CN114743914A - Laser stripping huge transfer equipment based on combined type supporting platform - Google Patents

Laser stripping huge transfer equipment based on combined type supporting platform Download PDF

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Publication number
CN114743914A
CN114743914A CN202210340107.5A CN202210340107A CN114743914A CN 114743914 A CN114743914 A CN 114743914A CN 202210340107 A CN202210340107 A CN 202210340107A CN 114743914 A CN114743914 A CN 114743914A
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China
Prior art keywords
guide rail
conveying frame
support
glass plate
assembly
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Pending
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CN202210340107.5A
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Chinese (zh)
Inventor
刘强
高晴利
李晶
赵甜甜
马宁
张梦杰
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Beijing Institute of Petrochemical Technology
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Beijing Institute of Petrochemical Technology
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Priority to CN202210340107.5A priority Critical patent/CN114743914A/en
Publication of CN114743914A publication Critical patent/CN114743914A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/57—Working by transmitting the laser beam through or within the workpiece the laser beam entering a face of the workpiece from which it is transmitted through the workpiece material to work on a different workpiece face, e.g. for effecting removal, fusion splicing, modifying or reforming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005—Processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
    • H01L2221/68386—Separation by peeling

Abstract

The invention discloses laser stripping massive transfer equipment based on a combined type supporting platform, which consists of a laser camera system, a glass plate conveying system and a substrate conveying system, wherein the laser camera system mainly comprises a marble platform, a laser camera supporting beam, a camera component, a laser head and a light source; the glass sheet delivery system generally comprises: the device comprises a support, a linear motor, a limiting plate, a glass plate conveying frame assembly, an upper grating ruler and a glass plate carrying platform assembly; the substrate conveying system mainly comprises: lower grating chi, base plate conveying frame linear electric motor, stopper, base plate conveying frame subassembly, fixed plate subassembly, grating chi and magnetic support adjust the platform. The chip is peeled to a target welding spot by means of laser, the substrate and the glass plate are aligned in a macro-motion mode by the aid of the mechanical guide rail, the substrate and the glass plate are aligned in a micro-adjustment mode in a high-precision mode by the aid of the magnetic support adjusting platform, and the substrate and the glass plate are aligned in a micro-adjustment mode in a high-precision mode under the combined action of the magnetic support adjusting platform and the magnetic support adjusting platform, so that the chip transfer speed is increased, and the transfer yield is increased.

Description

Laser stripping huge transfer equipment based on combined type supporting platform
Technical Field
The invention relates to a chip bulk transfer technology, in particular to laser lift-off bulk transfer equipment based on a combined type supporting platform.
Background
Mini/Micro LEDs, which are reduced to within 100 micrometers by Light Emitting Diodes (LEDs), have the advantages of ultra-high resolution, high brightness, low power consumption, no splicing gap, fast response, etc., and are considered as a new and very active display technology following LCD and OLED technologies. The process flow chain for producing the Mini/Micro LED display panel is long and complex, and mainly comprises the links of chip preparation, chip transfer, defect detection and repair and the like, wherein the massive transfer is the most critical link of the process flow chain, and the production cost, the mass production speed and the yield of the display screen are directly influenced.
Compared with other technical schemes of mass transfer, the laser peeling and releasing technology skips a chip pickup link, high-energy and high-power laser penetrates through a glass substrate to act on a transfer crystal film adhered to a chip, the adhesion between the chip and the transfer crystal film is reduced under the action of photo-thermal or photochemical reaction, the chip automatically falls off on a driving plate by virtue of gravity, the transfer speed is about 100kk/h, the transfer yield can reach 99.999%, and the laser peeling and releasing technology is the most potential scheme in the mass transfer scheme. In the laser peeling bulk transfer scheme, a motion positioning platform is needed to convey a glass plate adsorbing a chip and a driving circuit board to the lower side of laser, an industrial CCD camera is used for accurately acquiring the position information of a Mini/Micro LED chip, the driving circuit board is finely adjusted through the motion positioning platform, the chip on the glass plate is aligned with a welding spot on the driving circuit board, the chip is peeled off to a target welding spot on the driving circuit board under the action of the laser, and the display panel is prepared through electrical interconnection. In the process, the running speed and the positioning precision of the motion positioning platform are the key points which restrict the production efficiency and the yield of the display panel.
The motion positioning platform usually adopts three supporting modes of a mechanical guide rail, static pressure gas buoyancy and magnetic force. The air-floating platform has fast moving speed, but low positioning speed and insufficient bearing capacity. The mechanical guide rail supporting platform has better maneuvering capability and can realize large-stroke movement. The magnetic bearing platform is supported in a non-contact way by utilizing the magnetic bearing, and has the functions of vibration control and vibration suppression and stronger motion positioning capability.
The bulk transfer apparatus described in chinese patent 202110883029.9 drives a target substrate stage, a chip substrate stage, and a laser head through a "servo motor-ball screw" module, thereby realizing bulk transfer of chips. According to the scheme, the servo motor-ball screw driving module is adopted, only horizontal transverse movement of the target substrate carrying platform, the chip substrate carrying platform and the laser head can be realized, larger friction wear and movement return clearance exist, and the response speed and the movement precision of the carrying platform are reduced. In addition, when the energy of the laser is not enough to completely peel off the chip to the target substrate, the chip which is not completely peeled off cannot be transferred under the influence of the vertical distance between the target substrate and the chip carrier, so that the further improvement of the chip transfer precision and the chip utilization rate is limited.
Chinese patent 201911124506.2 discloses an alignment device and method for equidistant chip array mass transfer, which respectively realize the horizontal and vertical movements of a chip carrier by means of a horizontal drive-linear guide module and a vertical drive-linear guide module, realize the lifting movement of a pad by means of a vertical drive-linear guide module, realize the movement of an ejector pin mechanism by using a rigid-flexible coupling movement platform, detect the position information of an LED chip according to a precision camera device, control the chip carrier and the pad to be quickly and accurately aligned, realize that the chip is sequentially peeled off to a target substrate by the reciprocating movement of the ejector pin, and realize the transfer of the LED chip. Although the method improves the efficiency and the yield of chip transfer, the platform can only move in a right angle and does not have a small-angle deflection function, and the utilization rate of the LED chips and the improvement of the transfer yield are restricted.
In view of the above, the present invention is particularly proposed.
Disclosure of Invention
The invention aims to provide laser stripping mass transfer equipment based on a composite supporting platform, so as to solve the technical problems in the prior art.
The purpose of the invention is realized by the following technical scheme:
the invention relates to a laser stripping mass transfer device based on a composite supporting platform, which mainly comprises a laser camera system, a glass plate conveying system and a substrate conveying system, wherein the laser camera system mainly comprises: the device comprises a marble platform, a laser camera supporting beam, a laser camera mounting plate, a left camera component, a right camera component, a laser head, a left light source and a right light source; the glass sheet delivery system generally comprises: the device comprises a left support, a right support, a left outer guide rail, a left inner guide rail, a right outer guide rail, a right inner guide rail, a left linear motor, a right linear motor, a left front limiting plate, a left rear limiting plate, a right front limiting plate, a right rear limiting plate, a glass plate conveying frame assembly, an upper X-direction grating ruler, a glass plate loading platform assembly and an upper Y-direction grating ruler; the substrate transfer system mainly includes: the device comprises a left guide rail, a right guide rail, a lower X-direction grating ruler, a substrate conveying frame linear motor, a front limiting block, a rear limiting block, a substrate conveying frame assembly, a fixed plate assembly, a lower Y-direction grating ruler and a magnetic support adjusting platform; the marble platform is positioned below the laser camera supporting beam, the laser camera mounting plate, the left camera component, the right camera component, the laser head, the left light source and the right light source, the laser camera supporting beam is positioned above the marble platform and is mounted on the upper surface of the marble platform through fastening screws, the laser camera mounting plate is positioned at the central position of the front surface of the horizontal beam of the laser camera supporting beam and is mounted on the laser camera supporting beam through the fastening screws, the left camera component and the right camera component are symmetrically distributed on the left side and the right side of the front surface of the laser camera mounting plate and are mounted on the laser camera mounting plate through the fastening screws, the laser head is positioned at the central position of the front surface of the laser camera mounting plate, the laser head is positioned between the left camera component and the right camera component and is fixed on the laser camera mounting plate through the fastening screws, and the left light source and the right light source are respectively positioned at the lower ends of the left camera component and the right camera component, the laser camera support beam is fixed at the lower ends of a left camera component and a right camera component through fastening screws respectively, a left support and a right support are respectively positioned at the left side and the right side of the upper surface of a marble platform, the left support and the right support are positioned at the inner side of a laser camera support beam, the left support and the right support are positioned at the outer side of a left light source and a right light source and are arranged on the marble platform through the fastening screws, a left outer guide rail and a left inner guide rail are symmetrically distributed on the upper surface of the left support and are arranged on the left support through the fastening screws, a right outer guide rail and a right inner guide rail are symmetrically distributed on the upper surface of the right support and are arranged on the right support through the fastening screws, a left linear motor is positioned on the upper surface of the left support, a left linear motor is positioned between the left outer guide rail and the left inner guide rail and is arranged on the left support through the fastening screws, a right linear motor is positioned on the upper surface of the right support, and a right linear motor is positioned between the right outer guide rail and the right inner guide rail, the upper X-direction grating ruler is positioned on the upper edge of the right side surface of the left support and is adhered on the left support by epoxy resin, the upper X-direction grating ruler reading head is positioned on the left side of the front surface of the glass plate conveying frame assembly and is positioned on the right side of the left support, the glass plate conveying frame assembly is arranged on the glass plate conveying frame assembly through fastening screws, the glass plate conveying frame assembly is positioned on the glass plate conveying frame assembly, the glass plate conveying frame assembly is positioned below the left light source and the right light source and clamped on the glass plate conveying frame assembly through a sliding block at the bottom end of the glass plate conveying frame assembly, the upper Y-direction grating ruler is positioned on the inner surface of a front baffle plate of the glass plate conveying frame assembly and fixed on the glass plate conveying frame assembly through epoxy resin glue, the reading heads of the upper Y-direction grating ruler are positioned on the front side edge of the upper surface of the glass plate conveying frame assembly, the reading heads of the upper Y-direction grating ruler are positioned behind the upper Y-direction grating ruler and are arranged on the glass plate conveying frame through fastening screws, the left guide rail and the right guide rail are distributed on two sides of the central line of the upper surface of the marble platform in a bilateral symmetry manner, the left guide rail and the right guide rail are positioned on the inner sides of the left support and the right support and are arranged on the marble platform through the fastening screws, the lower X-direction grating ruler is positioned on the left side of the left guide rail, the lower X-direction grating ruler is positioned on the right side of the left support and is installed on the marble platform through fastening screws, the substrate conveying frame linear motor stator is positioned at the center line of the upper surface of the marble platform, the substrate conveying frame linear motor stator is positioned between the left guide rail and the right guide rail and is installed on the marble platform through fastening screws, the front limiting block and the rear limiting block are respectively positioned on the front side and the rear side of the upper surface of the marble platform, the front limiting block and the rear limiting block are positioned between the substrate conveying frame linear motor stator and the right guide rail and are installed on the marble platform through fastening screws, the substrate conveying frame assembly is positioned above the left guide rail, the right guide rail and the substrate conveying frame linear motor stator, the substrate conveying frame assembly is positioned below the glass plate conveying frame assembly and is clamped on the left guide rail and the right guide rail through a slide block at the bottom of the substrate conveying frame assembly, the fixed plate assembly is located above the substrate conveying frame assembly, the slider at the bottom of the fixed plate assembly is clamped on the substrate conveying frame assembly, the lower Y-direction grating ruler is located on the front side surface of the substrate conveying frame assembly and is attached to the substrate conveying frame assembly through epoxy resin glue, the reading head of the lower Y-direction grating ruler is located in the center of the front side surface of the fixed plate assembly and is installed on the fixed plate assembly through fastening screws, and the magnetic force supporting and adjusting platform is located above the fixed plate assembly and is installed on the fixed plate assembly through the fastening screws.
