CN114754725A - Detection mechanism, system and method - Google Patents
Detection mechanism, system and method Download PDFInfo
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- CN114754725A CN114754725A CN202110036282.0A CN202110036282A CN114754725A CN 114754725 A CN114754725 A CN 114754725A CN 202110036282 A CN202110036282 A CN 202110036282A CN 114754725 A CN114754725 A CN 114754725A
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- 238000001514 detection method Methods 0.000 title claims abstract description 353
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- 239000011521 glass Substances 0.000 claims abstract description 119
- 238000007689 inspection Methods 0.000 claims abstract description 6
- 238000012360 testing method Methods 0.000 claims description 3
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- 239000000758 substrate Substances 0.000 abstract description 9
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- 238000004806 packaging method and process Methods 0.000 abstract description 6
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- 239000002699 waste material Substances 0.000 description 3
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
Abstract
The invention discloses a detection mechanism, a system and a method, wherein the detection mechanism comprises: a base; the fixing part is arranged on the base and comprises a first fixing part and a second fixing part, the first fixing part is used for vertically fixing the glass disc on the base, and the second fixing part is used for vertically fixing the detection wave emission disc on the base; detect ripples subassembly, detect ripples subassembly including detecting ripples emission dish, detect even and interval on the ripples emission dish and be provided with a plurality of detection ripples inspection socket, wherein, first fixed part corresponds the setting with the second fixed part to make and detect ripples emission dish and glass dish and set up relatively. Through the mechanism, the flatness of a plurality of negative films on the glass disc can be accurately detected, and the phenomena of exposure rejection, exposure deficiency and the like of the negative films are reduced, so that the reliability of the packaging substrate is improved.
Description
Technical Field
The present invention relates to the field of package substrate technologies, and in particular, to a detection mechanism, a detection system, and a detection method.
Background
The package substrate is a circuit board for protecting the chip and providing an interface for connecting the chip and an external circuit. The negative plate exposure machine for packaging substrates is required to mount the negative plate on a glass plate before producing the plate. And the negative film is a film for transferring design figures from the library of the software system to the plate. After the negative is produced, the negative needs to be attached to a glass tray to support and flatten the negative to realize the pattern transfer of the negative.
In the actual production of the negative film and the glass disc, the phenomenon that the partial negative film is not completely attached to the glass disc and is flat is often easy to occur, so that the negative film often has the bad phenomena of exposure refusal, exposure deficiency and the like in the subsequent exposure process, and the negative film needs to be installed again in the production of the packaging substrate. Wasting production energy and easily causing the first piece to be reworked or scrapped.
Currently, in the industry, there is no effective detection method for detecting the flatness of the film and the glass disc, so a technical scheme capable of comprehensively detecting the flatness of the film and the glass disc is urgently needed to reduce the negative film having poor phenomena such as exposure resistance and/or exposure deficiency.
Disclosure of Invention
The invention provides a detection mechanism, a detection system and a detection method, which aim to solve the problem that the flatness of a negative and a glass disc is difficult to detect comprehensively in the prior art.
In order to solve the above technical problem, the present invention provides a detecting mechanism for detecting flatness between a negative film and a glass plate, the negative film being attached to the glass plate, comprising: a base; the fixing part is arranged on the base and comprises a first fixing part and a second fixing part, the first fixing part is used for vertically fixing the glass disc on the base, and the second fixing part is used for vertically fixing the detection wave emission disc on the base; detect ripples subassembly, detect ripples subassembly including detecting ripples emission dish, detect even and interval on the ripples emission dish and be provided with a plurality of detection ripples inspection socket, wherein, first fixed part corresponds the setting with the second fixed part to make and detect ripples emission dish and glass dish and set up relatively.
When the glass disc is vertically fixed on the base through the first fixing part, the glass disc and the detection wave emitting disc are parallel and arranged at intervals; wherein, the distance between the glass disc and the detection wave transmitting disc is fixed.
Wherein, the central connecting line of the glass disk and the detection wave transmitting disk is parallel to the plane of the base.
Wherein, the distance range among all detection wave detection holes is 3-10 cm, and the number range of the detection wave detection holes is 24-48; each detection wave detection hole is used for emitting a plurality of detection waves which are parallel to each other to the glass disc, and the plurality of detection waves are vertically reflected by the glass disc and then return to the plurality of detection wave detection holes.
