CN114749397B

CN114749397B - Pretreatment equipment for semiconductor packaging and use method

Info

Publication number: CN114749397B
Application number: CN202210666245.2A
Authority: CN
Inventors: 郑石磊; 郑振军
Original assignee: Jiangsu Herui Semiconductor Technology Co ltd
Current assignee: Jiangsu Herui Semiconductor Technology Co ltd
Priority date: 2022-06-14
Filing date: 2022-06-14
Publication date: 2022-09-02
Anticipated expiration: 2042-06-14
Also published as: CN114749397A

Abstract

The invention discloses semiconductor packaging pretreatment equipment in the technical field of semiconductor packaging pretreatment equipment, which comprises a belt conveying device, wherein the belt conveying device is in an intermittent start-stop type and is used for horizontally conveying a semiconductor packaging shell; the clamping and positioning device clamps the semiconductor packaging shell when the belt conveying device stops, and loosens the semiconductor packaging shell when the belt conveying device conveys the semiconductor packaging shell; the cleaning component is in reciprocating movement, and after the top surface of the semiconductor packaging shell clamped and positioned by the clamping and positioning device finishes one-time movement, the cleaning component cleans pollutants infected with the top surface of the semiconductor packaging shell and the side walls and the bottom surface of each groove at one time; the invention can completely clean the top and all inner walls of the packaging shell.

Description

Pretreatment equipment for semiconductor packaging and use method

Technical Field

The invention relates to the technical field of semiconductor packaging pretreatment equipment, in particular to pretreatment equipment for semiconductor packaging and a using method thereof.

Background

The semiconductor packaging refers to a process of processing a wafer passing a test according to a product model and a function requirement to obtain an independent chip, and the packaging process comprises the following steps: a wafer from a wafer previous process is cut into small chips (Die) through a scribing process, then the cut chips are pasted on small islands of corresponding substrate (Lead frame) frames through glue, and bonding pads (Bond pads) of the chips are connected to corresponding pins (leads) of the substrate through superfine metal (gold tin copper aluminum) wires or conductive resin to form a required circuit; and then packaging and protecting the independent wafer by using a plastic shell, carrying out a series of operations after plastic packaging, carrying out finished product testing after packaging, generally carrying out inspection (Incoming inspection), Test (Test) and packaging (packaging) and the like, and finally warehousing and shipping.

In the prior art, an injection molding method is usually adopted when a packaging plastic shell is manufactured, and grease is smeared on the surface of an injection mold to facilitate demolding of the plastic shell, so that stains such as grease and the like can be adhered to the side wall of the plastic shell, and the grease needs to be cleaned before the plastic shell is used for packaging, so that the grease is prevented from influencing the use of a chip; because the plastic casing internally mounted chip is the recess form with installation metal pin region, so can lead to the vertical lateral wall in the recess and the corner of recess to be convenient for clear up, and because being stained with the stickness of grease stronger, consequently need the manual work to carry out manual clearance to the grease basically, this kind of clearance mode is not only very troublesome, but also greatly increased staff's work load.

Based on the above, the invention designs a pretreatment device for semiconductor packaging and a use method thereof, so as to solve the problems.

Disclosure of Invention

The present invention is directed to a semiconductor package preprocessing apparatus and a method for using the same to solve the above problems.

In order to achieve the purpose, the invention provides the following technical scheme: a pretreatment apparatus for semiconductor packaging comprises

The belt conveying device is in an intermittent start-stop type and is used for horizontally conveying the semiconductor packaging shell;

the clamping and positioning device clamps the semiconductor packaging shell when the belt conveying device stops, and loosens the semiconductor packaging shell when the belt conveying device conveys the semiconductor packaging shell;

the cleaning assembly is in a reciprocating movement type, and after the top surface of the semiconductor packaging shell clamped and positioned by the clamping and positioning device is moved once, pollutants infected with the top surface of the semiconductor packaging shell and the side walls and the bottom surface of each groove are cleaned once.

As a further aspect of the invention, the cleaning assembly comprises

The cleaning parts are arranged in a linear array and comprise cleaning boxes, first bristles are densely distributed at the bottoms of the cleaning boxes, first side wall cleaning parts are arranged on the side walls of the cleaning boxes, second side wall cleaning parts are arranged in the cleaning boxes, the first side wall cleaning parts stir the first bristles on the side edges to tilt up to be in contact with and brush the left and right inner walls of the grooves of the semiconductor packaging shell when the cleaning boxes move, and the second side wall cleaning parts are in contact with and brush the front and rear vertical inner walls of the grooves of the packaging shell when the cleaning boxes move; the top fixedly connected with first slide bar of clearance case, the cover is equipped with the first pressure spring that drives clearance case downstream on the first slide bar, the side of first slide bar still is provided with the linear electric motor who is used for driving its upward movement.

The adsorption part is arranged on the right side of the cleaning part and is used for adsorbing pollutants treated by the cleaning part;

and the driving part is used for driving the cleaning part and the adsorption part to synchronously move in the left and right directions.

As a further aspect of the present invention, the driving part includes a first mounting bracket; the driving part comprises a first mounting frame; the first mounting frame is connected to the belt conveying device in a sliding manner; the first mounting bracket is connected with a first air cylinder, the first air cylinder is fixedly mounted on the belt conveying device, and the first air cylinder is used for driving the first mounting bracket to move left and right.

