CN114718914B - Cleaning method of shielding pump - Google Patents
Cleaning method of shielding pump Download PDFInfo
- Publication number
- CN114718914B CN114718914B CN202210443601.4A CN202210443601A CN114718914B CN 114718914 B CN114718914 B CN 114718914B CN 202210443601 A CN202210443601 A CN 202210443601A CN 114718914 B CN114718914 B CN 114718914B
- Authority
- CN
- China
- Prior art keywords
- pump
- shielding pump
- shielding
- basket filter
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 25
- 238000004140 cleaning Methods 0.000 title claims abstract description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 53
- 239000007788 liquid Substances 0.000 claims abstract description 43
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 25
- 239000011863 silicon-based powder Substances 0.000 claims abstract description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 24
- 238000005086 pumping Methods 0.000 claims abstract description 10
- 238000007599 discharging Methods 0.000 claims abstract description 4
- 238000009833 condensation Methods 0.000 claims description 4
- 230000005494 condensation Effects 0.000 claims description 4
- 238000009834 vaporization Methods 0.000 claims description 4
- 230000008016 vaporization Effects 0.000 claims description 4
- 238000001816 cooling Methods 0.000 abstract description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 14
- 239000000843 powder Substances 0.000 description 9
- 239000000377 silicon dioxide Substances 0.000 description 7
- 238000000151 deposition Methods 0.000 description 5
- 239000005046 Chlorosilane Substances 0.000 description 4
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000037452 priming Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000001502 supplementing effect Effects 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000013517 stratification Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
- F04D29/708—Suction grids; Strainers; Dust separation; Cleaning specially for liquid pumps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
The invention relates to a method for cleaning a shielding pump. A cleaning method of a shielding pump comprises the following steps: closing an inlet valve and an outlet valve of the shielding pump, continuously introducing nitrogen from an outlet exhaust valve of the shielding pump, and discharging residual liquid containing silicon powder in the shielding pump and the basket filter from a drain valve of the basket filter; and then inputting clear liquid from the basket filter drain valve for pumping, and ending pumping when the clear liquid is discharged from the basket filter exhaust valve and the shielding pump exhaust valve. The cleaning method of the shielding pump can remove the silicon powder and residual liquid deposited in the shielding pump to avoid the problem of blockage of the instant cooling channel caused by the silicon powder when the shielding pump is started, thereby avoiding excessively high pump temperature and instant overload shutdown.
Description
Technical Field
The invention particularly relates to a method for cleaning a shielding pump.
Background
In the field of producing polysilicon by adopting an improved Siemens method process, a leakage-free shielding pump is mostly selected due to the toxic and harmful chemical properties of trichlorosilane and silicon tetrachloride. Because the reducing furnace has large tail gas quantity, part of tiny silica powder particles are entrained, and the tail gas treatment device is difficult to treat the tiny silica powder cleanly. This results in fine silica powder in the chlorosilane of the rectification system and the tail gas treatment system. Especially after the concentration in the rectifying tower kettle, the silicon powder content is higher. These silicon powders have a density greater than that of chlorosilanes and are insoluble in liquid chlorosilanes. When the shielding pump is deactivated, the shielding pump is easy to deposit on an inlet pipeline of the shielding pump and the bottom of the shielding pump.
The longer the shield pump is deactivated, the more advantageous the silicon powder deposition stratification. The deposited silicon powder can cause the cooling channel of the shielding pump to be blocked, and the pump is excessively high in temperature and overloaded to stop at the moment of starting the shielding pump, so that even the internal components of the shielding pump are damaged. The maintenance period of the damaged shielding pump is long, the cost is high, and the production is stopped when the damage is serious, so that effective measures are adopted to prevent silicon powder at the bottom of the standby shielding pump from depositing and normal standby is very necessary.
In view of the above, the invention provides a cleaning method of a canned motor pump, which is used for removing silicon powder deposited at the bottom of a standby canned motor pump, so as to avoid the problem of blockage of a cooling channel at the moment of starting caused by the silicon powder, thereby reducing the damage of the canned motor pump.
Disclosure of Invention
The invention aims to provide a cleaning method of a shielding pump, which can remove silicon powder and residual liquid deposited in the shielding pump and reduce damage of the shielding pump.