Compared with the prior art, the laser peeling bulk transfer equipment based on the composite supporting platform provided by the invention has the advantages of high chip transfer speed and high transfer yield by peeling the chip to the target welding point by the aid of the laser and performing axial small-angle high-frequency adjustment and axial small-stroke high-frequency reciprocating motion by the aid of the magnetic platform, and is particularly suitable for bulk transfer of Mini/Micro LED chips.
Drawings
FIG. 1a is a schematic diagram of a forward structure according to an embodiment of the present invention;
FIG. 1b is a schematic side view of an embodiment of the present invention;
FIG. 2 is a schematic three-dimensional structure diagram of a laser camera system according to an embodiment of the present invention;
FIG. 3 is a schematic three-dimensional view of a glass sheet delivery system according to an embodiment of the present invention;
FIG. 4 is a schematic three-dimensional structure of a substrate transport system according to an embodiment of the invention;
FIG. 5 is a schematic three-dimensional structure diagram of a camera module according to an embodiment of the invention;
FIG. 6a is a schematic diagram of a three-dimensional top view of a glass panel carrier assembly according to an embodiment of the present invention;
FIG. 6b is a schematic bottom view of a glass sheet carrier assembly according to an embodiment of the present invention;
FIG. 7a is a schematic diagram of a three-dimensional top view of a glass plate carrier assembly according to an embodiment of the present invention;
FIG. 7b is a schematic bottom view of a glass plate stage assembly according to an embodiment of the present invention;
FIG. 8a is a schematic diagram of a three-dimensional top view of a substrate transport rack assembly according to an embodiment of the present invention;
FIG. 8b is a schematic bottom view of a substrate carrier assembly according to an embodiment of the present invention;
FIG. 9a is a schematic diagram of a three-dimensional top view of a mounting plate assembly according to an embodiment of the present invention;
FIG. 9b is a schematic bottom view of a mounting plate assembly according to an embodiment of the present invention;
FIG. 10a is a cross-sectional view of a magnetically supported conditioning platform of an embodiment of the present invention taken along the radial direction X;
FIG. 10b is a cross-sectional view of the magnetic support adjustment platform taken along the radial direction Y in accordance with an embodiment of the present invention;
FIG. 11 is a cross-sectional view of a magnetically supported tuning platform mover system according to an embodiment of the present invention;
FIG. 12a is a cross-sectional view taken along the radial direction X of a magnetic support adjustment platform stator system in accordance with an embodiment of the present invention;
FIG. 12b is a radial Y-direction cross-sectional view of a magnetic support adjustment platform stator system according to an embodiment of the present invention;
FIG. 12c is a schematic diagram of a three-dimensional structure of a magnetic support adjustment platform stator system according to an embodiment of the present invention;
FIG. 13 is a cross-sectional view of the magnetic support adjustment platform out-mover assembly of an embodiment of the present invention;
FIG. 14a is a cross-sectional view of a mover assembly within a magnetically supported adjustable platform according to an embodiment of the present invention;
FIG. 14b is a schematic diagram of a three-dimensional structure of a mover assembly in the magnetically supported adjustable platform according to an embodiment of the present invention;
FIG. 15 is a cross-sectional view of an axially translating Lorentz magnetic bearing in accordance with an embodiment of the present invention;
FIG. 16 is a cross-sectional view of a Lorentz magnetic bearing stator assembly with axial translation of a magnetic support adjustment platform according to an embodiment of the present invention;
FIG. 17 is a cross-sectional view of an axial rotation planar motor according to an embodiment of the present invention;
FIG. 18 is a process diagram of an embodiment of the present invention;
Detailed Description
The technical scheme in the embodiment of the invention is clearly and completely described below by combining the attached drawings in the embodiment of the invention; it should be understood that the described embodiments are only some of the embodiments of the present invention, not all of the embodiments, and are not intended to limit the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
The terms that may be used herein are first described as follows:
the term "and/or" means that either or both can be achieved, for example, X and/or Y means that both cases include "X" or "Y" as well as three cases including "X and Y".
The terms "comprising," "including," "containing," "having," or other similar terms of meaning should be construed as non-exclusive inclusions. For example: including a feature (e.g., material, component, ingredient, carrier, formulation, material, dimension, part, component, mechanism, device, process, procedure, method, reaction condition, processing condition, parameter, algorithm, signal, data, product, or article of manufacture), is to be construed as including not only the particular feature explicitly listed but also other features not explicitly listed as such which are known in the art.
The term "consisting of … …" is meant to exclude any technical feature elements not explicitly listed. If used in a claim, the term shall render the claim closed except for the inclusion of the technical features that are expressly listed except for the conventional impurities associated therewith. If the term occurs in only one clause of the claims, it is defined only to the elements explicitly recited in that clause, and elements recited in other clauses are not excluded from the overall claims.
The term "parts by mass" is intended to indicate a mass ratio relationship between a plurality of components, for example: if X component is X parts by mass and Y component is Y parts by mass, the mass ratio of the X component to the Y component is X: Y; 1 part by mass may represent any mass, for example: 1 part by mass may be expressed as 1kg or 3.1415926 kg. The sum of the parts by mass of all the components is not necessarily 100 parts, and may be more than 100 parts, less than 100 parts, or equal to 100 parts. Parts, ratios and percentages described herein are by mass unless otherwise indicated.
Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "secured," etc., are to be construed broadly, as for example: can be fixedly connected, can also be detachably connected or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms herein can be understood by those of ordinary skill in the art as appropriate.
When concentrations, temperatures, pressures, dimensions, or other parameters are expressed as ranges of values, the ranges are to be understood as specifically disclosing all ranges formed from any pair of upper, lower, and preferred values within the range, regardless of whether ranges are explicitly recited; for example, if a numerical range of "2 ~ 8" is recited, then the numerical range should be interpreted to include ranges of "2 ~ 7", "2 ~ 6", "5 ~ 7", "3 ~ 4 and 6 ~ 7", "3 ~ 5 and 7", "2 and 5 ~ 7", and the like. Unless otherwise indicated, the numerical ranges recited herein include both the endpoints thereof and all integers and fractions within the numerical range.
The terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in an orientation or positional relationship that is indicated based on the orientation or positional relationship shown in the drawings for ease of description and simplicity of description only, and are not intended to imply or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting herein.
Details which are not described in detail in the embodiments of the invention belong to the prior art which is known to the person skilled in the art. Those not specifically mentioned in the examples of the present invention were carried out according to the conventional conditions in the art or conditions suggested by the manufacturer. The reagents or instruments used in the examples of the present invention are not specified by manufacturers, and are all conventional products available by commercial purchase.
The invention relates to a laser stripping mass transfer device based on a composite supporting platform, which mainly comprises a laser camera system, a glass plate conveying system and a substrate conveying system, wherein the laser camera system mainly comprises: the device comprises a marble platform, a laser camera supporting beam, a laser camera mounting plate, a left camera component, a right camera component, a laser head, a left light source and a right light source; the glass sheet delivery system generally comprises: the device comprises a left support, a right support, a left outer guide rail, a left inner guide rail, a right outer guide rail, a right inner guide rail, a left linear motor, a right linear motor, a left front limiting plate, a left rear limiting plate, a right front limiting plate, a right rear limiting plate, a glass plate conveying frame assembly, an upper X-direction grating ruler, a glass plate loading platform assembly and an upper Y-direction grating ruler; the substrate transfer system mainly includes: the device comprises a left guide rail, a right guide rail, a lower X-direction grating ruler, a substrate conveying frame linear motor, a front limiting block, a rear limiting block, a substrate conveying frame assembly, a fixed plate assembly, a lower Y-direction grating ruler and a magnetic support adjusting platform; the marble platform is positioned below the laser camera supporting beam, the laser camera mounting plate, the left camera component, the right camera component laser head, the left light source and the right light source, the laser camera supporting beam is positioned above the marble platform and is mounted on the upper surface of the marble platform through fastening screws, the laser camera mounting plate is positioned at the central position of the front surface of the horizontal beam of the laser camera supporting beam and is mounted on the laser camera supporting beam through fastening screws, the left camera component and the right camera component are symmetrically distributed on the left side and the right side of the front surface of the laser camera mounting plate and are mounted on the laser camera mounting plate through fastening screws, the laser head is positioned at the central position of the front surface of the laser camera mounting plate, the laser head is positioned between the left camera component and the right camera component and is fixed on the laser camera mounting plate through fastening screws, and the left light source and the right light source are respectively positioned on the left camera component, the right camera component, The lower end of the right camera component is respectively fixed at the lower ends of the left camera component and the right camera component through fastening screws, a left support and a right support are respectively positioned at the left side and the right side of the upper surface of the marble platform, the left support and the right support are positioned at the inner side of the laser camera supporting beam, the left support and the right support are positioned at the outer side of the left light source and the right light source and are installed on the marble platform through the fastening screws, a left outer guide rail and a left inner guide rail are symmetrically distributed on the upper surface of the left support and are installed on the left support through the fastening screws, a right outer guide rail and a right inner guide rail are symmetrically distributed on the upper surface of the right support and are installed on the right support through the fastening screws, a left linear motor is positioned on the upper surface of the left support, a left linear motor is positioned between the left outer guide rail and the left inner guide rail and is installed on the left support through the fastening screws, a right linear motor is positioned on the upper surface of the right support, and a right linear motor is positioned between the right outer guide rail and the right inner guide rail, the upper X-direction grating ruler is positioned on the upper edge of the right side surface of the left support and is adhered on the left support by epoxy resin, the upper X-direction grating ruler reading head is positioned on the left side of the front surface of the glass plate conveying frame assembly and is positioned on the right side of the left support, the glass plate conveying frame assembly is arranged on the glass plate conveying frame assembly through fastening screws, the glass plate conveying frame assembly is positioned on the glass plate conveying frame assembly, the glass plate conveying frame assembly is positioned below the left light source and the right light source and clamped on the glass plate conveying frame assembly through a sliding block at the bottom end of the glass plate conveying frame assembly, the upper Y-direction grating ruler is positioned on the inner surface of a front baffle plate of the glass plate conveying frame assembly and fixed on the glass plate conveying frame assembly through epoxy resin glue, the reading heads of the upper Y-direction grating ruler are positioned on the front side edge of the upper surface of the glass plate conveying frame assembly, the reading heads of the upper Y-direction grating ruler are positioned behind the upper Y-direction grating ruler and are arranged on the glass plate conveying frame through fastening screws, the left guide rail and the right guide rail are distributed on two sides of the central line of the upper surface of the marble platform in a bilateral symmetry manner, the left guide rail and the right guide rail are positioned on the inner sides of the left support and the right support and are arranged on the marble platform through the fastening screws, the lower X-direction grating ruler is positioned on the left side of the left guide rail, the lower X-direction grating ruler is positioned on the right side of the left support and is installed on the marble platform through fastening screws, the substrate conveying frame linear motor stator is positioned at the center line of the upper surface of the marble platform, the substrate conveying frame linear motor stator is positioned between the left guide rail and the right guide rail and is installed on the marble platform through fastening screws, the front limiting block and the rear limiting block are respectively positioned on the front side and the rear side of the upper surface of the marble platform, the front limiting block and the rear limiting block are positioned between the substrate conveying frame linear motor stator and the right guide rail and are installed on the marble platform through fastening screws, the substrate conveying frame assembly is positioned above the left guide rail, the right guide rail and the substrate conveying frame linear motor stator, the substrate conveying frame assembly is positioned below the glass plate conveying frame assembly and is clamped on the left guide rail and the right guide rail through a slide block at the bottom of the substrate conveying frame assembly, the fixed plate component is located above the substrate conveying frame component, the slider at the bottom of the fixed plate component is clamped on the substrate conveying frame component, the Y-direction grating ruler is located on the front side surface of the substrate conveying frame component and attached to the substrate conveying frame component through epoxy resin glue, the Y-direction grating ruler reading head is located in the center of the front side surface of the fixed plate component and is installed on the fixed plate component through fastening screws, and the magnetic force supporting and adjusting platform is located above the fixed plate component and is installed on the fixed plate component through the fastening screws.
The camera assembly comprises a camera fixing plate, a camera, an upper camera guide sleeve, a lower camera guide sleeve, a left fixing plate, a right fixing plate and a light source mounting plate.
The glass plate conveying frame assembly comprises a left outer front sliding block, a left outer rear sliding block, a left inner front sliding block, a left inner rear sliding block, a right outer front sliding block, a right outer rear sliding block, a right inner front sliding block, a right inner rear sliding block, a glass plate conveying frame main body, a glass plate loading table front guide rail, a glass plate loading table rear guide rail, a glass plate loading table motor stator, a left linear motor connecting plate, a right linear motor connecting plate, a left linear motor rotor and a right linear motor rotor.
The glass board loading platform assembly comprises a left front sliding block, a left rear sliding block, a right front sliding block, a right rear sliding block, a glass board loading platform main body, a motor connecting plate and a glass board loading platform motor rotor.
The substrate conveying frame assembly comprises a lower left front sliding block, a lower left rear sliding block, a lower right front sliding block, a lower right rear sliding block, a substrate conveying system conveying frame main body, a substrate conveying frame left guide rail, a substrate conveying frame right guide rail, a substrate left limiting block, a substrate right limiting block and a linear motor stator part of an adjusting platform fixing plate.
The fixed plate assembly mainly comprises an adjusting platform fixed plate main body, an upper left front sliding block, an upper left rear sliding block, an upper right front sliding block, an upper right rear sliding block and an adjusting platform fixed plate linear motor sub-part.
The magnetic support adjusting platform mainly comprises a rotor system and a stator system, wherein the rotor system mainly comprises: the photoelectric encoder comprises a table top, a photoelectric encoder rotor assembly, an outer rotor assembly and an inner rotor assembly; the stator system mainly includes: the device comprises a photoelectric coded disc stator assembly, a supporting seat, an axial translation Lorentz magnetic bearing stator assembly, an axial rotation plane motor stator assembly, an axial displacement sensor support, a left axial displacement sensor, a right axial displacement sensor, a front axial displacement sensor, a rear axial displacement sensor, an upper left axial displacement sensor, an upper right axial displacement sensor, an upper front axial displacement sensor, an upper rear axial displacement sensor, an upper axial universal ball protection bearing, an upper radial universal ball protection bearing, a middle radial universal ball protection bearing, a lower radial universal ball protection bearing and a lower axial universal ball protection bearing.
The axial translation Lorentz magnetic bearing comprises an outer magnetic conduction ring, an inner magnetic conduction ring, upper outer magnetic steel, an outer magnetic isolation ring, lower outer magnetic steel, upper inner magnetic steel, an inner magnetic isolation ring, lower inner magnetic steel, a framework, an upper axial suspension winding, a lower axial suspension winding and a connecting plate.
The axial rotation planar motor comprises rotary magnetic steel, a winding assembling plate and a rotary winding.
The left axial displacement sensor, the right axial displacement sensor, the front axial displacement sensor, the rear axial displacement sensor, the upper left axial displacement sensor, the upper right axial displacement sensor, the upper front axial displacement sensor and the upper rear axial displacement sensor are all eddy current displacement sensors.
The principle of the scheme is as follows:
as shown in fig. 1a and fig. 1b, the laser lift-off bulk transfer apparatus uses a linear motor supported by a mechanical guide rail to realize the planar motion of a glass plate and a target substrate, thereby completing the rapid macro-motion alignment of the substrate and the glass plate, and uses the axial small-stroke high-frequency reciprocating motion and the axial small-angle high-frequency adjustment of a magnetic support adjusting platform to realize the high-precision rapid micro-adjustment alignment of the positions of the substrate and the glass plate. The laser stripping mass transfer equipment is divided into four working modes: normal mode (00), axial translation mode (01), axial rotation mode (10) and compound mode (11). When the chip is aligned with the welding spot of the target substrate and can be completely peeled off, the massive transfer device controller executes a '00' mode, the linear motor is used for driving the conveying mechanism to realize the macro motion alignment of the glass plate and the target substrate, the positions of the chip on the glass plate and the welding spot on the target substrate are determined by the industrial CCD camera, and the chip is peeled off to the target welding spot of the driving circuit board by means of laser ablation of the crystal film. When the energy of laser can only reduce the adhesion force of a crystal film to a chip and is not enough to completely peel the chip off to a target substrate, a mass transfer device controller executes a '01' mode, detects the distance between the mass transfer device controller and a glass board loading platform through an axial displacement sensor on a magnetic support platform, adjusts the magnitude and the direction of current of an axial translation coil by using an axial translation Lorentz magnetic bearing controller, drives the target substrate to move axially, realizes the contact between the position of the chip and the corresponding welding spot position of the target substrate, and completes the transfer of the chip. When the corresponding welding spot position of the chip and the target substrate has a certain small-angle deviation, the massive transfer device controller executes a '10' mode, measures the deviation angle by means of an industrial CCD camera, adjusts the current magnitude and direction of an axial rotation coil by an axial rotation plane motor controller, drives the target substrate to rotate, enables the chip to be aligned with the corresponding welding spot position of the target substrate, and peels the chip onto the target substrate by means of high-energy laser to complete chip transfer. When the energy of the laser is not enough to completely peel off the chip onto the target substrate and the position of the corresponding welding spot of the chip and the target substrate has a certain small-angle deviation, the massive transfer device controller executes a mode of 11, rotates the target substrate through the magnetic support platform, aligns the welding spot of the target substrate with the chip on the glass plate, and utilizes the axial translation of the magnetic support platform to realize the contact between the position of the LED chip and the position of the corresponding welding spot of the target substrate, thereby completing the transfer of the chip. The laser stripping mass transfer equipment adopts the mechanical guide rail support-linear motor drive to realize the quick macro-motion alignment of the target substrate and the glass plate, so that the maneuvering capability and the response speed of the mass transfer equipment are greatly improved, in addition, the magnetic support-planar motor drive is utilized to realize the axial small-stroke high-frequency motion and small-angle rotation of the target substrate, the motion positioning precision of the mass transfer equipment is improved, and the orientation adjustment capability of a platform system is realized. The two devices have the combined action, so that the transfer speed and the transfer yield of the chip are improved.
Compared with the prior art, the invention has the advantages that:
the invention adopts four layers of mechanical guide rail support-linear motor drive to realize the quick macro-motion alignment of the target substrate and the glass plate, utilizes the magnetic support-plane motor to axially move in a small stroke and in a high frequency and rotate in a small angle to realize the high-precision quick micro-adjustment alignment of the target substrate and the glass plate, and leads the chip to be peeled to the target welding spot of the driving circuit board by means of laser ablation crystal film. Compared with the traditional servo motor-roller screw driving module, the horizontal axial movement of the target substrate carrying platform is realized, the movement return clearance of the ball screw is eliminated, and the response speed and the movement positioning precision of the substrate carrying platform are improved; compare with traditional range upon range of formula mechanical motion platform, possess small-angle rotation function, promoted LED chip's utilization ratio and transfer yields by a wide margin.
In summary, the laser lift-off bulk transfer apparatus based on the mechanical linear guide rail and the magnetic force driven combined type supporting platform of the embodiment of the invention utilizes four layers of mechanical linear guide rails to realize the rapid macro-motion alignment of the substrate and the glass plate, adopts the axial small-angle high-frequency adjustment and the axial small-stroke high-frequency reciprocating motion of the magnetic force supporting and adjusting platform to realize the high-precision rapid Micro-adjustment alignment of the positions of the substrate and the glass plate, and leads the chip to be peeled off to the target welding point of the driving circuit board by means of laser ablation of the crystal film, has the advantages of high chip transfer speed and high transfer yield, and is particularly suitable for the bulk transfer of Mini/Micro LED chips.
In order to more clearly show the technical solutions and the technical effects provided by the present invention, the following detailed description is provided for the embodiments of the present invention with specific embodiments.
