CN114720962B - All-solid-state laser radar OPA transmitting chip device based on electromagnetic heat control - Google Patents
All-solid-state laser radar OPA transmitting chip device based on electromagnetic heat control Download PDFInfo
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- CN114720962B CN114720962B CN202210368451.5A CN202210368451A CN114720962B CN 114720962 B CN114720962 B CN 114720962B CN 202210368451 A CN202210368451 A CN 202210368451A CN 114720962 B CN114720962 B CN 114720962B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/484—Transmitters
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/10—Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation
Abstract
The invention discloses an all-solid-state laser radar OPA transmitting chip device based on electromagnetic heat control, which belongs to the technical field of laser and solves the problems of unstable thermal tuning, poor heat dissipation performance and high optical signal loss in the prior art. According to the invention, the liquid metal heat dissipation micro-channel is arranged, the liquid metal is filled into the liquid metal heat dissipation micro-channel, the flowing direction and the flowing speed of the liquid metal are controlled by the magnetic support, so that the conduction heat of the fin column type graphene cooler is taken away quickly, the stability of optical signal thermal tuning is ensured, the optical fiber coupling transmission is adopted, a beam splitter and other optoelectronic devices are not needed, and the loss of optical signals in a laser radar transmitting chip is effectively reduced.
Description
Technical Field
The invention belongs to the technical field of laser, and particularly relates to an all-solid-state laser radar OPA transmitting chip device based on electromagnetic heat control.
Background
Along with the rapid development of radar technology, the application of laser radar in the fields of assistant driving, automatic driving, intelligent robots and the like is continuously expanded, the working principle of the laser radar is that laser at a laser source is emitted to a target object by an emitting chip, and a beam is controlled to steer through wavelength tuning and phase regulation to complete the remote scanning function of the beam; after the light beam contacts the target, a receiving chip of the laser radar receives an echo signal reflected by the target object, a detector array in the receiving chip performs multiple times of calculation processing on the echo signal to form a dense point cloud image, and the time for emitting and receiving the signal is calculated according to a flight time method, so that the environment recognition and distance detection of the laser radar are realized.
Laser radar is according to having or not mechanical rotating part classification, including mechanical laser radar and solid-state laser radar, traditional mechanical rotation type laser radar is expensive, its leading cause lies in present laser device, optical device and electronics, it is numerous and dispersed, the process variation is big, especially precision component debugging process is complicated, be difficult to realize batch production and popularization, and solid-state laser radar compares with mechanical laser radar, the size is less, the good than higher, measurement accuracy is higher relatively, can hide in the automobile body, can not destroy the appearance pleasing to the eye, therefore, laser radar's development direction will move towards solid-state from machinery.
The development of the CMOS process at present enables a system-level chip of a laser radar to be developed towards more miniaturization and integration, beam steering is the most important function in a transmitting chip, the size, the weight, the reliability and the cost of a traditional beam steering system are limited due to heavy optical devices and mechanical parts, a conventional laser radar transmitting chip is of a variable emitting type, the optical system is required to conduct fast and slow axis collimation of a light beam during emitting, a light emitting surface is parallel to a circuit board during slow axis collimation, if the directional angular resolution of the laser radar is required to be improved at the moment, a plurality of edge transmitting chips are required to be arrayed in the slow axis direction, and the slow axis size of the edge transmitting chips is large and generally in the order of hundreds of micrometers, so that the integration degree is lower in the limited size range of the chips, and the resolution of the laser radar in the far field direction of the vertical direction is not beneficial to improvement.
Most of laser radars in the market at present are single-line laser radars, such as 4 lines, 8 lines, 16 lines, 32 lines or 64 lines, where a line refers to that the laser radar can emit a corresponding beam of laser light, and the higher the line, the better the scanning performance in the vertical direction, if the radar is rotated along the axis in the vertical direction, a time interval needs to be set in each thread channel, a far-field light beam sequentially completes scanning in the vertical direction, and multiple scanning forms a point cloud to complete recognition.
Disclosure of Invention
The invention aims to provide an all-solid-state laser radar OPA transmitting chip device based on electromagnetic heat control, which has stable thermal tuning, good heat dissipation performance and low optical signal loss and aims at overcoming the defects in the prior art.
