes: one or more of TN panel (Twisted Nematic), IPS panel (In-Plane-Switching), VA panel (Vertical Alignment). The TN panel has the characteristics of mature technology, low cost and the like. And the response speed of the TN screen is high, the response time can reach 1ms, no ghost occurs, and the TN screen can nondestructively present scene details with high-speed change. The IPS panel is harder, better than the TN panel in the aspects of color display, visual angle and the like, has better color presenting range and accuracy, has a large wide viewing angle, and cannot generate color cast when being viewed from different angles. The VA panel has the characteristics of higher latitude and contrast, which can reach 3000: 1, the black and white in the picture are purer, and the problems of light leakage and the like can not occur. The panel 400 further includes: an LCD panel, an OLED panel, or a mobile phone display screen panel, etc.

Referring to fig. 4 to 6, the step of acquiring a first analysis chart of the object to be carried by the image acquiring device 10 includes:

and step S11, imaging the bearing object through the image acquisition device to acquire a first image of the bearing object, wherein the gray value of each point on the first image represents the light intensity returned by the corresponding point on the surface of the bearing object.

Specifically, in the step of acquiring the first image of the supported object through the full-inspection scanning probe and the lens, the first image of the surface of the panel 400 is acquired.

Note that the first image is composed of a plurality of pixels.

Step S12, a first resolution image of the first image is obtained as a first analysis image, and the resolution values of each point of the first resolution image represent the resolution of the first image of the corresponding unit area on the surface of the bearing object.

The first analysis map is prepared for subsequent acquisition of the first region L1. In this embodiment, the first analysis graph includes a definition profile.

The first region L1 is formed in two ways. As a first example, the curve represents the plane of the panel 400, above which a part of the surface of said panel 400 is located (as shown in fig. 4), and as a second example, the curve represents the plane of the panel 400, below which a part of the surface of said panel 400 is located (as shown in fig. 5).

Specifically, the step of acquiring a first resolution image of the first image as a first analysis chart includes: the first image is divided into a plurality of unit areas, each unit area including a plurality of pixels.

Specifically, in the step of dividing the first image into a plurality of unit regions, the first image is divided into a plurality of rectangular regions, each rectangular region is used as one unit region, and preparation is made for subsequently acquiring the gray value of the first image of each rectangular region.

In the step of dividing the first image into a plurality of rectangular regions, the size of the rectangular region is determined according to the data amount of the first image and the required degree of definition of the definition distribution pattern to be formed subsequently.

As an example, in the step of dividing the first image into the plurality of unit regions, the sides of the rectangular regions each include 80 pixels to 120 pixels.

Specifically, the step of acquiring a first resolution image of the first image as a first analysis map further includes: and respectively acquiring the definition values of all the unit areas according to the gradient function, and acquiring the first definition image according to the corresponding relation between the definition values and all the unit areas.

And then acquiring a first area, namely acquiring a non-uniform area in the first definition distribution diagram, wherein the non-uniform area corresponds to an area with a larger gray value in the first image, and correspondingly acquiring the out-of-focus position of the surface of the panel 400 in the image acquisition device. Subsequently, according to the non-uniform area, the position of the supporting column 100 on the slide holder 300, which needs to be adjusted, can be obtained.

In this embodiment, the gradient function includes a Brenner gradient function, a Tenengrad gradient function, a Laplacian gradient function, and an EAV point sharpness algorithm function. In this embodiment, a Brenner gradient function is adopted to process the acquired gray value of the first image in each rectangular region, so as to obtain a definition distribution graph of the first image. In other embodiments, other functions may be used to perform the gray scale processing on the first image in the rectangular region.

The Brenner function is used as an image definition evaluation function, and is called a gradient filter method (gradient focusing method) with the algorithm formula of

D(f)＝∑_y∑_x|f(x+2，y)-f(x，y)|²

In the formula, d (f) is the image definition, and f (x, y) represents the gray value of the pixel point (x, y) corresponding to the image f.

When the scanning probe scans the surface of the panel 400, and the panel 400 is located within the depth of field (DOF) range of the scanning probe, that is, when the panel is focused, the first image is clear, the high frequency components in the image are more, and the difference value between an abrupt change pixel and an adjacent pixel is also increased.

Specifically, the step of respectively obtaining the definition values of the unit regions according to the gradient function includes: obtaining a definition value of each pixel point in the rectangular area according to the gray value of the first image; and averaging the definition values of the pixel points of the rectangular regions to obtain an average definition value of each rectangular region.

In this embodiment, the gray value of the first image is obtained by using an averaging method.

In other embodiments, the first analysis chart is a grayscale image, and the step of acquiring the first analysis chart of the object to be carried by the image acquisition device includes: and imaging the bearing object through the image acquisition device to acquire a first image, taking the first image as the first analysis chart, and representing the light intensity returned by the corresponding point on the surface of the bearing object by the gray value of each point on the first analysis chart.

Step S2, obtaining a first region L1 (as shown in fig. 4 and 5) in the first analysis map, wherein the first region is a region with uniformity less than or equal to a preset threshold.

In the embodiment of the present invention, the first image is obtained by the image obtaining device 10 according to the object to be supported, and the first analysis chart is obtained according to the first image, so that each region on the first analysis chart corresponds to each region on the object to be supported, so that according to the first region L1 of the first analysis chart, the operation region of the object to be supported corresponding to the first region L1 can be quickly and specifically locked, and after the target support column corresponding to the operation region is subsequently determined, the height of the target support column corresponding to the operation region is adjusted, so that the adjustment efficiency of the flatness of the panel 400 is improved, the adjustment accuracy of the flatness of the panel 400 is improved, and a better flatness of the panel 400 is more easily obtained.

In this embodiment, the step of obtaining the first area L1 according to the first analysis chart includes: and acquiring a non-uniform area of the first analysis chart as the first area L1 according to the definition value and preset parameters. In other embodiments, a non-uniform region of the first analysis map is further obtained as the first region according to the gray value and preset parameters.

In this embodiment, the first analysis chart is a definition distribution chart, and correspondingly, the non-uniform area of the first analysis chart is obtained according to the definition value and preset parameters of the definition distribution chart. In other embodiments, the first analysis map may also be a gray image, and correspondingly, the non-uniform region of the first analysis map is obtained according to the gray value of the gray image and the preset parameter.

In this embodiment, a non-uniform region (as shown in a solid-line frame in fig. 7) of the first analysis chart is obtained, where the non-uniform region is a region surrounded by a plurality of unit regions that are continuously distributed.

The uniformity of the unit area of the first area is less than or equal to a preset threshold value; and the ratio of the absolute value of the difference between the characterization values of the adjacent unit areas to the adjacent characteristic units is greater than a preset threshold value.

It should be noted that, for example, if a represents B, a known relationship exists between a and B.

The characterization value is a gray value or a definition value; the preset threshold value is 25% -35%.

The first image is obtained by using the image obtaining device 10, the definition distribution graph is obtained by processing according to the gray value in the first image, a non-uniform area in the definition distribution graph is obtained, namely, an area with a larger gray value of the surface of the first image, namely, the defocusing position of the surface of the panel 400 in the image obtaining device is obtained, and the support column 100 corresponding to the defocusing position on the slide holder 300 is adjusted to support or eliminate the support for the panel 400 at the defocusing position, so that the position of the panel 400 is changed, the adjustment efficiency of the flatness of the panel 400 is improved, the adjustment accuracy of the flatness of the panel 400 is improved, and better flatness of the panel 400 is more easily obtained.

Note that, before the preconditioning process is performed to change the distance between the target support column and the image acquisition device: and marking the supporting column 100 of the slide holder 300 on the first analysis chart according to the position information of the supporting column 100 to form a supporting column mark.

