CN114744408A - Optical machine structural type millimeter wave reflected beam controllable super surface - Google Patents
Optical machine structural type millimeter wave reflected beam controllable super surface Download PDFInfo
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Abstract
本发明公开一种光机结构式毫米波反射波束可控超表面,应用于波束扫描反射阵天线、焦距可调平面器件领域。针对现有光机可控超表面普遍单元尺寸一致,不能独立操控超表面中每个单元的电磁响应特性的问题,即对电磁波的操控灵活度有限。本发明的光机结构式毫米波反射波束可控超表面在不同功率大小的电磁波激励下,超表面单元子阵列中每个单元的非线性响应特性不同,通过对每个单元悬梁臂、空气间隙进行统一设计,并对每个单元的电容器横轴进行独立设计,进而实时动态操控超表面中每个单元的电磁响应,实现更加灵活的可重构功能。本发明为可调谐、可重构超表面实时动态调控提供了一种新思路,补充了国内外基于光‑机械耦合机理的可控超表面技术研究。
The invention discloses an opto-mechanical structure type millimeter wave reflection beam controllable metasurface, which is applied to the fields of beam scanning reflection array antennas and focal length adjustable plane devices. Aiming at the problem that the existing optomechanical controllable metasurfaces generally have the same unit size, the electromagnetic response characteristics of each unit in the metasurface cannot be independently controlled, that is, the control flexibility of electromagnetic waves is limited. The optical-mechanical structure millimeter-wave reflection beam controllable metasurface of the present invention has different nonlinear response characteristics of each unit in the metasurface unit sub-array under the excitation of electromagnetic waves of different powers. Unified design and independent design of the horizontal axis of the capacitor of each unit, so as to dynamically control the electromagnetic response of each unit in the metasurface in real time to achieve more flexible and reconfigurable functions. The present invention provides a new idea for real-time dynamic regulation of tunable and reconfigurable metasurfaces, and complements the research on controllable metasurface technology based on the optical-mechanical coupling mechanism at home and abroad.
Description
技术领域technical field
本发明属于波束扫描反射阵天线、焦距可调平面器件领域,特别涉及一种可重构调谐型超表面技术。The invention belongs to the field of beam scanning reflection array antennas and focal length adjustable plane devices, in particular to a reconfigurable tuning type metasurface technology.
背景技术Background technique
电磁超材料是具有自然界中所不具有的独特物理特性的人造电磁材料,二维的电磁超表面相比三维的电磁超材料具有体积小、损耗低、成本低的优点,使其得到广泛关注和研究。然而,上述超表面被设计制作成型后,其在设计频带内特定的响应特性即被固化不可改变,不具有工作频率可调谐性、功能可重构性。近年来,响应特性可重构型智能超材料以及超表面的合成机制、设计方法等研究成为学术界、工业界的热点和重点,并相继提出了有源可控超表面、温控超表面、非线性超表面、机械可控超表面,声学可控超表面等概念及设计技术,旨在智能操控电磁波以及机械波的各种特性参数,具有广泛的应用前景和需求。Electromagnetic metamaterials are artificial electromagnetic materials with unique physical properties that are not found in nature. Compared with three-dimensional electromagnetic metamaterials, two-dimensional electromagnetic metasurfaces have the advantages of small size, low loss and low cost, which have attracted widespread attention and Research. However, after the above-mentioned metasurface is designed and fabricated, its specific response characteristics within the designed frequency band are solidified and cannot be changed, and it does not have the tunability of operating frequency and function reconfigurability. In recent years, research on reconfigurable smart metamaterials with response characteristics, as well as the synthesis mechanism and design method of metasurfaces, has become a hot topic and focus in academia and industry, and active controllable metasurfaces, temperature-controlled metasurfaces, Concepts and design technologies such as nonlinear metasurfaces, mechanically controllable metasurfaces, and acoustically controllable metasurfaces aim to intelligently manipulate various characteristic parameters of electromagnetic waves and mechanical waves, and have broad application prospects and needs.
但是,目前提出的有源可重构调谐型超表面存在体积大、功耗高、可靠性低、适用性及应用领域有限等问题;目前提出的温控超表面受环境变化影响大,实时操控性差;目前提出的非线性超表面对每个单元的电磁响应调控有限,导致其可重构的功能和性能非常有限;目前提出的机械可控超表面可调精度有限,切换速度慢。近年来,由于光机超材料具有非线性光机耦合特性而被关注,它的非线性特性源自入射波能量与单元结构势能相互耦合效应,本论文基于光机超材料构建光机结构式可控超表面,即不需要复杂的外围电路以及辅助器件,仅通过改变外加激励的功率就可以实现电磁特性的操控,具有对电磁波特性操控简便,调控响应速度快的优势,并且目前提出的光机结构式超表面对每个单元的电磁特性调控精度有限,即超表面中所有单元的电磁响应特性相同,而本论文提出的光机结构式波束可控超表面具有单元电磁响应特性各异,通过对每个单元电磁响应的独立设计与控制最终实现波束方向的调控,综上所述,本论文创新性的提出的光机结构式波束可控超表面具有重要的科学研究价值,在军事和民用各领域具有广泛的应用需求。However, the currently proposed active reconfigurable tunable metasurfaces have problems such as large volume, high power consumption, low reliability, limited applicability and application fields; the currently proposed temperature-controlled metasurfaces are greatly affected by environmental changes, and real-time control is required. The currently proposed nonlinear metasurfaces have limited control over the electromagnetic response of each unit, resulting in very limited reconfigurable functions and performances; the currently proposed mechanically controllable metasurfaces have limited tunability and slow switching speed. In recent years, opto-mechanical metamaterials have attracted attention due to their nonlinear opto-mechanical coupling properties, which are derived from the mutual coupling effect between incident wave energy and unit structural potential energy. Metasurface, that is, does not require complex peripheral circuits and auxiliary devices, and can realize the control of electromagnetic characteristics only by changing the power of the external excitation. It has the advantages of simple control of electromagnetic wave characteristics and fast control response speed. The control accuracy of the electromagnetic properties of each unit by the metasurface is limited, that is, the electromagnetic response properties of all units in the metasurface are the same. However, the optical-mechanical structured beam-steerable metasurface proposed in this paper has different electromagnetic response properties of each unit. The independent design and control of the electromagnetic response of the unit finally realizes the regulation of the beam direction. To sum up, the optical-mechanical structure beam-steerable metasurface innovatively proposed in this paper has important scientific research value and has a wide range of military and civilian fields. application requirements.