Example 1
As shown in fig. 1a and fig. 1b, which are schematic structural views according to an embodiment of the present invention, a laser lift-off bulk transfer apparatus based on a composite support platform is mainly composed of a laser camera system, a glass plate conveying system and a substrate conveying system, and is characterized in that the laser camera system mainly includes: the device comprises a marble platform 1, a laser camera supporting beam 2, a laser camera mounting plate 3, a left camera component 4A, a right camera component 4B, a laser head 5, a left light source 6A and a right light source 6B; the glass sheet delivery system generally comprises: the device comprises a left support 7A, a right support 7B, a left outer guide rail 8A, a left inner guide rail 8B, a right outer guide rail 8C, a right inner guide rail 8D, a left linear motor 9A, a right linear motor 9B, a left front limiting plate 10A, a left rear limiting plate 10B, a right front limiting plate 10C, a right rear limiting plate 10D, a glass plate conveying frame assembly 11, an upper X-direction grating ruler 12, a glass plate carrying platform assembly 13 and an upper Y-direction grating ruler 14; the substrate transfer system mainly includes: the device comprises a left guide rail 15A, a right guide rail 15B, a lower X-direction grating ruler 16, a substrate conveying frame linear motor 17, a front limiting block 18A, a rear limiting block 18B, a substrate conveying frame assembly 19, a fixing plate assembly 20, a lower Y-direction grating ruler 21 and a magnetic support adjusting platform 22; the marble platform 1 is positioned below the laser camera supporting beam 2, the laser camera mounting plate 3, the left camera component 4A, the right camera component 4B, the laser head 5, the left light source 6A and the right light source 6B, the laser camera supporting beam 2 is positioned above the marble platform 1 and is mounted on the upper surface of the marble platform 1 through fastening screws, the laser camera mounting plate 3 is positioned at the center of the front surface of the horizontal beam of the laser camera supporting beam 2 and is mounted on the laser camera supporting beam 2 through fastening screws, the left camera component 4A and the right camera component 4B are symmetrically distributed at the left side and the right side of the front surface of the laser camera mounting plate 3 and are mounted on the laser camera mounting plate 3 through fastening screws, the laser head 5 is positioned at the center of the front surface of the laser camera mounting plate 3, the laser head 5 is positioned between the left camera component 4A and the right camera component 4B and is fixed on the laser camera mounting plate 3 through fastening screws, a left light source 6A and a right light source 6B are respectively arranged at the lower ends of the left camera component 4A and the right camera component 4B and are respectively fixed at the lower ends of the left camera component 4A and the right camera component 4B through fastening screws, a left support 7A and a right support 7B are respectively arranged at the left side and the right side of the upper surface of the marble platform 1, a left support 7A and a right support 7B are arranged at the inner side of the laser camera supporting beam 2, a left support 7A and a right support 7B are arranged at the outer side of the left light source 6A and the right light source 6B and are arranged on the marble platform 1 through the fastening screws, a left outer guide rail 8A and a left inner guide rail 8B are symmetrically distributed on the upper surface of the left support 7A and are arranged on the left support 7A through the fastening screws, a right outer guide rail 8C and a right inner guide rail 8D are symmetrically distributed on the upper surface of the right support 7B and are arranged on the right support 7B through the fastening screws, a left linear motor 9A is arranged on the upper surface of the left support 7A, a left linear motor 9A is positioned between a left outer guide rail 8A and a left inner guide rail 8B and is mounted on the left support 7A through fastening screws, a right linear motor 9B is positioned on the upper surface of the right support 7B, a right linear motor 9B is positioned between a right outer guide rail 8C and a right inner guide rail 8D and is mounted on the right support 7B through fastening screws, a left front limiting plate 10A and a left rear limiting plate 10B are respectively positioned on the upper end of the front surface and the upper end of the rear surface of the left support 7A and are mounted on the left support 7A through fastening screws, a right front limiting plate 10C and a right rear limiting plate 10D are respectively positioned on the upper end of the front surface and the upper end of the rear surface of the right support 7B and are mounted on the right support 7B through fastening screws, a glass plate carrier assembly 11 is positioned on the left outer guide rail 8A, the left inner guide rail 8B, the right outer guide rail 8C and the right inner guide rail 8D, the glass plate carrier assembly 11 is positioned below the left light source 6A and the right light source 6B, and is clamped on a left outer guide rail 8A, a left inner guide rail 8B, a right outer guide rail 8C and a right inner guide rail 8D through a slide block on a bottom plate of a glass plate conveying frame assembly 11, an upper X-direction grating ruler 12 is positioned on the upper edge of the right side surface of a left support 7A and is glued on the left support 7A through epoxy resin, a reading head of the upper X-direction grating ruler 12 is positioned on the left side of the front surface of the glass plate conveying frame assembly 11, a reading head of the upper X-direction grating ruler 12 is positioned on the right side of the left support 7A and is arranged on the glass plate conveying frame assembly 11 through a fastening screw, the glass plate conveying frame assembly 13 is positioned on the glass plate conveying frame assembly 11, the glass plate conveying frame assembly 13 is positioned below a left light source 6A and a right light source 6B and is clamped on the glass plate conveying frame assembly 11 through a slide block at the bottom end of the glass plate conveying frame assembly 13, and an upper Y-direction grating ruler 14 is positioned on the inner surface of a front baffle plate of the glass plate conveying frame assembly 11, the reading head of the upper Y-direction grating ruler 14 is positioned at the front side edge of the upper surface of the glass plate carrier assembly 13, the reading head of the upper Y-direction grating ruler 14 is positioned at the rear part of the upper Y-direction grating ruler 14 and is arranged on the glass plate carrier 14 through a fastening screw, a left guide rail 15A and a right guide rail 15B are symmetrically distributed at two sides of the central line of the upper surface of the marble platform 1, a left guide rail 15A and a right guide rail 15B are positioned at the inner sides of the left support 7A and the right support 7B and are arranged on the marble platform 1 through the fastening screw, a lower X-direction grating ruler 16 is positioned at the left side of the left guide rail 15A, a lower X-direction grating ruler 16 is positioned at the right side of the left support 7A and is arranged on the marble platform 1 through the fastening screw, a stator of a linear motor 17 of the substrate conveying frame is positioned at the central line of the upper surface of the marble platform 1, the stator of the linear motor 17 of the substrate conveying frame is positioned between the left guide rail 15A and the right guide rail 15B, and is installed on the marble platform 1 by fastening screws, a front limiting block 18A and a rear limiting block 18B are respectively positioned on the front side and the rear side of the upper surface of the marble platform 1, the front limiting block 18A and the rear limiting block 18B are positioned between a stator of a substrate transfer frame linear motor 17 and a right guide rail 15B and are installed on the marble platform 1 by fastening screws, a substrate transfer frame assembly 19 is positioned above the left guide rail 15A, the right guide rail 15B and the stator of the substrate transfer frame linear motor 17, a substrate transfer frame assembly 19 is positioned below the glass plate transfer frame assembly 11 and is clamped on the left guide rail 15A and the right guide rail 15B by a slide block at the bottom of the substrate transfer frame assembly 19, a fixed plate assembly 20 is positioned above the substrate transfer frame assembly 19 and is clamped on the substrate transfer frame assembly 19 by a slide block at the bottom of the fixed plate assembly 20, a lower Y-direction grating ruler 21 is positioned on the front side surface of the substrate transfer frame assembly 19, the lower Y-direction grating ruler 21 reading head is positioned at the central position of the front side surface of the fixed plate component 20 and is installed on the fixed plate component 20 through a fastening screw, and the magnetic support adjusting platform 22 is positioned above the fixed plate component 20 and is installed on the fixed plate component 20 through the fastening screw.
As shown in fig. 2, which is a schematic three-dimensional structure diagram of a laser camera system according to an embodiment of the present invention, the laser camera system mainly includes: the marble platform 1, the laser camera supporting beam 2, the laser camera mounting plate 3, the left camera component 4A, the right camera component 4B, the laser head 5, the left light source 6A and the right light source 6B, the marble platform 1 is positioned below the laser camera supporting beam 2, the laser camera mounting plate 3, the left camera component 4A, the right camera component 4B, the laser head 5, the left light source 6A and the right light source 6B, the laser camera supporting beam 2 is positioned above the marble platform 1 and is mounted on the upper surface of the marble platform 1 through fastening screws, the laser camera mounting plate 3 is positioned at the center of the front surface of the horizontal beam of the laser camera supporting beam 2 and is mounted on the laser camera supporting beam 2 through fastening screws, the left camera component 4A and the right camera component 4B are symmetrically distributed on the left side and the right side of the front surface of the laser camera mounting plate 3 and are mounted on the laser camera mounting plate 3 through fastening screws, laser head 5 is located 3 front surface central points of laser camera mounting panel and puts, and laser head 5 is located in the middle of left camera subassembly 4A and the right camera subassembly 4B to fix on laser camera mounting panel 3 through fastening screw, left light source 6A and right light source 6B are located left camera subassembly 4A and right camera subassembly 4B lower extreme respectively, and fix respectively at left camera subassembly 4A and right camera subassembly 4B lower extreme through fastening screw.
FIG. 3 is a schematic three-dimensional view of a glass sheet delivery system according to an embodiment of the present invention, the glass sheet delivery system comprising: the device comprises a left support 7A, a right support 7B, a left outer guide rail 8A, a left inner guide rail 8B, a right outer guide rail 8C, a right inner guide rail 8D, a left linear motor 9A, a right linear motor 9B, a left front limiting plate 10A, a left rear limiting plate 10B, a right front limiting plate 10C, a right rear limiting plate 10D, a glass plate conveying frame assembly 11, an upper X-direction grating ruler 12, a glass plate carrying platform assembly 13 and an upper Y-direction grating ruler 14; the left support 7A and the right support 7B are positioned below the left outer guide rail 8A, the left inner guide rail 8B, the right outer guide rail 8C, the right inner guide rail 8D, the left linear motor 9A and the right linear motor 9B, the left outer guide rail 8A and the left inner guide rail 8B are symmetrically distributed on the upper surface of the left support 7A and are installed on the left support 7A through fastening screws, the right outer guide rail 8C and the right inner guide rail 8D are symmetrically distributed on the upper surface of the right support 7B and are installed on the right support 7B through fastening screws, the left linear motor 9A is positioned on the upper surface of the left support 7A, the left linear motor 9A is positioned between the left outer guide rail 8A and the left inner guide rail 8B and is installed on the left support 7A through fastening screws, the right linear motor 9B is positioned on the upper surface of the right support 7B, the right linear motor 9B is positioned between the right outer guide rail 8C and the right inner guide rail 8D and is installed on the right support 7B through fastening screws, a left front limiting plate 10A and a left rear limiting plate 10B are respectively positioned at the upper end of the front surface and the upper end of the rear surface of a left support 7A and are arranged on the left support 7A through fastening screws, a right front limiting plate 10C and a right rear limiting plate 10D are respectively positioned at the upper end of the front surface and the upper end of the rear surface of a right support 7B and are arranged on the right support 7B through fastening screws, a glass plate transmission frame assembly 11 is positioned on a left outer guide rail 8A, a left inner guide rail 8B, a right outer guide rail 8C and a right inner guide rail 8D, a glass plate transmission frame assembly 11 is positioned below the left light source 6A and the right light source 6B and is clamped on the left outer guide rail 8A, the left inner guide rail 8B, the right outer guide rail 8C and the right inner guide rail 8D through a slide block on a bottom plate of the glass plate transmission frame assembly 11, an upper X-direction grating ruler 12 is positioned on the upper edge of the right side surface of the left support 7A and is glued on the left support 7A through epoxy resin, the reading head of the upper X-direction grating ruler 12 is positioned on the left side of the front surface of the glass plate conveying frame assembly 11, the reading head of the upper X-direction grating ruler 12 is positioned on the right side of the left support 7A and is installed on the glass plate conveying frame assembly 11 through fastening screws, the glass plate conveying frame assembly 13 is positioned on the glass plate conveying frame assembly 11 and is clamped on the glass plate conveying frame assembly 11 through a sliding block at the bottom end of the glass plate conveying frame assembly 13, the upper Y-direction grating ruler 14 is positioned on the inner surface of a front baffle plate of the glass plate conveying frame assembly 11 and is fixed on the glass plate conveying frame assembly 11 through epoxy resin glue, the reading head of the upper Y-direction grating ruler 14 is positioned on the front side edge of the upper surface of the glass plate conveying frame assembly 13, and the reading head of the upper Y-direction grating ruler 14 is positioned behind the upper Y-direction grating ruler 14 and is installed on the glass plate conveying frame 14 through fastening screws.