In order to achieve the above purpose, the technical scheme adopted is as follows:
a basket filter is arranged on a pipeline between the shielding pump and an inlet valve of the shielding pump, the basket filter is communicated with an inlet of the shielding pump, a filter screen is 60 meshes, and solid-phase particles with the diameter larger than 60 meshes are intercepted. The upper part of the basket filter is provided with a basket filter exhaust valve, and the lower part of the basket filter is provided with a basket filter drain valve;
the shielding pump outlet valve is connected with a nitrogen pipeline; the shielding pump outlet valve is arranged on a pipeline between the shielding pump and the shielding pump outlet valve;
the cleaning method comprises the following steps: closing the inlet valve and the outlet valve of the shielding pump, continuously introducing nitrogen from the outlet exhaust valve of the shielding pump, and discharging residual liquid containing silicon powder in the shielding pump and the basket filter from the drain valve of the basket filter;
and then inputting clear liquid from the basket filter drain valve for pumping, and ending pumping when the clear liquid is discharged from the basket filter exhaust valve and the shielding pump exhaust valve.
Further, the clear liquid is liquid obtained by vaporization and condensation at the top of the rectifying tower.
Further, the nitrogen pressure in the canned motor pump before pump priming is less than the clear liquid pressure.
Still further, before the pump filling, the nitrogen pressure in the shielding pump is 0.01MPa, and the clear liquid pressure is 0.25-0.35MPa.
Still further, the pressure of the clear liquid is 0.30MPa.
Further, the nitrogen gas is introduced for 25-35min, and the pressure is 0.25-0.35MPa.
Still further, the nitrogen pressure was 0.30MPa.
Compared with the prior art, the invention has the beneficial effects that:
according to the technical scheme, after the shielding pump for reducing the silicon powder is stopped to replace nitrogen, clear liquid is filled into the movable buffer tank, so that the problems that silicon powder is easy to deposit on an inlet pipeline of a standby shielding pump and the bottom of the shielding pump, a cooling channel of the shielding pump is blocked at the moment of starting the standby pump, the temperature of the pump is too high, the overload is stopped, and internal parts of the shielding pump are damaged are solved, and the purpose of protecting the shielding pump is achieved.
Drawings
FIG. 1 is a diagram of an apparatus employed in the present invention; wherein, 1 is portable buffer tank, 2 is portable buffer tank manometer mouth, 3 is portable buffer tank pressure filling nitrogen gas mouth, 4 is portable buffer tank inlet, 5 is scene magnetism board liquid level gauge, 6 is shielding pump inlet valve, 7 is basket filter, 8 is basket filter discharge valve, 9 is basket filter flowing back valve, 10 is shielding pump, 11 is shielding pump outlet valve, 12 is shielding pump outlet valve, 13 is portable buffer tank discharge gate.
Detailed Description
In order to further illustrate a method for cleaning a canned motor pump according to the present invention, the following description will describe a specific embodiment, structure, features and effects of a canned motor pump according to the present invention in detail with reference to the preferred embodiments. In the following description, different "an embodiment" or "an embodiment" do not necessarily refer to the same embodiment. Furthermore, the particular features, structures, or characteristics of one or more embodiments may be combined in any suitable manner.
The following describes a method for cleaning a canned motor pump according to the present invention in further detail with reference to specific examples:
the polysilicon production field rectification and tail gas device chlorosilane contains part of fine silica powder, silica powder is easy to deposit at the inlet pipeline of a standby shielding pump and the bottom of the shielding pump, the longer the standby time is, the more favorable to silica powder deposition layering, the higher the pump temperature is, overload shutdown is caused at the moment of starting the standby pump, even the inner parts of the shielding pump are damaged, the maintenance period after the damage of the shielding pump is long, the cost is high, and the production stop is caused in serious cases, so that effective measures are adopted to prevent the silica powder deposition at the bottom of the standby shielding pump and the normal standby is very necessary.
The technical scheme of the invention is as follows:
a basket filter is arranged on a pipeline between the shielding pump and an inlet valve of the shielding pump, the basket filter is communicated with an inlet of the shielding pump, a basket filter exhaust valve is arranged at the upper part of the basket filter, and a basket filter drain valve is arranged at the lower part of the basket filter;
the shielding pump outlet valve is connected with a nitrogen pipeline; the shielding pump outlet valve is arranged on a pipeline between the shielding pump and the shielding pump outlet valve;
the cleaning method comprises the following steps: closing the inlet valve and the outlet valve of the shielding pump, continuously introducing nitrogen from the outlet exhaust valve of the shielding pump, and discharging residual liquid containing silicon powder in the shielding pump and the basket filter from the drain valve of the basket filter;
and then inputting clear liquid from the basket filter drain valve for pumping, and ending pumping when the clear liquid is discharged from the basket filter exhaust valve and the shielding pump exhaust valve.
Preferably, the clear liquid is liquid obtained by vaporization and condensation at the top of the rectifying tower.
Preferably, the nitrogen pressure in the canned motor pump before priming is less than the clear liquid pressure.
Further preferably, before the pump filling, the nitrogen pressure in the shielding pump is 0.01MPa, and the clear liquid pressure is 0.25-0.35MPa.
Further preferably, the pressure of the clear liquid is 0.30MPa.
Preferably, the nitrogen gas is introduced for 25-35min, and the pressure is 0.25-0.35MPa.
Further preferably, the nitrogen pressure is 0.30MPa.
Example 1.
The device of fig. 1 is adopted, wherein 1 is a movable buffer tank, 2 is a movable buffer tank pressure gauge port, 3 is a movable buffer tank pressure supplementing nitrogen port, 4 is a movable buffer tank liquid inlet, 5 is a field magnetic flap liquid level gauge, 6 is a shielding pump inlet valve, 7 is a basket filter, 8 is a basket filter exhaust valve, 9 is a basket filter drain valve, 10 is a shielding pump, 11 is a shielding pump outlet valve, 12 is a shielding pump outlet valve, and 13 is a movable buffer tank discharge port.
The specific operation steps are as follows:
(1) When a material shielding pump for conveying impurities containing micro powder (silicon powder) is deactivated, a cooling channel of the shielding pump is blocked to prevent silicon powder with high density from being deposited at the bottom of the shielding pump after standing. After the shielding pump 10 containing silicon powder is stopped, a nitrogen hose is connected to the exhaust valve 11 of the shielding pump, and a drain hose is connected to the drain valve 9 of the basket filter. The first time the canned motor pump inlet valve 6 is closed and the canned motor pump outlet valve 12 is closed. The drain hose was opened and the shield pump was replaced with 0.3MPa nitrogen. The residual liquid containing silicon powder in the pump body and the basket filter 7 at the inlet of the pump is blown out and replaced for about 30 minutes. After the silicon powder in the pump is purged completely, the pressure of nitrogen is maintained at 0.01MPa.
(2) The reflux liquid (liquid after vaporization and condensation at the top of the tower, without silicon powder) of the rectifying tower is sent into the movable buffer tank 1 from the liquid inlet 4 of the movable buffer tank and is injected to the liquid level of 50 percent by using a metal hose.
The bottom of the movable buffer tank 1 is communicated with the bottom of the basket filter 7 through a hose, namely, a discharge hole 13 of the movable buffer tank is connected with a metal hose to a liquid discharge valve 9 of the basket filter, and 0.3MPa nitrogen is connected to a nitrogen supplementing port 3 of the movable buffer tank by using the metal hose to be supplemented to 0.3MPa. And then pumping the basket filter 7 and the shielding pump 10 until the clear liquid is discharged from the exhaust valve 8 of the basket filter and the exhaust valve 11 of the shielding pump, and the pumping is finished. The shielding pump 10 is normally used, the inlet and outlet valves 6 and 12 of the pump are closed, and the warning is carried out, so that turbid liquid is prevented from entering the pump body due to incorrect opening.
When the shielding pump needs to be started, the shielding pump inlet valve 6 is opened, the starting button is clicked, the shielding pump outlet valve 12 is slowly opened, and the standby shielding pump 10 can be put into use. Therefore, damage to parts in the pump caused by high temperature, current overload and the like at the moment of starting the shielding pump due to deposition of micro powder such as silicon powder and the like can be avoided.
According to the technical scheme, after the shielding pump for reducing the silicon powder is stopped to replace nitrogen, clear liquid is filled into the movable buffer tank, so that the problems that silicon powder is easy to deposit on an inlet pipeline of a standby shielding pump and the bottom of the shielding pump, a cooling channel of the shielding pump is blocked at the moment of starting the standby pump, the temperature of the pump is too high, the overload is stopped, and internal parts of the shielding pump are damaged are solved, and the purpose of protecting the shielding pump is achieved.
The foregoing description is only a preferred embodiment of the present invention, and is not intended to limit the embodiment of the present invention in any way, but any simple modification, equivalent variation and modification of the above embodiment according to the technical substance of the embodiment of the present invention still fall within the scope of the technical solution of the embodiment of the present invention.