Wherein, be provided with in each detection ripples inspection hole and detect the ripples transmitter and detect the ripples receiver, detect the ripples transmitter and be used for to the glass dish transmission detection ripples, detect the ripples receiver and be used for receiving the detection ripples of passing through the glass dish reflection.
Wherein, detect ripples subassembly and still include: the alarm lamp, the buzzer and the control switch; the control switch is coupled with the detection wave transmitting disc and is used for controlling the switch of the detection wave transmitting disc; the alarm lamp and the buzzer are respectively in communication connection with the detection wave transmitting disc and used for feeding back the detection result of the detection mechanism.
The first fixing part is at least two grooves which are arranged on the same straight line and used for vertically fixing the bottom of the glass disc and enabling the glass disc and the detection wave emission disc to be opposite and parallel; when the bottom of the glass plate is inserted into the groove, the inner wall of the groove and the bottom of the groove are attached to the glass plate.
In order to solve the above technical problem, the present invention further provides a detection system, including: the device comprises a detection wave component, a processor and an alarm component; the detection wave component comprises a detection wave emitting disc, and the detection wave emitting disc is used for acquiring a plurality of groups of distance data between a negative plate attached to the glass disc and the detection wave emitting disc and sending the plurality of groups of distance data to the processor; the processor is coupled with the detection wave component and used for receiving the multiple groups of distance data and respectively subtracting the multiple groups of distance data from the preset distance to obtain multiple groups of difference data; comparing the multiple groups of difference data with preset differences to obtain a detection result; and the alarm component is coupled with the processor and used for alarming according to the detection result.
Wherein, a plurality of detection wave detection holes are uniformly arranged on the detection wave transmitting disc at intervals.
In order to solve the above technical problem, the present invention further provides a detection method, which is implemented by the detection system as described in any one of the above, including: acquiring a plurality of groups of distance data between a negative film pasted on a glass disc and a detection wave emission disc; respectively subtracting the plurality of groups of distance data from preset distances to obtain a plurality of groups of difference data; judging whether the multiple groups of difference data exceed a preset difference value or not; and when any group of difference data exceeds a preset difference, determining that the flatness of the negative film is unqualified.
The invention has the beneficial effects that: unlike the state of the art, the detection mechanism of the present invention comprises: a base; the fixing part is arranged on the base and comprises a first fixing part and a second fixing part, the first fixing part is used for vertically fixing the glass disc on the base, and the second fixing part is used for vertically fixing the detection wave emission disc on the base; the detection wave assembly comprises a detection wave emission disc, and a plurality of detection wave detection holes are uniformly arranged on the detection wave emission disc at intervals; the first fixing part and the second fixing part are correspondingly arranged so that the detection wave transmitting disc and the glass disc are oppositely arranged. Through the mechanism, the flatness of a plurality of negative films on the glass disc can be accurately detected, the phenomena of exposure refusal or exposure deficiency and the like of the negative films are reduced, the yield of negative film pasting is improved, and the waste of capacity is reduced.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of a detection mechanism provided in the present invention;
FIG. 2 is a schematic front view of the wave detection launch pad of the embodiment of FIG. 1;
FIG. 3 is a schematic structural diagram of another embodiment of the detecting mechanism provided by the present invention;
FIG. 4 is a schematic structural diagram of the front surface of the detection wave transmitting disk in the embodiment of FIG. 3;
FIG. 5 is a schematic diagram of an embodiment of a detection system provided in the present invention;
fig. 6 is a schematic flowchart of an embodiment of a detection method provided in the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art based on the embodiments of the present invention without any creative effort, fall within the protection scope of the present invention.
It should be noted that, if directional indications (such as up, down, left, right, front, and back … …) are involved in the embodiment of the present invention, the directional indications are only used for explaining the relative position relationship between the components, the motion situation, and the like under a certain posture (as shown in the drawing), and if the certain posture is changed, the directional indications are changed accordingly.
In addition, if there is a description relating to "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In addition, technical solutions between the embodiments may be combined with each other, but must be based on the realization of the technical solutions by a person skilled in the art, and when the technical solutions are contradictory to each other or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
Referring to fig. 1-2, fig. 1 is a schematic structural diagram of an embodiment of a detection mechanism provided in the present invention. Fig. 2 is a schematic front structure diagram of the detection wave transmitting disk in the embodiment of fig. 1.