As a further aspect of the present invention, the first sidewall cleaning part includes two dial plates and a first driving group; the two shifting plates are arranged on the left side and the right side of the bottom of the cleaning box and are rotationally connected with the cleaning box; the first driving group is arranged between the first mounting frame and the cleaning box, and drives the poking plate to poke the first bristles at the edge of the bottom surface of the cleaning box to tilt and contact the left vertical inner wall and the right vertical inner wall of the groove of the packaging shell when the cleaning box moves in the vertical direction; and the shifting plates are provided with reset components for resetting the shifting plates.

As a further aspect of the present invention, the first driving set includes a first traction rope and a second traction rope; one end of the first traction rope is fixedly connected to the shifting plate close to the right side of the cleaning box, the other end of the first traction rope is fixedly connected with a first sliding block which is connected to the cleaning box in a sliding mode, the first sliding block is fixedly connected with a friction rod, the friction rod is connected to the first mounting frame in a sliding mode, an extrusion block is arranged on the side edge of the friction rod, the extrusion block is connected to the top of the first mounting frame in a sliding mode, and the extrusion block is used for extruding the friction rod to provide damping for limiting the friction rod to slide downwards; a first rack bar is fixedly connected to the side wall of the extrusion block; the side wall of the first rack rod is fixedly connected with an air spring for resetting the first rack rod; a first gear is meshed above the first rack rod and is rotatably connected to the top of the first mounting frame, a first one-way bearing is fixedly connected to a rotating shaft of the first gear, and a second gear is fixedly connected to the outer wall of the first one-way bearing; the second gear is engaged with a second rack bar, and the second rack bar is fixedly connected to the side wall of the first slide bar; one end of the second traction rope is fixedly connected to the shifting plate close to the left side of the cleaning box, the other end of the second traction rope is fixedly connected with a second sliding block, the second sliding block is connected with the cleaning box in a sliding mode, and the second sliding block is fixedly connected with a third rack rod; a third gear is meshed with the third rack rod, the third gear is rotatably connected to the left side wall of the cleaning box, a second one-way bearing is fixedly connected to a rotating shaft of the third gear, and a fourth gear is fixedly connected to the outer wall of the second one-way bearing; a fourth rack bar is meshed with the fourth gear; the fourth rack bar is fixedly connected to the first mounting bracket.

As a further aspect of the present invention, the second sidewall cleaning portion includes two mounting grooves and a second driving group; the two mounting grooves are formed in the cleaning box; cleaning plates are connected in the two mounting grooves in a sliding manner; second bristles are densely distributed on the outer wall of the cleaning plate; the second driving group is arranged in the mounting groove and drives the two cleaning plates to drive the second bristles to move out of the mounting groove and contact and scrub the front and rear vertical inner walls of the groove of the packaging shell when the cleaning box moves into the groove of the semiconductor packaging shell.

As a further scheme of the invention, the second driving group comprises two connecting rods and two return springs, the two connecting rods are respectively and rotatably connected to the inner walls of the two cleaning plates, the bottom ends of the two connecting rods are jointly and rotatably connected with a third sliding block, the third sliding block is slidably connected to the vertical direction of the inner wall of the cleaning box, and an ejector rod is arranged above the third sliding block and fixedly connected to the bottom of the first mounting frame; and the two return springs are respectively used for returning the two cleaning plates.

As a further scheme of the invention, the adsorption part comprises a second mounting frame, the second mounting frame is fixedly connected to the first mounting frame, the top of the second mounting frame is slidably connected with a plurality of second slide bars distributed in a linear array, and the number of the second slide bars is the same as that of the first slide bars; the bottom of the second sliding rod is fixedly connected with a sponge brush, a second pressure spring used for pushing the sponge brush to move downwards is sleeved on the second sliding rod, and a linear motor used for driving the second sliding rod to move upwards is also arranged on the side edge of the second sliding rod.

As a further scheme of the invention, the clamping and positioning device comprises two second air cylinders which are respectively arranged on two sides of the top surface of the belt conveying device, and the two second air cylinders are electrically connected with a PLC control device together.

A method for using a pretreatment device for semiconductor packaging comprises the following steps:

the method comprises the following steps: arranging technicians to perform data configuration and troubleshooting on semiconductor packaging preprocessing equipment required by a workshop;

step two: after completing data configuration and troubleshooting on semiconductor packaging preprocessing equipment, arranging a worker to lightly place a semiconductor packaging shell to be processed on a belt conveying device, and conveying the packaging shell to the right by the belt conveying device;

step three: after the packaging shell moves to the position below the cleaning component, the clamping and positioning device can automatically clamp the packaging shell;

step four: the cleaning component starts to work, and can clean pollutants stained on the top of the packaging shell and all side walls in the groove;

step five: after the semiconductor packaging shell is cleaned, the belt conveying device conveys the cleaned semiconductor packaging shell to a collecting station, and then another worker can collect the cleaned semiconductor packaging shell.