发明内容SUMMARY OF THE INVENTION
为解决上述技术问题,本发明提出一种光机结构式毫米波反射波束可控超表面,超表面,在不同功率大小的电磁波激励下,超表面中每个单元的非线性响应特性不同,通过对每个单元电容器横轴长度的独立设计,并结合对整个超表面悬梁臂、空气间隙的统一设计,通过改变外加激励的功率大小,进而实时动态操控超表面中每个单元的电磁响应,最终实现反射波束的可控。In order to solve the above technical problems, the present invention proposes an opto-mechanical structure type millimeter-wave reflection beam controllable metasurface. The metasurface has different nonlinear response characteristics of each unit in the metasurface under the excitation of electromagnetic waves of different powers. The independent design of the length of the horizontal axis of the capacitor of each unit, combined with the unified design of the cantilever arm and air gap of the entire metasurface, by changing the power of the external excitation, and then dynamically controlling the electromagnetic response of each unit in the metasurface in real time, and finally realizing Steerability of reflected beams.
本发明采用的技术方案为:一种光机结构式毫米波反射波束可控超表面,采用单元子阵列周期排布构成,所述单元子阵列采用n个相位连续梯度变化的超表面单元构成。The technical scheme adopted by the present invention is as follows: an opto-mechanical structure type millimeter wave reflection beam controllable metasurface is formed by periodic arrangement of unit sub-arrays, and the unit sub-array is formed by n metasurface units with continuous phase gradient variation.
超表面单元的结构从上到下依次为:ELC金属谐振环、柔性介质基底、金属背板;所述ELC金属谐振环制备在柔性介质基底上,柔性介质基底与底部金属背板之间填充为空气;柔性介质基底的结构具体包括:中间的方形部分以及四个悬梁臂,悬梁臂垂直于ELC金属谐振环的电容器横轴,四个悬梁臂均一端固定在金属背板的支撑柱上,另一端与中间的方形部分连接为一个整体。The structure of the metasurface unit from top to bottom is: ELC metal resonant ring, flexible dielectric substrate, and metal backplane; the ELC metal resonant ring is prepared on the flexible dielectric substrate, and the space between the flexible dielectric substrate and the bottom metal backplane is filled with Air; the structure of the flexible dielectric substrate specifically includes: a square part in the middle and four cantilever arms, the cantilever arms are perpendicular to the horizontal axis of the capacitor of the ELC metal resonant ring, and one end of the four cantilever arms is fixed on the support column of the metal backplane, and the other One end is connected to the square part in the middle as a whole.
对每一个超表面单元的电容器横轴长度进行独立设计,并对超表面所有单元的悬梁臂以及空气间隙统一设计。The length of the horizontal axis of the capacitor of each metasurface unit is designed independently, and the cantilever arms and air gaps of all metasurface units are designed uniformly.
每一种超表面单元的电容器横轴长度、悬梁臂、空气间隙的尺寸组合,对应一个反射电磁波的突变相位。The size combination of the length of the horizontal axis of the capacitor, the cantilever arm, and the air gap of each metasurface unit corresponds to an abrupt phase change of the reflected electromagnetic wave.
所述单元子阵列中的n个超表面单元对应的相位排布满足广义斯涅尔定律。The phase arrangement corresponding to the n metasurface units in the unit subarray satisfies the generalized Snell's law.
本发明的有益效果:本发明的光机结构式毫米波反射波束可控超表面采用的单元结构,将金属谐振环制备在柔性介质基底上,柔性介质与底部金属背板之间填充为空气;这种光机结构式毫米波反射波束可控超表面单元结构在入射电磁波作用下激励起电磁谐振并在单元结构中金属谐振环与金属背板上产生感应电流,感应电流的存在使得金属谐振环与金属背板之间产生了相互排斥的安培力,导致金属谐振环与金属背板相互远离,最终光机械超材料柔性介质发生形变,让光机械超材料金属谐振环与柔性介质作为一个统一的整体形变;Beneficial effects of the present invention: the unit structure adopted by the optical-mechanical structure type millimeter-wave reflective beam controllable metasurface of the present invention prepares a metal resonant ring on a flexible medium substrate, and the space between the flexible medium and the bottom metal backplane is filled with air; An opto-mechanical structure-type millimeter-wave reflected beam controllable metasurface unit structure is excited by an incident electromagnetic wave to generate electromagnetic resonance, and an induced current is generated in the metal resonant ring and the metal backplane in the unit structure. The existence of the induced current makes the metal resonant ring and the metal A mutually repulsive ampere force is generated between the backplanes, causing the metal resonator ring and the metal backplane to move away from each other, and finally the optomechanical metamaterial flexible medium deforms, allowing the optomechanical metamaterial metal resonator ring and the flexible medium to deform as a unified whole. ;
本发明的单元结构通过对电容器横轴长度的独立设计,并对单元的悬梁臂以及空气间隙统一设计,从而改变反射电磁波的突变相位。当外加功率由低功率变到高功率时,由于超表面所有单元的悬梁臂尺寸一致,且单元子阵列中每个单元电容器横轴长度的差异仅会给质量带来微小差异,因此柔性介质几乎统一从基态h1跳变到稳态h2,使得子阵列对应每一个单元的相位响应改变,最终完成波束偏折可控的设计;The unit structure of the present invention changes the sudden change phase of the reflected electromagnetic wave by independently designing the length of the horizontal axis of the capacitor, and uniformly designing the cantilever arm and the air gap of the unit. When the applied power changes from low power to high power, since the size of the cantilever arms of all units on the metasurface is the same, and the difference in the length of the horizontal axis of each unit capacitor in the unit subarray will only bring about a small difference in quality, the flexible medium is almost Uniformly jump from the ground state h1 to the steady state h2, so that the phase response of the sub-array corresponding to each unit changes, and finally the design of controllable beam deflection is completed;
本发明为可调谐、可重构超表面实时动态调控提供了一种新思路,进而实时动态操控超表面中每个单元的电磁响应,实现更加灵活的可重构功能。本发明为可调谐、可重构超表面实时动态调控提供了一种新思路,本发明补充了国内外基于光-机械耦合机理的可控超表面技术研究。The present invention provides a new idea for real-time dynamic regulation of tunable and reconfigurable metasurfaces, and further dynamically controls the electromagnetic response of each unit in the metasurfaces in real time, thereby realizing a more flexible reconfigurable function. The present invention provides a new idea for real-time dynamic regulation of tunable and reconfigurable metasurfaces, and the present invention complements the research on controllable metasurface technology based on an optical-mechanical coupling mechanism at home and abroad.