The detection mechanism 10 of the present embodiment includes: base 11, fixed part 12, detection ripples subassembly 13. The fixing portion 12 is disposed on the base 11 and includes a first fixing portion 121 and a second fixing portion 122. The detection wave assembly 13 includes a detection wave emitting disk 131. The first fixing portion 121 is used to vertically fix the glass plate 14 to the base 11, and the second fixing portion 122 is used to vertically fix the detection wave emitting plate 131 to the base 11. When the glass disk 14 and the detection wave emitting disk 131 are fixed to the detection mechanism 10, respectively, the distance between the glass disk 14 and the detection wave emitting disk 131 is fixed and is a preset distance. A plurality of detection wave detection holes 1311 are uniformly and alternately provided on the front surface of the detection wave emitting disk 131. The first fixing portion 121 and the second fixing portion 122 are disposed correspondingly, so that the detection wave emitting disk 131 is disposed opposite to the glass disk 14.
The structure shown in the figure is such that the detection mechanism 10 is in an operative state. At this time, the base sheet 15 is attached to the glass tray 14, and the glass tray 14 is fixed to the first fixing portion 121 and is disposed perpendicular to the base 11. The front surface of the detection wave emitting disk 131 is disposed opposite to the surface of the glass disk 14 to which the base sheet 15 is attached. A plurality of detection wave detection holes 1311 uniformly and intermittently provided on the front surface of the detection wave emitting plate 131 emit a plurality of detection waves (not shown) parallel to each other to the surface of the glass plate 14 to which the base sheet 15 is attached for flatness detection.
In a specific implementation scenario, when the detection mechanism 10 is in an operating state, the glass plate 14 disposed perpendicular to the base 11 is disposed opposite and parallel to the detection wave emission plate 131. The central line of the glass plate 14 and the detection wave emitting plate 131 is also parallel to the plane (not marked in the figure) of the base 11. At this time, the distance between the glass plate 14 and the detection wave emitting plate 131 is fixed and is a predetermined distance. The plurality of detection wave detection holes 1311 of the detection wave emitting plate 131 vertically emit a plurality of detection waves to the side of the glass plate 14 to which the base sheet 15 is attached, so that the flatness between the base sheet 15 and the glass plate 14 is judged by detecting the vertical distance between the plurality of detection wave detection holes 1311 and the glass plate 14.
In a specific implementation scenario, the number of detection wave detection holes 1311 on detection wave launch pad 131 may range from 24-48. When the number of the detection wave detection holes 1311 is within the range of 24-48, the overall flatness of the bottom sheet 15 on the glass tray 14 can be comprehensively detected, and the number of the detection wave detection holes 1311 is not too large, so that the yield expenditure is influenced.
In a specific implementation scenario, when the number of the detection wave detection holes 1311 on the detection wave emitting disk 131 is in the range of 30, 30 detection wave detection holes 1311 are arrayed on the detection wave emitting disk 131 in an arrangement of 5 × 6. Wherein, the detection wave detection holes 1311 in each column or each row have the same pitch as the other detection wave detection holes 1311 in the same column or the same row. When the detecting mechanism 10 is in an operating state, the 30 detection wave detecting holes 1311 vertically emit 30 detection waves parallel to each other toward the base sheet 15 on the glass tray 14, respectively. The 30 parallel detection waves are reflected by 30 detection points distributed on the negative film 15 corresponding to the 30 detection wave detection holes 1311 in an array, and return to the corresponding detection wave detection holes 1311. Therefore, the distance measurement is performed on the 30 detection points on the film 15, the detection wave assembly 13 obtains the actual distance data between each detection wave detection hole 1311 and the corresponding detection point on the film 15 through the time difference of the detection wave transmitted and received by each detection wave detection hole 1311, and the 30 groups of actual distance data are respectively differed from the preset distance, so that the flatness of the film 15 and the glass disc 14 is judged.
Through the detection mechanism, the glass disc and the detection wave emission disc are fixed by the first fixing part and the second fixing part respectively, and the glass disc and the detection wave emission disc are oppositely arranged and fixed in distance. And the flatness detection is carried out on the distance between the detection wave transmitting disc and the film by utilizing the detection waves so as to ensure the accuracy of the detection result. Meanwhile, the invention adopts a plurality of detection wave detection holes to detect the distance between the detection wave transmitting disc and the negative film for a plurality of times, can comprehensively detect the flatness of the negative film attached on the glass disc on the premise of ensuring the productivity utilization rate, and further improves the comprehensiveness and the accuracy of the flatness detection. The phenomena of exposure refusing or exposure deficiency and the like in the exposure process of the negative film are reduced, so that the reliability of the packaging substrate is improved.