Compared with the prior art, the invention has the beneficial effects that:

1. according to the invention, through the arrangement of the cleaning component, the top of the packaging shell and all side walls in the groove can be cleaned, stains such as grease and the like can be prevented from remaining on the mounting surface of the packaging shell, workers are not required to participate in the whole cleaning process basically, the automatic cleaning of the grease stuck on the packaging shell can be realized, the workload of the workers can be greatly reduced, the cleaning of the grease on the packaging shell can be simpler and easier, and the production efficiency of the packaging shell can be greatly accelerated.

2. According to the invention, through the arrangement of the plurality of cleaning boxes, the cleaning boxes can be suitable for cleaning the grooves of the packaging shells with different widths only by setting the width of the groove on the packaging shell to be n times of that of the cleaning boxes, so that the applicability of the invention is stronger.

3. According to the invention, through the arrangement of the shifting plate and the first driving group, the side edges of the first bristles tilt to clean the left side wall and the right side wall of the groove when the bottom of the groove is not required to be cleaned, and the first bristles immediately return to the vertical position when the bottom of the groove is required to be cleaned; can guarantee not to set up the brush hair on the lateral wall about the clearance case, also can clear up the lateral wall about the recess, can make subsequent second lateral wall clearance portion possess bigger installation space, can make second lateral wall clearance portion carry out work better, can make all lateral walls homoenergetic of recess clear up completely.

4. According to the invention, through the arrangement of the first driving group, when the packaging shell is provided with the multi-stage grooves, the first driving group can still drive the shifting plate to shift the first bristles to clean the left inner wall and the right inner wall of each groove, so that the left inner wall and the right inner wall of each groove can be cleaned.

Drawings

FIG. 1 is a flow chart of the method of the present invention;

FIG. 2 is a schematic diagram of the overall structure of the present invention;

FIG. 3 is a schematic view of a cleaning assembly of the present invention;

FIG. 4 is a schematic sectional view showing the connection relationship and the position relationship of the cleaning box, the first sidewall cleaning part, the first mounting bracket, the second mounting bracket and the sponge brush;

FIG. 5 is an enlarged view of a portion A of FIG. 4;

FIG. 6 is a bottom view of the condition of FIG. 4;

FIG. 7 is an enlarged view of a portion of FIG. 6 at B;

FIG. 8 is a schematic view showing the connection and position relationship of the cleaning box, the first brush, the shifting plate, the first pulling rope and the first sliding block;

FIG. 9 is a schematic view of a second sidewall cleaning portion according to the present invention.

In the drawings, the components represented by the respective reference numerals are listed below:

the belt conveyor device comprises a belt conveyor device 1, an air cylinder 2, a second pressure spring 3, a cleaning box 401, first bristles 402, a first mounting frame 501, a first sliding rod 403, a first pressure spring 404, an air cylinder 502, a poking plate 601, a first traction rope 701, a second traction rope 702, a first sliding block 703, a friction rod 704, an extrusion block 705, a first rack rod 706, an air spring 707, a first gear 708, a first one-way bearing 709, a second gear 710, a second rack rod 711, a second sliding block 712, a third rack rod 713, a third gear 714, a second one-way bearing 715, a fourth gear 716, a fourth rack rod 717, a mounting groove 801, a cleaning plate 802, second bristles 803, a connecting rod 901, a return spring 902, a third sliding block 903, a push rod 904, a second sliding rod 10, a second sliding rod 11 and a sponge brush 12.

Detailed Description

Referring to fig. 1-9, the present invention provides a technical solution: a semiconductor package pretreatment apparatus includes

The belt conveying device 1 is of an intermittent start-stop type and is used for horizontally conveying the semiconductor packaging shell;

the clamping and positioning device clamps the semiconductor packaging shell when the belt conveying device 1 stops, and loosens the semiconductor packaging shell when the belt conveying device 1 conveys the semiconductor packaging shell;

When the device is put into practical application based on the scheme, the package shell which is formed by injection molding and cooled is placed on the belt conveying device 1, the belt conveying device 1 drives the package shell to move rightwards, when the package shell moves rightwards to a station before a cleaning station, cleaning agents are sprayed on the package shell and are attached to the top wall of the package shell and all the inner walls of the groove, the cleaning assembly can be started to work after the package shell moves to the cleaning station, the cleaning assembly moves from right to left, grease on the top wall of the package shell is firstly cleaned by the cleaning assembly, when the cleaning assembly moves to the upper portion of the groove of the package shell, the cleaning assembly automatically moves downwards and extends into the groove, the cleaning assembly can wash the right vertical side wall of the groove in the downward moving process, and when the cleaning assembly moves to the bottom of the groove, the cleaning assembly finishes cleaning the right vertical side wall of the groove, after the cleaning assembly continues to move leftwards, the cleaning assembly can wash the bottom, the front inner wall and the rear inner wall of the groove, when the cleaning assembly moves to be in contact with the left side wall of the groove, the cleaning assembly can automatically move upwards, the cleaning assembly can wash the left side inner wall of the groove while moving upwards, at the moment, the cleaning assembly can completely wash all the inner walls of the groove, then the cleaning assembly can move leftwards until the top of the packaging shell is completely cleaned, then the cleaning assembly can automatically move to the initial position, the cleaning process is repeated again until grease stuck on the packaging shell is completely cleaned by the cleaning assembly, then the belt conveying device 1 can drive the cleaned packaging shell to move rightwards to the collecting station for collecting, meanwhile, the belt conveying device 1 can drive the next packaging shell to move to the cleaning station, and then the cleaning assembly can clean the packaging shell again, the invention can realize the cleaning of the top of the packaging shell and all side walls in the groove, can ensure that grease cannot remain on the mounting surface of the packaging shell, basically does not need staff to participate in the whole cleaning process, can realize the automatic cleaning of the grease stuck on the packaging shell, not only can greatly reduce the workload of the staff, but also can ensure that the cleaning of the grease on the packaging shell becomes simpler and easier, and can greatly accelerate the production efficiency of the packaging shell.