附图说明Description of drawings
图1是本发明提供的光机结构式毫米波反射波束可控超表面单元及其几何尺寸;Fig. 1 is the optical-mechanical structure type millimeter wave reflection beam controllable metasurface unit provided by the present invention and its geometric size;
其中,(a)为单元结构示意图,(b)为单元结构俯视图,(c)为单元结构侧视图;Wherein, (a) is a schematic diagram of the unit structure, (b) is a top view of the unit structure, and (c) is a side view of the unit structure;
图2是本发明提供的光机结构式毫米波反射波束可控超表面单元反射波回波损耗、相位与电磁波频率的变化关系;Fig. 2 is the variation relationship between the reflected wave return loss, phase and electromagnetic wave frequency of the optical-mechanical structure type millimeter wave reflected beam controllable metasurface unit provided by the present invention;
其中,(a)为单元结构反射波回波损耗随入射电磁波频率的变化关系,(b)为单元结构反射波相位随入射电磁波频率的变化关系;Among them, (a) is the variation relationship of the return loss of the reflected wave of the unit structure with the frequency of the incident electromagnetic wave, (b) is the variation of the phase of the reflected wave of the unit structure with the frequency of the incident electromagnetic wave;
图3是本发明提供的光机结构式毫米波反射波束可控超表面单元反射波幅度、相位与电容器横轴的变化关系;Fig. 3 is the variation relationship between the reflected wave amplitude and phase of the optical-mechanical structure type millimeter-wave reflected beam controllable metasurface unit and the horizontal axis of the capacitor provided by the present invention;
其中,(a)为当h_air间隔为0.1mm变化时,超表面单元结构的反射波相位与电容器横轴长度的变化关系,(b)为当h_air间隔为0.1mm变化时,超表面单元结构的反射波幅值与电容器横轴长度的变化关系;Among them, (a) is the relationship between the reflected wave phase of the metasurface unit structure and the length of the horizontal axis of the capacitor when the h_air interval is changed by 0.1mm, (b) is when the h_air interval is changed by 0.1mm, the metasurface unit structure. The relationship between the reflected wave amplitude and the length of the horizontal axis of the capacitor;
图4是本发明提供的光机结构式毫米波反射波束可控超表面单元的金属谐振环表面及金属背板的感应电流分布;Fig. 4 is the induced current distribution of the metal resonant ring surface and the metal back plate of the optical-mechanical structure millimeter-wave reflection beam controllable metasurface unit provided by the present invention;
其中,(a)为单元结构电容器横轴为0.63mm时对应的电流模式,(b)为单元结构电容器横轴为0.63mm时对应的电流模式,(c)为单元结构电容器横轴为0.69mm时对应的电流模式,(d)为单元结构电容器横轴为0.69mm时对应的电流模式,(e)为单元结构电容器横轴为0.72mm时对应的电流模式,(f)为单元结构电容器横轴为0.72mm时对应的电流模式,(g)为单元结构电容器横轴为0.80mm时对应的电流模式,(h)为单元结构电容器横轴为0.80mm时对应的电流模式;Among them, (a) is the corresponding current mode when the horizontal axis of the unit structure capacitor is 0.63mm, (b) is the corresponding current mode when the horizontal axis of the unit structure capacitor is 0.63mm, (c) is the unit structure capacitor when the horizontal axis is 0.69mm. (d) is the corresponding current mode when the horizontal axis of the unit structure capacitor is 0.69mm, (e) is the corresponding current mode when the horizontal axis of the unit structure capacitor is 0.72mm, (f) is the horizontal axis of the unit structure capacitor. The corresponding current mode when the axis is 0.72mm, (g) is the corresponding current mode when the horizontal axis of the unit structure capacitor is 0.80mm, (h) is the corresponding current mode when the horizontal axis of the unit structure capacitor is 0.80mm;
图5是本发明提供的光机结构式毫米波反射波束可控超表面单元的安培力与弹性力分析;Fig. 5 is the ampere force and elastic force analysis of the optical-mechanical structure type millimeter-wave reflected beam controllable metasurface unit provided by the present invention;
其中,(a)为对由图3(a)所示的空气间隙h_air=0.3mm的曲线中挑选的相位点构成的超表面进行安培力弹力分析图,(b)为图5(a)的放大图;Among them, (a) is the ampere-elastic analysis diagram of the metasurface composed of the phase points selected from the curve with the air gap h_air=0.3mm shown in Fig. 3(a), and (b) is the graph of Fig. 5(a) enlarged image;
图6是本发明提供的光机结构式毫米波反射波束可控超表面单元的本征机械频率;Fig. 6 is the intrinsic mechanical frequency of the optical-mechanical structure type millimeter-wave reflected beam controllable metasurface unit provided by the present invention;
图7是本发明提供的光机结构式毫米波反射波束可控超表面及其单元子阵列的排布与波束偏折效果图,最终实现从0°到25°的偏折;Fig. 7 is the arrangement and beam deflection effect diagram of the optical-mechanical structure millimeter-wave reflection beam controllable metasurface and its unit sub-array provided by the present invention, and finally realizes deflection from 0° to 25°;
其中,(a)为每个单元空气间隙均选取为0.2mm的超表面及其单元子阵列结构示意图,(b)为每个单元空气间隙均选取为0.3mm的超表面及其单元子阵列结构示意图,(c)为每个单元空气间隙均选取为0.35mm的超表面及其单元子阵列结构示意图;Among them, (a) is a schematic diagram of the metasurface and its unit subarray structure with each unit air gap selected as 0.2mm, (b) is a metasurface and its unit subarray structure with each unit air gap selected as 0.3mm Schematic diagram, (c) is a schematic diagram of the structure of the metasurface and its unit subarray with each unit air gap selected as 0.35mm;
图8是本发明提供的光机结构式毫米波反射波束可控超表面在xoz平面上Ey的远场辐射方向图从0°到25°的偏折;Fig. 8 is the deflection of the far-field radiation pattern of Ey on the xoz plane from 0° to 25° of the optical-mechanical structure millimeter-wave reflection beam controllable metasurface provided by the present invention;
其中,(a)为Ey的远场0°辐射方向,(b)为Ey的远场25°辐射方向;Among them, (a) is the far-
图9是本发明提供的光机结构式毫米波反射波束可控超表面在xoz平面上的电场路径图从0°到25°的偏折;9 is the deflection from 0° to 25° of the electric field path diagram on the xoz plane of the optical-mechanical structure millimeter-wave reflective beam controllable metasurface provided by the present invention;
其中,(a)为电场路径0°方向,(b)为电场路径25°方向;Among them, (a) is the 0° direction of the electric field path, (b) is the 25° direction of the electric field path;
图10是本发明提供的光机结构式毫米波反射波束可控超表面单元子阵列的排布与波束偏折效果图实现从34°变到0°的偏折;Fig. 10 is the arrangement and beam deflection effect diagram of the optical-mechanical structure millimeter-wave reflection beam controllable metasurface unit sub-array provided by the present invention to achieve deflection from 34° to 0°;
其中,(a)为波束0°方向,(b)为波束25°方向;Among them, (a) is the 0° direction of the beam, (b) is the 25° direction of the beam;
图11是本发明提供的光机结构式毫米波反射波束可控超表面在xoz平面上Ey的远场辐射方向图实现从34°变到0°的偏折;Fig. 11 is the far-field radiation pattern of Ey on the xoz plane provided by the optical-mechanical structure millimeter-wave reflection beam controllable metasurface provided by the present invention realizes deflection from 34° to 0°;
其中,(a)为Ey的远场34°辐射方向,(b)为Ey的远场0°辐射方向;Among them, (a) is the far-field 34° radiation direction of Ey, (b) is the far-
图12是本发明提供的光机结构式毫米波反射波束可控超表面在xoz平面上的电场路径图实现从34°变到0°的偏折;Fig. 12 is the electric field path diagram of the optical-mechanical structure millimeter-wave reflection beam controllable metasurface provided by the present invention on the xoz plane to realize the deflection from 34° to 0°;
其中,(a)为电场路径34°方向,(b)为电场路径0°方向;Among them, (a) is the 34° direction of the electric field path, (b) is the 0° direction of the electric field path;
附图标记说明:1为ELC金属谐振环,2为悬梁臂,3为柔性介质基底,4为空气间隙,5为金属背板,6为支撑柱。Description of reference numerals: 1 is an ELC metal resonant ring, 2 is a cantilever arm, 3 is a flexible dielectric substrate, 4 is an air gap, 5 is a metal backplane, and 6 is a support column.
具体实施方式Detailed ways
为便于本领域技术人员理解本发明的技术内容,首先对以下技术术语进行说明:For the convenience of those skilled in the art to understand the technical content of the present invention, the following technical terms are first described:
1、电容器横轴1. Capacitor horizontal axis
如图1中(b)所示,将ELC金属谐振环中相当于电容的这部分结构定义为电容器横轴,也即图1中(b)所示的长度为m的这部分结构。As shown in Fig. 1(b), this part of the structure of the ELC metal resonant ring, which is equivalent to the capacitor, is defined as the horizontal axis of the capacitor, that is, the part of the structure shown in Fig. 1 (b) with a length of m.
2、独立设计2. Independent design
对应到本发明中,代表每个超表面单元的电容器横轴长度均不同。Corresponding to the present invention, the length of the horizontal axis of the capacitor representing each metasurface unit is different.
3、统一设计3. Unified design
对应到本发明中,代表超表面所有单元的悬梁臂以及空气间隙的尺寸均是相同的。Corresponding to the present invention, the dimensions of the cantilever arms and air gaps representing all the elements of the metasurface are the same.
下面结合附图对本发明内容进一步阐释。The content of the present invention will be further explained below in conjunction with the accompanying drawings.
实施例1Example 1
本实施例提供一种光机结构式毫米波反射波束非线性可控超表面单元,具体的:This embodiment provides a non-linear controllable metasurface unit of an optical-mechanical structure millimeter-wave reflected beam, specifically:
光机结构式超材料作为一类新型非线性超材料受到广泛关注和重视,基于光机结构式超材料,本发明提出构造新型光机结构式超表面的思想,光机结构式反射型微波超表面在不同功率大小的电磁波激励下,对每一个单元的电容器横轴长度进行独立设计,并对超表面所有单元的悬梁臂以及空气间隙统一设计,进而实时动态操控超表面中每个单元的电磁响应,实现更加灵活的可重构功能。本发明的发现填补了国内外基于电磁能-结构势能耦合机理的新型非线性可控超表面技术研究空白。As a new type of nonlinear metamaterials, optomechanical structure metamaterials have received extensive attention and attention. Based on optomechanical structure metamaterials, the present invention proposes the idea of constructing a new optomechanical structure metasurface. Optomechanical structure reflective microwave metasurfaces operate at different powers. Under the excitation of large and small electromagnetic waves, the length of the horizontal axis of the capacitor of each unit is independently designed, and the cantilever arms and air gaps of all units of the metasurface are uniformly designed, so as to dynamically control the electromagnetic response of each unit in the metasurface in real time, and achieve more Flexible and reconfigurable functionality. The discovery of the present invention fills the research gap of new nonlinear controllable metasurface technology based on the electromagnetic energy-structure potential energy coupling mechanism at home and abroad.
本领域技术人员应知,本发明中所提到的独立设计是对每个超表面单元的电容器横轴长度根据不同的条件进行独立的设计,最终每个单元的电容器横轴长度不一样;本发明中的统一设计是指采用相同的条件对所有单元的悬梁臂以及空气间隙进行设计,最终得到的所有单元的悬梁臂以及空气间隙尺寸参数是相同的。Those skilled in the art should know that the independent design mentioned in the present invention is to independently design the length of the horizontal axis of the capacitor of each metasurface unit according to different conditions, and finally the length of the horizontal axis of the capacitor of each unit is different; The unified design in the invention means that the cantilever arms and air gaps of all units are designed under the same conditions, and the finally obtained cantilever arms and air gap size parameters of all units are the same.
如图1(a)所示,本发明的一种光机结构式毫米波反射波束可控超表面单元结构从上至下依次包括:ELC金属谐振环1、柔性介质基底3、金属背板5;所述ELC金属谐振环1制备在柔性介质基底3上,柔性介质基底3与底部金属背板5之间填充为空气,形成空气间隙4;柔性介质基底3的结构具体包括:中间的方形部分以及四个悬梁臂2,悬梁臂2垂直于ELC金属谐振环1的电容器横轴,四个悬梁臂2均一端固定在金属背板的支撑柱6上,另一端与方型柔性介质连接为一个整体;这样的结构设计可以使得柔性介质与金属谐振环作为一个整体形变。As shown in FIG. 1( a ), an optical-mechanical structure type millimeter-wave reflective beam controllable metasurface unit structure of the present invention sequentially includes from top to bottom: an ELC
实施例2Example 2
本实施例给出一种光机结构式毫米波反射波束非线性可控超表面的实现方式:This embodiment provides an implementation method of an opto-mechanical structured millimeter-wave reflected beam nonlinear controllable metasurface:
本实施例包括:(1)阵列中单元结构的形状;(2)阵列中单元结构的材料;(3)阵列中单元金属谐振环的尺寸;(4)阵列中单元悬梁臂尺寸;(5)阵列中单元空气间隙尺寸;(6)单元结构实现周期阵列的排列方式;(7)阵列中单元结构的周期。This embodiment includes: (1) the shape of the element structure in the array; (2) the material of the element structure in the array; (3) the size of the element metal resonant ring in the array; (4) the size of the element cantilever arm in the array; (5) The size of the cell air gap in the array; (6) the arrangement of the cell structure to realize the periodic array; (7) the period of the cell structure in the array.
下面阐述重要尺寸,单元结构短边周期为3.2mm,单元结构长边周期为9.8mm,柔性介质的宽度为3mm,金属谐振环周期为2.5mm,进一步电容器间隔的一半为0.2mm,谐振环的宽度0.3mm,基于以上单元结构进行仿真,仿真计算得到最终设计的单元悬梁臂尺寸均为3mm*0.5mm,单元的谐振结构处于基态时空气间隙设置为0.2mm,单元的谐振结构处于稳态时空气间隙设置为0.3mm。若是由6个单元结构的单元子阵列构成的超表面,单元子阵列对应的电容器横轴长度分别设计为0.48mm,0.57mm,0.6mm,0.61mm,0.63mm,0.7mm,此时超表面的单元子阵列的周期长为19.2mm,宽为9.8mm,单元子阵列中单元数量为6,超表面由以上尺寸的单元子阵列周期排布构成。若是由8个单元结构的单元子阵列构成的超表面,单元子阵列对应的电容器横轴长度分别设计为0.63mm,0.63mm,0.69mm,0.69mm,0.63mm,0.72mm,0.72mm,0.8mm,0.8mm,此时超表面的单元子阵列的周期长为25.6mm,宽为9.8mm,单元子阵列中单元数量为8,超表面由以上尺寸的单元子阵列周期排布构成。The important dimensions are described below. The period of the short side of the unit structure is 3.2mm, the period of the long side of the unit structure is 9.8mm, the width of the flexible medium is 3mm, the period of the metal resonant ring is 2.5mm, and the further half of the capacitor interval is 0.2mm. The width is 0.3mm. Based on the above unit structure for simulation, the final design of the unit cantilever arm size is 3mm*0.5mm. When the unit resonance structure is in the ground state, the air gap is set to 0.2mm. When the unit resonance structure is in the steady state The air gap is set to 0.3mm. If it is a metasurface composed of a unit sub-array with 6 unit structures, the horizontal axis lengths of the capacitors corresponding to the unit sub-array are designed to be 0.48mm, 0.57mm, 0.6mm, 0.61mm, 0.63mm, and 0.7mm, respectively. The period length of the unit sub-array is 19.2 mm, the width is 9.8 mm, the number of units in the unit sub-array is 6, and the metasurface is composed of the periodic arrangement of unit sub-arrays of the above size. If the metasurface is composed of cell sub-arrays with 8 cell structures, the horizontal axis lengths of the capacitors corresponding to the cell sub-arrays are designed to be 0.63mm, 0.63mm, 0.69mm, 0.69mm, 0.63mm, 0.72mm, 0.72mm, 0.8mm respectively. , 0.8mm, the period length of the unit subarray of the metasurface is 25.6mm, the width is 9.8mm, the number of units in the unit subarray is 8, and the metasurface is composed of the periodic arrangement of the unit subarray of the above size.
参见图1中(b)、(c)所示,本发明的光机结构式毫米波反射波束可控超表面单元及其几何尺寸,其中单元结构的周期p=3mm,金属谐振环(1)的周期d=2.5mm,电容器横轴的长度m为变量,金属谐振环的宽度n=0.3mm,金属谐振环横轴之间的距离的一半a=0.2mm,悬臂(2)的长度为length,悬臂的宽度为wide,单元沿x轴的周期p_back=3.2mm,单元结构采用的材料依次为ELC金属谐振环采用的材质为Cu,铜(Cu)的厚度为h_cu=0.012mm,柔性介质(3)采用FPC材料,柔性介质的厚度为h_fpc=0.025mm,金属背板为AL,金属背板(5)的厚度为q=0.8mm,其中悬梁臂固定端通过圆柱(6)来支撑柔性介质层FPC,使得柔性介质与金属背板形成一定高度为h_air的空气间隙(4)。对于本实施例中设计好的阵列,超表面中单元柔性介质与金属背板之间的初始高度均为0.2mm,之后在不同功率的外加激励下,柔性介质会起振,使得空气间隙改变。Referring to Fig. 1 (b) and (c), the optical-mechanical structure type millimeter-wave reflection beam controllable metasurface unit and its geometric dimensions of the present invention, wherein the period of the unit structure is p=3mm, and the metal resonant ring (1) has a The period d=2.5mm, the length m of the horizontal axis of the capacitor is a variable, the width of the metal resonator ring is n=0.3mm, the half of the distance between the horizontal axes of the metal resonator ring is a=0.2mm, the length of the cantilever (2) is length, The width of the cantilever is wide, the period of the unit along the x-axis is p_back=3.2mm, the material used for the unit structure is Cu, the material used for the ELC metal resonator ring is Cu, the thickness of copper (Cu) is h_cu=0.012mm, and the flexible medium (3 ) using FPC material, the thickness of the flexible medium is h_fpc=0.025mm, the metal backplane is AL, the thickness of the metal backplane (5) is q=0.8mm, and the fixed end of the cantilever arm supports the flexible medium layer through the cylinder (6). The FPC enables the flexible medium and the metal backplane to form an air gap (4) with a certain height of h_air. For the array designed in this embodiment, the initial height between the unit flexible medium and the metal backplane in the metasurface is 0.2 mm, and then under the external excitation of different powers, the flexible medium will vibrate, causing the air gap to change.