Referring to fig. 3-4, fig. 3 is a schematic structural diagram of another embodiment of the detecting mechanism provided in the present invention. Fig. 4 is a schematic structural diagram of the front surface of the detection wave transmitting disk in the embodiment of fig. 3.
The detection mechanism 20 of the present embodiment includes: base 21, fixed part 22, detection ripples subassembly 23. The fixing portion 22 is disposed on the base 21 and includes a first fixing portion 221 and a second fixing portion 222. The first fixing portion 221 is for vertically fixing the glass disk 24 to the base 21, and the second fixing portion 222 is for vertically fixing the detection wave emitting disk 231 to the base 21. When the glass disk 24 and the detection wave emitting disk 231 are fixed on the detection mechanism 20, respectively, the distance between the glass disk 24 and the detection wave emitting disk 231 is fixed and is a preset distance. A plurality of detection wave detection holes 2311 are uniformly and alternately provided on the front surface of the detection wave emitting disk 231.
The detection wave assembly 23 includes a detection wave emitting plate 231, a control switch 232, a buzzer 233, and an alarm lamp 234. The control switch 232 is disposed on the detection wave emitting disk 231 for controlling the switching of the detection wave emitting disk 231 to control the emission of the detection wave. The buzzer 233 and the alarm lamp 234 are disposed on the base 21 for feeding back the detection result of the detection mechanism 20. The alarm lamp 234 is a two-color lamp, when the detection result is unqualified, the alarm lamp 234 flashes red light, the buzzer 233 emits a warning sound, when the detection result is qualified and the detection mechanism 20 is detecting, the alarm lamp 234 emits green light, and the buzzer 233 mutes.
The control switch 232 is used to control the whole detection wave emitting disc 231, i.e. the switches of the detection wave detection holes 2311, so as to realize the simultaneous detection of the negative films 25 by the detection wave detection holes 2311.
In the present embodiment, the first fixing portion 221 is at least two grooves (not labeled). The bottom of the glass disk 24 is inserted into at least two grooves to fix the glass disk 24 in the detection mechanism 20. Wherein the width of at least two grooves is set according to the thickness of the glass disc 24. When the glass plate 24 is fixed on the first fixing portion 221, the bottoms of the at least two grooves are attached to the bottom of the glass plate 24, and the inner walls of the at least two grooves are attached to the two sides of the bottom of the glass plate 24, so that the glass plate 24 is vertically fixed. In practical production application, the thickness of the glass disc 24 is a fixed value, when flatness detection is performed on different negative films 25, the size and the thickness of the glass disc 24 are consistent, and the groove widths of at least two grooves are set according to the thickness of the glass disc 24.
In one particular implementation scenario, at least two grooves are fixed on the base 21 to fix the distance between the glass disk 24 and the detection wave emission disk 231. When the glass disc 24 is fixedly installed, the bottom of the glass disc 24 is aligned with the plane of the base 21, and then the bottom of the glass disc 24 is moved into the at least two grooves from the two unsealed ends of the at least two grooves until the center connecting line of the glass disc 24 and the detection wave emitting disc 231 is parallel to the plane of the base 21.
In another specific implementation scenario, at least two grooves (not labeled) are fixed on the base 21 near the wall of the trench on one side of the detection wave emission disk 231 to fix the distance between the glass disk 24 and the detection wave emission disk 231. The groove wall (not labeled in the figure) of at least two grooves on the side away from the detection wave-emitting disk 231 is a slide groove wall. When the glass disc 24 is fixedly installed, the glass disc 24 is placed in the grooves, the groove walls of the grooves close to one side of the detection wave emission disc 231 are attached to the groove walls of the grooves, the positions of the groove walls of the grooves far away from one side of the detection wave emission disc 231 are adjusted, the glass disc 24 is clamped on two sides of the grooves, and the glass disc 24 is vertically fixed.
In another specific implementation scenario, at least two grooves may have a vacuum chuck fixed on the groove wall of the side far from the detection wave emission disk 231, and the vacuum chuck is fixed perpendicular to the base 21 through the groove wall of the groove far from the detection wave emission disk 231. When the glass plate 24 is fixed, the vacuum suction cup is attached to the side of the glass plate 24 where the negative plate 25 is not provided, and vacuum fixing is performed on the side of the glass plate 24 where the negative plate 25 is not provided by vacuum suction, so that the glass plate 24 is vertically fixed to some extent and is arranged opposite and parallel to the detection wave emitting plate 231.
