CN114709129B - A mass analyzer system and mass spectrometer - Google Patents
A mass analyzer system and mass spectrometer Download PDFInfo
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- CN114709129B CN114709129B CN202210261209.8A CN202210261209A CN114709129B CN 114709129 B CN114709129 B CN 114709129B CN 202210261209 A CN202210261209 A CN 202210261209A CN 114709129 B CN114709129 B CN 114709129B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
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Abstract
本发明公开一种质量分析器系统，包括离子透镜组、分析电磁铁、以及检测器，所述离子透镜组、所述分析电磁铁、以及所述检测器采用非对称结构，离子透镜组与分析电磁铁之间的间距小于分析电磁铁与检测器之间的间距，且分析电磁铁的磁场中心偏转半径为200‑220mm，离子透镜组输出的离子进入分析电磁铁的入射角小于分析电磁铁输出的离子的出射角。本发明还公开一种质谱仪。本发明具有布局紧凑、占地空间小、质量轻等优点。
The present invention discloses a mass analyzer system, comprising an ion lens group, an analysis electromagnet, and a detector, wherein the ion lens group, the analysis electromagnet, and the detector adopt an asymmetric structure, the spacing between the ion lens group and the analysis electromagnet is smaller than the spacing between the analysis electromagnet and the detector, and the magnetic field center deflection radius of the analysis electromagnet is 200-220mm, and the incident angle of the ions output by the ion lens group entering the analysis electromagnet is smaller than the exit angle of the ions output by the analysis electromagnet. The present invention also discloses a mass spectrometer. The present invention has the advantages of compact layout, small footprint, light weight, etc.
Description
Technical Field
The invention belongs to the technical field of analysis, and particularly relates to a mass analyzer system and a mass spectrometer comprising the mass analyzer system.
Background
The thermal ionization mass spectrometry (TMS) is an analysis and test technology for accurately measuring the isotope abundance and the isotope abundance ratio of elements developed in the 70 th century, and compared with other analysis technologies, the thermal ionization mass spectrometry has the advantages of high accuracy, high precision and the like, and the thermal ionization mass spectrometer is widely applied to the fields of nuclear industry, environment, geology, archaeology and the like.
The mass analyzer system is a place for carrying out mass separation on ions with different mass to charge ratios, is an important component part of the thermal ionization mass spectrometer, and directly determines parameters such as sensitivity, mass resolution, mass dispersion, aberration and the like of the thermal ionization mass spectrometer, so that the actual analysis level of the thermal ionization mass spectrometer is influenced.
Currently, the manufacturers of the thermal ionization mass spectrometers worldwide mainly comprise three families of Siemens (Thermo F i sher), ametek and British isotope mass spectrometry (I sotopx), and the mass analyzer systems of the thermal ionization mass spectrometers produced by the three families have unique ion optical designs, and can achieve the purpose of mass spectrometry, but have the problems of large occupied space, large weight and inconvenience in arrangement. In addition, these thermal ionization mass spectrometers have the disadvantages of high energy consumption, low resolution, and the like.
Disclosure of Invention
The invention aims to solve the technical problems of the prior art and provides a mass analyzer system and a mass spectrometer, which have the advantages of compact layout, small occupied space and the like.
The technical scheme for solving the technical problems is as follows:
According to one aspect of the present invention, there is provided a mass analyzer system comprising an ion lens group, an analyzing electromagnet, and a detector, wherein the ion lens group, the analyzing electromagnet, and the detector adopt an asymmetric structure, a distance between the ion lens group and the analyzing electromagnet is smaller than a distance between the analyzing electromagnet and the detector, a deflection radius of a magnetic field center of the analyzing electromagnet is 200-220mm, and an incident angle of ions output by the ion lens group into the analyzing electromagnet is smaller than an exit angle of ions output by the analyzing electromagnet.
Preferably, the distance between the ion lens group and the analysis electromagnet is 450-480mm, the distance between the analysis electromagnet and the detector is 570-600mm, the incident angle of the analysis electromagnet is 27-30 degrees, and the exit angle of the analysis electromagnet is 29-32 degrees.
Preferably, the ion lens group includes an accelerator lens, an extractor lens, a focusing electrode X lens, a focusing electrode Z lens, an ion source outlet slit, an output lens, and a high-voltage power connector, the accelerator lens, the extractor lens, the focusing electrode X lens, the focusing electrode Z lens, the ion source outlet slit, and the output lens are sequentially arranged, the output lens is positioned near the analyzing electromagnet, and the high-voltage power connector is electrically connected with the accelerator lens, the extractor lens, the focusing electrode X lens, the focusing electrode Z lens, and the output lens, respectively, for providing a voltage.