参见图2,本发明的光机结构式毫米波反射波束可控超表面单元反射波回波损耗、相位与电磁波频率的变化关系,图2(a)表示单元结构反射波相位随入射电磁波频率的变化关系,说明单元结构在一定频率范围内,可以实现特定波束的偏折。图2(b)表示单元结构反射波回波损耗随入射电磁波频率的变化关系,该变化关系说明单元结构通过调节空气间隙h_air的大小可以改变结构的谐振频率,从而改变反射电磁波的突变相位。Referring to Figure 2, the optical-mechanical structure type millimeter wave reflected beam controllable metasurface unit of the present invention reflects the relationship between the return loss, the phase and the frequency of the electromagnetic wave. Figure 2 (a) shows the change of the phase of the reflected wave of the unit structure with the frequency of the incident electromagnetic wave. relationship, indicating that the unit structure can achieve the deflection of a specific beam within a certain frequency range. Figure 2(b) shows the variation of the return loss of the reflected wave of the unit structure with the frequency of the incident electromagnetic wave, which shows that the unit structure can change the resonant frequency of the structure by adjusting the size of the air gap h_air, thereby changing the abrupt phase of the reflected electromagnetic wave.
参见图3,本发明的光机结构式毫米波反射波束可控超表面单元反射波幅度、相位与电容器横轴的变化关系,单元结构通过调节电容器横轴的大小可以改变结构的谐振频率,从而改变反射电磁波的突变相位,利用hfss电磁仿真软件对单元结构进行仿真,单元结构四周设置主从边界条件,集总端口激励。在入射y极化且28GHz激励情况下,图3(a)展示当h_air间隔为0.1mm变化时,超表面单元结构的反射波相位与电容器横轴长度的变化关系,图3展示的反射波相位随着电容器横轴长度的增大而减小,且得到相位覆盖范围接近2Π的仿真结果,该图说明了h_air间隔为0.1mm、0.2mm、0.3mm之间的相位变化较大,0.3mm之后的相位变化并不大,也就是为了实现当外加激励改变,且空气间隙变化量级可以达到0.1mm的量级前提下,波束偏折度数随着外加功率改变而改变,最理想的基态选择为0.1mm或者0.2mm。图3(b)表示当h_air间隔为0.1mm变化时,超表面单元结构的反射波幅值与电容器横轴长度的变化关系,这些参数均为实现反射波束异常偏折创造了条件。Referring to FIG. 3, the relationship between the reflected wave amplitude and phase of the optical-mechanical structure type millimeter-wave reflected beam controllable metasurface unit of the present invention and the horizontal axis of the capacitor can be changed. The unit structure can change the resonant frequency of the structure by adjusting the size of the horizontal axis of the capacitor, thereby changing The abrupt phase of the reflected electromagnetic wave is simulated by the hfss electromagnetic simulation software. In the case of incident y-polarization and excitation at 28 GHz, Figure 3(a) shows the relationship between the reflected wave phase of the metasurface unit structure and the length of the horizontal axis of the capacitor when the h_air interval is changed by 0.1 mm. Figure 3 shows the reflected wave phase It decreases with the increase of the length of the horizontal axis of the capacitor, and the simulation result that the phase coverage is close to 2Π is obtained. The phase change is not large, that is, in order to realize that when the external excitation changes, and the air gap can reach the order of magnitude of 0.1mm, the beam deflection degree changes with the change of the applied power. The most ideal ground state selection is 0.1mm or 0.2mm. Figure 3(b) shows the relationship between the reflected wave amplitude of the metasurface unit structure and the length of the horizontal axis of the capacitor when the h_air interval is changed by 0.1 mm. These parameters create conditions for realizing abnormal deflection of the reflected beam.
这里Π可以指3.1415926,也可以指180°,2Π表明实现360°的相位覆盖。Here Π can refer to 3.1415926 or 180°, and 2Π indicates that 360° of phase coverage is achieved.
参见图4,本发明的光机结构式毫米波反射波束可控超表面单元的金属谐振环表面及金属背板的感应电流分布,对于图3(a)所示的空气间隙h_air=0.3mm的曲线中挑选相位点,当超表面相位梯度为ξ=2π/Lx=0.418k0,其中L是子阵列的长度25.6mm,宽为9.8mm,由于k0=2π/λ0,λ0为自由空间波长,电磁波经超表面反射后将重新定向为θr=arcsin(0.418)=23.96°,此时子阵列中单元个数为n=8,每两个单元之间的相位差dΦ=90°,在28GHz处可以得到相邻单元之间的恒定相位差,电容器横轴长度m分别为0.63mm,0.63mm,0.69mm,0.69mm,0.72mm,0.72mm,0.8mm,0.8mm。当入射28GHz激励,金属背板电流与金属谐振环电流反向,谐振结构工作在磁谐振模式,金属谐振环与金属背板之间会产生相互排斥的安培力。从图4中也可以发现,当电容器横轴长度增加到一定值的时候,电流的方向会变化。图4(a)、(b)表示单元结构电容器横轴为0.63mm时对应的电流模式,图4(c)、(d)单元结构电容器横轴为0.69mm时对应的电流模式,图4(e)、(f)单元结构电容器横轴为0.72mm时对应的电流模式,图4(g)、(h)单元结构电容器横轴为0.80mm时对应的电流模式。Referring to FIG. 4 , the induced current distribution of the metal resonant ring surface and the metal backplane of the optical-mechanical structure type millimeter-wave reflection beam controllable metasurface unit of the present invention, for the curve of the air gap h_air=0.3mm shown in FIG. 3(a) The phase point is selected in , when the metasurface phase gradient is ξ=2π/L x =0.418k 0 , where L is the length of the sub-array 25.6mm, the width is 9.8mm, since k 0 =2π/λ 0 , λ 0 is free Spatial wavelength, the electromagnetic wave will be redirected to θ r =arcsin(0.418)=23.96° after being reflected by the metasurface. At this time, the number of units in the sub-array is n=8, and the phase difference between each two units is dΦ=90° , the constant phase difference between adjacent units can be obtained at 28GHz, and the length m of the horizontal axis of the capacitor is 0.63mm, 0.63mm, 0.69mm, 0.69mm, 0.72mm, 0.72mm, 0.8mm, 0.8mm respectively. When the incident 28GHz excitation, the metal backplane current is opposite to the metal resonant ring current, the resonant structure works in the magnetic resonance mode, and a mutually repelling ampere force is generated between the metal resonator ring and the metal backplane. It can also be found from Figure 4 that when the length of the horizontal axis of the capacitor increases to a certain value, the direction of the current will change. Figures 4(a) and (b) show the corresponding current patterns when the horizontal axis of the unit structure capacitor is 0.63mm. Figure 4(c) and (d) show the corresponding current patterns when the horizontal axis of the unit structure capacitor is 0.69mm. e), (f) the corresponding current mode when the horizontal axis of the unit structure capacitor is 0.72mm, Figure 4(g), (h) the corresponding current mode when the horizontal axis of the unit structure capacitor is 0.80mm.