The structure shown in the figure is such that the detection mechanism 20 is in an operative state. At this time, after the base sheet 25 is attached to the glass plate 24, the glass plate 24 is fixed to the first fixing portion 221 and is disposed perpendicular to the base 21. The front surface of the detection wave emitting plate 231 is disposed opposite to the surface of the glass plate 24 to which the base sheet 25 is attached. A plurality of detection wave detection holes 2311 uniformly and alternately arranged on the front surface of the detection wave emitting disc 231 emit a plurality of detection waves (not marked in the figure) parallel to each other to the surface of the glass disc 24 attached with the bottom sheet 25 for flatness detection.
In a specific implementation scenario, when the detection mechanism 20 is in an operating state, the glass plate 24 disposed perpendicular to the base 21 is disposed opposite and parallel to the detection wave emission plate 231. The center connecting line of the glass plate 24 and the detection wave emitting plate 231 is also parallel to the plane (not labeled) of the base 21. At this time, the distance between the glass disk 24 and the detection wave emitting disk 231 is fixed and is a predetermined distance. A plurality of detection wave detection holes 2311 of the detection wave emitting disk 231 vertically emit a plurality of detection waves to the side of the glass disk 24 to which the base sheet 25 is attached, so that the flatness between the base sheet 25 and the glass disk 24 is judged by detecting the vertical distance between the plurality of detection wave detection holes 2311 and the base sheet 25.
Each of the detection wave detection holes 2311 is provided with a detection wave transmitter (not shown) and a detection wave receiver (not shown), and after the detection wave transmitter in the detection wave detection hole 2311 transmits a detection wave, the detection wave receiver in the detection wave detection hole 2311 receives the detection wave reflected by the glass plate 24. Thereby calculating the distance between the base sheet 25 and the detection wave emitting disk 231 from the time difference between the emission and reception of the detection waves.
A plurality of detection wave detection holes 2311 are uniformly spaced apart on the front surface of the detection wave emitting disk 231. Wherein the number of the plurality of detection wave detection holes 2311 is in the range of 24-48. When the number of the detection wave detection holes 2311 is within the range, not only can the overall detection of the negative plate 25 be realized, but also the number of the detection wave detection holes 2311 can be controlled, and the waste of productivity is reduced. The plurality of test wave detection apertures 2311 have a coverage area 235 in a range of 35 x 35 to 70 x 70 cm, wherein the coverage area 235 is set based on the area of the substrate 25. In actual construction, however, a larger footprint 235 enables a variety of negative 25 flatness tests. Preferably, the footprint 235 is in the range of 60 x 60-70 x 70 cm. The distance between the adjacent detection wave detection holes 2311 ranges from 3 cm to 10 cm, and when the distance is within the range, the detection result of the detection wave detection holes 2311 has certain overall reliability. The aperture of the detection wave detection hole 2311 itself is in the range of 4-6 mm.
When the range of the covered area 235 is larger than the area of the bottom plate 25, the detection of the plurality of detection wave detection holes 2311 does not need to be changed, when the detection wave emitted from a certain detection wave detection hole 2311 is not irradiated on the bottom plate 25, the detection wave detection hole 2311 continues to advance through the glass plate 24, the detection wave detection hole 2311 does not receive the returned detection wave, and the distance data cannot be obtained. Whereas the processor only processes the distance data.
The detection wave emitting disk 231 of the present embodiment is provided with 36 detection wave emitting holes 2311 in a front array and uniformly. The 36 detection wave emitting holes are arranged at intervals from each other, wherein the distance between each detection wave emitting hole 2311 and the other detection wave emitting holes 2311 on the upper, lower, left, right, and four sides thereof is the same. To achieve a completely uniform distribution of the 36 detection-wave emission apertures 2311.
