CN114739449B - High-air-permeability electronic skin flexible pressure temperature sensor and preparation method thereof - Google Patents
High-air-permeability electronic skin flexible pressure temperature sensor and preparation method thereof Download PDFInfo
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- CN114739449B CN114739449B CN202210239067.5A CN202210239067A CN114739449B CN 114739449 B CN114739449 B CN 114739449B CN 202210239067 A CN202210239067 A CN 202210239067A CN 114739449 B CN114739449 B CN 114739449B
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- 238000002360 preparation method Methods 0.000 title claims abstract description 8
- 238000010146 3D printing Methods 0.000 claims abstract description 8
- 230000000737 periodic effect Effects 0.000 claims abstract description 7
- 238000004519 manufacturing process Methods 0.000 claims abstract description 6
- 238000007641 inkjet printing Methods 0.000 claims abstract description 5
- 238000004377 microelectronic Methods 0.000 claims abstract description 5
- 238000009423 ventilation Methods 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 21
- 239000011148 porous material Substances 0.000 claims description 14
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 12
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 11
- -1 polydimethylsiloxane Polymers 0.000 claims description 10
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 238000007639 printing Methods 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000000741 silica gel Substances 0.000 claims description 6
- 229910002027 silica gel Inorganic materials 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 239000002086 nanomaterial Substances 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- 239000002042 Silver nanowire Substances 0.000 claims description 4
- 239000002041 carbon nanotube Substances 0.000 claims description 4
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 4
- 229910021389 graphene Inorganic materials 0.000 claims description 4
- 239000011859 microparticle Substances 0.000 claims description 4
- 229920002799 BoPET Polymers 0.000 claims description 3
- 238000001125 extrusion Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 3
- 239000011664 nicotinic acid Substances 0.000 abstract description 7
- 230000035699 permeability Effects 0.000 abstract description 5
- 210000003491 skin Anatomy 0.000 description 19
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 5
- 238000011160 research Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000008447 perception Effects 0.000 description 2
- 206010016936 Folliculitis Diseases 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
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- 230000006870 function Effects 0.000 description 1
- 230000003779 hair growth Effects 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000028327 secretion Effects 0.000 description 1
- 208000017520 skin disease Diseases 0.000 description 1
- 230000036559 skin health Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y80/00—Products made by additive manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/0041—Digital printing on surfaces other than ordinary paper
- B41M5/0047—Digital printing on surfaces other than ordinary paper by ink-jet printing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/0041—Digital printing on surfaces other than ordinary paper
- B41M5/0064—Digital printing on surfaces other than ordinary paper on plastics, horn, rubber, or other organic polymers
Abstract
The invention belongs to the technical field of flexible sensor manufacturing, and relates to a high-ventilation electronic skin flexible pressure temperature sensor and a preparation method thereof; the pressure and temperature sensor comprises a flexible porous net structure, a plurality of pressure sensing units and a flexible temperature sensor, wherein the pressure sensing units and the flexible temperature sensor are arranged on the flexible porous net structure, the pressure sensing units are distributed on grid crossing nodes of the flexible porous net structure, and the pressure sensing units form a pressure sensing array; the flexible temperature sensor is arranged around the pressure sensing array in a periodic square wave structure; through the flexible porous net-shaped main body structure of 3D printing, better air permeability of the electronic skin flexible pressure temperature sensing array is realized; the flexible temperature sensor based on the resistance signals is combined with the flexible temperature sensor for microelectronic ink-jet printing, and the temperature and the pressure of the resistance signals are sensed simultaneously, so that the bionic high-resolution tactile sensing close to the skin of a human body is realized.
Description
Technical Field
The invention belongs to the technical field of flexible sensor manufacturing, and relates to a high-air-permeability electronic skin flexible pressure temperature sensor and a preparation method thereof.
Background
Electronic skin flexible sensing arrays are receiving increasing research attention for their broad and interesting application prospects in wearable devices. Practical functions such as noninvasive health monitoring and real-time motion sensing have been realized by various patches attached to the skin or stretchable electronic circuits. However, most of these wearable devices employ a closed structure, easy to prepare but not comfortable to wear. Long-term blockage of the skin surface can affect skin health, impede secretion drainage, and cause folliculitis or other skin disorders. The electronic skin in actual use for a long time should have good air permeability. However, there are few reports on this aspect of the research.
In order to simulate the touch of human skin, the electronic skin needs to sense temperature and pressure simultaneously. Because of the similar choice of materials, temperature and pressure tend to affect the sensor simultaneously. Researchers typically employ different sensing principles, such as capacitive pressure sensors and resistive temperature sensors, to distinguish between temperature and pressure by comparing the signals of the two sensors. The use of different temperature and pressure output systems can present greater difficulties in the acquisition and processing of electronic skin signals. The research of the resistance type temperature-pressure cooperative sensing electronic skin can simplify data acquisition and energy supply equipment, and has important practical significance.
Disclosure of Invention
The invention overcomes the defects of the prior art and provides a high-ventilation electronic skin flexible pressure temperature sensor and a preparation method thereof. The electronic skin realizes simultaneous and separate sensing of temperature and pressure based on resistance signals, is close to bionic high-resolution tactile sensing of human skin, and has a porous high-air permeability structure.
In order to achieve the above purpose, the present invention is realized by the following technical scheme.
The high-permeability electronic skin flexible pressure temperature sensor comprises a flexible porous net structure, a plurality of pressure sensing units and a flexible temperature sensor, wherein the pressure sensing units and the flexible temperature sensor are arranged on the flexible porous net structure, the pressure sensing units are distributed on grid crossing nodes of the flexible porous net structure, and the pressure sensing units form a pressure sensing array; the flexible temperature sensor is arranged around the pressure sensing array in a periodic square wave structure.
Preferably, the flexible porous network consists of equally spaced silica gel threads intersecting 90 °.
More preferably, the center distance of the silica gel wires is 0.6-1.5 mm, and the thickness of the flexible porous net structure is 1-1.2 mm.
More preferably, the area of the holes of the flexible porous net structure is more than or equal to 400 mu m multiplied by 400 mu m, and the density of the holes is more than or equal to 100 cm -2 。
Preferably, the sensitive unit layer material of the pressure sensing unit includes polydimethylsiloxane, carbon nanotubes, silver nanowires, and graphene.
Preferably, the pressure sensing unit is a hollow pore microstructure with a diameter of 30-60 mu m.
Preferably, the flexible temperature sensor is prepared by ink-jet printing of silver nano ink on the surface of the PET flexible film.
The preparation method of the pressure and temperature sensor comprises the following steps:
a) Preparing a flexible substrate material and a pressure sensitive material of the pressure sensing unit, printing by a 3D printer to obtain a flexible porous net structure, and printing the pressure sensing unit on grid crossing nodes of the flexible porous net structure to form a pressure sensing array.
b) And heating and curing the pressure sensing array, removing the water-soluble particle sacrificial material on the pressure sensing unit, and preparing the pore microstructure in the sensitive layer.
c) And printing and preparing the flexible temperature sensor with the periodic square wave structure on the PET film with the thickness of 30-100 mu m by using a microelectronic ink-jet printer.
d) Attaching the flexible temperature sensor to the periphery of the pressure sensing array, and leading out each sensor electrode by using a flat cable.
Preferably, the flexible substrate material of the extrudable 3D-printed pressure sensing unit is formulated by mixing polydimethylsiloxane SE1700 and Sylgard 184 in a mass ratio of 7:3-9:1.
More preferably, the pressure sensitive material of the pressure sensing unit capable of being extruded for 3D printing is prepared by mixing polydimethylsiloxane SE1700, the conductive nano-material and the water-soluble micro-particles according to the mass ratio of 12:1:2.
Compared with the prior art, the invention has the following beneficial effects:
each pressure sensing unit in the bionic high-resolution pressure sensing array is positioned on a cross node in a flexible porous net structure, and the spatial resolution of the pressure sensing array reaches 100 cm -2 Near the tactile resolution of the human fingertip.
The sensitive unit layer material in the bionic high-resolution pressure sensing array is mixed with conductive nano materials such as carbon nano tubes, silver nano wires or graphene by using Polydimethylsiloxane (PDMS), and hollow pore microstructures with diameters of 30-60 mu m are prepared by using a sacrificial template method so as to improve the sensitivity of the pressure sensor. Meanwhile, the flexible temperature sensor is designed to relieve the stress on the surface of the temperature sensor under stretching through patterning.
The invention utilizes the multi-material direct-writing 3D printing technology to realize bionic high-resolution touch perception close to human skin, combines a flexible temperature sensor of microelectronic ink-jet printing, and simultaneously respectively perceives the temperature and the pressure based on resistance signals. And in pressure-sensitive units by sacrificial template methods the pore microstructure is prepared to improve the pressure sensing sensitivity. Through the flexible porous netted main body structure of 3D printing, realize the better gas permeability of the flexible pressure temperature sensing array of electron skin.
Drawings
Fig. 1 is a schematic structural diagram of a pressure-temperature sensor according to the present invention.
FIG. 2 is a schematic diagram of a pressure sensing array.
FIG. 3 is a schematic diagram of a flexible temperature sensor.
FIG. 4 is a pressure sensor sensitive layer SEM characterization of internal pore microstructure: wherein figure a is a cross-section of the pressure sensor and figure b is an enlarged view of a single pore microstructure in the pressure sensor.
Fig. 5 is a schematic diagram of a hair penetration pressure temperature sensor.
FIG. 6 is a graph of flexible pressure sensor pressure-resistance response test.
Figure 7 is an initial state diagram of each cell resistance when the pressure sensing array is not under pressure, the left side of the diagram is a corresponding test object;
FIG. 8 is a graph of the change in resistance of each cell when the edge of the pressure sensing array is subjected to pressure, wherein the left side of the graph is a corresponding test object;
FIG. 9 is a graph of the change in resistance of each cell when the center of the array is pressurized, wherein the left side of the graph is a corresponding test object;
FIG. 10 is a graph showing temperature-resistance response test of a flexible temperature sensor according to an embodiment.
In the figure, 1 a flexible porous mesh structure, 2 a pressure sensing unit (a crossing node of a transverse line and a longitudinal line), and 3 a flexible temperature sensor.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the invention is further described in detail by combining the embodiments and the drawings. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. The following describes the technical scheme of the present invention in detail with reference to examples and drawings, but the scope of protection is not limited thereto.
As shown in fig. 1-5, the high-permeability electronic skin flexible pressure and temperature sensor comprises a flexible porous mesh structure 1, a plurality of pressure sensing units 2 and flexible temperature sensors 3, wherein the pressure sensing units 2 are arranged on the flexible porous mesh structure 1, the pressure sensing units 2 are distributed on grid crossing nodes of the flexible porous mesh structure 1, and the pressure sensing units 2 form a pressure sensing array; the flexible temperature sensor 3 is arranged around the pressure sensing array in a periodic square wave structure. Specific:
the flexible porous net structure 1 is composed of 3 layers of equidistant printed silica gel lines which are crossed by 90 degrees, the center distance of the silica gel lines is 0.6-1.5 mm, and the total thickness of the flexible porous net structure is about 1-1.2 mm.
The size of the holes which are vertically penetrated in the flexible porous net structure 1 is not less than 400 mu m multiplied by 400 mu m and is larger than the diameter of pores of a human body; the density of the holes is not less than 100 cm -2 Is greater than the density of pores on the epidermis of the limbs of a human body.
Each pressure sensing unit 2 in the bionic high-resolution pressure sensing array is positioned on the crossing node of the grid of the flexible porous net structure 1, and the spatial resolution of the pressure sensing array reaches 100 cm -2 Near the tactile resolution of the human fingertip.
The sensitive unit layer material in the bionic high-resolution pressure sensing array is mixed with conductive nano materials such as carbon nano tubes, silver nano wires or graphene by using Polydimethylsiloxane (PDMS), and hollow pore microstructures with diameters of 30-60 mu m are prepared by using a sacrificial template method so as to improve the sensitivity of the pressure sensor.
The flexible temperature sensor 3 is prepared by ink-jet printing of silver nano ink on the surface of a PET flexible film, and stress on the surface of the temperature sensor under stretching is relieved through graphical design.
The preparation method of the high-permeability electronic skin flexible pressure and temperature sensor comprises the following steps:
in a first step, a flexible substrate material of the extrudable 3D-printable pressure sensing cell 2 is formulated in a ratio of 7:3 to 9:1 by mass of two polydimethylsiloxanes SE1700 and Sylgard 184.
And secondly, preparing the pressure sensitive material of the pressure sensing unit 2 capable of being subjected to extrusion type 3D printing according to the mass ratio of the polydimethylsiloxane SE1700, the conductive nano material and the water-soluble microparticles being 12:1:2.
And thirdly, drawing a 3D printing model of the flexible porous net-shaped structure, wherein the line width of the net-shaped structure is 400-600 mu m, the line center distance is 400-600 mu m, and the slice thickness is 360-400 mu m.
And fourthly, respectively adding the prepared 3D printing flexible substrate material, the pressure sensitive material and the conductive silver adhesive into a direct-writing 3D printer, and printing the pressure sensing array according to a drawn 3D model.
And fifthly, heating the 3D printed pressure sensing array in a drying oven to be solidified, ultrasonically treating the solidified pressure sensing array in deionized water to remove the water-soluble particle sacrificial material, and preparing the pore microstructure in the sensitive layer.
And sixthly, printing silver ink on the PET film with 30-100 mu m by using a microelectronic ink-jet printer to prepare a flexible temperature sensor, wherein the pattern of the sensor is designed into a periodic square wave structure so as to relieve stress applied during stretching, and the width of the sensor is 400-600 mu m so as to adapt to the line width of the pressure sensing array.
And seventh, attaching the flexible temperature sensor 3 to the periphery of the pressure sensing array, and leading out each sensor electrode by using a flat cable.
As shown in FIG. 5, the present invention has high air permeability, allows hair growth, and is advantageous for long-term wearing comfort of electronic skin through a mesh structure.
As shown in fig. 6-9, the present invention achieves high resolution spatial perception of external force stimuli with a high density pressure sensing array.
As shown in fig. 10, while the present invention achieves a linear response to ambient temperature over a wide range of 10-60 c.
While the invention has been described in detail in connection with specific preferred embodiments thereof, it is not to be construed as limited thereto, but rather as a result of a simple deduction or substitution by a person having ordinary skill in the art to which the invention pertains without departing from the scope of the invention defined by the appended claims.
Claims (9)
1. The preparation method of the high-permeability electronic skin flexible pressure temperature sensor is characterized by comprising the following steps of:
a) Preparing a flexible substrate material and a pressure sensitive material of a pressure sensing unit (2), printing out a flexible porous net structure (1) by a 3D printer, and printing the pressure sensing unit (2) on grid crossing nodes of the flexible porous net structure (1) to form a pressure sensing array;
b) Heating and solidifying the pressure sensing array, removing the water-soluble microparticle sacrificial material on the pressure sensing unit (2), and preparing a pore microstructure in the sensitive layer;
c) Printing a flexible temperature sensor (3) with a periodic square wave structure on a PET film with 30-100 mu m by using a microelectronic ink-jet printer;
d) Attaching a flexible temperature sensor (3) to the periphery of a pressure sensing array, and leading out each sensor electrode by using a flat cable;
the prepared pressure and temperature sensor comprises a flexible porous mesh structure (1), a plurality of pressure sensing units (2) and flexible temperature sensors (3) which are arranged on the flexible porous mesh structure (1), wherein the pressure sensing units (2) are distributed on grid crossing nodes of the flexible porous mesh structure (1), and the pressure sensing units (2) form a pressure sensing array; the flexible temperature sensor (3) is arranged around the pressure sensing array in a periodic square wave structure.
2. The method for manufacturing the high-air-permeability electronic skin flexible pressure temperature sensor according to claim 1, wherein the flexible porous network structure (1) is composed of equidistant silica gel lines crossing 90 degrees.
3. The method for manufacturing the high-ventilation electronic skin flexible pressure temperature sensor according to claim 2, wherein the center distance of silica gel wires is 0.6-1.5 mm, and the thickness of the flexible porous net-shaped structure (1) is 1-1.2 mm.