参见图5,本发明的光机结构式毫米波反射波束可控超表面单元的安培力与弹性力分析,如图5(a)所示,若对该超表面垂直入射磁场强度为H_low的电磁波时,产生的安培力对应图中长短虚线,此时安培力和弹力没有交点,谐振单元均稳定在基态0.2mm。若对该超表面垂直入射磁场强度为H_high的电磁波时,产生的安培力对应虚线,为了使得每个单元由基态达到预设的稳态空气间隙值,即稳态空气间隙值大于等于0.3mm的位置,需要寻找到合适的弹力曲线,使得弹力曲线与安培力的交点对应的横坐标,恰好是目标稳态空气间隙值所在范围,如图5(b)所示为图5(a)所示黑色直线的放大图,由于电容器横轴长短的微小变化对于最终设计结构的弹性系数影响很小,因此对于悬梁臂长宽都统一,只有电容器横轴长短在变化的不同单元结构来说,不同单元结构的弹性系数值基本一致,k=2.59N/m、k=2.60N/m、k=2.61N/m的弹力曲线与安培力交点对应横坐标均大于0.3mm。Referring to Fig. 5, the ampere force and elastic force analysis of the optical-mechanical structure type millimeter-wave reflected beam controllable metasurface unit of the present invention, as shown in Fig. 5(a), if the electromagnetic wave with the magnetic field intensity of H_low is vertically incident on the metasurface , the generated Ampere force corresponds to the long and short dotted lines in the figure. At this time, there is no intersection between the Ampere force and the elastic force, and the resonant unit is stable at the ground state of 0.2mm. If an electromagnetic wave with a magnetic field strength of H_high is vertically incident on the metasurface, the ampere force generated corresponds to the dotted line. In order to make each unit reach the preset steady-state air gap value from the ground state, that is, the steady-state air gap value is greater than or equal to 0.3mm. position, it is necessary to find a suitable elastic curve, so that the abscissa corresponding to the intersection of the elastic curve and the ampere force is exactly the range of the target steady-state air gap value, as shown in Figure 5(b) and Figure 5(a) The enlarged view of the black straight line, because the slight change in the length of the horizontal axis of the capacitor has little effect on the elastic coefficient of the final design structure, so the length and width of the cantilever arm are the same, and only the length of the horizontal axis of the capacitor varies. The elastic coefficient values of the structure are basically the same, and the abscissas corresponding to the intersection points of the elastic force curves of k=2.59N/m, k=2.60N/m and k=2.61N/m and the ampere force are all greater than 0.3mm.
参见图6,本发明的光机结构式毫米波反射波束可控超表面单元的本征机械频率,由图5中得到的k值推得相应的悬梁臂尺寸,计算得到对应不同弹性系数下的悬梁臂的长与宽,最终完成对应每一个单元结构悬梁臂的设计,尺寸均为长乘宽3mm*0.5mm,不同电容器横轴长度对应不同本征频率值,m=0.63mm时对应本征机械谐振频率301.84Hz,m=0.69mm时对应本征机械谐振频率300.05Hz,m=0.72mm时对应本征机械谐振频率299.82Hz,m=0.8mm时对应本征机械谐振频率298.1Hz,以上特征频率值分别对应2.61N/m,2.6N/m,2.6N/m,2.59N/m。Referring to FIG. 6 , the intrinsic mechanical frequency of the optical-mechanical structure type millimeter-wave reflection beam controllable metasurface unit of the present invention is derived from the k value obtained in FIG. 5 to obtain the corresponding cantilever arm size, and the cantilever beam corresponding to different elastic coefficients is calculated The length and width of the arm, the design of the cantilever arm corresponding to each unit structure is finally completed. The resonance frequency is 301.84Hz. When m=0.69mm, the corresponding intrinsic mechanical resonance frequency is 300.05Hz. When m=0.72mm, the corresponding intrinsic mechanical resonance frequency is 299.82Hz. When m=0.8mm, the intrinsic mechanical resonance frequency is 298.1Hz. The above characteristic frequencies The values correspond to 2.61N/m, 2.6N/m, 2.6N/m, and 2.59N/m, respectively.
参见图7,本发明的光机结构式毫米波反射波束可控超表面单元子阵列的排布与波束偏折效果图,对由4个相位组成的8个单元的单元子阵列,排布4*4个单元子阵列的光机结构式反射波束可控超表面,仿真结果显示,当外加功率改变时,光机超表面最终实现波束从0°变到25°的偏折,图7(a)和图7(b)展示的就是这个过程,仿真得到波束偏折25°的结果,与理论计算值23.96°基本一致。观察图7(b)和图7(c)可知,实现一定偏折角度的阵列对单元之间的相位差具有很大程度的宽容性,当hair改变间隔在0.5mm左右时,对于同一个单元来讲,是有相位差的,对于单元子阵列整体而言,空气间隙整体由0.3mm变到0.35mm,他们的相位差也变得不完全符合恒定的90°相位差,但是最终的偏折效果影响很小。Referring to FIG. 7 , the arrangement and beam deflection effect diagram of the optical-mechanical structure millimeter-wave reflective beam controllable metasurface unit sub-array of the present invention, for the unit sub-array of 8 units composed of 4 phases, the arrangement of 4* The opto-mechanical structure reflected beam-steerable metasurface with 4 unit sub-arrays, the simulation results show that when the applied power is changed, the opto-mechanical metasurface finally achieves beam deflection from 0° to 25°, as shown in Fig. 7(a) and Figure 7(b) shows this process. The simulation results show that the beam is deflected by 25°, which is basically consistent with the theoretical calculation value of 23.96°. Observing Figure 7(b) and Figure 7(c), it can be seen that the array that achieves a certain deflection angle has a large degree of tolerance for the phase difference between the units. When the hair change interval is about 0.5mm, for the same unit In terms of phase difference, for the unit sub-array as a whole, the overall air gap changes from 0.3mm to 0.35mm, and their phase difference does not completely conform to the constant 90° phase difference, but the final deflection The effect has little impact.