Specifically, when the detection mechanism 20 of the present embodiment detects the flatness of the base sheet 25, the preset distance a between the glass plate 24 and the detection wave emitting plate 231 is acquired. The trigger control switch 232 turns on the detection wave emitting disc 231, controls the 36 detection wave emitting holes 2311 to emit detection waves to the 36 detection points on the bottom plate 25 (the detection points are positions on the bottom plate 25 where the detection waves are reflected), and receives the detection waves reflected by the bottom plate 25. 36 sets of distance data B of 36 detection points on the chassis 231 and the base plate 25 are obtained by calculating the time difference between the transmission and reception of the detection wave. And respectively subtracting the 36 groups of distance data B from the preset distance A to obtain distance difference values. When the difference between any one group of distance data B and the preset distance A exceeds the preset difference, determining that the flatness of the negative plate 25 is not qualified. At this time, the alarm lamp 234 blinks red light, and the buzzer 233 emits a warning sound to feed back the result of the detection that the negative film 25 is not qualified. When the difference between the 36 sets of distance data B and the preset distance a is smaller than the preset difference, the flatness of the negative plate 25 is determined to be qualified. At this time, the warning lamp 234 continuously emits green light, and the buzzer 233 is muted. In addition, the alarm lamp 234 continuously emits green light in the detection process of the detection mechanism 20, so that when the detection result is unqualified, the red light of the alarm lamp 234 flickers particularly obviously, and the reminding effect of the alarm lamp 234 is improved. Wherein the predetermined difference is 5 microns.
In other embodiments, the number of detection apertures 2311 will depend on the application, but the method and logic of detection of backsheet 25 is the same as in the present embodiment, and so on, as previously described.
The detection wave of this embodiment may be infrared or ultrasonic, and the distance between the detection wave emitting disc 231 and the film 25 is detected by using the characteristic that infrared or ultrasonic propagates along a straight line. Preferably, when infrared rays are used as the detection waves, the detection results are not easily interfered by the outside.
Through the detection mechanism, the glass disc and the detection wave transmitting disc are respectively fixed by the first fixing part and the second fixing part, and are oppositely arranged and fixed in distance. And the flatness detection is carried out on the distance between the detection wave transmitting disc and the negative film by utilizing a plurality of groups of detection waves so as to ensure the accuracy of the detection result. Meanwhile, the invention adopts the detection wave detection holes with the number ranging from 24 to 48 to detect the distance between the detection wave emitting disc and the negative film for multiple times, can comprehensively detect the flatness of the negative film stuck on the glass disc on the premise of ensuring the productivity utilization rate, and further improves the comprehensiveness and the accuracy of the flatness detection. Finally, the invention carries out double reminding on the detection result through the alarm lamp and the buzzer so as to further ensure the transmission effect of the detection result. By means of the mechanism, the invention improves the detection accuracy of the flatness of the negative film, reduces the phenomena of exposure refusal or exposure deficiency and the like in the exposure process of the negative film, reduces the phenomena of rework and capacity waste and further improves the production efficiency of the packaging substrate.
Referring to fig. 5, fig. 5 is a schematic structural diagram of an embodiment of a detection system according to the present invention. The detection wave in this embodiment is infrared, and in other embodiments, the detection wave may be other detection waves such as ultrasonic waves, which is not limited herein.
The detection system 30 of the present embodiment includes an infrared component 31, a processor 32, and an alarm component 33. Wherein the infrared component 31 is coupled to the processor 32, and the processor 32 is coupled to the alarm component 33. The infrared ray module 31 includes: an infrared ray generator 311, a control switch 312, and an infrared ray emitting disk 313. The alarm assembly 33 includes an alarm lamp 331 and a buzzer 332. The infrared generator 311 is coupled to a control switch 312, and the control switch 312 is coupled to an infrared-emitting pad 313. The infrared ray emitting disc 313 includes a plurality of infrared ray emitting holes 3131 for performing a plurality of flatness detections on the film to realize an overall detection. The infrared ray generator 311 serves to supply a large amount of infrared rays to the infrared ray emitting pad 313 to support infrared ray emission of the plurality of infrared ray emitting holes 3131. The control switch 312 is used to control the opening and closing of a plurality of infrared ray emitting holes 3131 on the infrared ray emitting pad 313 to further control the opening and closing of the sensing system 30.
After the infrared emitting holes 3131 are opened, multiple sets of distance data B are obtained and transmitted to the processor 32, and the processor 32 subtracts the multiple sets of distance data B from the preset distance a to obtain multiple sets of difference values. The processor 32 compares the plurality of sets of difference values with the preset difference value, when the difference value between any one set of distance data B and the preset distance a exceeds the preset difference value, the processor 32 determines that the detection result is unqualified, and transmits the detection result to the alarm component 33, and the alarm component 33 controls the alarm lamp 331 and the buzzer 332 to alarm. When the processor 32 determines that the difference between each set of distance data B and the preset distance a is smaller than the preset difference as a result of calculation, the processor 32 determines that the detection result is qualified and transmits the detection result to the alarm component 33, and the alarm component 33 controls the alarm lamp 331 and the buzzer 332 to not give an alarm. Wherein the predetermined difference is 5 microns.