Specifically, the support posts 100 on the stage 300 are marked at equal ratios on the corresponding positions of the definition distribution patterns.

Step S3: and acquiring the operating area of the object to be carried according to the first area L1, wherein the first area is a first analysis chart of the operating area of the object to be carried.

And then, according to the operation area, the target support column corresponding to the operation area can be quickly and specifically locked, the distance between the object to be carried and the image acquisition device 10 is subsequently changed, a second area is acquired according to the image of the object to be carried acquired by the image acquisition device 10, and preparation is made for subsequently comparing the first area L1 with the second area.

Specifically, the step of acquiring the operation area of the object to be carried according to the first area L1 includes: a region corresponding to the first region L1 is taken as an operation region (in a solid line frame in fig. 7) or a region including the first region L1 is taken as an operation region.

And step S4, acquiring a target support column according to the operation area, wherein the target support column is a support column for supporting the operation area.

Specifically, the step of obtaining the target support column according to the operation area includes: and acquiring the target support column (as shown in a solid line box in fig. 8) according to the relative position relationship between the operation area and the support column mark of the first analysis chart.

In this embodiment, the target supporting column includes: the supporting columns covered by the operation area and the supporting columns with the distance to the edge of the operation area smaller than the preset distance are used as target supporting columns; the preset distance is larger than or equal to zero and smaller than the distance between the adjacent support columns.

Under the condition, the corresponding support columns in the operation area and the support columns in the preset distance range of the operation area are adjusted simultaneously, so that the adjustment effect of the object to be loaded in the operation area is guaranteed while the flatness adjustment efficiency of the operation area is improved.

It should be noted that, when the target supporting columns are only located inside the operating area, the number of the determined target supporting columns is relatively small, and the process time for subsequently adjusting the target supporting columns is short, which is beneficial to improving the adjustment efficiency of the surface flatness of the object to be supported; and the influence of the target support columns positioned in the operation area on the operation area is greater than the influence of the target support columns outside the operation area on the operation area, and only the target support columns in the operation area are subsequently adjusted, so that the adjustment efficiency of the flatness of the operation area is improved, and the adjustment effect of the object to be loaded in the operation area is ensured.

In other embodiments, the target supporting column corresponding to the operating area includes: and taking the support column corresponding to the surrounding operation area as the target support column.

This corresponds to the case when there are no target support posts inside the operating area. In this case, the surface flatness of the object to be carried in the operating area can only be adjusted by adjusting the target support columns that surround the operating area.

In this example, the absence of a target support column inside the operating field means that the operating field does not have a support column inside or does not have a complete support column inside.

In this example, having the target support column inside the operational zone means that the operational zone completely contains the support column.

In general, the number of the operation regions is plural.

In step S5, a pre-adjustment process is performed to change the distance between the target support column and the image capture device.

The image acquisition device 10 is used for acquiring an image of the surface of the object to be supported, the operation area of the object to be supported can be rapidly and pertinently locked according to the first area L1, the pre-adjustment processing is performed, the distance between the target supporting column and the image acquisition device is changed, the size of the area of the surface of the object to be supported in the depth of field (DOF) of the image acquisition device 10 is changed, after the pre-adjustment, the second area is acquired according to the image of the object to be supported acquired by the image acquisition device 10, the size of the first area L1 is compared with that of the second area, the direction to be adjusted of the target supporting column corresponding to the operation area can be acquired, the target supporting column corresponding to the operation area is prevented from being adjusted blindly, the adjustment of the target supporting column is in a rule and can be followed, the adjustment efficiency of the flatness of the object to be supported is improved, and the adjustment accuracy of the flatness of the object to be supported is improved, better flatness of the object to be carried can be obtained more easily.

In this embodiment, the step of pre-adjusting the distance between the panel 400 and the image acquisition device 10 includes: the distance between the stage and the image acquisition device 10 is increased or decreased.

In the step of performing the pre-adjustment process to change the distance between the target supporting column and the image capturing device, the distance between the target supporting column corresponding to the operating area and the image capturing device 10 is changed along the normal direction of the surface of the stage 300.

The distance is changed along the normal direction of the surface of the slide holder 300, so that the position of the projection of the image acquisition device 10 on the surface of the object to be carried is not changed, and therefore, in the process of obtaining the second area subsequently, the center of the first image obtained by the image acquisition device 10 coincides with the center of the first image obtained by the image acquisition device 10 in the process of obtaining the first area L1, and the position of the second area is easier to judge.

In this embodiment, the step of pre-adjusting the distance between the stage and the image capturing device 10 along the normal direction of the surface of the stage 300 includes: moving the target supporting column of the operation area toward or away from the image capturing device 10, or moving the image capturing device 10 toward or away from the operation area. In other embodiments, the image capture device and the target support column may both be moved away from or towards each other.

In this embodiment, by adjusting the position of the image capturing device 10, the difficulty of changing the distance between the panel 400 and the image capturing device 10 is reduced, so that the distance between the panel 400 and the image capturing device 10 can be accurately controlled, and the direction to be adjusted of the target supporting column in the operation area can be accurately obtained in the subsequent process.

In this embodiment, the image capturing apparatus 10 changes the distance from the panel 400 by a stepping motor, a driving hydraulic mechanism, a driving pneumatic device, or a servo motor.

In this embodiment, the preset distance is smaller than the depth of field of the image capturing device. Specifically, the preset distance is 25% to 35% of the depth of field of the image acquisition apparatus 10. Because the depth of field of the image acquisition apparatus 10 is 20 μm to 100 μm. As an example, when the depth of field of the image acquisition apparatus 10 is 20 μm, the pre-adjustment distance is 5 μm to 7 μm; as another example, when the depth of field of the image acquisition apparatus 10 is 100 μm, the pre-adjustment distance is 25 μm to 35 μm.

Step S6, as shown in fig. 9 to 12, after the pre-adjusting process, acquiring a second analysis chart of the object to be carried according to the image acquiring device, where the second analysis chart of the operation area of the object to be carried is a second area L2.

And comparing the first area L1 with the second area L2 to obtain the direction to be adjusted of the target support column corresponding to the operation area.

The step of acquiring the second area L2 by the image of the object to be carried acquired by the image acquiring device 10 includes: imaging the bearing object through the image acquisition device to acquire a second image of the bearing object, wherein the gray value of each point on the second image represents the light intensity returned by the corresponding point on the surface of the bearing object; and acquiring a second definition image of the second image as a second analysis image, wherein the definition value of the second definition image represents the definition of the second image of the corresponding unit area on the surface of the bearing object.

In this embodiment, the second analysis map includes a definition distribution map, and the preset parameter is that definition values of the feature pixels in the second region are all greater than 30% of definition values of adjacent pixels.

In other embodiments, the second analysis chart includes a gray scale image, and the step of obtaining the second analysis chart of the object to be carried by the image obtaining device includes: and imaging the bearing object through the image acquisition device to acquire a second image, taking the second image as a second analysis chart, and representing the light intensity returned by the corresponding point on the surface of the bearing object by the gray value of each point on the second analysis chart. In a gray-scale image, the preset parameter is that the gray-scale values of the characteristic pixels in the second region are all greater than 30% of the gray-scale value of the adjacent pixel.

In this embodiment, a process of acquiring the second region L2 according to the second image acquired by the image acquiring apparatus 10 is the same as the process of acquiring the first region L1, and details are not repeated herein, and the difference between the first region L1 and the second region L2 is that the first region L1 is acquired before pre-adjustment, and the second region L2 is acquired after pre-adjustment.

The second region L2 is a region surrounded by a plurality of unit regions which are continuously distributed.