In order to achieve the technical purpose, the all-solid-state laser radar OPA transmitting chip device based on electromagnetic heat control adopts the technical scheme that:
an all-solid-state laser radar OPA transmitting chip device based on electromagnetic heat control comprises a shell with a U-shaped notch, wherein a cable connecting box is arranged on the surface of the bottom wall of the shell, the outer side of the cable connecting box is tightly attached to the inner wall of the shell, an electric connecting wire extends out of the bottom of the shell, the electric connecting wire axially extends towards the end face of the notch, a magnetic support which is erected on the surface of a liquid metal heat dissipation micro-channel in a bridge shape is arranged at the bottom of the electric connecting wire, and the tail end of the electric connecting wire is connected with a laser radar transmitting chip assembly arranged on the end face of the notch;
the laser radar transmitting chip assembly comprises bonding pads fixed at two ends of a notch through nuts, a laser radar transmitting chip is clamped in the middle of each bonding pad, chip electrodes at two ends of the laser radar transmitting chip are connected with the bonding pads, an optical fiber output box is arranged at the rear end of the laser radar transmitting chip, an optical fiber array extending to the surface of the rear end of a shell is uniformly distributed at the back of the optical fiber output box, an optical fiber output end is arranged at the front of the optical fiber output box, a thermistor is arranged at the bottom of the laser radar transmitting chip, an upper electrode plate is laid at the bottom of the thermistor, a plurality of fin-shaped graphene coolers are uniformly distributed at the bottom of the upper electrode plate in a rectangular array shape, graphene is coated on the surface of the fin-shaped graphene coolers, the upper end of each fin-shaped graphene cooler is long and thin, the middle lower end of each fin-shaped graphene cooler is thick and short, and integrally forms a bowling ball shape, a lower electrode plate is arranged at the bottom of each fin-shaped graphene cooler, the lower electrode plate is arranged on the surface of the liquid metal radiating micro-channel, the liquid metal radiating micro-shaped radiating micro-channel is distributed at the bottom wall of the array-shaped rectangular nested shell, the bending micro-shaped radiating micro-shell, the end-side end face of the printed circuit board is in an arc transition state;
the bottom of the bonding pad is provided with an air inlet cabin with a trapezoidal section, the air inlet cabin is arranged at two ends of the notch of the shell in a paired mode, and an air suction fan facing the outside of the shell is arranged at the joint of the air inlet cabin and the inner wall of the shell;
the laser radar transmitting chip comprises a substrate, wherein one end of the surface of the substrate is uniformly provided with a plurality of paths of grating couplers from top to bottom, the outer side of the grating couplers at the upper end and the lower end of the surface of the substrate is provided with a driving circuit electrode array, the tail end of the grating coupler is connected with a tapered waveguide through a waveguide, the upper end and the lower end of the waveguide are provided with thermo-optic phase shifters, grating antennas are distributed at the tail end of the tapered waveguide, the grating couplers are used for receiving an external light source and coupling incident light into a single path of transmission light, the waveguide is used for transmitting light signals, the thermo-optic phase shifters are used for heating and changing the refractive index in the waveguide, so that uniform phase difference is generated between the paths of waveguides, and the grating antennas are used for diffracting light beams to a free space to realize light beam steering.
Preferably, a ribbon cable electrically interacting with an external system is arranged at the bottom of the rear end of the shell.
Preferably, fixing nuts for fixing the whole device are uniformly distributed on the corners of the shell.
Preferably, the metal heat dissipation liquid in the liquid metal heat dissipation micro-channel is a GaxInySnz liquid alloy.
Preferably, the driving circuit electrode array is diagonally and linearly distributed on the lower end of the substrate.
Preferably, the heating metal material in the thermo-optic phase shifter is TiN.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, the liquid metal heat dissipation micro-channel is arranged, the liquid metal is filled into the liquid metal heat dissipation micro-channel, the flowing direction and speed of the liquid metal are controlled by using the magnetic support, and the self high thermal conductivity and high boiling point of the liquid metal are combined, so that the conduction heat of the fin column type graphene cooler is rapidly taken away, the effect of rapidly reducing the temperature of a workpiece is achieved, the stability of optical signal thermal tuning is ensured, and beam steering is smoothly completed;
2. according to the invention, the fin column type graphene cooler is adopted, the upper end of the fin column type graphene cooler is in a slender interval, so that the contact area of heat flow and air is increased, the heat flow is enabled to flow rapidly by matching with an air suction fan in an air inlet cabin, the heat accumulation in the shell is avoided, meanwhile, the heat dispersion of a chip is improved by utilizing the larger porosity among graphene molecules and the heat conductivity of the graphene, the problem of temperature rise increment caused by the increase of power density due to the doubling of the integration degree of a semiconductor integrated circuit is effectively solved, and the heat flow is transited from the slender upper end to the short middle lower end, so that a laser radar transmitting chip has buffer transition, and the sudden temperature difference is avoided from increasing the chip loss;
3. the invention adopts optical fiber coupling transmission for the multi-wavelength laser source, does not need photoelectronic devices such as a beam splitter and the like, simultaneously replaces a light splitting structure with the optical fiber array, effectively reduces the loss of optical signals in the laser radar transmitting chip, improves the transmitting power, and can well interact with other radar systems due to modularization of the laser radar transmitting chip.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a side view of the present invention;
fig. 3 is a schematic structural diagram of a lidar emitting chip in the present invention.