Preferably, the voltage of the high-voltage power supply connector is below 10KV, and the width of the ion source outlet slit is 0.2mm.
Preferably, the high-voltage power connector includes a plurality of power supply modules, which are a first module, a second module, a third module, a fourth module, a fifth module, and a sixth module, respectively, wherein:
The first module is electrically connected with the accelerator lens and is used for providing a voltage range of 9900+/-100V for the accelerator lens;
the second module is electrically connected with the extraction electrode lens and is used for providing a voltage range of 8600+/-300V for the extraction electrode lens;
The third module is electrically connected with the focusing lens and is used for providing a voltage range of 9000+/-100V for the focusing lens;
The fourth module is electrically connected with the focusing electrode X lens and is used for providing a voltage range of 5000+/-100V for the focusing electrode X lens;
The fifth module is electrically connected with the focusing electrode Z lens and is used for providing a voltage range of 450+/-250V for the focusing electrode Z lens;
the sixth module is electrically connected with the output lens and is used for providing a voltage range of 1500+/-250V for the output lens.
Preferably, the analyzing electromagnet comprises a magnetic yoke, a pole shoe, a magnetic pole coil and a magnetic induction stabilizing coil, wherein the pole shoe is arranged in the magnetic yoke, the magnetic pole coil and the magnetic induction stabilizing coil are sleeved on the pole shoe, the magnetic induction stabilizing coil is positioned at one end close to a gap of the pole shoe, the magnetic pole coil is used for generating a magnetic field, and the magnetic induction stabilizing coil is used for compensating the magnetic field generated by the magnetic pole coil.
Preferably, the clearance of the pole shoe is 12-15mm, and the magnetic pole coil and the magnetic induction stabilizing coil are wound by adopting low-resistance enameled wires with current density smaller than 2A/mm 2.
Preferably, the number of faraday cups in the detector is more than eight, and the faraday cups are sequentially arranged in a row to form a focusing plane, wherein positions of the faraday cups at the most middle position are fixed, and positions of the rest faraday cups can move along the focusing plane.
Preferably, an included angle between the focusing plane and the ion transmission main optical axis of the analysis electromagnet is 20-30 degrees, and the width of the receiving slit of the Faraday cup is 0.8-1.0mm.
Preferably, the system further comprises a second focusing lens and a zoom lens, wherein the second focusing lens is arranged between the ion lens group and the analysis electromagnet and is used for optimizing the focusing effect of the ion beam output by the ion lens group, and the zoom lens is arranged between the analysis electromagnet and the detector and is used for improving the dispersion distance.
According to another aspect of the invention there is also provided a mass spectrometer comprising a mass analyser system as described above.
According to the mass analyzer system and the mass spectrometer, by adopting an asymmetric ion optical design, the related parameters such as the center orbit radius of the analysis electromagnet, the distance between the ion lens group and the analysis electromagnet, the distance between the analysis electromagnet and the detector and the like can be reduced, so that the structural layout of the whole system is compact, and the overall size and weight of the system can be effectively reduced. In addition, by improving the structural composition and parameters of the ion lens group, the analysis electromagnet and the detector, the resolution (more than 500), the ion transmission efficiency (more than 90%) and other performances can be improved, and the mass number range of 3-
The 280amu full-mass isotope analysis can reduce the power consumption and realize environmental protection and energy saving, the second focusing lens can further focus the ions in the X direction and the Y direction before the ions enter the analysis electromagnet, and the zoom lens can further adjust the mass dispersion distance of the ions after the mass separation of the analysis electromagnet, so that the receiving efficiency of the detector is improved.
Drawings
FIG. 1 is a schematic diagram of a mass analyzer system according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an ion lens assembly according to an embodiment of the invention;
FIG. 3 is a schematic diagram of an output lens according to an embodiment of the invention;
FIG. 4 is a schematic diagram of an analyzing electromagnet according to an embodiment of the present invention;
FIG. 5 is an exploded view of an analyzing electromagnet according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a detector according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of another mass analyzer system according to an embodiment of the invention;
FIG. 8 is a schematic diagram of a second focusing lens according to an embodiment of the present invention;
fig. 9 is a cross-sectional view of a second focusing lens in an embodiment of the invention.