It should also be noted that the embodiment of the present invention is used to determine the to-be-adjusted direction of the target supporting column of the operation area when the first area L1 is provided.

Step S7, referring to fig. 9 to 12, determines the adjustment direction of the target supporting column according to the change from the first analysis chart to the second analysis chart and the adjustment direction of the pre-adjustment process.

According to the embodiment of the invention, the second area is acquired according to the image of the object to be borne acquired by the image acquisition device, the adjustment direction of the target support column is determined according to the change from the first analysis diagram to the second analysis diagram and the adjustment direction of the pre-adjustment treatment, the target support column corresponding to the operation area is prevented from being adjusted blindly, so that the adjustment of the target support column is regulated in a regular way, the adjustment efficiency of the flatness of the object to be borne is improved, the adjustment accuracy of the flatness of the object to be borne is improved, and better flatness of the object to be borne is easier to obtain.

In this embodiment, determining the adjustment direction of the target supporting column according to the change from the first analysis diagram to the second analysis diagram and the adjustment direction of the pre-adjustment process includes: when the out-of-focus area in the second area is smaller than the out-of-focus area in the first area, the adjusting direction of the target supporting column enables the changing direction of the distance between the image acquisition device and the bearing table to be the same as the pre-adjusting process; when the out-of-focus area in the second area is larger than the out-of-focus area in the first area, the adjustment direction of the target support column reverses the direction of change of the distance between the image acquisition device and the stage to the pre-adjustment process.

In other embodiments, determining the adjustment direction of the target support column based on the change from the first analysis map to the second analysis map and the adjustment direction of the pre-adjustment process comprises: when the definition of the second area is larger than that of the first area, the adjusting direction of the target supporting column enables the changing direction of the distance between the image acquisition device and the bearing object to be the same as the pre-adjusting treatment; when the definition of the second area is smaller than that of the first area, the adjusting direction of the target supporting column enables the changing direction of the distance between the image acquisition device and the bearing object to be opposite to the pre-adjusting process.

In some further embodiments, the step of determining the adjustment direction of the target support column based on the variation from the first analysis map to the second analysis map and the adjustment direction of the pre-adjustment process comprises: acquiring a first definition image of the first image, wherein definition values of points of the first definition image represent the definition of the first image of a corresponding unit area on the surface of the bearing object; determining the adjusting direction of the target supporting column according to the first definition image, the second analysis image and the adjusting direction of the pre-adjusting treatment; or acquiring a second definition image of the second image, wherein definition values of points of the second definition image represent the definition of the second image in a unit area corresponding to the surface of the bearing object; and determining the adjusting direction of the target supporting column according to the second definition image, the first analysis image and the adjusting direction of the pre-adjusting treatment.

The adjusting direction of the target supporting column enables the changing direction of the distance between the image acquisition device and the bearing object to be the same as the pre-adjusting treatment, and the adjusting direction comprises the following steps: when the pre-adjusting treatment reduces the distance between the image acquisition device and the bearing table, the adjusting direction of the target supporting column is towards the image acquisition device; when the pre-adjusting treatment increases the distance between the image acquisition device and the bearing table, the adjusting direction of the target supporting column is away from the image acquisition device;

the adjusting direction of the target supporting column enables the changing direction of the distance between the image acquisition device and the bearing object to be opposite to the pre-adjusting process, and the adjusting direction comprises the following steps: when the pre-adjusting treatment reduces the distance between the image acquisition device and the bearing table, the adjusting direction of the target supporting column is away from the image acquisition device; when the pre-adjustment process increases the distance between the image acquisition device and the bearing table, the adjustment direction of the target supporting column is towards the image acquisition device.

Next, referring to fig. 9 to 12, the adjustment direction of the target support column is determined based on the change from the first analysis diagram to the second analysis diagram and the adjustment direction of the pre-adjustment process.

In a first example, in the step of performing a preconditioning process along a direction normal to the surface of the stage 300 to change the distance between the target support column and the image capturing device, the distance between the stage and the image capturing device 10 is decreased. In this embodiment, the image capturing device 10 is moved toward the object to be carried. In other embodiments, the target supporting column corresponding to the operation area may also be moved toward the image capturing device.

The distance between the bearing table and the image acquisition device 10 is reduced, so that the size of the area of the surface of the panel 400 in the depth of field of the image acquisition device 10 is changed, the defocusing range of the corresponding panel 400 in the image acquisition device 10 is changed, and the non-uniform area of the operation area is changed.

Correspondingly, in the step of comparing the sizes of the first area L1 and the second area L2, the second area L2 is larger than the first area L1, that is, each target support column in the operation area is offset upward from the focal plane, and the direction to be adjusted of the target support column corresponding to the operation area is a direction away from the image acquisition apparatus 10, so that each target support column in the operation area is adjusted downward to be located in the focal plane.

Specifically, as shown in fig. 9, when the distance between the plummer and the image capturing device 10 is reduced, the second region L2 is larger than the first region L1, that is, the operation region is upwardly convex, so the to-be-adjusted direction of the target supporting column corresponding to the operation region is a direction away from the image capturing device 10.

In a second example, in the step of performing a preconditioning process along a direction normal to the surface of the stage 300 to change the distance between the target support column and the image capturing device, the distance between the stage and the image capturing device 10 is reduced. In this embodiment, the image capturing device 10 is moved away from the stage 300. In other embodiments, the target supporting column corresponding to the operation area may also be moved away from the image capturing apparatus 10.

The distance between the plummer and the image acquisition device 10 is reduced, so that the size of the area of the surface of the panel 400 in the depth of view of the image acquisition device 10 is changed, the defocusing range of the corresponding panel 400 in the image acquisition device 10 is changed, and the non-uniform area of the operation area is changed.

Correspondingly, in the step of comparing the sizes of the first area L1 and the second area L2, the second area L2 is smaller than the first area L1, and each target support column in the operation area is offset upward from the focal plane, and the direction to be adjusted of the target support column corresponding to the operation area is a direction away from the image acquisition device 10, so that each target support column in the operation area is adjusted downward to be located in the focal plane.

Specifically, as shown in fig. 10, when the distance between the plummer and the image capturing device 10 is reduced, the second region L2 is smaller than the first region L1, that is, the operation region is upwardly convex, so the to-be-adjusted direction of the target supporting column corresponding to the operation region is a direction away from the image capturing device 10.

In a third example, in the step of performing a preconditioning process along a normal direction of the surface of the stage 300 to change the distance between the target support column and the image capturing device, the distance between the stage and the image capturing device 10 is decreased. In this embodiment, the image pickup device 10 is moved in a direction to approach the panel 400. In other embodiments, the target supporting column corresponding to the operation area may also be moved toward the image capturing device.

Accordingly, in the step of comparing the sizes of the first area L1 and the second area L2, the second area L2 is smaller than the first area L1, that is, each target support column in the operating area is deviated from the focal plane downwards, and the direction to be adjusted of the target support column in the operating area is a direction close to the image acquisition apparatus 10, so that each target support column in the operating area is adjusted upwards to be located in the focal plane.

Specifically, as shown in fig. 11, when the distance between the plummer and the image capturing apparatus 10 is reduced, the second region L2 is smaller than the first region L1, that is, the operation area is a downward concave condition, so the direction to be adjusted of the target supporting column corresponding to the operation area is a direction approaching the image capturing apparatus 10.

In a fourth example, in the step of performing a preconditioning process along a normal direction of the surface of the stage 300 to change the distance between the target support column and the image capturing device, the distance between the stage and the image capturing device 10 is decreased. In this embodiment, the image capturing device 10 is moved away from the stage 300. In other embodiments, the target supporting column corresponding to the operation area may be moved away from the image capturing device.