In the figure: 1. a housing; 2. a cable connection box; 3. an electrical connection line; 4. a liquid metal heat dissipation microchannel; 5. a magnetic support; 6. a bonding pad; 7. a laser radar transmitting chip; 8. a chip electrode; 9. an optical fiber output cassette; 10. an optical fiber array; 11. an electrical resistance; 12. an electrode plate is arranged; 13. a fin-pillar graphene cooler; 14. a lower electrode plate; 15. a printed circuit board; 16. an air intake compartment; 17. an air suction fan; 18. a substrate; 19. a grating coupler; 20. a drive circuit electrode array; 21. a waveguide; 22. a tapered waveguide; 23. a thermo-optic phase shifter; 24. a grating antenna; 25. a ribbon cable; 26. and (5) fixing the nut.
Detailed Description
The invention will be further described with reference to the following drawings and detailed description:
as shown in fig. 1-3, an all-solid-state laser radar OPA emitting chip device based on electromagnetic heat control comprises a shell 1 provided with a U-shaped notch, wherein a cable connection box 2 is arranged on the surface of the bottom wall of the shell 1, the outer side of the cable connection box 2 is tightly attached to the inner wall of the shell 1, an electrical connection wire 3 extends out of the bottom of the shell, the electrical connection wire 3 axially extends towards the end face of the notch, a magnetic support 5 which is erected on the surface of a liquid metal heat dissipation micro-channel 4 in a bridge shape is arranged at the bottom of the electrical connection wire 3, and the tail end of the electrical connection wire 3 is connected with a laser radar emitting chip assembly arranged on the end face of the notch;
the laser radar transmitting chip assembly comprises bonding pads 6 fixed at two ends of a notch through nuts, a laser radar transmitting chip 7 is clamped in the middle of each bonding pad 6, chip electrodes 8 at two ends of the laser radar transmitting chip 7 are connected with the bonding pads 6, an optical fiber output box 9 is arranged at the rear end of each laser radar transmitting chip 7, optical fiber arrays 10 extending to the rear end surface of the shell 1 are uniformly distributed at the back of each optical fiber output box 9, an optical fiber output end is arranged at the front of each optical fiber output box, a thermistor 11 is arranged at the bottom of each laser radar transmitting chip 7, an upper electrode plate 12 is laid at the bottom of the thermistor 11, a plurality of fin-shaped graphene coolers 13 are uniformly distributed at the bottom of the upper electrode plate 12, a lower electrode plate 14 is arranged at the bottom of each fin-shaped graphene cooler 13, the lower electrode plate 14 is arranged on the surface of the liquid metal heat dissipation micro-channel 4, the end surface of the lower electrode plate 14 is communicated with a printed circuit board 15, and the printed circuit board 15 is distributed on the end surface of the side end surface of the shell 1;
an air inlet cabin 16 with a trapezoidal section is arranged at the bottom of the bonding pad 6, the air inlet cabin 16 is arranged at two ends of a notch of the shell 1 in a paired mode, and an air suction fan 17 facing the outside of the shell 1 is arranged at the joint of the air inlet cabin 16 and the inner wall of the shell 1;
the laser radar transmitting chip comprises a substrate 18, wherein multiple paths of grating couplers 19 are uniformly distributed at one end of the surface of the substrate 18 from top to bottom, a driving circuit electrode array 20 is arranged on the outer side of the grating couplers 19 at the upper end and the lower end of the surface of the substrate 18, the driving circuit electrode array 20 is diagonally and linearly distributed at the upper end and the lower end of the substrate 18, the tail end of the grating coupler 19 is connected with a tapered waveguide 22 through a waveguide 21, a thermo-optic phase shifter 23 is arranged at the upper end and the lower end of the waveguide 21, a heating metal material in the thermo-optic phase shifter 23 is TiN, grating antennas 24 are distributed at the tail end of the tapered waveguide 22, the grating coupler 19 is used for receiving an external light source and coupling incident light into single-path transmission light, the waveguide 21 is used for transmitting light signals, the thermo-optic phase shifter 23 is used for heating and changing the refractive index in the waveguide to generate uniform phase difference among the multiple paths of waveguides, and the grating antennas 24 are used for diffracting light beams into a free space to realize beam steering. The surface of the shell is provided with a U-shaped notch, and an electrical connecting wire and a micro-channel layout in the shell protective shell are utilized to avoid line aging corrosion caused by external exposure, so that the laser radar transmitting chip can be ensured to normally perform beam scanning; the heating metal material TiN in the thermo-optic phase shifter has excellent self thermal regulation performance, can monitor the temperature of a chip in real time, and avoids generating larger temperature difference;
in the invention, the bottom of the rear end of the shell 1 is provided with a ribbon cable 25 which is electrically interacted with an external system. By means of the ribbon cable 25, electrical signals are fed into the cable connection box 2 and the electrical power is distributed by the cable connection box 2.
In the present invention, the corner of the casing 1 is uniformly distributed with fixing nuts 26 for fixing the whole device. The whole device is accurately fixed by a fixing nut 26, so that the laser radar transmitting chip 7 transmits in an integral mode.
In the invention, the liquid metal heat dissipation micro-channel 4 is distributed on the bottom wall of the shell 1 in an array shape by a plurality of rectangular nested manner, the bending part is in arc transition, and the metal heat dissipation liquid in the liquid metal heat dissipation micro-channel 4 is Ga x In y Sn z And (3) liquid alloy. The liquid metal is controlled by the magnetic bracket 5 to flow in a certain direction, so that heat flow transmission is quickly driven, and the effect of quickly cooling is achieved.
In the invention, the fin column type graphene coolers 13 are uniformly distributed at the bottom of the upper electrode plate 12 in a rectangular array shape, graphene is coated on the surface of the fin column type graphene coolers 13, the upper end of each fin column type graphene cooler 13 is slender, the middle end of each fin column type graphene cooler is thick, and the fin column type graphene coolers are integrally in a bowling ball shape. The upper end of the fin column type graphene cooler 13 is long, so that the contact area of air and a chip is increased, and the heat dissipation area is enlarged.
When the laser radar transmission device works, an electrical signal of an external system is transmitted into a cable connection box 2 through a ribbon cable 25, the cable connection box 2 distributes electric quantity, an optical fiber array 10 provides a light source for a laser radar transmitting chip 7, laser is output to the laser radar transmitting chip 7 at intervals through an optical fiber output box 9, an original laser is coupled into a single laser through a grating coupler 19, the optical signal is transmitted through a waveguide 21, a driving circuit electrode array 20 drives a thermo-optical phase shifter 23 to heat and change the refractive index in the waveguide 21, uniform phase difference is generated among a plurality of waveguides 21, optical parameters and properties of the laser are uniformly changed and then transmitted to a grating antenna 24 to be diffracted into a free space, beam steering is completed, and scanning of the other dimension is realized;
since each path of optical signal needs to be thermally tuned by the thermo-optic phase shifter 23 to generate a phase difference, beam steering can be completed, and therefore, stable chip temperature is very important for the use of the laser radar, but in the application process, under the condition that the ambient temperature or the chip works at high power, the thermo-optic phase shifter can be directly influenced to process unstable optical signal thermal tuning, and therefore the error of the beam steering range is large, in order to solve the problem, in the transmitting and scanning process of the laser radar transmitting chip 7, the magnetic support 5 controls liquid metal in the liquid metal heat dissipation channel 4 to flow according to a set flow direction and speed, the internal heat of the fin-shaped graphene cooler 13 is taken away quickly in a liquid flow mode, so that the effect of quick external heat dissipation is achieved, meanwhile, since the external part of the fin-shaped graphene cooler 13 is coated with graphene, high air gap rate and high thermal conductivity of the graphene are utilized, quick heat conduction is achieved, and the upper part of the fin-shaped graphene cooler 13 is long and thin, the interval is large, so that air can flow quickly, and quick heat dissipation from multiple aspects is achieved, and the thermal tuning performance of the chip is guaranteed.