Fig. 4 is a schematic three-dimensional structure diagram of a substrate transfer system according to an embodiment of the invention, the substrate transfer system mainly includes: the device comprises a left guide rail 15A, a right guide rail 15B, a lower X-direction grating ruler 16, a stator of a linear motor 17 of a substrate conveying frame, a front limiting block 18A, a rear limiting block 18B, a substrate conveying frame assembly 19, a fixing plate assembly 20, a lower Y-direction grating ruler 21 and a magnetic support adjusting platform 22; the left guide rail 15A and the right guide rail 15B are positioned at the right side of the lower X-direction grating ruler 16, the left guide rail 15A and the right guide rail 15B are respectively positioned at the left side and the right side of the stator of the substrate conveying frame linear motor 17, the lower X-direction grating ruler 16 is positioned at the left side of the left guide rail 15A, the stator of the substrate conveying frame linear motor 17 is positioned between the left guide rail 15A and the right guide rail 15B, the front limiting block 18A and the rear limiting block 18B are positioned between the stator of the substrate conveying frame linear motor 17 and the right guide rail 15B, the substrate conveying frame assembly 19 is positioned above the left guide rail 15A, the right guide rail 15B and the stator of the substrate conveying frame linear motor 17 and is clamped on the left guide rail 15A and the right guide rail 15B through the bottom slide block of the substrate conveying frame assembly 19, the fixed plate assembly 20 is positioned above the substrate conveying frame assembly 19, the slide block at the bottom of the fixed plate assembly 20 is clamped on the substrate conveying frame assembly 19, the lower Y-direction grating ruler 21 is positioned at the front side surface of the substrate conveying frame assembly 19, the lower Y-direction grating ruler 21 reading head is positioned at the central position of the front side surface of the fixed plate component 20 and is installed on the fixed plate component 20 through fastening screws, and the magnetic force supporting and adjusting platform 22 is positioned above the fixed plate component 20 and is installed on the fixed plate component 20 through fastening screws.
Fig. 5 is a schematic three-dimensional structure diagram of a camera assembly according to an embodiment of the invention, the camera assembly mainly includes: a camera fixing plate 401, a camera 402, a camera upper guide 403, a camera lower guide 404, a left fixing plate 405, a right fixing plate 406 and a light source mounting plate 407; the camera fixing plate 401 is located at the outer side of the camera 402, the camera upper guide 403 and the camera lower guide 404, the camera 402 is located in a circular hole of the camera fixing plate 401, the camera upper guide 403 and the camera lower guide 404 are located in an upper guide hole and a lower guide hole of the camera fixing plate 401, respectively, the left fixing plate 405 and the right fixing plate 406 are located at the left and right sides of the lower guide hole of the camera fixing plate 401, respectively, and are mounted on the camera fixing plate 401 by fastening screws, and the light source mounting plate 407 is located below the camera 402, the left fixing plate 405 and the right fixing plate 406, and is mounted on the left fixing plate 405 and the right fixing plate 406 by fastening screws.
Fig. 6a is a schematic three-dimensional top view structure of a glass plate transfer rack assembly 11 according to an embodiment of the present invention, and fig. 6b is a schematic three-dimensional bottom view structure of the glass plate transfer rack assembly 11 according to an embodiment of the present invention, wherein the glass plate transfer rack assembly 11 mainly comprises: a left outer front slider 1101A, a left outer rear slider 1101B, a left inner front slider 1101C, a left inner rear slider 1101D, a right outer front slider 1101E, a right outer rear slider 1101F, a right inner front slider 1101G, a right inner rear slider 1101H, a glass plate carrier body 1102, a glass plate carrier table front guide 1103A, a glass plate carrier table rear guide 1103B, a glass plate carrier table motor stator 1104, a left linear motor connecting plate 1105, a right linear motor connecting plate 1106, a left linear motor mover 1107, and a right linear motor mover 1108; a left outer front slider 1101A, a left outer rear slider 1101B, a left inner front slider 1101C, a left inner rear slider 1101D, a right outer front slider 1101E, a right outer rear slider 1101F, a right inner front slider 1101G and a right inner rear slider 1101H are located below the glass-plate conveying rack main body 1102, the left outer front slider 1101A and the left outer rear slider 1101B are located at the rear edge position of the lower surface of the glass-plate conveying rack main body 1102 and mounted on the glass-plate conveying rack main body 1102 by fastening screws, the left inner front slider 1101C and the left inner rear slider 1101D are located in front of the left outer front slider 1101A and the left outer rear slider 1101B and mounted on the glass-plate conveying rack main body 1102 by fastening screws, the right outer front slider 1101E and the right outer rear slider 1101F are located at the front edge position of the lower surface of the glass-plate conveying rack main body 1101 and mounted on the glass-plate conveying rack main body 1102 by fastening screws, the right inner front slider 1101G and the right inner rear slider 1101E are located at the rear slider 1102E and the rear slider 1101H, a right inner front slider 1101G and a right inner rear slider 1101H are positioned in front of the left inner front slider 1101C and the left inner rear slider 1101D and mounted on the glass plate conveyance rack main body 1102 by fastening screws, the glass plate conveyance rack main body 1102 is positioned above the left outer front slider 1101A, the left outer rear slider 1101B, the left inner front slider 1101C, the left inner rear slider 1101D, the right outer front slider 1101E, the right outer rear slider 1101F, the right inner front slider 1101G and the right inner rear slider 1101H, the glass plate carrier front rail 1103A and the glass plate carrier rear rail 1103B are positioned on the glass plate conveyance rack main body 1102 front baffle rear side and rear baffle front side, respectively, and mounted on the glass plate conveyance rack main body 1102 by fastening screws, the glass plate carrier motor stator 1104 is positioned on the glass plate conveyance rack main body rear baffle front side and rear side of the glass plate carrier rear rail 1103B and mounted on the glass plate conveyance rack main body 1102 by fastening screws, the left linear motor connecting plate 1105 and the right linear motor connecting plate 1106 are respectively positioned in clamping grooves below the front side and the rear side of the rear baffle plate of the glass plate conveying frame main body 1102 and are installed on the glass plate conveying frame main body 1102 through fastening screws, and the left linear motor rotor 1107 and the right linear motor rotor 1108 are respectively positioned below the left linear motor connecting plate 1105 and the right linear motor connecting plate 1106 and are installed on the left linear motor connecting plate 1105 and the right linear motor connecting plate 1106 through fastening screws.
Fig. 7a is a schematic three-dimensional top view structure diagram of glass plate stage assembly 13 according to an embodiment of the present invention, and fig. 7b is a schematic three-dimensional bottom view structure diagram of glass plate stage assembly 13 according to an embodiment of the present invention, where glass plate stage assembly 13 mainly includes: a left front slider 1301A, a left rear slider 1301B, a right front slider 1301C, a right rear slider 1301D, a glass sheet loading main body 1302, a motor connecting plate 1303, and a glass sheet loading motor mover 1304; left front slider 1301A, left rear slider 1301B, right front slider 1301C and right rear slider 1301D are respectively positioned at the left front, left rear, right front and right rear of the lower surface of the hole at the center side of glass sheet stage main body 1302, and are mounted on glass sheet stage main body 1302 by fastening screws, glass sheet stage main body 1302 is positioned above left front slider 1301A, left rear slider 1301B, right front slider 1301C and right rear slider 1301D, motor connecting plate 1303 is positioned at the right side of left rear slider 1301B, right rear slider 1301D and glass sheet stage main body 1302, and is mounted on glass sheet stage main body 1302 by fastening screws, and glass sheet stage motor mover 1304 is positioned at the right side of motor connecting plate 1303, and is mounted on motor connecting plate 1303 by fastening screws.
Fig. 8a is a schematic three-dimensional top view structure of the substrate transfer rack assembly 19 according to the embodiment of the present invention, and fig. 8b is a schematic three-dimensional bottom view structure of the substrate transfer rack assembly 19 according to the embodiment of the present invention, wherein the substrate transfer rack assembly 19 mainly includes: a lower left front slider 1901A, a lower left rear slider 1901B, a lower right front slider 1901C, a lower right rear slider 1901D, a substrate transfer system transfer frame body 1902, a substrate transfer frame front rail 1903A, a substrate transfer frame rear rail 1903B, a substrate left stopper 1904A, a substrate right stopper 1904B, and an adjustment platform fixing plate linear motor stator portion 1905; the lower left front slider 1901A, the lower left rear slider 1901B, the lower right front slider 1901C, and the lower right rear slider 1901D are located below the substrate transfer system rack body 1902, the substrate transfer rack front rail 1903A, the substrate transfer rack rear rail 1903B, the substrate left stopper 1904A, the substrate right stopper 1904B, and the adjustment table fixing plate linear motor stator portion 1905 and mounted on the substrate transfer system rack body 1902 through fastening screws, the substrate transfer system rack body 1902 is located above the lower left front slider 1901A, the lower left rear slider 1901B, the lower right front slider 1901C, and the lower right rear slider 1901D, the substrate transfer rack front rail 1903A and the substrate transfer rack rear rail 1903B are located on the front and rear sides of the upper surface of the substrate transfer system rack body 1902 and mounted on the substrate transfer system rack body 1902 through fastening screws, the substrate left stopper 1904A and the substrate right stopper 1904B are located on the left and right sides of the substrate transfer system rack body 1902, and is mounted on the substrate transfer system transfer frame body 1902 by fastening screws, the adjustment stage fixing plate linear motor stator portion 1905 is located at the center position of the upper surface of the substrate transfer system transfer frame body 1902, and the adjustment stage fixing plate linear motor stator portion 1905 is located between the substrate transfer frame front rail 1903A and the substrate transfer frame rear rail 1903B, and is mounted on the substrate transfer system transfer frame body 1902 by fastening screws.
Fig. 9a is a schematic three-dimensional top view structure of a fixing plate assembly 20 according to an embodiment of the present invention, and fig. 9b is a schematic three-dimensional bottom view structure of the fixing plate assembly 20 according to an embodiment of the present invention, in which the fixing plate assembly 20 mainly includes: an adjusting platform fixing plate main body 2001, an upper left front slider 2002A, an upper left rear slider 2002B, an upper right front slider 2002C, an upper right rear slider 2002D and an adjusting platform fixing plate linear motor rotor part 2003; the adjustment platform fixing plate main body 2001 is located above the upper left front slider 2002A, the upper left rear slider 2002B, the upper right front slider 2002C, the upper right rear slider 2002D and the adjustment platform fixing plate linear motor sub-section 2003, the upper left front slider 2002A, the upper left rear slider 2002B, the upper right front slider 2002C and the upper right rear slider 2002D are located at four corner positions of the lower surface of the adjustment platform fixing plate main body 2001 and are mounted on the adjustment platform fixing plate main body 2001 by fastening screws, the adjustment platform fixing plate linear motor sub-section 2003 is located in the middle of the upper right front slider 2002C and the upper right rear slider 2002D, and the adjustment platform fixing plate linear motor sub-section 2003 is located below the adjustment platform fixing plate main body 2001 and is mounted on the adjustment platform fixing plate main body 2001 by fastening screws.
Fig. 10a is a radial X-direction cross-sectional view of the magnetic support adjustment platform 22 according to the embodiment of the present invention, fig. 10b is a radial Y-direction cross-sectional view of the magnetic support adjustment platform 22 according to the embodiment of the present invention, the magnetic support adjustment platform 22 mainly includes a mover system and a stator system, the mover system mainly includes: a table 2201, an optoelectronic code wheel 2202 rotor assembly, an outer mover assembly 2203 and an inner mover assembly 2204; the stator system mainly includes: the photoelectric encoder 2202 comprises a stator component, a support seat 2205, an axial translation Lorentz magnetic bearing 2206 stator component, an axial rotation plane motor 2207 stator component, an axial displacement sensor support 2208, a left axial displacement sensor 2209A, a right axial displacement sensor 2209B, a front axial displacement sensor 2209C, a rear axial displacement sensor 2209D, an upper left axial displacement sensor 2210A, an upper right axial displacement sensor 2210B, an upper front axial displacement sensor 2210C, an upper rear axial displacement sensor 2210D, an upper axial universal ball protection bearing 2211, an upper radial universal ball protection bearing 2212, a middle radial universal ball protection bearing 2213, a lower radial universal ball protection bearing 2214 and a lower axial universal ball protection bearing 2215; the table 2201 is positioned at the axial lower end of the photoelectric coded disc 2202 rotor assembly, the table 2201 is positioned at the axial upper end of the outer moving sub-assembly 2203 and the inner moving sub-assembly 2204, the photoelectric coded disc 2202 rotor assembly is positioned at the axial upper end of the table 2201 and is installed on the table 2201 through fastening screws, the outer moving sub-assembly 2203 is positioned at the radial inner side of an outer spigot at the lower end of the table 2201 and is installed on the table 2201 through fastening screws, the inner moving sub-assembly 2204 is positioned at the radial inner side of an inner spigot at the lower end of the table 2201 and is installed on the table 2201 through fastening screws, the supporting seat 2205 is positioned at the radial outer side of the table 2201, the photoelectric coded disc rotor assembly 2202, the outer moving sub-assembly 2203 and the inner moving sub-assembly 2204, the supporting seat 2205 is positioned at the axial lower end of the outer moving sub-assembly 2203 and the inner moving sub-assembly 2204, the axial translation lorentz stator assembly 2206 is positioned at the radial inner side of the radial inner moving sub-assembly 2203 and is positioned at the axial upper end of the supporting seat, the axial rotation plane motor 2207 stator component is positioned right below the axial direction of the inner rotor component 2204, the axial rotation plane motor 2207 stator component is positioned at the upper axial end of the support seat 2205 and is arranged on the support seat 2205 through a fastening screw, the axial displacement sensor support 2208 is positioned at the upper axial ends of the table-board 2201, the photoelectric coded disc 2202 rotor component and the support seat 2205 and is arranged on the support seat 2205 through a fastening screw, the left axial displacement sensor 2209A, the right axial displacement sensor 2209B, the front axial displacement sensor 2209C and the rear axial displacement sensor 2209D are positioned at the upper axial end of the table-board 2201, the left axial displacement sensor 2209A, the right axial displacement sensor 2209B, the front axial displacement sensor 2209C and the rear axial displacement sensor 2209D are arranged in an orthogonal mode and are arranged right to the left of the lower end of the axial displacement sensor support 2208 through threaded fit, Right of the lower end, right of the lower end and front of the lower end and right of the lower end, the upper left axial displacement sensor 2210A, the upper right axial displacement sensor 2210B, the upper front axial displacement sensor 2210C and the upper rear axial displacement sensor 2210D are positioned at the upper axial end of the table 2201, the upper left axial displacement sensor 2210A, the upper right axial displacement sensor 2210B, the upper front axial displacement sensor 2210C and the upper rear axial displacement sensor 2210D are positioned radially outside the left axial displacement sensor 2209A, the right axial displacement sensor 2209B, the front axial displacement sensor 2209C and the rear axial displacement sensor 2209D, the upper left axial displacement sensor 2210A, the upper right axial displacement sensor 2210B, the upper front axial displacement sensor 2210C and the upper rear axial displacement sensor 2210D are orthogonally arranged and mounted on the right of the lower end and right of the axial displacement sensor holder 2208 by screw-fitting, An upper axial universal ball protection bearing 2211 is positioned at the lower end of the axial displacement sensor support 2208 and on the radial outer side of the photoelectric coded disc 2202 rotor assembly and is installed on the axial displacement sensor support 2208 through thread fit, the upper radial universal ball protection bearing 2212, the middle radial universal ball protection bearing 2213 and the lower radial universal ball protection bearing 2214 are positioned on the radial outer side of the external moving component 2203 and the radial inner side of the support base 2205, the upper radial universal ball protection bearing 2212, the middle radial universal ball protection bearing 2213 and the lower radial universal ball protection bearing 2214 are sequentially arranged on the support base 2205 from top to bottom, the ball contact points of the upper radial universal ball protection bearing 2212, the middle radial universal ball protection bearing 2213 and the lower radial universal ball protection bearing 2214 are installed on the support base 2203 through thread fit, and the ball contact points of the upper radial universal ball protection bearing 2212, the middle radial universal ball protection bearing 2213 and the lower radial universal ball protection bearing 2214 and the external moving component 2203 are arranged on the support base 2205 through thread fit The lower axial direction universal ball protection bearing 2215 is positioned at the lower end of the external moving component 2203 and the radial inner side of the supporting seat 2205, the lower axial direction universal ball protection bearing 2215 is positioned at the radial outer side of the stator component of the axial translation Lorentz magnetic bearing 2206 and is arranged on the stator component of the axial translation Lorentz magnetic bearing 2206 through screw thread fit, a certain gap is left between the upper end surface of the table surface 2201 and the ball contact point of the upper axial direction universal ball protection bearing 2211 to form an upper axial direction protection gap 2216A, a certain gap is left between the lower end surface of the external moving component 2203 and the ball contact point of the lower axial direction universal ball protection bearing 2215 to form a lower axial direction protection gap 2216B, a certain cylindrical shell gap is left between the inner cylindrical surface of the external moving component 2203 and the outer cylindrical surface of the internal moving component 2204 to form a radial cylindrical shell air gap 2217, a certain thin-wall gap is left between the lower end plane of the internal moving component 2204 and the upper end plane of the stator component of the axial rotation plane motor 2207, forming an axial thin-walled gap 2218.
Fig. 11 is a cross-sectional view of a rotor system of the magnetic support adjustment platform 22 according to an embodiment of the present invention, where the rotor system of the magnetic support adjustment platform 22 mainly includes: a table 2201, an optoelectronic code wheel 2202 rotor assembly, an outer mover assembly 2203 and an inner mover assembly 2204; the table top 2201 is positioned at the axial lower end of the photoelectric coded disc 2202 rotor assembly, the table top 2201 is positioned at the axial upper ends of the outer moving sub-assembly 2203 and the inner moving sub-assembly 2204, the photoelectric coded disc 2202 rotor assembly is positioned at the axial upper end of the table top 2201 and is installed on the table top 2201 through fastening screws, the outer moving sub-assembly 2203 is positioned at the radial inner side of an outer spigot at the lower end of the table top 2201 and is installed on the table top 2201 through fastening screws, and the inner moving sub-assembly 2204 is positioned at the radial inner side of an inner spigot at the lower end of the table top 2201 and is installed on the table top 2201 through fastening screws.
Fig. 12a is a radial X-direction cross section of a magnetic support adjustment platform 22 stator system according to an embodiment of the present invention, fig. 12b is a radial Y-direction cross section of the magnetic support adjustment platform 22 stator system according to the embodiment of the present invention, fig. 12c is a three-dimensional structural diagram of the magnetic support adjustment platform 22 stator system according to the embodiment of the present invention, and the magnetic support adjustment platform 22 stator system mainly includes: the photoelectric encoder 2202 comprises a stator component, a support seat 2205, an axial translation Lorentz magnetic bearing 2206 stator component, an axial rotation plane motor 2207 stator component, an axial displacement sensor support 2208, a left axial displacement sensor 2209A, a right axial displacement sensor 2209B, a front axial displacement sensor 2209C, a rear axial displacement sensor 2209D, an upper left axial displacement sensor 2210A, an upper right axial displacement sensor 2210B, an upper front axial displacement sensor 2210C, an upper rear axial displacement sensor 2210D, an upper axial universal ball protection bearing 2211, an upper radial universal ball protection bearing 2212, a middle radial universal ball protection bearing 2213, a lower radial universal ball protection bearing 2214 and a lower axial universal ball protection bearing 2215; the photoelectric coded disc 2202 stator component is positioned at the radial inner side of the left axial displacement sensor 2209A and is installed at the lower end of an axial displacement sensor support 2208 through threaded connection, the support seat 2205 is positioned at the axial upper end of the support seat 2205 and is installed on the support seat 2205 through a fastening screw, the axial rotation planar motor 2207 stator component is positioned at the axial upper end of the support seat 2205 and is installed on the support seat 2205 through a fastening screw, the axial displacement sensor support 2208 is positioned at the axial upper end of the support seat 2205 and is installed on the support seat 2205 through a fastening screw, the left axial displacement sensor 2209A, the right axial displacement sensor 2209B, the front axial displacement sensor 2209C and the rear axial displacement sensor 2209D are positioned at the axial lower end of the displacement sensor support 2208, the left axial displacement sensor 2209A, the right axial displacement sensor 2209B, the front axial displacement sensor 2209C and the rear axial displacement sensor 2209D are orthogonally arranged and are respectively installed on the right left side of the lower end, the right side of the lower end, the front side of the lower end and the rear side of the lower end of the axial displacement sensor bracket 2208 through thread fit, the upper left axial displacement sensor 2210A, the upper right axial displacement sensor 2210B, the upper front axial displacement sensor 2210C and the upper rear axial displacement sensor 2210D are positioned on the lower axial end of the displacement sensor bracket 2208, the upper left axial displacement sensor 2210A, the upper right axial displacement sensor 2210B, the upper front axial displacement sensor 2210C and the upper rear axial displacement sensor 2210D are orthogonally arranged and are respectively installed on the right left side of the lower end, the right side of the lower end, the front side of the lower end and the rear side of the lower end of the axial displacement sensor bracket 2208 through thread 2210 fit, the upper axial direction ball-rolling protection bearing 2211 is arranged below the axial direction displacement sensor support 2208, the upper axial direction ball-rolling protection bearing 2211 is arranged at the radial outer side of the left axial direction displacement sensor 2209A, the right axial direction displacement sensor 2209B, the front axial direction displacement sensor 2209C and the rear axial direction displacement sensor 2209D and is arranged on the axial direction displacement sensor support 2208 through screw thread matching, the upper radial direction ball-rolling protection bearing 2212, the middle radial direction ball-rolling protection bearing 2213 and the lower radial direction ball-rolling protection bearing 2214 are arranged at the radial inner side of the support base 2205, the upper radial direction ball-rolling protection bearing 2212, the middle radial direction ball-rolling protection bearing 2213 and the lower radial direction ball-rolling protection bearing 2214 are arranged on the support base 2205 from top to bottom in sequence, the upper radial direction ball-rolling protection bearing 2212, the middle radial direction ball-rolling protection bearing 2213 and the lower radial direction ball-rolling protection bearing 2214 are arranged on the support base 2205 through screw thread matching, the lower axial universal ball protection bearing 2215 is positioned on the radial inner side of the support seat 2205 and the radial outer side of the axial translation Lorentz magnetic bearing 2206 stator component and is installed on the axial translation Lorentz magnetic bearing 2206 stator component through thread fit.
Fig. 13 is a cross-sectional view of an external motion sub-assembly 2203 of the magnetic support adjustment platform 22 according to an embodiment of the present invention, wherein the external motion sub-assembly 2203 mainly comprises: an outer magnetic ring 220301, an upper outer magnetic steel 220601, an outer magnetism isolating ring 220602 and a lower outer magnetic steel 220603; the outer magnetic conductive ring 220301 is located on the radial outer side of the upper outer magnetic steel 220601, the outer magnetic isolation ring 220602 and the lower outer magnetic steel 220603, the upper outer magnetic steel 220601 is located on the upper half portion of the inner cylindrical surface of the outer magnetic conductive ring 220301 and is fixedly mounted on the outer magnetic conductive ring 220301 through the clamping grooves and epoxy resin glue, the outer magnetic isolation ring 220602 is located in the middle of the inner cylindrical surface of the outer magnetic conductive ring 220301 and is fixedly mounted on the outer magnetic conductive ring 220301 through fastening screws, and the lower outer magnetic steel 220603 is located on the lower half portion of the inner cylindrical surface of the outer magnetic conductive ring 220301 and is fixedly mounted on the outer magnetic conductive ring 220301 through the clamping grooves and the epoxy resin glue.
Fig. 14a is a cross-sectional view of a mover assembly 2204 in a magnetically supported adjusting platform 22 according to an embodiment of the present invention, fig. 14b is a schematic three-dimensional structure diagram of the mover assembly 2204 in the magnetically supported adjusting platform 22 according to an embodiment of the present invention, and the inner mover assembly 2204 mainly includes: an inner magnetic conductive ring 220401, an upper inner magnetic steel 220604, an inner magnetic isolation ring 220605, a lower inner magnetic steel 220606 and a rotary magnetic steel 220701; the inner magnetic conductive ring 220401 is located on the radial inner side of the upper inner magnetic steel 220604, the inner magnetic isolation ring 220605, the lower inner magnetic steel 220606 and the rotary magnetic steel 220701, the upper inner magnetic steel 220604 is located on the upper half part of the outer side of the cylindrical surface of the inner magnetic conductive ring 220401 and is fixed on the inner magnetic conductive ring 220401 through a clamping groove and epoxy resin glue, the inner magnetic isolation ring 220605 is located in the middle of the outer side of the cylindrical surface of the inner magnetic conductive ring 220401 and is mounted on the inner magnetic conductive ring 220401 through fastening screws, the lower inner magnetic steel 220606 is located on the upper half part of the outer side of the cylindrical surface of the inner magnetic conductive ring 220401 and is fixed on the inner magnetic conductive ring 220401 through a clamping groove and epoxy resin glue, the rotary magnetic steel 220701 is located in a clamping groove at the bottom of a central platform of the inner magnetic conductive ring 220401, the rotary magnetic steel 220701 is uniformly arranged in an annular shape and is magnetized in the up-down direction, and the adjacent magnetic steels are opposite in the magnetizing direction and are fixed on the inner magnetic conductive ring 220401 through epoxy resin glue.
Fig. 15 is a cross-sectional view of an axial-translation lorentz magnetic bearing 2206 according to an embodiment of the present invention, where the axial-translation lorentz magnetic bearing 2206 mainly includes an outer magnetic ring 220301, an inner magnetic ring 220401, an upper outer magnetic steel 220601, an outer magnetism isolating ring 220602, a lower outer magnetic steel 220603, an upper inner magnetic steel 220604, an inner magnetism isolating ring 220605, a lower inner magnetic steel 220606, a framework 220607, an upper axial levitation winding 220608, a lower axial levitation winding 220609, and a connecting plate 220610; a certain cylindrical shell gap is left between the inner cylindrical surface of the outer magnetic conductive ring 220301 and the outer cylindrical surface of the inner magnetic conductive ring 220401 to form a radial cylindrical shell air gap 2217, and taking the magnetic flux of the + X-side channel as an example, the permanent magnetic flux path is as follows: the magnetic flux emanates from the N pole of the upper outer magnet 220601, through the outer magnetic ring 220301 to the S pole of the lower outer magnet 220603, emanates from the N pole of the lower outer magnet 220603, passes through the lower end of the radial column shell air gap 2217 and the lower axial levitation winding 220609, reaches the S pole of the lower inner magnet 220606, emanates from the N pole of the lower inner magnet 220606, passes through the inner magnetic ring 220401 to the S pole of the upper inner magnet 220604, emanates from the N pole of the upper inner magnet 220604, passes through the upper end of the radial column shell air gap 2217 and the upper axial levitation winding 220608, and reaches the S pole of the upper outer magnet 220601.
Fig. 16 is a cross-sectional view of the magnetic support adjustment platform 22 of the present invention illustrating an axially translated lorentz magnetic bearing 2206 stator assembly, wherein the axially translated lorentz magnetic bearing 2206 stator assembly mainly comprises: the transformer comprises a framework 220607, an upper axial suspension winding 220608, a lower axial suspension winding 220609 and a connecting plate 220610; the framework 220607 is located on the radial inner side of the upper axial suspension winding 220608, the lower axial suspension winding 220609 and the connecting plate 220610, the upper axial suspension winding 220608 and the lower axial suspension winding 220609 are located on the radial outer side of the framework 220607, the upper axial suspension winding 220608 and the lower axial suspension winding 220609 are respectively wound on the upper cylindrical surface and the lower cylindrical surface of the framework 220607 and fixed on the framework 220607 through epoxy resin glue, and the connecting plate 220610 is located on the radial outer side of the framework 220607 and installed on the outer wall of the lower end of the framework 220607 through fastening screws.
Fig. 17 is a cross-sectional view of an axial rotating planar motor 2207 according to an embodiment of the present invention, wherein the axial rotating planar motor 2207 mainly includes: the rotary magnetic steel 220701, the winding assembling plate 220702 and the rotary winding 220703, a certain thin-wall gap is reserved between the lower end plane of the rotary magnetic steel 220701 and the upper end surface of the winding assembling plate 220702, and an axial thin-wall gap 2218 is formed; the working principle is as shown in fig. 17, the magnetizing directions of the adjacent magnetic steels are opposite, the coils below the two magnetic steels are electrified with radially outward and radially inward currents, ampere force in the same rotating direction is generated in a horizontal plane, and the motor is driven to rotate.
Fig. 18 is a process diagram of an embodiment of the present invention, and the laser lift-off bulk transfer apparatus is divided into four operation modes:
normal mode (00), axial translation mode (01), axial rotation mode (10) and compound mode (11). When the chip is aligned with the welding spot of the target substrate and can be completely peeled off, the massive transfer device controller executes a '00' mode, the linear motor is used for driving the conveying mechanism to realize the macro-motion alignment of the glass plate and the target substrate, the positions of the chip on the glass plate and the welding spot on the target substrate are determined by the industrial CCD camera, and the chip is peeled off to the target welding spot of the driving circuit board by means of laser ablation of the crystal film. When the energy of the laser is not enough to completely peel off the chip to the target substrate, the massive transfer device controller executes a '01' mode, detects the distance between the chip and the glass board loading platform through an axial displacement sensor on the magnetic support platform, adjusts the magnitude and the direction of the current of an axial translation coil by using an axial translation Lorentz magnetic bearing controller, drives the target substrate to move axially, realizes the contact between the position of the chip and the corresponding welding spot position of the target substrate, and completes the transfer of the chip. When the corresponding welding spot position of the chip and the target substrate has a certain small-angle deviation, the massive transfer device controller executes a '10' mode, measures the deviation angle by means of an industrial CCD camera, adjusts the current magnitude and direction of an axial rotation coil by an axial rotation plane motor controller, drives the target substrate to rotate, enables the chip to be aligned with the corresponding welding spot position of the target substrate, and peels the chip onto the target substrate by means of high-energy laser to complete chip transfer. When the energy of the laser is not enough to completely peel off the chip to the target substrate and the position of the chip and the corresponding welding point of the target substrate has a certain small-angle deviation, the massive transfer device controller executes a mode 11, the target substrate is rotated through the magnetic supporting platform, the welding point of the target substrate is aligned with the chip on the glass plate, the axial translation of the magnetic supporting platform is utilized to realize the contact between the position of the LED chip and the corresponding welding point of the target substrate, and the chip transfer is completed.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims. The information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art that is already known to a person skilled in the art.