Accordingly, in the step of comparing the sizes of the first area L1 and the second area L2, the second area L2 is larger than the first area L1, that is, each target support column in the operation area is deviated from the focal plane downwards, and the direction to be adjusted of the target support column corresponding to the operation area is a direction close to the image capturing apparatus 10, so that each target support column in the operation area is adjusted upwards to be located in the focal plane.

Specifically, as shown in fig. 12, when the distance between the plummer and the image capturing device 10 is reduced, the second region L2 is larger than the first region L1, that is, the operating area is a downward concave condition, so the to-be-adjusted direction of the target supporting column corresponding to the operating area is a direction approaching the image capturing device 10.

In this embodiment, after the to-be-adjusted direction of the target support column of the operation area is obtained, preparation is made for adjusting the support columns 100 of at least part of the operation area in the to-be-adjusted direction based on a state in which the non-uniform area in the operation area is equal to the second area L2.

In other embodiments, after the distance between the panel and the image capturing device is changed, a part of the area corresponding to the operation area becomes a uniform area, and a part of the area originally in a uniform state becomes non-uniform. The method for adjusting the flatness of the slide glass table further comprises the following steps: after the direction to be adjusted of a target support column of the operation area is obtained, before at least part of the support columns of the operation area are adjusted according to the direction to be adjusted, the distance between the object to be carried and the image acquisition device is adjusted to the preset distance along a second direction, wherein the second direction is opposite to the first direction.

And adjusting the distance between the object to be carried and the image acquisition device by the preset distance along a second direction, wherein the second direction is opposite to the first direction, so that a non-uniform area in the operation area is a first area, and preparation is made for adjusting at least part of the supporting columns of the operation area along the direction to be adjusted in a subsequent state based on the first area.

And step S8, adjusting the target support column according to the direction to be adjusted.

And adjusting the supporting columns 100 of at least part of the operation area according to the direction to be adjusted, so that the panel 400 on the operation area is in the depth of the scene in the image acquisition device 10, and the panel 400 has better flatness.

In this embodiment, the support column 100 is manually adjusted to move in the direction of the normal of the surface of the stage 300. In other embodiments, the support column is moved relative to the stage surface in a direction normal to the stage surface by an electric device, such as a stepper motor, a driven hydraulic mechanism, a driven pneumatic device, or a servo motor.

It should be noted that, in this embodiment, the support columns 100 of at least a part of the operation area are adjusted according to the direction to be adjusted. The fact that the supporting columns 100 of at least part of the operation areas are adjusted according to the to-be-adjusted direction means that after the distance between the object to be carried and the image acquisition device 10 is changed, the number of the second areas L2 is the same as that of the first areas L1, and the supporting columns 100 of all the operation areas are adjusted along the to-be-adjusted direction; when the distance between the object to be carried and the image acquisition device 10 is changed, the number of the second areas L2 is less than that of the first areas L1, and the supporting columns 100 of a part of the operation area are adjusted along the direction to be adjusted.

Correspondingly, the invention also provides a device for adjusting the flatness of the slide glass table. Referring to fig. 13, there is shown a schematic structural view of the regulating device for adjusting the flatness of the slide glass table of the present invention.

The adjusting device of slide glass platform roughness includes: the slide holder 300 comprises a plurality of supporting columns for carrying an object to be carried; the image acquisition device 10 is used for acquiring images of the object to be carried when the distance between the image acquisition device 10 and the object to be carried is different; a processing unit 20, configured to obtain a first region L1 in a first analysis chart of the object to be carried acquired by the image acquisition device 10, where the first region L1 is a region with uniformity less than or equal to a preset threshold; an operation area for acquiring the object to be carried according to the first area L1, wherein the first area L1 is a first analysis chart of the operation area for the object to be carried; an operation area for acquiring the object to be carried according to the first area L1, wherein the first area L1 is a first analysis chart of the operation area for the object to be carried; the target support column is obtained according to the operation area; a second analysis chart for acquiring the object to be carried according to the image acquisition device 10, wherein the second analysis chart of the operation area of the object to be carried is a second area; the analysis unit is used for determining the adjusting direction of the target supporting column according to the change from the first analysis diagram to the second analysis diagram and the adjusting direction of the pre-adjusting treatment; an adjustment unit for performing a preconditioning process to change a distance between the target supporting column and the image pickup device 10; for adjusting the target support column in accordance with the adjustment direction determined by the analysis unit.

In the adjusting device for adjusting the flatness of a slide glass stage provided in the embodiment of the present invention, the processing unit 20 is configured to quickly and purposefully lock an operation area of the object to be supported according to the first area L1, the adjusting unit 40 is configured to change a distance between the carrying table and the image acquiring device 10 through a pre-adjustment process, so that a dimension of the surface of the object to be supported in a depth of the image acquiring device 10 changes, the processing unit 20 is further configured to obtain a second area L2 according to an image of the object to be supported acquired by the image acquiring device 10 after changing the distance between the carrying table and the image acquiring device 10, the analyzing unit 30 is configured to determine an adjusting direction of a target support column according to a change from the first analysis diagram to the second analysis diagram and an adjusting direction of the pre-adjustment process, so as to obtain an adjusting direction of the target support column corresponding to the operation area, the target supporting columns corresponding to the operation areas are prevented from being adjusted blindly, so that the adjustment of the target supporting columns can be regulated, the adjustment efficiency of the flatness of the object to be supported is improved, the adjustment accuracy of the flatness of the object to be supported is improved, and the better flatness of the object to be supported is obtained more easily.

In this embodiment, the object to be supported includes a panel 400.

The slide holder 300 is used for carrying a panel to be detected for Automatic Optical Inspection (AOI).

The supporting column 100 is used for supporting an object to be carried placed on the slide holder 300, the supporting column 100 can be displaced relative to the slide holder 300, the surface flatness of the panel 400 can be adjusted by adjusting the height of the supporting column 100, so that the surface flatness of the panel 400 is high, and in the process of detecting the panel 400 by the automatic optical detection equipment for the panel 400, even if the full-detection lens of full-detection scanning is not equipped with an automatic focusing sensor, the whole top surface of the panel 400 can be positioned in the depth of field (DOF) range of the full-detection lens, so that the surface flatness of the panel 400 meets the requirement of automatic optical detection.

In this embodiment, the support column 100 is manually adjusted to move relative to the stage 300. In other embodiments, the support columns may be equipped with corresponding drive systems that allow relative movement of the individual support columns on the stage by motorized devices.

In this embodiment, the supporting pillars 100 are arranged in a matrix.

Compared with the situation that the support columns 100 are arranged on the slide holder 300 in a scattered and seal-free manner, the support columns 100 are arranged in a matrix manner, so that all areas of the panel placed on the support columns 100 can be uniformly supported, and the probability of the surface of the panel having depressions or protrusions due to the sparse or dense distribution of the support columns 100 is reduced.

The image acquiring device 10 is configured to acquire an image of the object to be carried when the distance between the image acquiring device and the object to be carried is different.

The Depth of Field (DOF) of the image acquisition apparatus 10 is the distance from the closest to the farthest focused object plane. In the present embodiment, the depth of field DOF of the image acquisition apparatus 10 is a region between a first plane a (closest focused object plane) and a second plane B (farthest focused object plane).

The processing unit 20 is configured to obtain a first analysis map of the object to be carried according to the image obtaining apparatus.

The processing unit 20 is configured to image the carrying object through the image obtaining device, and obtain a first image of the carrying object, where the gray value of each point on the first image represents the light intensity returned by the corresponding point on the surface of the carrying object.

Note that the first image is composed of a plurality of pixels.