In one particular embodiment, processor 32 may also be referred to as a CPU (Central Processing Unit). The processor 32 may be an integrated circuit chip having signal processing capabilities. The Processor 32 may also be a general purpose Processor, a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), a Field Programmable Gate Array (FPGA) or other Programmable logic device, discrete Gate or transistor logic, discrete hardware components. A general purpose processor may be a microprocessor or the processor may be any conventional processor or the like. In addition, the processor 32 may be commonly implemented by an integrated circuit chip.
Referring to fig. 6, fig. 6 is a schematic flowchart illustrating a detection method according to an embodiment of the invention.
S11: and acquiring a plurality of groups of distance data between the negative film pasted on the glass disc and the detection wave emission disc.
The multiple detecting wave emitting holes on the detecting wave emitting disc emit multiple detecting waves to the negative film and receive the reflected detecting waves to calculate the vertical distance between the emitting holes and the negative film. And multiple groups of distance data between the negative film pasted on the glass disc and the detection wave emission disc.
S12: and respectively subtracting the plurality of groups of distance data from the preset distance to obtain a plurality of groups of difference data.
And respectively subtracting the plurality of groups of distance data from the preset distance to obtain a plurality of groups of difference data. The preset distance is a fixed distance between the glass disc and the detection wave emission disc, and when the negative and the glass disc are not flatly attached, the local part of the negative is raised, so that the distance between the negative and the detection wave emission disc is smaller than the fixed distance between the glass disc and the detection wave emission disc. After the detection wave is reflected by the convex bottom plate, the time difference between the emission and the reception of the detection wave becomes small, so that the obtained distance data becomes small. Therefore, the inspection method of the present embodiment can determine the flatness of the negative film from the time difference between the emission and reception of the inspection wave.
S13: and judging whether the plurality of groups of difference data exceed a preset difference value.
And judging whether the multiple groups of difference data exceed a preset difference value, wherein the preset difference value is 5 microns.
S14: and when any group of difference data exceeds a preset difference, determining that the flatness of the negative film is unqualified.
And when any one group of difference data in the plurality of groups of difference data exceeds a preset difference, determining that the flatness of the negative film is unqualified.
And when all the difference data in the plurality of groups of difference data are less than or equal to the preset difference, determining that the flatness of the negative is qualified.
The multiple groups of difference data represent the flatness of multiple positions between the negative plate and the glass disc, and the quantity range of the multiple groups of difference data is 24-48, the difference data in the quantity range can effectively feed back the whole sticking condition between the negative plate and the glass disc, and can ensure that the quantity of detection wave emitting holes in the detection wave emitting disc is within the allowable range of productivity, cost and technical difficulty. The invention can reduce the cost expenditure for detecting the flatness of the negative film on the premise of ensuring the accuracy of the detection result.
The flatness of a plurality of positions on the negative film is determined by acquiring a plurality of groups of distance data between the negative film pasted on the glass disc and the detection wave transmitting disc and respectively judging whether the difference between the plurality of groups of distance data and the preset distance is less than or equal to the preset difference. The invention can comprehensively detect the flatness of the negative plate stuck on the glass plate, and improves the comprehensiveness and the accuracy of the flatness detection. And the phenomena of exposure refusing or exposure deficiency and the like in the exposure process of the negative film are reduced, so that the reliability of the packaging substrate is improved.
All possible combinations of the technical features of the above embodiments may not be described for the sake of brevity, but should be considered as within the scope of the present disclosure as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is specific and detailed, but not to be understood as limiting the scope of the invention. It should be noted that various changes and modifications can be made by those skilled in the art without departing from the spirit of the invention, and these changes and modifications are all within the scope of the invention. Therefore, the protection scope of the present patent should be subject to the appended claims.
Claims (10)
1. A detection mechanism for detecting flatness between a negative and a glass disc, the negative being attached to the glass disc, the detection mechanism comprising:
a base;
the fixing part is arranged on the base and comprises a first fixing part and a second fixing part, the first fixing part is used for vertically fixing the glass disc on the base, and the second fixing part is used for vertically fixing the detection wave emission disc on the base;
Detect the ripples subassembly, it includes to detect the ripples subassembly detect ripples emission disc, it is provided with a plurality of detection ripples inspection hole evenly and at the interval on the detection ripples emission disc, wherein, first fixed part with the second fixed part corresponds the setting, so that detect ripples emission disc with the glass dish sets up relatively.
2. The detection mechanism of claim 1,
when the glass disc is vertically fixed on the base through the first fixing part, the glass disc and the detection wave emission disc are parallel and arranged at intervals;
wherein, the distance between the glass disc and the detection wave transmitting disc is fixed.
3. The detection mechanism of claim 2,
the central connecting line of the glass disc and the detection wave transmitting disc is parallel to the plane of the base.
4. The detection mechanism of claim 1,
the distance range between the detection wave detection holes is 3-10 cm, and the number range of the detection wave detection holes is 24-48;
each detection wave detection hole is used for emitting a plurality of detection waves which are parallel to each other to the glass disc, and the plurality of detection waves return to the plurality of detection wave detection holes after being vertically reflected by the glass disc.
5. The detection mechanism of claim 1,
each detection wave detection hole is internally provided with a detection wave emitter and a detection wave receiver, the detection wave emitter is used for emitting detection waves to the glass disc, and the detection wave receiver is used for receiving the detection waves reflected by the glass disc.
6. The sensing mechanism of claim 1, wherein the sensor assembly further comprises: the alarm lamp, the buzzer and the control switch;
the control switch is coupled with the detection wave transmitting disc and is used for controlling the switch of the detection wave transmitting disc;
the alarm lamp with bee calling organ respectively with detect ripples emission dish communication connection for feed back detection mechanism's testing result.
7. The detection mechanism of claim 1,
the first fixing part is at least two grooves which are arranged on the same straight line and used for vertically fixing the bottom of the glass disc and enabling the glass disc and the detection wave emission disc to be opposite and parallel;
when the bottom of the glass plate is inserted into the groove, the inner wall of the groove and the bottom of the groove are attached to the glass plate.
8. A detection system, characterized in that the detection system comprises: the device comprises a detection wave component, a processor and an alarm component;
the detection wave component comprises a detection wave transmitting disc, and the detection wave transmitting disc is used for acquiring a plurality of groups of distance data between a negative plate pasted on the glass disc and the detection wave transmitting disc and sending the plurality of groups of distance data to the processor;
the processor is coupled with the detection wave component and used for receiving the multiple groups of distance data and respectively subtracting the multiple groups of distance data from preset distances to obtain multiple groups of difference data; comparing the multiple groups of difference data with preset differences to obtain a detection result;
the alarm component is coupled with the processor and used for alarming according to the detection result.
9. Detection system according to claim 8,
a plurality of detection wave detection holes are uniformly arranged on the detection wave transmitting disc at intervals.
10. A detection method implemented by a detection system according to claim 8 or 9, characterized in that it comprises:
acquiring a plurality of groups of distance data between a negative film pasted on a glass disc and a detection wave emission disc;
Respectively subtracting the plurality of groups of distance data from preset distances to obtain a plurality of groups of difference data;
judging whether the difference data exceeds a preset difference value or not;
and when any group of difference data exceeds the preset difference, determining that the flatness of the negative plate is unqualified.
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| CN202110036282.0A CN114754725A (en) | 2021-01-12 | 2021-01-12 | Detection mechanism, system and method |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105547199A (en) * | 2015-09-28 | 2016-05-04 | 宇龙计算机通信科技(深圳)有限公司 | Workpiece flatness detection method and device |
| CN105783794A (en) * | 2016-03-22 | 2016-07-20 | 阳谷祥光铜业有限公司 | Plane detection method and device |
| WO2017133176A1 (en) * | 2016-02-02 | 2017-08-10 | 意力(广州)电子科技有限公司 | Panel flatness tester based on distance sensing |
| CN107270859A (en) * | 2017-07-21 | 2017-10-20 | 福耀集团（上海）汽车玻璃有限公司 | Glass sphere detection means |
-
2021
- 2021-01-12 CN CN202110036282.0A patent/CN114754725A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105547199A (en) * | 2015-09-28 | 2016-05-04 | 宇龙计算机通信科技(深圳)有限公司 | Workpiece flatness detection method and device |
| WO2017133176A1 (en) * | 2016-02-02 | 2017-08-10 | 意力(广州)电子科技有限公司 | Panel flatness tester based on distance sensing |
| CN105783794A (en) * | 2016-03-22 | 2016-07-20 | 阳谷祥光铜业有限公司 | Plane detection method and device |
| CN107270859A (en) * | 2017-07-21 | 2017-10-20 | 福耀集团（上海）汽车玻璃有限公司 | Glass sphere detection means |
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