In the figure, a 1-ion lens group, a 2-analysis electromagnet, a 3-detector, a 10-accelerator lens, a 11-extractor lens, a 12-focusing lens, a 13-focusing electrode X lens, a 14-focusing electrode Z lens, a 15-ion source outlet slit, a 16-output lens and a 20-magnetic yoke;
21-pole shoes, 22-magnetic induction stabilizing coils, 23-magnetic pole coils, 24-moving device, 30-Faraday cup, 31-secondary electron multiplier, 32-deflection electrodes and 33-high voltage connector;
41-pole, 161-first electrode, 162-second electrode, 163-third electrode, 164-fourth electrode.
Detailed Description
In order that those skilled in the art will better understand the technical solutions of the present invention, a clear and complete description of the technical solutions of the present invention will be provided below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.
In the description of the present invention, it should be noted that the orientation or positional relationship indicated by "upper" or the like is based on the orientation or positional relationship shown in the drawings, and is merely for convenience and simplicity of description, and is not meant to indicate or imply that the apparatus or element to be referred to must be provided with a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In the description of the present invention, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more of the described features. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the description of the present invention, unless explicitly stated and limited otherwise, the terms "connected," "configured," "mounted," "secured," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected, or may be directly connected, or may be indirectly connected through an intermediate medium, or may be in communication with the interior of two elements. The specific meaning of the above terms in the present invention will be understood by those skilled in the art in specific cases.
Example 1
As shown in FIG. 1, the present embodiment discloses a mass analyzer system which can be used in Thermal Ionization Mass Spectrometers (TIMS), multi-receiving inductively coupled plasma mass spectrometers (MC-ICP-
MS), and the like, which includes an ion lens group 1, an analyzing electromagnet 2, and a detector 3, wherein the ion lens group 1, the analyzing electromagnet 2, and the detector 3 adopt an asymmetric structure, a distance between the ion lens group 1 and the analyzing electromagnet 2 is smaller than a distance between the analyzing electromagnet 2 and the detector 3, a deflection radius of a magnetic field center of the analyzing electromagnet 2 is 200-220mm, and an incident angle of ions output by the ion lens group 1 into the analyzing electromagnet is smaller than an exit angle of ions output by the analyzing electromagnet.
Specifically, the ion lens group 1 is used for adjusting and focusing ions, the analyzing electromagnet 2 is used for providing a magnetic field with stable and adjustable intensity, and the detector 3 is used for measuring the intensity of the ion beam current. The distance between the ion lens group 1 and the analysis electromagnet 2 is 450-480mm, and the distance between the analysis electromagnet 2 and the detector 3 is 570-600mm. The incidence angle range of the ions output by the ion lens group 1 to the analysis electromagnet is 27-30 degrees, and the emergence angle range of the ions output by the analysis electromagnet is 29-32 degrees.
The principle of the mass analyzer system is that the uniform magnetic field is utilized to spatially separate mass-to-charge ratio m/e according to the difference of lorentz forces applied to ions of different masses entering an analyzing electromagnet;
According to the acceleration equation of ions in an electric field and the lorentz force equation in a magnetic field:
the ionic mass to charge ratio is:
Wherein q represents the number of charges carried by the ions, U 0 represents the accelerating voltage, m represents the mass of the ions, B represents the magnetic field strength, V represents the velocity of the ions, and r m represents the center deflection radius of the magnetic field;
When the accelerating voltage U 0 and the magnetic field intensity B are regulated to proper values, ions with different mass-to-charge ratios (m/q) realize different deflection radiuses, then reach different Faraday cups, and the detector is used for measuring the intensity of the ion beam.
In this embodiment, the distance between the ion lens group 1 and the analyzing electromagnet 2 is preferably 430mm, the distance between the analyzing electromagnet 2 and the detector 3 is preferably 580mm, the incident angle of the ion analyzing electromagnet output by the ion lens group is preferably 28 °, and the exit angle of the ion output by the analyzing electromagnet is preferably 30 °.
Compared with the prior art, the ion lens group 1 of the present embodiment has an output lens 16 added thereto, that is, as shown in fig. 2, the ion lens group 1 includes an accelerator lens 10, an extractor lens 11, a focusing lens 12, a focusing electrode X lens 13, a focusing electrode Z lens 14, an ion source outlet slit 15, an output lens 16, and a high-voltage power supply connector electrically connected to the accelerator lens 10, the extractor lens 11, the focusing lens 12, the focusing electrode X lens 13, the focusing electrode Z lens 14, the ion source outlet slit 15, and the output lens 16 in order, in parallel, the output lens 16 being positioned close to the analyzing electromagnet 2, respectively, for supplying voltages to the aforementioned lenses.
