CN114755453B - Differential detection type optical accelerometer based on F-P cavity with adjustable cavity length - Google Patents
Differential detection type optical accelerometer based on F-P cavity with adjustable cavity length Download PDFInfo
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- CN114755453B CN114755453B CN202210236248.2A CN202210236248A CN114755453B CN 114755453 B CN114755453 B CN 114755453B CN 202210236248 A CN202210236248 A CN 202210236248A CN 114755453 B CN114755453 B CN 114755453B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
- G01C21/10—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
- G01C21/12—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning
- G01C21/16—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning by integrating acceleration or speed, i.e. inertial navigation
- G01C21/165—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning by integrating acceleration or speed, i.e. inertial navigation combined with non-inertial navigation instruments
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/213—Fabry-Perot type
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/0877—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using integrated interconnect structures
Abstract
The invention discloses a differential detection type optical accelerometer based on an F-P cavity with an adjustable cavity length. Light of the wide-spectrum light source is coupled into the optical waveguide through the mode spot converter, and 50. The upper and lower branches of the Y waveguide are equal in length and are composed of an electrode modulation region, a Bragg grating region and an MMI waveguide reflector. The Bragg grating area is positioned at the fixed end, the MMI waveguide reflector is positioned on the movable mass block, and the fixed end and the movable mass block are connected through a three-beam structure of a first micro beam, a main beam and a second micro beam. An F-P cavity is formed between the Bragg grating and the MMI coupler, and the optical waveguide on the micro-beam is used as a part of the cavity length. The input acceleration can be obtained by carrying out differential calculation on the light intensity information received by the upper and lower photoelectric detectors. The invention has high detection precision, high reliability and integration level, can eliminate common-mode noise interference and has certain anti-electromagnetic interference capability.
Description
Technical Field
The invention belongs to an optical accelerometer in the technical field of integrated optics and inertial sensing, and particularly relates to a differential detection type monolithic integrated optical accelerometer based on an F-P cavity with an adjustable cavity length.
Background
The accelerometer based on the MEMS technology has the advantages of low cost, small volume, light weight and the like, and has extremely wide application and development prospects in the fields of consumer electronics, industrial automation, aerospace and the like. However, the conventional MEMS accelerometer, such as capacitive type, piezoresistive type, piezoelectric type, resonant type, etc., cannot satisfy the requirement of high precision inertial navigation and guidance system at the same time in the indexes of precision, dynamic range, environmental desensitization, etc. The MOEMS accelerometer has inherent anti-electromagnetic interference capability, and the potential of high detection precision makes the MOEMS accelerometer gradually become a popular research direction in the field of current accelerometers.
At present, more design schemes based on different principles exist in the MOEMS accelerometer, for example: a micro-nano optical fiber ring accelerometer, a microstructure grating accelerometer, a fiber Bragg grating accelerometer, an optical fiber F-P cavity accelerometer, a sub-wavelength resonant accelerometer and an integrated optical waveguide accelerometer. In the last decades, due to the heat of research on silicon-based devices on a chip, the technology of integrated optical waveguide accelerometers is mature, and the integrated integration of devices such as sub-wavelength gratings, Y branches, MMI couplers, modulation electrodes, photonic crystal reflectors and the like can be realized on the chip, so that the technology can fully combine the advantages of accelerometers of other principle schemes and is a key attack and shut direction of future optical accelerometers.
With the increasing demand of the performance of the inertial system, the application field has higher and higher requirements on the precision, bandwidth, volume and power consumption of the accelerometer, and the optical accelerometer with high precision, integration, miniaturization, low cost and high stability has become a trend. Meanwhile, under the promotion of the development of micro-nano technology, micro-processing technology and the like, the high-precision differential detection type optical accelerometer based on the F-P cavity with the adjustable cavity length can be manufactured.
Disclosure of Invention
In order to solve the problems in the background art, the invention provides a differential detection type optical accelerometer based on an F-P cavity with an adjustable cavity length, which combines a lithium niobate thin film material with excellent optical performance and has the advantages of high detection precision, high reliability, high integration level, capability of eliminating common-mode noise interference, electromagnetic interference resistance and the like.
