CN114737242A - Special high-efficient electroplating barrel of MEMS shielded enclosure - Google Patents
Special high-efficient electroplating barrel of MEMS shielded enclosure Download PDFInfo
- Publication number
- CN114737242A CN114737242A CN202210458867.6A CN202210458867A CN114737242A CN 114737242 A CN114737242 A CN 114737242A CN 202210458867 A CN202210458867 A CN 202210458867A CN 114737242 A CN114737242 A CN 114737242A
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- electroplating
- roller
- mems
- special efficient
- liquid medicine
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- 238000009713 electroplating Methods 0.000 title claims abstract description 71
- 239000007788 liquid Substances 0.000 claims abstract description 39
- 239000003814 drug Substances 0.000 claims abstract description 32
- 230000002093 peripheral effect Effects 0.000 claims 2
- 238000007747 plating Methods 0.000 abstract description 11
- 239000011248 coating agent Substances 0.000 abstract description 5
- 238000000576 coating method Methods 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/16—Apparatus for electrolytic coating of small objects in bulk
- C25D17/18—Apparatus for electrolytic coating of small objects in bulk having closed containers
- C25D17/20—Horizontal barrels
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
The utility model provides a special high-efficient electroplating barrel of MEMS shielded enclosure, relates to electroplating device technical field, and including the plating bath, detachable rotation installs the cylinder in the plating bath, and the equipartition has the through-hole on the perisporium of cylinder, and coaxial cartridge has the liquid medicine exchange tube of rigidity in the cylinder, and the equipartition has the exchange hole on the perisporium of liquid medicine exchange tube, still is equipped with electrically conductive dish in the cylinder, is connected with the electrically conductive hammer on the electrically conductive dish. The invention solves the problems that when the device in the traditional technology is used for electroplating a product, the coating is uneven, the phenomenon similar to mottling is easy to occur, the marking and the recognition are poor in the later period, and the performance of the product is influenced.
Description
Technical Field
The invention relates to the technical field of electroplating devices, in particular to a special efficient electroplating roller for an MEMS (micro-electromechanical system) shielding case.
Background
Electroplating is a process of plating a thin layer of other metals or alloys on the surface of some metals by utilizing the electrolysis principle, a roller is an important part of barrel plating, the quality of the barrel plating is greatly influenced, and electroplating solution guide holes are arranged on the roller to complete the exchange of the electroplating solution inside and outside the roller. During the electroplating process, the roller is partially or completely immersed in the electroplating solution and rotates around the axial direction. When the parts are rolled and electroplated in the solution, the plated workpieces in the roller are kept in the roller and are simultaneously acted by electroplating solution entering the holes on the panel under the action of the rolling of the roller.
The existing MEMS electroplating roller is a conventional electroplating roller, and during electroplating operation, the problems of uneven electroplated layer and mottle of a certain proportion exist in products, and because the products are used for MEMS semiconductor packaging, the requirements on the thickness consistency and the appearance of the electroplated layer on the surface of a shell are strict, the uniformity difference of the electroplated layers in the same batch must be within 1um, and the precision of a gold-plated layer must be controlled within 5 nm.
The prior art discloses a patent with publication number CN109868499A, and the scheme includes the barrel, and the barrel both ends are equipped with feed inlet and discharge gate respectively, are equipped with guide structure between feed inlet and the discharge gate in the barrel, still provide an electroplating roller subassembly, including electroplating roller, roll drive arrangement as above, the electroplating roller and the electroplating roller subassembly that provide can continuous feeding and the ejection of compact, realize the continuous electroplating production.
However, the device gradually exposes the defects of the technology in production and use, and mainly shows the following aspects:
when the existing device is used for electroplating a product, a plating layer is uneven, the phenomenon of similar mottling is easy to occur, the problems of poor marking and identification are caused in the later period, and the performance of the product is influenced.
In view of the above, the prior art is obviously inconvenient and disadvantageous in practical use, and needs to be improved.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a special high-efficiency electroplating roller for an MEMS (micro-electromechanical systems) shielding case, which is used for solving the problems that when a product is electroplated by a device in the traditional technology, a coating is uneven, the phenomenon similar to speckles is easy to occur, so that the marking and recognition are poor in the later period, and the performance of the product is influenced.
In order to achieve the purpose, the invention provides the following technical scheme:
the utility model provides a special high-efficient electroplating barrel of MEMS shielded enclosure, includes the plating bath, detachable rotation installs the cylinder in the plating bath, the equipartition has the through-hole on the perisporium of cylinder, coaxial cartridge has the liquid medicine exchange tube of rigidity in the cylinder, the equipartition has the exchange hole on the perisporium of liquid medicine exchange tube, still be equipped with electrically conductive dish in the cylinder, be connected with the electrically conductive hammer on the electrically conductive dish.
As an optimized scheme, an inlet end of the liquid medicine exchange pipe is connected with a liquid inlet pipe, the liquid inlet pipe penetrates through the conductive disc to extend to the outside, and is connected with a first quick connection joint.
As an optimized scheme, a second quick connecting joint matched with the first quick connecting joint is further connected to the electroplating bath.
As an optimized scheme, the roller is a hexagonal roller, two ends of the hexagonal roller are fixedly connected with end covers, one surface of the hexagonal roller is provided with a taking and placing opening, the taking and placing opening is connected with a cover plate, and the cover plate is also uniformly provided with the through holes.
As an optimized scheme, the two end covers are respectively rotatably installed on the support, a V-shaped conductive seat is fixedly connected to the lower surface of the support, and a V-shaped conductive seat support matched with the V-shaped conductive seat is arranged at the upper end of the electroplating bath.
As an optimized scheme, the upper end part of the electroplating tank is also provided with a proximity switch.
As an optimized scheme, a gear set connected with the end cover is arranged on one of the supports, and a driving gear meshed with the gear set is further arranged on the electroplating bath.
As an optimized scheme, the electroplating bath is further connected with a liquid medicine exchange pump, the outlet end of the liquid medicine exchange pump is connected with the second quick connecting joint through a pipe body, and the inlet end of the liquid medicine exchange pump is connected with the inner cavity of the electroplating bath.
As an optimized scheme, the conductive hammer is connected to the conductive disc through a conductive wire.
Compared with the prior art, the invention has the beneficial effects that:
the quality of the electroplating coating is thoroughly improved, the electroplating efficiency is greatly improved, and the cost is reduced;
in the aspect of coating appearance, the problem of poor mottling caused by inconsistent coating thickness is thoroughly solved, the product yield reaches 100%, and the batch use of customers verifies that the marking is stable and reliable;
the requirements on the operation technique and skill of an operator are reduced, the standardized operation is facilitated, 1 machine with 1 person is adopted, the operation is promoted to 1 machine with 3 persons, and the labor cost is reduced;
the manufacturing cost is low, and the maintenance is convenient; the design is reasonable, and the matching among structures is precise; the operation is convenient and fast; the stability in the working process is improved; the parts are few, the process is simple and convenient, and the failure rate is low; the structure is simple, and the service life is long; simple and convenient operation and control, easy large-scale manufacture and installation and wide application range.
Drawings
In order to more clearly illustrate the detailed description of the invention or the technical solutions in the prior art, the drawings that are needed in the detailed description of the invention or the prior art will be briefly described below. Throughout the drawings, like elements or portions are generally identified by like reference numerals. In the drawings, elements or portions are not necessarily drawn to scale.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural view of the drum of the present invention;
FIG. 3 is a schematic view of the structure of the plating cell of the present invention.
