CN114698410A - 超声换能单元及其制备方法 - Google Patents
超声换能单元及其制备方法 Download PDFInfo
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- CN114698410A CN114698410A CN202080002544.5A CN202080002544A CN114698410A CN 114698410 A CN114698410 A CN 114698410A CN 202080002544 A CN202080002544 A CN 202080002544A CN 114698410 A CN114698410 A CN 114698410A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/50—Application to a particular transducer type
- B06B2201/51—Electrostatic transducer
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Multimedia (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Abstract
本申请公开一种超声换能单元及其制备方法，其中所述超声换能单元包括：基底；设置在基底上的第一电极；设置在第一电极上的绝缘层；设置在绝缘层上的振膜层,其中所述振膜层和所述绝缘层之间形成有封闭空腔；以及设置在振膜层上的第二电极；其中，所述振膜层的材料为光刻胶。本公开的超声换能单元采用光刻胶作为绝缘层和/或振膜层的材料，可以获得性能更加好的超声换能单元。
Description
PCT国内申请，说明书已公开。
Claims (20)
- PCT国内申请，权利要求书已公开。
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2020/125147 WO2022088015A1 (zh) | 2020-10-30 | 2020-10-30 | 超声换能单元及其制备方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114698410A true CN114698410A (zh) | 2022-07-01 |
| CN114698410B CN114698410B (zh) | 2023-12-01 |
Family
ID=81383494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202080002544.5A Active CN114698410B (zh) | 2020-10-30 | 2020-10-30 | 超声换能单元及其制备方法 |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN114698410B (zh) |
| WO (1) | WO2022088015A1 (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20220347721A1 (en) * | 2020-10-30 | 2022-11-03 | Boe Technology Group Co., Ltd. | Ultrasonic transducer unit and manufacturing method thereof |
| US12030084B2 (en) * | 2020-10-30 | 2024-07-09 | Boe Technology Group Co., Ltd. | Ultrasonic transducer unit and manufacturing method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102728535A (zh) * | 2011-04-06 | 2012-10-17 | 佳能株式会社 | 电气机械换能器及其制造方法 |
| CN106658317A (zh) * | 2016-11-21 | 2017-05-10 | 歌尔股份有限公司 | 一种mems发声装置及电子设备 |
| CN107511318A (zh) * | 2017-09-28 | 2017-12-26 | 瑞声科技(新加坡)有限公司 | 压电超声换能器及其制备方法 |
| CN111003684A (zh) * | 2019-03-02 | 2020-04-14 | 天津大学 | 释放孔位于封装空间内的mems器件的封装 |
| US20200123005A1 (en) * | 2017-06-30 | 2020-04-23 | Canon Kabushiki Kaisha | Method for producing hollow structure and hollow structure |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016209489B3 (de) * | 2016-05-31 | 2017-08-17 | Robert Bosch Gmbh | Mikroelektromechanische Detektorvorrichtung und entsprechendes Herstellungsverfahren |
| CN111377389B (zh) * | 2020-03-25 | 2024-03-05 | 京东方科技集团股份有限公司 | 超声换能器件及制备方法 |
-
2020
- 2020-10-30 CN CN202080002544.5A patent/CN114698410B/zh active Active
- 2020-10-30 WO PCT/CN2020/125147 patent/WO2022088015A1/zh active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102728535A (zh) * | 2011-04-06 | 2012-10-17 | 佳能株式会社 | 电气机械换能器及其制造方法 |
| CN106658317A (zh) * | 2016-11-21 | 2017-05-10 | 歌尔股份有限公司 | 一种mems发声装置及电子设备 |
| US20200123005A1 (en) * | 2017-06-30 | 2020-04-23 | Canon Kabushiki Kaisha | Method for producing hollow structure and hollow structure |
| CN107511318A (zh) * | 2017-09-28 | 2017-12-26 | 瑞声科技(新加坡)有限公司 | 压电超声换能器及其制备方法 |
| CN111003684A (zh) * | 2019-03-02 | 2020-04-14 | 天津大学 | 释放孔位于封装空间内的mems器件的封装 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20220347721A1 (en) * | 2020-10-30 | 2022-11-03 | Boe Technology Group Co., Ltd. | Ultrasonic transducer unit and manufacturing method thereof |
| US12030084B2 (en) * | 2020-10-30 | 2024-07-09 | Boe Technology Group Co., Ltd. | Ultrasonic transducer unit and manufacturing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| US20220347721A1 (en) | 2022-11-03 |
| CN114698410B (zh) | 2023-12-01 |
| WO2022088015A1 (zh) | 2022-05-05 |
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