参见图8,本发明的光机结构式毫米波反射波束可控超表面在xoz平面上Ey的远场辐射方向图,通过周期排布4*4个图7所示单元子阵列,实现波束从0°到25°的偏折。Referring to FIG. 8 , the far-field radiation pattern of Ey on the xoz plane of the optical-mechanical structured millimeter-wave reflective beam-steerable metasurface of the present invention, by arranging 4*4 unit sub-arrays as shown in FIG. 7 periodically, the beam from 0 ° to 25° deflection.
参见图9,本发明的光机结构式反射型波束可控微波超表面在xoz平面上的电场路径图,通过周期排布8*1个图7所示的单元子阵列,实现波束从0°到25°的偏折。Referring to FIG. 9 , the electric field path diagram of the optical-mechanical structure reflective beam-steerable microwave metasurface of the present invention on the xoz plane, by arranging 8*1 unit sub-arrays as shown in FIG. 7 periodically, the beam from 0° to 25° deflection.
参见图10,本发明的光机结构式毫米波反射波束可控超表面单元子阵列的排布与波束偏折效果图,由图3(a)所示的空气间隙h_air=0.2mm的曲线挑选相位点组成单元子阵列,单元子阵列中悬梁臂尺寸是设计好的,且悬梁臂尺寸均一致,均为0.5mm*3mm,尽管每个单元电容器横轴长度不同,但单元子阵列中每个单元可以近乎等效为相同的弹性系数,柔性介质会因此从同一个基态跳变到近乎相同的稳态。由6个单元结构的单元子阵列构成的超表面,单元子阵列对应的电容器横轴长度分别设计为0.48mm,0.57mm,0.6mm,0.61mm,0.63mm,0.7mm,此时超表面的单元子阵列的周期长为19.2mm,宽为9.8mm,单元子阵列中单元数量为6,超表面由以上尺寸的单元子阵列周期排布构成;对由6个相位组成的6个单元的单元子阵列,排布5*5的光机结构式反射波束可控超表面,仿真结果显示,当外加功率改变时,光机超表面最终实现波束从34°变到0°的偏折,图10(a)和图10(b)展示的就是这个过程,仿真结果显示,光机超表面实现了波束34°的偏折,与理论计算值31.947°基本一致。Referring to FIG. 10 , the arrangement and beam deflection effect diagram of the optical-mechanical structure millimeter-wave reflection beam controllable metasurface unit sub-array of the present invention, the phase is selected by the curve of the air gap h_air=0.2mm shown in FIG. 3(a) The dots form a cell sub-array. The size of the cantilever arm in the cell sub-array is designed, and the size of the cantilever arm is the same, which is 0.5mm*3mm. Although the length of the horizontal axis of each cell capacitor is different, the size of each cell in the cell sub-array is different. It can be nearly equivalent to the same elastic coefficient, and the flexible medium will thus jump from the same ground state to almost the same steady state. The metasurface is composed of cell sub-arrays with 6 cell structures. The horizontal axis lengths of the capacitors corresponding to the cell sub-arrays are designed to be 0.48mm, 0.57mm, 0.6mm, 0.61mm, 0.63mm, and 0.7mm, respectively. At this time, the cells of the metasurface are The period length of the sub-array is 19.2mm, the width is 9.8mm, the number of cells in the unit sub-array is 6, and the metasurface is composed of a periodic arrangement of the unit sub-arrays of the above size; The array is arranged with 5*5 optical-mechanical structured reflection beam controllable metasurfaces. The simulation results show that when the applied power changes, the optical-mechanical metasurface finally realizes the deflection of the beam from 34° to 0°, as shown in Figure 10(a ) and Figure 10(b) show this process. The simulation results show that the optomechanical metasurface achieves a beam deflection of 34°, which is basically consistent with the theoretical calculation value of 31.947°.
参见图11,本发明的光机结构式毫米波反射波束可控超表面在xoz平面上Ey的远场辐射方向图,通过周期排布4*4个图10所示的单元子阵列,实现波束从34°变到0°的偏折。Referring to FIG. 11 , the far-field radiation pattern of Ey on the xoz plane of the optical-mechanical structured millimeter-wave reflective beam controllable metasurface of the present invention, by arranging 4*4 unit sub-arrays as shown in FIG. 10 periodically, realizes the beam from Deflection from 34° to 0°.
参见图12,本发明的光机结构式毫米波反射波束可控超表面在xoz平面上的电场路径图,通过图10所示8*1个单元子阵列的周期排布实现波束从34°变到0°的偏折。Referring to FIG. 12, the electric field path diagram of the optical-mechanical structure millimeter-wave reflection beam controllable metasurface on the xoz plane of the present invention, through the periodic arrangement of the 8*1 unit sub-array shown in FIG. 10, the beam changes from 34° to Deflection of 0°.
综上,本发明的光机结构式毫米波反射波束可控超表面,是一种体积小、可实时动态调控、结构简单的基于电磁能-结构势能耦合机理的非线性可控超表面技术。To sum up, the optical-mechanical structure millimeter-wave reflected beam controllable metasurface of the present invention is a non-linear controllable metasurface technology based on the coupling mechanism of electromagnetic energy and structural potential energy with small size, real-time dynamic control and simple structure.
本领域的普通技术人员将会意识到,这里所述的实施例是为了帮助读者理解本发明的原理,应被理解为本发明的保护范围并不局限于这样的特别陈述和实施例。对于本领域的技术人员来说,本发明可以有各种更改和变化。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的权利要求范围之内。Those of ordinary skill in the art will appreciate that the embodiments described herein are intended to assist readers in understanding the principles of the present invention, and it should be understood that the scope of protection of the present invention is not limited to such specific statements and embodiments. Various modifications and variations of the present invention are possible for those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the scope of the claims of the present invention.
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