Referring to FIGS. 2-9, as a further aspect of the present invention, the cleaning assembly includes

The cleaning parts are arranged in a linear array and comprise a cleaning box 401, first bristles 402 are densely distributed at the bottom of the cleaning box 401, a first side wall cleaning part is arranged on the side wall of the cleaning box 401, a second side wall cleaning part is arranged inside the cleaning box 401, the first side wall cleaning part stirs the first side bristles 402 to tilt up to contact and brush the left and right inner walls of the groove of the semiconductor packaging shell when the cleaning box 401 moves, and the second side wall cleaning part contacts and brushes the front and rear vertical inner walls of the groove of the packaging shell when the cleaning box 401 moves; the top of the cleaning box 401 is fixedly connected with a first sliding rod 403, the first sliding rod 403 is sleeved with a first pressure spring 404 for driving the cleaning box 401 to move downwards, and a linear motor for driving the first sliding rod 403 to move upwards is further arranged on the side of the first sliding rod 403.

When the cleaning assembly is actually applied, it should be noted that the width of the cleaning box 401 is set to be the width of the groove on the package housing within a reasonable error range (n is a positive integer); when the packaging shell moves to the lower part of the cleaning part, the packaging shell stops moving, then the linear motor on the side of the first slide bar 403 cancels the fixation of the first slide bar 403, then the cleaning box 401 moves downwards under the action of the elastic force of the first pressure spring 404, so that the cleaning box 401 drives the first bristles 402 to move to the position contacting with the top surface of the packaging shell, then the driving part is started to work, the driving part drives all the cleaning box 401 and the first bristles 402 to move leftwards together, the first bristles 402 can scrub the top of the packaging shell, so that the grease on the top of the packaging shell is separated from the adhesion with the packaging shell, the driving part drives the cleaning box 401 to move leftwards together with the adsorption part, the adsorption part can carry out delayed synchronous movement according to the movement track of the cleaning part, the adsorption part can adsorb the grease separated from the adhesion with the packaging shell and the cleaning agent sprayed on the side wall of the packaging shell together, when the cleaning box 401 and the first bristles 402 on the right side of the groove move to the upper part of the groove, the driving part can drive the cleaning box 401 and the first bristles 402 on the right side of the groove to move downwards (at this time, n cleaning boxes 401 can just fill the groove within an error range), when the cleaning box 401 and the first bristles 402 move downwards, the first side wall cleaning part can stir the first side bristles 402 to tilt up to contact and clean the inner wall on the right side of the groove of the semiconductor package shell, then when the cleaning box 401 continues to move downwards, the tilted first bristles 402 can be driven to clean the vertical inner wall on the right side of the groove, after the cleaning box 401 drives the first bristles 402 to move downwards to contact with the inner wall on the bottom of the groove, the first bristles 402 at the edge position on the right side can automatically tilt downwards to the initial position, when the cleaning box 401 moves downwards to the groove, the second side wall cleaning part in the cleaning box 401 can extend out to the position contacting with the front and rear vertical inner walls of the groove, then when the cleaning box 401 continues to move leftwards, the first bristles 402 and the second side wall cleaning part respectively clean the bottom and the front and rear vertical side walls of the groove; when the cleaning box 401 moves leftwards to be in contact with the vertical inner wall of the left side of the groove, the linear motor can drive the cleaning box 401 and the first bristles 402 to move upwards out of the groove through the first sliding rod 403, and when the cleaning box 401 moves upwards, the first side wall cleaning part can stir the first bristles 402 positioned at the edge position of the left side to tilt leftwards to a position in contact with the vertical side wall of the left side of the groove; when the cleaning box 401 drives the first bristles 402 to move upwards, the tilted first bristles 402 can clean the left vertical side wall of the groove; meanwhile, after the first bristles 402 sweep the grease, the adsorption part can adsorb the grease and the cleaning agent, so that the mounting surface of the cleaned packaging shell is completely kept clean, the packaging shell does not need to be cleaned subsequently, the grease on the packaging shell can be cleaned more simply and easily, and the production efficiency of the packaging shell can be greatly improved; then the cleaning box 401 can be driven by the driving part to move leftwards again, when the packaging shell is cleaned completely by the cleaning box 401 and the first bristles 402, the linear motor drives the cleaning box 401 and the first bristles 402 to move upwards to form initial positions, and then the driving part is started to drive the cleaning part and the adsorption part to return to the initial positions; adopt first pressure spring 404 to replace linear electric motor to drive clearance case 401 downstream in this scheme, can make clearance case 401 remove and can make the reaction move down immediately directly over the recess after, can make clearance case 401 quick downstream under the effect of elasticity simultaneously, can make clearance case 401 can clear up the right side inner wall of recess better when moving down, can avoid linear electric motor to have and postpone and the recess right side inner wall that leads to can not be very well by the problem emergence of clearance.