The processing unit 20 is configured to obtain a first definition image of the first image as a first analysis image, where definition values of points of the first definition image represent definitions of the first image in a unit area corresponding to the surface of the bearing object.

The first analysis chart is used to prepare for acquiring the first region L1. In this embodiment, the first analysis graph includes a definition profile.

The processing unit 20 is configured to divide the first image into a plurality of unit areas, where each unit area includes a plurality of pixels.

Specifically, the processing unit 20 divides the first image into a plurality of rectangular areas, and each rectangular area is used as a unit area to prepare for acquiring the gray scale value of the first image of each rectangular area.

In the step of dividing the first image into a plurality of rectangular areas, the size of the rectangular area is determined according to the data amount of the first image and the required degree of definition of the subsequently formed definition profile.

As an example, the sides of the rectangular area each include 80 pixels to 120 pixels.

The processing unit 20 is configured to obtain a sharpness value of each unit region according to the gradient function, and obtain the first sharpness image according to a correspondence between the sharpness value and each unit region.

The non-uniform area in the first sharpness distribution pattern, which corresponds to the area with larger gray scale value in the first image, is the first area of the first analysis map, and accordingly obtains the out-of-focus position of the surface of the panel 400 in the image capturing apparatus. And then, according to the non-uniform area, the position of the supporting column 100 on the slide holder 300, which needs to be adjusted, can be obtained.

In this embodiment, the gradient function includes Brenner gradient function, Tenengrad gradient function, Laplacian gradient function, and EAV point sharpness algorithm function. In this embodiment, a Brenner gradient function is adopted to process the acquired gray value of the first image in each rectangular region, so as to obtain a definition distribution graph of the first image. In other embodiments, other functions may be used to perform the gray processing on the first image in the rectangular region.

D(f)＝∑_y∑_x|f(x+2，y)-f(x，y)|²

The processing unit 20 is configured to obtain a first area L1 (as shown in fig. 4 and 5) in the first analysis chart, where the first area is an area where uniformity is less than or equal to a preset threshold.

In this embodiment, the processing unit 20 is configured to obtain a non-uniform area of the first analysis graph as the first area L1 according to the sharpness value and a preset parameter. In other embodiments, the processing unit is further configured to obtain a non-uniform region of the first analysis chart as the first region according to the gray value and a preset parameter.

In this embodiment, a non-uniform region (as shown in a solid-line box in fig. 7) of the first analysis chart is obtained, where the non-uniform region is a region surrounded by a plurality of unit regions that are continuously distributed.

The uniformity of the unit areas of the first area L1 is less than or equal to a preset threshold; and the ratio of the absolute value of the difference between the characterization values of the adjacent unit areas to the adjacent characteristic units is greater than a preset threshold value.

The processing unit 20 is configured to mark the support post 100 of the stage 300 on the first analysis diagram according to the position information of the support post 100, so as to form a support post mark.

Specifically, the support posts 100 on the stage 300 are marked at equal ratios on the corresponding positions of the definition distribution pattern.

The processing unit 20 is configured to obtain an operation area of the object to be carried according to the first area L1, where the first area L1 is a first analysis chart of the operation area of the object to be carried.

According to the operation area, the target support columns corresponding to the operation area can be rapidly and pertinently locked, the distance between the object to be carried and the image acquisition device 10 is subsequently changed, a second area is acquired according to the image of the object to be carried acquired by the image acquisition device 10, and preparation is made for subsequently comparing the first area L1 with the second area.

The processing unit 20 is configured to obtain a target support column (as shown in the solid line box in fig. 8) according to the operation area.

In this embodiment, the target supporting column includes: the supporting columns covered by the operation area and the supporting columns with the distance to the edges of the operation area smaller than a preset distance are used as target supporting columns; the preset distance is larger than or equal to zero and smaller than the distance between the adjacent support columns.

Under the condition, the corresponding support columns in the operation area and the support columns in the preset distance range of the operation area are adjusted at the same time, so that the adjustment efficiency of the flatness of the operation area can be improved, and the adjustment effect of the object to be carried in the operation area is ensured.

It should be noted that, when the target supporting columns are only located inside the operating area, the number of the determined target supporting columns is relatively small, and the process time for subsequently adjusting the target supporting columns is relatively short, which is beneficial to improving the adjustment efficiency of the surface flatness of the object to be supported; and the influence of the target support columns positioned in the operation area on the operation area is greater than the influence of the target support columns outside the operation area on the operation area, and only the target support columns in the operation area are subsequently adjusted, so that the adjustment efficiency of the flatness of the operation area is improved, and the adjustment effect of the object to be loaded in the operation area is ensured.

In other embodiments, the support column corresponding to the surrounding operation area is taken as the target support column.

It should be noted that, in general, the number of the operation regions is plural.

And the adjusting unit 40 is used for carrying out pre-adjusting processing and changing the distance between the target supporting column and the image acquisition device.

In this embodiment, the adjusting unit 40 is configured to increase or decrease the distance between the plummer and the image capturing apparatus 10.

In this embodiment, the adjusting unit 40 is configured to change a distance between the target supporting column corresponding to the operation area and the image capturing device 10 along a normal direction of the surface of the stage 300.

The distance is changed along the normal direction of the surface of the slide holder 300, so that the position of the projection of the image acquisition device 10 on the surface of the object to be carried is not changed, and therefore, in the process of acquiring the second area, the center of the first image acquired by the image acquisition device 10 is coincident with the center of the first image acquired by the image acquisition device 10 in the process of acquiring the first area L1, and the position of the second area can be judged more easily.

In this embodiment, the adjusting unit 40 is configured to move the target supporting column of the operation area toward or away from the image capturing apparatus 10, or move the image capturing apparatus 10 toward or away from the operation area. In other embodiments, the adjusting unit 40 is further configured to move the image capturing device and the target supporting column away from or close to each other.

In this embodiment, by adjusting the position of the image capturing device 10, it is beneficial to reduce the difficulty of changing the distance between the panel 400 and the image capturing device 10, so that the distance between the panel 400 and the image capturing device 10 can be accurately controlled, and the direction to be adjusted of the target supporting column corresponding to the operation area is easily and accurately obtained.

In this embodiment, the pre-adjustment distance is smaller than a depth of field of the image capturing device. Specifically, the preset distance is 25% to 35% of the depth of field of the image acquisition apparatus 10. Because the depth of field of the image acquisition apparatus 10 is 20 μm to 100 μm. As an example, when the depth of field of the image acquisition apparatus 10 is 20 μm, the pre-adjustment distance is 5 μm to 7 μm; as another example, when the depth of field of the image acquisition apparatus 10 is 100 μm, the pre-adjustment distance is 25 μm to 35 μm.

The processing unit 20 is configured to acquire a second analysis diagram of the object to be carried according to the image acquisition device 10, where the second analysis diagram of the operation area of the object to be carried is a second area L2.

And acquiring a second area L2 at the operation area, so as to prepare for the analysis unit 30 to obtain the to-be-adjusted direction of the target support column corresponding to the operation area by comparing the first area L1 with the second area L2.

The processing unit 20 images the bearing object through the image acquisition device to acquire a second image of the bearing object, and the gray value of each point on the second image represents the light intensity returned by the corresponding point on the surface of the bearing object; and acquiring a second definition image of the second image as a second analysis image, wherein the definition value of the second definition image represents the definition of the second image of the corresponding unit area on the surface of the bearing object.

In other embodiments, the processing unit 20 is configured to image the carrier by using the image obtaining device, obtain a second image, use the second image as the second analysis graph, and use gray-scale values of each point on the second analysis graph to represent light intensity returned by a corresponding point on the surface of the carrier. In a gray-scale image, the preset parameter is that the gray-scale values of the characteristic pixels in the second region are all greater than 30% of the gray-scale value of the adjacent pixel.