The technical scheme adopted by the invention is as follows:
the optical accelerometers are symmetrically arranged about the central axis of the optical accelerometers, and comprise a wide-spectrum light source, a mode spot converter, an input waveguide, a 1;
the fixed end, the main beam, the first mass arm, the second mass arm and the mass block are all formed by sequentially laminating a lithium niobate single crystal thin film layer, a silicon dioxide buffer layer and a silicon substrate from top to bottom, and the first micro beam and the second micro beam are both lithium niobate single crystal thin film layers; the fixed end is connected with the mass block through the main beam, a first mass arm and a first micro beam which are connected with each other and a second mass arm and a second micro beam which are connected with each other are respectively arranged between the fixed end and the mass block on two sides of the main beam, the first micro beam and the second micro beam are both connected with one side surface of the fixed end, the first mass arm and the second mass arm are both connected with one side surface of the mass block, and gaps are respectively arranged among the first mass arm, the first micro beam, the second mass arm, the second micro beam and the main beam;
the upper surface of the fixed end is provided with a wide-spectrum light source, a spot-size converter, an input waveguide, a 1;
the wide-spectrum light source, the mode spot converter, the input waveguide and the 1-type Y waveguide are arranged on a central axis, the wide-spectrum light source sequentially passes through the mode spot converter and the input waveguide and then is connected with a beam combining end of the 1-type Y waveguide, a first branch end of the 1-type Y waveguide is connected with a first branch end of a first 2-type Y waveguide;
the first micro beam upper waveguide and the second micro beam upper waveguide are respectively arranged on the upper surfaces of the first mass arm, the first micro beam, the mass block, the second mass arm, the second micro beam and the mass block, and the first 1 × 2 MMI coupler, the second 1 × 2 MMI coupler, the first annular curved waveguide and the second annular curved waveguide are all arranged on the upper surface of the mass block;
the beam combining end of the first 2; the first upper electrode and the first lower electrode are symmetrically arranged on the upper surface of the fixed end at two sides of the first 2.
Light of the wide-spectrum light source is coupled into the input waveguide after passing through the mode spot converter, and then 3dB light splitting is realized at the 1; the first light beam sequentially passes through the first Bragg grating and the waveguide on the first micro beam, then reaches the first 1 x 2 type MMI coupler, returns along the original light path after passing through the first annular bent waveguide, then is coupled into an upper branch of a double-branch port of the first 2; and the second light beam sequentially passes through the second Bragg grating and the waveguide on the second micro beam and then reaches the second 1 × 2 type MMI coupler, returns along the original light path after passing through the second annular bent waveguide, then is coupled into a lower branch of a double-branch port of the second 2.
A second branch end of the first 2;
and a second branch end of the second 2.
The waveguide on the first micro beam is connected with the input end of the first 1 × 2 type MMI coupler, and the two output ends of the first 1 × 2 type MMI coupler are connected through the first annular bent waveguide;
the waveguide on the second micro beam is connected with the input end of the second 1 x 2 type MMI coupler, and the two output ends of the second 1 x 2 type MMI coupler are connected through the second annular curved waveguide.
The bottoms of the first micro beam and the second micro beam are suspended.
The input waveguide, the 1.
The first Bragg grating and the second Bragg grating are waveguide Bragg gratings with outer ridge rectangular modulation.
The wide-spectrum light source adopts an SLD light source or an ASE light source.
The invention has the beneficial effects that:
the differential detection type optical accelerometer based on the F-P cavity with the adjustable cavity length integrates the F-P cavity consisting of the waveguide Bragg grating, the MMI coupler and the bent waveguide in a plane, reduces the volume of the sensor and simplifies the preparation process compared with a planar F-P cavity optical accelerometer, and has high reliability and integration level and certain anti-electromagnetic interference capability.
The invention adopts the ridge lithium niobate single crystal thin film waveguide to realize the light transmission, and can limit the light field in a smaller size; all the element positions are determined by photoetching and etching processes, and no extra adjustment is needed, so that the relative position error is extremely small.
The invention adopts the three-beam structure design of the first micro beam, the main beam and the second micro beam, so that one micro beam only generates axial tension and the other micro beam only generates axial compression, thereby realizing differential detection of a push-pull structure, effectively inhibiting the influence of common-mode signals such as paraxial coupling error, light source power fluctuation, environment temperature and the like, improving the detection precision of the accelerometer, and simultaneously ensuring the resonant frequency by introducing the main beam.
The invention adopts the design that an F-P cavity consisting of a waveguide Bragg grating, an MMI coupler and a curved waveguide is added on two branches of a 1 1 Smaller than the amplitude reflectivity r of the waveguide mirror formed by the MMI coupler and the curved waveguide 2 When the F-P cavity is in an over-coupling state, a standing wave field in the F-P cavity is established during resonance, incident light energy is almost totally reflected, and the phase of reflected light is very sensitive to cavity length change, namely axial deformation of the micro-beam, so that the detectable sensitivity of the acceleration sensor can be greatly improved by adopting the F-P cavity in the resonance state.