Referring to fig. 2-3, as a further aspect of the present invention, the driving part includes a first mounting frame; the driving part comprises a first mounting frame 501; the first mounting rack 501 is connected to the belt conveyor 1 in a sliding manner; the first mounting rack 501 is connected with a first air cylinder 502, the first air cylinder 502 is fixedly mounted on the belt conveyor 1, and the first air cylinder 502 is used for driving the first mounting rack 501 to move left and right.

When the driving part is actually applied, after the packaging shell is driven by the belt conveying device 1 to move to the position below the cleaning box 401, the first air cylinder 502 can drive the first mounting frame 501 and the cleaning box 401 to move leftwards together, and after the top of the packaging shell and all side walls in the groove are cleaned, the first air cylinder 502 is started to drive the first mounting frame and the cleaning box 401 to return to the right initial position; when the packaging shell needs to be cleaned for the second time, the actions are repeated.

Referring to fig. 4-8, as a further aspect of the present invention, the first sidewall cleaning portion includes two dialing plates 601 and a first driving set; the two shifting plates 601 are arranged on the left side and the right side of the bottom of the cleaning box 401, and the two shifting plates 601 are rotatably connected with the cleaning box 401; the first driving group is arranged between the first mounting frame 501 and the cleaning box 401, and drives the poking plate 601 to poke the first bristles 402 at the edge of the bottom surface of the cleaning box 401 to tilt and contact the left vertical inner wall and the right vertical inner wall of the groove of the packaging shell when the cleaning box 401 moves in the vertical direction; the shifting plates 601 are all provided with reset components for resetting the shifting plates.

When the first side wall cleaning part works actually, after the cleaning box 401 moves leftwards to a position right above the groove, the cleaning box 401 moves downwards, and the cleaning box 401 moves downwards and drives the right shifting plate 601 to tilt rightwards through the first driving group; the right shifting plate 601 can shift the first bristles 402 positioned on the right side to the right, so that the first bristles 402 tilt to the right to be in contact with the inner wall of the right side of the groove, and then when the first bristles 402 move downwards, the tilted first bristles 402 can wash the inner wall of the right side of the groove, so that grease on the inner wall of the right side of the groove is separated from the adhesion with the inner wall of the groove; when the cleaning box 401 and the first bristles 402 move leftwards to contact with the inner wall of the left side of the groove and then start to move upwards, the first driving group drives the shifting plate 601 on the left side to tilt leftwards; the left shifting plate 601 can shift the first bristles 402 positioned on the left side of the left shifting plate leftwards, so that the first bristles 402 tilt leftwards to a position where the first bristles are in contact with the inner wall of the left side of the groove, then when the first bristles 402 move upwards, the tilted first bristles 402 can wash the inner wall of the left side of the groove, grease on the inner wall of the left side of the groove is separated from adhesion with the inner wall of the groove, the grease can be adsorbed by the adsorption part, the grease on all inner walls of the groove is completely cleaned by the first bristles and the adsorption part, grease residue on the inner wall of the groove in the packaging shell can be guaranteed, and meanwhile through the arrangement of the shifting plate 601 and the first driving group, the first bristles 402 can be rotated to clean the left side wall and the right side wall of the groove when the bottom of the groove is not required to be cleaned, and can immediately return to the vertical position when the bottom of the groove is required to be cleaned; can guarantee not to set up the brush hair on the lateral wall about cleaning box 401, also can clear up the lateral wall about the recess, can make subsequent second lateral wall clearance portion possess bigger installation space, can make second lateral wall clearance portion carry out work better, can make all lateral walls homoenergetic of recess clear up completely.

Referring to fig. 4-8, as a further aspect of the present invention, the first driving set includes a first traction rope 701 and a second traction rope 702; one end of the first traction rope 701 is fixedly connected to a shifting plate 601 close to the right side of the cleaning box 401, the other end of the first traction rope 701 is fixedly connected with a first sliding block 703 connected to the cleaning box 401 in a sliding mode, the first sliding block 703 is fixedly connected with a friction rod 704, the friction rod 704 is connected to the first mounting frame 501 in a sliding mode, an extrusion block 705 is arranged on the side edge of the friction rod 704, the extrusion block 705 is connected to the top of the first mounting frame 501 in a sliding mode, and the extrusion block 705 is used for extruding the friction rod 704 to provide damping for limiting the friction rod 704 to slide downwards; a first rack bar 706 is fixedly connected to the side wall of the extrusion block 705; a gas spring 707 for resetting the first rack bar 706 is fixedly connected to the side wall of the first rack bar 706; a first gear 708 is engaged above the first rack bar 706, the first gear 708 is rotatably connected to the top of the first mounting rack 501, a first one-way bearing 709 is fixedly connected to a rotating shaft of the first gear 708, and a second gear 710 is fixedly connected to the outer wall of the first one-way bearing 709; the second gear 710 is engaged with a second rack bar 711, and the second rack bar 711 is fixedly connected to the side wall of the first sliding rod 403; one end of the second traction rope 702 is fixedly connected to the shifting plate 601 close to the left side of the cleaning box 401, the other end of the second traction rope 702 is fixedly connected with a second sliding block 712, the second sliding block 712 is in sliding connection with the cleaning box 401, and the second sliding block 712 is fixedly connected with a third rack bar 713; the third rack bar 713 is engaged with a third gear 714, the third gear 714 is rotatably connected to the left side wall of the cleaning box 401, a second one-way bearing 715 is fixedly connected to a rotating shaft of the third gear 714, and a fourth gear 716 is fixedly connected to the outer wall of the second one-way bearing 715; the fourth gear 716 is engaged with a fourth rack bar 717; the fourth rack bar 717 is fixedly coupled to the first mounting bracket 501.

