CN114720784A

CN114720784A - Vibration capacitance type electrostatic sensor structure

Info

Publication number: CN114720784A
Application number: CN202210189449.1A
Authority: CN
Inventors: 陈永; 朱熠辰; 孙昊
Original assignee: Wuxi Yanpin Electronic Technology Co ltd
Current assignee: Wuxi Yanpin Electronic Technology Co ltd
Priority date: 2022-02-28
Filing date: 2022-02-28
Publication date: 2022-07-08

Abstract

The invention discloses a vibration capacitance type electrostatic sensor structure, which comprises a sensor main shell and an inner interlayer, wherein two sides of the sensor main shell are provided with fixed grooves, the inner interlayer is arranged between the fixed grooves, a vibration device is arranged above the inner interlayer, the lower end of the inner interlayer is provided with a signal processing circuit board, the inner side of the vibration device is provided with a signal induction polar plate, one side of the sensor main shell is provided with a sensor auxiliary shell, the middle part of the measuring end of the sensor auxiliary shell is provided with a detection window, when the vibration capacitance type electrostatic sensor structure is used, the signal induction polar plate is kept parallel to the surface of a test article, the distance between the detection window and the surface of the test article is fixed, when the surface of the test article is charged, the signal induction polar plate is charged by induction, after being electrified, the vibration device vibrates, the signal induction polar plate is shielded periodically to generate a periodically alternating current signal, and the signal is introduced into the signal processing circuit board for post-processing, therefore, the device is scientific and reasonable in structure, safe and reliable to use and provides great help for people.

Description

Vibration capacitance type electrostatic sensor structure

Technical Field

The invention relates to the technical field of electrostatic testing, in particular to a vibration capacitance type electrostatic sensor structure.

Background

The electrostatic phenomenon is the beginning of the recognition of electromagnetic phenomenon by human beings, and along with the increasingly deep research on electrostatic application in recent years, the electrostatic technology has been widely applied to various fields, such as electrostatic dust removal, electrostatic copying, electrostatic spraying, electrostatic biological effect and the like; static electricity brings scientific and technological progress to human beings, and simultaneously has certain danger, easily causes electronic device breakdown damage, electronic equipment failure or malfunction and explosion and fire, seriously threatens the life and property safety of people. In order to realize the application and protection of static electricity, firstly, the accurate measurement of static electricity distribution is realized, the static sensors in the current market are divided into a static induction type sensor and a vibration capacitance type sensor, wherein the vibration capacitance type sensor utilizes a vibration electrode to change a capacitance value between the sensor and the surface of a test article so as to generate a changed current signal for measurement, the sensors mostly adopt transverse measurement, the relative area between the sensor and the surface of the test article to be measured is large, the discharge of static charges is accelerated, the spatial electric field distribution generates interference, meanwhile, the measurement surface is too large, the precision of measurement point positions is poor, and the accuracy of the static measurement is greatly influenced; the vibration structure is directly connected with the signal processing circuit board, noise interference generated in the vibration process is directly introduced into the signal processing system, the error of signal processing is increased, the vibration structure is fixed in a mode of glue adhesion, the result that the position of the vibration structure cannot be accurately positioned can be brought, the performance consistency of the same batch of sensors is obviously different, the batch quality problem is caused, huge loss is generated, and the commercialization of the electrostatic sensor is seriously influenced.

Disclosure of Invention

The present invention is directed to a vibration capacitive electrostatic sensor structure, which can effectively solve the problems of the related art.

In order to achieve the purpose, the invention adopts the technical scheme that:

a vibration capacitance type electrostatic sensor structure comprises a sensor main shell and an inner interlayer, wherein the front side and the back side of the sensor main shell are respectively provided with a fixed groove, the middle part between the fixed grooves is fixedly provided with the inner interlayer, one side of the upper end of the inner interlayer is fixedly provided with a positioning convex point, the middle part of the upper end of the inner interlayer is provided with a positioning hole, a vibration device is fixedly arranged above the inner interlayer, the vibration device is fixedly connected with the upper end of the sensor main shell, the sensor main shell is electrically connected with a vibration device, a semi-open notch at one side of the vibration device is fixedly arranged outside the positioning convex point, a circular hole at the middle part of the vibration device is fixedly arranged above the positioning hole, the lower end of the inner interlayer is fixedly provided with a signal processing circuit board which is fixedly connected with the lower end of the sensor main shell, and the sensor main shell is electrically insulated with a signal processing circuit board, the inboard fixed signal response polar plate that is equipped with of vibrating device, the fixed sensor subcase that is equipped with in sensor main casing one side, the sensor subcase is preceding, during the back edge is fixed to be located fixed recess, and the concatenation is the whole metal casing of cuboid with the sensor main casing, sensor subcase one side measuring end middle part is equipped with detection window, detection window is on a parallel with the signal response polar plate, detection window central point and signal response polar plate central point are in on the same axis, the signal processing circuit board is located one side fixed connection signal response polar plate of detection window, signal response polar plate electric connection signal processing circuit board.

Preferably, the fixed grooves on the two sides of the main sensor shell are symmetrically distributed around the inner interlayer, the periphery of the main sensor shell is of an open structure, the edge of the auxiliary sensor shell is inserted into the groove on the edge of the fixed groove and is fastened into a whole, the auxiliary sensor shell is of a v-21274-shaped thin-wall structure, the main sensor shell and the auxiliary sensor shell are both grounded, the inner interlayer separates the vibration device and the signal processing circuit board from top to bottom, the vibration device receives and executes driving and control signals sent by the signal processing circuit board to drive the partially shielded signal sensing polar plate to periodically vibrate along the direction perpendicular to the detection direction, the lower end of one side of the vibration device is provided with a rectangular notch, and the signal sensing polar plate penetrates out of the rectangular notch downwards and is connected with the signal processing circuit board.

Preferably, inside interlayer upper portion is tertiary step, the higher level step top parallel and level of inside interlayer is terminal surface under the sensor subshell upper plate, location bump and locating hole are located the middle step upper end of inside interlayer, vibrating device's metal resonance cavity is located the subordinate's step upside of inside interlayer, the side that inside interlayer is close to higher level step is opened has top-down square through groove, vibrating device is at the inside interlayer of location bump welded connection, vibrating device is at the inside interlayer of locating hole riveted connection, inside interlayer subordinate's step middle part is equipped with the location round hole.

Preferably, signal response polar plate main part work part is located vibrating device and is close to one side of inside detection window, signal response polar plate upper portion is shielded by vibrating device's metal resonant cavity, it is located the middle position in sensor subshell side, and the opening is rectangle, the sensor subshell is square arch with the upper end before the relative one side of detection window, the square protruding sensor main shell side end face behind the lock of sensor subshell.

Preferably, a corner of one side of the signal processing circuit board is provided with a rectangular notch, and the signal processing circuit board is positioned at the rectangular notch and connected with the lower end of the inner interlayer.

Compared with the prior art, the invention has the following beneficial effects: before use, firstly, the sensor main shell is grounded, the vibrating device is electrically connected with the sensor main shell and also grounded, secondly, a signal wire is led in through the tail end of the sensor main shell and is connected with a signal processing circuit board, then the sensor is vertically placed, when the device is used, a signal induction polar plate is ensured to be parallel to the surface of a test article, after the device is adjusted to a proper distance, the distance between a detection window and the surface of the test article is kept constant, when the surface of the test article has electric charges, the signal induction polar plate is induced to be electrified due to the principle of electrostatic induction, after a power supply is switched on, the vibrating device vibrates and periodically shields the signal induction polar plate to generate periodic alternating current signals, and finally, the periodic alternating current signals are led into the signal processing circuit board to carry out subsequent signal amplification and conversion processing, the measuring distance is always agreed during measuring, and the consistency of measuring results is ensured, the technical scheme can obviously improve the influence of the introduction of the electrostatic sensor on the surface electrostatic distribution and the space electric field of the test sample in the measuring process, inhibit the discharge of the surface static electricity of the test sample and improve the stability and the accuracy of the electrostatic measurement by changing the measuring direction, reducing the volume of equipment and reducing the relative surface area of the sensor and the test sample; the vibration device and the signal processing circuit board are separated by the internal interlayer, introduction of system noise is reduced, the sensor main shell can shield external electromagnetic interference signals, and meanwhile the internal interlayer and the sensor main shell also play a role in reducing interference of external factors such as dust, water mist and the like on a measurement system, so that the measurement stability and accuracy of the electrostatic sensor are improved; the positioning convex points on the inner interlayer are matched with the positioning holes for positioning, the traditional gluing mode is replaced by a mode of combining riveting and welding, the vibrating device can be accurately positioned, a reference positioning criterion is provided, and the product consistency of the electrostatic sensor is standardized; through each subassembly position in the electrostatic sensor of rationally arranging, greatly reduced the sensor volume, it is more accurate to survey the position simultaneously, accomplishes the electrostatic detection task of high accuracy in convenient application accomplishes in the narrower and small detection space, the device structure scientific and reasonable uses safe and reliable, provides very big help for people.

Drawings

Fig. 1 is an exploded view of a vibrating capacitive electrostatic sensor according to the present invention;

FIG. 2 is a schematic view of the internal assembly of a vibrating capacitive electrostatic sensor structure according to the present invention;

fig. 3 is a schematic overall shape diagram of a vibrating capacitive electrostatic sensor structure according to the present invention.

In the figure: 1. the sensor comprises a vibrating device, 2, a sensor main shell, 201, an inner interlayer, 202, positioning bumps, 203, positioning holes, 204, fixing grooves, 3, a signal processing circuit board, 4, a signal sensing polar plate, 5, a sensor auxiliary shell, 501 and a detection window.

Detailed Description

In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.

As shown in FIGS. 1-3, a vibrating capacitor type electrostatic sensor structure comprises a sensor main shell 2 and an inner interlayer 201, wherein fixing grooves 204 are respectively arranged at the front side and the rear side of the sensor main shell 2, the inner interlayer 201 is fixedly arranged in the middle between the fixing grooves 204, a positioning bump 202 is fixedly arranged at one side of the upper end of the inner interlayer 201, a positioning hole 203 is arranged in the middle of the upper end of the inner interlayer 201, a vibrating device 1 is fixedly arranged above the inner interlayer 201, the vibrating device 1 is fixedly connected with the upper end of the sensor main shell 2, the sensor main shell 2 is electrically connected with the vibrating device 1, a semi-open gap at one side of the vibrating device 1 is fixedly arranged outside the positioning bump 202, a round hole in the middle of the vibrating device 1 is fixedly arranged above the positioning hole 203, a signal processing circuit board 3 is fixedly arranged at the lower end of the inner interlayer 201, the signal processing circuit board 3 is fixedly connected with the lower end of the sensor main shell 2, and the sensor main shell 2 is electrically insulated from the signal processing circuit board 3, the inner side of the vibrating device 1 is fixedly provided with a signal induction polar plate 4, one side of a sensor main shell 2 is fixedly provided with a sensor sub-shell 5, the front edge and the rear edge of the sensor sub-shell 5 are fixedly arranged in a fixing groove 204 and are spliced with the sensor main shell 2 to form a cuboid integral metal shell, the middle of the measuring end of one side of the sensor sub-shell 5 is provided with a detection window 501, the detection window 501 is parallel to the signal induction polar plate 4, the central point of the detection window 501 and the central point of the signal induction polar plate 4 are on the same axis, one side of a signal processing circuit board 3, which is positioned on the detection window 501, is fixedly connected with the signal induction polar plate 4, and the signal induction polar plate 4 is electrically connected with the signal processing circuit board 3.

In this embodiment, preferably, the fixing grooves 204 on both sides of the sensor main shell 2 are symmetrically distributed around the inner interlayer 201, the periphery of the sensor main shell 2 is an open structure, the edge of the sensor sub-shell 5 is inserted into the groove on the edge of the fixing groove 204 and fastened into a whole, the sensor sub-shell 5 is a v-21274-shaped thin-wall structure, both the sensor main shell 2 and the sensor sub-shell 5 are grounded, the inner interlayer 201 vertically separates the vibration device 1 from the signal processing circuit board 3, the vibration device 1 receives and executes the driving and control signal sent by the signal processing circuit board 3 to drive the partially shielded signal sensing polar plate 4 to periodically vibrate along the direction perpendicular to the detection direction, the lower end of one side of the vibration device 1 is provided with a rectangular notch, and the signal sensing polar plate 4 penetrates out of the rectangular notch downwards and is connected with the signal processing circuit board 3.

In this embodiment, preferably, the upper portion of the inner interlayer 201 is a third-level step, the top end of the upper-level step of the inner interlayer 201 is flush with the lower end surface of the upper plate of the sensor sub-housing 5, the positioning bumps 202 and the positioning holes 203 are located at the upper end of the middle step of the inner interlayer 201, the metal resonance cavity of the vibration device 1 is located on the upper side of the lower-level step of the inner interlayer 201, the side of the inner interlayer 201 close to the upper-level step is provided with a square through groove from top to bottom, the vibration device 1 is welded to the inner interlayer 201 at the positioning bumps 202, the vibration device 1 is riveted to the inner interlayer 201 at the positioning holes 203, and the middle of the lower-level step of the inner interlayer 201 is provided with a positioning round hole.

In this embodiment, preferably, the working portion of the main body of the signal sensing electrode plate 4 is located on one side of the vibration device 1 close to the internal detection window 501, the upper portion of the signal sensing electrode plate 4 is shielded by the metal resonant cavity of the vibration device 1, the detection window 501 is located in the center of the side surface of the sensor sub-housing 5, the opening is rectangular, the front upper end of one side of the sensor sub-housing 5 opposite to the detection window 501 is a square protrusion, and the square protrusion of the sensor sub-housing 5 protrudes from one side end surface of the fastened sensor main housing 2.

In this embodiment, it is preferable that a corner of one side of the signal processing circuit board 3 has a rectangular notch, and the signal processing circuit board 3 is positioned at the rectangular notch and connected to the lower end of the inner partition 201.

Before use, the sensor main shell 2 is subjected to grounding treatment, the vibration device 1 is electrically connected with the sensor main shell 2 and is also subjected to grounding treatment, then a signal wire is led in through the tail end of the sensor main shell 2 and is connected with the signal processing circuit board 3, then the sensor is vertically placed, when the sensor is used, the signal induction polar plate 4 is ensured to be parallel to the surface of a test article, after the distance is adjusted to be a proper distance, the distance between the detection window 501 and the surface of the test article is kept constant, when the surface of the test article is charged, the signal induction polar plate 4 is induced to be charged due to the electrostatic induction principle, after a power supply is switched on, the vibration device 1 vibrates, periodically shields the signal induction polar plate 4 to generate periodically alternating current signals, and finally the periodically alternating current signals are led into the signal processing circuit board 3 to be subjected to subsequent signal amplification and conversion treatment, the technical scheme can obviously improve the influence of the introduction of the electrostatic sensor on the surface electrostatic distribution and the space electric field of the test sample in the measuring process, inhibit the discharge of the surface static electricity of the test sample and improve the stability and the accuracy of the electrostatic measurement by changing the measuring direction, reducing the volume of equipment and reducing the relative surface area of the sensor and the test sample; the vibration device 1 and the signal processing circuit board 3 are separated by the internal interlayer 201, introduction of system noise is reduced, the sensor main shell 2 can shield external electromagnetic interference signals, and meanwhile, the internal interlayer 201 and the sensor main shell 2 also play a role in reducing interference of external factors such as dust, water mist and the like on a measurement system, so that the measurement stability and accuracy of the electrostatic sensor are improved; the positioning salient points 202 on the inner interlayer 201 and the positioning holes 203 are used for matching and positioning, the traditional gluing mode is replaced by a mode of combining riveting and welding, the vibrating device 1 can be accurately positioned, a referential positioning criterion is provided, and the product consistency of the electrostatic sensor is standardized; through each subassembly position in the electrostatic sensor of rationally arranging, greatly reduced the sensor volume, it is more accurate to survey the position simultaneously, accomplishes the electrostatic detection task of high accuracy in convenient application accomplishes in the narrower and small detection space, the device structure scientific and reasonable uses safe and reliable, provides very big help for people.

The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. A vibrating capacitor type electrostatic sensor structure comprises a sensor main shell (2) and an inner interlayer (201), and is characterized in that fixing grooves (204) are respectively arranged on the front side and the rear side of the sensor main shell (2), the inner interlayer (201) is fixedly arranged in the middle between the fixing grooves (204), a positioning bump (202) is fixedly arranged on one side of the upper end of the inner interlayer (201), a positioning hole (203) is formed in the middle of the upper end of the inner interlayer (201), a vibrating device (1) is fixedly arranged above the inner interlayer (201), the vibrating device (1) is fixedly connected with the upper end of the sensor main shell (2), the sensor main shell (2) is electrically connected with the vibrating device (1), a semi-open notch on one side of the vibrating device (1) is fixedly arranged on the outer side of the positioning bump (202), a round hole in the middle of the vibrating device (1) is fixedly arranged above the positioning hole (203), the lower end of the inner interlayer (201) is fixedly provided with a signal processing circuit board (3), the signal processing circuit board (3) is fixedly connected with the lower end of a sensor main shell (2), the sensor main shell (2) is electrically insulated from the signal processing circuit board (3), the inner side of the vibrating device (1) is fixedly provided with a signal induction polar plate (4), one side of the sensor main shell (2) is fixedly provided with a sensor sub-shell (5), the front edge and the rear edge of the sensor sub-shell (5) are fixedly arranged in a fixed groove (204) and are spliced with the sensor main shell (2) into a cuboid integral metal shell, the middle of the measuring end on one side of the sensor sub-shell (5) is provided with a detection window (501), the detection window (501) is parallel to the signal induction polar plate (4), and the central point of the detection window (501) and the central point of the signal induction polar plate (4) are on the same axis, the signal processing circuit board (3) is located one side fixed connection signal response polar plate (4) of detecting window (501), signal response polar plate (4) electric connection signal processing circuit board (3).

2. A vibrating capacitive electrostatic sensor structure as claimed in claim 1, wherein: the fixing grooves (204) on the two sides of the main sensor shell (2) are symmetrically distributed in the front and back direction of the inner interlayer (201), the periphery of the main sensor shell (2) is of an open structure, the edge of the auxiliary sensor shell (5) is inserted into the edge groove of the fixing groove (204) and fastened into a whole, the sensor sub-shell (5) is of a v-21274h-shaped thin-wall structure, the sensor main shell (2) and the sensor sub-shell (5) are both grounded, the inner interlayer (201) separates the vibration device (1) and the signal processing circuit board (3) from top to bottom, the vibration device (1) receives and executes driving and control signals sent by the signal processing circuit board (3) to drive the partially shielded signal induction polar plate (4) to periodically vibrate along the direction vertical to the detection direction, the lower end of one side of the vibrating device (1) is provided with a rectangular notch, and the signal induction polar plate (4) penetrates out of the rectangular notch downwards and is connected with the signal processing circuit board (3).

3. A vibrating capacitive electrostatic sensor structure as claimed in claim 1, wherein: inside interlayer (201) upper portion is tertiary step, higher level step top parallel and level of inside interlayer (201) are terminal surface under sensor subcase (5) upper plate, location bump (202) and locating hole (203) are located the middle step upper end of inside interlayer (201), the metal resonance cavity of vibrating device (1) is located the subordinate step upside of inside interlayer (201), the side that inside interlayer (201) are close to higher level step is opened there is top-down's square through groove, vibrating device (1) locates inside interlayer (201) of welded connection in location bump (202), vibrating device (1) is located inside interlayer (201) of riveted connection in locating hole (203), inside interlayer (201) subordinate step middle part is equipped with the location round hole.

4. A vibrating capacitive electrostatic sensor structure as claimed in claim 1, wherein: the utility model discloses a sensor, including signal response polar plate (4), detection window (5), sensor subcase (5) and detection window (501), signal response polar plate (4) main part work portion is located vibrating device (1) and is close to one side of inside detection window (501), signal response polar plate (4) upper portion is shielded by the metal resonant cavity of vibrating device (1), detection window (501) are located sensor subcase (5) side centre position, and the opening is rectangle, the upper end is square bulge before one side that sensor subcase (5) and detection window (501) are relative, sensor subcase (5) square bulge in sensor main casing (2) a side end face after the lock.

5. A vibrating capacitive electrostatic sensor structure as claimed in claim 1, wherein: the corner of one side of the signal processing circuit board (3) is provided with a rectangular notch, and the signal processing circuit board (3) is positioned at the rectangular notch and is connected with the lower end of the inner interlayer (201).