The invention adopts lithium niobate single crystal thin film material, which can realize the high-efficiency electro-optical modulation requirement under lower half-wave voltage and realize the on-chip integration of the accelerometer and the electro-optical modulator.
Drawings
FIG. 1 is a schematic diagram of the general structure of the differential detection type optical accelerometer based on the F-P cavity with adjustable cavity length according to the invention;
FIG. 2 is a schematic cross-sectional view of an A-B optical accelerometer based on differential detection of an F-P cavity with adjustable cavity length according to the present invention;
FIG. 3 is a schematic cross-sectional view of a differential detection type optical accelerometer based on an F-P cavity with an adjustable cavity length according to the invention;
FIG. 4 is a schematic structural diagram of a two-way push-pull type F-P cavity of the differential detection type optical accelerometer based on the F-P cavity with the adjustable cavity length;
in the figure: 1. broad spectrum light source, 2, mode spot converter, 3, input waveguide, 4, 1 type 2Y waveguide, 5, first upper electrode, 6, first lower electrode, 7, first bragg grating, 8, second lower electrode, 9, second upper electrode, 10, second bragg grating, 11, first microbeam upper waveguide, 12, second microbeam upper waveguide, 13, first 1 × 2 type MMI coupler, 14, second 1 × 2 type MMI coupler, 15, first annular curved waveguide, 16, second annular curved waveguide, 17, first 2.
Detailed Description
The invention is further illustrated by the following figures and examples.
As shown in fig. 1 to 4, the optical accelerometer of the present invention is arranged symmetrically with respect to its central axis, and includes a wide spectrum light source 1, a mode spot converter 2, an input waveguide 3, a 1;
the fixed end 26, the main beam 28, the first mass arm 30, the second mass arm 31 and the mass block 32 are all formed by sequentially stacking a lithium niobate single crystal thin film layer 23, a silicon dioxide buffer layer 24 and a silicon substrate 25 from top to bottom and forming an integral structure through a bonding process, and the first micro beam 27 and the second micro beam 29 are all lithium niobate single crystal thin film layers 23, so that the bottoms of the first micro beam 27 and the second micro beam 29 are all suspended. The fixed end 26 is connected with a mass block 32 through a main beam 28, the main beam 28 is arranged in the middle of one side face of the fixed end 26 and the mass block 32, a first mass arm 30 and a first micro beam 27 which are connected with each other and a second mass arm 31 and a second micro beam 29 which are connected with each other are respectively arranged between the fixed end 26 and the mass block 32 on two sides of the main beam 28, the first micro beam 27 and the second micro beam 29 are both connected with one side face of the fixed end 26, the first mass arm 30 and the second mass arm 31 are both connected with one side face of the mass block 32, and gaps are respectively arranged between the first mass arm 30, the first micro beam 27, the second mass arm 31 and the main beam 28 and between the second micro beam 29 and the main beam 28;
the upper surface of the fixed end 26 is provided with a wide-spectrum light source 1, a spot-size converter 2, an input waveguide 3, a 1;
a wide-spectrum light source 1, a spot size converter 2, an input waveguide 3 and a 1-type Y waveguide 4 are arranged on a central axis, the wide-spectrum light source 1 sequentially passes through the spot size converter 2 and the input waveguide 3 and then is connected with a beam combining end of a 1; the first output waveguide 19 and the first photodetector 20 are symmetrical with the second output waveguide 21 and the second photodetector 22 about the central axis.
The second branch end of the first 2; the second branch end of the second 2.
The first micro beam upper waveguide 11 and the second micro beam upper waveguide 12 are respectively arranged on the upper surfaces of the first mass arm 30, the first micro beam 27, the mass block 32, the second mass arm 31, the second micro beam 29 and the mass block 32, and the first 1 × 2 type MMI coupler 13, the second 1 × 2 type MMI coupler 14, the first annular curved waveguide 15 and the second annular curved waveguide 16 are all arranged on the upper surface of the mass block 32;
the beam combining end of the first 2; wherein, the waveguide 11 on the first micro beam is connected with the input end of the first 1 × 2 type MMI coupler 13, and the two output ends of the first 1 × 2 type MMI coupler 13 are connected through the first annular curved waveguide 15; the second microbeam upper waveguide 12 is connected to an input of a second 1 x 2-type MMI coupler 14 and two outputs of the second 1 x 2-type MMI coupler 14 are connected by a second annular curved waveguide 16. A first upper electrode 5 and a first lower electrode 6 are symmetrically arranged on the upper surface of a fixed end 26 at two sides of a beam combining end of the first 2.