When the first driving group works actually, when the cleaning box 401 needs to be moved into the groove, the cleaning box 401 falls downward, the cleaning box 401 drives the first sliding rod 403 and the second rack rod 711 to move downward synchronously, the second rack rod 711 moves downward and drives the second gear 710 to rotate, the second gear 710 rotates and drives the first gear 708 to rotate through the first one-way bearing 709, the first gear 708 drives the first rack rod 706 engaged with the first gear 708 to move forward, and the first rack rod 706 drives the extrusion block 705 to move forward synchronously, so that the extrusion block 705 compresses the friction rod 704; then, until the cleaning box 401 moves to the bottom of the groove, the first gear 708 can limit the first rack bar 706, so that the extrusion block 705 presses the friction bar 704 all the time, the friction bar 704 cannot move downward under the action of friction force, and the friction bar 704 drives the first slider 703 to be stationary together, so that in the downward movement process of the cleaning box 401, the first slider 703 can move upward relative to the cleaning box 401, the first slider 703 can drive one end of the first traction rope 701 to move together, the other end of the first traction rope 701 can drive the shifting plate 601 connected with the first traction rope 701 to rotate, and the shifting plate can drive the first bristles 402 to rotate together; when the cleaning box 401 needs to be moved out of the groove, the cleaning box 401 moves upwards, the cleaning box 401 drives the third rack bar 713, the third gear 714, the second one-way bearing 715 and the fourth gear 716 to move upwards together, the fourth rack bar 717 drives the fourth gear 716 engaged with the fourth rack bar to rotate, 716 drives the third gear 714 to rotate in the same direction through the second one-way bearing 715, the third gear 714 drives the third rack bar 713 engaged with the third rack bar to slide upwards on the left side wall of the cleaning box 401, the third rack bar 713 drives the second slider 712 to move upwards together, the second slider 712 drives one end of the second traction rope 702 to move upwards together, the other end of the second traction rope 702 drives the plate 601 connected with the second traction rope to rotate, and the plate-poking plate drives the first bristles 402 to rotate together; through the setting of above first drive group, can be when meeting with multistage recess, above-mentioned first drive group still can drive dials the board and stirs the inner wall about every recess of first brush hair 402 clearance to this clearance to the inside wall about the recess is realized.

Referring to fig. 6 and 9, as a further scheme of the present invention, the second sidewall cleaning portion includes two mounting grooves 801 and a second driving set; the two mounting grooves 801 are formed in the cleaning box 401; cleaning plates 802 are connected in the two mounting grooves 801 in a sliding manner; the outer wall of the cleaning plate 802 is densely provided with second bristles 803; the second driving group is arranged in the mounting groove 801, and drives the two cleaning plates 802 to drive the second bristles 803 to move out of the mounting groove 801 and contact and brush the front and rear vertical inner walls of the groove of the packaging shell when the cleaning box 401 moves into the groove of the semiconductor packaging shell.

Above-mentioned second lateral wall clearance portion is in the during operation, when clearance case 401 moves down, second drive group can automatic triggering, second drive group can drive two clearance boards 802 and remove mutually, make clearance board 802 drive second brush hair 803 and move the position that makes second brush hair 803 and clearance case 401's front and back lateral wall parallel and level, then clearance case 401 is when moving left, second brush hair 803 can scrub the front and back inside wall of recess, can make all lateral walls homoenergetic of recess clear up completely.

As a further scheme of the invention, the second driving set comprises two connecting rods 901 and two return springs 902, the two connecting rods 901 are respectively rotatably connected to the inner walls of the two cleaning plates 802, the bottom ends of the two connecting rods 901 are jointly rotatably connected with a third slider 903, the third slider 903 is slidably connected to the vertical direction of the inner wall of the cleaning box 401, a top rod 904 is arranged above the third slider 903, and the top rod 904 is fixedly connected to the bottom of the first mounting frame 501; the two return springs 902 are respectively used for returning the two cleaning plates 802.

When the second driving group works actually, when the cleaning box 401 starts to move downwards, the top rod 904 can be slowly separated from the third sliding block 903, the pressure of the top rod 904 is lost, the two return springs 902 can drive the two cleaning plates 802 and the second bristles 803 to move outwards together, and the second bristles 803 extend out; when cleaning box 401 upwards moves to make third slider and kicking block contact the back, ejector pin 904 can drive third slider 903 downstream, third slider 903 can drive clearance board 802 and second brush hair 803 through connecting rod 901 and get back to in mounting groove 801, can make second brush hair 803 can be protected by the mounting groove when not using, can greatly increased second brush hair 803's life, first brush hair can not hinder cleaning box 401 downstream at the in-process that outwards moves simultaneously, can make the inner wall of the better laminating recess of cleaning box 401, can guarantee that the recess can be cleared up completely.