In this embodiment, a process of acquiring the second region L2 according to the image acquired by the image acquiring apparatus 10 is the same as a process of acquiring the first region L1, and details are not repeated herein, where the difference between the first region L1 and the second region L2 is that the first region L1 is acquired before being preconditioned, and the second region L2 is acquired after being preconditioned.

The second region L2 is a region surrounded by a plurality of cell regions that are continuously distributed.

It should be further noted that the embodiment of the present invention is used for determining the to-be-adjusted direction of the target supporting column corresponding to the operation area when the first area L1 is provided.

And the analysis unit 30 is used for determining the adjusting direction of the target supporting column according to the change from the first analysis diagram to the second analysis diagram and the adjusting direction of the pre-adjusting treatment.

According to the embodiment of the invention, the adjusting direction of the target supporting column is determined according to the change from the first analysis diagram to the second analysis diagram and the adjusting direction of the pre-adjusting treatment, so that the target supporting column corresponding to the operation area is prevented from being adjusted blindly, the adjustment of the target supporting column is circulated in a rule, the adjusting efficiency of the planeness of the object to be supported is improved, the adjusting accuracy of the planeness of the object to be supported is improved, and the better planeness of the object to be supported is obtained more easily.

In this embodiment, the analyzing unit 30 is configured to adjust the direction of the target supporting column so that the changing direction of the distance between the image capturing device and the plummer is the same as the pre-adjustment process when the out-of-focus area in the second area L2 is smaller than the out-of-focus area in the first area L1; and when the out-of-focus area in the second area is larger than the out-of-focus area in the first area, the adjusting direction of the target supporting column enables the changing direction of the distance between the image acquisition device and the bearing table to be opposite to the pre-adjusting process.

In other embodiments, the analysis unit is configured to, when the definition of the second region is greater than the definition of the first region, adjust the direction of the target support column so that the direction of change of the distance between the image acquisition device and the carrier is the same as the pre-adjustment process; when the definition of the second area is smaller than that of the first area, the adjusting direction of the target supporting column enables the changing direction of the distance between the image acquisition device and the bearing object to be opposite to the pre-adjusting process.

In some further embodiments, the analyzing unit is configured to obtain a first definition image of the first image, and definition values of points of the first definition image represent the definition of the first image in the corresponding unit area on the surface of the carrier; the adjusting direction of the target supporting column is determined according to the first definition image, the second analysis image and the adjusting direction of the pre-adjusting treatment; or the second definition image is used for obtaining a second definition image of the second image, and definition values of points of the second definition image represent the definition of the second image of the unit area corresponding to the surface of the bearing object; and the adjusting direction of the target supporting column is determined according to the second definition image, the first analysis image and the adjusting direction of the pre-adjusting treatment.

As an example, the adjustment direction of the target support column determined by the analysis unit is the same as the adjustment direction of the pre-adjustment process of the adjustment unit, including: when the pre-adjusting treatment reduces the distance between the image acquisition device and the bearing table, the adjusting direction of the target supporting column is towards the image acquisition device; when the pre-adjusting treatment increases the distance between the image acquisition device and the bearing table, the adjusting direction of the target supporting column is away from the image acquisition device.

As another example, the adjusting direction of the target supporting column determined by the analyzing unit is opposite to the adjusting direction of the pre-adjusting process of the adjusting unit, and includes: when the pre-adjusting treatment reduces the distance between the image acquisition device and the bearing table, the adjusting direction of the target supporting column is away from the image acquisition device; when the pre-adjustment process increases the distance between the image acquisition device and the bearing table, the adjustment direction of the target supporting column is towards the image acquisition device.

In a first example, the adjusting unit 40 is configured to decrease a distance between the stage and the image capturing device 10 along a normal direction of the surface of the stage 300. In this embodiment, the adjusting unit 40 is configured to move the image capturing apparatus 10 toward the object to be carried. In other embodiments, the adjusting unit may be further configured to move the target supporting column corresponding to the operation area toward a direction approaching the image capturing device.

Correspondingly, the analysis unit 30 is configured to obtain that the second area L2 is larger than the first area L1, that is, each target support column in the operation area is upwardly offset from the focal plane, and the to-be-adjusted direction of the target support column corresponding to the operation area is a direction away from the image acquisition apparatus 10, so that each target support column in the operation area is downwardly adjusted to be located in the focal plane.

As a second example, the adjusting unit 40 is configured to decrease the distance between the stage and the image capturing device 10 along the normal direction of the surface of the stage 300. In this embodiment, the adjusting unit 40 is configured to move the image capturing device 10 away from the stage 300. In other embodiments, the adjusting unit may be further configured to move the target supporting column corresponding to the operation area in a direction away from the image capturing device.

Correspondingly, the analyzing unit 30 is configured to obtain that the second area L2 is smaller than the first area L1, that is, each target supporting column in the operation area deviates upward from the focal plane, and the direction to be adjusted of the target supporting column corresponding to the operation area is a direction away from the image acquiring apparatus 10, so that each target supporting column in the operation area is adjusted downward to be located in the focal plane.

Specifically, as shown in fig. 10, when the distance between the plummer and the image capturing device 10 is reduced, the second region L2 is smaller than the first region L1, that is, the operation area is upwardly convex, so the direction to be adjusted of the target supporting column corresponding to the operation area is a direction away from the image capturing device 10.

In a third example, the adjusting unit 40 is configured to perform a pre-adjustment process along a normal direction of the surface of the stage 300 to change a distance between the target supporting column and the image capturing device, so that the distance between the stage and the image capturing device 10 is reduced. In this embodiment, the adjusting unit 40 is configured to move the image capturing apparatus 10 in a direction approaching the panel 400. In other embodiments, the target supporting column corresponding to the operation area may also be moved toward the image capturing device.

Accordingly, the analysis unit 30 is configured to obtain that the second area L2 is smaller than the first area L1, that is, each target support column in the operation area is deviated from the focal plane downwards, and the to-be-adjusted direction of the target support column in the operation area is a direction close to the image capturing apparatus 10, so that each target support column in the operation area is adjusted upwards to be located in the focal plane.

Specifically, as shown in fig. 11, when the distance between the plummer and the image capturing device 10 is reduced, the second region L2 is smaller than the first region L1, that is, the operating area is a downward concave condition, so the to-be-adjusted direction of the target supporting column corresponding to the operating area is a direction approaching the image capturing device 10.

In a fourth example, the adjusting unit 40 is configured to perform a pre-adjustment process along a normal direction of the surface of the stage 300 to reduce a distance between the stage and the image capturing device 10 in the step of changing the distance between the target supporting column and the image capturing device. In this embodiment, the adjusting unit 40 is configured to move the image capturing device 10 away from the stage 300. In other embodiments, the adjusting unit may be further configured to move the target supporting column corresponding to the operation area in a direction away from the image capturing device.

Accordingly, the analysis unit 30 is configured to obtain that the second area L2 is larger than the first area L1, that is, each target support column in the operation area is deviated from the focal plane downwards, and the to-be-adjusted direction of the target support column in the operation area is a direction close to the image capturing apparatus 10, so that each target support column in the operation area is adjusted upwards to be located in the focal plane.

In this embodiment, after obtaining the to-be-adjusted direction of the target supporting column corresponding to the operation area, based on the state that the non-uniform area in the operation area is equal to the second area L2, preparation is made for adjusting the supporting columns 100 of at least part of the operation area in the to-be-adjusted direction.