In particular, the width of the ion source outlet slit 15 may be 0.2-0.3mm, preferably 0.2mm, and the spacing between the ion source outlet slit 15 and the analyzing electromagnet 2 may be 420-440mm, preferably 430mm. The output lens 16 is connected with the ion source outlet slit 15 through stainless steel support rods, positioning ceramics, fastening bolts and other components, and can adjust and correct the ion beam before entering the magnetic field in the analysis electromagnet so as to improve the ion transmission efficiency (more than 90%).
The range of the voltage which can be provided by the high-voltage power connector is preferably 0-10KV, namely, the voltage of the high-voltage power connector is below 10KV, or the maximum voltage of the high-voltage power connector is 10KV, and the maximum ion acceleration voltage of the ion lens group is 10KV, and the ion lens group can be specifically adjusted according to actual requirements.
In this embodiment, the high voltage power connector includes a plurality of modules, namely, a first module, a second module, a third module, a fourth module, a fifth module, and a sixth module (not shown in the figure), wherein the first module is electrically connected to the accelerator lens 10, the range of voltages supplied to the accelerator lens is 9900.+ -.100V, preferably 9900V, the second module is electrically connected to the extractor lens 11, the range of voltages supplied to the extractor lens is 8600.+ -.300V, preferably 8600V, the third module is electrically connected to the focusing lens 12, the range of voltages supplied to the focusing lens is 9000.+ -.100V, preferably 9000V, the fourth module is electrically connected to the focusing lens 13, the range of voltages supplied to the focusing lens is 5000.+ -.100V, preferably 5000V, the fifth module is electrically connected to the focusing lens 14, the range of voltages supplied to the focusing lens Z is 450.+ -.250V, preferably 450V, the range of voltages supplied to the focusing lens is preferred, and the sixth module is electrically connected to the focusing lens 12, preferably 1500V, and the range of voltages supplied to the output lens is 1500V. By providing a plurality of modules to supply voltages to the accelerator lens 10, the extractor lens 11, the focusing lens 12, the focusing electrode X lens 13, the focusing electrode Z lens 14, and the output lens 16, respectively, optimal focusing and transmission effects of the ion beam can be facilitated.
In this embodiment, as shown in fig. 3, the output lens 16 includes four electrodes, namely, a first electrode 161, a second electrode 162, a third electrode 163, and a fourth electrode 164, wherein the first electrode 161 and the second electrode 162 are arranged in a group, and the first electrode 161 and the second electrode 162 are opposite to each other and are in a first direction, the voltage between the first electrode 161 and the second electrode 162 is preferably 0-190V, the third electrode 163 and the fourth electrode 164 are arranged in another group, and the third electrode 163 and the fourth electrode 164 are opposite to each other and are in a second direction, and the second direction is perpendicular to the first direction, and the voltage between the third electrode 163 and the fourth electrode 164 is preferably 0-190V.
The analyzing electromagnet 2 of the present embodiment has added thereto the magnetic induction stabilizing coil 22, compared with the prior art. As shown in fig. 4 and 5, the analyzing electromagnet 2 in this embodiment includes a yoke 20, a pole shoe 21, a pole coil 23, a magnet power supply, and a magnetic induction stabilizing coil 22, wherein the pole shoe 21 is disposed in the yoke 20, the pole coil 23 and the magnetic induction stabilizing coil 22 are sleeved on the pole shoe 21, the magnetic induction stabilizing coil 22 is disposed at one end near a gap of the pole shoe, the pole coil 23 is used for generating a magnetic field, the magnetic induction stabilizing coil 22 is used for compensating the magnetic field generated by the pole coil 23 by a small magnitude during readjustment process so as to improve magnetic field stability, and the magnet power supply is respectively connected with the pole coil 23 and is used for providing a stable and adjustable current for the pole coil.
In particular, the magnetic field center deflection radius (also referred to as "center orbit radius") of the analyzing electromagnet 2 may be 200-220mm, preferably 200mm, which is significantly reduced compared to the prior art (260 mm or more), which is advantageous for reducing the weight of the analyzing electromagnet. The yoke 20 and pole piece 21 are preferably made of DT4 pure iron. The gap of the pole pieces in the analyzing electromagnet 2, i.e. the air gap, may be 12-15mm, preferably 14mm. The incident angle of the ions output by the ion transmission electron microscope into the analyzing electromagnet 2 is preferably 28 °, and the exit angle of the ions output by the analyzing electromagnet 2 is preferably 30 °. The polar head of the emergent surface in the analysis electromagnet 2 adopts an arc surface design, and the radius r of the arc surface can be 600-700mm, preferably 665mm, so as to improve the ion focusing effect.
The magnetic pole coil 23 and the magnetic induction stabilizing coil 22 are preferably wound by low-resistance enameled wires with current density less than 2A/mm 2, so that the heating of the windings is reduced, and compared with the prior art, a cooling water machine is not required to be arranged, so that the power consumption of an instrument is reduced. The number of the magnetic pole coils 23 and the magnetic induction stabilizing coils 22 is two, and the two coils are connected in parallel. The magnet power supply is designed by conventional standard components, the output current of the magnet power supply to the magnetic pole coil 23 is preferably 0.2-16A, and the uniformity of the magnetic field generated by the magnetic pole coil 23 is less than 50ppm.
Through the arrangement, the amplification factor (M) of the analysis electromagnet 2 can reach 1.5, the accuracy is high, the continuous stable and adjustable magnetic field intensity between 0 and 1.24T can be realized, and the accurate measurement of the abundance and the abundance ratio of elements in the full mass number range of 3-280amu can be satisfied.
And, the bottom of analysis electro-magnet can be equipped with mobile device 24, through mobile device's drive to realize the leveling of analysis electro-magnet in horizontal and vertical direction.
In this embodiment, the moving device 24 includes a horizontal adjusting unit and a vertical adjusting unit (not shown in the drawings), wherein the horizontal adjusting unit may include a horizontal guide rail, the analyzing electromagnet is disposed on the horizontal guide rail and can slide along the horizontal guide rail to adjust the position of the analyzing electromagnet in the horizontal direction, and the vertical adjusting unit may also adopt the same or similar structure as the horizontal adjusting unit, which is not described herein again, to adjust the position of the analyzing electromagnet in the horizontal direction.
Compared with the prior art, as shown in fig. 6, the detector in this embodiment also includes components such as a faraday cup 30, a secondary electron multiplier 31, a deflection electrode 32, a high-voltage connector 33, and a detector housing (not shown in the figure), in which the internal cavity is in a vacuum state, and the faraday cup 30, the secondary electron multiplier 31, the deflection electrode 32, and the high-voltage connector 33 are disposed in the detector housing, and the wiring manner is the same as that of the prior art, and is not repeated here, and the difference is that:
the gain multiple of the secondary electron multiplier 31 is 10 6, and the high-resistance value of the amplifier of the faraday cup 30 is 10 11 Ω, so that the size of the vacuum cavity in the detector housing (the diameter of the vacuum cavity can reach about 300 mm) can be reduced as much as possible on the premise of ensuring the performance requirement, thereby reducing the power consumption.
The number of secondary electron multipliers 31 may be one or more, and commercially available delhi detectors may be used. The number of faraday cups 30 is a plurality, for example, 8 or more, the faraday cups 30 are sequentially arranged in a row, the receiving slits of the faraday cups are oriented uniformly to form a focusing plane, wherein the positions of the faraday cups 30 in the most middle order are fixed, specifically, when the number of faraday cups 30 is an odd number, the positions of the faraday cups in the middle order are fixed, when the number of faraday cups 30 is an even number, the positions of any one of the two faraday cups 30 in the middle order are fixed, for example, when the number of faraday cups 30 is 8, the positions of the fourth and/or fifth faraday cups are fixed, and the positions of the rest faraday cups 30 can be moved along the focusing plane direction to adjust the positions of the faraday cups according to the analyzed elements, thereby ensuring sensitivity and accuracy.
The faraday cup 30 has a conventional structure, and is composed of a receiving slit, a suppression pole, an insulating block, and a housing, and is generally rectangular box-shaped, with one side of the faraday cup being opened for receiving an ion beam, and the other sides being sealed.
In this embodiment, the width of the receiving slit of the faraday cup 30 is preferably 0.8-1.0mm, the movement range of the positions of the rest faraday cups 30 except for the most middle position (for example, when the number of faraday cups is eight, the most middle position refers to the fourth faraday cup and/or the fifth faraday cup) is preferably 0-44mm, the size of the faraday cup 30 is preferably 12×2×1mm, the faraday cup 30 may be made of stainless steel or high-purity graphite, the adjustment precision of the single faraday cup 30 may be 10 μm, the adjustment mode may be manually adjusted by using a stepper motor or a worm gear guide rail, and the included angle between the focusing plane formed by the arrangement of the faraday cups 30 and the ion transmission main optical axis of the analyzing electromagnet 2 may be 20-30 °, preferably 25 °.
With the above arrangement, when the amplifier high resistance of the faraday cup 30 is 10 11 Ω, the faraday cup 30 can detect an ion current of 6.0×10 -14A-2.7×10-10 a, and the secondary electron multiplier 31 (SEM) can detect an ion current as low as 1.6×10 -18 a.
According to the mass analyzer system, through adopting an asymmetric ion optical design, related parameters such as the center orbit radius of the analyzing electromagnet, the distance between the ion lens group and the analyzing electromagnet, the distance between the analyzing electromagnet and the detector and the like can be reduced, so that the structural layout of the whole system is compact, and the overall size and weight of the system are effectively reduced. In addition, through improving the structural composition and parameters of the ion lens group, the analysis electromagnet and the detector, the method not only can improve the performances of resolution (more than 500), ion transmission efficiency (more than 90 percent) and the like, realize the isotope analysis of the total mass number in the mass number range of 3-280amu, but also can reduce the power consumption and realize environmental protection and energy saving.
Example 2
The embodiment discloses a mass analyzer system, which is different from embodiment 1 in that, as shown in fig. 7, the mass analyzer system further comprises a second focusing lens 4 and a zoom lens 5, wherein the second focusing lens 4 is arranged between the ion lens group 1 and the analyzing electromagnet 2 and is used for optimizing the focusing effect of ion beams output by the ion lens group, improving the flat-top peak effect and further improving the transmission efficiency, and the zoom lens 5 is arranged between the analyzing electromagnet 2 and the detector 3 and is used for improving the dispersion distance so as to improve the peak covering capacity between a plurality of groups of ion beams and a plurality of Faraday cup receivers.
In particular, the second focusing lens 4 is preferably disposed close to the inlet of the analyzing electromagnet 2, and the zoom lens 5 is preferably disposed close to the outlet of the analyzing electromagnet 2, and it should be noted that, since the second focusing lens 4 and the zoom lens 5 only function to optimize the focusing effect of the ion beam and improve the dispersion of the mass analyzer system, the final focusing image point (i.e., faraday cup receiving position) of the ion beam is not affected, and therefore, the second focusing lens 4 and the zoom lens 5 may be disposed at other positions than the above positions, and may be flexibly selected according to the needs.
As shown in fig. 8 and 9, the second focusing lens 4 adopts an electrostatic four-pole lens, which includes four pole poles 41, wherein two pole poles 41 are oppositely disposed in the same direction (e.g., horizontal direction, i.e., x-axis direction), the other two pole poles 41 are oppositely disposed in the other direction (e.g., vertical direction, i.e., y-axis direction), and an included angle between the center of the adjacent pole 41 and the center of an inscribed circle surrounded by the four pole poles 41 is 90 °. If the positive voltage is applied to the two pole bars 41 in the horizontal direction, the negative voltage of the same magnitude is applied to the two pole bars 41 in the vertical direction, whereas if the negative voltage is applied to the two pole bars 41 in the horizontal direction, the positive voltage of the same magnitude is applied to the two pole bars 41 in the vertical direction, and the applied voltage is preferably within the range of 0±20V.
The zoom lens 5 may employ any one of a four-stage rod, a six-stage rod, an eight-stage rod, and a twelve-stage rod to fine-tune the mass dispersion of the ion beam within ±5%. The zoom lens 5 is similar to the second focus lens in the voltage application manner, and includes, for example, six second poles, an x terminal, and a y terminal, one end of each second pole is connected to the x terminal, the other end of each second pole is connected to the y terminal, if a positive voltage is applied to the six poles at the x terminal, a negative voltage of the same magnitude is applied to the six poles at the y terminal, whereas if a negative voltage is applied to the six poles at the x terminal, a positive voltage of the same magnitude is applied to the six poles at the y terminal, and the applied voltage is preferably within a range of 0±50V.