Referring to fig. 2-4, as a further aspect of the present invention, the suction portion includes a second mounting frame 10, the second mounting frame 10 is fixedly connected to the first mounting frame 501, a plurality of second sliding bars 11 are slidably connected to the top of the second mounting frame 10, and the number of the second sliding bars 11 is the same as that of the first sliding bars 403; the bottom of the second sliding rod 11 is fixedly connected with a sponge brush 12, the second sliding rod 11 is sleeved with a second pressure spring 3 used for pushing the sponge brush 12 to move downwards, and the side edge of the second sliding rod 11 is also provided with a linear motor used for driving the second sliding rod 11 to move upwards.

Above-mentioned absorption portion is when the in-service use, first mounting bracket 501 can drive second mounting bracket 10 and remove left together when removing left, first mounting bracket 501 and second mounting bracket 10 synchronous motion can drive cleaning box 401 and sponge brush 12 synchronous motion, sponge brush 12 can remove along cleaning box 401's removal orbit, sponge brush 12 can adsorb grease and cleaner after first brush hair 402 and second brush hair 803 are washhed, can guarantee that grease on the encapsulation shell lateral wall also can be cleared up in step when being scraped, can guarantee encapsulation shell's cleanliness nature, can guarantee that follow-up need not clear up encapsulation shell again.

As a further scheme of the invention, the clamping and positioning device comprises two second air cylinders 2, the two second air cylinders 2 are respectively arranged on two sides of the top surface of the belt conveying device 1, and the two second air cylinders 2 are electrically connected with a PLC control device together; according to the invention, through the arrangement of the clamping and positioning device, the packaging shell can be clamped by the clamping and positioning device after moving to the lower part of the cleaning box 401, so that the packaging shell can be better and stably cleaned.

step two: after completing data configuration and troubleshooting on semiconductor packaging preprocessing equipment, arranging a worker to slightly place a semiconductor packaging shell to be processed on the belt conveying device 1, and conveying the packaging shell to the right direction by the belt conveying device 1;

step three: after the packaging shell moves below the cleaning component, the clamping and positioning device can automatically clamp the packaging shell;

step five: after the semiconductor packaging shell is cleaned, the belt conveying device 1 conveys the cleaned semiconductor packaging shell to a collecting station, and then another worker can collect the cleaned semiconductor packaging shell.

Claims

1. A pretreatment apparatus for semiconductor packaging, comprising

The belt conveying device (1) is of an intermittent start-stop type and is used for horizontally conveying the semiconductor packaging shell;

the clamping and positioning device clamps the semiconductor packaging shell when the belt conveying device (1) stops, and releases the semiconductor packaging shell when the belt conveying device (1) conveys the semiconductor packaging shell;

the cleaning component is in reciprocating movement, and after the top surface of the semiconductor packaging shell clamped and positioned by the clamping and positioning device finishes one-time movement, the cleaning component cleans pollutants infected with the top surface of the semiconductor packaging shell and the side walls and the bottom surface of each groove at one time;

the cleaning component comprises

The cleaning parts are arranged in a linear array and comprise cleaning boxes (401), first bristles (402) are densely distributed at the bottoms of the cleaning boxes (401), first side wall cleaning parts are arranged on the side walls of the cleaning boxes (401), second side wall cleaning parts are arranged inside the cleaning boxes (401), the first side wall cleaning parts stir the first side bristles (402) to tilt up to be in contact with the left and right inner walls of the grooves of the semiconductor packaging shell when the cleaning boxes (401) move, and the second side wall cleaning parts are in contact with the front and rear vertical inner walls of the grooves of the semiconductor packaging shell when the cleaning boxes (401) move; the top of the cleaning box (401) is fixedly connected with a first sliding rod (403), a first pressure spring (404) for driving the cleaning box (401) to move downwards is sleeved on the first sliding rod (403), and a linear motor for driving the first sliding rod (403) to move upwards is further arranged on the side edge of the first sliding rod (403);

2. The pretreatment apparatus for semiconductor packaging according to claim 1, wherein: the driving part comprises a first mounting frame (501), the first mounting frame (501) is connected to the belt conveying device (1) in a sliding mode, the first mounting frame (501) is connected with a first air cylinder (502), the first air cylinder (502) is fixedly mounted on the belt conveying device (1), and the first air cylinder (502) is used for driving the first mounting frame (501) to move left and right.

3. The pretreatment apparatus for semiconductor packaging according to claim 2, wherein: the first side wall cleaning part comprises two shifting plates (601) and a first driving group; the two shifting plates (601) are arranged on the left side and the right side of the bottom of the cleaning box (401), and the two shifting plates (601) are rotatably connected with the cleaning box (401); the first driving group is arranged between the first mounting frame (501) and the cleaning box (401), and drives the poking plate (601) to poke the first bristles (402) at the edge of the bottom surface of the cleaning box (401) to tilt and contact the left vertical inner wall and the right vertical inner wall of the groove of the packaging shell when the cleaning box (401) moves in the vertical direction; the shifting plate (601) is provided with a reset assembly for resetting the shifting plate.