Claims (10)

1. A laser peeling bulk transfer device based on a combined type supporting platform is characterized by mainly comprising a laser camera system, a glass plate conveying system and a substrate conveying system;
the laser camera system mainly includes: the device comprises a marble platform (1), a laser camera supporting beam (2), a laser camera mounting plate (3), a left camera component (4A), a right camera component (4B), a laser head (5), a left light source (6A) and a right light source (6B);
the glass sheet delivery system generally comprises: the device comprises a left support (7A), a right support (7B), a left outer guide rail (8A), a left inner guide rail (8B), a right outer guide rail (8C), a right inner guide rail (8D), a left linear motor (9A), a right linear motor (9B), a left front limiting plate (10A), a left rear limiting plate (10B), a right front limiting plate (10C), a right rear limiting plate (10D), a glass plate conveying frame assembly (11), an upper X-direction grating ruler (12), a glass plate carrying platform assembly (13) and an upper Y-direction grating ruler (14);
the substrate transfer system mainly includes: the device comprises a left guide rail (15A), a right guide rail (15B), a lower X-direction grating ruler (16), a substrate conveying frame linear motor (17), a front limiting block (18A), a rear limiting block (18B), a substrate conveying frame assembly (19), a fixing plate assembly (20), a lower Y-direction grating ruler (21) and a magnetic support adjusting platform (22);
the marble platform (1) is positioned below the laser camera supporting beam (2), the laser camera mounting plate (3), the left camera component (4A), the right camera component (4B), the laser head (5), the left light source (6A) and the right light source (6B), the laser camera supporting beam (2) is positioned above the marble platform (1) and is mounted on the upper surface of the marble platform (1) through fastening screws, the laser camera mounting plate (3) is positioned at the center of the front surface of the horizontal beam of the laser camera supporting beam (2) and is mounted on the laser camera supporting beam (2) through the fastening screws, the left camera component (4A) and the right camera component (4B) are symmetrically distributed on the left side and the right side of the front surface of the laser camera mounting plate (3) and are mounted on the laser camera mounting plate (3) through the fastening screws, the laser head (5) is positioned at the center of the front surface of the laser camera mounting plate (3), the laser head (5) is positioned between the left camera component (4A) and the right camera component (4B) and is fixed on the laser camera mounting plate (3) through fastening screws, the left light source (6A) and the right light source (6B) are respectively positioned at the lower ends of the left camera component (4A) and the right camera component (4B) and are respectively fixed at the lower ends of the left camera component (4A) and the right camera component (4B) through fastening screws, the left support (7A) and the right support (7B) are respectively positioned at the left side and the right side of the upper surface of the marble platform (1), the left support (7A) and the right support (7B) are positioned at the inner side of the laser camera supporting beam (2), the left support (7A) and the right support (7B) are positioned at the outer side of the left light source (6A) and the right light source (6B) and are mounted on the marble platform (1) through fastening screws
On, the left outer guide rail (8A) and the left inner guide rail (8B) are symmetrically distributed on the upper surface of the left support (7A) and are installed on the left support (7A) through fastening screws, the right outer guide rail (8C) and the right inner guide rail (8D) are symmetrically distributed on the upper surface of the right support (7B) and are installed on the right support (7B) through fastening screws, the left linear motor (9A) is located on the upper surface of the left support (7A), the left linear motor (9A) is located between the left outer guide rail (8A) and the left inner guide rail (8B) and is installed on the left support (7A) through fastening screws, the right linear motor (9B) is located on the upper surface of the right support (7B), the right linear motor (9B) is located between the right outer guide rail (8C) and the right inner guide rail (8D) and is installed on the right support (7B) through fastening screws, and the left front limiting plate (10A) and the left rear limiting plate (10B) are respectively located on the upper surface of the front end and the rear end of the left support (7A) The upper end of the glass plate conveying frame assembly is arranged on a left support (7A) through fastening screws, a right front limiting plate (10C) and a right rear limiting plate (10D) are respectively arranged on the upper end of the front surface and the upper end of the rear surface of a right support (7B) and are arranged on the right support (7B) through fastening screws, a glass plate conveying frame assembly (11) is arranged on a left outer guide rail (8A), a left inner guide rail (8B), a right outer guide rail (8C) and a right inner guide rail (8D), the glass plate conveying frame assembly (11) is arranged below a left light source (6A) and a right light source (6B) and is clamped on the left outer guide rail (8A), the left inner guide rail (8B), the right outer guide rail (8C) and the right inner guide rail (8D) through a sliding block on a bottom plate of the glass plate conveying frame assembly (11), an upper X-direction ruler (12) is arranged on the upper edge of the right side surface of the left support (7A) and is adhered to the left support (7A) through epoxy resin glue, the reading head of the upper X-direction grating ruler (12) is positioned on the left side of the front surface of the glass plate conveying frame assembly (11), the reading head of the upper X-direction grating ruler (12) is positioned on the right side of the left support (7A) and is installed on the glass plate conveying frame assembly (11) through fastening screws, the glass plate carrier assembly (13) is positioned on the glass plate conveying frame assembly (11), the glass plate carrier assembly (13) is positioned below the left light source (6A) and the right light source (6B) and is clamped on the glass plate conveying frame assembly (11) through a sliding block at the bottom end of the glass plate carrier assembly (13), the upper Y-direction grating ruler (14) is positioned on the inner surface of a front baffle plate of the glass plate conveying frame assembly (11) and is fixed on the glass plate conveying frame assembly (11) through epoxy resin glue, the reading head of the upper Y-direction grating ruler (14) is positioned on the front side edge of the upper surface of the glass plate carrier assembly (13), and the reading head of the upper Y-direction grating ruler (14) is positioned behind the upper Y-direction grating ruler (14), and is installed on a glass plate carrying platform component (13) through fastening screws, a left guide rail (15A) and a right guide rail (15B) are symmetrically distributed on the two sides of the central line of the upper surface of a marble platform (1) in a left-right mode, the left guide rail (15A) and the right guide rail (15B) are positioned on the inner sides of a left support (7A) and a right support (7B) and are installed on the marble platform (1) through the fastening screws, a lower X-direction grating ruler (16) is positioned on the left side of the left guide rail (15A), the lower X-direction grating ruler (16) is positioned on the right side of the left support (7A) and is installed on the marble platform (1) through the fastening screws, a stator of a substrate conveying frame linear motor (17) is positioned on the central line of the upper surface of the marble platform (1), the stator of the substrate conveying frame linear motor (17) is positioned between the left guide rail (15A) and the right guide rail (15B) and is installed on the marble platform (1) through the fastening screws, the front limiting block (18A) and the rear limiting block (18B) are respectively positioned on the front side and the rear side of the upper surface of the marble platform (1), the front limiting block (18A) and the rear limiting block (18B) are positioned between a stator of a linear motor (17) of a substrate conveying frame and a right guide rail (15B) and are installed on the marble platform (1) through fastening screws, the substrate conveying frame assembly (19) is positioned above the stators of the left guide rail (15A), the right guide rail (15B) and the substrate conveying frame linear motor (17), the substrate conveying frame assembly (19) is positioned below the glass plate conveying frame assembly (11) and is clamped on the left guide rail (15A) and the right guide rail (15B) through a sliding block at the bottom of the substrate conveying frame assembly (19), the fixed plate assembly (20) is positioned above the substrate conveying frame assembly (19), and is clamped on the substrate conveying frame assembly (19) through a sliding block at the bottom of the fixed plate assembly (20), the lower Y-direction grating ruler (21) is located on the front side surface of the substrate conveying frame assembly (19) and is attached to the substrate conveying frame assembly (19) through epoxy resin glue, the reading head of the lower Y-direction grating ruler (21) is located in the center of the front side surface of the fixed plate assembly (20) and is mounted on the fixed plate assembly (20) through fastening screws, and the magnetic support adjusting platform (22) is located above the fixed plate assembly (20) and is mounted on the fixed plate assembly (20) through the fastening screws.
2. The composite support platform based laser lift-off bulk transfer apparatus of claim 1, wherein: the camera assembly (4) comprises a camera fixing plate (401), a camera (402), a camera upper guide sleeve (403), a camera lower guide sleeve (404), a left fixing plate (405), a right fixing plate (406) and a light source mounting plate (407).
3. The composite support platform based laser lift-off bulk transfer apparatus of claim 1, wherein: the glass plate conveying frame assembly (11) comprises a left outer front sliding block (1101A), a left outer rear sliding block (1101B), a left inner front sliding block (1101C), a left inner rear sliding block (1101D), a right outer front sliding block (1101E), a right outer rear sliding block (1101F), a right inner front sliding block (1101G), a right inner rear sliding block (1101H), a glass plate conveying frame main body (1102), a glass plate carrier table front guide rail (1103A), a glass plate carrier table rear guide rail (1103B), a glass plate carrier table motor stator (1104), a left linear motor connecting plate (1105), a right linear motor connecting plate (1106), a left linear motor rotor (1107) and a right linear motor rotor (1108).
4. The composite support platform based laser lift-off bulk transfer apparatus of claim 1, wherein: the glass plate carrying platform assembly (13) comprises a left front sliding block (1301A), a left rear sliding block (1301B), a right front sliding block (1301C), a right rear sliding block (1301D), a glass plate carrying platform main body (1302), a motor connecting plate (1303) and a glass plate carrying platform motor mover (1304).
5. The composite support platform based laser lift-off bulk transfer apparatus of claim 1, wherein: the substrate conveying frame assembly (19) comprises a lower left front sliding block (1901A), a lower left rear sliding block (1901B), a lower right front sliding block (1901C), a lower right rear sliding block (1901D), a substrate conveying system conveying frame main body (1902), a substrate conveying frame left guide rail (1903A), a substrate conveying frame right guide rail (1903B), a substrate left limiting block (1904A), a substrate right limiting block (1904B) and an adjusting platform fixing plate linear motor stator portion (1905).
6. The composite support platform based laser lift-off bulk transfer apparatus of claim 1, wherein: the fixed plate component (20) mainly comprises an adjusting platform fixed plate main body (2001), an upper left front sliding block (2002A), an upper left rear sliding block (2002B), an upper right front sliding block (2002C), an upper right rear sliding block (2002D) and an adjusting platform fixed plate linear motor sub-part (2003).
7. The composite support platform based laser lift-off bulk transfer apparatus of claim 1, wherein: the magnetic support adjusting platform (22) mainly comprises a rotor system and a stator system, wherein the rotor system mainly comprises: the table top (2201), the photoelectric coded disc (2202) rotor assembly, the outer rotor assembly (2203) and the inner rotor assembly (2204); the stator system mainly includes: photoelectric coded disc (2202) stator assembly, supporting seat (2205), axial translation Lorentz magnetic bearing (2206) stator assembly, axial rotation plane motor (2207) stator assembly, axial displacement sensor support (2208), left axial displacement sensor (2209A) and right axial displacement sensor
(2209B) The axial displacement sensor comprises a front axial displacement sensor (2209C), a rear axial displacement sensor (2209D), an upper left axial displacement sensor (2210A), an upper right axial displacement sensor (2210B), an upper front axial displacement sensor (2210C), an upper rear axial displacement sensor (2210D), an upper axial ball-protecting bearing (2211), an upper radial ball-protecting bearing (2212), a middle radial ball-protecting bearing (2213), a lower radial ball-protecting bearing (2214) and a lower axial ball-protecting bearing (2215).
8. The composite support platform based laser lift-off bulk transfer apparatus of claim 7, wherein: the axial translation Lorentz magnetic bearing (2206) comprises an outer magnetic conductive ring (220301), an inner magnetic conductive ring (220401), upper outer magnetic steel (220601), an outer magnetic isolation ring (220602), lower outer magnetic steel (220603), upper inner magnetic steel (220604), an inner magnetic isolation ring (220605), lower inner magnetic steel (220606), a framework (220607), an upper axial suspension winding (220608), a lower axial suspension winding (220609) and a connecting plate (220610).
9. The composite support platform based laser lift-off bulk transfer apparatus of claim 7, wherein: the axial rotation planar motor (2207) comprises a rotation magnetic steel (220701), a winding assembly plate (220702) and a rotation winding (220703).
10. The composite support platform based laser lift-off bulk transfer apparatus of claim 7, wherein: the left axial displacement sensor (2209A), the right axial displacement sensor (2209B), the front axial displacement sensor (2209C), the rear axial displacement sensor (2209D), the upper left axial displacement sensor (2210A), the upper right axial displacement sensor (2210B), the upper front axial displacement sensor (2210C) and the upper rear axial displacement sensor (2210D) are all eddy current displacement sensors.
CN202210340107.5A 2022-04-01 2022-04-01 Laser stripping huge transfer equipment based on combined type supporting platform Pending CN114743914A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116666508A (en) * 2023-06-28 2023-08-29 深圳市凯意科技有限公司 Mini/micro led laser huge transfer device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116666508A (en) * 2023-06-28 2023-08-29 深圳市凯意科技有限公司 Mini/micro led laser huge transfer device
CN116666508B (en) * 2023-06-28 2024-04-02 深圳市凯意科技有限公司 Mini/micro led laser huge transfer device

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