Claims (7)
1. A method for cleaning a canned motor pump is characterized in that,
a basket filter is arranged on a pipeline between the shielding pump and the shielding pump inlet valve, the basket filter is communicated with the shielding pump inlet, the upper part of the basket filter is provided with a basket filter exhaust valve, and the lower part of the basket filter is provided with a basket filter drain valve;
the shielding pump outlet valve is connected with a nitrogen pipeline; the shielding pump outlet valve is arranged on a pipeline between the shielding pump and the shielding pump outlet valve;
the cleaning method comprises the following steps: closing the inlet valve and the outlet valve of the shielding pump, continuously introducing nitrogen from the outlet exhaust valve of the shielding pump, and discharging residual liquid containing silicon powder in the shielding pump and the basket filter from the drain valve of the basket filter;
and then inputting clear liquid from the basket filter drain valve for pumping, and ending pumping when the clear liquid is discharged from the basket filter exhaust valve and the shielding pump exhaust valve.
2. The method of claim 1, wherein the cleaning process is performed,
the clear liquid is the liquid obtained by vaporization and condensation at the top of the rectifying tower.
3. The method of claim 1, wherein the cleaning process is performed,
the nitrogen pressure in the shield pump before pump filling is smaller than the clear liquid pressure.
4. The method of cleaning according to claim 3, wherein,
before the pump filling, the nitrogen pressure in the shielding pump is 0.01MPa, and the clear liquid pressure is 0.25-0.35MPa.
5. The method of claim 4, wherein,
the pressure of the clear liquid is 0.30MPa.
6. The method of claim 1, wherein the cleaning process is performed,
the nitrogen is introduced for 25-35min, and the pressure is 0.25-0.35MPa.
7. The method of claim 6, wherein,
the nitrogen pressure is 0.30MPa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210443601.4A CN114718914B (en) | 2022-04-26 | 2022-04-26 | Cleaning method of shielding pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210443601.4A CN114718914B (en) | 2022-04-26 | 2022-04-26 | Cleaning method of shielding pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114718914A CN114718914A (en) | 2022-07-08 |
| CN114718914B true CN114718914B (en) | 2023-11-03 |
Family
ID=82245823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210443601.4A Active CN114718914B (en) | 2022-04-26 | 2022-04-26 | Cleaning method of shielding pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114718914B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04321795A (en) * | 1991-04-23 | 1992-11-11 | Toshiba Corp | Canned motor pump purge device |
| KR19990008573A (en) * | 1997-07-02 | 1999-02-05 | 문정환 | Operation method of semiconductor nitride film deposition apparatus |
| WO2010142612A1 (en) * | 2009-06-08 | 2010-12-16 | Aker Subsea As | Filter arrangement |
| CN209901893U (en) * | 2019-04-26 | 2020-01-07 | 内蒙古佳瑞米精细化工有限公司 | Online cleaning device for dry-type screw vacuum pump |
| CN210799257U (en) * | 2019-08-16 | 2020-06-19 | 甘肃北方三泰化工有限公司 | Liquid chlorine shielding pump system |
| CN211259101U (en) * | 2019-10-30 | 2020-08-14 | 新疆东方希望新能源有限公司 | Cooling system for polycrystalline silicon tail gas recovery circulating shielding pump |
| CN212928321U (en) * | 2020-07-20 | 2021-04-09 | 山东宏旭化学股份有限公司 | Liquid ammonia canned pump priming device |
-
2022
- 2022-04-26 CN CN202210443601.4A patent/CN114718914B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04321795A (en) * | 1991-04-23 | 1992-11-11 | Toshiba Corp | Canned motor pump purge device |
| KR19990008573A (en) * | 1997-07-02 | 1999-02-05 | 문정환 | Operation method of semiconductor nitride film deposition apparatus |
| WO2010142612A1 (en) * | 2009-06-08 | 2010-12-16 | Aker Subsea As | Filter arrangement |
| CN209901893U (en) * | 2019-04-26 | 2020-01-07 | 内蒙古佳瑞米精细化工有限公司 | Online cleaning device for dry-type screw vacuum pump |
| CN210799257U (en) * | 2019-08-16 | 2020-06-19 | 甘肃北方三泰化工有限公司 | Liquid chlorine shielding pump system |
| CN211259101U (en) * | 2019-10-30 | 2020-08-14 | 新疆东方希望新能源有限公司 | Cooling system for polycrystalline silicon tail gas recovery circulating shielding pump |
| CN212928321U (en) * | 2020-07-20 | 2021-04-09 | 山东宏旭化学股份有限公司 | Liquid ammonia canned pump priming device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114718914A (en) | 2022-07-08 |
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