In other embodiments, after the distance between the panel and the image capturing device is changed, a part of the area corresponding to the operation area becomes a uniform area, and a part of the area originally in the uniform state also becomes non-uniform. The adjusting method of the flatness of the slide glass table further comprises the following steps: after the direction to be adjusted of the target supporting column corresponding to the operation area is obtained, the distance between the object to be carried and the image acquisition device is adjusted by the preset distance along a second direction before at least part of the supporting columns of the operation area are adjusted according to the direction to be adjusted, wherein the second direction is opposite to the first direction.

And adjusting the distance between the object to be carried and the image acquisition device by the preset distance along a second direction, wherein the second direction is opposite to the first direction, so that a non-uniform area in the operation area is a first area, and preparation is made for adjusting at least part of the supporting columns of the operation area along the direction to be adjusted based on the first area.

An adjusting unit 40 for adjusting the target support column according to the adjustment direction determined by the analyzing unit 30.

In this embodiment, the support column 100 is moved in the normal direction of the surface of the stage 300 by manual adjustment. In other embodiments, the support column is moved relative to the stage surface in a direction normal to the stage surface by an electric device, such as a stepper motor, a driven hydraulic mechanism, a driven pneumatic device, or a servo motor.

In this embodiment, the adjustment processing of the supporting columns 100 of at least a part of the operation areas according to the to-be-adjusted direction means that, after the distance between the object to be carried and the image capturing device 10 is changed, the number of the second areas L2 is the same as the number of the first areas L1, and the supporting columns 100 of all the operation areas are adjusted along the to-be-adjusted direction; when the distance between the object to be carried and the image acquisition device 10 is changed, the number of the second areas L2 is less than that of the first areas L1, and the supporting columns 100 of a part of the operation area are adjusted along the direction to be adjusted.

Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected therein by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.

Claims

1. A method for adjusting the flatness of a slide glass table, wherein the slide glass table comprises a plurality of supporting columns, and the supporting columns are used for bearing an object to be borne, and the method for adjusting the flatness of the slide glass table comprises the following steps:

acquiring a first analysis chart of an object to be borne by an image acquisition device;

acquiring a first area in the first analysis chart, wherein the uniformity of the first area is less than or equal to a preset threshold value;

acquiring an operation area of the object to be carried according to the first area, wherein the first area is a first analysis chart of the operation area of the object to be carried;

acquiring a target supporting column according to the operation area, wherein the target supporting column is a supporting column for supporting the operation area;

carrying out pre-adjustment processing to change the distance between the target supporting column and the image acquisition device;

after the pre-adjustment treatment, acquiring a second analysis chart of the object to be carried according to the image acquisition device, wherein the second analysis chart of the operation area of the object to be carried is a second area;

and determining the adjusting direction of the target supporting column according to the change from the first analysis diagram to the second analysis diagram and the adjusting direction of the pre-adjusting treatment.

2. The tuning method of claim 1, wherein determining the tuning direction of the target support column based on the variation from the first analysis map to the second analysis map and the tuning direction of the preconditioning process comprises:

when the definition of the second area is larger than that of the first area, the adjusting direction of the target supporting column enables the changing direction of the distance between the image acquisition device and the bearing object to be the same as the pre-adjusting treatment; when the definition of the second area is smaller than that of the first area, the adjusting direction of the target supporting column enables the changing direction of the distance between the image acquisition device and the bearing object to be opposite to the pre-adjusting treatment;

alternatively, the first and second electrodes may be,

when the out-of-focus area in the second area is smaller than the out-of-focus area in the first area, the adjusting direction of the target supporting column enables the changing direction of the distance between the image acquisition device and the bearing table to be the same as the pre-adjusting process; when the out-of-focus region in the second region is larger than the out-of-focus region in the first region, the adjustment direction of the target support column reverses the direction of change in the distance between the image acquisition device and the stage to the pre-adjustment process.

3. The adjustment method according to claim 1, characterized in that the step of acquiring a first analysis map of the object to be supported by means of an image acquisition device comprises: imaging the bearing object through the image acquisition device to acquire a first image of the bearing object, wherein the gray value of each point on the first image represents the light intensity returned by the corresponding point on the surface of the bearing object; acquiring a first definition image of the first image as a first analysis image, wherein definition values of points of the first definition image represent the definition of the first image of a unit area corresponding to the surface of the bearing object; or the like, or, alternatively,

the first analysis chart is a gray image, and the step of acquiring the first analysis chart of the object to be borne through the image acquisition device comprises the following steps: imaging the bearing object through the image acquisition device to acquire a first image, taking the first image as the first analysis chart, and representing the light intensity returned by the corresponding point on the surface of the bearing object by the gray value of each point on the first analysis chart;

the step of determining the adjustment direction of the target support column according to the change from the first analysis diagram to the second analysis diagram and the adjustment direction of the pre-adjustment process comprises the following steps: acquiring a first definition image of the first image, wherein definition values of points of the first definition image represent the definition of the first image in a unit area corresponding to the surface of the bearing object; and determining the adjusting direction of the target supporting column according to the first definition image, the second analysis image and the adjusting direction of the pre-adjusting treatment.

4. The adjustment method according to claim 3, characterized in that the first image is composed of a plurality of pixels;

the step of acquiring a first resolution image of the first image comprises: dividing the first image into a plurality of unit areas, each unit area including a plurality of pixels; and respectively acquiring the definition value of each unit area according to the gradient function, and acquiring the first definition image according to the corresponding relation between the definition value and each unit area.

5. The adjustment method of claim 4, wherein the gradient function comprises: brenner gradient function, Tenengrad gradient function, Laplacian gradient function, EAV point sharpness algorithm function;

the unit area is a rectangular area, and the side length of the rectangular area comprises 80-120 pixels.

6. The adjustment method according to claim 4, wherein the first area is an area surrounded by a plurality of unit areas which are continuously distributed, and the second area is an area surrounded by a plurality of unit areas which are continuously distributed;

the uniformity of the unit area of the first area is less than or equal to a preset threshold value; the ratio of the absolute value of the difference between the characterization values of the adjacent unit areas to the adjacent characteristic units is greater than a preset threshold value;

7. The adjustment method of claim 1, wherein the preconditioning distance is less than the image acquisition device depth of field.

8. The conditioning method of claim 1, wherein the step of preconditioning process comprises: moving the target supporting column of the operation area towards a direction close to or away from the image acquisition device, or moving the image acquisition device towards a direction close to or away from the target supporting column of the operation area; or the image acquisition device and the target supporting column are moved in the direction away from or close to each other.

9. The adjusting method according to claim 2, wherein the adjusting direction of the target supporting column makes the changing direction of the distance between the image capturing device and the carrier the same as the pre-adjusting process, comprises:

when the pre-adjusting treatment reduces the distance between the image acquisition device and the bearing table, the adjusting direction of the target supporting column is towards the image acquisition device; when the pre-adjusting treatment increases the distance between the image acquisition device and the bearing table, the adjusting direction of the target supporting column is away from the image acquisition device;

10. The adjustment method of claim 1, wherein the target support column comprises: the supporting columns covered by the operation area and the supporting columns with the distance to the edge of the operation area smaller than the preset distance are used as target supporting columns;

the preset distance is greater than or equal to zero and smaller than the distance between the adjacent support columns.