More specifically, each of the second focusing lens 4 and the zoom lens 5 may be a circular pole, a semicircular pole, or any one of a hyperboloid pole, a rod pole, and a planar pole. If the pole is a cylindrical pole, the radius of the cylindrical pole is 1.1-1.2 times of the radius of the inscribed circle surrounded by each pole, and the length of the pole should be not less than 3 times of the radius of the inscribed circle, and if the pole is other types of poles, the radius and length of the pole can be designed to be equivalent to those of the pole (cylindrical pole), and the detailed description is omitted here.
The mass analyzer system of this embodiment has all the advantages of the mass analyzer system of embodiment 1, and, due to the addition of the second focusing lens and the zoom lens, the second focusing lens can further focus the ions in the X direction and the Y direction before the ions enter the analyzing electromagnet, and the zoom lens can further adjust the mass dispersion distance of the ions after mass separation of the analyzing electromagnet, so that the receiving efficiency of the detector can be improved finally.
Example 3
This example discloses a mass spectrometer comprising an ion source, a shielded glove box, and the mass analyzer system described in example 1.
Specifically, the mass spectrometer of the embodiment can be a Thermal Ionization Mass Spectrometer (TIMS) or a multi-receiving inductively coupled plasma mass spectrometer (MC-ICP-MS), wherein the detection process comprises the steps of extracting ions generated by an ion source through an ion lens group 1, accelerating, focusing and shaping, enabling the ions to reach an analysis electromagnet 2, separating the ions with different masses in a sector magnetic field generated by the analysis electromagnet 2, and finally enabling the ions to reach a detector 3 for ion beam intensity detection.
The ion lens group 1, the analysis electromagnet 2 and the detector 3 in the mass analyzer system are preferably arranged in sequence from right to left, compared with the arrangement from left to right adopted by the ion lens group 1, the analysis electromagnet 2 and the detector 3 in the prior art, the ion source is opened from right, so that the ion source and a shielding glove box can be conveniently sealed.
The mass spectrometer of the embodiment has the advantages of compact structural layout, small volume, light weight, complete machine weight reduced to 1000Kg, low power consumption, 3.5kW rated power reduced by about half compared with the prior art, high resolution up to more than 500, high ion transmission efficiency up to more than 90%, amplification factor (M) up to 1.5, and realization of isotope analysis with the mass number ranging from 3 amu to 280 amu.
It is to be understood that the above embodiments are merely illustrative of the application of the principles of the present invention, but not in limitation thereof. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the invention, and are also considered to be within the scope of the invention.
Claims (10)
1. The mass analyzer system comprises an ion lens group (1), an analyzing electromagnet (2) and a detector (3), and is characterized in that the ion lens group, the analyzing electromagnet and the detector adopt asymmetric structures, the distance between the ion lens group and the analyzing electromagnet is smaller than the distance between the analyzing electromagnet and the detector, the deflection radius of the magnetic field center of the analyzing electromagnet is 200-220mm, and the incident angle of ions output by the ion lens group entering the analyzing electromagnet is smaller than the exit angle of ions output by the analyzing electromagnet;
The distance between the ion lens group and the analysis electromagnet is 450-480mm, the distance between the analysis electromagnet and the detector is 570-600mm, the incident angle of the analysis electromagnet is 27-30 degrees, and the exit angle of the analysis electromagnet is 29-32 degrees.
2. The mass analyzer system of claim 1, wherein the ion lens group comprises an accelerator lens (10), a extractor lens (11), a focusing lens (12), a focusing X-lens (13), a focusing Z-lens (14), an ion source outlet slit (15), an output lens (16), and a high voltage power connector,
The accelerator lens, the extractor lens, the focusing lens X, the focusing lens Z, the ion source outlet slit and the output lens are sequentially arranged, and the output lens is positioned close to the analysis electromagnet;
The high-voltage power connector is electrically connected with the accelerator lens, the extractor lens, the focusing electrode X lens, the focusing electrode Z lens, and the output lens, respectively, for providing a voltage.
3. The mass analyzer system of claim 2, wherein the high voltage power connector has a voltage of 10KV or less and the ion source outlet slit has a width of 0.2mm.