Light of a wide-spectrum light source 1 is coupled into an input waveguide 3 after passing through a spot-size converter 2, and then 3dB light splitting is realized at a 1; the first light beam sequentially passes through the first bragg grating 7 and the first micro-beam upper waveguide 11, then reaches the first 1 × 2 type MMI coupler 13, returns along the original optical path after passing through the first annular bent waveguide 15, then is coupled into an upper branch of a double-branch port of the first 2; the second light beam sequentially passes through the second bragg grating 10 and the second micro-beam upper waveguide 12, then reaches the second 1 × 2 MMI coupler 14, returns along the original optical path after passing through the second annular curved waveguide 16, then is coupled into the lower branch of the double-branch port of the second 2.
The input waveguide 3, the 1.
The first Bragg grating 7 and the second Bragg grating 10 are waveguide Bragg gratings modulated by an outer ridge rectangle, the bandwidth is 25 nm-30 nm, and the reflectivity is more than 95%.
The wide-spectrum light source 1 adopts an SLD light source or an ASE light source.
In a specific embodiment, the overall size of the differential detection type optical accelerometer based on the F-P cavity with the adjustable cavity length is 35 × 20 × 0.422 cubic millimeters, the broad spectrum light source 1 adopts an SLD light source, and the center wavelength is 1310 nanometers. The thickness of the lithium niobate single crystal thin film layer 23 is 20 micrometers, the thickness of the silicon dioxide buffer layer 24 is 2 micrometers, and the thickness of the silicon substrate 25 is 400 micrometers. The spot size converter 2 has a tip width of 200 nm and an adiabatic matching region length of 300 nm. The input waveguide 3, the 1. The first 1 x 2-type MMI coupler 13 and the second 1 x 2-type MMI coupler 14 are each 10 microns long and 4 microns wide. The first annular curved waveguide 15 and the second annular curved waveguide 16 each have a bending radius of 50 μm. The lengths of the first upper electrode 5, the first lower electrode 6, the second lower electrode 8 and the second upper electrode 9 are all 3 mm, the distance between the first upper electrode 5 and the first lower electrode 6 is 1.6 micrometers, and the distance between the second lower electrode 8 and the second upper electrode 9 is 1.6 micrometers. The reflectivity of the first bragg grating 7 and the second bragg grating 10 for 1310 nm light is 95%. The waveguide mirror composed of the first 1 x 2-type MMI coupler 13 and the first annular curved waveguide 15 and the waveguide mirror composed of the second 1 x 2-type MMI coupler 14 and the second annular curved waveguide 16 both have a reflectivity of 97% for 1310 nm light. The first and second micro-beams 27 and 29 each have dimensions of 2000 × 5 × 20 cubic micrometers. The dimensions of the main beam 28 are 6000 x 50 x 422 cubic microns. The first mass arm 30 and the second mass arm 31 each have dimensions of 4000 x 80 x 422 cubic micrometers.
When external acceleration is input along the positive Z axis of the optical accelerometer, the mass block 32 generates translational displacement due to the inertia effect, the length of the first micro beam 27 is axially compressed, and the length of the second micro beam 29 is axially stretched, so that the lengths of the F-P cavities in the upper branch and the lower branch are oppositely changed. Light reflected from the upper and lower F-P cavities respectively passes through the upper and lower 2-type Y waveguides and is finally received by the upper and lower photodetectors. The input acceleration can be obtained by carrying out differential calculation on the light intensity information received by the upper and lower photoelectric detectors.