4. The pretreatment apparatus for semiconductor packaging according to claim 3, wherein: the first drive group comprises a first traction rope (701) and a second traction rope (702); one end of the first traction rope (701) is fixedly connected to a shifting plate (601) close to the right side of the cleaning box (401), the other end of the first traction rope (701) is fixedly connected with a first sliding block (703) in sliding connection with the cleaning box (401), the first sliding block (703) is fixedly connected with a friction rod (704), the friction rod (704) is in sliding connection with the first mounting frame (501), an extrusion block (705) is arranged on the side edge of the friction rod (704), the extrusion block (705) is in sliding connection with the top of the first mounting frame (501), and the extrusion block (705) is used for extruding the friction rod (704) to provide damping for limiting the friction rod (704) to slide downwards; a first rack bar (706) is fixedly connected to the side wall of the extrusion block (705); a gas spring (707) for resetting the first rack rod (706) is fixedly connected to the side wall of the first rack rod (706); a first gear (708) is meshed above the first rack rod (706), the first gear (708) is rotatably connected to the top of the first mounting frame (501), a first one-way bearing (709) is fixedly connected to a rotating shaft of the first gear (708), and a second gear (710) is fixedly connected to the outer wall of the first one-way bearing (709); the second gear (710) is engaged with a second rack bar (711), and the second rack bar (711) is fixedly connected to the side wall of the first sliding rod (403); one end of the second traction rope (702) is fixedly connected to the shifting plate (601) close to the left side of the cleaning box (401), the other end of the second traction rope (702) is fixedly connected with a second sliding block (712), the second sliding block (712) is in sliding connection with the cleaning box (401), and the second sliding block (712) is fixedly connected with a third rack rod (713); the third rack rod (713) is meshed with a third gear (714), the third gear (714) is rotatably connected to the left side wall of the cleaning box (401), a second one-way bearing (715) is fixedly connected to a rotating shaft of the third gear (714), and a fourth gear (716) is fixedly connected to the outer wall of the second one-way bearing (715); a fourth rack bar (717) is engaged with the fourth gear (716); the fourth rack bar (717) is fixedly connected to the first mounting frame (501).

5. The pretreatment apparatus for semiconductor packaging according to claim 4, wherein: the second side wall cleaning part comprises two mounting grooves (801) and a second driving group; the two mounting grooves (801) are arranged on the cleaning box (401); cleaning plates (802) are connected in the two mounting grooves (801) in a sliding manner; second bristles (803) are densely distributed on the outer wall of the cleaning plate (802); the second driving group is arranged in the mounting groove (801), and drives the two cleaning plates (802) to drive the second bristles (803) to move out of the mounting groove (801) and contact and scrub the front and rear vertical inner walls of the groove of the packaging shell when the cleaning box (401) moves into the groove of the semiconductor packaging shell.

6. The pretreatment apparatus for semiconductor packaging according to claim 5, wherein: the second driving group comprises two connecting rods (901) and two return springs (902), the two connecting rods (901) are respectively connected to the inner walls of the two cleaning plates (802) in a rotating mode, the bottom ends of the two connecting rods (901) are jointly connected with a third sliding block (903) in a rotating mode, the third sliding block (903) is connected to the inner wall of the cleaning box (401) in a sliding mode in the vertical direction, an ejector rod (904) is arranged above the third sliding block (903), and the ejector rod (904) is fixedly connected to the bottom of the first mounting frame (501); the two return springs (902) are respectively used for returning the two cleaning plates (802).

7. The pretreatment apparatus for semiconductor packaging according to claim 6, wherein: the adsorption part comprises a second mounting frame (10), the second mounting frame (10) is fixedly connected to the first mounting frame (501), the top of the second mounting frame (10) is connected with a plurality of second slide bars (11) which are distributed in a linear array in a sliding mode, and the number of the second slide bars (11) is the same as that of the first slide bars (403); the bottom of the second sliding rod (11) is fixedly connected with a sponge brush (12), the second sliding rod (11) is sleeved with a second pressure spring (3) used for pushing the sponge brush (12) to move downwards, and a linear motor used for driving the second sliding rod (11) to move upwards is also arranged on the side edge of the second sliding rod (11).

8. The pretreatment apparatus for semiconductor packaging according to claim 1, wherein: the clamping and positioning device comprises two second cylinders (2), the two second cylinders (2) are respectively arranged on two sides of the top surface of the belt conveying device (1), and the two second cylinders (2) are electrically connected with the PLC control device together.

9. A method for using a semiconductor package pretreatment apparatus, which is applied to the semiconductor package pretreatment apparatus of claim 7, the method comprising the steps of:

step two: after completing data configuration and troubleshooting on semiconductor packaging preprocessing equipment, arranging a worker to slightly place a semiconductor packaging shell to be processed on a belt conveying device (1), and conveying the packaging shell to the right direction by the belt conveying device (1);

step four: the cleaning component starts to work, and can clean pollutants on the top of the packaging shell and all side walls in the groove;

step five: after the semiconductor packaging shell is cleaned, the belt conveying device (1) conveys the cleaned semiconductor packaging shell to a collecting station, and then another worker can collect the cleaned semiconductor packaging shell.