CN1147617C - Vacuum plasma gas-phase deposit process to form multielement and multilayer discrete coating - Google Patents
Vacuum plasma gas-phase deposit process to form multielement and multilayer discrete coatingInfo
- Publication number
- CN1147617C CN1147617C CNB981130356A CN98113035A CN1147617C CN 1147617 C CN1147617 C CN 1147617C CN B981130356 A CNB981130356 A CN B981130356A CN 98113035 A CN98113035 A CN 98113035A CN 1147617 C CN1147617 C CN 1147617C
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- China
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- coating
- present
- shelter
- screening screen
- plasma gas
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Abstract
The present invention relates to a technological process which can obtain abrasion resistant coating on high-speed steel, hard alloy and ceramic metal cutting tools. The present invention is characterized in that the surface coating of a strengthened component uses a discrete coating structure with uniform thicknesses; the method obtaining the discrete coating structure can use that a netlike shelter is arranged between the surface of the strengthened component and evaporation materials; the netlike shelter can be made of one or a plurality of component materials which are needed to be added to the coating and simultaneously play a role of covering the shelter and a cathode. Compared with the prior art, the present invention has the advantage that the coating uses the netlike shelter made of some components or one component so that the present invention can use simple equipment and processes to prepare the multiple and multilayer discrete coating; simultaneously, the present invention increases the controllability of the technology, and widens the adjustable range of the processes. The method of the present invention is suitable for the surface strengthening of the high-speed steel, the hard alloy and the ceramic metal cutting tools.
Description
Affiliated technical field: the present invention relates to a kind of processing method that obtains wear-resistant coating on rapid steel, Wimet, pottery system metal-cutting machine tool, is a kind of under vacuum state, adopts the coating process of plasma discrete topology.
Background technology: adopt vacuum plasma gas-phase deposit method applying coating on cutting tool can significantly improve the life-span of cutting tool.But regular meeting the cracking of coating occurs and peels off under working conditions, and deep layer unrelieved stress height has also limited coat-thickness, and the local tipping in cutting limit can cause the machined surface roughness to increase.In addition, compare with common single constituent element coating, the above coating of two constituent elements has higher wear resistance.Particularly, adopt laminated coating to can further improve wear resistance on this basis again for high-speed steel cutter.Then need to adopt a plurality of negative electrodes to produce the complex apparatus of sputter according to certain rules but desire realizes applying the multi-component multi-layer coating, or being reinforced part carry out complex rotation around a plurality of axles.Have again, be coated with thing, need use toward the interior airing system of vacuum chamber for hydrocarbon gas in order to obtain carbide.And the hydrogen that exists in the reaction compartment can cause being reinforced the part hydrogen embrittlement, and the intensity of part and plasticity are reduced.
Summary of the invention: for fear of the deficiencies in the prior art part, the invention provides a kind of vacuum plasma gas-phase deposit process to form multielement and multilayer discrete coating, be a kind of fairly simple technology and equipment used, under the condition that reduces the functional element number, obtain the method for multi-element multifunctional discrete topology coating.Its essence is that the coating group element material is made netted screening screen, when the ion etching piece surface, hides screen material and produces sputter and inlet chamber internal reaction district.
The technology of the present invention thought is: be reinforced the netted screening screen of installation between piece surface and the evaporating materials, it is characterized in that: netted screening screen is made to the material of several constituent elements of coating interpolation by need, and various constituent elements are coated on the netted screening screen with coating way.Be reinforced the netted screening screen of installation between piece surface and the evaporating materials, it is characterized in that: netted screening screen is made to the material of several constituent elements of coating interpolation by need, and various constituent elements are coated on the netted screening screen with coating way.
Adopt periodic ion etching to realize laminated coating: when applying beginning, use the ion etching piece surface, meanwhile, netted screening screen material is by the while etching and sputter and enter reaction zone.