4. The method for manufacturing a high-permeability electronic skin flexible pressure temperature sensor according to claim 2 or 3, wherein the pore area of the flexible porous network structure (1) is more than or equal to 400 μm×400 μm, and the pore density is more than or equal to 100 cm -2 。
5. The method for preparing the high-air-permeability electronic skin flexible pressure temperature sensor according to claim 1, wherein the sensitive unit layer material of the pressure sensing unit (2) comprises polydimethylsiloxane, carbon nano tubes, silver nano wires and graphene.
6. The method for manufacturing the high-air-permeability electronic skin flexible pressure and temperature sensor according to claim 1 or 5, wherein the pressure sensing unit (2) is a hollow pore microstructure with a diameter of 30-60 μm.
7. The method for preparing the high-air-permeability electronic skin flexible pressure temperature sensor according to claim 1, wherein the flexible temperature sensor (3) is prepared by ink-jet printing of silver nano ink on the surface of a PET flexible film.
8. The method for preparing the high-air-permeability electronic skin flexible pressure temperature sensor according to claim 1, wherein the polydimethylsiloxane SE1700 and the Sylgard 184 are mixed according to the mass ratio of 7:3-9:1 to prepare the flexible substrate material of the pressure sensing unit (2) capable of being subjected to extrusion type 3D printing.
9. The method for preparing the high-air-permeability electronic skin flexible pressure temperature sensor according to claim 8, wherein the pressure sensitive material of the pressure sensing unit (2) capable of being printed in an extrusion mode is prepared by mixing polydimethylsiloxane SE1700, conductive nano-materials and water-soluble micro-particles according to a mass ratio of 12:1:2.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210239067.5A CN114739449B (en) | 2022-03-11 | 2022-03-11 | High-air-permeability electronic skin flexible pressure temperature sensor and preparation method thereof |
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| CN202210239067.5A CN114739449B (en) | 2022-03-11 | 2022-03-11 | High-air-permeability electronic skin flexible pressure temperature sensor and preparation method thereof |
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| CN114739449A CN114739449A (en) | 2022-07-12 |
| CN114739449B true CN114739449B (en) | 2024-02-02 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103411710A (en) * | 2013-08-12 | 2013-11-27 | 国家纳米科学中心 | Pressure sensor, electronic skin and touch screen equipment |
| JP2014108134A (en) * | 2012-11-30 | 2014-06-12 | Nippon Telegr & Teleph Corp <Ntt> | Conductor, conductor manufacturing method, pressure sensor using conductor, pressure sensor device, bioelectrode using conductor, and biosignal measurement device |
| CN109307565A (en) * | 2018-08-21 | 2019-02-05 | 厦门大学 | It is a kind of can induction pressure flexible electronic skin and preparation method thereof |
| CN111609955A (en) * | 2020-05-21 | 2020-09-01 | 浙江大学 | Flexible touch sensor array and preparation method thereof |
| CN113790741A (en) * | 2020-05-25 | 2021-12-14 | 武汉纺织大学 | Multifunctional sensing integrated flexible fabric-based sensor and application thereof |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017048979A1 (en) * | 2015-09-15 | 2017-03-23 | The Arizona Board Of Regents On Behalf Of The University Of Arizona | Smart textile to predict risk of diabetic foot ulcer |
| US10401241B2 (en) * | 2016-06-08 | 2019-09-03 | The University Of British Columbia | Surface sensor arrays using ionically conducting material |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014108134A (en) * | 2012-11-30 | 2014-06-12 | Nippon Telegr & Teleph Corp <Ntt> | Conductor, conductor manufacturing method, pressure sensor using conductor, pressure sensor device, bioelectrode using conductor, and biosignal measurement device |
| CN103411710A (en) * | 2013-08-12 | 2013-11-27 | 国家纳米科学中心 | Pressure sensor, electronic skin and touch screen equipment |
| CN109307565A (en) * | 2018-08-21 | 2019-02-05 | 厦门大学 | It is a kind of can induction pressure flexible electronic skin and preparation method thereof |
| CN111609955A (en) * | 2020-05-21 | 2020-09-01 | 浙江大学 | Flexible touch sensor array and preparation method thereof |
| CN113790741A (en) * | 2020-05-25 | 2021-12-14 | 武汉纺织大学 | Multifunctional sensing integrated flexible fabric-based sensor and application thereof |
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