Therefore, the invention is not to be limited to the specific embodiments, but rather, all equivalent changes and modifications in the shapes, structures, characteristics and spirit of the invention are intended to be included within the scope of the appended claims.
Claims (6)
1. The utility model provides an all solid-state laser radar OPA transmitting chip device based on electromagnetism accuse is hot, includes the casing of seting up U type notch, its characterized in that: the surface of the bottom wall of the shell is provided with a cable connection box, the outer side of the cable connection box is tightly attached to the inner wall of the shell, the bottom of the cable connection box extends out of an electric connection line, the electric connection line axially extends towards the end face of the notch, the bottom of the electric connection line is provided with a magnetic support which is erected on the surface of the liquid metal heat dissipation micro-channel in a bridge shape, and the tail end of the electric connection line is connected with a laser radar transmitting chip assembly arranged on the end face of the notch;
the laser radar transmitting chip assembly comprises bonding pads fixed at two ends of a notch through nuts, a laser radar transmitting chip is clamped in the middle of each bonding pad, chip electrodes at two ends of the laser radar transmitting chip are connected with the bonding pads, an optical fiber output box is arranged at the rear end of the laser radar transmitting chip, an optical fiber array extending to the surface of the rear end of a shell is uniformly distributed at the back of the optical fiber output box, an optical fiber output end is arranged at the front of the optical fiber output box, a thermistor is arranged at the bottom of the laser radar transmitting chip, an upper electrode plate is laid at the bottom of the thermistor, a plurality of fin-shaped graphene coolers are uniformly distributed at the bottom of the upper electrode plate in a rectangular array shape, graphene is coated on the surface of the fin-shaped graphene coolers, the upper end of each fin-shaped graphene cooler is long and thin, the middle lower end of each fin-shaped graphene cooler is thick and short, and integrally forms a bowling ball shape, a lower electrode plate is arranged at the bottom of each fin-shaped graphene cooler, the lower electrode plate is arranged on the surface of the liquid metal radiating micro-channel, the liquid metal radiating micro-shaped radiating micro-channel is distributed at the bottom wall of the array-shaped rectangular nested shell, the bending micro-shaped radiating micro-shell, the end-side end face of the printed circuit board is in an arc transition state;
the bottom of the bonding pad is provided with an air inlet cabin with a trapezoidal section, the air inlet cabin is arranged at two ends of a notch of the shell in a paired mode, and an air suction fan facing the outside of the shell is arranged at the joint of the air inlet cabin and the inner wall of the shell;
the laser radar transmitting chip comprises a substrate, wherein one end of the surface of the substrate is uniformly provided with a plurality of paths of grating couplers from top to bottom, the outer side of the grating couplers at the upper end and the lower end of the surface of the substrate is provided with a driving circuit electrode array, the tail end of the grating coupler is connected with a tapered waveguide through a waveguide, the upper end and the lower end of the waveguide are provided with thermo-optic phase shifters, grating antennas are distributed at the tail end of the tapered waveguide, the grating couplers are used for receiving an external light source and coupling incident light into a single path of transmission light, the waveguide is used for transmitting light signals, the thermo-optic phase shifters are used for heating and changing the refractive index in the waveguide, so that uniform phase difference is generated between the paths of waveguides, and the grating antennas are used for diffracting light beams to a free space to realize light beam steering.
2. The all-solid-state laser radar OPA transmitting chip device based on electromagnetic thermal control according to claim 1, characterized in that: and a ribbon cable which is electrically interacted with an external system is arranged at the bottom of the rear end of the shell.
3. The all-solid-state laser radar OPA transmitting chip device based on electromagnetic thermal control according to claim 2, characterized in that: and fixing nuts for fixing the whole device are uniformly distributed on the corners of the shell.
4. The all-solid-state laser radar OPA transmitting chip device based on electromagnetic thermal control according to claim 1, characterized in that: and the metal heat dissipation liquid in the liquid metal heat dissipation micro-channel is GaxInySnz liquid alloy.
5. The all-solid-state laser radar OPA transmitting chip device based on electromagnetic thermal control according to claim 1, characterized in that: the driving circuit electrode array is diagonally and linearly distributed at the upper end and the lower end of the substrate.
6. The all-solid-state laser radar OPA transmitting chip device based on electromagnetic thermal control according to claim 1, characterized in that: the heating metal material in the thermo-optic phase shifter is TiN.
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| CN114720962A (en) | 2022-07-08 |
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