When the material of certain several constituent element that is added to coating by need is made netted screening screen, when placing coated piece surface, the vacuum plasma state by sputter and participate in reaction directly, is applied to piece surface.When applying beginning, use the ion etching piece surface earlier, can not only clean and activated surface, and part can be heated to certain temperature.Meanwhile, netted screening screen material is by the while etching and sputter and enter reaction zone.Repeating ion according to it at the reaction zone consumption cleans.The circulation ion cleans the coating that also can obtain multilayered structure.Be reinforced the even discrete coatings structure of became uneven of the upper layer of part, can significantly reduce in the coating and the unrelieved stress of coating and matrix bond face, so just can increase coat-thickness greatly, and can avoid peeling off with tipping and take place.Owing in the discrete coatings wearing and tearing uniform abrasive wear only takes place, form the wearing and tearing particle of small and dispersed, thereby can become many times raising cutting tool life-span simultaneously.
Embodiment: the present invention will be in conjunction with the embodiments (accompanying drawing) be further described:
Present embodiment be a kind of be example to apply Ti (C, N), compare with the cutting tool list constituent element wear-resistant coating TiN that uses always, Ti (C, N) has higher wear resistance.
When utilizing the vacuum plasma gas-phase deposit method to apply Ti (C, N) coating, as evaporating materials, be made into netted screening screen with Ti with carbon fiber bundle, be installed between workpiece surface and the evaporating materials.In coating procedure, in reaction zone, introduce small amount of nitrogen as reactant gases, because the effect of the netted screening screen of carbon fiber has the coating of discrete topology in workpiece surface formation.The carbon fiber of simultaneously netted screening screen is also simultaneously entered reaction zone by sputter, causes to have Ti (C, the N) coating of discrete topology at the workpiece surface formation of deposits at last.Owing to need not adopt hydrocarbon gas in deposition process, avoid contingent hydrogen embrittlement.
The present invention's advantage compared to existing technology is:
Because the netted screening screen that has adopted coating some or certain constituent element to make, thereby can use fairly simple equipment and worker Skill, preparation multi-component multi-layer discrete coatings. Also increase simultaneously the controllability of technology, widened the technology adjustable extent. This specially Profit method is applicable to high-speed steel, the surface peening of carbide alloy and pottery metal-cutting machine tool processed.
Claims (2)
1, a kind of vacuum plasma gas-phase deposit process to form multielement and multilayer discrete coating, be reinforced the netted screening screen of installation between piece surface and the evaporating materials, it is characterized in that: netted screening screen is made to the material of several constituent elements of coating interpolation by need, and various constituent elements are coated on the netted screening screen with coating way.
2, vacuum plasma gas-phase deposit process to form multielement and multilayer discrete coating according to claim 1, it is characterized in that: adopt periodic ion etching to realize laminated coating: when applying beginning, use the ion etching piece surface, meanwhile, netted screening screen material is by the while etching and sputter and enter reaction zone.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB981130356A CN1147617C (en) | 1998-12-08 | 1998-12-08 | Vacuum plasma gas-phase deposit process to form multielement and multilayer discrete coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB981130356A CN1147617C (en) | 1998-12-08 | 1998-12-08 | Vacuum plasma gas-phase deposit process to form multielement and multilayer discrete coating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1256324A CN1256324A (en) | 2000-06-14 |
| CN1147617C true CN1147617C (en) | 2004-04-28 |
Family
ID=5222820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB981130356A Expired - Fee Related CN1147617C (en) | 1998-12-08 | 1998-12-08 | Vacuum plasma gas-phase deposit process to form multielement and multilayer discrete coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1147617C (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021114068A1 (en) * | 2019-12-10 | 2021-06-17 | 中国航发贵州黎阳航空动力有限公司 | Preparation method for tin coating on titanium alloy part of aircraft engine |
-
1998
- 1998-12-08 CN CNB981130356A patent/CN1147617C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1256324A (en) | 2000-06-14 |
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Legal Events
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |