CN114755454A - Three-direction high-temperature piezoelectric acceleration sensor and assembling method thereof - Google Patents

Three-direction high-temperature piezoelectric acceleration sensor and assembling method thereof Download PDF

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Publication number
CN114755454A
CN114755454A CN202210285642.5A CN202210285642A CN114755454A CN 114755454 A CN114755454 A CN 114755454A CN 202210285642 A CN202210285642 A CN 202210285642A CN 114755454 A CN114755454 A CN 114755454A
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China
Prior art keywords
temperature
upper cover
piezoelectric
socket
inertia mass
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Chinese (zh)
Inventor
何勤
张颖轩
李江渠
于慧
彭泳卿
刘鹏
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Beijing Research Institute of Telemetry
Aerospace Long March Launch Vehicle Technology Co Ltd
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Beijing Research Institute of Telemetry
Aerospace Long March Launch Vehicle Technology Co Ltd
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Priority to CN202210285642.5A priority Critical patent/CN114755454A/en
Publication of CN114755454A publication Critical patent/CN114755454A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802Details

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

The invention provides a three-way high-temperature piezoelectric acceleration sensor and an assembling method thereof.A sensitive component comprises a triangular prism, a piezoelectric plate, an inertia mass block and a pre-tightening ring, wherein the piezoelectric plate and the inertia mass block are sequentially attached to the outer side of the triangular prism and uniformly distributed along the axis of the triangular prism, the pre-tightening ring is made of memory alloy, and the piezoelectric plate and the inertia mass block are hooped on the outer side of the triangular prism by the pre-tightening ring through mechanical expanding at low temperature and heating to generate radial contraction during assembling. The sensitive component of the invention adopts a triangular shear sensitive structure, the piezoelectric sheet inertia mass block is fixed by a high-tension pre-tightening ring, the component does not need an adhesive or a stud, thereby ensuring the optimal performance and reliability, the pre-tightening ring enables the piezoelectric sheet to generate pre-stress so as to obtain extremely high linearity, no external power supply is needed during the work, and the invention has the advantages of reliability, durability, wide measurement frequency range, wide range and wide use temperature range; the working temperature range of the sensor is-74-250 ℃, the working frequency is 0.1-10000 Hz, and the measuring range can reach 500 g.

Description

Three-dimensional high-temperature piezoelectric acceleration sensor and assembling method thereof
Technical Field
The invention relates to the technical field of measurement and testing, in particular to a three-direction high-temperature piezoelectric acceleration sensor and an assembling method thereof.
Background
Vibration monitoring is the most effective way to detect mechanical failure of rotating components, for example, the exacerbation of vibration is often a sign of impending failure. Shafting vibration is an important factor affecting the reliability of the power system. The risk of excessive vibration of the rotating components can be manifested in the form of amplitude, vibrational stress, and forces on the bearings. The vibration amplitude is too large, so that the rotor and the stator can be collided and rubbed at a small gap, the working safety of the structure is influenced, and the overall performance of a power system is also influenced; additional loads on the structure can be brought by the vibration stress, which is a main cause of fatigue failure and shortens the service life of a power system; the acting force on the support caused by vibration is external force transmission, which not only increases the fatigue load of the component of the stator supporting force system, but also seriously shortens the service life of the power system.
The power system has very complex vibration, severe working environment and very strict requirements on a vibration sensor, so that the power system has good performance indexes, more importantly, has reliability and stability of long-time working, and the most commonly used vibration measuring sensor is a piezoelectric acceleration sensor. The piezoelectric acceleration sensor has the advantages of simple structure, reliability, durability, wide measurement frequency range, wide range and wide use temperature range, and still occupies the mainstream status in the field of vibration measurement, particularly in the field of special environment (ultrahigh temperature and wide temperature) measurement.
Disclosure of Invention
The invention provides a three-way high-temperature piezoelectric acceleration sensor and an assembly method thereof, aiming at solving the defects of the sensor in special environment (ultra-high temperature and wide temperature) measurement, wherein a sensitive component adopts a triangular shear sensitive structure, an inertia mass block of a piezoelectric plate is fixed by a high-tension pre-tightening ring, and the component does not need an adhesive or a stud, so that the best performance and reliability are ensured; the working temperature range of the sensor is-74 ℃ to 250 ℃, the working frequency is 0.1Hz to 10000Hz, and the measuring range can reach 500 g.
The invention provides a three-way high-temperature piezoelectric acceleration sensor which comprises a sensitive component, wherein the sensitive component comprises a three-diamond column, piezoelectric sheets, inertia mass blocks and pre-tightening rings, wherein the piezoelectric sheets, the inertia mass blocks and the pre-tightening rings are sequentially arranged outside three side surfaces of the three-diamond column, the number of the piezoelectric sheets and the number of the inertia mass blocks are 3;
the piezoelectric plate and the inertia mass block are sequentially attached to the outer side of the three-diamond column and are uniformly distributed along the axis of the three-diamond column, the inertia mass block is sleeved with the pre-tightening ring from the outer side of the inertia mass block, the pre-tightening ring is made of memory alloy, and the piezoelectric plate and the inertia mass block are hooped on the outer side of the three-diamond column through radial contraction generated by mechanical expanding at low temperature and heating during assembly.
As a preferred mode, a temperature indicating color code is arranged on the outer side of the pre-tightening ring and used for prompting the shrinkage temperature of a memory alloy material for completing phase transformation in the assembling process of the sensitive component so as to control the heating temperature in the assembling process.
According to the three-way high-temperature piezoelectric acceleration sensor, as a preferred mode, a triangular prism is adopted as a triangular prism, a piezoelectric piece is a thickness shearing piezoelectric ceramic element with a flat surface, the piezoelectric piece is polarized along a long edge and is plated on the surface, the outer part of an inertia mass block is a cylindrical surface, the inner part of the inertia mass block is a plane, and a pre-tightening ring is made of TiNiNb shape memory alloy.
The invention relates to a three-way high-temperature piezoelectric acceleration sensor, which comprises a three-way shell fixed outside a sensitive component, an upper cover arranged above the sensitive component, an upper cover with a socket, a stud bolt and a coaxial socket, wherein the upper surface of the upper cover is flush with the opening of the three-way shell;
The sensitive component converts a mechanical acceleration input signal into a charge signal by utilizing a piezoelectric effect and transmits the charge signal to external signal acquisition equipment through the coaxial socket.
According to the three-direction high-temperature piezoelectric acceleration sensor, as a preferred mode, the three-direction shell is of a cubic structure provided with three cylindrical cavities, and the sensitive component is fixed in the cylindrical cavities through the stud bolts; the number of the sensitive assemblies is 3, and the sensitive assemblies are respectively used for measuring the acceleration in the X direction, the Y direction and the Z direction.
According to the three-way high-temperature piezoelectric acceleration sensor, as a preferred mode, the upper cover and the upper cover with the socket are installed in a screwed connection mode or a laser welding mode;
the middle part of the upper cover of the socket is provided with a mounting hole, the coaxial socket is pressed in the mounting hole of the upper cover of the socket in an interference fit manner, and the coaxial socket is electrically connected with each sensitive component through a lead.
According to the three-way high-temperature piezoelectric acceleration sensor, as a preferred mode, the three-way shell, the upper cover and the upper cover with the socket are made of titanium alloy, the inertia mass block is made of high-specific gravity alloy, and the triangular prism and the stud bolt are made of stainless steel.
The invention provides an assembling method of a three-way high-temperature piezoelectric acceleration sensor, which comprises the following steps of:
S1, assembling the sensitive component: mechanically stretching the diameter of the pre-tightening ring, arranging three piezoelectric plates and three inertia mass blocks on three side surfaces of the triangular prism in a triangular mode, uniformly distributing the three piezoelectric plates and the three inertia mass blocks along the axis of the triangular prism, sleeving the pre-tightening ring outside the three inertia mass blocks, starting heating, radially contracting the pre-tightening ring and tightening the triangular prism, the piezoelectric plates and the inertia mass blocks, and finishing assembly of the sensitive assembly;
s2, assembling sensitive components: fixing three sensitive components at the bottoms of three cylindrical cavities of a three-way shell through stud bolts, and enabling the sensitive components to be in good contact with the three-way shell;
s3, assembling an upper cover: the upper cover and the upper cover with the socket are connected in a screwed mode or welded at the opening of the cylindrical cavity of the three-way shell in a laser mode, and the connecting positions of the upper cover, the upper cover with the socket and the three-way shell are sealed;
s4, socket assembly: and welding the signal outgoing line of the sensitive component on the corresponding coaxial socket, then crimping the coaxial socket in the mounting holes of the three-way shell and the upper cover with the socket, and finishing the assembly of the three-way high-temperature piezoelectric acceleration sensor.
In the method for assembling a three-way high-temperature piezoelectric acceleration sensor according to the present invention, as a preferred embodiment, in step S1, the heating temperature is determined by determining whether a temperature indicator provided on the pre-tightening ring is black, if not, the heating is continued, and if yes, the phase transition shrinkage temperature of the pre-tightening ring is reached, and the heating is stopped.
In the assembling method of the three-way high-temperature piezoelectric acceleration sensor according to the present invention, as a preferable mode, in step S1, the three piezoelectric sheets and the three inertial masses are arranged in a triangular shape on three side surfaces of the triangular prism to form a circular shaft structure.
The technical solution of the invention is as follows:
the utility model provides a three-dimensional high temperature piezoelectricity acceleration sensor, including sensitive subassembly, the three-dimensional casing, the upper cover, take socket upper cover, stud and socket, three sensitive subassembly adopts stud to be fixed in respectively on the three mutually perpendicular cylinder cavity bottom surface of three-dimensional casing, upper cover and take socket upper cover to fix respectively at three-dimensional casing cylinder cavity opening part, the socket with take the socket upper cover, the three-dimensional casing links firmly, sensitive subassembly passes through the wire and links to each other with coaxial socket, sensitive subassembly includes the triangular prism, the piezoelectric patches, inertia quality piece, pretension ring, three piezoelectric patches and three inertia quality piece are at the three side of triangular prism with the triangle-shaped configuration, adopt pretension ring fixed. The sensor is fixed on the object to be measured through the three-way casing mounting hole, and the signal passes through the socket and transmits to in the external signal acquisition equipment.
The triangular prism, the piezoelectric plate and the inertia mass block are installed to form a round shaft, and are sleeved by a pre-tightening ring, and the pre-tightening ring is heated to generate radial contraction to tighten the assembly.
The three-way shell is of a cubic structure with three cylindrical cavities, the three cylindrical cavities are respectively positioned on three surfaces of the cube, and threaded holes are formed in the bottom surfaces of the cylindrical cavities.
The triangular prism is a regular triangular prism, and a threaded hole is formed in the center of the right side of the triangular prism.
The pre-tightening ring is made of TiNiNb shape memory alloy material, mechanically expands diameter at low temperature, and contracts in a variable direction due to martensite reversion in the heating process after assembly, so that the application of prestress is realized.
And a temperature color code is prepared on the pre-tightening ring, the color code color change temperature is consistent with the shrinkage temperature of the memory alloy material for completing phase transition, and the pre-tightening ring is used for controlling the heating temperature in the assembling process.
The three-way shell comprises a three-way shell body, a first cylindrical cavity, a second cylindrical cavity, a third cylindrical cavity and a socket mounting hole, wherein the first cylindrical cavity, the second cylindrical cavity and the third cylindrical cavity are arranged in the three-way shell body and are provided with a hollow opening, the socket mounting hole is connected with the third cylindrical cavity and extends to the outer surface of the three-way shell body, the socket mounting hole is a cylindrical through hole, the three-way shell body is a solid cube, the edge where the opening of the socket mounting hole is located is processed into a plane, the bottom surface of the first cylindrical cavity, the bottom surface of the second cylindrical cavity and the bottom surface of the third cylindrical cavity are perpendicular to each other and are perpendicular to the outer surface of the three-way shell body, the upper cover is arranged at the opening of the third cylindrical cavity, and the upper cover with the socket is respectively arranged at the opening of the first cylindrical cavity and the opening of the second cylindrical cavity;
The sensitive component arranged in the first cylindrical cavity is used for measuring the acceleration in the X direction, the sensitive component arranged in the second cylindrical cavity is used for measuring the acceleration in the Y direction, and the sensitive component arranged in the third cylindrical cavity is used for measuring the acceleration in the Z direction.