Claims (8)
1. A differential detection type optical accelerometer based on an F-P cavity with an adjustable cavity length is characterized in that the optical accelerometer is symmetrically arranged about a central axis of the optical accelerometer, and comprises a wide spectrum light source (1), a mode spot converter (2), an input waveguide (3), a 1;
the fixed end (26), the main beam (28), the first mass arm (30), the second mass arm (31) and the mass block (32) are all formed by sequentially stacking a lithium niobate single crystal thin film layer (23), a silicon dioxide buffer layer (24) and a silicon substrate (25) from top to bottom, and the first micro beam (27) and the second micro beam (29) are all lithium niobate single crystal thin film layers (23); the fixed end (26) is connected with the mass block (32) through the main beam (28), a first mass arm (30) and a first micro beam (27) which are connected with each other, and a second mass arm (31) and a second micro beam (29) which are connected with each other are respectively arranged between the fixed end (26) and the mass block (32) on two sides of the main beam (28), the first micro beam (27) and the second micro beam (29) are both connected with one side surface of the fixed end (26), the first mass arm (30) and the second mass arm (31) are both connected with one side surface of the mass block (32), and gaps are respectively arranged between the first mass arm (30), the first micro beam (27), the second mass arm (31) and the main beam (28);
the upper surface of the fixed end (26) is provided with a wide-spectrum light source (1), a spot size converter (2), an input waveguide (3), a 1-type Y waveguide (4), a first upper electrode (5), a first lower electrode (6), a first Bragg grating (7), a second lower electrode (8), a second upper electrode (9), a second Bragg grating (10), a first 2-type Y waveguide (17), a second 2-type Y waveguide (18), a first output waveguide (19), a first photoelectric detector (20), a second output waveguide (21) and a second photoelectric detector (22);
the wide-spectrum light source (1), the mode spot converter (2), the input waveguide (3) and the 1-type 2Y waveguide (4) are arranged on a central axis, the wide-spectrum light source (1) sequentially passes through the mode spot converter (2) and the input waveguide (3) and then is connected with a beam combining end of the 1-type 2Y waveguide (4), a first branch end of the 1-type 2Y waveguide (4) is connected with a first branch end of a first 2-type 1Y waveguide (17), a second branch end of the first 2-type 1Y waveguide (17) is connected with a first photoelectric detector (20) through a first output waveguide (19), a second branch end of the 1-type 2Y waveguide (4) is connected with a first branch end of a second 2-type 1Y waveguide (18), and a second branch end of the second 2-type 1Y waveguide (18) is connected with a second photoelectric detector (22) through a second output waveguide (21);
the first micro-beam upper waveguide (11) and the second micro-beam upper waveguide (12) are respectively arranged on the upper surfaces of the first mass arm (30), the first micro-beam (27), the mass block (32), the second mass arm (31), the second micro-beam (29) and the mass block (32), and the first 1 x 2 type MMI coupler (13), the second 1 x 2 type MMI coupler (14), the first annular curved waveguide (15) and the second annular curved waveguide (16) are all arranged on the upper surface of the mass block (32);
the beam combining end of a first 2; a first upper electrode (5) and a first lower electrode (6) are symmetrically arranged on the upper surface of a fixed end (26) on two sides of a beam combining end of a first 2.
2. The differential detection type optical accelerometer based on the F-P cavity with the adjustable cavity length according to claim 1, characterized in that light of the wide-spectrum light source (1) is coupled into the input waveguide (3) after passing through the mode spot converter (2), and then 3dB light splitting is realized at a 1; the first light beam sequentially passes through a first Bragg grating (7) and a first micro-beam upper waveguide (11), then reaches a first 1 x 2 type MMI coupler (13), returns along an original light path after passing through a first annular bent waveguide (15), then is coupled into an upper branch of a double-branch port of a first 2; the second light beam sequentially passes through a second Bragg grating (10) and a second micro-beam upper waveguide (12) and then reaches a second 1 x 2 type MMI coupler (14), returns along an original light path after passing through a second annular bent waveguide (16), then is coupled into a lower branch of a double-branch port of a second 2.
3. The differential detection type optical accelerometer based on the F-P cavity with the adjustable cavity length as claimed in claim 1, wherein the second branch end of the first 2;
and a second branch end of the second 2.
4. The differential detection type optical accelerometer based on the F-P cavity with adjustable cavity length as claimed in claim 1, characterized in that the waveguide (11) on the first micro beam is connected with the input end of the first 1 x 2 type MMI coupler (13), and the two output ends of the first 1 x 2 type MMI coupler (13) are connected through the first annular curved waveguide (15);
the waveguide (12) on the second micro-beam is connected with the input end of a second 1 x 2 type MMI coupler (14), and the two output ends of the second 1 x 2 type MMI coupler (14) are connected through a second annular curved waveguide (16).
5. The differential detection type optical accelerometer based on the F-P cavity with the adjustable cavity length as claimed in claim 1, wherein the bottoms of the first micro beam (27) and the second micro beam (29) are both suspended.
6. The differential detection type optical accelerometer based on the F-P cavity with the adjustable cavity length as claimed in claim 1, wherein the input waveguide (3), the 1.
7. The differential detection type optical accelerometer based on F-P cavity with adjustable cavity length as claimed in claim 1, wherein the first Bragg grating (7) and the second Bragg grating (10) are waveguide Bragg gratings modulated by outer ridge rectangle.
8. The differential detection type optical accelerometer based on F-P cavity with adjustable cavity length as claimed in claim 1, characterized in that the wide spectrum light source (1) adopts SLD light source or ASE light source.
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