11. The adjustment method according to claim 1, wherein the step of acquiring a second region from a second analysis map of the object to be supported acquired by an image acquisition device comprises: imaging the bearing object through the image acquisition device to acquire a second image of the bearing object, wherein the gray value of each point on the second image represents the light intensity returned by the corresponding point on the surface of the bearing object; acquiring a second definition image of the second image as a second analysis image, wherein the definition value of the second definition image represents the definition of the second image of the corresponding unit area on the surface of the bearing object; or

The second analysis map is a gray scale image; the step of acquiring a second analysis chart of the object to be carried by the image acquisition device comprises the following steps: imaging the bearing object through the image acquisition device to acquire a second image, taking the second image as a second analysis chart, and representing the gray value of each point on the second analysis chart by the light intensity returned by the corresponding point on the surface of the bearing object;

the step of determining the adjustment direction of the target support column according to the change from the first analysis diagram to the second analysis diagram and the adjustment direction of the pre-adjustment process comprises the following steps: acquiring a second definition image of the second image, wherein definition values of points of the second definition image represent the definition of the second image in a unit area corresponding to the surface of the bearing object; and determining the adjusting direction of the target supporting column according to the second definition image, the first analysis image and the adjusting direction of the pre-adjusting treatment.

12. The conditioning method of claim 1, wherein prior to the preconditioning process, further comprising:

marking the supporting column of the slide holder on the first analysis chart according to the position information of the supporting column to form a supporting column mark;

the step of obtaining the target support column according to the operation area comprises the following steps: and acquiring the target support column according to the relative position relationship between the operation area of the first analysis chart and the support column mark.

13. An adjusting device for the flatness of a slide glass table is characterized by comprising:

the slide holder comprises a plurality of supporting columns, and the supporting columns are used for bearing an object to be carried;

the image acquisition device is used for acquiring images of the object to be borne when the distances between the image acquisition device and the object to be borne are different;

the processing unit is used for acquiring a first area in the first analysis chart according to the first analysis chart of the object to be carried acquired by the image acquisition device, wherein the uniformity of the first area is less than or equal to a preset threshold value; the operation area is used for acquiring the object to be carried according to the first area, and the first area is a first analysis chart of the operation area of the object to be carried; the operation area is used for acquiring the object to be carried according to the first area, and the first area is a first analysis chart of the operation area of the object to be carried; the target support column is obtained according to the operation area; the second analysis chart is used for acquiring the object to be carried according to the image acquisition device, and the second analysis chart of the operation area of the object to be carried is a second area;

the analysis unit is used for determining the adjusting direction of the target supporting column according to the change from the first analysis diagram to the second analysis diagram and the adjusting direction of the pre-adjusting treatment;

the adjusting unit is used for carrying out pre-adjusting processing and changing the distance between the target supporting column and the image acquisition device; for adjusting the target support column in accordance with the adjustment direction determined by the analysis unit.

14. The adjusting apparatus according to claim 13, wherein the analyzing unit is configured to adjust the direction of the target supporting column to make the distance between the image capturing device and the object vary in the same direction as the pre-adjusting process when the resolution of the second area is greater than the resolution of the first area; when the definition of the second area is smaller than that of the first area, the adjusting direction of the target supporting column enables the changing direction of the distance between the image acquisition device and the bearing object to be opposite to the pre-adjusting treatment;

alternatively, the first and second liquid crystal display panels may be,

the analysis unit is used for enabling the adjustment direction of the target support column to enable the change direction of the distance between the image acquisition device and the plummer to be the same as the pre-adjustment processing when the out-of-focus area in the second area is smaller than the out-of-focus area in the first area; when the out-of-focus region in the second region is larger than the out-of-focus region in the first region, the adjustment direction of the target support column reverses the direction of change in the distance between the image acquisition device and the stage to the pre-adjustment process.

15. The adjusting apparatus according to claim 13, wherein the processing unit is configured to image the supporting object through the image capturing device to obtain a first image of the supporting object, and the gray value of each point on the first image represents the light intensity returned from the corresponding point on the surface of the supporting object; acquiring a first definition image of the first image as a first analysis image, wherein definition values of points of the first definition image represent the definition of the first image of a unit area corresponding to the surface of the bearing object; or the like, or, alternatively,

the processing unit is used for imaging the bearing object through the image acquisition device to acquire a first image, the first image is used as the first analysis map, and the gray value of each point on the first analysis map represents the light intensity returned by the corresponding point on the surface of the bearing object;

the analysis unit is used for acquiring a first definition image of the first image, and definition values of points of the first definition image represent the definition of the first image of a unit area corresponding to the surface of the bearing object; and the adjusting direction of the target supporting column is determined according to the first definition image, the second analysis image and the adjusting direction of the pre-adjusting treatment.

16. The adjustment device of claim 15, wherein the first image is comprised of a plurality of pixels;

the processing unit is used for dividing the first image into a plurality of unit areas, and each unit area comprises a plurality of pixels; the unit regions are used for acquiring the definition values of the unit regions according to the gradient function respectively, and the first definition image is obtained according to the corresponding relation between the definition values and the unit regions.

17. The adjustment device of claim 16, wherein the gradient function comprises: brenner gradient function, Tenengrad gradient function, Laplacian gradient function, EAV point sharpness algorithm function;

18. The adjusting device according to claim 16, wherein the first area is an area surrounded by a plurality of unit areas which are continuously distributed, and the second area is an area surrounded by a plurality of unit areas which are continuously distributed;

19. The adjustment device according to claim 13, characterized in that the distance of the pre-adjustment process performed by the adjustment unit is smaller than the depth of field of the image acquisition device.

20. The adjustment device according to claim 13, wherein the adjustment unit is configured to move the target support column of the operation area toward or away from the image capturing device, or move the image capturing device toward or away from the target support column of the operation area; or, the image acquisition device and the target supporting column are moved in the directions away from or close to each other.

21. The conditioning apparatus according to claim 14, wherein the conditioning direction of the target support column determined by the analysis unit is the same as the conditioning direction of the pre-conditioning process of the conditioning unit, including:

the adjustment direction of the target support column determined by the analysis unit is opposite to the adjustment direction of the pre-adjustment process of the adjustment unit, and comprises the following steps: when the pre-adjusting treatment reduces the distance between the image acquisition device and the bearing table, the adjusting direction of the target supporting column is away from the image acquisition device; when the pre-adjustment process increases the distance between the image acquisition device and the bearing table, the adjustment direction of the target supporting column is towards the image acquisition device.

22. The adjusting apparatus according to claim 13, wherein the processing unit is configured to image the supporting object through the image obtaining device to obtain a second image of the supporting object, and the gray value of each point on the second image represents the light intensity returned from the corresponding point on the surface of the supporting object; acquiring a second definition image of the second image as a second analysis image, wherein the definition value of the second definition image represents the definition of the second image of the corresponding unit area on the surface of the bearing object; or

The second analysis map is a gray scale image; the processing unit is used for acquiring a second analysis chart of the object to be carried through the image acquisition device and comprises the following steps: imaging the bearing object through the image acquisition device to acquire a second image, taking the second image as a second analysis chart, and representing the light intensity returned by corresponding points on the surface of the bearing object by gray values of all points on the second analysis chart;

the analysis unit is used for acquiring a second definition image of the second image, and definition values of points of the second definition image represent the definition of the second image in a unit area corresponding to the surface of the bearing object; and determining the adjusting direction of the target supporting column according to the second definition image, the first analysis image and the adjusting direction of the pre-adjusting treatment.

23. The adjustment apparatus according to claim 13, wherein the processing unit is configured to mark the support column of the stage on the first analysis chart according to position information of the support column to form a support column mark;

and the processing unit is used for acquiring the target supporting column according to the relative position relation between the operation area of the first analysis chart and the supporting column mark.

24. The adjustment device of claim 13, wherein the target support column comprises: the supporting columns covered by the operation area and the supporting columns with the distance to the edge of the operation area smaller than the preset distance are used as target supporting columns;

25. The adjustment device of claim 13, wherein the adjustment unit comprises: a stepper motor, a driving hydraulic mechanism, a driving pneumatic device or a servo motor.