4. The mass analyzer system of claim 2, wherein the high voltage power connector comprises a plurality of power supply modules, first, second, third, fourth, fifth, and sixth respectively,
The first module is electrically connected with the accelerator lens and is used for providing a voltage range of 9900+/-100V for the accelerator lens;
the second module is electrically connected with the extraction electrode lens and is used for providing a voltage range of 8600+/-300V for the extraction electrode lens;
The third module is electrically connected with the focusing lens and is used for providing a voltage range of 9000+/-100V for the focusing lens;
The fourth module is electrically connected with the focusing electrode X lens and is used for providing a voltage range of 5000+/-100V for the focusing electrode X lens;
The fifth module is electrically connected with the focusing electrode Z lens and is used for providing a voltage range of 450+/-250V for the focusing electrode Z lens;
the sixth module is electrically connected with the output lens and is used for providing a voltage range of 1500+/-250V for the output lens.
5. The mass analyzer system of claim 1, wherein the analyzing electromagnet comprises a yoke (20), a pole piece (21), a pole coil (23), and a magnetic induction stabilizing coil (22),
The pole shoe is arranged in the magnetic yoke, the magnetic pole coil and the magnetic induction stabilizing coil are sleeved on the pole shoe, the magnetic induction stabilizing coil is positioned at one end close to a gap of the pole shoe, the magnetic pole coil is used for generating a magnetic field, and the magnetic induction stabilizing coil is used for compensating the magnetic field generated by the magnetic pole coil.
6. The mass analyzer system of claim 5, wherein the pole shoe has a gap of 12-15mm, and the pole coil and the magnetically induced stabilizing coil are each wound with a low resistance enameled wire having a current density of less than 2A/mm 2.
7. A mass analyser system according to claim 1, wherein the number of faraday cups (30) in the detector is more than eight, each faraday cup being arranged in a sequence in order to form a focal plane, wherein the positions of the faraday cups in the most intermediate position are fixed and the positions of the remaining faraday cups are movable in the direction of the focal plane.
8. The mass analyzer system of claim 7, wherein the angle between the focal plane and the ion transport primary optical axis of the analyzing electromagnet is 20-30 ° and the faraday cup has a receiving slit width of 0.8-1.0mm.
9. The mass analyser system according to any one of claims 1-8, further comprising a second focusing lens (4) and a zoom lens (5),
The second focusing lens is arranged between the ion lens group and the analysis electromagnet and is used for optimizing the focusing effect of the ion beam output by the ion lens group;
The zoom lens is arranged between the analysis electromagnet and the detector and is used for improving the dispersion distance.
10. A mass spectrometer comprising the mass analyser system of any of claims 1-9.
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| CN117310783B (en) * | 2023-11-08 | 2025-11-04 | 上海艾普强粒子设备有限公司 | An apparatus and method for measuring the energy distribution of a proton beam. |
| CN117990192B (en) * | 2024-04-07 | 2024-06-04 | 米谱科技(常州)有限公司 | Box assembly, balance device and leveling method thereof |
| CN118692889B (en) * | 2024-06-25 | 2025-10-03 | 四川紫璞科技有限责任公司 | A rare gas isotope mass spectrometer ion source |
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| JPH05166482A (en) * | 1991-12-16 | 1993-07-02 | Nissin Electric Co Ltd | Ion implantation device |
| CN214226862U (en) * | 2020-12-30 | 2021-09-17 | 四川红华实业有限公司 | 2.5 times magnetic mass dispersion system |
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| JPS5520637B2 (en) * | 1973-05-07 | 1980-06-04 | ||
| DE2461224C3 (en) * | 1974-12-23 | 1978-10-12 | Kernforschungsanlage Juelich Gmbh, 5170 Juelich | Position-sensitive detector for the detection of ions in the focal plane of a magnet of a mass spectrometer |
| CN100561221C (en) * | 2005-08-19 | 2009-11-18 | 北京大学 | A kind of accelerator mass spectrometry device and accelerator mass spectrometry 14The C measuring method |
| CN111190215B (en) * | 2018-11-15 | 2022-02-15 | 北京中科信电子装备有限公司 | Bidirectional focusing mass analyzer |
| CN215069877U (en) * | 2021-02-25 | 2021-12-07 | 北京衡昇仪器有限公司 | Double-focusing quadrupole ion right-angle deflection device for plasma mass spectrometer |
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| JPH05166482A (en) * | 1991-12-16 | 1993-07-02 | Nissin Electric Co Ltd | Ion implantation device |
| CN214226862U (en) * | 2020-12-30 | 2021-09-17 | 四川红华实业有限公司 | 2.5 times magnetic mass dispersion system |
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