The invention has the following advantages:
(1) the invention does not need external power supply when working, and has the advantages of reliability, durability, wide measuring frequency range, wide measuring range and wide using temperature range; the working temperature range of the sensor is-74-250 ℃, the working frequency is 0.1-10000 Hz, the charge sensitivity reaches 10pC/g, the working frequency range is 0.1-10000 Hz, and the measurement range is 500g, so that the requirement of vibration monitoring of a conventional power system can be met;
(2) the invention ensures the easy operability, consistency and stability of the assembly of the sensitive group by controlling the prestressing force exerted by the prestressing ring through the temperature, the inertia mass block of the piezoelectric piece is fixed by the prestressing ring with high tension, and the assembly does not need an adhesive or a stud, thereby ensuring the optimal performance and reliability, and the prestressing ring enables the piezoelectric piece to generate the prestressing force to obtain extremely high linearity. The invention solves the technical problem that the shear sensitive core body is difficult to ensure to have a higher and stable frequency measurement range in the actual manufacturing process;
(3) The invention adopts the design of the modularized sensitive component, which is beneficial to the serialization and the generalization of the product;
(4) the invention adopts a triangular shear sensitive structure, and has the characteristics of high sensitivity and mass ratio, high resonance frequency, good isolation performance on base strain and temperature transient and the like.
Drawings
FIG. 1 is a schematic 3D structure diagram of a three-dimensional high-temperature piezoelectric acceleration sensor sensitive component;
FIG. 2 is a schematic cross-sectional view of a three-dimensional high-temperature piezoelectric acceleration sensor;
FIG. 3 is a schematic diagram of the overall structure of a three-way high-temperature piezoelectric acceleration sensor;
FIG. 4 is a schematic diagram of a main sectional structure of a three-way high-temperature piezoelectric acceleration sensor;
FIG. 5 is a schematic cross-sectional view of a three-dimensional high-temperature piezoelectric acceleration sensor A-A;
fig. 6 is a schematic structural view of a three-way housing of a three-way high-temperature piezoelectric acceleration sensor;
FIG. 7 is a schematic structural diagram of an upper cover of a three-way high-temperature piezoelectric acceleration sensor;
FIG. 8 is a schematic diagram of a three-way high-temperature piezoelectric acceleration sensor with a socket and an upper cover;
fig. 9 is a flow chart of an assembling method of a three-way high-temperature piezoelectric acceleration sensor.
Reference numerals:
1. a sensitive component; 11. a three-diamond column; 12. a piezoelectric sheet; 13. an inertial mass block; 14. pre-tightening the ring; 2. a three-way housing; 3. an upper cover; 4. an upper cover with a socket; 5. a stud bolt; 6. a coaxial jack is provided.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Example 1
A three-way high-temperature piezoelectric acceleration sensor is shown in figures 1-2 and comprises a sensing assembly 1, a three-way shell 2 fixed outside the sensing assembly 1, an upper cover 3 arranged above the sensing assembly 1 and with an upper surface flush with an opening of the three-way shell 2, an upper cover 4 with a socket, a stud bolt 5 for fixing the sensing assembly 1 inside the three-way shell 2 and a coaxial socket 6 connected with the sensing assembly 1 through a lead, wherein the three-way shell 2 is provided with a mounting hole for fixing an object to be detected, the upper cover 3 and the upper cover 4 with the socket are hermetically connected with the opening of the three-way shell 2, the coaxial socket 6 is pressed in the mounting hole of the upper cover 4 with the socket, and a signal leading-out wire of the sensing assembly 1 is welded in the coaxial socket 6;
the sensitive component 1 converts a mechanical acceleration input signal into a charge signal by utilizing a piezoelectric effect and transmits the charge signal to external signal acquisition equipment through the coaxial socket 6;
the sensitive assembly 1 comprises a rhombus column 11, piezoelectric sheets 12, inertia mass blocks 13 and pre-tightening rings 14 fixed outside the inertia mass blocks 13, wherein the piezoelectric sheets 12 and the inertia mass blocks 13 are arranged outside three side faces of the rhombus column 11 in sequence, and the number of the piezoelectric sheets 12 and the inertia mass blocks 13 is 3;
The piezoelectric sheets 12 and the inertia mass blocks 13 are sequentially attached to the outer sides of the three-diamond columns 11 and are uniformly distributed along the axes of the three-diamond columns 11, the inertia mass blocks 13 are sleeved with the pre-tightening rings 14 from the outer sides of the inertia mass blocks 13, the pre-tightening rings 14 are made of memory alloy, the piezoelectric sheets 12 and the inertia mass blocks 13 are tightly hooped on the outer sides of the three-diamond columns 11 through mechanical expanding at low temperature and radial contraction generated by heating during assembly of the pre-tightening rings 14;
a temperature indicating color code is arranged on the outer side of the pre-tightening ring 14 and used for indicating the shrinkage temperature of the memory alloy material for finishing phase transformation in the assembling process of the sensitive component 1 so as to control the heating temperature in the assembling process;
the triangular prism 11 is a regular triangular prism, the piezoelectric patch 12 is a thickness shearing piezoelectric ceramic element with a flat surface, the piezoelectric patch 12 is polarized along a long edge and plated on the surface, the outer part of the inertia mass block 13 is a cylindrical surface, the inner part of the inertia mass block is a plane, and the pre-tightening ring 14 is made of TiNiNb shape memory alloy;
the number of the sensitive assemblies 1 is 3, and the sensitive assemblies are respectively used for measuring the acceleration in the X direction, the Y direction and the Z direction;
as shown in fig. 6, the three-way housing 2 is a cubic structure with three cylindrical cavities, and the sensitive component 1 is fixed in the cylindrical cavities by the stud bolts 5;
as shown in fig. 7-8, the upper cover 3 and the upper cover 4 with a socket are both installed by screwing or laser welding;
The middle part of the upper cover 4 with the socket is provided with a mounting hole, the coaxial socket 6 is pressed in the mounting hole of the upper cover 4 with the socket in an interference fit manner, and the coaxial socket 6 is electrically connected with each sensitive component 1 through a lead;
the three-way shell 2, the upper cover 3 and the upper cover 4 with the socket are made of titanium alloy, the inertia mass block 13 is made of high specific gravity alloy, and the triangular prism 11 and the stud bolt 5 are made of stainless steel.
Example 2
A three-way high-temperature piezoelectric acceleration sensor belongs to a triangular shear type piezoelectric acceleration sensor and comprises a sensitive component 1, a three-way shell 2, an upper cover 3, an upper cover with a socket 4, a stud bolt 5 and a socket 6 as shown in figures 3-5.
The sensor is provided with three independent sensitive components 1, the center of a triangular prism 11 of each sensitive component 1 is provided with a threaded hole, the threaded holes are respectively fixed in three cylindrical cavities of a three-way shell 2 by adopting high-strength stud bolts 5, and the sensitive components 1 are ensured to be in good contact with the three-way shell 2; the upper cover 3 and the upper cover 4 with the socket are in screwed connection or laser welding at the opening of the cylindrical cavity of the three-way shell 2, and the sealing performance of the joint of the upper cover and the shell is ensured; the signal outgoing line of the sensitive component 1 is welded on the corresponding coaxial socket 6, and finally the socket 6 is pressed in the mounting holes of the three-way shell 2 and the upper cover 4 with the socket, so that good contact must be ensured, and the connection mode is interference fit.
As shown in fig. 1-2, the sensing assembly 1 adopts a triangular shear type structure, and converts a mechanical acceleration input signal into a charge signal by using a piezoelectric effect. The sensitive component 1 comprises a triangular prism 11, a piezoelectric sheet 12, an inertia mass block 13 and a pre-tightening ring 14, wherein the three piezoelectric sheets 12 and the three inertia mass blocks 13 are arranged on three side surfaces of the triangular prism 11 in a triangular mode, the three side surfaces are sleeved with the pre-tightening ring 14, the pre-tightening ring 14 generates radial contraction after being heated, and the triangular prism 11, the piezoelectric sheets 12 and the inertia mass blocks 13 are tightened. The piezoelectric plate 12 and the inertial mass 13 are fixed by a high-tension pre-tightening ring 14, the assembly does not require adhesives or studs, and thus optimum performance and reliability are ensured. The pre-tensioning ring 14 pre-stresses the piezoelectric sheet 12 to achieve extremely high linearity.
In order to ensure that the prestress applied by the pre-tightening ring 14 is uniform, the triangular prism 11, the piezoelectric plate 12 and the inertial mass 13 should form a "circular shaft" after being installed. For convenience of assembly, the diameter of the pre-tightening ring 14 should be larger than the diameter of the "circular shaft" formed by the triangular prism 11, the piezoelectric plate 12 and the inertial mass 13 at normal temperature, and after the "circular shaft" is sleeved with the pre-tightening ring 14, the pre-tightening ring is heated to be radially contracted, so that the tightening force is generated. The relative interference between the target dimension of the memory alloy pre-tightening ring 14 and the outer diameter dimension of the tightened assembly is used to provide the necessary tightening force to the tightened assembly.
The triangular prism 11 is a regular triangular prism, and a threaded hole is formed in the center of the triangular prism and used for locking and fixing the sensitive assembly.
The piezoelectric patch 12 is a thickness shear piezoelectric ceramic element, and is polarized along a long edge. The processed piezoelectric plate is required to be flat in surface, the parallelism of the front surface and the rear surface is better than 0.02, and the surface is plated with gold to be used as an electrode for leading out charges.
The outer surface of the inertia mass block 13 is a cylindrical surface and is tightly matched with the inner surface of the pre-tightening ring 14, and the inner surface is a plane and is tightly matched with the electrode surface of the piezoelectric sheet 12.
The pre-tightening ring 14 is made of TiNiNb shape memory alloy material and is made of the memory recovery characteristic and super elasticity of wide-hysteresis shape memory alloy. And mechanically expanding at low temperature, and realizing the application of prestress due to reverse diameter-variable shrinkage of martensite in the heating process after assembly. Meanwhile, the memory alloy martensite is reversed to be changed into the parent phase, and the fastening connection is ensured to be durable and stable.
The pre-tightening ring 14 is made of shape memory alloy pipe or bar material through mechanical processing into needed approximate shape, the inner diameter of the processed pipe or bar material is smaller than the outer diameter of the clamped assembly, the inner diameter is expanded uniformly by mechanical expanding in low temperature environment, the inner diameter is slightly larger than the outer diameter of the clamped assembly, the memory alloy pre-tightening ring is sleeved on the part of the clamped assembly needing to be clamped, the pre-tightening ring is heated uniformly, when the temperature reaches the temperature at which the memory alloy begins to shrink, the pre-tightening ring begins to shrink, along with the gradual rise of the temperature, the shrinkage of the inner diameter of the pre-tightening ring is gradually increased, the pre-tightening ring and the clamped assembly are in close contact through clearance fit, the contact pressure is gradually increased along with the rise of the temperature, and when the temperature reaches the final temperature of complete shrinkage, the pre-tightening ring does not shrink any more, the tightening force is not increased any more, and the fastening and tightening operation is completed.
A temperature color code is prepared on the pre-tightening ring 14, the color code color change temperature is consistent with the shrinkage temperature of the memory alloy material for completing phase transition, and the temperature is used for controlling the heating temperature in the assembling process. When the heating temperature reaches the temperature at which the memory alloy is completely recovered, the temperature color code turns into black, and the pre-tightening ring is contracted and tightened.
As shown in fig. 6, the three-way housing 2 is a cubic structure with three cylindrical cavities, the three cylindrical cavities are respectively located on three faces of the cube, and threaded holes are formed in the bottom face of each cylindrical cavity and used for fixing the sensitive component; a through hole for sensor mounting is provided in the three-way housing 2.
As shown in fig. 7-8, the upper cover 3 is a rotator structure, and is screwed with the three-way housing 2.
As shown in fig. 8, the upper cap 4 with a socket is a hollow rotator structure, and is connected with the three-way housing 2 by screw threads and is in interference fit with the socket 6.
The socket 6 adopts a general GM5 coaxial socket.
In order to reduce the total amount and improve the rigidity of the product housing, the three-way housing 2, the upper cover 3 and the upper cover with a socket 4 are made of titanium alloy.
In order to improve the sensitivity, the inertial mass 13 is made of a high specific gravity alloy.
In order to improve rigidity, stainless steel is used for the triangular prism 11 and the stud bolt 5.
The shear type three-axis piezoelectric acceleration sensor manufactured according to the embodiment has the working temperature range of-74-250 ℃, the charge sensitivity of 10pC/g, the working frequency range of 0.1-10000 Hz, and the measurement range of 500g, and can meet the requirement of vibration monitoring of a conventional power system.
Example 3
As shown in fig. 9, an assembling method of a three-way high-temperature piezoelectric acceleration sensor includes the following steps:
s1, assembling sensitive components: mechanically stretching the diameter of the pre-tightening ring 14, then arranging the three piezoelectric sheets 12 and the three inertia mass blocks 13 on three side surfaces of the triangular prism 11 in a triangular mode and uniformly distributing the three piezoelectric sheets and the three inertia mass blocks along the axis of the triangular prism 11, sleeving the pre-tightening ring 14 outside the three inertia mass blocks 13, starting heating, enabling the pre-tightening ring 14 to shrink radially and tighten the triangular prism 11, the piezoelectric sheets 12 and the inertia mass blocks 13, and finishing the assembly of the sensitive component 1;
the heating temperature is determined by judging whether the temperature indicating color code arranged on the pre-tightening ring 14 is changed into black or not, if not, the heating is continued, and if yes, the phase transition shrinkage temperature of the pre-tightening ring 14 is reached, and the heating is stopped;
the three piezoelectric sheets 12 and the three inertial masses 13 are arranged on three sides of the triangular prism 11 in a triangular mode to form a circular shaft structure;
S2, assembling sensitive components: fixing three sensitive assemblies 1 at the bottoms of three cylindrical cavities of a three-way shell 2 through stud bolts 5, and enabling the sensitive assemblies 1 to be in good contact with the three-way shell 2;
s3, assembling an upper cover: the upper cover 3 and the upper cover 4 with the socket are screwed or laser welded at the opening of the cylindrical cavity of the three-way shell 2, and the connection parts of the upper cover 3, the upper cover 4 with the socket and the three-way shell 2 are sealed;
s4, socket assembly: and welding the signal outgoing line of the sensitive component 1 on the corresponding coaxial socket 6, then crimping the coaxial socket 6 in the mounting holes of the three-way shell 2 and the upper cover 4 with the socket, and finishing the assembly of the three-way high-temperature piezoelectric acceleration sensor.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.

Claims (10)

1. The utility model provides a three-dimensional high temperature piezoelectricity acceleration sensor which characterized in that: the sensor comprises a sensing assembly (1), wherein the sensing assembly (1) comprises a rhombus column (11), piezoelectric sheets (12) and inertia mass blocks (13) which are sequentially arranged outside three side surfaces of the rhombus column (11), and pre-tightening rings (14) fixed outside the inertia mass blocks (13), wherein the number of the piezoelectric sheets (12) and the number of the inertia mass blocks (13) are 3;
The piezoelectric sheets (12) and the inertia mass blocks (13) are sequentially attached to the outer sides of the three-diamond columns (11) and are uniformly distributed along the axes of the three-diamond columns (11), the inertia mass blocks (13) are sleeved with the pre-tightening rings (14) from the outer parts of the inertia mass blocks (13), the pre-tightening rings (14) are made of memory alloy, and the piezoelectric sheets (12) and the inertia mass blocks (13) are hooped on the outer sides of the three-diamond columns (11) by the radial contraction generated by mechanical expanding at low temperature and heating during assembly of the pre-tightening rings (14).
2. The three-way high-temperature piezoelectric acceleration sensor according to claim 1, characterized in that: and a temperature indicating color code is arranged on the outer side of the pre-tightening ring (14) and used for indicating the shrinkage temperature of the memory alloy material for finishing phase transformation in the assembling process of the sensitive component (1) so as to control the heating temperature in the assembling process.
3. The three-way high-temperature piezoelectric acceleration sensor according to claim 1, characterized in that: the triangular prism (11) is a regular triangular prism, the piezoelectric patch (12) is a thickness shearing piezoelectric ceramic element with a flat surface, the piezoelectric patch (12) is polarized along a long edge and plated on the surface, the outer part of the inertia mass block (13) is a cylindrical surface, the inner part of the inertia mass block is a plane, and the pre-tightening ring (14) is made of TiNiNb shape memory alloy.
4. The three-way high-temperature piezoelectric acceleration sensor according to claim 1, characterized in that: the sensor is characterized by further comprising a three-way shell (2) fixed outside the sensitive component (1), an upper cover (3) and an upper cover with a socket (4) which are arranged above the sensitive component (1) and the upper surface of which is flush with the opening of the three-way shell (2), a stud bolt (5) for fixing the sensitive component (1) inside the three-way shell (2) and a coaxial socket (6) connected with the sensitive component (1) through a lead, wherein the three-way shell (2) is provided with a mounting hole for fixing the three-way shell with an object to be measured, the upper cover (3) and the upper cover with the socket (4) are hermetically connected with the opening of the three-way shell (2), the coaxial socket (6) is in press-joint with the mounting hole of the upper cover with the socket (4), and a signal leading-out wire of the sensitive component (1) is welded in the coaxial socket (6);
the sensing assembly (1) converts a mechanical acceleration input signal into a charge signal by utilizing a piezoelectric effect, and the charge signal is transmitted to external signal acquisition equipment through the coaxial socket (6).
5. The three-way high-temperature piezoelectric acceleration sensor according to claim 4, characterized in that: three-dimensional casing (2) are the cube structure who sets up three cylinder cavity, sensitive subassembly (1) is passed through stud (5) are fixed in the cylinder cavity, the quantity of sensitive subassembly (1) is 3, is used for measuring the acceleration of X direction, Y direction and Z direction respectively.
6. The three-way high-temperature piezoelectric acceleration sensor according to claim 4, characterized in that: the upper cover (3) and the upper cover (4) with the socket are installed in a screwed connection or laser welding mode;
the middle of the upper cover (4) with the socket is provided with a mounting hole, the coaxial socket (6) is in press-fit with the mounting hole of the upper cover (4) with the socket and is in interference fit, and the coaxial socket (6) is electrically connected with each sensitive component (1) through a lead.
7. The three-way high-temperature piezoelectric acceleration sensor according to claim 4, characterized in that: three-way casing (2) upper cover (3) with the material of taking socket upper cover (4) is the titanium alloy, the material of inertial mass piece (13) is high proportion alloy, triangular prism (11) the material of stud (5) is the stainless steel.
8. An assembling method of a three-way high-temperature piezoelectric acceleration sensor is characterized in that: the method comprises the following steps:
s1, assembling the sensitive component: mechanically stretching a pre-tightening ring (14), arranging three piezoelectric sheets (12) and three inertia mass blocks (13) on three side surfaces of a triangular prism (11) in a triangular mode, uniformly distributing the three piezoelectric sheets and the three inertia mass blocks (13) along the axis of the triangular prism (11), sleeving the pre-tightening ring (14) outside the three inertia mass blocks (13), starting heating, enabling the pre-tightening ring (14) to contract in the radial direction and tighten the triangular prism (11), the piezoelectric sheets (12) and the inertia mass blocks (13), and finishing assembly of the sensitive assembly (1);
S2, assembling sensitive components: fixing three sensitive assemblies (1) at the bottoms of three cylindrical cavities of a three-way shell (2) through stud bolts (5), and enabling the sensitive assemblies (1) to be in good contact with the three-way shell (2);
s3, assembling an upper cover: screwing or laser welding an upper cover (3) and an upper cover (4) with a socket at an opening of a cylindrical cavity of the three-way shell (1), and sealing the connection positions of the upper cover (3) and the upper cover (4) with the socket and the three-way shell (1);
s4, socket assembly: and welding the signal outgoing line of the sensitive component (1) on the corresponding coaxial socket (6), and then crimping the coaxial socket (6) in the mounting holes of the three-way shell (1) and the upper cover (4) with the socket, thus finishing the assembly of the three-way high-temperature piezoelectric acceleration sensor.
9. The assembling method of a three-way high-temperature piezoelectric acceleration sensor according to claim 8, characterized in that: in step S1, the temperature of heating is determined by judging whether or not the temperature indicator provided on the preload ring (14) turns black, and if not, heating is continued, and if yes, the phase transition contraction temperature of the preload ring (14) is reached, and heating is stopped.
10. The assembling method of a three-way high-temperature piezoelectric acceleration sensor according to claim 8, characterized in that: in step S1, the three piezoelectric plates (12) and the three inertial masses (13) are arranged in a triangular shape on three side surfaces of the triangular prism (11) to form a circular axis structure.
CN202210285642.5A 2022-03-23 2022-03-23 Three-direction high-temperature piezoelectric acceleration sensor and assembling method thereof Pending CN114755454A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210285642.5A CN114755454A (en) 2022-03-23 2022-03-23 Three-direction high-temperature piezoelectric acceleration sensor and assembling method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210285642.5A CN114755454A (en) 2022-03-23 2022-03-23 Three-direction high-temperature piezoelectric acceleration sensor and assembling method thereof

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Publication Number Publication Date
CN114755454A true CN114755454A (en) 2022-07-15

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CN202210285642.5A Pending CN114755454A (en) 2022-03-23 2022-03-23 Three-direction high-temperature piezoelectric acceleration sensor and assembling method thereof

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