In the figure: 1-a roller; 2-end cap; 3-cover plate; 4-a scaffold; 5-gear set; 6-V type conductive seat; 7-a liquid medicine exchange tube; 8-a conductive pad; 9-an electrically conductive wire; 10-a conductive hammer; 11-a liquid inlet pipe; 12-a first quick connect coupling; 13-a second quick connect coupling; 14-a liquid medicine exchange pump; a 15-V type conductive seat support; 16-a proximity switch; 17-drive gear.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and therefore are only examples, and the protection scope of the present invention is not limited thereby.
As shown in fig. 1 to 3, the special efficient electroplating roller for the MEMS shielding case comprises an electroplating bath, wherein the electroplating bath is detachably and rotatably mounted, through holes are uniformly distributed on the circumferential wall of the roller 1, a fixed-position liquid medicine exchange tube 7 is coaxially inserted into the roller 1, exchange holes are uniformly distributed on the circumferential wall of the liquid medicine exchange tube 7, a conductive disc 8 is further arranged in the roller 1, and the conductive disc 8 is connected with a conductive hammer 10.
The inlet end of the liquid medicine exchange tube 7 is connected with a liquid inlet tube 11, and the liquid inlet tube 11 penetrates through the conductive disc 8 to extend to the outside and is connected with a first quick connection joint 12.
The plating bath is also connected with a second quick connection joint 13 which is matched with the first quick connection joint 12.
The drum 1 is a hexagonal drum 1, two ends of the hexagonal drum 1 are fixedly connected with end covers 2, one surface of the hexagonal drum is provided with a taking and placing opening, the taking and placing opening is connected with a cover plate 3, and through holes are uniformly distributed in the cover plate 3.
The two end covers 2 are respectively rotatably arranged on the bracket 4, the lower surface of the bracket 4 is fixedly connected with a V-shaped conductive seat 6, and the upper end part of the electroplating bath is provided with a V-shaped conductive seat support 15 matched with the V-shaped conductive seat 6.
The upper end of the plating tank is also provided with a proximity switch 16.
One of the brackets 4 is provided with a gear set 5 connected with the end cover 2, the electroplating bath is also provided with a driving gear 17 meshed with the gear set 5, and the driving gear 17 is driven to rotate by a driving motor.
A liquid medicine exchange pump 14 is also connected to the electroplating bath, the outlet end of the liquid medicine exchange pump 14 is connected with the second quick connecting joint 13 through a pipe body, and the inlet end of the liquid medicine exchange pump 14 is connected with the inner cavity of the electroplating bath.
The conductive hammer 10 is connected to the conductive disc 8 by a conductive wire 9.
The roller 1 and the cover plate 3 are fixed by screws to form a closed cavity, the roller 1 and the cover plate 3 are respectively provided with a through hole with the diameter of 0.5-2.0 and used for liquid medicine exchange, two ends of each small hole are provided with C angles, and the hole intervals are arranged in an array of 2-5 mm. The roller 1 is designed in a regular hexahedron shape, is made of PP, and has the preferred thickness of 0.5-2.0 mm. The inside of the drum 1 is provided with a conductive hammer 10 and a conductive wheel. During electroplating, a product in the roller 1 is always in contact with the conductive hammer 10, the conductive hammer 10 is fixed on the conductive wheel through a flexible wire and is always connected with the conductive wheel, and the conductive wheel is connected with the V-shaped conductive seat 6 and is made of pure copper.
The gear set 5 is divided into 3, and the gear of the top is thick gear, and the gear 17 meshing with the groove body, and the pinion meshing in the middle of the cylinder 1 simultaneously, through the pinion again with the lower gear meshing with cylinder 1 connection, set up hollow structure in the middle of the lower gear, with cylinder 1 rotation center pin concentric, the centre bore is phi 17mm, liquid medicine exchange tube 7, from here out gets into cylinder 1.
The liquid medicine exchange tube 7 is made of a PP tube, through holes for liquid medicine exchange with the diameter of 0.5-2.0 are arranged on the cylindrical surface of the tube and are uniformly distributed on the circumferential surface according to the angle of 40-60 degrees, and the arrangement among the holes of each layer is preferably 2-5 mm. The tube diameter is preferably 8-16 mm. When the liquid medicine exchange speed is too fast or too slow, the flow of the liquid medicine can be accurately controlled by adjusting the throttle valve.
The working principle is as follows:
firstly, opening a cover plate 3 of a product, loading the product into a roller 1, wherein a conductive hammer 10 is arranged in the roller 1 and is always in a contact state with the product, and fixing the cover plate 3 by using a fixing screw to prevent the product from falling out when rolling;
secondly, the roller 1 is placed at a corresponding position of the electroplating bath by the travelling crane according to a program, when the roller 1 is placed in place, a first quick connecting joint 12 and a second quick connecting joint 13 for liquid medicine exchange are synchronously connected in place, the V-shaped conductive seat 6 is clamped on a V-shaped conductive seat support 15, current is applied to a conductive hammer 10 in the roller 1, and then a product is electrified; at the same time, the travel switch is actuated, so that the driving gear 17 and the liquid medicine exchange pump 14 work simultaneously to start the electroplating process.
In the electroplating process, the exchange of the liquid medicine is changed into the rapid exchange of the quantitative constant pressure from inside to outside compared with the original low-speed exchange of the drum 1 without constant pressure from outside to inside, the uniformity and the flow rate of the liquid medicine in the whole process are controllable, and the quality of the electroplating process is stable.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the embodiments of the present invention, and they should be construed as being covered by the appended claims and their equivalents.
Claims (9)
1. The utility model provides a special high-efficient electroplating barrel of MEMS shielded enclosure which characterized in that: the electroplating bath is characterized by comprising an electroplating bath, wherein a roller (1) is detachably and rotatably installed in the electroplating bath, through holes are uniformly distributed in the peripheral wall of the roller (1), a fixed-position liquid medicine exchange tube (7) is coaxially inserted in the roller (1), exchange holes are uniformly distributed in the peripheral wall of the liquid medicine exchange tube (7), a conductive disc (8) is further arranged in the roller (1), and a conductive hammer (10) is connected to the conductive disc (8).
2. The special efficient electroplating roller for the MEMS shielding case as claimed in claim 1, wherein the special efficient electroplating roller comprises: the inlet end of the liquid medicine exchange pipe (7) is connected with a liquid inlet pipe (11), and the liquid inlet pipe (11) penetrates through the conductive disc (8) to extend to the outside and is connected with a first quick connection joint (12).
3. The special efficient electroplating roller for the MEMS shielding case as claimed in claim 2, wherein the special efficient electroplating roller comprises: and a second quick connecting joint (13) matched with the first quick connecting joint (12) is also connected to the electroplating bath.
4. The special efficient electroplating roller for the MEMS shielding case as claimed in claim 1, wherein the special efficient electroplating roller comprises: the drum (1) is a hexagonal drum (1), the two ends of the hexagonal drum (1) are fixedly connected with end covers (2), one side of the hexagonal drum is provided with a taking and placing opening, the taking and placing opening is connected with a cover plate (3), and the cover plate (3) is also uniformly provided with through holes.
5. The special efficient electroplating roller for the MEMS shielding case as claimed in claim 4, wherein the special efficient electroplating roller comprises: the two end covers (2) are respectively rotatably arranged on the support (4), a V-shaped conductive seat (6) is fixedly connected to the lower surface of the support (4), and a V-shaped conductive seat support (15) matched with the V-shaped conductive seat (6) is arranged at the upper end of the electroplating bath.
6. The special efficient electroplating roller for the MEMS shielding case as claimed in claim 1, wherein the special efficient electroplating roller comprises: the upper end part of the electroplating bath is also provided with a proximity switch (16).
7. The special efficient electroplating roller for the MEMS shielding case as claimed in claim 5, wherein the special efficient electroplating roller comprises: the electroplating bath is characterized in that a gear set (5) connected with the end cover (2) is arranged on the support (4), and a driving gear (17) meshed with the gear set (5) is further arranged on the electroplating bath.
8. The special efficient electroplating roller for the MEMS shielding case as claimed in claim 3, wherein the special efficient electroplating roller comprises: and a liquid medicine exchange pump (14) is further connected to the electroplating bath, the outlet end of the liquid medicine exchange pump (14) is connected with the second quick connection joint (13) through a pipe body, and the inlet end of the liquid medicine exchange pump (14) is connected with the inner cavity of the electroplating bath.
9. The special efficient electroplating roller for the MEMS shielding case as claimed in claim 1, wherein the special efficient electroplating roller comprises: the conductive hammer (10) is connected to the conductive disc (8) through a conductive wire (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210458867.6A CN114737242B (en) | 2022-04-27 | 2022-04-27 | Special high-efficient electroplating roller of MEMS shield cover |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210458867.6A CN114737242B (en) | 2022-04-27 | 2022-04-27 | Special high-efficient electroplating roller of MEMS shield cover |
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| Publication Number | Publication Date |
|---|---|
| CN114737242A true CN114737242A (en) | 2022-07-12 |
| CN114737242B CN114737242B (en) | 2023-11-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210458867.6A Active CN114737242B (en) | 2022-04-27 | 2022-04-27 | Special high-efficient electroplating roller of MEMS shield cover |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104047044A (en) * | 2014-07-04 | 2014-09-17 | 旺诠科技(昆山)有限公司 | Circulation mechanism for filling electroplating liquid into electroplating barrel |
| CN104611758A (en) * | 2015-01-30 | 2015-05-13 | 广东保迪环保电镀设备有限公司 | Planetary barrel plating machine |
| CN212404343U (en) * | 2020-06-08 | 2021-01-26 | 包头市英思特稀磁新材料股份有限公司 | Novel barrel plating roller equipment |
| KR102278771B1 (en) * | 2021-03-05 | 2021-07-19 | 주식회사 광성금속 | Barrel Type Plating Apparatus Having Circulating Portion For Of Plating Solution |
| CN217677880U (en) * | 2022-04-27 | 2022-10-28 | 山东睿思精密工业有限公司 | Special high-efficient electroplating barrel of MEMS shield cover |
-
2022
- 2022-04-27 CN CN202210458867.6A patent/CN114737242B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104047044A (en) * | 2014-07-04 | 2014-09-17 | 旺诠科技(昆山)有限公司 | Circulation mechanism for filling electroplating liquid into electroplating barrel |
| CN104611758A (en) * | 2015-01-30 | 2015-05-13 | 广东保迪环保电镀设备有限公司 | Planetary barrel plating machine |
| CN212404343U (en) * | 2020-06-08 | 2021-01-26 | 包头市英思特稀磁新材料股份有限公司 | Novel barrel plating roller equipment |
| KR102278771B1 (en) * | 2021-03-05 | 2021-07-19 | 주식회사 광성금속 | Barrel Type Plating Apparatus Having Circulating Portion For Of Plating Solution |
| CN217677880U (en) * | 2022-04-27 | 2022-10-28 | 山东睿思精密工业有限公司 | Special high-efficient electroplating barrel of MEMS shield cover |
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| Publication number | Publication date |
|---|---|
| CN114737242B (en) | 2023-11-14 |
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Address after: 261000 Building 9, 3177 Yuehe Road, Weifang Economic Development Zone, Shandong Province Applicant after: Shandong Ruisi Precision Industry Co.,Ltd. Address before: 261000 Building 9, 3177 Yuehe Road, Weifang Economic Development Zone, Shandong Province Applicant before: WEIFANG YUYUAN ELECTRONICS Co.,Ltd. |
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